CN108332889A - A kind of aeroge pressure sensor - Google Patents
A kind of aeroge pressure sensor Download PDFInfo
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- CN108332889A CN108332889A CN201710302312.1A CN201710302312A CN108332889A CN 108332889 A CN108332889 A CN 108332889A CN 201710302312 A CN201710302312 A CN 201710302312A CN 108332889 A CN108332889 A CN 108332889A
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- Prior art keywords
- aeroge
- electrode
- pressure
- pressure sensor
- optionally
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
Abstract
The present invention provides a kind of aeroge pressure sensor, belongs to sensor technical field.It is prepared based on aerogel material, including：Aeroge, the electrode contacted with aeroge and the electric signal measurement device for measuring change in electric between the electrode and aeroge.Wherein, the aeroge is elastic conduction aeroge；The elastic conduction aerogel material with certain electric conductivity, with it is good elasticity and with porous network structure.Aeroge pressure sensor provided by the invention not only has larger working range and very strong detectivity, while also having lower cost of layout；It is suitable as the touch sensor of the monitoring and mechanical bionic hand of health signal.
Description
Technical field
The present invention relates to sensor technical field, more particularly to a kind of aeroge pressure sensor.
Background technology
Pressure is often to need to measure or carry out the physical quantity of dynamic monitoring in production and life, existing common
Pressure sensor has metal strain plate pressure sensor, ceramic pressure sensor, diffusion silicon pressure sensor, piezoelectric pressure sensing
Device and semiconductor pressure sensor etc..Sensitive material, such as steel, silicon that these pressure sensors use etc. has high poplar
Family name's modulus and low sensitivity coefficient, it is weak to the detectivity of small pressure so as to cause this few class sensor, that is, detection limit
It is higher, up to several kPa.The conductive rubber of the incorporation carbon or metallic particles smaller using Young's modulus developed in recent years
Novel pressure sensor as sensitive material has lower detection limit, about compared with traditional pressure sensor
100Pa, and the touching gently in the corresponding people's tactiles of 10Pa or so, institute's sensors with auxiliary electrode also can not be with the natural skin tactile of people
Detection limit is comparable.Meanwhile traditional pressure sensor structure is single；Elargol etc. is needed to bond between electrode and sensitive material
Agent is fixed to reduce the influence of interface contact resistance, so electrode is stiff, cannot measure the pressure on any direction；
It is difficult to the rapid development for meeting the needs of pressure detection field.
Invention content
The purpose of the present invention is in view of the deficiencies of the prior art, it is proposed that a kind of detection limit is low, it is highly sensitive, can
Detect the pressure sensor of omnidirectional pressure.
Particularly, a kind of aeroge pressure sensor provided by the invention,
It is prepared based on aerogel material, and component units include：
Aeroge；
Electrode；With
Electric signal measurement device；
The electric signal measurement is to measure contact electric signal and its variation between the electrode and aeroge.
Wherein, the aeroge is elastic conduction aeroge；The elastic conduction aerogel material has certain conduction
Property, with it is good elasticity and with porous network structure.
Further, it when the measuring circuit of the sensor is connected, is in direct contact between the electrode and aeroge；
Optionally, binder is not present between the electrode and aeroge；Optionally, nothing between the electrode and aeroge
Mechanical connection is fixed.
Further, the conductivity of the aeroge is more than 0.01S/m.
Optionally, the conductivity range of aeroge includes 0.01S/m-0.05S/m.
Optionally, the conductivity range of aeroge includes 0.05S/m-0.1S/m.
Optionally, the conductivity range of aeroge includes 0.1S/m-1S/m.
Optionally, the conductivity range of aeroge includes 1S/m-45S/m.
Optionally, the conductivity range of aeroge includes 45S/m-55S/m.
Optionally, the conductivity range of aeroge includes 55S/m-100S/m.
Optionally, the conductivity range of aeroge includes 100S/m-1000S/m.
Optionally, the conductivity range of aeroge includes being more than 1000S/m.
Further, the aeroge can reply or partial recovery completely after loading certain compression strain；
Preferably, it is adjustable to account for the ratio that load strains for the aeroge recovery strain.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 0.1-20%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 20-40%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 40%-60%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes being less than 60%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes being more than or equal to 60%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 60-80%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 70-90%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 90-95.9%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 96-99.9%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 98.5-100%.
Further, the range of the aeroge elastic strain is adjustable；
Optionally, the aeroge elastic strain range includes 0.01-10%.
Optionally, the aeroge elastic strain range includes 10-20%.
Optionally, the aeroge elastic strain range includes 20%-40%.
Optionally, the aeroge elastic strain range includes 40-60%.
Optionally, the aeroge elastic strain range includes being less than 60%.
Optionally, the aeroge elastic strain range includes being more than or equal to 60%.
Optionally, the aeroge elastic strain range includes 60-90%.
Optionally, the aeroge elastic strain range includes 90-95%.
Optionally, the aeroge elastic strain range includes 96-99.9%.
Optionally, the aeroge elastic strain range includes 98.5-100%.
Further, the aeroge includes flexible conductive aeroge；
Optionally, the aeroge can be arbitrary elastic conduction aeroge, and material is unlimited；；
Optionally, the aeroge includes flexible carbon nanotube and its composite aerogel；
Optionally, the aeroge includes flexible conducting polymer such as polyaniline, polythiophene, polypyrrole, poly- second
Alkynes and its composite aerogel；
Optionally, the aeroge includes flexible metal and its composite aerogel；
Optionally, the aeroge includes the compressible super-elasticity carbon aerogels of omnidirectional；
Optionally, the aeroge includes elastic conduction sponge.
Further, the porosity of the aeroge is more than 60%.
Optionally, the porosity ranges of the aeroge include 60%-70%.
Optionally, the porosity ranges of the aeroge include 60%-70%.
Optionally, the porosity ranges of the aeroge include 70%-80%.
Optionally, the porosity ranges of the aeroge include 80%-85%.
Optionally, the porosity ranges of the aeroge include 85%-90%.
Optionally, the porosity ranges of the aeroge include being more than 90%.
Further, the aeroge can be arbitrary shape.Preferably, it can be sphere, cube, cylinder, polygon
Cylinder；Irregular solid；Thin slice, film or fiber of arbitrary shape etc..It is unlimited in elastic conduction aeroge size, most
It is thin 1 nanometer reachable.It is unlimited in elastic conduction aeroge dimension, can be three-dimensional block shape, two-dimensional nano-sheet and one-dimensional
Nanometer it is linear.
Further, the electrode refers to electrode made of the conductive material that is not chemically reacted with the aeroge；
Preferably, the electrode is using conductive carbon material.
Preferably, the electrode can be the electrode for the rigidity that the metals such as gold, silver, copper and its compound are constituted.
Preferably, the electrode can be carbon nanotube, graphene, metal nanometer line, load it is transparent on a flexible substrate
The preferable electrode of flexibility that conductive oxide, conducting polymer and its compound are constituted.
Preferably, the electrode is connect using conductive carbon material as conducting wire with the electric signal measurement device.
Further, the position of the electrode on aeroge and number can arbitrarily change；
Optionally, the electrode fixed placement contacts the aeroge；
Optionally, the electrode is freely placed into contact with the aeroge；
Optionally, the symmetrically placed contact aeroge of the electrode；
Optionally, the electrode is asymmetrically placed the contact aeroge.Further, the aeroge pressure sensor
One or more side can be detected to upward pressure.
Further, the form of electrode can be unlimited；
Optionally, electrode is plate；
Optionally, electrode is sonde-type；
Optionally, electrode is ball-type；
Optionally, electrode can directly use the electrode of detection device, not need additional new electrode.
Further, the electric signal of the aeroge pressure sensor output is one kind in electric current, resistance or voltage
Or it is several.Further, the contact electric signal is the electric signal of the contact interface of aeroge and electrode, caused by contact
Electric current, resistance or one or more of voltage and its variation.
The contact interface number of the aeroge and electrode is variable；
1) interface number is 0, and when sensor is in original state, electrode and aeroge can not have generation contact temporarily,
That is 0 contact surface；
2) interface number is 1, when the single side of detection upwards pressure, only exists a contact surface；
3) interface number is N (N>1, N is positive integer), it detects N number of side and upwards pressure, there are N number of contact surfaces.
The contact interface of the aeroge and electrode can choose whether to be connected into detection circuit, that is, lead according to actual needs
Lead to or is not turned on；Pressure can be measured by being connected into the interface of detection circuit；The interface number for being connected into detection circuit is less than or equal to connect
Touch interface number.
The applying mode of the pressure of the detection is unlimited；
Optionally, the pressure can with apply by way of pressure sensor contacts；
Preferably, the pressure can be transmitted to interface by the external world by aeroge；
Preferably, the pressure can directly pass through electrodes transfer to interface；
Optionally, the pressure can be by applying with the non-contacting mode of pressure sensor；
Preferably, the pressure can be used as medium by gas and be transmitted to pressure sensor；
Preferably, the pressure can be used as medium by solid and be transmitted to pressure sensor.
Further, the aeroge pressure is controlled as work materials by using different elastic conduction aeroges to pass
The detection limit and working range of sensor.
A kind of aeroge pressure sensor provided by the invention, (10Pa is left up to 15Pa is less than or equal to for detection power lower limit
Touching gently in right corresponding people's tactile)；Sensitivity is adjustable, can be more than 10/kPa；Energy consumption is controllable, it is preferable that is less than 30 μ W.
Optionally, the sensor includes being directed to small pressure, and detection limit is less than or equal to the touch sensor of 0.8Pa.
Optionally, the sensor includes being directed to small pressure, and detection limit is less than or equal to the touch sensor of 5Pa.
Optionally, the sensor includes being directed to small pressure, and detection limit is less than or equal to the touch sensor of 15Pa.
Optionally, the sensor includes being directed to middle pressure, and detection limit is less than or equal to the touch sensor of 50Pa.
Can also include being directed to smaller pressure, working range is 15Pa-200Pa pressure sensors.
Optionally, the sensor includes being directed to middle pressure, and working range is the pressure sensing of 200Pa-10kPa
Device.Can also include being directed to middle pressure, working range is the pressure sensor of 100Pa-5kPa.
Optionally, the sensor includes being directed to big pressure, and working range is the pressure sensor more than 10kPa.
Optionally, the sensor includes being directed to big pressure, and working range is the pressure sensor more than 15kPa.
Optionally, the sensor includes being directed to big pressure, and working range is the pressure sensor more than 20kPa.
Optionally, the sensor includes being directed to big pressure, and working range is the pressure sensor more than 20kPa.
Optionally, the sensor includes being directed to big pressure, and working range is the pressure sensor more than 100kPa.
The pressure sensor has excellent repeatability and stability；Telecommunications is exported under retest several times
Number curve remains unchanged；
Optionally, the pressure sensor exports electric signal curve under the retest less than 10,000 times and remains unchanged；
Optionally, the pressure sensor exports the holding of electric signal curve under 10,000 times to 100,000 times retests
It is constant；
Optionally, the pressure sensor exports electric signal curve under the retest more than 100,000 times and keeps not
Become；
The principle of the pressure sensor is：The porous structure of aeroge determines that aeroge surface roughness is very big,
When applying electric field in interface, the contact resistance of interface is much larger than the bulk resistor of aeroge.According to measuring interface
The value of electric signal calculates the size of contact resistance, further according to contact resistance with the variation relation of pressure be known to pressure it is big
It is small.
Compared to the prior art the present invention has the advantage that：
The tactile and pressure sensor that can detect the pressure along any direction based on aeroge, not only expands
The working range of sensor and ability to work is improved, reduces the cost of layout of sensor.Its detection limit is low, sensitivity
Height, the touch sensor of stability and the reproducible monitoring for being suitable as health signal and mechanical bionic hand.
The pressure sensor is compared with the sensor of traditional pressure texture, is not limited to electrode-sensitive material-electricity
The structure of pole, material and flexible structure are variable, suitable structure and material can be selected to reach with the concrete condition of pressure to be detected
To best Effect on Detecting.The optional range of material of the aeroge and electrode is big, and aeroge can process and cutting profile
It is not limited to the cube of rule, the form of the electrode is unlimited and plate electrode, and there is no bond between electrode and aeroge
And fixation, these characteristics give the pressure sensor material and configuration flexibility.
According to the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will be brighter
The above and other objects, advantages and features of the present invention.
Description of the drawings
Some specific embodiments that the invention will be described in detail by way of example and not limitation with reference to the accompanying drawings hereinafter.
Identical reference numeral denotes same or similar component or part in attached drawing.It should be appreciated by those skilled in the art that these
What attached drawing was not necessarily drawn to scale.In attached drawing：
Fig. 1 is the schematic cross-section that the pressure sensor of tactile and pressure in multiple directions can be detected in specific embodiment 1.
Fig. 2 is the schematic cross-section that the pressure sensor of tactile and pressure on any direction can be detected in specific embodiment 2.
Fig. 3 is the schematic cross-section that the pressure sensor of tactile and pressure on any direction can be detected in specific embodiment 3.
Fig. 4 shows for that can detect the section of the pressure sensor of tactile and pressure on eight different directions in specific embodiment 4
It is intended to.
Fig. 5 shows for that can detect the section of the pressure sensor of tactile and pressure on six different directions in specific embodiment 5
It is intended to.
Fig. 6 shows for that can detect the section of the pressure sensor of tactile and pressure on eight different directions in specific embodiment 6
It is intended to.
Fig. 7 shows for that can detect the section of the pressure sensor of tactile and pressure on six different directions in specific embodiment 7
It is intended to.
Fig. 8 is the schematic diagram that the pressure sensor of tactile and pressure on two different directions can be detected in specific embodiment 8.
Fig. 9 shows for that can detect the section of the pressure sensor of tactile and pressure on six different directions in specific embodiment 9
It is intended to.
Figure 10 is the section that the pressure sensor of tactile and pressure on two different directions can be detected in specific embodiment 10
Schematic diagram.
Figure 11 is the section that the pressure sensor of tactile and pressure on two different directions can be detected in specific embodiment 11
Schematic diagram.
Figure label：1, aeroge；2, electric signal measurement device；3a-h, float electrode；4, fixed electrode；5, arbitrary side
To a direction vector；6, projection of the direction vector in XOY plane；7, the angle of direction vector and Z axis；8, direction vector
The angle of projection and X-axis positive direction in XOY plane；
Specific implementation mode
The present invention is specifically described by embodiment, the present embodiment is served only for doing further the present invention
It is bright, it should not be understood as limiting the scope of the invention, other people make some non-intrinsically safes according to the content of foregoing invention
Change and adjustment, all belong to the scope of protection of the present invention.
The inventors found that：The spies such as aeroge has large specific surface area, porosity is big, density is small, thermal conductivity is low
Point has huge application potential in fields such as electronics industry, aerospace, the energy, chemical industry, Industrial Catalysis, environmental protection.It is most common
Aeroge be aerosil, be widely used in the fields such as heat-insulated, sound insulation and damping.In recent years, aeroge is especially
It is the extensive concern that electrically conductive elastic aeroge obtains scientific research personnel and industrial quarters.For example, the airsetting constructed based on graphene
Glue can have both the excellent properties of graphene and aeroge, realize the characteristics such as compression resistant, conductivity height.The aeroge of elastic conduction because
It changes, resistance also changes with good elasticity in smaller pressure compression lower structure；And pressure structure when removing
It can reply, resistance also returns to original size.And its porous structure assigns contact electricity of the unique characteristic in its surface with electrode
It hinders larger.Sensor structure is rationally designed in conjunction with the two advantages of elastic conduction aeroge, can be obtained with superiority
The sensor of energy.
As shown in Figure 1, a kind of aeroge pressure sensor provided by the invention, is to be prepared based on aerogel material, generally
Property, may include：Electric signal becomes between aeroge 1, the electrode 3a-h contacted with aeroge 1 and measuring electrode 3 and aeroge 1
The electric signal measurement device 2 of change.Wherein, aeroge 1 is elastic conduction aeroge.Elastic conduction aerogel material has certain
Electric conductivity, with good elasticity and there is porous network structure, porosity is more than 60%.
Specifically, it is in direct contact between electrode 3 and aeroge 1.Preferably, there is no any between electrode 3 and aeroge 1
Binder.Aeroge 1 has certain electric conductivity.Preferably, the conductivity of aeroge 1 is more than 0.01S/m.
Optionally, the conductivity range of aeroge 1 includes 0.01S/m-0.05S/m.
Optionally, the conductivity range of aeroge 1 includes 0.05S/m-0.1S/m.
Optionally, the conductivity range of aeroge 1 includes 0.1S/m-1S/m.
Optionally, the conductivity range of aeroge 1 includes 1S/m-45S/m.
Optionally, the conductivity range of aeroge 1 includes 55S/m-100S/m.
Optionally, the conductivity range of aeroge 1 includes 100S/m-1000S/m.
Optionally, the conductivity range of aeroge 1 includes being more than 1000S/m.
Further, the voidage of the aeroge 1 is more than 60%.
Optionally, the voidage range of the aeroge 1 includes 60%-70%.
Optionally, the voidage range of the aeroge 1 includes 60%-70%.
Optionally, the porosity ranges of the aeroge 1 include 70%-80%.
Optionally, the porosity ranges of the aeroge 1 include 80%-85%.
Optionally, the porosity ranges of the aeroge 1 include 85%-90%.
Optionally, the porosity ranges of the aeroge 1 include being more than 90%.
Further, aeroge 1 has certain elasticity.Aeroge 1 can return completely after loading certain compression strain
Multiple or partial recovery.Preferably, it is adjustable to account for the ratio that load strains for 1 recovery strain of aeroge.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 0.1-20%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 20-40%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 40%-60%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 60-80%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 70-90%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 90-95.9%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 96-99.9%.
Optionally, the ratio that the aeroge recovery strain accounts for load strain includes 98.5-100%.
A kind of aeroge pressure sensor provided by the invention, the aeroge 1 used can be carbon aerogels.Preferably,
Aeroge 1 includes flexible graphene and its composite aerogel.
Optionally, aeroge 1 includes flexible carbon nanotube and its composite aerogel.
Optionally, aeroge 1 include flexible conducting polymer for example polyaniline, polythiophene, polypyrrole, polyacetylene and
Its composite aerogel.
Optionally, aeroge 1 includes flexible metal and its composite aerogel.
Optionally, aeroge 1 includes the compressible super-elasticity carbon aerogels of omnidirectional.
Further, the aeroge 1 can be arbitrary shape.Preferably, it can be sphere, cube, cylinder, polygon
Cylinder；Irregular solid；Thin slice, film or fiber of arbitrary shape etc..It is unlimited in 1 size of elastic conduction aeroge,
It is most thin 1 nanometer reachable.It is unlimited in 1 dimension of elastic conduction aeroge, can be block shape, the two-dimensional nano-sheet and one of three-dimensional
The nanometer of dimension is linear.
A kind of aeroge pressure sensor in one embodiment provided by the invention, as shown in Fig. 2, the electrode used
3a-h refers to the conductive material not chemically reacted with the aeroge.Preferably, electrode 3a-h is using conductive carbon material.
Preferably, electrode 3a-h is connect using conductive carbon material as conducting wire with electric signal measurement device 2.Preferably, can be gold,
The electrode 3a-h for the rigidity that the metals such as silver, copper and its compound are constituted；Can also be carbon nanotube, graphene, metal nanometer line,
The load preferable electrode 3a-h of flexibility that transparent conductive oxide, conducting polymer and its compound are constituted on a flexible substrate.
The position of electrode on aeroge 1 and number can arbitrarily change.Electrode can fixation can also freely place, can be pair
Claim to place or be asymmetrically placed.Contact circle between electrode and elastic conduction aeroge on elastic conduction aeroge 1
There is no any binders or mechanical connection to fix in face.
Further, the form of electrode can be unlimited；
Optionally, electrode is plate；
Optionally, electrode is sonde-type；
Optionally, electrode is ball-type；
Optionally, electrode can directly use the electrode of detection device, not need additional new electrode.
Further, the contact electric signal is the electric signal of the contact interface of aeroge and electrode, is caused for contact
Electric current, resistance or one or more of voltage and its variation.
The contact interface number of the aeroge and electrode is variable；
1) interface number is 0, and when sensor is in original state, electrode and aeroge can not have generation contact temporarily,
That is 0 contact surface；
2) interface number is 1, when the single side of detection upwards pressure, only exists a contact surface；
3) interface number is N (N>1, N is positive integer), it detects N number of side and upwards pressure, there are N number of contact surfaces.
It can be chosen whether to be connected into detection circuit, i.e., according to actual needs in the contact interface of the aeroge and electrode
It is connected or is not turned on；Pressure can be measured by being connected into detection circuit interface；The interface number for being connected into detection circuit is less than or equal to connect
Touch interface number.
The applying mode of the pressure of the detection is unlimited；
Optionally, the pressure can with apply by way of pressure sensor contacts；
Preferably, the pressure can be transmitted to interface by the external world by aeroge；
Preferably, the pressure can directly pass through electrodes transfer to interface；
Optionally, the pressure can be by applying with the non-contacting mode of pressure sensor；
Preferably, the pressure can be used as medium by gas and be transmitted to pressure sensor；
Preferably, the pressure can be used as medium by solid and be transmitted to pressure sensor.
A kind of principle of aeroge pressure sensor provided by the invention is：The porous structure of aeroge determines aeroge
Surface roughness is very big, and when applying electric field in interface, the contact resistance of interface is much larger than the bulk resistor of aeroge.According to
The value of the electric signal of interface is measured to calculate the size of contact resistance, is with the variation relation of pressure further according to contact resistance
Understand the size of pressure.A kind of detection power lower limit of aeroge pressure sensor provided by the invention is up to less than or equal to 0.7Pa
(touching gently in the corresponding people's tactiles of 10Pa or so), sensitivity can be more than 100/kPa, and energy consumption is less than 30 μ W.
A kind of aeroge pressure sensor provided by the invention, can detect one or more side and upward pressure.It is preferred that
Ground can detect the pressure on any direction when using having the compressible hyperelastic conductive aeroge of omnidirectional as sensitive material
Power.
It is compressed along any direction of its three-dimensional system of coordinate (X-Y-Z) as shown in Fig. 2, the compressible super-elasticity of omnidirectional refers to aeroge
After can be restored to original length when removing pressure.
The electric signal of a kind of aeroge pressure sensor provided by the invention, output is unlimited.Its electric signal exported can
For electric current, voltage, resistance.The variation for the electric signal that electric signal measurement device 2 is exported by measurement, further according to contact resistance with pressure
The variation relation of power is the size for understanding pressure.
Further, the aeroge pressure is controlled as work materials by using different elastic conduction aeroges to pass
The detection limit and working range of sensor.
A kind of aeroge pressure sensor provided by the invention, including it is directed to small pressure, detection limit is less than or equal to 15Pa
Touch sensor.Further include being directed to middle pressure, detection limit is less than or equal to the touch sensor of 50Pa.It can also include needle
To smaller pressure, working range is 15Pa-200Pa pressure sensors.Can also include being directed to middle pressure, working range is
The pressure sensor of 200Pa-10kPa.Can also include being directed to middle pressure, working range is the pressure sensing of 100Pa-5kPa
Device.Can also include being directed to big pressure, working range is the pressure sensor more than 10kPa.Can also include being directed to big pressure,
Working range is the pressure sensor more than 100kPa.
A kind of aeroge pressure sensor provided by the invention, specific embodiment are as follows：
Specific embodiment 1
As shown in Figure 1, copper electrode 3a-c is arranged on cube elastic conduction graphene composite carbon nanometer tube aeroge 1,
Aeroge may be other elastic conduction aeroges, and copper electrode can be the electrode of other materials, and electrode is in schematic diagram
Tabular, shape can be unlimited.It can the detection of three dimensional spatially pressure on any direction.Pressure can by and pressure sensing
The mode that device is in direct contact applies, and can also be conducted by medium and be applied in a non-contact manner.
It obtains being for small pressure, detection limit is less than or equal to the touch sensor of 15Pa；Or it is directed to middle equipressure
The touch sensor of power, working range 15Pa-200Pa；Also middle pressure, working range 200Pa-10kPa can be directed to
Pressure sensor, or be directed to big pressure, working range is pressure sensor more than 10kPa；Or for big pressure
The pressure sensor of power, working range are more than 100kPa, and sensitivity can be more than 100/kPa, and energy consumption is less than 30 μ W.
Specific embodiment 2
It can live in any direction as shown in Fig. 2, being arranged on spherical elastic conduction graphene composite carbon nanometer tube aeroge 1
Dynamic free electrode 3, can pressure aeroge of the detection of three dimensional spatially on any direction may be that other elastic conductings are electrical
Gel, copper electrode can be the electrode of other materials, and electrode is probe shape in schematic diagram, and shape can be unlimited.Such as schematic diagram institute
Show, being applied by way of being in direct contact with pressure sensor for pressure can also be conducted by medium with non-contacting
Mode applies.
It obtains being for small pressure, detection limit is less than or equal to the touch sensor of 15Pa；Or it is directed to middle equipressure
The touch sensor of power, working range 15Pa-200Pa；Also middle pressure, working range 200Pa-10kPa can be directed to
Pressure sensor, or be directed to big pressure, working range is pressure sensor more than 10kPa；Or for big pressure
The pressure sensor of power, working range are more than 100kPa, and sensitivity can be more than 100/kPa, and energy consumption is less than 30 μ W, detectable three
Pressure on dimension space on any direction.
Specific embodiment 3
As shown in figure 3, in 1 surface layout of spherical elastic conduction graphene composite carbon nanometer tube aeroge two
Movable free electrode 3a, b, aeroge may be other elastic conduction aeroges in any direction, and copper electrode can be
The electrode of other materials, electrode is probe shape in schematic diagram, and shape can be unlimited.Energy detection of three dimensional is spatially on any direction
Pressure.Can being applied by way of being in direct contact with pressure sensor for pressure, can also be conducted by medium with non-contact
Mode apply.
It obtains being the touch sensor for middle pressure, working range is more than 100kPa, and sensitivity is up to 2/
KPa, energy consumption are less than 30 μ W, the pressure on detectable three dimensions on any direction.Specific embodiment 4
As shown in figure 4, the gold electrode 3a-h of sand paper polishing is arranged on Elastic Cylindrical conductive carbon nanotube aeroge 1,
Aeroge may be other elastic conduction aeroges, and copper electrode can be the electrode of other materials, and electrode is in schematic diagram
Covering of the fan fills, and shape can be unlimited.Area is slightly less than the surface of aeroge 1, there is certain intervals between each other, wraps the table in cylinder
Face, eight altogether, there are one electrodes in centre as fixed electrode 4, can detect 8 sides and upward pressure.Pressure can be with
Applied by way of being in direct contact with pressure sensor, can also be conducted by medium and be applied in a non-contact manner.
It obtains being the touch sensor for middle pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power on detectable 8 directions.
Specific embodiment 5
As shown in figure 5, the gold electrode 3a-f of sand paper polishing is arranged on Elastic Cylindrical conductive carbon nanotube aeroge 1,
Aeroge may be other elastic conduction aeroges, and copper electrode can be the electrode of other materials, and electrode is in schematic diagram
Sector shape, shape can be unlimited.Area is slightly less than the surface of aeroge 4, there is certain intervals between each other, wraps the table in cylinder
Face, six altogether, there are one electrodes in centre as fixed electrode 4, can detect 6 sides and upward pressure.
It obtains being the touch sensor for middle pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power on detectable 6 directions.
Specific embodiment 6
As shown in fig. 6, the gold electrode 3a-h of sand paper polishing is arranged on Elastic Cylindrical conductive carbon nanotube aeroge 1,
Area is slightly less than the surface of aeroge 1, there is certain intervals between each other, wraps on the surface of cylinder, eight altogether, can detect 8
A side upwards pressure.In the present embodiment, the material and shape of aeroge and electrode can change with the concrete condition of detection power, power
Applying mode it is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also be conducted by medium with
Non-contacting mode applies.
It obtains being the touch sensor for middle pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power on detectable 8 directions.
Specific embodiment 7
As shown in fig. 7, the gold electrode 3a-f of sand paper polishing is arranged on Elastic Cylindrical conductive carbon nanotube aeroge 1,
Area is slightly less than the surface of aeroge 1, there is certain intervals between each other, wraps on the surface of cylinder, six altogether, can detect 6
A side upwards pressure.In the present embodiment, the material and shape of aeroge and electrode can change with the concrete condition of detection power, power
Applying mode it is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also be conducted by medium with
Non-contacting mode applies.
It obtains being the touch sensor for middle pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power on detectable 6 directions.
Specific embodiment 8
As shown in figure 8, the placement of carbon nanotubes film on the carbon nanotube composite graphite alkene aeroge 1 of thin flexible film conduction
Electrode (interdigital electrode) 3, area is slightly less than the surface of aeroge 4, up and down each symmetrically placed one or so each symmetrically placed one
It is a, the pressure in both direction can be detected.In the present embodiment, the material and shape of aeroge and electrode can be with the tool of detection power
Body situation changes, and the applying mode of power is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also lead to
Medium conduction is crossed in a non-contact manner to apply.
It obtains being the touch sensor for smaller pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power in detectable both direction.
Specific embodiment 9
As shown in figure 9, arranging sand paper polishing on cube shaped elastic conduction carbon nanotube composite polyvinyl alcohol aeroge 1
Gold electrode 3a-f, area is slightly less than the surface of aeroge, there is certain intervals between each other, wraps on cubical surface, altogether
Six, 6 sides can be detected and upwarded pressure.In the present embodiment, the material and shape of aeroge and electrode can be with the tool of detection power
Body situation changes, and the applying mode of power is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also lead to
Medium conduction is crossed in a non-contact manner to apply.
It obtains being the touch sensor for smaller pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power on detectable 6 directions.
Specific embodiment 10
As shown in Figure 10, the gold of sand paper polishing is arranged on cube elastic conduction graphene composite silicone rubber aeroge 1
Electrode 3a, b, area are slightly less than the surface of aeroge 1, and each symmetrically placed one or so each symmetrically placed one, can detect up and down
Pressure in both direction.In the present embodiment, the material and shape of aeroge and electrode can change with the concrete condition of detection power,
The applying mode of power is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also be conducted by medium
Apply in a non-contact manner.
It obtains being the touch sensor for middle pressure, working range 200Pa-10kPa, sensitivity is up to 2/
KPa, energy consumption are less than 30 μ W, different power in detectable both direction.
Specific embodiment 11
As shown in figure 11, two carbon nanocapsule thin film electrodes, aeroge, electrode are arranged on film-type carbon aerogels lower surface
All it is carbon material with conducting wire, electrode is tabular in schematic diagram, and shape can be unlimited.There are gap, area to omit between two electrodes
Less than the surface of graphene sponge, it can detect and upward pressure perpendicular to thin film planar side.Pressure can be by being passed with pressure
The mode that sensor is in direct contact applies, and can also be conducted by medium and be applied in a non-contact manner.
It obtains being the pressure sensor for big pressure, working range 0.7Pa-200kPa, sensitivity is up to 350/
KPa, energy consumption are less than 30 μ W, can upward pressure perpendicular to thin film planar side, and the electric signal of output is resistance.
Specific embodiment 12
Arrange that the silver electrode of sand paper polishing, area are slightly less than aeroge on Elastic Cylindrical conductive metal silver aeroge
There are certain intervals on surface between each other, and packet is on the surface of cylinder, and eight altogether, there are one electrodes as fixation in centre
Electrode can detect 8 sides and upward pressure.There are the prestressing force of 0.1N between electrode and aeroge.In the present embodiment, aeroge
Can change with the concrete condition of detection power with the material and shape of electrode, the applying mode of power is also unlimited, can by and pressure
The mode that sensor is in direct contact applies, and can also be conducted by medium and be applied in a non-contact manner.
Obtain being the pressure sensor for big pressure, working range is ＞ 10kPa, sensitivity up to 0.02/kPa,
Energy consumption is less than 30 μ W, different power on detectable 8 directions.
Specific embodiment 13
Arrange that Thin Film Carbon Nanotube electrode, area omit on film-type elastic conduction graphene composite polyvinyl alcohol aeroge
Less than the surface of graphene aerogel, each symmetrically placed one up and down, the pressure in both direction can be detected.In the present embodiment,
The material and shape of aeroge and electrode can change with the concrete condition of detection power, and the applying mode of power is also unlimited, can pass through
Apply with the mode that pressure sensor is in direct contact, can also be conducted by medium and be applied in a non-contact manner.
It obtains being the touch sensor for middle pressure, working range 200Pa-10kPa, sensitivity is up to 2/
KPa, energy consumption are less than 30 μ W, different power in detectable both direction.
Specific embodiment 14
Center copper electrode is arranged on spherical elastic conduction graphene composite carbon nanometer tube aeroge, in aeroge table
Face arrange one can movable free electrode in any direction, the energy detection of three dimensional spatially pressure on any direction.This implementation
In example, the material and shape of aeroge and electrode can change with the concrete condition of detection power, and the applying mode of power is also unlimited, can be with
Applied by way of being in direct contact with pressure sensor, can also be conducted by medium and be applied in a non-contact manner.
It obtains being the touch sensor for middle pressure, working range 200Pa-10kPa, sensitivity is up to 2/
KPa, energy consumption are less than 30 μ W, the pressure on detectable three dimensions on any direction.
Specific embodiment 15
The placement of carbon nanotubes membrane electrode on cube elastic conduction graphene aerogel, area are slightly less than aeroge
Surface, each symmetrically placed one or so each symmetrically placed one, can detect the pressure in both direction up and down.In the present embodiment,
The material and shape of aeroge and electrode can change with the concrete condition of detection power, and the applying mode of power is also unlimited, can pass through
Apply with the mode that pressure sensor is in direct contact, can also be conducted by medium and be applied in a non-contact manner.
It obtains being the touch sensor for small pressure, detection limit≤15Pa, sensitivity is up to 10/kPa, energy consumption
Less than 30 μ W, different power in detectable both direction.
Specific embodiment 16
Arrange that graphene membrane electrode, area are slightly less than aeroge on Elastic Cylindrical conductive carbon nanotube aeroge
There are certain intervals on surface between each other, and packet is on the surface of cylinder, and eight altogether, there are one electrodes as fixation in centre
Electrode can detect 8 sides and upward pressure.In the present embodiment, the material and shape of aeroge and electrode can be with the tool of detection power
Body situation changes, and the applying mode of power is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also lead to
Medium conduction is crossed in a non-contact manner to apply.
It obtains being the touch sensor for middle pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power on detectable 8 directions.
Specific embodiment 17
The membrane electrode of silver ink water printing is arranged on the carbon nanotube composite graphite alkene aeroge of cube elastic conduction,
Area is slightly less than the surface of aeroge, and each symmetrically placed one or so each symmetrically placed one, can detect in both direction up and down
Pressure.In the present embodiment, the material and shape of aeroge and electrode can change with the concrete condition of detection power, the application side of power
Formula is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also be conducted with non-contacting by medium
Mode applies.
It obtains being the touch sensor for smaller pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power in detectable both direction.
Specific embodiment 18
The gold electrode of sand paper polishing is arranged on Elastic Cylindrical conductive graphene composite polyvinyl alcohol aeroge aeroge,
Area is slightly less than the surface of aeroge, there is certain intervals between each other, and packet is on the surface of cylinder, six altogether, centre
There are one electrodes as fixed electrode, can detect 6 sides and upward pressure.In the present embodiment, the material of aeroge and electrode and
Shape can change with the concrete condition of detection power, and the applying mode of power is also unlimited, can be by being in direct contact with pressure sensor
Mode apply, can also by medium conduct apply in a non-contact manner.
It obtains being the touch sensor for smaller pressure, working range 15Pa-200Pa, sensitivity is up to 10/
KPa, energy consumption are less than 30 μ W, different power on detectable 8 directions.
Specific embodiment 19
Arrange that the gold electrode of sand paper polishing, area are slightly less than aeroge on cube elastic conduction graphene aerogel
Surface, each symmetrically placed one or so each symmetrically placed one, can detect the pressure in both direction up and down.In the present embodiment,
The material and shape of aeroge and electrode can change with the concrete condition of detection power, and the applying mode of power is also unlimited, can pass through
Apply with the mode that pressure sensor is in direct contact, can also be conducted by medium and be applied in a non-contact manner.
It obtains being the touch sensor for middle pressure, working range 200Pa-10kPa, sensitivity is up to 2/
KPa, energy consumption are less than 30 μ W, different power in detectable both direction.
Specific embodiment 20
Arrange that the gold electrode of sand paper polishing, area are slightly less than aeroge on Elastic Cylindrical electrically conductive polyaniline aeroge
There are certain intervals on surface between each other, and packet is on the surface of cylinder, and eight altogether, there are one electrodes as fixation in centre
Electrode can detect 8 sides and upward pressure.In the present embodiment, the material and shape of aeroge and electrode can be with the tool of detection power
Body situation changes, and the applying mode of power is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also lead to
Medium conduction is crossed in a non-contact manner to apply.
It obtains being the touch sensor for middle pressure, working range 200Pa-10kPa, sensitivity is up to 2/
KPa, energy consumption are less than 30 μ W, different power on detectable 8 directions.
Specific embodiment 21
Arrange that copper electrode, area are slightly less than the surface of aeroge on cube elastic conduction carbon nanotube aerogel, on
Under each symmetrically placed one or so each symmetrically placed one, the pressure in both direction can be detected.In the present embodiment, aeroge and
The material and shape of electrode can change with the concrete condition of detection power, and the applying mode of power is also unlimited, can be by being passed with pressure
The mode that sensor is in direct contact applies, and can also be conducted by medium and be applied in a non-contact manner.
Obtain being the touch sensor for big pressure, working range is ＞ 10kPa, sensitivity up to 0.02/kPa,
Energy consumption is less than 30 μ W, different power in detectable both direction.
Specific embodiment 22
Arrange that the copper electrode of sand paper polishing, area are slightly less than aeroge on Elastic Cylindrical conductive metal silver aeroge
There are certain intervals on surface between each other, and packet is on the surface of cylinder, and eight altogether, there are one electrodes as fixation in centre
Electrode can detect 8 sides and upward pressure.In the present embodiment, the material and shape of aeroge and electrode can be with the tool of detection power
Body situation changes, and the applying mode of power is also unlimited, can be applied by way of being in direct contact with pressure sensor, can also lead to
Medium conduction is crossed in a non-contact manner to apply.
Obtain being the pressure sensor for big pressure, working range is ＞ 10kPa, sensitivity up to 0.02/kPa,
Energy consumption is less than 30 μ W, different power on detectable 8 directions.
Specific embodiment 23
Arrange that graphene membrane electrode, area are smaller on film-type elastic conduction graphene composite polyvinyl alcohol aeroge
In the surface of graphene aerogel, each symmetrically placed one up and down, the pressure in both direction can be detected.In the present embodiment, gas
The material and shape of gel and electrode can with detection power concrete condition change, the applying mode of power is also unlimited, can by with
The mode that pressure sensor is in direct contact applies, and can also be conducted by medium and be applied in a non-contact manner.
It obtains being the touch sensor for middle pressure, working range 100Pa-5kPa, sensitivity is up to 2/
KPa, energy consumption are less than 30 μ W, different power in detectable both direction.
Specific embodiment 24
Arrange that gold electrode, area are slightly less than the surface of aeroge on cube elastic conduction graphene aerogel, up and down
Each symmetrically placed one or so each symmetrically placed one, the pressure in both direction can be detected.In the present embodiment, aeroge and electricity
The material and shape of pole can with detection power concrete condition change, the applying mode of power is also unlimited, can by and pressure sensing
The mode that device is in direct contact applies, and can also be conducted by medium and be applied in a non-contact manner.
It obtains being the touch sensor for small pressure, detection limit≤15Pa, sensitivity is up to 10/kPa, energy consumption
Less than 30 μ W, different power in detectable both direction.
Specific embodiment 25
Step a) prepares cube carbon sponge.
Step b) arranges that graphene membrane electrode, area are slightly less than the surface of graphene sponge on cube carbon sponge,
Each symmetrically placed one or so each symmetrically placed one up and down, can detect the pressure in both direction.In the present embodiment, aeroge
Can change with the concrete condition of detection power with the material and shape of electrode, the applying mode of power is also unlimited, can by and pressure
The mode that sensor is in direct contact applies, and can also be conducted by medium and be applied in a non-contact manner.
It obtains being the full carbon and pressure sensor for big pressure, working range is ＞ 100kPa, and sensitivity is up to 20/
KPa, energy consumption are less than 30 μ W, different power in detectable both direction, and the electric signal of output is voltage.
A kind of aeroge pressure sensor provided by the invention, using flexible conductive aeroge as the quick of core
Feel material；Any bonding is not present in the contact interface between electrode and elastic conduction aeroge on elastic conduction aeroge
Agent；Make sensor that there is extremely low detection using the interface contact resistance effect between electrode and porous elastic conduction aeroge
Lower limit and higher sensitivity；The shape of aeroge and the shape of electrode and installation site can arbitrarily change, and can be pressed at one
The detection to any direction pressure is realized on force snesor；The sensor not only has larger working range and very strong detection
Ability, while also there is lower cost of layout；The tactile of the monitoring and mechanical bionic hand that are suitable as health signal passes
Sensor.
Compared to the prior art the present invention has the advantage that：
A kind of aeroge pressure sensor provided by the invention is based on the compressible super-elasticity of omnidirectional, high intensity and height electricity
The aeroge of conductance can detect the tactile and pressure sensor of the pressure along any direction, not only expand the work of sensor
Range and ability to work is improved, reduces the cost of layout of sensor.Its detection limit is low, and high sensitivity is suitable as human body
The touch sensor of the monitoring of health signal and mechanical bionic hand.
So far, although those skilled in the art will appreciate that present invention has been shown and described in detail herein multiple shows
Example property embodiment still without departing from the spirit and scope of the present invention, still can according to the present disclosure directly
Determine or derive many other variations or modifications consistent with the principles of the invention.Therefore, the scope of the present invention is understood that and recognizes
It is set to and covers other all these variations or modifications.
Claims (10)
1. a kind of aeroge pressure sensor, which is characterized in that it is prepared based on aerogel material, and component units include mainly：
Aeroge；
Electrode；With
Electric signal measurement device；
The electric signal measurement is to measure contact electric signal and its variation between the electrode and aeroge.
2. aeroge pressure sensor according to claim 1, which is characterized in that when the measuring circuit of the sensor
When conducting, it is in direct contact between the electrode and aeroge；Optionally, binder is not present between the electrode and aeroge；
Optionally, it is connected and fixed without machinery between the electrode and aeroge.
3. aeroge pressure sensor according to claim 1, which is characterized in that the aeroge is to be led with certain
Electrically, with elasticity and with porous network structure.
4. aeroge pressure sensor according to claim 1, which is characterized in that the aeroge is loading certain pressure
It can be replied completely after shrinkage strain or partial recovery.
5. aeroge pressure sensor according to claim 1, which is characterized in that the aeroge is arbitrary bullet
Property conduction aerogel material, material are unlimited.
6. aeroge pressure sensor according to claim 1, which is characterized in that the electrode refers to and the aeroge
Electrode made of the conductive material not chemically reacted.
7. aeroge pressure sensor according to claim 1, which is characterized in that the electrode on aeroge
Position and number can arbitrarily change.
8. aeroge pressure sensor according to claim 1, which is characterized in that the aeroge can be arbitrary shape.
9. aeroge pressure sensor according to claim 1, which is characterized in that the form of the electrode is unlimited.
10. aeroge pressure sensor according to claim 1, which is characterized in that the contact electric signal is airsetting
The electric signal of the contact interface of glue and electrode；The contact electric signal is on the contact surface of the aeroge and electrode by pressing
Electric current caused by power, resistance or one or more of voltage and its variation.
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| CN111722723B (en) * | 2020-06-29 | 2021-07-13 | 北京化工大学 | Bidirectional bending flexible sensor, sign language recognition system and method |
| CN112816112B (en) * | 2021-01-18 | 2021-11-02 | 天津大学 | Flexible sensor assembly |
| CN114923607B (en) * | 2022-05-19 | 2023-10-31 | 浙江大学 | Intelligent pressure sensor based on porous material |
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