CN108365086A - A kind of piezoelectric ceramics electrode and preparation method thereof - Google Patents
A kind of piezoelectric ceramics electrode and preparation method thereof Download PDFInfo
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- CN108365086A CN108365086A CN201810129513.0A CN201810129513A CN108365086A CN 108365086 A CN108365086 A CN 108365086A CN 201810129513 A CN201810129513 A CN 201810129513A CN 108365086 A CN108365086 A CN 108365086A
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- electrode
- curved surface
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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Abstract
A kind of piezoelectric ceramics electrode of present invention offer and preparation method thereof, this method comprises the following steps：1) the electrode protection material of curved surface piezoelectric ceramic surface can be bonded to by choosing；2) shape protected needed for being made on electrode protection material；3) the electrode protection material with protection shape is pasted onto the region protected needed for the curved surface piezoelectric ceramic surface；4) in curved surface piezoelectric ceramic surface brushing silver paste, or by entire curved surface piezoelectric ceramics immerse silver paste in, after take out；5) silver paste is dried；6) silver ink firing, the volatilization of electrode protection material or carbonization, curved surface piezoelectric ceramic surface form the electrode needed in sintering process.The present invention solves the problems, such as the making of curved surface piezoelectric ceramics silver electrode, this method can specification electrode size, while have many advantages, such as again it is easy to make, quick, especially for flange electrode, this method is flexible, can design, is widely applicable, there is stronger applicability and economy.
Description
Technical field
The present invention relates to piezoelectric ceramic technology fields, more particularly to a kind of piezoelectric ceramics electrode and preparation method thereof.
Background technology
High intensity focused ultrasound (High-intensity focused ultra-sound.HIFU) is emerging in recent years
A kind of external non-invasive therapy tumour new technology, it pools high energy region by focused transducer, by ultrasonic wave, accurate to melt
It organizes without causing to damage to adjacent tissue around target area target area.By the development in more than ten years, HIFU technologies have been used for liver cancer,
The innocent and malignant tumours such as breast cancer, kidney, bone tumour, fibroid clinical treatment and common gynecological disease, allergic rhinitis, soft group
It knits the indications such as damage, osteoarthritis, skin disease, chronic soft tissue pain and carries out treatment and rehabilitation, obtain good curative effect.Through
Cross scale clinical application, curative effect evaluation and economic health evaluation, the safety of ultrasound non-invasive therapy technology, validity,
Economy is fully expressed, and technology reaches its maturity, and therefore, which is called " Environment Science " of 21 century, causes state
The concern of the colleges and universities, scientific research institution and medical instrument business tycoon of many countries on border, and continue to increase science research input.With skill
Art is constantly promoted in clinic, it is gradually that vast expert, medical personnel and patient receive, and ultrasonic therapy technology is in medicine
It has a extensive future in.
Focused transducer is the core component of the technology, it emits ultrasonic wave and on demand focuses sound wave, at present
Mainly ultrasonic transduction element is made with piezoelectric ceramics.Classify by the ultrasonic transducer type of focusing, there are four types of the types of focusing at present：Ball
Shell-type, lens type, reflection and phase-control focusing, wherein spherical shell type focus and phase-control focusing is due to that can form better focal shape,
As the main type of focusing of ultrasonic transducer.Correspondingly, the piezoelectric ceramic wafer shape of spherical shell type energy converter often designs balling-up
Face or curved surface, this is different from traditional energy converter piezoelectric chip, and traditional is generally in the shape of the planar chips shape such as round, rectangular
Shape.To planar chip, conventional piezoelectric ceramic electrode production method is screen printing of silver paste method, i.e., first on silk screen etch potsherd size and
Piezoelectric ceramic piece is placed under silk screen by shape, and silver paste is through being screen printed onto on ceramic surface, after drying on 800 DEG C of left sides
It is sintered at a high temperature of the right side, the silver ion reduction Cheng Yin in silver paste, forms good combination between silver and piezoelectric ceramics, piezoelectricity is made to make pottery
Porcelain element metallic.Silk-screen printing silver paste technique makes suitable for plane ceramic element electrode, the pottery of spherical surface or curve form
Porcelain electrode fabrication is most direct, most effective method for making its electrode is to apply silver by hand, and silver paste is easily coated in piece by manual brushing silver paste
On sub- side, the silver layer that remove on potsherd side is cumbersome, time-consuming and laborious, otherwise can influence to polarize.Furthermore spherical shell type piezoelectricity
Energy converter cathode is usually done in the concave surface of piece, and for the good transmitting of ultrasonic wave, sometimes by electrode flange, i.e. concave spherical surface is full electricity
Pole guides to concave spherical surface electrode flange on convex spherical, and positive and negative electrode lead is drawn from convex spherical, thus will be on convex spherical
Reserve electrode shape.Due to manual brushing silver paste, maximum problem is that electrode shape and size are not easy to control in operation, random
Too strong, the consistency of product is very poor, and seriously affects production efficiency.
Invention content
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide a kind of piezoelectric ceramics electrode and its systems
Make method, randomness is strong in brushing silver paste, is difficult to strictly control silver paste pattern form for solving potsherd in the prior art
The problems such as.
In order to achieve the above objects and other related objects, first aspect present invention provides a kind of piezoelectric ceramics electrode fabrication side
Method includes the following steps：
1) the electrode protection material of curved surface piezoelectric ceramic surface can be bonded to by choosing；
2) shape protected needed for being made on electrode protection material；
3) the electrode protection material with protection shape is pasted onto the area protected needed for the curved surface piezoelectric ceramic surface
Domain；
4) in curved surface piezoelectric ceramic surface brushing silver paste, or by entire curved surface piezoelectric ceramics immerse silver paste in, after
It takes out；
5) silver paste is dried；
6) silver ink firing, the volatilization of electrode protection material or carbonization, curved surface piezoelectric ceramic surface form the electricity needed in sintering process
Pole.
In some embodiments of the invention, in step 1), the electrode protection material is selected from adhesive label's paper or viscosity
Paper.
In some embodiments of the invention, the curved surface piezoelectric ceramic electrode includes shell-type focused transducer electricity
Pole.
In some embodiments of the invention, in step 3), the region of required protection is the side of curved surface piezoelectric ceramics
The position of electrode is formed needed for edge or convex surface.
In some embodiments of the invention, in step 1), the one side of the electrode protection material has viscosity, another side
Without viscosity.
Second aspect of the present invention provides piezoelectric ceramics electrode made from the above method.
As described above, a kind of curved surface piezoelectric ceramic electrode and preparation method thereof of the present invention, has the advantages that：This
Invention solve the problems, such as curved surface piezoelectric ceramics silver electrode making, this method can specification electrode size, while again have make
Easily and fast the advantages that, especially for flange electrode, this method is flexible, can design, is widely applicable, there is stronger applicability
And economy.
Description of the drawings
Fig. 1 is shown as flange electrode pattern material in the embodiment of the present invention；
Fig. 2 is shown as the edge-protected material of potsherd in the embodiment of the present invention；
Fig. 3 a are shown as posting the potsherd of electrode protection material in the embodiment of the present invention；
Fig. 3 b are shown as the potsherd that edge in the embodiment of the present invention posts protection materials；
Fig. 4 is the manufacturing process schematic diagram of potsherd shown in Fig. 3 a；
Fig. 5 is the manufacturing process schematic diagram of potsherd shown in Fig. 3 b.
Specific implementation mode
Illustrate that embodiments of the present invention, those skilled in the art can be by this specification below by way of specific specific example
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
It should be clear that in the following example not specifically dated process equipment or device be all made of conventional equipment in the art or
Device；All pressure values and range all refer to absolute pressure.
In addition, it should also be understood that, one or more method and step mentioned in the present invention does not repel before and after the combination step
It can also be inserted into other methods step there may also be other methods step or between these explicitly mentioned steps, unless separately
It is described；It should also be understood that the combination connection relation between one or more equipment/device mentioned in the present invention is not repelled
The front and back two equipment/devices specifically mentioned there may also be other equipment/device or at these of the unit equipment/device it
Between can also be inserted into other equipment/device, unless otherwise indicated.Moreover, unless otherwise indicated, the number of various method steps is only
Differentiate the convenient tool of various method steps, rather than to limit the ordering of various method steps or limiting the enforceable model of the present invention
It encloses, relativeness is altered or modified, and without material changes in technical content, when being also considered as, the present invention is enforceable
Scope.
The present invention is directed to the deficiency of existing curved surface piezoelectric ceramic electrode manufacturing technology, provides a kind of curve ceramic electrode fabrication
Method.The thought of this method is the suitable electrode pattern material of selection, designs and makes electrode pattern；Figure is pasted onto ceramics
On piece convex surface, then manual brushing silver paste or leaching silver, are sintered silver paste after drying, at high temperature electrode pattern material ablation at ash or
Volatilization, the electrode to be needed on ceramic convex surface.The present invention solves spherical surface ceramic electrode especially flange electrode system
Make specification sex chromosome mosaicism, ensures the consistency and normalization of electrode shape and size, it is easy to operate, quick, meets production efficiency
Demand has stronger applicability and economy.It is applicable not only to shell-type focused transducer or other curve form piezoelectricity pottery
Prepared by porcelain electrode, be also applied for the shielding of piezoelectric ceramics electrode, keeps Fabrication Technology of Electrode diversified.
The technical solution adopted by the present invention is as follows：
1) sticky paper is chosen as electrode protection material, which is formed by two layers, wherein one side has cementability,
It fits through computer design electrode pattern and processes, another side does not have cementability.It, can since the protection materials have adhesive linkage
To be directly bonded on piezoelectric energy-conversion element, play the role of that silver paste is isolated.
2) electrode shape and size that needs as depicted in figs. 1 and 2, are made on electrode protection material, obtain required guarantor
Protect the electrode protection material of shape.
3) as shown in Fig. 3 a, Fig. 3 b, Fig. 4, Fig. 5, electrode protection material correspondence is pasted onto curved surface piezoelectric potsherd convex surface
With potsherd edge.
4) in spherical piezoelectric ceramic surface brushing silver paste, or by entire potsherd immersion silver paste, due to there is protection materials screening
Gear is not required to the position of brush silver, applies silver-colored speed and improves 50% or more.
5) 10min is dried at 120 DEG C so that silver paste is oven-dried；
6) the silver ink firing 10min at 800 DEG C, the volatilization of electrode protection material or carbonization during silver ink firing, being formed on potsherd needs
The electrode wanted.
The present invention solves curved surface piezoelectric ceramics silver electrode in the prior art and makes lack of standardization, cumbersome, producing efficiency
The problems such as low, this method can specification electrode size, while have the advantages that again it is easy to make, quick, especially for curved surface
Its advantage is particularly evident when piezoelectric patches needs electrode flange., this method is flexible, can design, is widely applicable, there is stronger applicability
And economy.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology can all carry out modifications and changes to above-described embodiment without violating the spirit and scope of the present invention.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should by the present invention claim be covered.
Claims (6)
1. a kind of piezoelectric ceramics method for making its electrode, which is characterized in that include the following steps：
1) the electrode protection material of curved surface piezoelectric ceramic surface can be bonded to by choosing；
2) shape protected needed for being made on electrode protection material；
3) the electrode protection material with protection shape is pasted onto the region protected needed for the curved surface piezoelectric ceramic surface；
4) in curved surface piezoelectric ceramic surface brushing silver paste, or by entire curved surface piezoelectric ceramics immerse silver paste in, after take out；
5) silver paste is dried；
6) silver ink firing, the volatilization of electrode protection material or carbonization, curved surface piezoelectric ceramic surface form the electrode needed in sintering process.
2. piezoelectric ceramics method for making its electrode according to claim 1, it is characterised in that：In step 1), the electrode is protected
Protective material is selected from adhesive label's paper or sticky paper.
3. piezoelectric ceramics method for making its electrode according to claim 1, it is characterised in that：The curved surface piezoelectric ceramic electrode
Including shell-type focused transducer electrode.
4. piezoelectric ceramics method for making its electrode according to claim 1, it is characterised in that：In step 3), required protection
Region is the position that electrode is formed needed for the edge or convex surface of curved surface piezoelectric ceramics.
5. piezoelectric ceramics method for making its electrode according to claim 1, it is characterised in that：In step 1), the electrode is protected
There is the one side of protective material viscosity, another side not to have viscosity.
6. according to piezoelectric ceramics electrode made from any one of claim 1-5 the methods.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810129513.0A CN108365086A (en) | 2018-02-08 | 2018-02-08 | A kind of piezoelectric ceramics electrode and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810129513.0A CN108365086A (en) | 2018-02-08 | 2018-02-08 | A kind of piezoelectric ceramics electrode and preparation method thereof |
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| CN108365086A true CN108365086A (en) | 2018-08-03 |
Family
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3927300A (en) * | 1973-03-09 | 1975-12-16 | Ngk Insulators Ltd | Electric fluid heater and resistance heating element therefor |
| JPS58176976A (en) * | 1982-04-09 | 1983-10-17 | Sharp Corp | Electrode formation of solar battery |
| JPH01186609A (en) * | 1988-01-14 | 1989-07-26 | Nichicon Corp | Manufacture of electrolytic capacitor |
| CN102875145A (en) * | 2012-09-29 | 2013-01-16 | 中国科学技术大学 | Layered perovskite structural ceramic and preparation method thereof |
| CN103224392A (en) * | 2013-04-03 | 2013-07-31 | 中国科学技术大学 | Layered perovskite multiferroic material and preparation method thereof |
| KR20130122423A (en) * | 2012-04-30 | 2013-11-07 | 한국세라믹기술원 | For solid oxide fuel cell-cell configuration cofireable manufacturing method and a preparation method of transfer paper prepared by the solid oxide fuel cells for cell configuration cofireable transfers |
| CN103522783A (en) * | 2013-10-24 | 2014-01-22 | 天津理工大学 | Method for preparing low-cost interdigital transducer and reflecting grating by utilizing silk-screen printing process |
| CN104134501A (en) * | 2014-07-22 | 2014-11-05 | 广东风华高新科技股份有限公司 | Annular voltage-sensitive resistor and preparation method thereof |
| CN104362227A (en) * | 2014-10-22 | 2015-02-18 | 西安交通大学苏州研究院 | Metal electrode patch production method |
| CN104766600A (en) * | 2015-03-12 | 2015-07-08 | 北京信息科技大学 | Laminated composite material cylindrical array transducer with matching layer and preparation method thereof |
-
2018
- 2018-02-08 CN CN201810129513.0A patent/CN108365086A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3927300A (en) * | 1973-03-09 | 1975-12-16 | Ngk Insulators Ltd | Electric fluid heater and resistance heating element therefor |
| JPS58176976A (en) * | 1982-04-09 | 1983-10-17 | Sharp Corp | Electrode formation of solar battery |
| JPH01186609A (en) * | 1988-01-14 | 1989-07-26 | Nichicon Corp | Manufacture of electrolytic capacitor |
| JP2655856B2 (en) * | 1988-01-14 | 1997-09-24 | ニチコン株式会社 | Manufacturing method of electrolytic capacitor |
| KR20130122423A (en) * | 2012-04-30 | 2013-11-07 | 한국세라믹기술원 | For solid oxide fuel cell-cell configuration cofireable manufacturing method and a preparation method of transfer paper prepared by the solid oxide fuel cells for cell configuration cofireable transfers |
| CN102875145A (en) * | 2012-09-29 | 2013-01-16 | 中国科学技术大学 | Layered perovskite structural ceramic and preparation method thereof |
| CN103224392A (en) * | 2013-04-03 | 2013-07-31 | 中国科学技术大学 | Layered perovskite multiferroic material and preparation method thereof |
| CN103522783A (en) * | 2013-10-24 | 2014-01-22 | 天津理工大学 | Method for preparing low-cost interdigital transducer and reflecting grating by utilizing silk-screen printing process |
| CN104134501A (en) * | 2014-07-22 | 2014-11-05 | 广东风华高新科技股份有限公司 | Annular voltage-sensitive resistor and preparation method thereof |
| CN104362227A (en) * | 2014-10-22 | 2015-02-18 | 西安交通大学苏州研究院 | Metal electrode patch production method |
| CN104766600A (en) * | 2015-03-12 | 2015-07-08 | 北京信息科技大学 | Laminated composite material cylindrical array transducer with matching layer and preparation method thereof |
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Application publication date: 20180803 |