CN108330537B - 一种密周期多晶硅铸锭炉侧加热器 - Google Patents
一种密周期多晶硅铸锭炉侧加热器 Download PDFInfo
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- CN108330537B CN108330537B CN201810199564.0A CN201810199564A CN108330537B CN 108330537 B CN108330537 B CN 108330537B CN 201810199564 A CN201810199564 A CN 201810199564A CN 108330537 B CN108330537 B CN 108330537B
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CN201810199564.0A CN108330537B (zh) | 2018-03-12 | 2018-03-12 | 一种密周期多晶硅铸锭炉侧加热器 |
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CN201810199564.0A CN108330537B (zh) | 2018-03-12 | 2018-03-12 | 一种密周期多晶硅铸锭炉侧加热器 |
Publications (2)
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CN108330537A CN108330537A (zh) | 2018-07-27 |
CN108330537B true CN108330537B (zh) | 2023-09-05 |
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CN201810199564.0A Active CN108330537B (zh) | 2018-03-12 | 2018-03-12 | 一种密周期多晶硅铸锭炉侧加热器 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109837593A (zh) * | 2019-03-29 | 2019-06-04 | 徐州晶睿半导体装备科技有限公司 | 加热器及具有其的单晶炉 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101775642A (zh) * | 2010-03-04 | 2010-07-14 | 北京中联阳光科技有限公司 | 多晶硅铸锭炉用组合式电阻加热器及节能热场设计 |
DE102010031819A1 (de) * | 2010-07-21 | 2012-01-26 | Centrotherm Sitec Gmbh | Verfahren und Vorrichtung zum Herstellen von polykristallinen Siliziumblöcken |
CN202968758U (zh) * | 2012-12-24 | 2013-06-05 | 英利能源(中国)有限公司 | 铸锭炉及其侧板装置 |
CN107523867A (zh) * | 2017-10-16 | 2017-12-29 | 镇江环太硅科技有限公司 | 一种多晶硅铸锭炉的分层式侧加热器 |
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2018
- 2018-03-12 CN CN201810199564.0A patent/CN108330537B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101775642A (zh) * | 2010-03-04 | 2010-07-14 | 北京中联阳光科技有限公司 | 多晶硅铸锭炉用组合式电阻加热器及节能热场设计 |
DE102010031819A1 (de) * | 2010-07-21 | 2012-01-26 | Centrotherm Sitec Gmbh | Verfahren und Vorrichtung zum Herstellen von polykristallinen Siliziumblöcken |
CN202968758U (zh) * | 2012-12-24 | 2013-06-05 | 英利能源(中国)有限公司 | 铸锭炉及其侧板装置 |
CN107523867A (zh) * | 2017-10-16 | 2017-12-29 | 镇江环太硅科技有限公司 | 一种多晶硅铸锭炉的分层式侧加热器 |
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