CN108350894A - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- CN108350894A CN108350894A CN201680063254.5A CN201680063254A CN108350894A CN 108350894 A CN108350894 A CN 108350894A CN 201680063254 A CN201680063254 A CN 201680063254A CN 108350894 A CN108350894 A CN 108350894A
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- CN
- China
- Prior art keywords
- stator
- rotor
- cylindrical portion
- vacuum pump
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/006—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by influencing fluid temperatures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/586—Cooling; Heating; Diminishing heat transfer specially adapted for liquid pumps
- F04D29/588—Cooling; Heating; Diminishing heat transfer specially adapted for liquid pumps cooling or heating the machine
Abstract
A kind of cured vacuum pump inhibiting gas while making pump run well is provided.Vacuum pump（1）Pedestal can be rotatably supported at by having（11）On rotor（20）, have screw thread groove portion（71）Stator（70）With by stator（70）The heating configuration of heating（H）.Heating configuration（H）Have from addition to stator（70）Retaining element in addition is by the heat-insulated spacer of stator（80）And by stator（70）The cartridge heater of heating（90）.Rotor cylindrical portion（28）With stator（70）Air entry side leave distance（L3）It is set to and rotor cylindrical portion（28）With stator（70）Exhaust side leave distance（L4）It is identical or be larger than.
Description
Technical field
The present invention relates to vacuum pumps, true in particular to what is utilized in the pressure limit from low vacuum to ultrahigh vacuum
Sky pump.
Background technology
When manufacturing the semiconductor devices such as memory or integrated circuit, in order to avoid the shadow brought by the dust etc. in air
It rings, needs the semiconductor substrate to high-purity in the chamber of high vacuum state（Chip）It is doped or etches, for chamber
Interior exhaust, such as use the vacuum pumps such as the combination pump for combining turbomolecular pump with thread groove pump.
As such vacuum pump, such as it has been known that there is following such structures：It has cylindric shell, is consolidated by sleeve
Turn for being scheduled in shell and being equipped with the cylindric stator of screw thread groove portion and capable of being supported to high speed rotation in stator
Son, gas in the thread groove pump being made of rotor and stator on one side by compression while byed to transfer.
But if the temperature of stator be less than gas sublimation point, have transferred in thread groove pump by high pressure pressure
The gas of contracting cures, and the product of accumulation makes the flow path of gas narrow, and what compression performance, the exhaust performance of vacuum pump declined can
Energy.
So the vacuum pump as the generation for inhibiting product, it is known to following such structure：It has setting fixed
The insulating spacers of insulated space, bearing stator around son and the heater being embedded in stator（For example, referring to patent text
Offer 1）.Such vacuum pump is heated stator by heater, and the gas in gas flow path cured will not moved
It send.
Patent document 1：International Publication No. 2015/015902.
Invention content
But in vacuum pump as described above, the temperature of stator is higher, and the easier gas by gas flow path is with gas
The original state of body is compressed, and on the other hand, is increased from insulating spacers to the possibility of the surrounding of stator heat dissipation.For being arranged true
Sky pump in electronic unit or make rotor rotate motor, if temperature is got higher, it is likely that do not play desired function, for
Rotary wings or fixed-wing, if temperature is got higher, intensity declines and is possible to be broken in operation.Therefore, if it is desired to will determine
Son is heated to high temperature, then increases instead from the heat dissipation of stator, it is possible to bring harmful effect to the operating of vacuum pump.
So in order to inhibit the solidification of gas while so that pump is run well, technical problems to be solved are produced, this
Invention is for the purpose of solving the problems, such as this.
The present invention is to propose in order to achieve the above object, and the invention that technical solution 1 is recorded provides a kind of vacuum pump,
Have：Pedestal；Rotor has the rotor cylindrical portion being housed in the pedestal, can be rotatably supported on aforementioned pedestal；Greatly
Cylindric stator is caused, is configured between aforementioned pedestal and foregoing rotor cylindrical portion；With screw thread groove portion, carved be located at it is aforementioned
In the one party of the peripheral surface of rotor cylindrical portion or the inner peripheral surface of stator former, which has：Heat-shield mechanism, from addition to
Retaining element other than stator former is heat-insulated by stator former；Heating mechanism heats stator former；Foregoing rotor cylindrical portion
It is set to and the exhaust side of foregoing rotor cylindrical portion and stator former with the distance of leaving of the air entry side of stator former
It leaves apart from identical or be larger than.
According to the program, stator is heated in the state of heat-insulated from other retaining elements, as a result, due to heat from stator
The intensity decline of the electronic unit of dissipation, the bad and rotary wings of action of motor, fixed-wing is suppressed, so can inhibit gas
The normal operation of pump is realized while the solidification of body.
In addition, the air entry side of rotor and stator leave distance be set to the exhaust side of rotor and stator from
Open apart from identical or be larger than, even as a result, in the operating of vacuum pump rotor deformed by centrifugal force or rotor by
The case where being thermally expanded to the radiant heat from stator, since the distance of leaving of rotor and stator is protected from suction side to exhaust side
It holds to be roughly equal, so also the flow path of gas can be inhibited exceedingly to narrow.
The invention that technical solution 2 is recorded provides a kind of vacuum pump, the scheme of the vacuum pump recorded in addition to technical solution 1 with
Outside, aforementioned heat-shield mechanism have contacted with stator former on rotor axial and the flange part that is disposed on aforementioned pedestal and
On rotor axial with aforementioned base into contact and the spacer cylindrical portion that is arranged on the inner peripheral in said flange portion, be by aforementioned plus
Heat engine structure is contained in the spacer in said flange portion.
According to the program, spacer is installed between stator and pedestal, stator is supported on rotor axial, as a result,
Spacer is heat-insulated from other retaining elements by stator, so the normal fortune of pump can be realized while inhibiting the solidification of gas
Turn.
The invention that technical solution 3 is recorded provides a kind of vacuum pump, the scheme of the vacuum pump recorded in addition to technical solution 2 with
Outside, stator former at least part of deformation to rotor radial when thermally expanding is constrained by aforesaid spacer.
According to the program, be abnormal in vacuum pump and rotor cylindrical portion contact on stator, due to
Spacing body inhibits the phenomenon that stator is deformed by the kinetic energy of rotor, so can also reduce kinetic energy to the transmission outside pump.
The invention that technical solution 4 is recorded provides a kind of vacuum pump, in addition to the scheme for the vacuum pump that technical solution 2 or 3 is recorded
In addition, aforesaid spacer is the linear expansion coefficient component lower than stator former.
According to the program, the deflection brought by thermal expansion of the deflection brought by thermal expansion of spacer than stator
Small, the deformation of stator can be limited by configuring the spacer in the peripheral side of the rotor radial of stator as a result,.
The invention that technical solution 5 is recorded provides a kind of vacuum pump, the vacuum recorded in addition to any one of technical solution 2 to 4
Other than the scheme of pump, distance is left than from aforementioned from aforementioned heating mechanism to stator former with the contact portion in said flange portion
Heating mechanism is left to aforementioned pedestal and the contact portion of aforesaid spacer cylindrical portion apart from short.
According to the program, heat-transfer path from heating mechanism to pedestal than the heat transfer circuit path length from heating mechanism to stator,
It is suppressed as a result, from spacer to the heat dissipation of pedestal, so the normal of pump can be realized while inhibiting the solidification of gas
Operating.
The invention that technical solution 6 is recorded provides a kind of vacuum pump, the vacuum recorded in addition to any one of technical solution 2 to 5
Other than the scheme of pump, aforesaid spacer cylindrical portion can carry out the positioning of rotor axial, and formed relatively thin so as to
Flexible deformation on rotor radial.
According to the program, even if in the case where stator thermally expands, the spacer cylinder by deformation corresponding to stator
Portion's flexible deformation prevents thermal contact resistance due to stator and spacer excessive contact between stator and spacer from significantly declining,
Inhibit the heat dissipation from spacer to pedestal, so the normal operation of pump can be realized while inhibiting the solidification of gas.
The invention that technical solution 7 is recorded provides a kind of vacuum pump, the vacuum recorded in addition to any one of technical solution 2 to 6
Other than the scheme of pump, aforesaid spacer is installed on rotor radial with bell and spigot joint construction and stator former.
According to the program, gap is ensured between stator and spacer on rotor radial, even if as a result, in stator heat
In the case of expansion, be also prevented from due to stator pushes spacer on rotor radial and pedestal is exceedingly contacted with spacer
Contact area excessive increase and thermal contact resistance due to the increase of such contact area between pedestal and spacer it is aobvious
It writes ground to decline, be suppressed from spacer to the heat dissipation of pedestal, so pump can be realized while inhibiting the solidification of gas
It runs well.
The invention that technical solution 8 is recorded provides a kind of vacuum pump, the vacuum recorded in addition to any one of technical solution 2 to 7
Other than the scheme of pump, aforesaid spacer is installed with bell and spigot joint construction with aforementioned pedestal on rotor radial.
According to the program, gap is ensured between pedestal and spacer on rotor radial, even if being thermally expanded in spacer
In the case of, it is also prevented from thermal contact resistance due to pedestal and spacer excessive contact between pedestal and spacer and significantly declines,
It is suppressed from spacer to the heat dissipation of pedestal, so can also realize the normal fortune of pump while inhibiting the solidification of gas
Turn.
Vacuum pump for the present invention inhibits heat to be dissipated from stator, so can be real while inhibiting the solidification of gas
The normal operation now pumped.
In addition, by the way that the distance of leaving of the air entry side of rotor and stator is set as exhaust side with rotor and stator
Leave apart from identical or be larger than, even if in the operating of vacuum pump rotor deformed by centrifugal force or rotor by
In the case that the radiant heat of stator thermally expands, the distance of leaving of rotor and stator is also kept from suction side to exhaust side
Distance or roughly equal variation degree are left to be set, so the flow path of gas can be inhibited the bad shape such as exceedingly to narrow
Condition.
Description of the drawings
Fig. 1 is the sectional view for the vacuum pump for indicating an embodiment for the present invention.
Fig. 2 is the enlarged view of the main part of Fig. 1.
Fig. 3 is the sectional view for indicating rotor cylindrical portion and stator.
Fig. 4 is the schematic diagram for the effect for illustrating spacer, Fig. 4（a）It is the figure for indicating the state before stator thermal expansion, Fig. 4
（b）It is the figure for indicating the state after stator thermal expansion.
Specific implementation mode
The present invention inhibits the cured purpose of gas in order to reach while so that pump is run well, and passes through technology below
Scheme is realized：A kind of vacuum pump has pedestal, with the rotor cylindrical portion being housed in pedestal and can be rotatably supported at base
Substantially cylindric stator between pedestal and rotor cylindrical portion of rotor on seat, configuration and it is located at rotor cylindrical portion quarter
Peripheral surface or stator inner peripheral surface one party on screw thread groove portion, which has：Heat-shield mechanism, from addition to stator
Retaining element in addition is heat-insulated by stator；Heating mechanism heats stator；The air entry side of rotor cylindrical portion and stator from
Distance is opened to be set to leave apart from identical or be larger than with rotor cylindrical portion and the exhaust side of stator.
［ embodiment ］
Hereinafter, being illustrated to the vacuum pump 1 of an embodiment for the present invention based on attached drawing.In addition, following "upper", "lower"
Term is that air entry side on rotor axial, exhaust side correspond respectively to the state of top, lower section.
Fig. 1 is the longitudinal section view for indicating vacuum pump 1.Vacuum pump 1 is by being housed in substantially cylindric shell 10
The combination pump that turbo-molecular pump machanism PA and thread groove pump mechanism PB is constituted.
Vacuum pump 1 has：Shell 10；Rotor 20 has the rotor shaft 21 that can be rotatably supported at shell 10；It drives
Dynamic motor 30, makes rotor shaft 21 rotate；Stator column 40 accommodates the part and drive motor 30 of rotor shaft 21.
Shell 10 is formed bottomed cylindrical.Shell 10 is by being formed with the pedestal of gas exhaust port 11a in lower side side
11 and form gas air entry 12a on top and to load state on the base 11 via 13 fixed cylindrical portion of bolt
12 are constituted.In addition, the reference numeral 14 in Fig. 1 is inner lid.
Pedestal 11 has base portion 11A and pedestal spacer 11B.Base portion 11A and pedestal spacer 11B are through not shown spiral shell
Bolt is fixed.In pedestal spacer 11B, it is embedded with water cooling tube 11b.It, will be between pedestal by leading to cooling water into water cooling tube 11b
Spacing body 11B is maintained set temperature（Such as 80 DEG C）.
Cylindrical portion 12 is installed in via flange 12b on the vacuum tank of chamber (not shown) etc..Gas air entry 12a with
The mode of connection is connected to vacuum tank, and gas exhaust port 11a is connected to auxiliary pump (not shown) in a manner of being connected to.
Rotor 20 has rotor shaft 21 and is fixed on the top of rotor shaft 21 and relative to the axis of rotor shaft 21
The rotary wings 22 that the heart is set up in parallel with concentric circles.
Rotor shaft 21 is by 50 non-contact bearing of magnetic bearing.Magnetic bearing 50 has radial electromagnet 51 and axial magnetic
Iron 52.Radial electromagnet 51 and axial magnetic iron 52 are connected in control unit (not shown).
Control unit is controlled based on the detected value of radial direction displacement sensor 51a and axial direction displacement sensor 52a
The exciting current of radial electromagnet 51, axial magnetic iron 52, thus by rotor shaft 21 to float the state in set position
Bearing.
The top and lower part of rotor shaft 21 are inserted through in landing bearing 23.Become out of contior in rotor shaft 21
In the case of, high-speed rotating rotor shaft 21 contacts the damage that vacuum pump 1 is prevented on landing bearing 23.
By the way that in the state of by the insert of the top of rotor shaft 21 in boss hole 24, it is convex that bolt 25 is inserted into rotor
In edge 26 and spiral shell is attached on shaft flange 27, and rotary wings 22 are integrally installed in rotor shaft 21.Hereinafter, by armature spindle
The axis direction of bar 21 is referred to as " rotor axial A ", and the radial direction of rotor shaft 21 is referred to as " rotor radial R ".
Drive motor 30 is by the revolving part 31 that is installed on the periphery of rotor shaft 21 and to surround the side of revolving part 31
The fixing piece 32 of formula configuration is constituted.Fixing piece 31 is connected in above-mentioned control unit (not shown), is turned by control unit control
The rotation of sub- shaft 21.
In the state of by the mounting of stator column 40 on the base 11, lower end is fixed on pedestal through not shown bolt
On 11.
Then, it is illustrated in the turbo-molecular pump machanism PA of the substantially first half of vacuum pump 1 to configuring.
Turbo-molecular pump machanism PA is configured the fixation between rotary wings 22 by the rotary wings 22 and interval of rotor 20
The wing 60 is constituted.Rotary wings 22 and fixed-wing 60 arrange alternately and multistagely along rotor axial A, in the present embodiment, each to arrange
There are 11 grades of rotary wings, 22,10 grades of fixed-wings 60.
Rotary wings 22 are made of the blade with set angle tilt, are formed on the upper periphery face of rotor 20
On.In addition, rotary wings 22 around rotor 20 axis with it is radial be provided with it is multiple.
Fixed-wing 60 is stacked and is arranged in cylindrical portion 12 from being constituted to the inclined blade in the direction opposite with rotary wings 22
Spacer 61 on internal face is clamped on rotor axial A and is positioned.In addition, fixed-wing 60 is also around the axis of rotor 20 to radiate
Shape is provided with multiple.
Gap between rotary wings 22 and fixed-wing 60 is set as, and is become narrow gradually downward from the top of rotor axial A.
In addition, the length of rotary wings 22 and fixed-wing 60 is set as, gradually shorten downward from the top of rotor axial A.
Turbo-molecular pump machanism PA as described above by rotary wings 22 rotation, by what is sucked from gas air entry 12a
Gas is transferred downwards from the top of rotor axial A.
Then, the thread groove pump mechanism PB to configuration in the substantially lower half of vacuum pump 1 is illustrated.
Thread groove pump mechanism PB, which has, to be arranged in the lower part of rotor 20 and along the rotor cylindrical portion of rotor axial A extensions
28 and configure the peripheral surface 28a of rotor cylindrical portion 28 substantially cylindric stator 70 with surrounding.
Stator 70 is loaded on the base 11 via aftermentioned spacer 80.Stator 70, which has, to be located on inner peripheral surface 70a at quarter
Screw thread groove portion 71.
Thread groove pump mechanism PB as described above will be transplanted on the gas of the lower section of rotor axial A from gas air entry 12a
Body is compressed by the pulling effect that the high speed rotation by rotor cylindrical portion 28 is brought, and is transferred towards gas exhaust port 11a.Specifically
For, after gas is in the gap for being shifted into rotor cylindrical portion 28 and stator 70, in screw thread groove portion 71 by compression and by
It is transplanted on gas exhaust port 11a.In general, the pulling effect in thread groove pump mechanism PB is between by rotor cylindrical portion 28 and stator 70
Gap（Leave distance）It influences, so in order to which thread groove pump mechanism PB plays sufficient exhaust performance, needs the gap being set as
Set size.
Then, the heating configuration H for heating stator 70 is illustrated based on Fig. 1, Fig. 2.Fig. 2 is the major part of Fig. 1
Enlarged cross-sectional view.
Heating configuration H has the spacer 80 as heat-shield mechanism and the cartridge heater 90 as heating mechanism.
Spacer 80 is formed as cylindric with section L-shaped.Spacer 80 has flange part 81 and spacer cylindrical portion 82.
Spacer 80 is installed between pedestal 11 and stator 70.Specifically, flange part 81 carries stator on rotor axial A
70.In addition, spacer cylindrical portion 82 contacts on the base 11 on rotor axial A.In addition, spacer 80 is preferably, turning
On sub- radial direction R, with bell and spigot joint（インロー）Construction is installed with pedestal 11.In addition, spacer 80 is preferably, in rotor diameter
To on R, it is used for determining other than the contact point of required bottom line of center like that in bell and spigot joint construction, with non-contact shape
State is installed with stator 70.The heat in spacer 80 is easy to pass to stator 70 as a result, inhibits as described later other than stator 70
Retaining element heat transfer.
Flange part 81 has the stator carrier 81a being provided projectingly slightly to the inside of rotor radial R, in pump stops,
Stator 70 and stator carrier 81a separate gap slightly and opposed.
Flange part 81 is equipped on pedestal 11 via O-ring 83.Flange part 81 be not in direct contact with pedestal 11 as a result,
In the case of be positioned in set position.In addition, even if being heated to determined temperature in stator 70（Such as 150 DEG C）The case where
Under, by clamping O-ring between pedestal 11 and flange part 80, can also inhibit from stator 70 to 11 heat dissipation of pedestal.Flange
Portion 81 integrally links via bolt 84 with stator 70.Bolt 84 and the bolt used in vacuum pump, in general, from for corruption
From the viewpoint of the corrosion resistance of corrosion gas and intensity structurally, preferably stainless steel.
Spacer cylindrical portion 82 extends from the inner peripheral of flange part 81 towards the lower section of rotor axial A.Spacer cylindrical portion
82 in order to while the positioning required intensity for ensuring to carry out the rotor axial A of stator 70, inhibit aftermentioned thermal contact resistance
Increase, be formed thinner than 81 wall thickness of flange part.Spacer cylindrical portion 82 is for example formed by the thickness of 1~5mm or so.
Cartridge heater 90 is housed in the heater receiving portion 81b of flange part 81.Cartridge heater 90 is connected
On heater control device (not shown), heater control device controls the temperature of cartridge heater 90.Cartridge heater 90 is suitable
When the temperature of adjustment stator 70, to be maintained at set value.
It is set to than from box from cartridge heater 90 to stator 70 with the distance L1 that leaves of the contact portion of flange part 81
Formula heater 90 to pedestal 11 and the contact portion of spacer cylindrical portion 82 to leave distance L2 short.As a result, from cartridge heater
The heat-transfer path of 90 to stator 70 becomes shorter than from cartridge heater 90 to the heat-transfer path of pedestal 11, can inhibit from spacer
80 heat dissipation to pedestal 11.Further, since the contact area of pedestal 11 and spacer cylindrical portion 82 is than stator 70 and flange part
81 contact area is small, so can inhibit the heat dissipation from spacer 80 to pedestal 11.
Then, rotor cylindrical portion 28 and the distance of leaving of stator 70 are illustrated based on Fig. 2, Fig. 3.Fig. 3 is to indicate to turn
The sectional view of sub- cylindrical portion 28 and stator 70.In addition, in figure 3, shade is omitted for convenience of description.
The peripheral surface 28a of rotor cylindrical portion 28 is opposed with the inner peripheral surface 70a of stator 70.By rotor cylindrical portion 28 and stator 70
Top（Air entry side）The distance L3 that leaves be set as lower section with rotor cylindrical portion 28 and stator 70（Exhaust side）From
It is identical or be larger than to open distance L4.
Specifically, rotor cylindrical portion 28 in pump operates, becomes towards the outside of rotor radial R under the action of the centrifugal force
Shape.Such deformation due to centrifugal force becomes larger downward due to characteristic structurally from the top of rotor cylindrical portion 28.
In addition, rotor cylindrical portion 28 is by the radiant heat from stator 70, from the top to the bottom substantially evenly to the outer of rotor radial R
Side thermally expands.Thus, it is contemplated that pump operating in centrifugal force and thermal expansion rotor cylindrical portion 28 deflection from above towards
Lower section becomes larger.An example that the deflection of rotor cylindrical portion 28 brought by centrifugal force is indicated in table 1, being indicated in table 2 will pump
The temperature of heating target part in operating be set as the rotor cylindrical portion 28 in the case of 100 DEG C or 150 DEG C by thermally expanding
An example of the deflection brought.
［ table 1 ］
［ table 2 ］
As shown in table 1, table 2, being brought by centrifugal force and thermal expansion for 150 DEG C of rotor cylindrical portion 28 is reached in pump operates
Total deformation, be 0.35~0.50mm or so above, lower section is 0.40~0.55mm or so.
On the other hand, stator 70 is since top is by linear expansion coefficient is relatively low compared with stator 70 and the higher spiral shell of coefficient of elasticity
Bolt 84 and spacer 80 constrain the displacement of rotor radial R, so bigger than top below the deflection of the thermal expansion of stator 70.That is,
It is variant due to the coefficient of elasticity between being disposed in the inside and outside component of rotor radial R and between linear expansion coefficient, so by pumping
The deflection for the stator 70 that thermal expansion in operating is brought becomes larger from above towards lower section.There is no the case where constraint of spacer 80
Under stator 70 the deflection brought by thermal expansion with rotor cylindrical portion 28 the case where it is same, be substantially one from the top to the bottom
Sample, and in the present invention, use following such construction：By with the linear expansion coefficient lower than stator 70 and comparing stator
The component of 70 high coefficient of elasticity constrains the deformation of the top of stator 70, and thus the deflection of the rotor radial R of stator 70 exists
Above and below it is different.
Be abnormal in vacuum pump 1 as a result, and the contact of rotor cylindrical portion 28 on stator 70, by using
Make the construction that the deflection of stator 70 becomes larger from above towards lower section as in the present invention（Especially by the easy portion for transmitting kinetic energy
Divide the construction of constraint）, the deformation of stator 70 can be inhibited, reduce kinetic energy to the transmission outside pump.
In this way, consider in the operating of vacuum pump 1 rotor cylindrical portion 28 and stator 70 from above towards lower section deflection
Become larger and the case where the top of stator 70 is by 84 restrained deformation of bolt, by the air entry side of rotor cylindrical portion 28 and stator 70
Leave distance L3 be set as with rotor cylindrical portion 28 and the exhaust side of stator 70 to leave distance L4 identical or be larger than.
Then, it is based on Fig. 4（a）, Fig. 4（b）The effect of heating configuration H is illustrated.In addition, Fig. 4（a）It is to indicate stator
The figure of state before 70 thermal expansions, Fig. 4（b）It is the figure for indicating the state after the thermal expansion of stator 70.
Such as Fig. 4（a）Shown, before carrying out the heating by cartridge heater 90, stator 70 is mainly by flange part 81
Upper surface 81c and side 81d bearings.If cartridge heater 90 start, cartridge heater 90 heat via spacer 80 to
Stator 70 conducts heat.
If stator 70 and spacer 80 heat up, since stator 70 made of aluminum alloy has the spacer than stainless steel
80 big linear expansion coefficients, so such as Fig. 4（b）In thin arrow shown in, stator 70 is by stator carrier 81a or side 81d courts
It is pushed to the outside of rotor radial R.
If flange part 81 is pushed to the outside of rotor radial R, spacer cylindrical portion 82 follows the heat of stator 70
It expands and moves, such as Fig. 4（b）In block arrow shown in such flexible deformation.Stator 70 connects with the excessive of flange part 81 as a result,
It touches and is suppressed.That is, even if stator can be inhibited if in the case where stator 70 is relative to 80 relatively large thermal expansion of spacer
70 excessively become smaller with the thermal contact resistance and spacer 80 and the thermal contact resistance of pedestal 11 of spacer 80, inhibit from stator 70 to pedestal
11 heat dissipations.
In this way, the vacuum pump 1 in relation to the present embodiment by stator 70 by it is heat-insulated from other retaining elements in the state of quilt
Heating, it is suppressed that electronic unit dissipate from stator 70 due to heat etc. act bad and rotary wings 22, fixed-wing 60 it is strong
Degree declines.The normal operation of vacuum pump 1 can be realized while inhibiting the solidification of gas.
In addition, by the way that the distance L3 that leaves of rotor cylindrical portion 28 and the air entry side of stator 70 is set as and rotor cylinder
Portion 28 and the exhaust side of stator 70 to leave distance L4 identical or be larger than, even the rotor in the operating of vacuum pump 1
20 are deformed by centrifugal force or the case where rotor 20 is thermally expanded by the radiant heat from stator 70, due to rotor cylinder
The distance of leaving of portion 28 and stator 70 is maintained as set leaving distance or roughly equal variation from suction side to exhaust side
Degree, so can also inhibit the flow path of gas excessively to narrow waits undesirable conditions.
In addition, the present invention can apply as long as the structure for having thread groove pump mechanism, other than combination pump, also may be used
To be applied in screw thread slot type pump.In addition, heating mechanism is not limited to cartridge heater 90, as long as can add stator 70
Heat is that kind of structure can.
In addition, the present invention can be without departing from the purport of the present invention, it will be able to various changes are made, also,
The present invention also includes the form after the change certainly.
Reference sign
1 vacuum pump；10 shells；11 pedestals；11A base portions；11B pedestal spacers；11a gas exhaust ports；11b water coolings
Pipe；12 cylindrical portions；12a gas air entries；12b flanges；13 bolts；20 rotors；21 rotor shafts；22 rotary wings；23
Landing bearing；28 rotor cylindrical portions；28a peripheral surfaces；30 drive motors；31 revolving parts；32 fixing pieces；40 stator columns；
50 magnetic bearings；51 radial electromagnet；52 axial magnetic iron；60 fixed-wings；61 spacers；70 stators；70a （Stator
's）Inner peripheral surface；71 screw thread groove portions；80 spacers；81 flange parts；81a stator carriers；81b heaters receiving portion；81c
Upper surface；The sides 81d；82 spacer cylindrical portions；83 O-rings；84 bolts；90 cartridge heaters；H heating configurations；A
Rotor axial；R rotor radials；PA turbo-molecular pump machanisms；PB thread groove pumps mechanism.
Claims (8)
1. a kind of vacuum pump, has：Pedestal；Rotor has the rotor cylindrical portion being housed in the pedestal, can rotate twelve Earthly Branches
It holds on aforementioned pedestal；Substantially cylindric stator configures between aforementioned pedestal and foregoing rotor cylindrical portion；And thread groove
Portion is carved in the one party of inner peripheral surface of the peripheral surface or stator former that are located at foregoing rotor cylindrical portion, which is characterized in that
Have：
Heat-shield mechanism, it is from the retaining element other than stator former that stator former is heat-insulated；
Heating mechanism heats stator former；
The distance of leaving of the air entry side of foregoing rotor cylindrical portion and stator former is set to foregoing rotor cylindrical portion with before
State leaving apart from identical or be larger than for the exhaust side of stator.
2. vacuum pump as described in claim 1, which is characterized in that
Aforementioned heat-shield mechanism have contacted with stator former on rotor axial and the flange part that is disposed on aforementioned pedestal and
On rotor axial with aforementioned base into contact and the spacer cylindrical portion that is arranged on the inner peripheral in said flange portion, be by aforementioned plus
Heat engine structure is contained in the spacer in said flange portion.
3. vacuum pump as claimed in claim 2, which is characterized in that
Stator former at least part of deformation to rotor radial when thermally expanding is constrained by aforesaid spacer.
4. vacuum pump as claimed in claim 2 or claim 3, which is characterized in that
Aforesaid spacer is the linear expansion coefficient component lower than stator former.
5. the vacuum pump as described in any one of claim 2~4, which is characterized in that
Distance is left from aforementioned heating mechanism to stator former with the contact portion in said flange portion than from aforementioned heating mechanism
To leaving apart from short for aforementioned pedestal and the contact portion of aforesaid spacer cylindrical portion.
6. the vacuum pump as described in any one of claim 2~5, which is characterized in that
Aforesaid spacer cylindrical portion can carry out the positioning of rotor axial, and be formed relatively thin so as on rotor radial
Flexible deformation.
7. the vacuum pump as described in any one of claim 2~6, which is characterized in that
Aforesaid spacer is installed on rotor radial with bell and spigot joint construction and stator former.
8. the vacuum pump as described in any one of claim 2~7, which is characterized in that
Aforesaid spacer is installed with bell and spigot joint construction with aforementioned pedestal on rotor radial.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015224199A JP6666696B2 (en) | 2015-11-16 | 2015-11-16 | Vacuum pump |
| JP2015-224199 | 2015-11-16 | ||
| PCT/JP2016/082213 WO2017086135A1 (en) | 2015-11-16 | 2016-10-31 | Vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108350894A true CN108350894A (en) | 2018-07-31 |
| CN108350894B CN108350894B (en) | 2021-02-12 |
Family
ID=58718821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680063254.5A Active CN108350894B (en) | 2015-11-16 | 2016-10-31 | Vacuum pump |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10907653B2 (en) |
| EP (1) | EP3379086A4 (en) |
| JP (1) | JP6666696B2 (en) |
| KR (1) | KR102620442B1 (en) |
| CN (1) | CN108350894B (en) |
| WO (1) | WO2017086135A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113518864A (en) * | 2019-03-25 | 2021-10-19 | 埃地沃兹日本有限公司 | Vacuum pump and sealing member for vacuum pump |
| CN113840984A (en) * | 2019-05-31 | 2021-12-24 | 埃地沃兹日本有限公司 | Vacuum pump and vacuum pump component |
| CN113840985A (en) * | 2019-05-31 | 2021-12-24 | 埃地沃兹日本有限公司 | Vacuum pump and connecting type thread groove spacer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6077804B2 (en) * | 2012-09-06 | 2017-02-08 | エドワーズ株式会社 | Fixed side member and vacuum pump |
| JP7137923B2 (en) * | 2017-11-16 | 2022-09-15 | エドワーズ株式会社 | Vacuum pump |
| JP6957320B2 (en) * | 2017-11-17 | 2021-11-02 | エドワーズ株式会社 | Vacuum pump, high temperature stator and gas exhaust port provided in the vacuum pump |
| JP7164981B2 (en) * | 2018-07-19 | 2022-11-02 | エドワーズ株式会社 | Vacuum pump |
| JP2021055673A (en) * | 2019-09-30 | 2021-04-08 | エドワーズ株式会社 | Vacuum pump |
| JP2022092802A (en) * | 2020-12-11 | 2022-06-23 | エドワーズ株式会社 | Vacuum pump |
| JP2022093068A (en) * | 2020-12-11 | 2022-06-23 | エドワーズ株式会社 | Vacuum pump, fixed components of vacuum pump, and supporting component of vacuum pump |
| FR3118651B1 (en) * | 2021-01-06 | 2023-03-31 | Pfeiffer Vacuum | Heating device and turbomolecular vacuum pump |
| JP2023079565A (en) * | 2021-11-29 | 2023-06-08 | エドワーズ株式会社 | Vacuum pump, spacer component, and bolt fastening method |
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2016
- 2016-10-31 WO PCT/JP2016/082213 patent/WO2017086135A1/en active Application Filing
- 2016-10-31 CN CN201680063254.5A patent/CN108350894B/en active Active
- 2016-10-31 KR KR1020187007774A patent/KR102620442B1/en active IP Right Grant
- 2016-10-31 EP EP16866137.9A patent/EP3379086A4/en active Pending
- 2016-10-31 US US15/774,861 patent/US10907653B2/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113518864A (en) * | 2019-03-25 | 2021-10-19 | 埃地沃兹日本有限公司 | Vacuum pump and sealing member for vacuum pump |
| CN113840984A (en) * | 2019-05-31 | 2021-12-24 | 埃地沃兹日本有限公司 | Vacuum pump and vacuum pump component |
| CN113840985A (en) * | 2019-05-31 | 2021-12-24 | 埃地沃兹日本有限公司 | Vacuum pump and connecting type thread groove spacer |
| CN113840984B (en) * | 2019-05-31 | 2024-04-02 | 埃地沃兹日本有限公司 | Vacuum pump and vacuum pump component |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108350894B (en) | 2021-02-12 |
| KR102620442B1 (en) | 2024-01-03 |
| US20180335052A1 (en) | 2018-11-22 |
| KR20180082423A (en) | 2018-07-18 |
| EP3379086A1 (en) | 2018-09-26 |
| JP2017089582A (en) | 2017-05-25 |
| EP3379086A4 (en) | 2019-06-26 |
| WO2017086135A1 (en) | 2017-05-26 |
| JP6666696B2 (en) | 2020-03-18 |
| US10907653B2 (en) | 2021-02-02 |
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