CN108296230A - Large-dynamic-range laser cleaning method - Google Patents
Large-dynamic-range laser cleaning method Download PDFInfo
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- CN108296230A CN108296230A CN201810131845.2A CN201810131845A CN108296230A CN 108296230 A CN108296230 A CN 108296230A CN 201810131845 A CN201810131845 A CN 201810131845A CN 108296230 A CN108296230 A CN 108296230A
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- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000004140 cleaning Methods 0.000 title claims abstract description 25
- 238000007493 shaping process Methods 0.000 claims abstract description 45
- 238000012937 correction Methods 0.000 claims abstract description 15
- 230000008569 process Effects 0.000 claims abstract description 12
- 230000004075 alteration Effects 0.000 claims abstract description 9
- 230000033228 biological regulation Effects 0.000 claims abstract description 7
- 238000001514 detection method Methods 0.000 claims abstract description 7
- 238000000926 separation method Methods 0.000 claims abstract description 6
- 230000009466 transformation Effects 0.000 claims abstract description 5
- 238000013461 design Methods 0.000 claims description 12
- 238000009826 distribution Methods 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 8
- 238000005070 sampling Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 241001270131 Agaricus moelleri Species 0.000 claims description 3
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- 238000002407 reforming Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000011160 research Methods 0.000 description 17
- 238000005516 engineering process Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 4
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Cleaning In General (AREA)
- Lasers (AREA)
Abstract
The invention provides a dynamic range laser cleaning method, which comprises the following steps: shaping the axial light beam by adopting a phase precompensation axial convergent light beam aberration separation mode to ensure that the light beam keeps in a convergent state within a distance of ten meters; the beam energy based on the refraction and diffraction beam transformation is spatially regulated in an error correction beam energy spatial regulation mode, the beam is shaped into a flat square and is uniformly distributed, and the beam energy is uniformly distributed in the cleaning process; shaping detection and parameter correction are carried out on the light beam, discretization is carried out on the phase modulation data, light beam parameters are obtained through a shaping-convergence test, and iterative adjustment is carried out on the light beam parameters according to the output of the shaped light beam.
Description
Technical field
The invention belongs to laser cleaning fields, are related to a kind of dynamic range laser cleaning method.This method is to irregularly rising
Laser beam converged position caused by volt deviates and cleaning quality decline is improved, and the present invention proposes Diode laser light beam space
Regulate and control shaping technique, realize laser assemble range extend and spatial distribution stablize, simplify equipment configuration, improve efficiency and reduce at
This.
Background technology
There is a kind of new type light source in the 1960s, has that good monochromaticjty, good directionality, coherence is good, energy is concentrated
The features such as.Femtosecond Optical Pulses refer to the duration be 10-12s-10-15The laser pulse of s, this laser pulse have high peak
The characteristics of value power, very wide spectral width and extremely short laser emission time.When femtosecond laser is unique ultrashort lasting with its
Between and superpower peak power started material it is hyperfine, it is low damage and space three-dimensional working process frontier, and application get over
Come wider.According to the ultrashort and superpower feature of femtosecond laser, Applied research fields can be generally divided into ultrafast transient phenomenon
Research and superpower phenomenon research.They are all continuous with the shortening of laser pulse width and the increase of pulse energy
It is able to deeply and develops.The most direct application of femtosecond pulse is that people use it as light source, forms a variety of time resolutions
Spectral technique and pumping/Detection Techniques.Its development directly drive physics, chemistry, biology, material and information science research into
Enter microcosmic ultrafast process field, and started some completely new research fields, such as femtochemistry, is partly led at Quantum control chemistry
Body coherent swpectrum etc..The combination of femtosecond pulse and nanometer microscopy allows people to study the nanostructure of semiconductor
Carrier dynamics in (quantum wire, quantum dot and nanocrystal).In terms of biology, people are utilizing femtosecond laser skill
Molecular dynamics that art is provided, pumping/Detection Techniques, study the biography energy of photosynthesis reaction center, turn can and charge
Separation process.In terms of ultra-short pulse laser is also applied to the transmission, processing and storage of information.
The successful operating for the desk-top terawatt (TW) laser that First is realized using chirped pulse amplification technique starts from 1988, this
Achievement indicates that femtosecond is superpower and the beginning of the strong optical physics research of superelevation in laboratory.In this area research, due to super
The effect of short laser field has been equivalent to or has substantially exceeded the constraint field that electron institute in atom is subject to, and perturbation theory is untenable,
New theoretical treatment is up for development.Under the light intensity of 1020W/cm2, the research of simulation Astronomical Phenomena may be implemented.
The thermoelectron that the superelevation light laser of 1019-1021W/ cm2 generates（200KeV）.Another important application of femtosecond laser is just
It is micro- retrofit.In general, by for laser pulse standard, the duration is more than 10 picoseconds（It is equivalent to heat conduction time）Swash
Light pulse belongs to long pulse, with it come rapidoprint, since fuel factor makes adjacent material change, to influence processing essence
Degree.And pulse width only has the femto-second laser pulse of thousands of part per trillion seconds then to possess unique material processing characteristics, such as adds
The melting zone very little in work aperture does not have；Multiple material may be implemented, such as even life inside metal, semiconductor, transparent material
The micromachined of object tissue etc., engraving；Machining area can be less than focal dimension, break through diffraction limit etc..Some automobiles
Just research is processing better engine nozzle with femtosecond laser at present for manufactory and jumbo processing factory.Use ultrashort pulse
Laser can get hundreds of nanometers of wide apertures on metal.On being most bordering on the Optical Society of America's meeting held Orlando,
The Hai Te of IBM Corporation says that IBM is by a kind of fs-laser system in the photoetching process of large scale integrated chip.With
Femtosecond laser is cut, and is transmitted almost without heat.U.S.'s Lao Lunsi livermore national laboratories it was discovered by researchers that
This laser beam can safely cut high explosive.The Loews gram in the laboratory is said：" femtosecond laser holds promise as a kind of cold place
Science and engineering has, for removing retired rocket, cannon bomb and other weapons.”
Femtosecond laser can be used to cut frangible polymer, without changing its important biochemical characteristic.Biomedical expert
Using it as ultraprecise surgical knife, it is used for vision correcting surgery, can be reduced after tissue damage will not leave behind operation again
Disease is lost, or even can individual cells be moved with delicate surgery or be used for gene therapy.How people also swash femtosecond in research at present
Light is used for dental treatment.There is scientist's discovery, a fritter of tooth can be removed using ultra-short pulse laser, without the object around influencing
Matter.The UMW series ultrafast laser micro Process workbench that Clark-MXR companies of the U.S. release recently exactly represents in this field
The commercial femtosecond laser parallel micromachining system of forefront, it include with ultra-short pulse laser carry out micro Process needed for all facilities
With accessory, it can be used for micro Process any material, generating sub-micron fine structure will not without being damaged to periphery material
Material is caused to splash, processing result is extremely accurate and has high performance reproducibility.
The direct purposes of femtosecond pulse is exactly time-resolved spectroscopy.Physics, chemistry and biology are observed with femtosecond pulse
Equal ultrafast process, femtosecond pulse can make the light source of confocal microscope, to make the three-dimensional image of biological sample.Make light with femtosecond pulse
The three of optical coherence tomography (optical coherence tomography, abbreviation OCT) the observable active somatic cell in source
Image is tieed up, is not the time response using femtosecond pulse at this time, but utilizes the wide spectrum of femtosecond light source, it is similar white to generate
The interference of light, the reflection of the phonon excited in the semiconductors using femtosecond pulse can be used to measure the thickness of semiconductive thin film in real time
Degree, to monitor the growth of semiconductive thin film, makees micro machining with femtosecond pulse, and punched hole is smooth without burr, because
Femtosecond pulse does not melt re-evaporation first by fuel factor, directly evaporates material by high field, femtosecond pulse is used as optic communication
Existing communication speed can be improved hundred times by light source, and femtosecond pulse and the Plasma Interaction of high-energy can produce
Raw higher hamonic wave and X-ray, and it is possibly used for controlled nuclear fusion, the tera hertz that people's also trial is generated with femtosecond pulse
Radiation, to detect the packaging quality of integrated circuit or even the fat content of meat product.In short, there are many application of femtosecond pulse.
With femtosecond pulse laser it is further development and it is perfect, one surely hews out more application prospects.It is worth
It is noted that whenever research and development to certain phase, just there is a group of people to be separated from research group in the researcher of various countries,
Achievement in research is converted into product, certain original laser company, which also notes that, absorbs new achievement in research.
In terms of national science and technology strategy, the way in the U.S. is to support several key universities and National Laboratory, such as Mi Xi
The ultra-fast optical center of root university, the Strong-field physics laboratory in University of California San Diego branch school, Lao Lunsi-profit object not laboratory
Deng.It is Japanese then be in the form of large-scale " production (industry) official (government office, i.e. National Laboratory) learns (university) " the research invention of Ministry of International Trade and Industry,
Started so-called " femtosecond technical plan " in 1996, concentrated Japanese almost all of famous big company, National Laboratory and
University has also pulled on the AT＆T Labs in the U.S., carries out the research of femtosecond pulse technology, target is in billion bit high-speed communication
Technical aspect is come out top.
In femtosecond laser manufacturing field, beam Propagation is positioned to the accuracy of manufacture and its important, domestic Xi'an ray machine institute of quality
Spatial beam flexible transfer technology is used, develops the laser fabrication technology and equipment of large format complex pattern, but manufacture effect
Rate and stability are insufficient；The great development ultrafast laser process unit of metal surface superfine texture is handed in Xi'an, but efficiently and practical
Property has to be hoisted；Dalian University of Science ＆ Engineering can only realize the picture on surface system of small size component using laser, trim Combined Machining Technology
It makes；510, which dominate domestic spacecraft, consolidates the manufacture of surface antenna reflector laser, but can only rely on Russian laser manufacture dress at present
It is standby（It is expensive, nearly 10,000,000）With Xi'an ray machine institute engineering prototype, and process breadth, stability, efficiency do not reach requirement；
For the technology and equipment of engine turbine Part Mark, domestic complete blank.
Background technology
Dynamic range laser cleaning method mainly uses four subsystems.Position mutually pre-compensates for axial convergent beam aberration point
From technology, error correction beam energy space control technique, beam shaping detection and parameter correction technique, Diode laser light beam space
Regulate and control shaping technique.
Wherein, it is to measure micro-structure shaping element because of photo-thermal effect that position, which mutually pre-compensates for axial convergent beam aberration isolation technics,
Axial convergent beam is carried out aberration separation, regulation and control input-by caused output wavefront distortion according to the defeated conservation of energy of laser
Amplitude, position phase parameter are exported, segmentation shaping element position phase keeps Diode laser range inner light beam converged state.
Error correction beam energy space control technique is：According to the design of micro-structure shaping element and error to output intensity
The influence of distribution, reaches Fast Convergent by error correction, and iterative rate is mutually arranged according to position, and discrete force is carried out to multi-component-level phase
Closely so that square focus spot is uniformly distributed.
Beam shaping is detected with parameter correction technique：According to can poly- shaping light path measure shaping anteroposterior position phase data with
Beam parameters change, the relationship for exporting to obtain it with design parameters by the shaping measured, establish space output intensity distribution and adopt
The restriction model of number of samples, input and output face area, spacing.
Diode laser light beam space regulates and controls shaping technique：By being inputted to laser light field, the regulation and control of output parameter, position phase point
It cuts and is mutually pre-compensated for position, to light beam Diode laser phase compensation under the conservation of energy, pass through the laser square space light after error correction
The modulation being distributed by force and Diffraction Transformation so that light beam after focusing is rectangular to be uniformly distributed, and is built based on liquid crystal spatial light modulation
Light path examines the light beam for simulating obtained shaping position phase data, establishes space output intensity distribution and sampling number, input
The restriction model of output face area, spacing corrects sampling number, input and output face area, spacing, uniformly divides so as to adjust rectangular
The focal beam spot of cloth.
For those skilled in the art, above-described embodiment is merely a preferred embodiment of the present invention, and should not be understood as to this hair
The limitation of bright the scope of the claims, under the premise of not departing from the design of the present invention, several improvement for making substitute and belong to this hair
Bright protection domain.
Invention content
The random fluctuation of component surface can cause laser beam converged position to deviate and cleaning quality decline.The present invention carries
Going out Diode laser light beam space regulation and control shaping technique, range of realization laser assembling extends and spatial distribution is stablized, simplified equipment configuration,
It improves efficiency and reduces cost.
（1）Position mutually pre-compensates for axial convergent beam aberration isolation technics
Depth of focus is short when conventional beam is assembled, near focal point variation is violent, when cleaning complicated face shape component to mechanical arm response speed,
Positioning accuracy, structural stability propose very high requirement.To ensure cleaning performance consistency and uniformity, need to study axial light
Beam shaping technique is realized in over long distances and keeps light beam converged state, meets a wide range of dynamic cleaning requirement.
Analysis micro-structure shaping element exports wavefront distortion caused by photo-thermal effect, introduces position and mutually pre-compensates for mechanism, ties
The defeated law of conservation of energy of laser is closed, axial convergent beam aberration isolation technics is studied, realizes laser input-output amplitude, position
Equal parameter accuracy controlling is mutually divided with shaping element position, keeps Diode laser range inner light beam converged state.
（2）Error correction beam energy space control technique
Traditional small light spot Gaussian beam scanning cleaning way efficiency is low, lack of homogeneity, it is therefore desirable to which research is based on folding, diffracted beam
Laser beam shaping is uniformly distributed for flat-top is rectangular, increases single cleaning area by the beam energy space control technique of transformation,
Improve cleaning uniformity.
The influence being distributed by force is studied, in conjunction with error correction and Fast Convergent technology, Phase design algorithm is improved using ST and carries
High iterative search efficiency realizes multi-component-level phase discrete approximation, to realize the rectangular hot spot that is uniformly distributed of high-diffraction efficiency flat-top
Light beam pulse energy space shaping modulation effect.
（3）Beam shaping detects and parameter correction technique
Spatial transmission Data Discretization and shaping element design and produce precision and determine spatial beam shaping effect, it is therefore necessary to open
Shaping-convergence experimental study is opened up, beam shaping reality output effect is investigated, the amendment that iterates is to achieve the desired results.
The poly- shaping light path of design meeting, hot spot position phase data changes with Beam parameters before and after experimental analysis shaping；Research
The relationship of shaping output and design parameters establishes space output intensity distribution and design parameters (such as：Sampling number, input and output
Size, spacing etc.) feedback restrict model, repeatedly correct each design parameters, make the more approximation theory board design of output result
As a result.
（4）Diode laser light beam space regulates and controls shaping technique
Conventional laser cleaning can cause light beam converged position to deviate because of component surface random fluctuation etc. to be reduced with cleaning quality.Though
Servo System Based can so be introduced to solve, but the problems such as system complex, technology are cumbersome, with high costs can be caused.The present invention
It studies Diode laser light beam space and regulates and controls shaping technique, while it is empty with spot intensity to realize that square beam of light shaping, convergence section are extended
Between profile keep, reach Larger Dynamic range laser cleaning purpose.
Claims (6)
1. a kind of dynamic range laser cleaning method, includes the following steps：
In such a way that position mutually pre-compensates for the separation of axial convergent beam aberration, to axial pencil shaping so that light beam ten meters away from
It is in convergence state from interior holding light beam；
In such a way that error correction beam energy space regulates and controls, the beam energy based on folding, diffracted beam transformation is carried out empty
Between regulate and control, be that flat-top is rectangular is uniformly distributed by beam shaping, keep beam energy to be evenly distributed in cleaning process；
Shaping detection and parameter amendment are carried out to light beam, contraposition phase modulation data carries out discretization, tested by shaping-convergence
To light beam parameters, according to the output after beam shaping, adjustment is iterated to light beam parameters.
2. dynamic range laser cleaning method according to claim 1 uses Diode laser light beam space in reforming process
Regulate and control apparatus for shaping to beam shaping, wherein input parameter depth of focus length is not less than 10mm, and optical power detection root mean square is little
In 15%.
3. dynamic range laser cleaning method according to claim 1, Diode laser light beam space regulates and controls apparatus for shaping
By being inputted to laser light field, the regulation and control of output parameter, position mutually divide and mutually pre-compensated for position, to light beam Diode laser under the conservation of energy
Phase compensation, the modulation by the laser square space light distribution after error correction and Diffraction Transformation so that the light after focusing
Beam is rectangular to be uniformly distributed；
The light path based on liquid crystal spatial light modulation is built, the light beam for simulating obtained shaping position phase data is examined, is established empty
Between output intensity distribution with sampling number, input and output face area, spacing restriction model, correct sampling number, input and output
Face area, spacing, so as to adjust rectangular equally distributed focal beam spot.
4. dynamic range laser cleaning method according to claim 1, position mutually pre-compensates for axial convergent beam aberration separation
Step is：It measures micro-structure shaping element and exports wavefront distortion caused by photo-thermal effect, it, will according to the defeated conservation of energy of laser
Axial convergent beam carries out aberration separation, regulation and control input-output amplitude, position phase parameter, and segmentation shaping element position phase keeps focal length
Deep range inner light beam converged state.
5. dynamic range laser cleaning method according to claim 1, error correction beam energy space regulation and control step are：
According to the influence that the design of micro-structure shaping element and error are distributed output intensity, Fast Convergent, root are reached by error correction
Iterative rate is mutually set according to position, discrete approximation is carried out to multi-component-level phase so that square focus spot is uniformly distributed.
6. dynamic range laser cleaning method according to claim 1 carries out shaping detection to light beam and is walked with parameter amendment
Suddenly it is：Shaping anteroposterior position phase data is measured according to the poly- shaping light path of meeting with Beam parameters to change, and exports to obtain by the shaping measured
The relationship of itself and design parameters establishes space output intensity distribution and sampling number, the restriction mould of input and output face area, spacing
Type.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109365417A (en) * | 2018-12-17 | 2019-02-22 | 济南大学 | The laser cleaner of sports field markings |
| CN111992543A (en) * | 2020-08-21 | 2020-11-27 | 厦门理工学院 | Laser plasma light wire cleaning method |
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|---|---|---|---|---|
| CN103399408A (en) * | 2013-08-13 | 2013-11-20 | 哈尔滨工业大学 | Method for shaping gauss beam into flat-topped beam |
| CN103841744A (en) * | 2014-03-18 | 2014-06-04 | 上海交通大学 | Laser wake field accelerator and method for generating high-light attosecond light pulses |
| CN104460007A (en) * | 2014-12-30 | 2015-03-25 | 哈尔滨工业大学 | Laser tripled-frequency space intensity shaping method |
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2018
- 2018-02-09 CN CN201810131845.2A patent/CN108296230B/en active Active
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| CN103399408A (en) * | 2013-08-13 | 2013-11-20 | 哈尔滨工业大学 | Method for shaping gauss beam into flat-topped beam |
| CN103841744A (en) * | 2014-03-18 | 2014-06-04 | 上海交通大学 | Laser wake field accelerator and method for generating high-light attosecond light pulses |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109365417A (en) * | 2018-12-17 | 2019-02-22 | 济南大学 | The laser cleaner of sports field markings |
| CN109365417B (en) * | 2018-12-17 | 2023-09-12 | 济南大学 | Laser belt cleaning device of stadium sign line |
| CN111992543A (en) * | 2020-08-21 | 2020-11-27 | 厦门理工学院 | Laser plasma light wire cleaning method |
| CN111992543B (en) * | 2020-08-21 | 2021-10-22 | 厦门理工学院 | Laser plasma light wire cleaning method |
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| CN108296230B (en) | 2019-06-28 |
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