CN108396284A - A kind of PCB drill bits and its manufacturing method with resistance to oxidation hard lubricant coating - Google Patents
A kind of PCB drill bits and its manufacturing method with resistance to oxidation hard lubricant coating Download PDFInfo
- Publication number
- CN108396284A CN108396284A CN201810438565.6A CN201810438565A CN108396284A CN 108396284 A CN108396284 A CN 108396284A CN 201810438565 A CN201810438565 A CN 201810438565A CN 108396284 A CN108396284 A CN 108396284A
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- China
- Prior art keywords
- coating
- oxidation
- hard
- drill bit
- resistance
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000000576 coating method Methods 0.000 title claims abstract description 170
- 239000011248 coating agent Substances 0.000 title claims abstract description 153
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 95
- 230000003647 oxidation Effects 0.000 title claims abstract description 90
- 239000000314 lubricant Substances 0.000 title claims abstract description 63
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- -1 aluminium titanium nitrogen Chemical compound 0.000 claims description 15
- 239000004411 aluminium Substances 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 8
- 239000010432 diamond Substances 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 5
- FUWMBNHWYXZLJA-UHFFFAOYSA-N [Si+4].[O-2].[Ti+4].[O-2].[O-2].[O-2] Chemical compound [Si+4].[O-2].[Ti+4].[O-2].[O-2].[O-2] FUWMBNHWYXZLJA-UHFFFAOYSA-N 0.000 claims description 5
- QDMRQDKMCNPQQH-UHFFFAOYSA-N boranylidynetitanium Chemical compound [B].[Ti] QDMRQDKMCNPQQH-UHFFFAOYSA-N 0.000 claims description 5
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 5
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 5
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 claims description 4
- PTISTKLWEJDJID-UHFFFAOYSA-N sulfanylidenemolybdenum Chemical compound [Mo]=S PTISTKLWEJDJID-UHFFFAOYSA-N 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 8
- 230000006872 improvement Effects 0.000 description 7
- 239000011247 coating layer Substances 0.000 description 6
- 238000005553 drilling Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B51/00—Tools for drilling machines
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
- C23C14/0611—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/305—Sulfides, selenides, or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/38—Borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Drilling Tools (AREA)
Abstract
The invention belongs to the technical fields of drill bit, more particularly to a kind of PCB drill bits with resistance to oxidation hard lubricant coating, including drillstock (5) and with the drillstock (5) integrally formed drill bit (4), the surface of the drill bit (4) is coated with hard coat (1), the surface of the hard coat (1) is coated with lubricant coating (2), and the surface of the lubricant coating (2) is coated with oxidation-resistant coating (3).The present invention is using the scheme for increasing oxidation-resistant coating, lubricant coating and hard coat, wearability and lubricity can be taken into account, it promotes the wearability of drill bit and improves the chip removal ability of drill bit, oxidative resistance is also taken into account simultaneously, alleviate oxidation reaction when converted products, it realizes the service life for extending PCB drill bits, reduces the cost of processing PCB plate.In addition, the invention also discloses a kind of manufacturing methods of the PCB drill bits with resistance to oxidation hard lubricant coating.
Description
Technical field
The invention belongs to the technical fields of drill bit, and in particular to a kind of PCB drill bits with resistance to oxidation hard lubricant coating
And its manufacturing method.
Background technology
Plate for drilling printed drill bit is generally used hard alloy, because epoxy glass fabric answers abrasion of the copper foil plate to cutter
Especially fast, hard alloy is to make that binder is pressurized, is sintered using tungsten-carbide powder as matrix with cobalt powder, due to its hardness
It is very high, it is extremely abrasive, it is suitable for high-speed cutting, but poor toughness, it is highly brittle, but due to PCB material characteristic, the drill bit of hard alloy
Penetration rate, drilling quality and bit life be not so good as people's will.Some uses one layer of spy of chemical vapor deposition on carbonized matrix
Hard titanium carbide or titanium nitride, make it have higher hardness, titanium, nitrogen and carbon are injected its matrix by some ion implantation techniques
Certain depth.
In addition, Chinese patent literature discloses a kind of PCB carbide drill (publication numbers with diamond coatings：CN
205165990 U), cemented carbide body surface is coated with diamond coatings, between diamond coatings and cemented carbide body
If silicon carbide transition zone.Said program improves service life to a certain extent, but these types of scheme at least there is also with
Lower defect：First, coating does not take into account wearability, also extremely limited in the service life for promoting drill bit, and second, hence it is evident that reduce
The chip removal ability of drill bit, the phenomenon that leading to " twining silk ", and then reduce the drilling hole position precision of drill bit, third, due to not having oxytolerant
Change layer, is further exacerbated by oxidation reaction when converted products.
Invention content
It is an object of the present invention to：In view of the deficiencies of the prior art, it provides a kind of with the lubrication painting of resistance to oxidation hard
The PCB drill bits of layer promote the service life of drill bit and improve the chip removal ability of drill bit can take into account wearability and lubricity,
Oxidative resistance has also been taken into account simultaneously, alleviates oxidation reaction when converted products.
To achieve the goals above, the present invention adopts the following technical scheme that：
A kind of PCB drill bits with resistance to oxidation hard lubricant coating, including drillstock and with the integrally formed drill bit of the drillstock, institute
The surface for stating drill bit is coated with hard coat, and the surface of the hard coat is coated with lubricant coating, the table of the lubricant coating
Face is coated with oxidation-resistant coating.The present invention is higher and higher to the service life requirement of PCB drill bits for customer, using increase oxytolerant
The scheme for changing coating, lubricant coating and hard coat, can take into account wearability and lubricity, promote the abrasive resistance of drill bit and carry
The chip removal ability of high drill bit, while oxidative resistance has also been taken into account, alleviate oxidation reaction when converted products, realizes that extending PCB bores
The service life of head reduces the cost of processing PCB plate.
It is described hard as a kind of a kind of improvement of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention
Matter coating layer thickness is 0.8um-1.6um.Hard coat is limited into range, prevent due to hard coat it is blocked up increase plated film at
This, while preventing hard coat is excessively thin from abrasive resistance being caused to reduce, influence service life.
It is described hard as a kind of a kind of improvement of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention
Matter coating layer thickness is 1um.The thickness for further determining that hard coat contributes to quick arrange parameter value, while avoiding instrument not
The parameter input of compatible range class.
As a kind of a kind of improvement of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention, the profit
Sliding coating layer thickness is 0.1um-0.3um.Lubricant coating is limited into range, prevent due to lubricant coating it is blocked up increase plated film at
This, while preventing lubricant coating is excessively thin from chip removal ability being caused to reduce, reduce the hole position precision of drilling.
As a kind of a kind of improvement of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention, the profit
Sliding coating layer thickness is 0.23um.The thickness for further determining that lubricant coating contributes to quick arrange parameter value, while avoiding instrument
The parameter of incompatible range class inputs.
It is described resistance to as a kind of a kind of improvement of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention
Oxide covering thickness is 0.1um-0.8um.Oxidation-resistant coating is limited into range, is prevented due to the blocked up increase plated film of oxidation-resistant coating
Cost, while preventing oxidation-resistant coating is excessively thin from oxidation resistance being caused to reduce, oxidation when being further exacerbated by converted products is anti-
It answers.
It is described resistance to as a kind of a kind of improvement of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention
Oxide covering thickness is 0.5um.The thickness for further determining that oxidation-resistant coating contributes to quick arrange parameter value, avoids simultaneously
The parameter of the incompatible range class of instrument inputs.
As a kind of a kind of improvement of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention, further include
Interconnecting piece, the drill bit are connect by the interconnecting piece with the drillstock, and the drill bit, the interconnecting piece and the drillstock are all provided with
It is set to cylindrical structure, the diameter of the drillstock is more than the diameter of the interconnecting piece, and the diameter of the interconnecting piece is more than the drill bit
Diameter, the drill bit include bore ontology, be arranged it is described bore body outer surface chip space and be arranged in the brill ontology one
The apex point at end, the chip space are helical form.Since split structure does not influence other positions when partial structurtes are lost
Normal use, increase chip space, so that chip is easily drained, improve the precision of drilling.
The second object of the present invention is to additionally provide a kind of manufacture of the PCB drill bits with resistance to oxidation hard lubricant coating
Method includes the following steps：
1) it cleans：The impurity of the bit face is removed using ultrasonic cleaning；
2) it dries：The drill bit is put into baking oven and is dried；
3) it loads：The drill bit is mounted on fixture；
4) plated film：Fixture equipped with the drill bit is put into vaccum ion coater and carries out plated film, hard coating material is made to splash
The hard coat described in the Surface Creation of the drill bit is penetrated, lubricating coating materials is made to sputter at the Surface Creation of the hard coat
The lubricant coating makes oxidation-resistant coating sputtering of materials oxidation-resistant coating described in the Surface Creation of the lubricant coating；
5) it unloads：The drill bit is taken out out of vaccum ion coater, and the drill bit is unloaded from fixture, completes to prepare tool
There are the PCB drill bits of resistance to oxidation hard lubricant coating.
In the manufacturing method of the present invention, step 1) uses ultrasonic cleaning, with cleaning performance is good and cleaning speed soon
Advantage not only improves production efficiency, but also is not necessarily to human contact's cleaning solution, securely and reliably, to deep hole, fine crack and workpiece shelter
Also capable of washing clean, not damaged to workpiece surface, step 4) has plated film precision using plated film is carried out in vaccum ion coater
High feature, drill bit is isolated from the outside world, and ensures that coating process is unaffected, and chamber indoor environment cleaning, film is not easily susceptible to dirt
Dye, therefore available compactness is good, purity is high and the film of coating uniform, and vaccum ion coater has multiple chambers,
It can be carried out at the same time the plated film of multiple PCB drill bits, improved work efficiency.
Change as a kind of one kind of the manufacturing method of the PCB drill bits with resistance to oxidation hard lubricant coating of the present invention
Into the hard coat is one kind in aluminium titanium nitrogen hard coating, aluminium chromium nitrogen hard coating and aluminium titanium chromium nitrogen hard coating, described
Lubricant coating is one kind in molybdenum sulphur coatings, titanium boron coating and diamond coatings, and the oxidation-resistant coating is zirconia-alumina oxytolerant
Change coating, zirconium silicon oxide oxidation-resistant coating, titanium oxide aluminium oxidation-resistant coating, titanium oxide silicon oxidation-resistant coating, chromium oxide aluminium oxytolerant
Change coating and aoxidizes one kind in chrome-silicon oxidation-resistant coating.Due to aluminium titanium nitrogen hard coating, aluminium chromium nitrogen hard coating or aluminium titanium chromium
Nitrogen hard coating has the hardness effect for increasing coating surface, for improving wearability, molybdenum sulphur coatings, titanium boron coating or diamond
Coating can reduce friction, avoid generating Integrated Chip phenomenon, zirconia-alumina oxidation-resistant coating, zirconium silicon oxide oxidation-resistant coating, titanium oxide
Aluminium oxidation-resistant coating, titanium oxide silicon oxidation-resistant coating, chromium oxide aluminium oxidation-resistant coating and oxidation chrome-silicon oxidation-resistant coating all have
Good oxidative resistance, and advantageously reduce cost.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the enlarged drawing of drill bit in the present invention.
Wherein：1- hard coats；2- lubricant coatings；3- oxidation-resistant coatings；4- drill bits；5- drillstocks；6- interconnecting pieces；41- is bored
Ontology；42- chip spaces；43- apex points.
Specific implementation mode
Some vocabulary has such as been used to censure specific components in specification and claim.Those skilled in the art answer
It is understood that hardware manufacturer may call the same component with different nouns.This specification and claims are not with name
The difference of title is used as the mode for distinguishing component, but is used as the criterion of differentiation with the difference of component functionally.Such as logical
The "comprising" of piece specification and claim mentioned in is an open language, therefore should be construed to " include but do not limit
In "." substantially " refer in acceptable error range, those skilled in the art can solve technology within a certain error range
Problem basically reaches technique effect.
In the description of the present invention, it is to be understood that, term "upper", "lower", "front", "rear", "left", "right", level "
The orientation or positional relationship of equal instructions is to be based on the orientation or positional relationship shown in the drawings, be merely for convenience of the description present invention and
Simplify description, does not indicate or imply the indicated device or element must have a particular orientation, with specific azimuth configuration
And operation, therefore be not considered as limiting the invention.
In invention unless specifically defined or limited otherwise, the arts such as term " installation ", " connected ", " connection ", " fixation "
Language shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be machine
Tool connects, and can also be electrical connection；It can be directly connected, can also can be indirectly connected through an intermediary two members
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be
Concrete meaning in bright.
Below in conjunction with attached drawing, invention is further described in detail, but not as a limitation of the invention.
Embodiment 1
As shown in Figure 1 and 2, a kind of PCB drill bits with resistance to oxidation hard lubricant coating, including drillstock 5 and with the one of drillstock 5 at
The surface of the drill bit 4 of type, drill bit 4 is coated with hard coat 1, and the surface of hard coat 1 is coated with lubricant coating 2, lubricant coating 2
Surface be coated with oxidation-resistant coating 3.One layer of hard coat 1 is coated to reinforce the wear-resisting of drill bit 4 on the surface of drill bit 4 first
Property, it then is coated with one layer of lubricant coating 2 on 1 surface of hard coat, finally coats one layer of resistance to oxidation on the surface of lubricant coating 2
Coating 3,2 initial stage of lubricant coating can be worn, and not influence the service life of drill bit 4, because to also have hard coat 1 to play wear-resisting for internal layer
Harm is used, and still can guarantee promotion of the hard coat 1 to 4 service life of drill bit, 2 row of being only involved in of lubricant coating of chip space 42
Bits, will not be worn, so playing lubricating action always, oxidation-resistant coating 3 has high temperature oxidation stability, for protecting drill bit 4,
Fine and close oxide layer is initially formed using coating processes in fact, therefore further oxidation reaction when machining can be slowed down.
The invention also includes interconnecting piece 6, drill bit 4 is connect by interconnecting piece 6 with drillstock 5, drill bit 4, interconnecting piece 6 and drillstock 5
It is disposed as cylindrical structure, the diameter of drillstock 5 is more than the diameter of interconnecting piece 6, and the diameter of interconnecting piece 6 is more than the diameter of drill bit 4, bores
First 4 include boring ontology 41, being arranged and boring the chip space 42 of 41 outer surface of ontology and be arranged in the apex point 43 for boring 41 one end of ontology, row
Bits slot 42 is helical form.Since split structure does not influence the normal use at other positions when partial structurtes are lost, increase
Add chip space, chip is made to be easily drained, improves the precision of drilling.
Preferably, 1 thickness of hard coat is 0.8um, and 2 thickness of lubricant coating is 0.1um, and 3 thickness of oxidation-resistant coating is
0.1um.The thickness of hard coat 1, lubricant coating 2 and oxidation-resistant coating 3 all takes the minimum value in range, prevents coating layer thickness mistake
It is thin, it cannot achieve the function of each coating.
Embodiment 2
As different from Example 1：The thickness of the present embodiment hard coat 1 is 1.6um, and the thickness of lubricant coating 2 is 0.3um,
The thickness of oxidation-resistant coating 3 is 0.8um.The thickness of hard coat 1, lubricant coating 2 and oxidation-resistant coating 3 all takes in range most
Big value prevents from increasing the cost of plated film due to overweight coating.
Other structures are same as Example 1, and which is not described herein again.
Embodiment 3
As different from Example 1：The thickness of the present embodiment hard coat 1 is 1um, and the thickness of lubricant coating 2 is 0.23um, resistance to
The thickness of oxide covering 3 is 0.5um.The thickness of hard coat 1, lubricant coating 2 and oxidation-resistant coating 3 all takes the centre in range
Value also ensures that coating layer thickness does not influence service life while ensureing control cost.
Other structures are same as Example 1, and which is not described herein again.
Embodiment 4
As shown in Figure 1 and 2, the manufacturing method of the PCB drill bits of a kind of embodiment 1,2 or 3, includes the following steps：
1) it cleans：The impurity on 4 surface of drill bit is removed using ultrasonic cleaning；
2) it dries：Drill bit 4 is put into baking oven and is dried；
3) it loads：Drill bit 4 is mounted on fixture；
4) plated film：Fixture equipped with drill bit 4 is put into vaccum ion coater and carries out plated film, hard coating material is made to sputter at
The Surface Creation hard coat 1 of drill bit 4 makes lubricating coating materials sputter at the Surface Creation lubricant coating 2 of hard coat 1, makes
Surface Creation oxidation-resistant coating 3 of the oxidation-resistant coating sputtering of materials in lubricant coating 2；
5) it unloads：Drill bit 4 is taken out out of vaccum ion coater, and drill bit 4 is unloaded from fixture, completing to prepare has oxytolerant
Change the PCB drill bits of hard lubricant coating.
In above-mentioned steps, hard coat 1 is aluminium titanium nitrogen hard coating, aluminium chromium nitrogen hard coating and aluminium titanium chromium nitrogen hard coating
In one kind, lubricant coating 2 be molybdenum sulphur coatings, titanium boron coating and diamond coatings in one kind, oxidation-resistant coating 3 be zirconium oxide
Aluminium oxidation-resistant coating, zirconium silicon oxide oxidation-resistant coating, titanium oxide aluminium oxidation-resistant coating, titanium oxide silicon oxidation-resistant coating, chromium oxide
One kind in aluminium oxidation-resistant coating and oxidation chrome-silicon oxidation-resistant coating.
It should be noted that：In the manufacturing method of the present invention, step 1) uses ultrasonic cleaning, has cleaning performance good
And the advantage that cleaning speed is fast, production efficiency is not only improved, but also be not necessarily to human contact's cleaning solution, securely and reliably, to deep hole, carefully
Seam and workpiece shelter are also capable of washing clean, not damaged to workpiece surface；Step 2), which can also use, dries work machine, and dryer has band
Formula dryer, roller drying machine, chamber typed drying-machine and tower dryer, dryer use automatic control device, only need to pass through control
Panel processed regulates the time, you can is automatically performed entire drying course；Step 4) can also use chemical vapor deposition, pass through heat
Selected metallic compound or organic compound are decomposed, the process of deposition film is obtained.
Aluminium titanium nitrogen hard coating, aluminium chromium nitrogen hard coating or aluminium titanium chromium nitrogen hard coating contribute to 4 surface of increase drill bit hard
Degree, and surface is smooth；Molybdenum sulphur coatings, titanium boron coating or diamond coatings can reduce friction, avoid Integrated Chip phenomenon；Zirconia-alumina
Oxidation-resistant coating, zirconium silicon oxide oxidation-resistant coating, titanium oxide aluminium oxidation-resistant coating, titanium oxide silicon oxidation-resistant coating, chromium oxide aluminium
Oxidation-resistant coating and oxidation chrome-silicon oxidation-resistant coating all have good oxidative resistance, help to process production under high temperature environment
Product, and there is higher thermal stability, and advantageously reduce cost.
According to the disclosure and teachings of the above specification, those skilled in the art in the invention can also be to above-mentioned embodiment party
Formula is changed and is changed.Therefore, the invention is not limited in above-mentioned specific implementation mode, every those skilled in the art exist
Made any conspicuously improved, replacement or modification all belongs to the scope of protection of the present invention on the basis of the present invention.This
Outside, although having used some specific terms in this specification, these terms are merely for convenience of description, not to the present invention
Constitute any restrictions.
Claims (10)
1. a kind of PCB drill bits with resistance to oxidation hard lubricant coating, it is characterised in that：Including drillstock (5) and with the drillstock
(5) surface of integrally formed drill bit (4), the drill bit (4) is coated with hard coat (1), the surface of the hard coat (1)
Coated with lubricant coating (2), the surface of the lubricant coating (2) is coated with oxidation-resistant coating (3).
2. a kind of PCB drill bits with resistance to oxidation hard lubricant coating as described in claim 1, it is characterised in that：It is described hard
Matter coating (1) thickness is 0.8um-1.6um.
3. a kind of PCB drill bits with resistance to oxidation hard lubricant coating as claimed in claim 2, it is characterised in that：It is described hard
Matter coating (1) thickness is 1um.
4. a kind of PCB drill bits with resistance to oxidation hard lubricant coating as described in claim 1, it is characterised in that：The profit
Sliding coating (2) thickness is 0.1um-0.3um.
5. a kind of PCB drill bits with resistance to oxidation hard lubricant coating as claimed in claim 4, it is characterised in that：The profit
Sliding coating (2) thickness is 0.23um.
6. a kind of PCB drill bits with resistance to oxidation hard lubricant coating as described in claim 1, it is characterised in that：It is described resistance to
Oxide covering (3) thickness is 0.1um-0.8um.
7. a kind of PCB drill bits with resistance to oxidation hard lubricant coating as claimed in claim 6, it is characterised in that：It is described resistance to
Oxide covering (3) thickness is 0.5um.
8. a kind of PCB drill bits with resistance to oxidation hard lubricant coating as described in claim 1, it is characterised in that：Further include
Interconnecting piece (6), the drill bit (4) are connect by the interconnecting piece (6) with the drillstock (5), the drill bit (4), the connection
Portion (6) and the drillstock (5) are disposed as cylindrical structure, and the diameter of the drillstock (5) is more than the diameter of the interconnecting piece (6),
The diameter of the interconnecting piece (6) is more than the diameter of the drill bit (4), and the drill bit (4) includes boring ontology (41), being arranged described
It bores the chip space (42) of ontology (41) outer surface and is arranged in the apex point (43) for boring ontology (41) one end, the chip space
(42) it is helical form.
9. a kind of claim 1-8 any one of them has the manufacturing method of the PCB drill bits of resistance to oxidation hard lubricant coating,
It is characterized in that：Include the following steps：
Cleaning：The impurity on the drill bit (4) surface is removed using ultrasonic cleaning；
Drying：The drill bit (4) is put into baking oven and is dried；
It loads：The drill bit (4) is mounted on fixture；
Plated film：Fixture equipped with the drill bit (4) is put into vaccum ion coater and carries out plated film, hard coating material is made to splash
Hard coat (1) described in the Surface Creation of the drill bit (4) is penetrated, lubricating coating materials is made to sputter at the hard coat (1)
Surface Creation described in lubricant coating (2), make oxidation-resistant coating sputtering of materials described in the Surface Creation of the lubricant coating (2)
Oxidation-resistant coating (3)；
Unloading：The drill bit (4) is taken out out of vaccum ion coater, and the drill bit (4) is unloaded from fixture, completes system
The standby PCB drill bits with resistance to oxidation hard lubricant coating.
10. a kind of manufacturing method of the PCB drill bits with resistance to oxidation hard lubricant coating as claimed in claim 9, feature
It is：The hard coat (1) is one in aluminium titanium nitrogen hard coating, aluminium chromium nitrogen hard coating and aluminium titanium chromium nitrogen hard coating
Kind, the lubricant coating (2) is one kind in molybdenum sulphur coatings, titanium boron coating and diamond coatings, and the oxidation-resistant coating (3) is
Zirconia-alumina oxidation-resistant coating, zirconium silicon oxide oxidation-resistant coating, titanium oxide aluminium oxidation-resistant coating, titanium oxide silicon oxidation-resistant coating,
One kind in chromium oxide aluminium oxidation-resistant coating and oxidation chrome-silicon oxidation-resistant coating.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810438565.6A CN108396284A (en) | 2018-05-09 | 2018-05-09 | A kind of PCB drill bits and its manufacturing method with resistance to oxidation hard lubricant coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810438565.6A CN108396284A (en) | 2018-05-09 | 2018-05-09 | A kind of PCB drill bits and its manufacturing method with resistance to oxidation hard lubricant coating |
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| CN108396284A true CN108396284A (en) | 2018-08-14 |
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|---|---|---|---|
| CN201810438565.6A Pending CN108396284A (en) | 2018-05-09 | 2018-05-09 | A kind of PCB drill bits and its manufacturing method with resistance to oxidation hard lubricant coating |
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| CN (1) | CN108396284A (en) |
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| CN115008550A (en) * | 2022-06-16 | 2022-09-06 | 深圳市金洲精工科技股份有限公司 | Coating drilling tool and application thereof |
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Application publication date: 20180814 |