CN108372442A - A kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods - Google Patents

A kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods Download PDF

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Publication number
CN108372442A
CN108372442A CN201810281070.7A CN201810281070A CN108372442A CN 108372442 A CN108372442 A CN 108372442A CN 201810281070 A CN201810281070 A CN 201810281070A CN 108372442 A CN108372442 A CN 108372442A
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sic
grinding wheel
fenton
pneumatic grinding
variation rigidity
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CN201810281070.7A
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赵军
江恩勇
计时鸣
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Priority to CN201810281070.7A priority Critical patent/CN108372442A/en
Publication of CN108372442A publication Critical patent/CN108372442A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005—Blocking means, chucks or the like; Alignment devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
    • B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/007—Weight compensation; Temperature compensation; Vibration damping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C04B41/5035—Silica
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Abstract

A kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods, the surface that SIC workpiece need not be processed first is put on into barrier material, it is then fully immersed in the reaction tank equipped with Fenton reagent, waits for that a period of time reacts, in the uniform SIO of Surface Creation uniform thickness of SIC workpiece2Behind surface layer, SIC workpiece are taken out, are fixed on the table with limiting device；The SIO for ensureing to generate after reacting by floating junction device2Surface layer uniformly removes；Position and posture of the tool system relative to workpiece are adjusted by mechanical arm, enter the rigidity of the air pressure adjustment variation rigidity Pneumatic grinding wheel of the compressed air of variation rigidity Pneumatic grinding wheel by change, so that variation rigidity Pneumatic grinding wheel is bonded with the SIC workpiece of free form surface, last polishing is carried out to the SIC workpiece of free form surface using variation rigidity Pneumatic grinding wheel.The present invention proposes a kind of efficient, low cost Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods.

Description

A kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods
Technical field
The invention belongs to workpiece surface Finishing fields, it is proposed that a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel throwing Light SIC freeform optics surface methods.
Background technology
SIC materials are because it is with good pyroconductivity, high breakdown field strength, small dielectric constant, big energy gap etc. Advantage, at the same again because its with radioresistance and wear-resisting equal good characteristics make its semi-conducting material application in the market increasingly Extensively, the material of semiconductor is increasingly used in aerospace in quick development, military, and electronics etc. is each important Aspect.With the increase of its application range, the needs that cannot be satisfied with people of the SIC materials of plane gradually, curved surface The SIC materials of type are also more and more needed, with good development prospect and future.
The chemical mechanical method of processing polished SIC mainly utilizes Fenton auxiliary device at present, is generated using Fenton's reaction Hydroxyl radical free radical come aoxidize the surfaces SIC make its generate SIO2, then its surface is carried out to grinding using abrasive disk, but uses this Method can only can only ground flat thin slice SIC workpiece, the SIC workpiece to being free form surface can not process.
Mainly there are Magnetorheological Polishing, abradant jet polishing, computer to control small mill the method that curved surface is polished at present Head polishing, electrobrightening etc..Magnetorheological Polishing its mainly by the way that polishing powder is added in magnetorheological fluid, then pass through high-intensity magnetic field Effect, to have the function that workpiece surface processing polished, although effect is preferable, its need cost it is too high, limit Its large-scale use is made.Abradant jet polishing goes to the surface for washing away its workpiece to have reached using the high-speed jet for being mixed with abrasive material The effect of processing polished, but it will have complicated abrasive Flow moving system, and it is less efficient in processing polished, it cannot Meet the demand of production.Computer control small abrasive nose polish its be using computer come control small abrasive nose surface movement come pair Workpiece is processed polishing, but its is less efficient, and machining accuracy is not high.Electrobrightening its be exactly by cell reaction to work Its surface of part is processed polishing, but it is only applicable to the metal works of part.
In conclusion for current existing polishing technology, comprehensive process efficiency, machining accuracy, processing cost etc. is respectively A aspect, it is difficult to which the SIC workpiece to free form surface are polished well.In order to meet needs of developping production, urgent need A kind of to carry out effective percentage to the SIC materials of freeform optics surface, precision is higher, lower-cost polishing method.
Invention content
In order to overcome precision existing for the existing polishing technology for the SIC workpiece of free form surface and inefficient etc. ask Topic, and the problem of the SIC workpiece of plane can only be processed for Fenton's reaction burnishing device, the present invention propose it is a kind of efficiently, The Fenton auxiliary variation rigidity Pneumatic grinding wheel of low cost polishes SIC freeform optics surface methods.
The technical solution adopted by the present invention to solve the technical problems is：
A kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods, first need not add SIC workpiece The surface of work puts on barrier material, is then fully immersed in the reaction tank equipped with Fenton reagent, waits for that a period of time reacts, The uniform SIO of Surface Creation uniform thickness of SIC workpiece2Behind surface layer, SIC workpiece are taken out, are fixed on the table with limiting device； Ensure that polishing force is constant force by floating junction device, and then ensures the SIO generated after reacting2Surface layer uniformly removes；It is logical It crosses mechanical arm and adjusts position and posture of the tool system relative to workpiece, the compression by change into variation rigidity Pneumatic grinding wheel is empty The rigidity of the air pressure adjustment variation rigidity Pneumatic grinding wheel of gas, makes variation rigidity Pneumatic grinding wheel be bonded with the SIC workpiece of free form surface, uses Variation rigidity Pneumatic grinding wheel carries out last polishing to the SIC workpiece of free form surface.
Further, in entire polishing process, the surface that SIC workpiece need not be processed first is put on into barrier material, so It uses the fastener of negative poisson's ratio material to seal afterwards, is entirely put into later in the reaction tank equipped with Fenton reagent, is allowed to be totally submerged, It can ensure that non-reaction zone domain completely completely cuts off with Fenton reagent in this way so that Fenton's reaction occurs for conversion zone, generates uniform thickness Uniform SIO2Surface layer ensures that material uniformly removes.
Further, when being compressed, material is shunk the negative poisson's ratio material perpendicular to stress direction, and Common expansion, i.e., macroscopically, negative poisson's ratio material is expansion in Impact direction rather than shrinks in stress, It can be very good to seal as fastener, ensure that conversion zone completely cuts off with non-reaction zone domain, make conversion zone that Fenton's reaction occur It is small to generate rigidity ratio SIC, and the uniform SIO of uniform thickness2Surface layer；Negative poisson's ratio material is wedge structure, porosu solid or condensate.
Further, the strong oxidizer hydroxyl radical free radical in the Fenton reagent, is by catalyst and oxidant What reaction generated, catalyst is iron chloride FeCl3, frerrous chloride FeCl2, ferroso-ferric oxide Fe3O4, iron oxide Fe2O3, sulfuric acid Iron Fe2(SO4)3Or ferrous sulfate FeSO4, oxidant is hydrogen peroxide H2O2, potassium permanganate KMNO4Or hypochlorous acid HCLO.
It is preferably acidic environment that required environment, which occurs, for Fenton's reaction, the oxidation of its Fenton's reaction in acidic environment It is most strong, but will produce hydroxyl ion in Fenton's reaction, it can make reaction is acid constantly to weaken, therefore in the ring of Fenton's reaction Need the reagent that acidity is added that its is made to keep acidic environment in border.
First selected oxidant and catalyst are poured into according to the concentration and ratio of setting in reaction tank, its reaction is allowed to give birth to It is completely submerged in reaction tank, allows exposed at strong oxidizer hydroxyl radical free radical, then by the SIC workpiece for packaging barrier material SIC curved surfaces and hydroxyl radical reaction, generation hardness ratio SIC is small, and the uniform SIO of uniform thickness2Surface layer.
Used variation rigidity Pneumatic grinding wheel during entire processing polished, is soft by the hollow hemisphere of rubber like Property matrix and be bonded in matrix abrasive grain layer constitute, hardness of grain is greater than SIO2, and it is less than SIC；The variation rigidity gas Press the rigidity of grinding wheel that can be controlled by entering the air pressure of the compressed air of variation rigidity Pneumatic grinding wheel, and can with real-time online It adjusts, may be implemented preferably to be bonded with the SIC workpiece of free form surface.
Floating connection dress includes cylinder, displacement sensor, guide rail, compressed spring, top base and bottom base, described Cylinder, displacement sensor, guide rail, compressed spring are all located between top base and bottom base, outer below floating junction device A proportioning valve has been connect, pressure sensor is housed in proportioning valve.
In the floating junction device, when operating, for bottom base relative displacement, displacement sensor can occur for top base One signal of controller can be returned to, then controller can give one signal of proportioning valve, the value of proportioning valve that can be reset, so A driving force is generated to cylinder charge afterwards, it is made to drive top base that linear displacement occurs relative to bottom base, during its, Pressure sensor in proportioning valve can monitor the pressure in cylinder in real time；Top base can drive the guide rail being secured to move, and make Compressed spring is compressed and generates a restoring force, and the difference of driving force and restoring force passes through displacement sensor and pressure sensor Signal be conveyed to controller, then with setting need value compared with, it is constant if identical, if it is different, then change proportioning valve Setting value, constant force is ensured with this.
The present invention technical concept be：Oxidant is first reacted generation with catalyst in acidic environment has strong oxidizing property Hydroxyl radical free radical, then the SIC workpiece for packaging barrier material are immersed in the reaction tank equipped with Fenton reagent, allow hydroxyl from Need the surface processed that Fenton's reaction occurs by base and SIC workpiece, generation rigidity ratio SIC is small, and the uniform SIO of uniform thickness2Surface layer, After the variation of its surface layer, polished with the shape using variation rigidity Pneumatic grinding wheel.This, which is one kind, can ensure high-profile precision, realize Polishing method without surface and sub-surface damage.
The present invention can be realized effectively carries out high-precision, no surface and sub-surface to the freeform optics surface of SIC materials Damage, high efficiency, inexpensive constant force polish with the shape, have larger economic benefit and social benefit.
Beneficial effects of the present invention are mainly manifested in：
(1)：Can effectively realize and the SIC workpiece of free form surface are polished, and not just only to plane SIC workpiece are polished.
(2)：Fenton's reaction occurs more rapid, and the hydroxyl radical free radical of strong oxidizing property can quickly aoxidize SIC materials Surface layer, being allowed to surface layer becomes the small SIO of hardness ratio SIC2, then polished with the shape using variation rigidity Pneumatic grinding wheel, it can To realize efficient polishing.
(3) sealing material of SIC workpiece has selected negative poisson's ratio material, is used as fastener, can be with better seal, can Preferably to completely cut off conversion zone and non-reaction zone domain.
(4)：The surface for the SIC workpiece that need not be processed is put on into barrier material, is then fully immersed in reaction tank anti- It answers so that conversion zone completely cuts off with non-reaction zone domain, and conversion zone is made to generate the uniform SIO of uniform thickness2Surface layer, it is high-profile to realize The polishing of precision, no surface and sub-surface damage lays the foundation.
(5)：Possess floating junction device in entire burnishing device, may be implemented to ensure constant force polishing, it is ensured that The uniform removal of material.
(6)：Variation rigidity Pneumatic grinding wheel has been used to be polished the SIC workpiece of free form surface, the rigidity of Pneumatic grinding wheel It is adjustable, it can preferably be bonded curved surface.The abrasive grain rigidity of variation rigidity Pneumatic grinding wheel is also adjustable, can be with the suitable mill of better choice Grain rigidity is polished.
(7)：The process and program of whole system are all relatively simple, and the cost for manufacturing production is also very low, may be implemented big The production and use of scale.
Description of the drawings
Fig. 1 is variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface schematic diagrames.
Fig. 2 is the schematic diagram of workbench.
Fig. 3 is that SIC workpiece are put into reaction tank schematic diagram.
Fig. 4 is floating junction device sectional schematic.
Wherein, 1 mechanical arm；2 floating linked sets；3 pressure sensor I；4 proportioning valves；5 links；6 motors；7 air inlets Hole；8 pressure sensor II connectors；9 pressure sensor II；10 variation rigidity Pneumatic grinding wheels；11 workpiece；12 negative pressure suckers；13 works Make platform；14 reaction tanks；15 Fenton reagents；16 barrier materials；17 fasteners；18 cover bodies；19 top bases；20 cylinders；21 bottom bases； 22 displacement sensors；23 guide rails；24 blocks；25 rail brackets；26 compressed springs；27 guide-rail coupling members.
Specific implementation mode
The invention will be further described below in conjunction with the accompanying drawings.
A kind of referring to Fig.1~Fig. 4, Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods, first will Catalyst and oxidant, which are poured into according to certain concentration and ratio in reaction tank 14, to react, and generates strong oxidizer hydroxyl radical free radical, Then the SIC workpiece 11 for packaging barrier material 16 are completely submerged in the reaction tank 14 equipped with Fenton reagent 15, allow it is exposed Outer that the SIC freeform optics surfaces processed is needed to be reacted with Fenton reagent, generation hardness ratio SIC is small, and the uniform SIO of uniform thickness2 Surface layer.After waiting for that the reaction was complete, SIC workpiece 11 are taken out, are fixed on workbench 13 with limiting device, limiting device can be with It is：Negative pressure sucker and positioning fixture etc..It can ensure that polishing force is constant force by floating junction device 2, and then ensure to occur anti- The SIO that should be generated afterwards2Surface layer uniformly removes.Position and posture of the tool system relative to workpiece can be adjusted by mechanical arm 1, The rigidity of variation rigidity Pneumatic grinding wheel can be adjusted by the air pressure of change into the compressed air of variation rigidity Pneumatic grinding wheel 10, this can Preferably to make variation rigidity Pneumatic grinding wheel 10 be bonded with the SIC workpiece 11 of free form surface.Variation rigidity air pressure can preferably be used Grinding wheel 10 carries out last polishing to the SIC workpiece 11 of free form surface.
With reference to Fig. 3, in entire polishing process, first barrier material will be put on outside surface that SIC workpiece 11 need not be processed 16, the contact on the surface that it need not be processed and Fenton reagent is prevented, then uses the material of negative poisson's ratio close as fastener 17 Envelope ensures that the isolation of conversion zone and non-reaction zone domain, the SIC workpiece 11 being sealed against later are immersed in reaction tank 14, Make exposed the free form surface processed to be needed to react uniform, and the SIO that rigidity ratio SIC is small that generates uniform thickness with Fenton reagent outside2 Surface layer.
Further, selected fastener is negative poisson's ratio material, and when being compressed, material is perpendicular to stress side To shrinking, rather than common expansion, i.e., macroscopically, negative poisson's ratio material is expansion in Impact direction in stress Rather than shrink, it is used as fastener, can preferably completely cut off conversion zone and non-reaction zone domain with better seal.Example The foamed material of negative poisson's ratio can be such as selected, not only the characteristic with negative poisson's ratio, also has in specific temperature environment Shape memory behavior can facilitate using this characteristic and remove fastener and barrier material again.
Strong oxidizer hydroxyl radical free radical in selected chemical reagent is generated by catalyst and oxidant reaction , catalyst can be with selective chlorination iron FeCl3, frerrous chloride FeCl2, ferroso-ferric oxide Fe3O4, iron oxide Fe2O3, ferric sulfate Fe2(SO4)3, ferrous sulfate FeSO4Deng oxidant can select hydrogen peroxide H2O2, potassium permanganate KMNO4, hypochlorous acid HCLO Deng it is ferrous sulfate FeSO to be typically chosen catalyst4, the oxidant selected is hydrogen peroxide H2O2。
It is preferably acidic environment that required environment, which occurs, for Fenton's reaction, the oxidation of its Fenton's reaction in acidic environment It is most strong, but will produce hydroxyl ion (OH in Fenton's reaction-), it can make reaction is acid constantly to weaken, therefore anti-in Fenton Need the reagent that acidity is added that its is made to keep acidic environment in the environment answered.Such as it can select dilute hydrochloric acid HCL that reaction tank is added In, so that Fenton's reaction is carried out in weakly acidic environment.
First selected oxidant and catalyst are poured into according to certain concentration and ratio in reaction tank, its reaction is allowed to give birth to It is completely submerged in reaction tank, allows exposed at strong oxidizer hydroxyl radical free radical, then by the SIC workpiece for packaging barrier material SIC free form surfaces surface and hydroxyl radical reaction, generation hardness ratio SIC is small, and the uniform SIO of uniform thickness2Surface layer.
Used variation rigidity Pneumatic grinding wheel during entire processing polished, is soft by the hollow hemisphere of rubber like Property matrix and be bonded in matrix abrasive grain layer constitute, hardness of grain is greater than SIO2, it is less than SIC.Its rigidity can pass through Change the air pressure adjustment into the compressed air of variation rigidity Pneumatic grinding wheel, and can be adjustable with real-time online, it can preferably and SIC The free form surface of workpiece is bonded, and general compression gas-pressure control is between 0-1MPa.Such as a pressure sensor can be added For detection its compression gas-pressure that can be constantly.
It can ensure that polishing force is constant force by floating junction device, and then ensure the SIO generated after reacting2Surface layer Uniformly removal.Tool system, which can be adjusted, by mechanical arm becomes rigid relative in the position of workpiece and posture and by changing to enter The air pressure for spending the compressed air of Pneumatic grinding wheel, can preferably be such that variation rigidity Pneumatic grinding wheel is bonded with the SIC workpiece of free form surface. Thus it uses variation rigidity Pneumatic grinding wheel to carry out constant force to the SIC workpiece of free form surface to polish with the shape.
Mainly there are cylinder 20, displacement sensor 22, guide rail 23, compressed spring 26, top base in the inside of floating junction device 19, bottom base 21 etc..Cylinder, displacement sensor, guide rail, compressed spring is all between displacement top base and bottom base.It is floating An external proportioning valve below attachment device is equipped with pressure sensor in proportioning valve.The operation principle of floating junction device is： When operating, for bottom base relative displacement can occur for top base, and displacement sensor can return to one signal of controller, then Controller can give one signal of proportioning valve, the value of proportioning valve that can be reset, and then generate a driving force to cylinder charge, It is set to drive top base that linear displacement occurs relative to bottom base, during its, the pressure sensor in proportioning valve can be real-time Monitor the pressure in cylinder.Top base can drive the guide rail being secured to move, and so that compressed spring is compressed and generate one The difference of restoring force, driving force and restoring force is conveyed to controller by the signal of displacement sensor and pressure sensor, then with The value that setting needs compares, if identical, constant, if it is different, then in the setting value for changing proportioning valve, ensures constant force with this.
The course of work of the present embodiment is as follows：When polishing, first by catalyst and oxidant and weakly acidic chemical reagent one It rises and pours into reaction tank, be allowed to generate strong oxidizer hydroxyl radical free radical, then the surface that SIC workpiece need not be processed isolation material Material packages, and then uses negative poisson's ratio material to be fastened as fastener, the SIC workpiece packaged are completely submerged in reaction tank later In, make it is exposed need the free form surface processed to react with Fenton reagent outside, generate that uniform thickness is uniform and hardness ratio SIC is small SIO2SIC workpiece are taken out, SIC workpiece are fixed on polishing with limiting device after waiting for that it reacts a period of time in surface layer On workbench, limiting device can be：Negative pressure sucker and positioning fixture etc..It can ensure that polishing force is by floating junction device Constant force, and then ensure the SIO generated after reacting2Surface layer uniformly removes.It is opposite that tool system can be adjusted by mechanical arm In the position of workpiece and posture, by change into the air pressure of the compressed air of variation rigidity Pneumatic grinding wheel, this can preferably make Variation rigidity Pneumatic grinding wheel is bonded with the SIC workpiece of free form surface.Finally use SIC work of the variation rigidity Pneumatic grinding wheel to free form surface Part carries out constant force and polishes with the shape.

Claims (9)

1. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel polishes SIC freeform optics surface methods, it is characterised in that：First by SIC works The surface that part need not be processed puts on barrier material, is then fully immersed in the reaction tank equipped with Fenton reagent, when one section Between react, in the uniform SIO of Surface Creation uniform thickness of SIC workpiece2Behind surface layer, SIC workpiece are taken out, are fixed on limiting device On workbench；Ensure that polishing force is constant force by floating junction device, and then ensures the SIO generated after reacting2Surface layer is equal Even removal；Position and posture of the tool system relative to workpiece are adjusted by mechanical arm, variation rigidity air pressure sand is entered by change The rigidity of the air pressure adjustment variation rigidity Pneumatic grinding wheel of the compressed air of wheel, makes the SIC works of variation rigidity Pneumatic grinding wheel and free form surface Part is bonded, and last polishing is carried out to the SIC workpiece of free form surface using variation rigidity Pneumatic grinding wheel.
2. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as described in claim 1 polishes SIC freeform optics surface methods, special Sign is：In entire polishing process, the surface that SIC workpiece need not be processed first is put on into barrier material, then with negative pool Pine seals than the fastener of material, is entirely put into later in the reaction tank equipped with Fenton reagent, is allowed to be totally submerged, in this way can be with Ensure that non-reaction zone domain completely completely cuts off with Fenton reagent so that Fenton's reaction occurs for conversion zone, and it is uniform to generate uniform thickness SIO2Surface layer ensures that material uniformly removes.
3. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as claimed in claim 1 or 2 polishes SIC freeform optics surface methods, It is characterized in that：When being compressed, material is shunk the negative poisson's ratio material perpendicular to stress direction, rather than logical Normal expansion, i.e., macroscopically, negative poisson's ratio material is expansion in Impact direction rather than shrinks, as tight in stress Firmware can be very good to seal, and ensure that conversion zone completely cuts off with non-reaction zone domain, make conversion zone that Fenton's reaction generation occur rigid Degree is smaller than SIC, and the uniform SIO of uniform thickness2Surface layer；Negative poisson's ratio material is wedge structure, porosu solid or condensate.
4. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as claimed in claim 1 or 2 polishes SIC freeform optics surface methods, It is characterized in that：Strong oxidizer hydroxyl radical free radical in the Fenton reagent is given birth to by catalyst and oxidant reaction At, catalyst is iron chloride FeCl3, frerrous chloride FeCl2, ferroso-ferric oxide Fe3O4, iron oxide Fe2O3, ferric sulfate Fe2 (SO4)3Or ferrous sulfate FeSO4, oxidant is hydrogen peroxide H2O2, potassium permanganate KMNO4Or hypochlorous acid HCLO.
5. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as claimed in claim 4 polishes SIC freeform optics surface methods, special Sign is：It is preferably acidic environment that required environment, which occurs, for Fenton's reaction, the oxidation of its Fenton's reaction in acidic environment It is most strong, but will produce hydroxyl ion in Fenton's reaction, it can make reaction is acid constantly to weaken, therefore in the ring of Fenton's reaction Need the reagent that acidity is added that its is made to keep acidic environment in border.
6. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as claimed in claim 4 polishes SIC freeform optics surface methods, special Sign is：First selected oxidant and catalyst are poured into according to the concentration and ratio of setting in reaction tank, its reaction is allowed to give birth to It is completely submerged in reaction tank, allows exposed at strong oxidizer hydroxyl radical free radical, then by the SIC workpiece for packaging barrier material SIC curved surfaces and hydroxyl radical reaction, generation hardness ratio SIC is small, and the uniform SIO of uniform thickness2Surface layer.
7. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as claimed in claim 1 or 2 polishes SIC freeform optics surface methods, It is characterized in that：Used variation rigidity Pneumatic grinding wheel during entire processing polished is by hollow the half of rubber like What ball flexible substrate and the abrasive grain layer for being bonded in matrix were constituted, hardness of grain is greater than SIO2, and it is less than SIC；It is described to become rigid Spending the rigidity of Pneumatic grinding wheel can be controlled by the air pressure of the compressed air into variation rigidity Pneumatic grinding wheel, and can be existed in real time Line is adjustable, may be implemented preferably to be bonded with the SIC workpiece of free form surface.
8. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as claimed in claim 1 or 2 polishes SIC freeform optics surface methods, It is characterized in that：Floating connection dress includes cylinder, displacement sensor, guide rail, compressed spring, top base and bottom base, The cylinder, displacement sensor, guide rail, compressed spring are all located between top base and bottom base, under floating junction device The external proportioning valve in side is equipped with pressure sensor in proportioning valve.
9. a kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel as claimed in claim 8 polishes SIC freeform optics surface methods, special Sign is：In the floating junction device, when operating, for bottom base relative displacement, displacement sensor can occur for top base One signal of controller can be returned to, then controller can give one signal of proportioning valve, the value of proportioning valve that can be reset, so A driving force is generated to cylinder charge afterwards, it is made to drive top base that linear displacement occurs relative to bottom base, during its, Pressure sensor in proportioning valve can monitor the pressure in cylinder in real time；Top base can drive the guide rail being secured to move, and make Compressed spring is compressed and generates a restoring force, and the difference of driving force and restoring force passes through displacement sensor and pressure sensor Signal be conveyed to controller, then with setting need value compared with, it is constant if identical, if it is different, then change proportioning valve Setting value, constant force is ensured with this.
CN201810281070.7A 2018-04-02 2018-04-02 A kind of Fenton auxiliary variation rigidity Pneumatic grinding wheel polishing SIC freeform optics surface methods Pending CN108372442A (en)

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CN113043116A (en) * 2021-04-13 2021-06-29 罗俊涛 Optical lens polishing device and polishing process
US11771183B2 (en) 2021-12-16 2023-10-03 Joon Bu Park Negative Poisson's ratio materials for fasteners

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