CN108333882A - 3D glass exposures development production method - Google Patents
3D glass exposures development production method Download PDFInfo
- Publication number
- CN108333882A CN108333882A CN201810144028.0A CN201810144028A CN108333882A CN 108333882 A CN108333882 A CN 108333882A CN 201810144028 A CN201810144028 A CN 201810144028A CN 108333882 A CN108333882 A CN 108333882A
- Authority
- CN
- China
- Prior art keywords
- glass
- exposure
- pallet
- film
- camera bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
Abstract
The present invention relates to 3D glass exposures development production method, this method includes：1）, exposure pallet is provided, which meets polylith 3D glass arrays to be processed and attaches；2）, the film camera bellows of exposure is provided, be equipped in the film camera bellows and exposure pallet on the film of the one-to-one Array Design of 3D glass that is bonded of institute's array；3）, ink-jet, realize exposure pallet on 3D glass surface ink-jets；4）, the 3D glass after ink-jet follow exposure pallet to move on in film camera bellows, and enable the one-to-one coincidence of film of 3D glass and film camera bellows on exposure pallet together, then opening light source irradiation exposure；5）, to after exposure 3D glass develop cleaning, realize film on figure be completely fixed on 3D glass.The present invention accomplishes the development of multiple rows of edition 3D glass fully automatic exposure, can break through the special-shaped curved preposition cover boards of 3D or postposition cover plate decorating manufacture and design in exposure technology station it is other, improve production capacity.
Description
Technical field
The present invention relates to 3D glass manufacture technology fields, aobvious in particular for the 3D glass exposures of the utilization such as mobile phone, vehicle-mounted
Shadow makes.
Background technology
With the rise of smart mobile phone, mobile phone glass cover board is widely used on mobile phone screen, emerging as one
Industry, market prospects are very good by everybody, and bend glass（2.5D and 3D）Appearance be even more to bring smart mobile phone into one
It is a more humane, more personalized, have more the boundary of fashion grade.Mobile phone 3D glass processings needs are exposed development, existing
3D glass exposure equipment internal mechanisms operate flow：3D glass blowing, mechanical fixed and calculating center of glass position, machinery
Hand is carried, jig or the positioning of circular rotating jig, monolithic contraposition expose.This mode deducts all machine running times and adds
Shutter institute having time is automatically opened after upper contraposition at least：（5-7s）/ pcs, production capacity are repeated in 510 ~ 720pcs/H
Job offset amount accumulated tolerance is controllable：Within 0.1mm, resolution control：± 5 ~ 10um is only capable of satisfaction 30 × 30um circuits
Specification.No matter using 365 ~ 405nm wave band LED exposure lamp sources or 395nm mercury lamps exposure lamp source, it is suitable to produce
Multiple rows of edition exposure jig supply be fixed and contraposition adjustment so that can only monolithic development is exposed to monolithic, production capacity is imitated
Rate is low, and counter structure thread-changing frequency is high, and conversion time is long.
Invention content
It is an object of the invention to overcome prior art defect, a kind of 3D glass exposures development production method is provided, is accomplished
Multiple rows of edition 3D glass fully automatic exposures development can be broken through in the special-shaped curved preposition cover boards of 3D or the design and manufacture of postposition cover plate decorating
Exposure technology station is other, improves production capacity.
In order to achieve the above objectives, the present invention adopts the following technical scheme that：
3D glass exposures development production method, this method comprises the following steps：
1）, exposure pallet is provided, which meets polylith 3D glass arrays to be processed and attaches, exposure pallet first carries out and
Virtual disk in control system carries out contraposition confirmation, then again by 3D glass by the array of the CAD diagram paper design in control system
Form fits on exposure pallet；
2）, the film camera bellows of exposure is provided, be equipped in the film camera bellows and exposure pallet on the 3D glass that is bonded of institute's array
The film of one-to-one Array Design；
3）, ink-jet, realize exposure pallet on 3D glass surface ink-jets；
4）, the 3D glass after ink-jet follows exposure pallet to move on in film camera bellows, and makes 3D glass and the phenanthrene on exposure pallet
The film of forest tract camera bellows one-to-one can overlap together, then open light source irradiation exposure；
5）, to after exposure 3D glass develop cleaning, realize film on figure be completely fixed on 3D glass.
In said program：The 3D glass is by automatic manipulator by the array shape of the CAD diagram paper design in control system
Formula fits on exposure pallet, and the fitting of 3D glass arrays, exposure pallet is aligned with the virtual disk in control system and film
In camera bellows film with exposure pallet on 3D glass it is one-to-one contraposition be by take pictures or scan mode carry out visual-alignment,
Correction.
In said program：It is sent into full-automatic continuous tunnel furnace after the 3D glass surfaces ink-jet and carries out surface prebake conditions, allows ink
Surface drying is carried out, then moves on to exposure in film camera bellows again.
In said program：The exposure pallet fixes 3D glass by array sucker suction.
In said program：The exposure tray surface gluing or glue spraying 50-100um thickness are adhesively fixed 3D by viscose glue
Glass disassembles out 3D glass by heating again after completing exposure imaging.
In said program：It is complete by Full automatic array make-up machine that the 3D glass arrays form, which fits on exposure pallet,
At the rack of the make-up machine is equipped with pallet and puts area, exposure pallet storing area, mechanical checkout platform, the first manipulator, second
Manipulator and correcting camera, pallet is put area and is put for filling the pallet of 3D bend glasses, and pallet puts area and is equipped with side
Just the tray rack that pallet positioning is put；It exposes pallet and puts area for exposure pallet storing；Second manipulator, which is caught, takes the 3D of pallet bent
Surface glass shifting is put on mechanical checkout platform, and mechanical checkout platform gives the contraposition of 3D bend glass preliminary corrections；First manipulator
Upper to be attached to camera system, which scans the target on exposure pallet successively, and transmits a signal to the control of machine
System, the first manipulator catch take the 3D bend glasses on mechanical checkout platform be moved at correcting camera correct after move be put into exposure
On light pallet.
In said program：The exposure pallet puts area and is equipped with delivery track, liftable block board and firm exposure
The jig of pallet, jig are arranged in the side of delivery track.
In said program：The jig is pneumatic clamp, and jig coordinates delivery track to clamp the edge for exposing pallet.
The present invention is fitted on exposure pallet by 3D glass arrays and is fixed, by designing film camera bellows, the film
One-to-one high-precision correction workbench synchronous array design is carried out inside piece camera bellows, is corrected with fast vision, by design drawing
Software programming program is moved, and the film in 3D glass and film camera bellows on exposure pallet is enable to overlap one by one together
It is exposed, repeated exposure development job offset amount accumulated tolerance is controllable：± 5um improves the special-shaped curved glass production capacities of 3D：
1200 ~ 1400pcs/H or more, stability is high, resolution control：± 2 ~ 5um meets 10 ~ 30um line width line manufacturing process, root
It is improved according to material adapted, can accomplish smaller line width.The present invention accomplishes multiple rows of edition 3D glass fully automatic exposures development, can dash forward
Exposure technology station is other during the broken special-shaped curved preposition cover boards of 3D or postposition cover plate decorating manufacture and design, and improves production capacity, reduce investment at
This floor space, can greatly reduce employment quantity, be conducive to improve production environment, improve yield.
Description of the drawings
Attached drawing 1 is that the one of the present invention implements structural schematic diagram.
Attached drawing 2 is Fig. 1 embodiment side structure schematic views.
Attached drawing 3 is the partial structural diagram of the first and second manipulator of Fig. 1 embodiments.
Specific implementation mode
The present invention is in relation to a kind of 3D glass exposures development production method, and this method comprises the following steps：
1）, exposure pallet is provided, which meets polylith 3D glass arrays to be processed and attaches, exposure pallet first carries out and
Virtual disk in control system carries out contraposition confirmation, then again by 3D glass by the array of the CAD diagram paper design in control system
Form fits on exposure pallet.The 3D glass is by automatic manipulator by the array shape of the CAD diagram paper design in control system
Formula fits on exposure pallet, and 3D glass is positioned on exposure pallet after the adjustment such as manipulator realization position, angle and corresponds to position
It sets, thus to obtain array format is pre-designed in control system.
2）, the film camera bellows of exposure is provided, be equipped in the film camera bellows and exposure pallet on the 3D that is bonded of institute's array
The film of the one-to-one Array Design of glass；Film be arranged synchronous array design can the work of one-to-one high-precision correction
Platform is corrected with fast vision, realizes film contraposition adjustment.
3）, ink-jet, realize exposure pallet on 3D glass surface ink-jets, sprayed by full version, it is convenient, fast.
4）, the 3D glass after ink-jet follow exposure pallet to move on in film camera bellows, given in film camera bellows corresponding
Positioning, such as machinery positioning or photoelectricity positioning, making exposure pallet, accurately movement in place, is conducive to follow-up film and is aligned with 3D glass
Correction.Then, workbench corrects in film camera bellows, enables the film one of the 3D glass and film camera bellows on exposure pallet
It is overlapped together to one, then opens light source irradiation exposure, realize that synchronous multi-disc exposes together.
5）, to after exposure 3D glass develop cleaning, realize film on figure be completely fixed on 3D glass, when
It is also appropriate after development cleaning to carry out high temperature baking so in practical operation, consolidate figure, accelerates production.
In the present invention, the 3D glass arrays fitting, exposure pallet is aligned with the virtual disk in control system and the film
In piece camera bellows film with exposure pallet on 3D glass it is one-to-one contraposition be by take pictures or scan mode carry out vision pair
Position, correction.To 3D glass monoliths carry out vision take pictures grasping holes and grab side calculate centre bit, film also in film camera bellows into
Row preliminary correction is taken pictures, and such as centre bit is calculated with 4-6 graph edge is grabbed by CCD camera lenses grasping holes, finally again so that glass and the film
Centre bit overlaps, and reaches 3D glass and film one-to-one can overlap together.
The present invention is further, and full-automatic continuous tunnel furnace is sent into after the 3D glass surfaces ink-jet and carries out surface prebake conditions, is allowed
Ink carries out surface drying, then moves on to exposure in film camera bellows again, and ink carries out surface drying, accelerates production, is conducive to exposure, convenient for not
The ultraviolet light irradiation exposure of co-wavelength promotes exposure efficiency and quality.
The present invention is further, the exposure pallet can by array sucker suction fix 3D glass, reach cleaning, soon
Fill effect.Certainly, the exposure pallet can also be surface coating or glue spraying 50-100um thickness, is adhesively fixed 3D by viscose glue
At this moment glass disassembles out 3D glass by heating again after completing exposure imaging.
Shown in Fig. 1,2,3, in the present embodiment, it is by full-automatic that the 3D glass arrays form, which fits on exposure pallet,
Array make-up machine is completed, the rack 1 of the make-up machine be equipped with pallet puts area, exposure pallet puts area, mechanical checkout platform 11,
First manipulator 2, the second manipulator 3 and correcting camera 4, pallet is put area and is put for filling the pallet of 3D glass, and holds in the palm
Disk puts area and is equipped with the tray rack 12 that utility tray positioning is put.It exposes pallet and puts area for the exposure storing of pallet 5；Second machinery
Hand 3, which is caught, to be taken the 3D glass of pallet to move to be put on mechanical checkout platform 11, and it is fixed and keep to the side pair that mechanical checkout platform 11 is based on absorption
Neat correction design, mechanical checkout platform 11 give the contraposition of 3D glass preliminary corrections.Subsidiary camera system on first manipulator 2, should
Camera system scans the target on exposure pallet successively, and transmits a signal to the control system of machine, thus control exposure
Pallet is aligned with the virtual disk in control system, determines the accurate location of exposure pallet.First manipulator 2 and camera system
It organically combines, simplifies device structure, ease of assembly and implementation.First manipulator 2 catches the 3D glass taken on mechanical checkout platform 11
It is moved at correcting camera 4 after correcting to move and be put on exposure pallet 5.Correcting camera 4, which scans the first manipulator 2, catches the 3D taken
Glass is handled by the control system analysis of machine, adjusts the first manipulator 2, and the first manipulator 2 is made to catch the 3D glass taken and control
Virtual disk corresponding position in system processed is accurately corrected, so that 3D glass accurately moves the correspondence position being put into exposure pallet
It sets.Realize that the array by CAD diagram paper design of one one, 3D glass fits to exposure by above-mentioned Full automatic array make-up machine
It is fixed on light pallet, thus promote array fitting efficiency and quality, left and right misalignment tolerances precision controlling has within 5um
Help the processing of 3D glass productions.
Shown in Fig. 1,2,3, in the present embodiment, the exposure pallet puts area and is equipped with delivery track 61, liftable screens
The jig 63 of plate 62 and firm exposure pallet 5, jig 63 are arranged in the side of delivery track 61.In diagram, jig 63 is gas
Dynamic pressure plate, jig 63 coordinate delivery track 61 to clamp the edge for exposing pallet 5.Exposure pallet 5 is sent on delivery track 61
Designated position, liftable block board 62 rise backstop and expose pallet 5, give positioning and limitation, the cooperation conveying of subsequent jig 63
Track 61 clamps the edge of exposure pallet 5, reaches fixed exposure pallet 5 in exposure pallet puts area.When exposure pallet 5 is filled
After 3D bend glasses, liftable block board 62 declines and jig 63 is decontroled, and exposure pallet 5 affranchises, from delivery track 61
Output.Delivery track 61 can be belt, chained scheduling, not limit to herein.It exposes the conveying of pallet 5 and positioning is easy, accurate, effectively
Promote the efficiency and quality of the fitting of 3D glass array forms.
The present invention is fitted on exposure pallet by 3D glass arrays and is fixed, by designing film camera bellows, the film
One-to-one high-precision correction workbench synchronous array design is carried out inside piece camera bellows, is corrected with fast vision, by design drawing
Software programming program is moved, and the film in 3D glass and film camera bellows on exposure pallet is enable to overlap one by one together
It is exposed, repeated exposure development job offset amount accumulated tolerance is controllable：± 5um improves the special-shaped curved glass production capacities of 3D：
1200 ~ 1400pcs/H or more, stability is high, resolution control：± 2 ~ 5um meets 10 ~ 30um line width line manufacturing process, root
It is improved according to material adapted, can accomplish smaller line width.The present invention accomplishes multiple rows of edition 3D glass fully automatic exposures development, can dash forward
Exposure technology station is other during the broken special-shaped curved preposition cover boards of 3D or postposition cover plate decorating manufacture and design, and improves production capacity, reduce investment at
This floor space, can greatly reduce employment quantity, be conducive to improve production environment, improve yield.
The present invention is elaborated above in association with embodiment, only technical concepts and features to illustrate the invention,
Its object is to allow person skilled in the art to understand present disclosure and be implemented, it can not limit the present invention's with this
Protection domain, therefore all equivalent change or modifications done according to spirit of the invention should all cover the protection model in the present invention
In enclosing.
Claims (8)
- The production method 1.3D glass exposure develops, it is characterised in that：This method comprises the following steps：1）, exposure pallet is provided, which meets polylith 3D glass arrays to be processed and attaches, exposure pallet first with control Virtual disk in system carries out contraposition confirmation, then again by 3D glass by the array format of the CAD diagram paper design in control system It fits on exposure pallet；2）, the film camera bellows of exposure is provided, be equipped in the film camera bellows and exposure pallet on the 3D glass that is bonded of institute's array The film of one-to-one Array Design；3）, ink-jet, realize exposure pallet on 3D glass surface ink-jets；4）, the 3D glass after ink-jet follows exposure pallet to move on in film camera bellows, and makes 3D glass and the phenanthrene on exposure pallet The film of forest tract camera bellows one-to-one can overlap together, then open light source irradiation exposure；5）, to after exposure 3D glass develop cleaning, realize film on figure be completely fixed on 3D glass.
- The production method 2. 3D glass exposures according to claim 1 develop, it is characterised in that：The 3D glass passes through automatic Manipulator is fitted to by the array format of the CAD diagram paper design in control system on exposure pallet, the fitting of 3D glass arrays, exposure Pallet in control system virtual disk contraposition and film camera bellows in film with expose pallet on 3D glass it is one-to-one Contraposition be by take pictures or scan mode carry out visual-alignment, correction.
- The production method 3. 3D glass exposures according to claim 1 develop, it is characterised in that：The 3D glass surfaces ink-jet After be sent into full-automatic continuous tunnel furnace and carry out surface prebake conditions, allow ink to carry out surface drying, then move on to exposure in film camera bellows again.
- The production method 4. 3D glass exposures according to claim 1 develop, it is characterised in that：The exposure pallet passes through battle array Row sucker suction fixes 3D glass.
- The production method 5. 3D glass exposures according to claim 1 develop, it is characterised in that：The exposure tray surface applies Glue or glue spraying 50-100um thickness are adhesively fixed 3D glass by viscose glue, and 3D is disassembled out by heating again after completing exposure imaging Glass.
- The production method 6. 3D glass exposures according to claim 2 develop, it is characterised in that：The 3D glass arrays form Fitting on exposure pallet is completed by Full automatic array make-up machine, and the rack of the make-up machine is equipped with pallet and puts area, exposes Light pallet puts area, mechanical checkout platform, the first manipulator, the second manipulator and correcting camera, and pallet puts area for dress The pallet of full 3D bend glasses is put, and pallet puts area and is equipped with the tray rack that utility tray positioning is put；Pallet is exposed to put It is put for exposure pallet in area；Second manipulator, which is caught, takes the 3D bend glasses shifting of pallet to be put on mechanical checkout platform, mechanical checkout Platform gives the contraposition of 3D bend glass preliminary corrections；Subsidiary camera system on first manipulator, the camera system is to exposing pallet On target scan successively, and transmit a signal to the control system of machine, the first manipulator, which is caught, to be taken on mechanical checkout platform 3D bend glasses are moved at correcting camera after correction to move and be put on exposure pallet.
- The production method 7. 3D glass exposures according to claim 6 develop, it is characterised in that：The exposure pallet puts area Jig equipped with delivery track, liftable block board and firm exposure pallet, jig are arranged in the side of delivery track.
- The production method 8. 3D glass exposures according to claim 7 develop, it is characterised in that：The jig is Pneumatic pressure Plate, jig coordinate delivery track to clamp the edge for exposing pallet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810144028.0A CN108333882A (en) | 2018-02-12 | 2018-02-12 | 3D glass exposures development production method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810144028.0A CN108333882A (en) | 2018-02-12 | 2018-02-12 | 3D glass exposures development production method |
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| Publication Number | Publication Date |
|---|---|
| CN108333882A true CN108333882A (en) | 2018-07-27 |
Family
ID=62929186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810144028.0A Pending CN108333882A (en) | 2018-02-12 | 2018-02-12 | 3D glass exposures development production method |
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| Country | Link |
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| CN (1) | CN108333882A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109581826A (en) * | 2019-01-07 | 2019-04-05 | 浙江宇鑫光学科技有限公司 | 3D glass picture and text forming method |
| CN111596530A (en) * | 2020-06-09 | 2020-08-28 | 无锡奥夫特光学技术有限公司 | Optical window graphical clamp and method |
| CN113867673A (en) * | 2021-09-27 | 2021-12-31 | 湖南省舟际智控电气科技有限公司 | Method and device for displaying three-dimensional character font of liquid crystal display |
| CN114770446A (en) * | 2022-05-30 | 2022-07-22 | 湖北源合达科技有限公司 | A workstation for cell-phone glass exposure processing |
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| CN202049331U (en) * | 2011-05-20 | 2011-11-23 | 广西钦州天山微电子有限公司 | Scattering exposure system |
| CN206497302U (en) * | 2017-02-17 | 2017-09-15 | 然斯康波达机电设备(深圳)有限公司 | A kind of 3D bend glasses exposure machine |
| CN107329377A (en) * | 2017-07-27 | 2017-11-07 | 深圳市天慧谷科技股份公司 | A kind of full-automatic 3D bend glasses exposure machine |
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| WO2005080281A1 (en) * | 2004-02-25 | 2005-09-01 | Carey Brothers Limited | A method for applying a pattern to a glass panel |
| CN102012639A (en) * | 2009-09-04 | 2011-04-13 | 上海微电子装备有限公司 | Method and device for protecting silicon wafer edge |
| CN202049331U (en) * | 2011-05-20 | 2011-11-23 | 广西钦州天山微电子有限公司 | Scattering exposure system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109581826A (en) * | 2019-01-07 | 2019-04-05 | 浙江宇鑫光学科技有限公司 | 3D glass picture and text forming method |
| CN111596530A (en) * | 2020-06-09 | 2020-08-28 | 无锡奥夫特光学技术有限公司 | Optical window graphical clamp and method |
| CN113867673A (en) * | 2021-09-27 | 2021-12-31 | 湖南省舟际智控电气科技有限公司 | Method and device for displaying three-dimensional character font of liquid crystal display |
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| CN114770446A (en) * | 2022-05-30 | 2022-07-22 | 湖北源合达科技有限公司 | A workstation for cell-phone glass exposure processing |
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