CN108364839B - Line adaptively correcting device and correction plate electrode - Google Patents
Line adaptively correcting device and correction plate electrode Download PDFInfo
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- CN108364839B CN108364839B CN201810139891.7A CN201810139891A CN108364839B CN 108364839 B CN108364839 B CN 108364839B CN 201810139891 A CN201810139891 A CN 201810139891A CN 108364839 B CN108364839 B CN 108364839B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/12—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
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Abstract
The invention discloses a kind of line adaptively correcting device and correction plate electrodes.The correcting device includes: two correction plate electrodes being oppositely arranged, which includes: insulating substrate；Correcting electrode array, is distributed on insulating substrate, includes multiple correcting electrodes, is mutually connected to each other between multiple correcting electrodes by resistance string；Blowing electrod-array, includes multiple blowing electrodes, and each blowing distribution of electrodes can load generating positive and negative voltage between correcting electrode respectively, form the positive negative electric field spatially arranged on multiple blowing electrodes；And grounding electrode array, it include multiple grounding electrodes, each grounding electrode is distributed between blowing electrode and correcting electrode.The exit direction that the correcting device can be such that the charged particle beam of outgoing keeps constant, it changes without the trail change with incoming charged particles beam, reach adaptively correcting compensation, and not by the limitation of device geometries precision, power supply system stability and sensitivity etc..
Description
Technical field
The disclosure belongs to line alignment technique field, is related to a kind of line adaptively correcting device and correction plate electrode.
Background technique
Charged particle beam is inevitably present the phenomenon that electromagnetic parameter drift, and line alignment technique in transport process
It is a kind of indispensable means for compensating charged particle beam electromagnetic parameter in transport process and drifting about, helps to realize line and exist
It is distributed and stablizes in phase space.Common line correcting device mostly uses electrostatic deflection plates or correcting magnet, cooperates stable power supply
System carries out precise and tiny rectification building-out to drift value, to make line after leaving correcting device, can be along direction initialization before
Into.
Existing line correcting device mainly utilizes electric field or magnetic field adjusts the direction of line, and correcting value is usually adjusting beam rank
Duan Youhua is determined, and is finely tuned in real time based on beam diagnostics when running.But there is the case where shaking for incident line,
That is when the motion profile of charged particle beam incidence changes, the electromagnetic field in device can not be according to the real-time incident track of line
Adaptively guarantee that the direction of outgoing line is constant.On the other hand, existing line correcting device itself can introduce it is new not really
Qualitative factor, so that correction accuracy is limited to geometry precision, the stability of power supply system and sensitivity of device itself etc..
Therefore, the line correcting device for needing to propose a kind of nonlinear response can make what the charged particle beam of outgoing kept constant to go out
Direction is penetrated, is changed without the trail change with incoming charged particles beam, reaches adaptively correcting compensation, and not by device
The limitation of geometry precision, power supply system stability and sensitivity etc..
Summary of the invention
(1) technical problems to be solved
Present disclose provides a kind of line adaptively correcting device and correction plate electrodes, mentioned above at least partly to solve
Out the technical issues of.
(2) technical solution
According to one aspect of the disclosure, a kind of line adaptively correcting electrode plate is provided, comprising: insulating substrate；School
Positive electrode array, is distributed on insulating substrate, includes multiple correcting electrodes, and it is mutual to pass through resistance string between multiple correcting electrodes
It links together；And blowing electrod-array, include multiple blowing electrodes, each blowing distribution of electrodes between correcting electrode,
Generating positive and negative voltage can be loaded on multiple blowing electrodes respectively, forms the positive negative electric field spatially arranged.
In some embodiments of the present disclosure, the line adaptively correcting electrode plate, further includes: grounding electrode array, packet
Containing multiple grounding electrodes, each grounding electrode is distributed between the blowing electrode and the correcting electrode, partition blowing electrode
Leakage current between correcting electrode.
In some embodiments of the present disclosure, the both ends of resistance string are grounded respectively.
In some embodiments of the present disclosure, dry electrod-array in, multiple blowing electrodes according to positive and negative voltage successively between
Every the mode on-load voltage of arrangement, the positive negative electric field spatially arranged is formed.
In some embodiments of the present disclosure, the field strength of on-load voltage is between 10V/cm~10000V/cm.
A kind of line adaptively correcting device another aspect of the present disclosure provides, comprising: the first correcting electrode
Plate and the second correction plate electrode, first correction plate electrode and the second correction plate electrode face are arranged；Wherein, the first correcting electrode
Plate and the second correction plate electrode include: insulating substrate；Correcting electrode array, is distributed on insulating substrate, includes multiple schools
Positive electrode is mutually connected to each other between multiple correcting electrodes by resistance string；And blowing electrod-array, it include multiple blowings
Electrode, each blowing distribution of electrodes can load generating positive and negative voltage between correcting electrode on multiple blowing electrodes, formation is spatially arranged
The positive negative electric field of cloth.
In some embodiments of the present disclosure, the first correction plate electrode and the second correction plate electrode further include: grounding electrode
Array includes multiple grounding electrodes, and each grounding electrode is distributed between the blowing electrode and the correcting electrode, and partition is blown
Leakage current between wind-powered electricity generation pole and correcting electrode.
In some embodiments of the present disclosure, the both ends of resistance string are grounded respectively.
In some embodiments of the present disclosure, multiple blowing electrodes in the blowing electrod-array of the first correction plate electrode are pressed
It is corresponding according to the mode on-load voltage that positive and negative voltage is successively intervally arranged, in the blowing electrod-array of the second correction plate electrode
Multiple blowing electrodes on-load voltage in such a way that negative, positive voltage is successively intervally arranged forms the positive negative electric field spatially arranged.
In some embodiments of the present disclosure, the line adaptively correcting device, further includes: first support and second
Frame is respectively perpendicular the two sides for being fixed on the first correction plate electrode and the second correction plate electrode, corrects with the first correcting plate and second
Plate forms line cavity and passes through for line.
(3) beneficial effect
It can be seen from the above technical proposal that line adaptively correcting device and correction plate electrode that the disclosure provides, tool
Have it is following the utility model has the advantages that
(1) by the way that correcting electrode array, blowing electrod-array are arranged on correction plate electrode, when a part deposition of line
To two faces be arranged electrode plate in one when, generate potential between the correcting electrode in opposite correcting electrode array
Difference, to form correction electric field；Electrod-array of drying forms the spatially arrangement independent of correction electric field using applied voltage
Positive negative electric field, effectively inhibit space low energy charged particle density, maintain correction electric field strength；Not by device geometries essence
The limitation of degree, power supply system stability and sensitivity etc.；
(2) correcting electrode array is linked together by resistance string, and the surface resistance of non-used insulator itself or body electricity
Resistance, this has great promotion to the stability of device；Simultaneously because resistance string can be configured as the case may be, expand significantly
The use occasion of the correcting device.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the correcting device according to shown in one embodiment of the disclosure, the adaptive electrode of two of them
The setting of plate face.
Fig. 2 is the structural schematic diagram of the line adaptively correcting electrode plate according to shown in one embodiment of the disclosure.
Fig. 3 is the circuit connection diagram of the line adaptively correcting electrode plate according to shown in one embodiment of the disclosure.
[symbol description]
1- correction plate electrode；
11- insulating substrate；12- correcting electrode array；
13- grounding electrode array；14- blowing electrod-array；
The first correction plate electrode of 21-；The second correction plate electrode of 22-；
31- first support；32- second support；
40- fixation hole.
Specific embodiment
Present disclose provides a kind of line adaptively correcting device and correction plate electrode, which is a kind of non-linear
Device is responded, the charged particle beam transmitted can be made to lose its historical information to a certain extent, and according to preset track
Outgoing.By the way that correcting electrode array is arranged, which forms adaptively correcting electric field to charged particle, when incident line side
To when variation, the exit direction that outgoing line is kept constant reaches adaptive school without being influenced by incident line direction change
Positive compensation, not by the limitation of device geometries precision, power supply system stability and sensitivity etc..
For the purposes, technical schemes and advantages of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference
The disclosure is further described in attached drawing.
In first exemplary embodiment of the disclosure, a kind of correcting device that line is adaptive is provided.
Fig. 1 is the structural schematic diagram of the correcting device according to shown in one embodiment of the disclosure, the adaptive electrode of two of them
The setting of plate face.Fig. 2 is the structural schematic diagram of the line adaptively correcting electrode plate according to shown in one embodiment of the disclosure.Fig. 3
For the circuit connection diagram of the line adaptively correcting electrode plate according to shown in one embodiment of the disclosure.Ellipsis in Fig. 3
Indicate the circuit of the multiple correcting electrodes of middle section omitted, grounding electrode and electrode of drying.
Shown in referring to Fig.1, the line adaptively correcting device of the disclosure, comprising: the first correction plate electrode 21 and the second school
Positive electrode plate 22, first correction plate electrode 21 and 22 face of the second correction plate electrode are arranged；First support 31 and second support
32, the two sides for being fixed on the first correction plate electrode 21 and the second correction plate electrode 22 are respectively perpendicular, with the first correcting plate 21 and
Two correcting plates 22 form line cavity and pass through for line.
It describes in detail with reference to the accompanying drawing to the various pieces of the line adaptively correcting device of the present embodiment.
Referring to shown in Fig. 2, in the present embodiment, the first correction plate electrode 21 is identical as the second correction plate electrode 22, each school
Positive electrode plate 1 includes: insulating substrate 11；Correcting electrode array 12 is distributed on insulating substrate 11, includes multiple correction electricity
Pole is mutually connected to each other between multiple correcting electrodes by resistance string, and resistance string both ends are grounded respectively；Grounding electrode array
13, it include multiple grounding electrodes, every two grounding electrode is distributed between correcting electrode；And blowing electrod-array 14, include
Multiple blowing electrodes, each blowing distribution of electrodes is between every two grounding electrode.
First correction plate electrode 21 is oppositely arranged with the second correction plate electrode 22 according to left and right mode, first support 31
It is located at upper and lower side with second support 32, but the disclosure is not limited to this, the first correction plate electrode 21 and the second correcting electrode
The setting direction of plate 22 is with no restriction.
In the present embodiment, 22 top of the first correction plate electrode 21 and the second correction plate electrode, lower part are provided with fixation hole
40, the position to connect with first support 31 and second support 32 is consolidated by the way of being fastened, be bolted using screw, riveted etc.
It is fixed.
Referring to shown in Fig. 2, the correcting electrode array 12 on line adaptively correcting electrode plate 1 is distributed in insulating substrate 11
On, it include multiple correcting electrodes.Referring to shown in Fig. 3, linked together between multiple correcting electrodes by resistance string, this implementation
In example, a resistance is connected between every two correcting electrode, multiple resistance connect to form resistance string, and the both ends of resistance string point
It is not grounded.
In the present embodiment, since the first correction plate electrode 21 and 22 face of the second correction plate electrode are arranged, work as charged particle
For beam in transport process, a part of line deposits to the electricity of the correction on the first correction plate electrode 21 or the second correction plate electrode 22
When extremely upper, electric current is released by resistance string, and the corresponding correcting electrode for being deposited with line and correcting electrode adjacent thereto are in height
Potential difference is formed between potential, with the correcting electrode on the correction plate electrode that is provided opposite to, to form correction electric field, prevents beam
Stream is deposited with the correcting electrode of line further towards this, and line is able to be biased under the action of correcting electric field, and moves on.
Referring to shown in Fig. 2 and Fig. 3, grounding electrode array 13 includes multiple grounding electrodes, and every two grounding electrode is distributed in
Between correcting electrode.The effect of grounding electrode array 13 is the leakage current for separating correcting electrode between electrode of drying.
Referring to shown in Fig. 3, blowing electrod-array 14 can load generating positive and negative voltage respectively, in the present embodiment, the first correcting electrode
Multiple blowing electrodes in the blowing electrod-array of plate on-load voltage in such a way that positive and negative voltage is successively intervally arranged, it is corresponding
, the side that multiple blowing electrodes in the blowing electrod-array of the second correction plate electrode are successively intervally arranged according to negative, positive voltage
Formula on-load voltage forms the positive negative electric field spatially arranged.
The effect of blowing electrod-array 14 is the positive and negative field array to be formed independent of correction electric field, and utilizes the load
The positive negative electric field of voltage blows low energy sputtering negative ions and low-energy electron in correcting area off, inhibits space low energy charged particle
Density reduces space plasma conductivity, maintains correction electric field strength.On the one hand, to meet can for the field strength of on-load voltage
Low energy sputtering negative ions and low-energy electron are consumed, space low energy charged particle density is inhibited；On the other hand, on-load voltage with
It will be much smaller than the energy of incident line particle.The disclosure does not limit the size of on-load voltage, does not limit the generating positive and negative voltage of load yet
Arrangement mode.Preferably, the field strength of on-load voltage is between 10V/cm~10000V/cm.Preferably, the positive negative electricity of load
It presses according to spaced mode, but the positive and negative field array of the disclosure can be other arrangement modes spatially, here only
Using embodiment as schematically illustrate.
If charged particle beam intensity is in the magnitude of nA~mA, amount of the resistance being connected with correcting electrode in G Ω~T Ω
Grade, then the line adaptively correcting device of the present embodiment can energy to incoming particle in eV~10 10q7The grain of q eV range
Son realizes correction within the scope of ± 10 °, wherein q is the quantity of electric charge.
In the present embodiment, a part of line is got on electrode, its charge is eventually by electricity while forming correction electric field
Crossfire is hindered to ground potential；This line loss is the key that adaptation mechanism and dissipation mechanism in the disclosure, so that correction electric field
Different line situations can be adapted to automatically, and is stable.
It should be noted that the disclosure does not limit the setting position of resistance string, in the present embodiment, resistance string is arranged exhausted
The back side of edge substrate 11 in figure and is not drawn into structural schematic diagram, is only illustrated with circuit connection diagram shown in Fig. 2.Here Fig. 1
Shown in hole on insulating substrate 11 be fixation hole, it is corresponding with the fixation hole 40 in Fig. 3.The resistance mentioned in embodiment
String and correcting electrode are connected by metallization VIA or other modes therebetween, and the disclosure does not limit resistance string and correction
The connection type of electrode.
In conclusion present disclose provides a kind of line adaptively correcting device and correction plate electrode, by correction electricity
Correcting electrode array, blowing electrod-array are set on pole plate, when a part of line deposits to the electrode plate of two faces setting
In one when, potential difference is generated between the correcting electrode in opposite correcting electrode array, to form correction electric field；It blows
Wind electrod-array forms the positive and negative field array independent of correction electric field using applied voltage, effectively inhibits the electrification of space low energy
Particle density maintains correction electric field strength；Not by the office of device geometries precision, power supply system stability and sensitivity etc.
Limit；Correcting electrode array is linked together by resistance string, and the surface resistance or bulk resistor of non-used insulator itself, this is to dress
The stability set has great promotion；Simultaneously because resistance string can be configured as the case may be, the correction has been expanded significantly
The use occasion of device.
It should also be noted that, the geometry in the present embodiment, the geometry after the shape of electrode, assembling is served only for
It explains the present invention, is not intended to limit the scope of the present invention.The shape and size of each component do not reflect actual size and ratio in figure
Example, and only illustrate the content of the embodiment of the present disclosure.In addition, in the claims, it should not be by any reference between parentheses
Symbol construction is at limitations on claims.
In addition, the direction term mentioned in embodiment, such as "upper", "lower", "front", "rear", "left", "right" etc., are only
With reference to the direction of attached drawing, not it is used to limit the protection scope of the disclosure.Through attached drawing, identical element is by same or similar
Appended drawing reference indicates.When may cause understanding of this disclosure and cause to obscure, conventional structure or construction will be omitted.
The word of ordinal number such as " first ", " second ", " third " etc. used in specification and claim, with modification
Corresponding element, itself is not meant to that the element has any ordinal number, does not also represent the suitable of a certain element and another element
Sequence in sequence or manufacturing method, the use of those ordinal numbers are only used to enable a certain element and another with certain name
Element with identical name can make clear differentiation.
Particular embodiments described above has carried out further in detail the purpose of the disclosure, technical scheme and beneficial effects
Describe in detail it is bright, it is all it should be understood that be not limited to the disclosure the foregoing is merely the specific embodiment of the disclosure
Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure
Within the scope of shield.
Claims (10)
1. a kind of line adaptively correcting electrode plate, comprising:
Insulating substrate；
Correcting electrode array, is distributed on insulating substrate, includes multiple correcting electrodes, passes through resistance between multiple correcting electrodes
String is mutually connected to each other；And
Blowing electrod-array, includes multiple blowing electrodes, and each blowing distribution of electrodes is described more between adjacent correcting electrode
Generating positive and negative voltage can be loaded on a blowing electrode respectively, forms the positive negative electric field spatially arranged.
2. line adaptively correcting electrode plate according to claim 1, further includes:
Grounding electrode array, includes multiple grounding electrodes, and each grounding electrode is distributed in the adjacent blowing electrode and described
Between correcting electrode, separate the leakage current between the blowing electrode and the correcting electrode.
3. line adaptively correcting electrode plate according to claim 1, wherein the both ends of the resistance string are grounded respectively.
4. line adaptively correcting electrode plate according to claim 1, wherein described more in the blowing electrod-array
A blowing electrode on-load voltage in such a way that positive and negative voltage is successively intervally arranged forms the positive negative electric field spatially arranged.
5. line adaptively correcting electrode plate according to claim 4, wherein the on-load voltage is arranged in two faces
Correction plate electrode between the electric field strength that generates between 10V/cm~10000V/cm.
6. a kind of line adaptively correcting device, comprising:
First correction plate electrode and the second correction plate electrode, first correction plate electrode and the second correction plate electrode face are arranged；
Wherein, first correction plate electrode includes: with the second correction plate electrode
Insulating substrate；
Correcting electrode array, is distributed on insulating substrate, includes multiple correcting electrodes, passes through resistance between multiple correcting electrodes
String is mutually connected to each other；And
Blowing electrod-array, includes multiple blowing electrodes, and each blowing distribution of electrodes is described more between adjacent correcting electrode
Generating positive and negative voltage can be loaded on a blowing electrode respectively, forms the positive negative electric field spatially arranged.
7. line adaptively correcting device according to claim 6, wherein first correction plate electrode and the second correction
Electrode plate further include:
Grounding electrode array, includes multiple grounding electrodes, and each grounding electrode is distributed in the adjacent blowing electrode and described
Between correcting electrode, separate the leakage current between the blowing electrode and the correcting electrode.
8. line adaptively correcting device according to claim 6, wherein the both ends of the resistance string are grounded respectively.
9. line adaptively correcting device according to claim 6, wherein the blowing electrode of first correction plate electrode
Multiple blowing electrodes in array on-load voltage, corresponding, second school in such a way that positive and negative voltage is successively intervally arranged
Multiple blowing electrodes in the blowing electrod-array of positive electrode plate load electricity in such a way that negative, positive voltage is successively intervally arranged
Pressure forms the positive negative electric field spatially arranged.
10. according to the described in any item line adaptively correcting devices of claim 6 to 9, further includes:
First support and second support are respectively perpendicular the two sides for being fixed on the first correction plate electrode and the second correction plate electrode, with
First correcting plate and the second correcting plate form line cavity and pass through for line.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2018100374629 | 2018-01-12 | ||
| CN201810037462 | 2018-01-12 |
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| CN108364839B true CN108364839B (en) | 2019-11-15 |
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| CN110286403B (en) * | 2019-07-09 | 2020-11-03 | 中国科学院近代物理研究所 | Detector and method for collecting two-dimensional beam profile by staggered charges |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4782304A (en) * | 1986-08-20 | 1988-11-01 | Applied Materials, Inc. | Systems and methds for ion beam acceleration |
| JP2723106B2 (en) * | 1996-08-08 | 1998-03-09 | 株式会社日立製作所 | High voltage ion implanter |
| JP4157836B2 (en) * | 2003-12-19 | 2008-10-01 | 株式会社アルバック | Gas cluster ion beam system |
| FR2961009A1 (en) * | 2010-06-03 | 2011-12-09 | Ion Beam Services | SECONDARY ELECTRON ELECTRON DETECTOR |
| CN102446690B (en) * | 2010-10-13 | 2015-07-15 | 北京中科信电子装备有限公司 | Mechanical ion beam uniformity corrector |
| CN102723254B (en) * | 2012-06-20 | 2015-07-22 | 清华大学 | Focusing device and method of flat high-field asymmetric waveform ion mobility spectrometer |
| CN103956311B (en) * | 2014-05-16 | 2017-02-22 | 厦门大学 | Charged particle beam trajectory control device |
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