CN108305547A - A kind of system and method measuring grating constant - Google Patents
A kind of system and method measuring grating constant Download PDFInfo
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- CN108305547A CN108305547A CN201810203064.XA CN201810203064A CN108305547A CN 108305547 A CN108305547 A CN 108305547A CN 201810203064 A CN201810203064 A CN 201810203064A CN 108305547 A CN108305547 A CN 108305547A
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Abstract
The invention discloses a kind of system and method measuring grating constant.The system includes light source, beam-expanding collimation system, Moire fringe imaging system and image capturing system, the detection light that light source is sent out images in Moire fringe imaging system by beam-expanding collimation system and obtains Moire fringe, which is converted to the striated figure equal with the Moire fringe width, interval through image capturing system acquisition.Method based on the system includes：The detection light that light source is sent out becomes a branch of directional light by beam-expanding collimation system and obtains Moire fringe into the Moire fringe imaging system containing master grating and grating to be measured, the Moire fringe is converted to the striated figure equal with the Moire fringe width, interval through image capturing system acquisition, provision interval on the striated figure is the interval D of Moire fringe, and the grating constant of grating to be measured is calculated according to formula.Grating constant precision obtained by system and method for the present invention is higher.
Description
Technical field
The invention belongs to field of optical measuring technologies, and in particular to a kind of system and method measuring grating constant.
Background technology
Grating is optical element of the optical research compared with based on, and the measurement problem of grating constant is optics aspect compared with based on
And important problem, high-precision grating can improve the precision of associated physical quantity.However, most of measurement method
It is all based on and carries out experiment and grating equation with a piece of grating to be measured come by way of calculating grating constant, few people will be compared with
It is applied among the measurement of grating constant for advanced and fine Moire measuring technique.Therefore, device is simple, stability is good,
The measurement problem that the Moire measuring technique of strong antijamming capability is applied to grating constant has a great deal of practical meanings.
Invention content
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of system and method measuring grating constant.
The above-mentioned purpose of the present invention is achieved by following technical solution：
A kind of system measuring grating constant, including light source, beam-expanding collimation system, Moire fringe imaging system and image
Acquisition system, the detection light that light source is sent out image in Moire fringe imaging system by beam-expanding collimation system and obtain Moire fringe,
The Moire fringe is converted to the striated figure equal with the Moire fringe width, interval through image capturing system acquisition.
Further, the light source is the laser of visible light.
Further, the beam-expanding collimation system is by a focal length and the relatively small lens of diameter and focal length and straight
The relatively large lens composition of diameter.
Further, the Moire fringe imaging system includes two gratings, two imagings successively according to detection light path
Lens and receiving screen for Moire fringe imaging, to receiving screen are a typical 4- since the rear surface of second grating
F optical imaging systems.
Further, described image acquisition system includes computer-controlled CCD industrial cameras.
A method of the measurement grating constant based on above system：The detection light that light source is sent out passes through beam-expanding collimation system
Become a branch of directional light and obtains Moire fringe into the Moire fringe imaging system containing master grating and grating to be measured, the More
Striped is converted to the striated figure equal with the Moire fringe width, interval, the striated figure through image capturing system acquisition
On provision interval be Moire fringe interval D, the grating constant of grating to be measured is calculated according to following formula：
Wherein, D is the interval of Moire fringe, d1、d2The respectively grating constant of master grating and grating to be measured, θ are two panels
Angle between grating.
Advantageous effect：
System and method in through the invention can get the Moire fringe of noise very little；Present system is simple, stablizes
Good, the strong antijamming capability of property, the grating constant precision obtained by the system and method are higher.
Description of the drawings
Fig. 1 is the structural schematic diagram of grating constant measuring system；
Corresponding More's item when Fig. 2 is the master grating that embodiment grating constant is 0.05mm and grating to be measured is in 5/6 degree
Line；
Fig. 3 is the striated figure being equal with interval with Fig. 2 Moire fringes width；
Wherein, 1- laser light sources, 2,3 beam-expanding collimation systems, 4- master gratings, 5- gratings to be measured, 6,8- imaging lens, 7-
Filter aperture, 9- receiving screens.
Specific implementation mode
It is specific with reference to the accompanying drawings and examples to introduce essentiality content of the present invention, but the guarantor of the present invention is not limited with this
Protect range.
A kind of system of measurement grating constant as shown in Figure 1, including the imaging of light source, beam-expanding collimation system, Moire fringe
System and image capturing system, the detection light that light source is sent out image in Moire fringe imaging system by beam-expanding collimation system and obtain
To Moire fringe, which is converted to the item equal with the Moire fringe width, interval through image capturing system acquisition
Line shape figure.Wherein, light source is the visible light (laser of (such as 532nm, 632.8nm, 635nm)；Beam-expanding collimation system is by a coke
Away from the relatively small lens of diameter and a focal length and diameter relatively large lens composition；Moire fringe imaging system according to
It includes two gratings (mutually angled), two imaging lens and the reception for Moire fringe imaging to detect light path successively
Screen to receiving screen is a typical 4-f optical imaging system since the rear surface of second grating.Image capturing system packet
Include computer-controlled CCD industrial cameras.
The embodiment chooses a piece of master grating at an angle to each other for being 5/6 degree and a piece of grating to be measured is tested, wherein
The grating constant of master grating is 0.05mm.Corresponding Moire fringe (as shown in Figure 2) is obtained using the system in Fig. 1, then
Striped is imported into computer by CCD and carries out image procossing, obtains the striped being equal with interval with Moire fringe width
Shape figure (as shown in Figure 3), and then can be read out the interval of Moire fringe by program.Finally, according between Moire fringe
The grating constant of grating to be measured in system is acquired every the relationship (being shown below) with grating constant：
Wherein, D is the interval of Moire fringe, d1、d2The respectively grating constant of master grating and grating to be measured, θ are two panels
Angle between grating.
In the embodiment, the data read by calculation procedure are as follows：
Bright fringes width：2.1153mm；
Dark fringe width：2.5105mm；
Moire fringe interval：4.6258mm；
According to the data and experiment condition of reading, the grating constant for calculating gained grating to be measured is 0.0500006mm.
System and method in through the invention can get the Moire fringe of noise very little；Present system is simple, stablizes
Good, the strong antijamming capability of property, the grating constant precision obtained by the system and method are higher.
The effect of above-described embodiment is specifically to introduce the essentiality content of the present invention, but those skilled in the art should know
Protection scope of the present invention should not be confined to the specific embodiment by road.
Claims (6)
1. a kind of system measuring grating constant, it is characterised in that：Including light source, beam-expanding collimation system, Moire fringe imaging system
System and image capturing system, the detection light that light source is sent out image in Moire fringe imaging system by beam-expanding collimation system and obtain
Moire fringe, the Moire fringe are converted to the striped equal with the Moire fringe width, interval through image capturing system acquisition
Shape figure.
2. system according to claim 1, it is characterised in that：The light source is the laser of visible light.
3. system according to claim 1, it is characterised in that：The beam-expanding collimation system is opposite by a focal length and diameter
Smaller lens and the relatively large lens composition of a focal length and diameter.
4. system according to claim 1, it is characterised in that：The Moire fringe imaging system according to detection light path according to
Secondary includes two gratings, two imaging lens and the receiving screen being imaged for Moire fringe, is opened from the rear surface of second grating
Begin to receiving screen to be a typical 4-f optical imaging system.
5. system according to claim 1, it is characterised in that：Described image acquisition system includes computer-controlled CCD works
Industry camera.
6. a kind of method of the measurement grating constant based on any systems of claim 1-5, it is characterised in that：Light source is sent out
Detection light by beam-expanding collimation system become a branch of directional light into the Moire fringe containing master grating and grating to be measured at
As system obtains Moire fringe, which is converted to through image capturing system acquisition and the Moire fringe width, interval
Equal striated figure, the provision interval on the striated figure are the interval D of Moire fringe, are calculated according to following formula
The grating constant of grating to be measured：
Wherein, D is the interval of Moire fringe, d1、d2The respectively grating constant of master grating and grating to be measured, θ are two sheet grations
Between angle.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109827657A (en) * | 2019-03-12 | 2019-05-31 | 深圳劲嘉集团股份有限公司 | A kind of method and apparatus measuring fresh laser material grating constant |
| CN110132549A (en) * | 2019-05-20 | 2019-08-16 | 中国科学院福建物质结构研究所 | Grid stroke density measuring equipment and its measurement method |
| CN111207908A (en) * | 2018-11-21 | 2020-05-29 | 上海电缆研究所有限公司 | Calibration grating for calibrating optical fiber test instrument and calibration method |
| CN111397845A (en) * | 2020-04-27 | 2020-07-10 | 南京信息工程大学 | Method for judging influence of non-collimated light on Moire measurement result |
| CN112526745A (en) * | 2020-10-28 | 2021-03-19 | 南京信息工程大学 | Optical lens design method based on thermal flow field |
| CN114594278A (en) * | 2022-03-30 | 2022-06-07 | 南京信息工程大学 | Method and system for inverting wind speed based on Moire measurement technology |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111207908A (en) * | 2018-11-21 | 2020-05-29 | 上海电缆研究所有限公司 | Calibration grating for calibrating optical fiber test instrument and calibration method |
| CN111207908B (en) * | 2018-11-21 | 2021-09-21 | 上海电缆研究所有限公司 | Calibration grating for calibrating optical fiber test instrument and calibration method |
| CN109827657A (en) * | 2019-03-12 | 2019-05-31 | 深圳劲嘉集团股份有限公司 | A kind of method and apparatus measuring fresh laser material grating constant |
| CN109827657B (en) * | 2019-03-12 | 2024-03-01 | 深圳劲嘉集团股份有限公司 | Method and device for measuring grating constant of plain laser material |
| CN110132549A (en) * | 2019-05-20 | 2019-08-16 | 中国科学院福建物质结构研究所 | Grid stroke density measuring equipment and its measurement method |
| CN111397845A (en) * | 2020-04-27 | 2020-07-10 | 南京信息工程大学 | Method for judging influence of non-collimated light on Moire measurement result |
| CN112526745A (en) * | 2020-10-28 | 2021-03-19 | 南京信息工程大学 | Optical lens design method based on thermal flow field |
| CN112526745B (en) * | 2020-10-28 | 2022-04-01 | 南京信息工程大学 | Optical lens design method based on thermal flow field |
| CN114594278A (en) * | 2022-03-30 | 2022-06-07 | 南京信息工程大学 | Method and system for inverting wind speed based on Moire measurement technology |
| CN114594278B (en) * | 2022-03-30 | 2023-07-28 | 南京信息工程大学 | Method and system for inverting wind speed based on Moire measurement technology |
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