CN108303239A - A kind of laser optical element service life accelerated test and method for predicting - Google Patents
A kind of laser optical element service life accelerated test and method for predicting Download PDFInfo
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- CN108303239A CN108303239A CN201810052233.4A CN201810052233A CN108303239A CN 108303239 A CN108303239 A CN 108303239A CN 201810052233 A CN201810052233 A CN 201810052233A CN 108303239 A CN108303239 A CN 108303239A
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- 238000005516 engineering process Methods 0.000 description 7
- 208000027418 Wounds and injury Diseases 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 230000001678 irradiating effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
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- 208000033999 Device damage Diseases 0.000 description 1
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G01M11/02—Testing optical properties
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
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- G06F17/10—Complex mathematical operations
- G06F17/18—Complex mathematical operations for evaluating statistical data, e.g. average values, frequency distributions, probability functions, regression analysis
Abstract
The invention discloses a kind of laser optical element service life accelerated test and method for predicting, it is intended to solve the problems, such as that optical elements of large caliber service life under the irradiation of arbitrary flux can not be obtained in the prior art；The present invention includes：To send out the secondary or time as independent variable, the service life probability function obtained under the specific laser parameter of optical elements of large caliber is fitted by dependent variable of corresponding service life probability；The fluence for changing the irradiation laser of setup parameter obtains the optical elements of large caliber service life probability curve under different fluences, and the service life flux function under the specific service life probability of data fitting acquisition is carried out to function；The present invention can carry out accelerated test to laser optical element service life, shorten the testing time, can obtain the optical elements of large caliber service life under specific flux using test result of the present invention, using classical reliability theory in laser system laser optical elements of large caliber carry out fail-safe analysis with it is expected that；The present invention is suitable for large-aperture optical device lifetime testing field.
Description
Technical field
The present invention relates to the life test fields of laser optical element, and in particular to a kind of laser optical element service life
Accelerated test and method for predicting.
Background technology
Under laser especially high power/superlaser effect Laser Induced Damage can occur for laser optical element, existing
One of evaluation index be probability damage threshold value, with reference to first technology 1, ISO 21254 (part1~part4), Lasers and
Laser-related equipment-Test methods for laser-induced damage threshold have correlation
Illustrate, thinks that optical element will not damage under damage threshold；Evaluation index second is that damage growth factor, with reference to
First technology 2, Zhi M.Liao, * B.Raymond, J.Gaylord, R.Fallejo, J.Bude, and P.Wegner, " Damage
modeling and statistical analysis of optics damage pertableance in MJ-class
laser systems”,[J].OPTICS EXPRESS Vol.22,No.23(2014))；Its service life is defined as damage scale
The hair born before the acceptable upper limit is increased to, but this is not appropriate for general optical device；ISO recommend way be
Laser is integrally tested (referring to first technology 3, ISO 17526, Optics and optical instruments-
Lasers and laser-related equipment—Lifetime of lasers).But for huge laser and
Speech, it is also uneconomic that this, which is unrealistic,.
Laser hair/the time or laser that laser optical element can carry under the laser flux less than its damage threshold
Irradiation time is optical element important parameter in addition to optical signature parameter, damaging diagnostic parameter, evaluation laser performance,
It is of great significance in terms of laser system reliability.For a long time, high power laser light is responded due to optical element itself
Otherness so that an evaluation optical element laser damage threshold inherently difficult thing, the laser optical element service life comments
Valence method is even more seldom compared to the test method of other optical element resisting laser damages.
The life test of product usually carries out life test under conditions of use, even general accelerated test, adds
Fast test parameter (such as temperature, current strength etc.) is also can directly or simply improving.If optical element life test
Testing beam diameter is consistent with clear aperture under specific flux in journey, then test result is just consistent with conventional products life test.
But the part due to optical element as laser, it does not improve including the other assemblies such as power supply, amplification medium performance and defeated
Go out higher flux to reach more high-throughput lower optical element life test purpose, this is usually not accomplish.
For damage feature parameter of the accurate testing element under different flux or service life, typically swashing to test
Light carries out shrink beam, and laser flux (energy or power density) is improved by way of reducing irradiated area, therefore, tests a piece of big
The small light spot that bore (clear aperture is much larger than test hot spot bore) element typically uses after focusing is tested.Work as test light
When spot very little, it can compare due to encountering the low region of threshold value comparison or service life relatively low region possibility very little, consistency
It is good, it may appear that be equally distributed illusion.But since optical device is under high throughput, even the region of 10um is damaged
Wound, damage field, which can also increase rapidly, under post laser effect causes so that one piece optical device is scrapped, therefore for big mouth
The test result of the life test of diameter optical element, those probability very littles can not be ignored.If in the large-aperture optical device longevity
It orders and still uses this test method for being uniformly distributed supposed premise in test process, test result just will appear larger inclined
Difference.
In order to allow laser optical element as laser aid unit, swashed using classical reliability theory
The fail-safe analysis of photosystem with, it is expected that patent of the present invention proposes a kind of laser optical element service life accelerated test and in advance
Meter method tests laser optical element using this method, and test result can be filled laser optical element as laser
Unit is set, integrally carry out fail-safe analysis to laser aid using classical reliability theory and, it is expected that can be obtained simultaneously arbitrary
Laser flux irradiates the biometrics of the optical element of optical element.
Invention content
It is an object of the invention to：It is traditional general due to applying mechanically for the test of large-aperture optical device lifetime in the prior art
Test result confidence level, applicability caused by life of product test method be low and the low testing cost height of testing efficiency etc. is asked
Topic, solving traditional large-aperture optical device damage evaluating characteristics parameter (damage threshold or damage growth factor etc.) can not directly answer
The problem of for optical system reliability evaluation and service life of the elements under the irradiation of arbitrary flux can not be obtained, this hair
It is bright to provide a kind of laser optical element service life accelerated test and method for predicting.
The technical solution adopted by the present invention is as follows：
The present invention provides a kind of laser optical element service life accelerated test methods, include the following steps：
Step 1：Laser optical element is irradiated until laser optical element occurs not using the irradiation laser of setup parameter
When reversible damage, record irradiation hair time or irradiation time；To the above-mentioned test of follow-up test point, counted until number of checkpoints meets
Probability distribution；
Step 2：Statistics is less than or equal to the damage in setting laser irradiation hair time or the test point of laser irradiation time respectively
Points calculate laser irradiation hair time or the corresponding service life probability of laser irradiation time；
Laser irradiation hair time or the corresponding service life probability of laser irradiation time are in the step 2：Damage points/total survey
Pilot number；
Step 3：Using laser irradiation hair time or laser irradiation time as independent variable, obtained as dependent variable using corresponding service life probability
Function discrete values curve is obtained, carrying out data fitting to function using Weibull distribution obtains under the specific laser parameter of optical element
Service life probability function；
Specifically, the service life probability function under the specific laser parameter of optical element in the step 3 is：
In formula, it is test sample in specific laser parameter that P, which is service life probability, T of the test sample under specific laser parameter,
Under laser irradiation hair time or laser irradiation time, a, b, γ be wait for that fitting parameter, the scale parameter of a function curves, b are functions
The location parameter of curve.
Step 4：The fluence for changing the irradiation laser of setup parameter repeats under step 1 to the different fluences of 3 acquisitions
Optical element service life probability curve；
Step 5：Using the fluence for irradiating laser as independent variable, corresponds to specific service life probability under laser fluence and correspond to
Irradiation hair time or irradiation time be that dependent variable obtains function discrete values curve, it is quasi- to carry out data to function with exponential function
It closes, obtains the service life flux function under specific service life probability.
Specifically, the service life flux function under the specific service life probability in the step 5 is：
T (H)=exp (- pH+q)
In formula, T is the test sample hair under specific laser parameter time or time, H are laser fluence degree, and p, q are
Wait for fitting parameter.
The present invention also provides a kind of laser optical element service life method for predicting, include the following steps：
Step 1：Obtain the service life flux function under specific service life probability；
Step 2：Laser flux to be expected is substituted into service life flux function, obtains and waits for estimated laser flux and specific service life
Service life intended result under probability；
Step 3：In the case of not specified life probability, the maximum life probability and minimum life under specific flux are calculated
The probability corresponding service life obtains the service life range prediction result under specific flux.
In conclusion by adopting the above-described technical solution, the beneficial effects of the invention are as follows：
1. service life hair time of the invention or time rather than the damage threshold under limited laser pulse or time effect or damage increasing
The long factor, test result more meet laser aid actual use demand, and what test result may be directly applied to optical system can
By property analyze, and can to the optical element service life under arbitrary flux carry out, it is expected that and testing efficiency it is higher, economic cost
It is relatively low；
2. the present invention can carry out accelerated test to laser optical element service life, testing cost is reduced, test is shortened
Time；
3. the test method of the present invention is relatively simpler, it is combined acquisition with theoretical using many experiments, not merely
Theory deduction, have higher accuracy and wide applicability；
4. proposing the laser irradiation that large-caliber laser optical device is much smaller than clear aperture in test hot spot in the present invention
Under, probability distribution is presented in life test result, overcomes the prior art and thinks that large-aperture optical device is far small in test hot spot
Under the same laser parameter laser irradiation of clear aperture, the technology prejudice that life test result is evenly distributed, relative to
Existing equally distributed calculation result has higher confidence level and practicability；
5. proposing large-caliber laser optical device in the present invention under specific service life probability, the service life exponentially declines with flux
Subtract, overcomes the prior art and think the large-caliber laser optical device service life technology prejudice unrelated with service life probability.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.Attached drawing does not press actual size equal proportion scaling deliberately and draws attached drawing, it is preferred that emphasis is shows the master of the present invention
Purport.
Fig. 1 is the flow chart of service life accelerated test method of the invention；
Fig. 2 is the schematic diagram of service life accelerated test system of the invention；
Reference numeral：
1- laser light sources；2- light beam polarization control modules；3- energy control modules；4- laser parameter diagnostic modules；5- is poly-
Burnt module；6- counters；7- optical element test samples；8- damages diagnostic module；9- displacement supplementary modules；10- off-energies
Interlock；11- computer control modules；12- energy absorbing devices.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
The every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
The present invention provides a kind of laser optical element service life accelerated test methods, include the following steps：
Step 1：Laser optical element is irradiated until laser optical element occurs not using the irradiation laser of setup parameter
When reversible damage, record irradiation hair time or irradiation time；To the above-mentioned test of follow-up test point, counted until number of checkpoints meets
Probability distribution；
Step 2：Statistics is less than or equal to the damage in setting laser irradiation hair time or the test point of laser irradiation time respectively
Points calculate laser irradiation hair time or the corresponding service life probability of laser irradiation time；
Laser irradiation hair time or the corresponding service life probability of laser irradiation time are in the step 2：Damage points/total survey
Pilot number；
Step 3：Using laser irradiation hair time or laser irradiation time as independent variable, obtained as dependent variable using corresponding service life probability
Function discrete values curve is obtained, carrying out data fitting to function using Weibull distribution obtains under the specific laser parameter of optical element
Service life probability function；
Step 4：The fluence for changing the irradiation laser of setup parameter repeats under step 1 to the different fluences of 3 acquisitions
Optical element service life probability curve；
Step 5：Using the fluence for irradiating laser as independent variable, corresponds to specific service life probability under laser fluence and correspond to
Irradiation hair time or irradiation time be that dependent variable obtains function discrete values curve, it is quasi- to carry out data to function with exponential function
It closes, obtains the service life flux function under specific service life probability；
Specifically, the step 3-5 is specially：
It is theoretical (General Extreme Value Theory) according to generalized extreme value, when amount of test data is sufficiently large,
No matter why the service life probability distribution of test point is distributed, minimum value (formula (1), (2)), maximum value (formula (3), (4)) probability
It is distributed as generalized extreme value distribution.
Tmin=min { τ1,....τn} (1)
P(Tmin)=P (min { τ1,....τn} >=x)=g (x) (2)
Pmax=max { τ1,....τn} (3)
P(Tmax)=P (max { τ1,....τn}≤x) (4)
=P (τ1≤x,τ2≤x,...,τn≤ x)=Fn(x)=G (x)
According to generalized extreme value theory, shown in the relationship such as formula (5) of g (x) and G (x).
G (ax-b)=1-G (- x) (5)
The form of G (x) has and only following three kinds of forms (formula (6))：
According to the resisting laser damage characteristic of laser optical element, when laser intensity reaches certain power density or flux of energy
When, optical element necessarily damages, and therefore, probability distribution takes g3(x) and G3(x).During actual test, optical element
Under fixed laser parameter laser action, damaged under specific hair time, therefore, the probability of statistics can be indicated by formula (4),
Therefore laser optical element service life probability distribution is G3(x), x=(T-b)/a；
I.e. obtain the specific laser parameter of optical element under service life probability function be：
In formula, it is test sample in specific laser parameter that P, which is service life probability, T of the test sample under specific laser parameter,
Under laser irradiation hair time or laser irradiation time, a, b, γ be wait for that fitting parameter, the scale parameter of a function curves, b are functions
The location parameter of curve；
The damage probability caused by laser flux under single print single-shot time can be indicated by formula (7), formula (8).
Pdamage(H)=P (min { H1,H2,...,Hn} >=H)=1-G (- AH-B) (7)
Pnon-damage(H)=1-Pdamage(H)=G (- AH-B) (8)
Then, the multiple time lower damage probability such as formula (9) of single print, formula (10) are shown.
Pdamage-N(H)=P (min { H1-N,H2-N,...,Hn-N} >=H)=1-G (- aH-b) (9)
Therefore shown in the laser optical element service life such as formula (11) under different flux；
When 0<H<2a-b and 0<H<When 2A-B, T (H) is unfolded：
When ignoring high-order term, the laser optical element service life under the specific service life (Γ is definite value) with flux variation such as formula
(13) shown in.
T(H)≈exp(-pH+q) (13)
In formula, T (H) is the service life under specific service life probability, and H is laser flux (energy density), and p, q are to wait for fitting ginseng
Number；
In specific service life probability under service life flux function be：
T (H)=exp (- pH+q)
In formula, T is the test sample hair under specific laser parameter time or time, H are laser fluence degree, and p, q are
Wait for fitting parameter, wherein a, A is the scale parameter of function curve, and b, B are the location parameters of function curve, and γ is form parameter；
The present invention also provides a kind of laser optical element service life method for predicting, include the following steps：
Step 1：Obtain the service life flux function under specific service life probability；
Step 2：Laser flux to be expected is substituted into service life flux function, obtains and waits for estimated laser flux and specific service life
Service life intended result under probability；
Step 3：In the case of not specified life probability, the maximum life probability and minimum life under specific flux are calculated
The probability corresponding service life obtains the service life range prediction result under specific flux.
Embodiment one
The schematic diagram refer to the attached drawing 2 of service life accelerated test system in the present invention, including laser light source 1 handle transmitting module
With optical element test sample 7, counter 6, damage diagnostic module 8, displacement supplementary module 9, damage energy interlock 10, energy
Control module 3, computer control module 11 and energy absorbing device 12 are measured, the setting of optical element test sample 7 is assisted in displacement
In module 9；Displacement supplementary module 9 is adjusted the position of optical element test sample 7；
Laser light source 1 handles transmitting module, emits the laser of specific laser parameter for irradiating optics element test sample
7；
Diagnostic module 8 is damaged, the degree of injury of detection optical element test sample 7 detects optical element test sample 7
Occur to send out damage signal when irreversible damage；
Energy interlock 10 is damaged, the damage signal transmitted by damage diagnostic module 8 is received and sends out trigger signal；
Energy control module 3 receives the trigger signal that damage energy interlock 10 is sent and closes the processing of laser light source 1
Transmitting module；
Counter 6 receives the trigger signal transmitted by damage energy interlock 10 and stops counting；
Computer control module 11, light irradiation hair time or laser irradiation time transmitted by count pick up device 6 simultaneously export the longevity
Order testing result.
Specifically, laser light source processing transmitting module includes that laser light source 1, light beam polarization control module 2, laser parameter are examined
Disconnected module 4 and focus module 5；
Laser light source 1 emits laser；
Light beam polarization control module 2, the polarization state for the laser that adjustment laser light source 1 is emitted；
Energy control module 3 receives laser after the adjustment that light beam polarization control module 2 is exported；
Laser parameter diagnostic module 4 receives the laser that energy control module 3 controls output；
Focus module 5 receives laser parameter diagnostic module 4 and diagnoses the laser after output and focus output irradiation optics member
In part test sample 7.
Specifically, further include being filled for absorbing the energy absorption of the remaining laser after irradiating optics element test sample 7
Set 12.
On the basis of test principle figure, the service life accelerated test method of the present embodiment is carried out specifically
It is bright：
Step 1：Handle to obtain the laser that laser parameter meets testing requirement, and profit using laser light source processing transmitting module
Continuously optical element test sample 7 is irradiated until irreversible damage occurs for the test point of optical element test sample 7 with the laser
When wound, damage diagnostic module 8 can detect the damage of optical element test sample 7, and damage energy interlock 10 triggers,
Energy control module 3 control cut-out laser, counter 6 stop count, counter 6 at this time by the laser being recorded irradiation hair time or
Laser irradiation time is sent to computer control module 11；
Step 2：After first point has acquired, displacement supplementary module 9 is automatically moved to optical element test sample 7
Next test point then proceedes to repeat step 1, can acquire the laser that the second test point reaches irreversible damage at this time
Irradiation hair time or laser irradiation time, then proceed to retest third point, until the point of test meets statistical probability distribution,
Complete test；
Step 3：Statistics is less than or equal to the number of setting laser irradiation hair time or the impaired loci of laser irradiation time, calculates
Damage probability (service life probability namely referred to herein) under setting laser irradiation hair time or laser irradiation time；It is described
Laser irradiation hair time or the corresponding service life probability of laser irradiation time are in step 3：Damage points/total number of test points；
Further step 1-3 is illustrated：Such as with specific laser parameter (such as laser flux 10J/cm2) right
Optical element test sample 7 has carried out the test of 100 sample spots, and each of test point is since internal diversity is in laser flux
10J/cm2Irradiation under degree of injury it is not necessarily consistent, but can irradiate until each point irreversible damage occurs
Until, this hour counter can record the irradiation of laser when each putting irreversible damage hair time or laser irradiation time, for example set
Surely setting laser irradiation hair time be 1, then by count in 100 points send out time for 1 just occur irreversible damage point how many, system
Meter out has 1, then it is 1/100=1% that we, which obtain laser irradiation hair time as 1 service life probability, then counts laser again
The point that irradiation hair time is 2 obtains the service life probability that irradiation hair time is 2, and so on；Finally secondary for abscissa to send out, the service life is general
Rate is that ordinate carries out Function Fitting, obtains Weibull distribution；
Step 4：Using laser irradiation hair time or laser irradiation time as independent variable, the corresponding service life probability of each independent variable
Function drafting function discrete values curve reuses Weibull distribution and carries out data to function to be fitted to obtain service life probability function quasi-
Close formula；
Specifically, step 4 is：
It is theoretical (General Extreme Value Theory) according to generalized extreme value, when amount of test data is sufficiently large,
No matter why the service life probability distribution of test point is distributed, minimum value (formula (1), (2)), maximum value (formula (3), (4)) probability
It is distributed as generalized extreme value distribution；
Tmin=min { τ1,....τn} (1)
P(Tmin)=P (min { τ1,....τn} >=x)=g (x) (2)
Pmax=max { τ1,....τn} (3)
According to generalized extreme value theory, shown in the relationship such as formula (5) of g (x) and G (x).
G (ax-b)=1-G (- x) (5)
The form of G (x) has and only following three kinds of forms (formula (6))：
According to the resisting laser damage characteristic of laser optical element, when laser intensity reaches certain power density or flux,
Optical element necessarily damages, and therefore, probability distribution takes g3(x) and G3(x), during because of actual test, optical element is solid
Determine under laser parameter laser action, is damaged under specific hair/time, therefore, the probability of statistics can be by formula (4) table
Show, therefore laser optical element service life probability distribution is G3(x), x=(T-b)/a, and then obtain service life probability function fitting formula
For：
P is service life probability of the optical element test sample under specific laser parameter；T is that optical element test sample is being set
Determine laser irradiation hair time or the laser irradiation time under laser parameter, a, b, γ are to wait for that fitting parameter, a are the scales of function curve
Parameter, b are the location parameters of function curve；
The damage probability caused by laser flux under single print single-shot time can be indicated by formula (7), formula (8)；
Pdamage(H)=P (min { H1,H2,...,Hn} >=H)=1-G (- AH-B) (7)
Pnon-damage(H)=1-Pdamage(H)=G (- AH-B) (8)
Then, the multiple time lower damage probability such as formula (9) of single print, formula (10) are shown.
Pdamage-N(H)=P (min { H1-N,H2-N,...,Hn-N} >=H)=1-G (- aH-b) (9)
Therefore shown in the laser optical element service life such as formula (11) under different flux.
When 0<H<2a-b and 0<H<When 2A-B, T (H) is unfolded：
When ignoring high-order term, the laser optical element service life under the specific service life (Γ is definite value) with flux variation such as formula
(13) shown in.
T(H)≈exp(-pH+q) (13)
In formula, T (H) is the service life under specific service life probability, and H is laser flux (energy density), and p, q are to wait for fitting ginseng
Number；
Wherein it should be noted that：
A, A is the scale parameter of function curve, and b, B are the location parameters of function curve, and γ is form parameter；
Embodiment two
On the basis of embodiment one, the service life flux function under specific service life probability is obtained；
Laser flux to be expected is substituted into service life flux function, obtains and waits under estimated laser flux and specific service life probability
Service life intended result；
In the case of not specified life probability, the maximum life probability and minimum life probability pair under specific flux are calculated
The service life answered obtains the service life range prediction result under specific flux.
The service life hair time of the present invention or time rather than the damage threshold under limited laser pulse or time effect or damage increasing
The long factor, test result more meet laser aid actual use demand, and what test result may be directly applied to optical system can
By property analyze, and can to the optical element service life under arbitrary flux carry out, it is expected that and testing efficiency it is higher, economic cost
It is relatively low.
T wherein in above-described embodiment is the laser irradiation for referring to optical element test sample in the case where setting laser parameter
Hair time or laser irradiation time in other words, independent variable can be that laser irradiation hair namely refers to the tired of laser hair subpulse
Product number and the radiation exposed number of optical element；Independent variable can also be laser irradiation time i.e. laser to the test point
Irradiation time, laser irradiation hair time or laser irradiation time are write a Chinese character in simplified form into hair/time by part wherein in the above；
What the connection relation wherein in attached drawing represented may be indirect connection relation, not necessarily refer to mechanically
Or electrically direct connection relational, specifically it should understand mutual relationship with the content of word；
The form of wherein above-mentioned 7 generally use test sample of optical element test sample is tested；
Wherein above-mentioned optical element is mainly the optical element for referring to laser class, and optical element is tested with optical element
Sample 7 belongs to equivalents to a certain extent, above-mentioned not do stringent differentiation；
What the laser under wherein above-mentioned setting laser parameter was primarily referred to as be satisfactory laser, but it is specific what
It is required that the data according to actual needs are determined.
The structure of wherein above-mentioned test system is not limited in the present embodiment cited, and those skilled in the art use
Equivalent replacement etc. realizes the present invention, it should also within the scope of the present invention.
Wherein above-mentioned test point is the different location region of same print, in order to avoid test laser damages
The Laser Induced Damage test of wound, optical device (materials such as fused quartz material, K9 materials, crystal, neodymium glass) is typically shrink beam
Test, that is, the area tested can be far smaller than the clear aperture of optical device, so needing to test multiple regions or sampling
Multiple regions represent full wafer optical device by these regions, these regions are all on same optical device.
The ability of the resisting laser damage of optical device is according to theoretical and actual test result, when the hot spot very little of test
And when testing enough number of, the relationship of flux and damage probability is Wei Buer distributions, i.e., in a lower flux
Under test many regions, may only have one or two region bad, therefore, if it is desirable to test to 100% damage, it is necessary to
By the test hot spot of laser beam shrink beam to very little, the area that just will produce test zone above is far smaller than showing for clear aperture
As.
Wherein above-mentioned test point should at least meet probability distribution, according to generalized extreme value theory, enough test sections
Domain could be analyzed using generalized extreme value theory, it is therefore desirable to which enough test points, more test points, then each hair is secondary
Corresponding service life probability is more accurate, and service life probability curve confidence level is higher；
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Belong to those skilled in the art in the technical scope disclosed by the present invention, the change or replacement that can be readily occurred in all are answered
It is included within the scope of the present invention.
Claims (5)
1. a kind of laser optical element service life accelerated test method, which is characterized in that include the following steps：
Step 1：Optical element is irradiated until irreversible damage occurs for laser optical element using the irradiation laser of setup parameter
When, secondary or irradiation time is sent out in record irradiation, and above-mentioned test is carried out to the follow-up test point of optical element, until number of checkpoints is full
Sufficient statistical probability distribution；
Step 2：Statistics is less than or equal to the damage points in setting laser irradiation hair time or the test point of laser irradiation time respectively,
Calculate laser irradiation hair time or the corresponding service life probability of laser irradiation time；
Step 3：Using laser irradiation hair time or laser irradiation time as independent variable, letter is obtained by dependent variable of corresponding service life probability
Number discrete values curve carries out function using Weibull distribution the longevity under the data fitting acquisition specific laser parameter of optical element
Order probability function；
Step 4：The fluence for changing the irradiation laser of setup parameter repeats the light under step 1 to the different fluences of 3 acquisitions
Learn component life probability curve；
Step 5：To irradiate the fluence of laser as independent variable, the corresponding spoke of specific service life probability under corresponding laser fluence
Secondary or irradiation time approved for distribution is that dependent variable obtains function discrete values curve, carries out data fitting to function with exponential function, obtains
Obtain the service life flux function under specific service life probability.
2. a kind of laser optical element service life accelerated test method as described in claim 1, which is characterized in that the step
Laser irradiation hair time or the corresponding service life probability of laser irradiation time are in rapid 2：Damage points/total number of test points.
3. a kind of laser optical element service life accelerated test method as described in claim 1, which is characterized in that the step
The service life probability function under the specific laser parameter of optical element in rapid 3 is：
In formula, it is test sample under specific laser parameter that P, which is service life probability, T of the test sample under specific laser parameter,
Laser irradiation hair time or laser irradiation time, a, b, γ are to wait for that fitting parameter, the scale parameter of a function curves, b are function curves
Location parameter.
4. a kind of laser optical element service life accelerated test method as claimed in claim 3, which is characterized in that the step
The service life flux function under specific service life probability in rapid 5 is：
T (H)=exp (- pH+q)
In formula, T is the test sample hair under specific laser parameter time or time, H are laser fluence degree, and p, q are to wait intending
Close parameter.
5. a kind of laser optical element service life method for predicting, which is characterized in that include the following steps：
Step 1：Obtain the service life flux function under specific service life probability；
Step 2：Laser flux to be expected is substituted into service life flux function, obtains and waits for estimated laser flux and specific service life probability
Under service life intended result；
Step 3：In the case of not specified life probability, the maximum life probability and minimum life probability under specific flux are calculated
The corresponding service life obtains the service life range prediction result under specific flux.
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