CN108362222A - Based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency - Google Patents
Based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency Download PDFInfo
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- CN108362222A CN108362222A CN201810083474.5A CN201810083474A CN108362222A CN 108362222 A CN108362222 A CN 108362222A CN 201810083474 A CN201810083474 A CN 201810083474A CN 108362222 A CN108362222 A CN 108362222A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The present invention proposes a kind of based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency, including linearly polarized laser light source, fiber coupler module, fiber array, part to be measured and interference image acquisition system, the polarization laser light source, fiber coupler module, fiber array are total to primary optic axis setting successively, the part to be measured is located at the second optical axis, second optical axis and a quarter that primary optic axis angle is the every fiber exit beam angle of divergence, the best fit spheric curvature center of the part to be measured is overlapped with fiber array end face center.The present invention constitutes a point diffraction battle array using fiber array, and it is surface graded to generate the multidirectional corrugated compensation measured piece for tilting carrier frequency, solves the problem of that interference fringe density is excessive to resolve when interferometry measures complexity face shape element.
Description
Technical field
The present invention relates to complicated face shape optical component surface shape measuring system technical fields, especially a kind of to be based on multidirectional inclination
The novel point-diffraction interference measuring system of nonzero digit of carrier frequency.
Background technology
In recent years, as each field is higher and higher to the performance requirement of optical system, complicated face shape optical element obtains
It is widely applied.Compared with traditional optical elements, complicated face shape optical element has more degree of freedom, the energy in optical system
More easily aberration correction greatly simplifies system structure.But complicated face shape optical element surface shape is freely complicated, gradient becomes
Change big, many problems have been brought to the high-acruracy survey of its face shape, this, which becomes, limits heavy caliber complexity face shape element and navigating
The bottleneck further applied in the fields such as empty space flight, national defence, astronomy, photoetching.
Complex-curved detection method is broadly divided into contact and contactless.Contaction measurement method is that optical element adds
Work order position can ripe application method, include mainly three coordinate measuring machine method, contourgraph method and swing-arm profilometry method.Contact
Formula mensuration is by the way of point by point scanning, and spot measurement precision can reach nanometer scale, but measurement efficiency is low, can not be primary
To measured piece whole audience pattern, and optical element surface can be caused to damage in measurement process.Non-contact detection method includes micro-
Lens array method, structural light three-dimensional mensuration and interferometry.Wherein, interferometry is currently generally acknowledged measurement optical component surface shape
Most accurate, most efficient method.However traditional interferometer measuration system is when measuring complicated face shape element, often interference fringe mistake
It is close, the face shape of optical element can not be resolved by stripe information.
A kind of multiple inclination corrugated based on pointolite array has been invented by the Osten professors team of Stuttgart University, Germany
Interferometry.When using the systematic survey complexity face shape, maximum can compensate 10 ° surface graded, measurement accuracy better than λ/
30.This method Plays spherical wave is generated by standard compensation spherical lens group, since system is nonzero digit interference system and big absolutely
Part light path is located at outside axis, then standard compensation spherical lens group can introduce a large amount of wave aberrations, causes systematic error excessive, limitation
The measurement accuracy of this method；And it is limited to level of processing, it is very high to make bigbore standard compensation spherical lens group cost,
Which limits the measurement bores of whole system, it is difficult to realize the measurement of heavy caliber face shape.
Invention content
Being designed to provide for invention is a kind of based on the multidirectional novel point-diffraction interference of nonzero digit for tilting carrier frequency
Measuring system, solve the prior art cannot achieve heavy caliber complexity face shape optical element high-acruracy survey and generalization measure
Problem.
Realize that technical solution of the invention is：A kind of novel point-diffraction interference of nonzero digit based on multidirectional inclination carrier frequency
Measuring system, including linearly polarized laser light source, fiber coupler module, fiber array, part to be measured and interference image acquisition system
System, the polarization laser light source, fiber coupler module, fiber array are total to primary optic axis setting successively, and the part to be measured is located at
Second optical axis, the second optical axis and a quarter that primary optic axis angle is the every fiber exit beam angle of divergence, the part to be measured
Best fit spheric curvature center overlapped with fiber array end face center；
The linearly polarized laser that optical fiber laser is sent out imports fiber coupler module by optical fiber, and fiber coupler module is by one
Shu Jiguang is divided into several Shu Jiguang, and several Shu Jiguang import fiber array, generate several standard spherical waves, a portion mark
Director sphere wave is used as enters interferogram sampling system with reference to light, and another part standard spherical wave is incident on tested as test light
Part, test light are reflected into interferogram sampling system through measured piece, fiber array successively, and reference light is adopted with test light in interference pattern
Phase-shift interference is formed in collecting system.
Preferably, the interferogram sampling system includes collimator objective, long cylinder diaphragm, spatial polarization phase shift block, imaging
Lens and CCD camera, the collimator objective, long cylinder diaphragm, spatial polarization phase shift block, imaging len and CCD camera are total to third
Optical axis is arranged, and reference light and several beam directional lights of the collimated lens forming of test light, several beam directional lights are filtered through long cylinder diaphragm
Except by spatial polarization phase shift block, spatial polarization phase shift block will be divided into four beams per Shu Guang and have dephased diffraction after spuious
Light, imaged lens form the four width spatial Phase-shifting Method interference patterns that phase respectively differs pi/2 on CCD camera target surface.
Preferably, the spatial polarization phase shift block includes phase grating, convergent lens, micro- polarization chip arrays, through long
Cylinder diaphragm 6 filter out it is spuious after directional light be divided to obtain diffraction light through phase grating, pass through micro- polarization respectively after concentrated lens
The different zones of chip arrays.
Preferably, the second optical axis where measured piece and the third optical axis where interferogram sampling system are in primary optic axis two
Side is symmetrical.
Preferably, several Shu Jiguang of the fiber coupler module import fiber array by optical fiber.
Compared with prior art, the present invention its remarkable advantage is：(1) present invention is using thin optic fibre section as point diffractometer
Part generates the point diffractive spherical wave of near ideal, standard compensation spherical lens group need not just be added in such light path, avoid standard
It compensates spherical lens group and introduces a large amount of wave aberrations, while breaching standard compensation spherical lens group and bore is measured to interference system
Limitation.(2) present invention constitutes point diffraction battle array using fiber array, generates the multidirectional corrugated compensation measured piece surface ladder for tilting carrier frequency
Degree solves the problem of that interference fringe density is excessive to resolve when interferometry measures complexity face shape element.
Further detailed description is done to the present invention below in conjunction with the accompanying drawings.
Description of the drawings
Fig. 1 is that the present invention is based on the multidirectional inclined novel point-diffraction interference measuring system schematic diagrames of nonzero digit.
Specific implementation mode
A kind of novel point-diffraction interference measuring system of nonzero digit based on multidirectional inclination carrier frequency, including linearly polarized laser light source
1, fiber coupler module 2, fiber array 3, part to be measured 4 and interference image acquisition system, the polarization laser light source 1, light
Fine Coupler Module 2, fiber array 3 are total to primary optic axis setting successively, and the part 4 to be measured is located at the second optical axis, the second optical axis and
Primary optic axis angle is a quarter of the every fiber exit beam angle of divergence, the best fit spheric curvature of the part 4 to be measured
Center is overlapped with 3 end face center of fiber array；
The linearly polarized laser that optical fiber laser 1 is sent out imports fiber coupler module 2, fiber coupler module 2 by optical fiber
Beam of laser is divided into several Shu Jiguang, several Shu Jiguang import fiber array 3, several standard spherical waves generated, wherein one
Part of standards spherical wave is used as enters interferogram sampling system with reference to light, and another part standard spherical wave is incident on as test light
Measured piece 4, test light are reflected into interferogram sampling system through measured piece 4, fiber array 3 successively, and reference light exists with test light
Phase-shift interference is formed in interferogram sampling system.
In further embodiment, the interferogram sampling system includes collimator objective 5, long cylinder diaphragm 6, spatial polarization shifting
Phase module, imaging len 10 and CCD camera 11, the collimator objective 5, long cylinder diaphragm 6, spatial polarization phase shift block, imaging are saturating
Mirror 10 and CCD camera 11 are total to the setting of third optical axis, and the collimated lens of reference light and test light 5 form several beam directional lights, several
Beam directional light through long cylinder diaphragm 6 filter out it is spuious after by spatial polarization phase shift block, spatial polarization phase shift block will be per Shu Guang
It is divided into four beams and has dephased diffraction light, imaged lens 10 forms phase on 11 target surface of CCD camera and respectively differ the four of pi/2
Width spatial Phase-shifting Method interference pattern.
In further embodiment, the spatial polarization phase shift block includes phase grating 7, convergent lens 8, micro- polarizing film
Array 9, through long cylinder diaphragm 6 filter out it is spuious after directional light obtain diffraction light through the light splitting of phase grating 7, after concentrated lens 8
Pass through the different zones of micro- polarization chip arrays 9 respectively.
In further embodiment, the second optical axis where measured piece 4 and the third optical axis where interferogram sampling system
It is symmetrical in primary optic axis both sides.
In further embodiment, several Shu Jiguang of the fiber coupler module 2 import fiber array by optical fiber
3。
In the present invention, the test light of every fiber exit can cover the entire surface shape of part 4 to be measured in fiber array 3.System
System is nonzero digit interference system, and test light need not completely return to 3 end face center of fiber array after part 4 to be measured reflection, as long as
Interference pattern fringe density can be met and be no more than CCD11 resolution ratio.
The present invention is in order to eliminate the influence of stray light, reference light and be reflected by part 4 to be measured that only optical fiber is sent out on axis
Test light at 3 end face center of fiber array can be absorbed by long cylinder diaphragm 6, remaining stray light by long 6 inner wall of cylinder diaphragm.
The present invention interferes with each other in order to avoid the interference pattern that adjacent point light source generates, every optical fiber in fiber array 3
Light path break-make is realized by corresponding photoswitch in fiber coupler module 2.
Finally by the break-make for controlling different point light source respective optical paths, the son corresponding to part difference partial face shape to be measured is obtained
Sub- interference pattern is spliced and is merged by interference pattern, obtains the interference pattern for corresponding to entire part face to be measured shape.By to spliced interference
Figure is settled accounts, and the face graphic data of part to be measured is obtained
It is described in more detail with reference to embodiment.
Embodiment 1
In conjunction with shown in Fig. 1, one kind being based on the multidirectional inclined novel point-diffraction interference measuring system of nonzero digit, and light path is to improve
Reflection type point diffraction optical interference circuit system, including linearly polarized laser light source 1, fiber coupling module 2, fiber array 3, part to be measured
4, collimator objective 5, long cylinder diaphragm 6, phase grating 7, convergent lens 8, micro- polarization chip arrays 9, imaging len 10 and CCD camera
11；Wherein fiber array 3 is gradient compensating module, phase grating 7, convergent lens 8 and micro- 9 Special composition of polarization chip arrays polarization
Phase shift block；Common optical axis is arranged successively for linearly polarized laser light source 1, fiber coupling module 2, fiber array 3, this optical axis is the first light
Axis；4 place optical axis of measured piece is the second optical axis, and the second optical axis and primary optic axis angle are the every fiber exit beam angle of divergence
A quarter；Collimator objective 5, long cylinder diaphragm 6, phase grating 7, convergent lens 8, micro- polarization chip arrays 9,10 and of imaging len
Common optical axis is arranged CCD camera 11 successively, forms interferogram sampling system, and collimator objective 5, phase grating 7, is assembled long cylinder diaphragm 6
Lens 8, micro- polarization chip arrays 9, imaging len 10 and 11 place optical axis of CCD camera are third optical axis, second where measured piece 4
Optical axis is symmetrical in primary optic axis both sides with the third optical axis where interferogram sampling system；The line that optical fiber laser 1 is sent out
Polarization laser imports fiber coupling module 2 by optical fiber, and beam of laser is divided into several Shu Jiguang by fiber coupling module 2, then by light
This several Shu Jiguang is imported fiber array 3 by fibre, goes out several standard spherical waves, a portion mark by 3 diffraction of fiber array
Director sphere wave is used as enters interferogram sampling system with reference to light, and another part is incident on measured piece 4 as test light, test light according to
Secondary to be reflected into interferogram sampling system through measured piece 4, fiber array 3, reference light is with test light in interferogram sampling system
First collimated lens 5 form several beam directional lights, and after filtering out stray light using long cylinder diaphragm 6, light beam is divided through phase grating 7
Four beam diffraction lights are obtained, are existed respectively by the different zones of micro- polarization chip arrays 9, then imaged object lens 10 after concentrated lens 8
Phase-shift interference is formed on CCD11.
Claims (5)
1. a kind of based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency, which is characterized in that inclined including line
It shakes laser light source (1), fiber coupler module (2), fiber array (3), part to be measured (4) and interference image acquisition system, institute
It states polarization laser light source (1), fiber coupler module (2), fiber array (3) and is total to primary optic axis setting, the part to be measured successively
(4) it is located at the second optical axis, the second optical axis and a quarter that primary optic axis angle is the every fiber exit beam angle of divergence, it is described
The best fit spheric curvature center of part (4) to be measured is overlapped with fiber array (3) end face center；
The linearly polarized laser that optical fiber laser (1) is sent out imports fiber coupler module (2), fiber coupler module by optical fiber
(2) beam of laser being divided into several Shu Jiguang, several Shu Jiguang import fiber array (3), generate several standard spherical waves,
Middle a part of standard spherical wave is used as enters interferogram sampling system with reference to light, and another part standard spherical wave enters as test light
It is mapped to measured piece (4), test light is reflected into interferogram sampling system, reference light through measured piece (4), fiber array (3) successively
With test light phase-shift interference is formed in interferogram sampling system.
2. it is according to claim 1 based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency, it is special
Sign is that the interferogram sampling system includes collimator objective (5), long cylinder diaphragm (6), spatial polarization phase shift block, is imaged thoroughly
Mirror (10) and CCD camera (11), the collimator objective (5), long cylinder diaphragm (6), spatial polarization phase shift block, imaging len (10)
It is total to the setting of third optical axis with CCD camera (11), reference light forms several beam directional lights with the collimated lens of test light (5), several
Beam directional light through long cylinder diaphragm (6) filter out it is spuious after by spatial polarization phase shift block, spatial polarization phase shift block will be per beam
Light is divided into four beams and has dephased diffraction light, and imaged lens (10) form phase on CCD camera (11) target surface and respectively differ
Four width spatial Phase-shifting Method interference patterns of pi/2.
3. it is according to claim 2 based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency, it is special
Sign is that the spatial polarization phase shift block includes phase grating (7), convergent lens (8), micro- polarization chip arrays (9), through long
Cylinder diaphragm 6 filter out it is spuious after directional light through phase grating (7) light splitting obtain diffraction light, pass through respectively after concentrated lens (8)
The different zones of micro- polarization chip arrays (9).
4. it is according to claim 1 based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency, it is special
Sign is that the second optical axis where measured piece (4) is with the third optical axis where interferogram sampling system in primary optic axis both sides pair
Claim distribution.
5. it is according to claim 1 based on the multidirectional novel point-diffraction interference measuring system of nonzero digit for tilting carrier frequency, it is special
Sign is that several Shu Jiguang of the fiber coupler module (2) import fiber array (3) by optical fiber.
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| CN113203357A (en) * | 2021-04-09 | 2021-08-03 | 中国科学院上海光学精密机械研究所 | Bilateral Fizeau interferometer detection device |
| CN113251949A (en) * | 2021-06-18 | 2021-08-13 | 三代光学科技（天津）有限公司 | Method for generating single-point optical measurement path of micro-lens array surface shape |
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