CN108330443A - A kind of diamond-like carbon film-coating method - Google Patents
A kind of diamond-like carbon film-coating method Download PDFInfo
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- CN108330443A CN108330443A CN201810108215.3A CN201810108215A CN108330443A CN 108330443 A CN108330443 A CN 108330443A CN 201810108215 A CN201810108215 A CN 201810108215A CN 108330443 A CN108330443 A CN 108330443A
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- Prior art keywords
- plated
- ground
- diamond
- film
- coating method
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/3442—Applying energy to the substrate during sputtering using an ion beam
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
Abstract
The invention discloses a kind of diamond-like carbon film-coating method, plating steps include：One substrate is provided, is put into vacuum chamber after being cleaned, vacuum chamber is vacuumized, then pass to argon gas, auxiliary source is opened and ion beam cleaning is carried out to substrate；Then using graphite as target, main source is opened, graphite target is cleaned；The energy parameter in main source and auxiliary source is finally adjusted, baffle is opened and plates one layer of DLC film on substrate.The diamond-like manufactured through the invention has high adhesion force and the present invention is simple and convenient.
Description
Technical field
The present invention relates to coating technique field, more particularly to a kind of diamond-like carbon film-coating method.
Background technology
DLC film has excellent property, is mainly manifested in：DLC film has good mechanical property,
Hardness is high, and wearability is good and friction coefficient is low, with good wetability and preferable diffusion barrier properties, corrosion resistance,
Thermal conductivity and chemical stability are good.In addition DLC film can be applied to multiple fields, can such as be plated in tool surface
DLC film is to improve the hardometer lubricity of cutter, to extend the service life of cutter, is applied to the mode surface of mold
Release film is formed, the lubricity and adhesion of mode can be effectively improved, greatly improve the demolding performace of mode, and mode can be extended
Service life.
Since the film plating process of diamond-like is various, the change of film plating process has very big shadow to the property of DLC film
It rings.Currently, diamond-like can carry out plated film directly on magnetron sputtering apparatus, this method can be plated out directly on ground
DLC film, but operating process is complicated, film hardness and adhesive force are all relatively low.
Therefore, a kind of simple and convenient, performance height how is provided, the method for hard coating thin film of generic diamond of strong adhesive force is
The problem of those skilled in the art's urgent need to resolve.
Invention content
In view of this, the present invention provides a kind of diamond-like carbon film-coating method, the present invention is using double-ion beam auxiliary sputtering
Plated film so that the adhesive force of DLC film and substrate is stronger.
In order to achieve the above object, the present invention adopts the following technical scheme that：
A kind of diamond-like carbon film-coating method, includes the following steps：
(1) ground to be plated is provided, is put into vacuum chamber after ground to be plated is cleaned；
(2) vacuum chamber is vacuumized, then passes to argon gas, opened auxiliary source and ion beam cleaning is carried out to ground to be plated；
(3) graphite target is provided, main source is opened and ion beam cleaning is carried out to graphite target；
(4) after the completion of graphite target cleaning, the parameter in main source and auxiliary source ion beam energy and line is adjusted, in ground to be plated
Upper plating last layer DLC film.
The parameter in main source and auxiliary source is specific in the present invention, and Properties of Diamond like Carbon or plating can be reduced after changing parameter
Do not go out diamond thin, influences final coating effects.
Preferably, in a kind of above-mentioned diamond-like carbon film-coating method, the substrate material to be plated can be stainless steel, aluminium
Material, quartz, but not limited to this.
Preferably, in a kind of diamond-like carbon film-coating method of trade company, the cleaning of the ground to be plated specifically includes following step
Suddenly：
D. the ground to be plated is cleaned substantially；
E. it is put into acetone soln and is cleaned using supersonic wave cleaning machine；
F. it is put into ultrasonic cleaning in ethanol solution.
Preferably, in a kind of above-mentioned diamond-like carbon film-coating method, after the completion of the ground cleaning to be plated by argon gas into
Row drying is put into double-ion beam auxiliary sputter coating machine vacuum chamber, carries out vacuum pumping.
The modification to surface of bottom material is realized to the operation of ground to be plated cleaning above, it is miscellaneous on ground in order to clean
The fine particle on matter and surface, need to different grounds use different cleaning methods, such as stainless steel be successively according to
Chloroform ultrasonic cleaning 7 minutes, acetone ultrasonic cleaning 7 minutes, absolute ethyl alcohol ultrasonic cleaning 7 minutes, last argon gas
Dry up surface.
Preferably, it in a kind of above-mentioned diamond-like carbon film-coating method, assists carrying out in sputtering coating equipment in double-ion beam
Plated film.Other method for hard coating thin film of generic diamond are compared, the present invention only needs to provide one piece of graphite target, inputs specific main source
With auxiliary source parameter, so that it may which to plate out DLC film, operating process is simple, and film carries out surface by the bombardment of auxiliary source and changes
Property so that adhesive force is more secured.
It can be seen via above technical scheme that compared with prior art, the present disclosure provides a kind of diamond-like is thin
Film film plating process, operated during plated film it is simpler, due to double-ion beam assist sputter coating reason, by main source
Bombarding graphite target so that carbon atom is deposited on ground, then by the bombardment of auxiliary source ion beam on the ground by deposition,
The active force of a compression is carried out to film so that the adhesive force of diamond thin and ground is stronger, and performance is more preferable.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 attached drawings are the method for hard coating thin film of generic diamond schematic diagram of the present invention；
In Fig. 1：
1 for ground to be plated, source supplemented by 2,3 be graphite target, 4 be main source, 5 be DLC film.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a kind of diamond-like carbon film-coating methods, and the present invention is using double-ion beam auxiliary sputtering plating
Film so that the adhesive force of DLC film and substrate is stronger.
Referring to attached drawing 1, the present invention provides a kind of diamond-like carbon film-coating methods, are special parameter plated film, including following step
Suddenly：
(1) first using quartz as ground 1 to be plated；
(2) graphite target 3 is provided, is put into vacuum chamber；
(3) quartz is carried out after cleaning substantially, is first put into acetone soln and is cleaned 20 minutes using supersonic wave cleaning machine；
Place into ultrasonic cleaning 10 minutes in ethanol solution；
(4) it is dried up by argon gas, is put into double-ion beam auxiliary sputter coating machine vacuum chamber, is evacuated to 5.0
×10-5MPa or less；
(5) it is 2.0sccm to open auxiliary 2 argon gas switch traffic of source, and vacuum degree is 1.0 × 10-2MPa, adjust 2 energy of auxiliary source with
Beam parameters carry out ion beam cleaning 3 minutes to quartz；
(6) it is 2.0sccm, averager flow switch, flow 3.0sccm, vacuum degree to open main 4 argon gas switch traffic of source
It is 3.0 × 10-2MPa adjusts 4 energy of main source and beam parameters, and ion beam cleaning is carried out 7 minutes to graphite target 3；
(7) energy parameter for adjusting main source 4 and auxiliary source 2 is the dedicated energy parameter of coating diamond-like, is bombarded by main source 4
Graphite target 3, auxiliary source 2 sputter ground quartz, last layer DLC film 5 are plated on ground quartz.By the specific ginseng in auxiliary source
Several bombardments carries out surface modification treatment to film, increases adhesive force.
After experiment by a large amount of hardships, the best special parameter of Properties of Diamond like Carbon, the present embodiment have been obtained
Using special parameter plated film, it sets plated film time to 30min, the change time will increase DLC film thickness, influence to make
Use effect.Ground a period of time surface film after the bombardment of auxiliary source is normal, no peeling phenomenon, wherein the parameter of bombardment process
It is as follows：
Ground bombards the DLC film to be formed without auxiliary source simultaneously, is peeled off through surface after a period of time, wherein Hong
The parameter for hitting process is as follows：
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with other
The difference of embodiment, just to refer each other for identical similar portion between each embodiment.For device disclosed in embodiment
For, since it is corresponded to the methods disclosed in the examples, so description is fairly simple, related place is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest range caused.
Claims (5)
1. a kind of diamond-like carbon film-coating method, which is characterized in that include the following steps：
S101, ground (1) to be plated is provided, is put into vacuum chamber after ground to be plated (1) is cleaned；
S102, vacuum chamber is vacuumized, then passes to argon gas, opened auxiliary source (2) and ion beam cleaning is carried out to ground to be plated (1)；
S103, graphite target (3) is provided, opens main source (4) and ion beam cleaning is carried out to graphite target (3)；
After the completion of S104, graphite target (3) cleaning, the parameter in main source (4) and auxiliary source (2) ion beam energy and line is adjusted,
Last layer DLC film (5) is plated on ground (1) to be plated.
2. a kind of diamond-like carbon film-coating method according to claim 1, which is characterized in that ground (1) material to be plated
Including at least stainless steel, aluminium, quartz.
3. a kind of diamond-like carbon film-coating method according to claim 1, which is characterized in that the ground (1) to be plated it is clear
It washes and specifically includes following steps：
A. ground to be plated (1) is cleaned substantially；
B. it is put into acetone soln and is cleaned using supersonic wave cleaning machine；
C. it is put into ultrasonic cleaning in ethanol solution.
4. a kind of diamond-like carbon film-coating method according to claim 3, which is characterized in that ground (1) cleaning to be plated
It is dried up after the completion by argon gas, is put into double-ion beam auxiliary sputter coating machine vacuum chamber, carries out vacuum pumping.
5. a kind of diamond-like carbon film-coating method according to claim 1, which is characterized in that assist sputtering plating in double-ion beam
Plated film is carried out in film device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810108215.3A CN108330443A (en) | 2018-02-02 | 2018-02-02 | A kind of diamond-like carbon film-coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810108215.3A CN108330443A (en) | 2018-02-02 | 2018-02-02 | A kind of diamond-like carbon film-coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108330443A true CN108330443A (en) | 2018-07-27 |
Family
ID=62927886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810108215.3A Pending CN108330443A (en) | 2018-02-02 | 2018-02-02 | A kind of diamond-like carbon film-coating method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725770A (en) * | 2020-12-18 | 2021-04-30 | 洛阳鼎铭光电科技有限公司 | DLC + AR film plating device for lens |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1796592A (en) * | 2004-12-24 | 2006-07-05 | 鸿富锦精密工业（深圳）有限公司 | Method for hard coating thin film of generic diamond |
| CN102965618A (en) * | 2012-12-07 | 2013-03-13 | 中国地质大学（北京） | Preparation method of metal doped hydrogen-free diamond-like carbon film |
| CN103510053A (en) * | 2012-06-29 | 2014-01-15 | 陈伟 | Method for plating metal surface with diamond-like carbon (DLC) film |
| CN104451541A (en) * | 2014-12-01 | 2015-03-25 | 中国航天科工集团第三研究院第八三五八研究所 | Method for improving content of sp<3> carbon atom hybridization bonds in diamond-like carbon (DLC) film |
| CN107022761A (en) * | 2017-04-28 | 2017-08-08 | 星弧涂层新材料科技（苏州）股份有限公司 | Composite thick film and its film plating process based on DLC film |
-
2018
- 2018-02-02 CN CN201810108215.3A patent/CN108330443A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1796592A (en) * | 2004-12-24 | 2006-07-05 | 鸿富锦精密工业（深圳）有限公司 | Method for hard coating thin film of generic diamond |
| CN103510053A (en) * | 2012-06-29 | 2014-01-15 | 陈伟 | Method for plating metal surface with diamond-like carbon (DLC) film |
| CN102965618A (en) * | 2012-12-07 | 2013-03-13 | 中国地质大学（北京） | Preparation method of metal doped hydrogen-free diamond-like carbon film |
| CN104451541A (en) * | 2014-12-01 | 2015-03-25 | 中国航天科工集团第三研究院第八三五八研究所 | Method for improving content of sp<3> carbon atom hybridization bonds in diamond-like carbon (DLC) film |
| CN107022761A (en) * | 2017-04-28 | 2017-08-08 | 星弧涂层新材料科技（苏州）股份有限公司 | Composite thick film and its film plating process based on DLC film |
Non-Patent Citations (2)
| Title |
|---|
| QI JUN等: "Mechanical and tribological properties of non-hydrogenated DLC films synthesized by IBAD", 《SURFACE AND COATINGS TECHNOLOGY》 * |
| 柳翠: "类金刚石碳膜制备工艺及掺杂性能研究", 《中国优秀博硕士学位论文全文数据库 (博士) 工程科技Ⅰ辑》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725770A (en) * | 2020-12-18 | 2021-04-30 | 洛阳鼎铭光电科技有限公司 | DLC + AR film plating device for lens |
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Application publication date: 20180727 |
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