CN108281881A - A kind of shutter device and laser for laser - Google Patents
A kind of shutter device and laser for laser Download PDFInfo
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- CN108281881A CN108281881A CN201810132208.7A CN201810132208A CN108281881A CN 108281881 A CN108281881 A CN 108281881A CN 201810132208 A CN201810132208 A CN 201810132208A CN 108281881 A CN108281881 A CN 108281881A
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- shutter
- laser
- main body
- energy absorbing
- base plate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/1061—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using a variable absorption device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Lasers (AREA)
Abstract
The invention discloses a kind of shutter devices for laser, including：Casing assembly, pneumatic actuating device, shutter main body and energy absorbing device；Be provided on the casing assembly for laser export into optical interface；The pneumatic actuating device is used to drive unlatching and the closure of the shutter main body；The energy absorbing device by the laser that the shutter main body blocks for that will carry out energy absorption；The pneumatic actuating device, shutter main body and energy absorbing device are all disposed in the casing assembly.The invention also discloses a kind of lasers.Shutter device and laser disclosed by the invention realize energy absorption by energy absorbing device, and realize rapid cooling, to reach Backup lightpath, component life, realize the purpose of system safety.
Description
Technical field
The present invention relates to laser technology field, more particularly to a kind of shutter devices and laser for laser.
Background technology
In high-end field of lithography, the characteristics of Gao Zhongying excimer laser is because of its Gao Zhongying, narrow linewidth and big energy, be current
The light source for accounting for absolute leading position of semiconductor lithography field application.Laser shutter is that excimer laser complete machine is essential
One of building block.The instruction whether litho machine complete machine exports laser can be executed by shutter, realizes the control to shutter.
Laser shutter is the device for controlling laser device laser output, the quality of shutter unit performance and function directly or
Connect the function of affecting laser complete machine and safety.When excimer laser system works, need to be wanted according to litho machine
It asks and judges whether to export laser, when litho machine need not be transported to, it is necessary to shutter blocking laser, when needing laser
When output, opens shutter and laser is output to litho machine.
Invention content
The present invention is directed to overcome defect of the existing technology, the present invention to use following technical scheme：
On the one hand, an embodiment of the present invention provides a kind of shutter devices for laser, described for the fast of laser
Door gear includes：Casing assembly, pneumatic actuating device, shutter main body and energy absorbing device；
Be provided on the casing assembly for laser export into optical interface；
The pneumatic actuating device is used to drive unlatching and the closure of the shutter main body；
The energy absorbing device by the laser that the shutter main body blocks for that will carry out energy absorption；
The pneumatic actuating device, shutter main body and energy absorbing device are all disposed in the casing assembly.
In some embodiments, the shutter main body includes：Reflection subassembly, shutter base plate component and guide assembly；
The reflection subassembly is fixed on the shutter base plate component, and the injection laser can pass through logical into optical interface
Reflection subassembly is crossed to deflect, it is deflected after reflection laser be directed to the energy absorbing device carry out energy decline it is scattered；
It is provided with light hole on the shutter base plate component；
The guide assembly is fixed on the shutter base plate component.
In some embodiments, the pneumatic actuating device includes pneumatic element and slide block assembly；
The slide block assembly coordinates with the guide assembly, and can be in the guide rail group under the driving of the pneumatic element
It is slided in part, and the light hole can be made to expose.
In some embodiments, the pneumatic element is fixed on by cylinder mounting plate on the shutter base plate component.
In some embodiments, the guide assembly is spherical guide, and the pneumatic element is cylinder.
In some embodiments, the reflection subassembly includes：Reflective mirror pedestal and reflective mirror；
The reflective mirror pedestal is 45 ° of eyeglass installation pedestals；
The reflective mirror is fitted in by screw and installation gasket on the reflective mirror pedestal.
In some embodiments, the shape into optical interface is round or rectangle.
In some embodiments, the energy absorbing device includes connecing light component and cooling fin；The light component that connects is close
Collect pore structure, the cooling fin is annular or transverse and longitudinal type fin.
In some embodiments, the shutter main body further includes：Shutter cover board, the shutter cover board are mounted on the guide rail
On component, the shutter cover board is respectively arranged with contact-making switch in the position that the shutter main body is opened and is closed completely completely,
To monitor the state that shutter is opened and closed.
On the other hand, the embodiment of the present invention additionally provides a kind of for laser.The laser includes foregoing
Shutter device for laser.
The technique effect of the present invention：Shutter device and laser disclosed by the invention for laser passes through energy absorption
Device, in shutter close, laser realizes energy absorption by energy absorbing device, and realizes rapid cooling, to reach protection
Light path, component life realize the purpose of system safety.And shutter device disclosed by the invention is made by using pneumatic actuating device
For the driving of shutter main body, the action execution time more stablizes, is controllable, will not be influenced by electromagnetic interference.
Description of the drawings
Fig. 1 is the structural schematic diagram of the shutter device according to an embodiment of the invention for laser；
Fig. 2 is section light principle schematic of the shutter device according to an embodiment of the invention for laser；
Fig. 3 is the structural schematic diagram of mirror assembly according to an embodiment of the invention；
Fig. 4 is the structural schematic diagram of energy absorbing device according to an embodiment of the invention；
Fig. 5 is the structural schematic diagram of the shutter device according to an embodiment of the invention for laser；
Fig. 6 is the structural schematic diagram of the shutter device according to an embodiment of the invention for laser；
Fig. 7 is the exploded perspective view of the shutter device according to an embodiment of the invention for laser.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with attached drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only explaining this hair
It is bright, but not to limit the present invention.
Laser shutter is the device for controlling laser device laser output, the quality of shutter unit performance and function directly or
Connect the function of affecting laser complete machine and safety.When excimer laser system works, need to be wanted according to litho machine
It asks and judges whether to export laser, when litho machine need not be transported to, it is necessary to shutter blocking laser, when needing laser
When output, opens shutter and laser is output to litho machine.
In the technology understood, electronic shutter usually may be used and block light path to prevent laser from passing through, swash at this time
Light can directly bombard electronic shutter, and a large amount of heat can not dissipate in time, and cause the damage of shutter；Excimer laser simultaneously
Installed System Memory is in high voltage power supply, and electromagnetic environment very severe, to electronic shutter, there are electromagnetic interferences, can influence electronic shutter just
Often work, causes the safety and reliability of system relatively low.And the present invention proposes a kind of shutter device for laser, it can
Above-mentioned harmful effect is effectively relieved.
Shown in Fig. 7, the shutter device according to an embodiment of the invention for laser is illustrated
100.The shutter device 100 for laser includes：
Casing assembly 101, pneumatic actuating device 102, shutter main body 103 and energy absorbing device 104；
Be provided on the casing assembly 101 for laser export into optical interface 202；
The pneumatic actuating device 102 is used to drive unlatching and the closure of the shutter main body 103；
The energy absorbing device 104 by the laser that the shutter main body 103 blocks for that will carry out energy absorption；
The pneumatic actuating device 102, shutter main body 103 and energy absorbing device 104 are all disposed within the shell group
In part 101.
The embodiment of the present invention provides a kind of pneumatic type shutter device, and shutter is opened by pneumatic actuating device control, closed, real
Now to the opening of shutter main body, closing；And energy absorbing device is introduced when blocking light path, and quickly dissipated by radiator structure
Heat；Shutter device includes casing assembly, and the casing assembly provides the function of shutter protective cover, to connect light path and realize light
The sealing protection on road.
In some embodiments, the shutter main body 103 includes：Reflection subassembly 203, shutter base plate component 503, and lead
Rail assembly 505；
The reflection subassembly 203 is fixed on the shutter base plate component 503, and the injection laser can pass through entering light
Interface 202 is deflected by reflection subassembly 203, and the reflection laser after being deflected is directed to the energy absorbing device 104
Progress energy declines scattered；
It is provided with light hole 507 on the shutter base plate component 503；
The guide assembly 505 is fixed on the shutter base plate component 503.
In some embodiments, the pneumatic actuating device 102 includes pneumatic element 501, slide block assembly 504；The cunning
Block assembly 504 coordinates with the guide assembly 505, and can be in the guide assembly 505 under the driving of the pneumatic element 501
Middle sliding, and the light hole 507 can be made to expose.
In some embodiments, the pneumatic element 501 is fixed on the shutter base plate component by cylinder mounting plate 502
On 503.
In some embodiments, the guide assembly 505 is spherical guide, and the pneumatic element 501 is cylinder.
Pneumatic actuating device 102 is used using gas sensitization switch as the pneumatic element of trigger condition, it is possible to prevente effectively from electric
The problems such as shutter trigger delay that magnetic disturbance is brought, ensures the response time, is constrained according to shutter stroke, overall dimensions, action is anti-
The conditions type selecting such as between seasonable；Pneumatic actuating device drives shutter sliding block to be moved in the guide rail on shutter pedestal, and guide rail can make
With forms such as V-groove, balls, ensure that shutter movement is smooth.
The pneumatic actuating device of this example is installed with shutter as shown in figure 5, selecting the cylinder that initial state pop-up, triggering are withdrawn
501 are used as pneumatic actuating device, cylinder 501 are fixed on by cylinder mounting plate 502 on shutter base plate component 503, sliding block group
Part 504 can move in the guide assembly 505 on shutter base plate component 503, and guide assembly 505 uses spherical guide, low
The characteristics of friction coefficient, can allow the more smooth of shutter movement, slide block assembly 504 to pass through the screw thread and cylinder on 501 bar of cylinder
501 are coupled, and are fixed by fastening screw 506, and the gas-powered that cylinder 501 obtains meeting operating pressure is retracted, and is driven
Slide block assembly 504 moves, and the light hole 507 on shutter base plate component 503 is exposed after opening completely, and laser is able to from shutter main body
Inside it is output to next module.
Driving of the embodiment of the present invention using pneumatic actuating device as shutter main body, action execute the time more stablize, can
Control, will not be influenced by electromagnetic interference.And in shutter close, laser realizes energy absorption by energy absorbing device, and
It realizes rapid cooling, to reach Backup lightpath, component life, realizes the purpose of system safety.
In some embodiments, the reflection subassembly 203 includes：Reflective mirror pedestal 301 and reflective mirror 302；
The reflective mirror pedestal 301 is 45 ° of eyeglass installation pedestals；
The reflective mirror 302 is fitted in by screw 303 and installation gasket 304 on the reflective mirror pedestal 301.
In some embodiments, 203 reflection laser of reflection subassembly can be realized by modes such as reflecting prism or total reflective mirrors, peace
Dress mode can be that the special ultraviolet glue of optical element will be utilized to paste in the plane, it can also be fixed on using tooling and reflects position
It sets, reflection angle can be any angle that can reach energy absorbing device 104.This example uses and is mounted on speculum
Mode on 45 ° of parts realizes, as shown in Figure 3.Reflective mirror pedestal 301 is 45 ° of eyeglass installation pedestals, passes through screw 303 and peace
Reflective mirror 302 is pressed on reflective mirror pedestal 301 by dress gasket 304, and installation gasket 304 should be selected with the bright and clean of certain elasticity
Non-metallic gasket prevents the reflective mirror when pushing down eyeglass from being damaged by excessive stresses, this example is using polytetrafluoroethylene (PTFE)
The installation gasket of material.
In some embodiments, the shape into optical interface 202 is round or rectangle.Into optical interface 202 using round
Or rectangle can make laser entrance evenly unobstructed, and in process of production because being regular shape, more preferable processing life
Production.Certainly, it can be injected laser 201 by the shape of laser and pass through on shutter main body 103 into optical interface or arbitrary other
Reflection subassembly 203 deflects at an angle, and for this example using 45 ° of deflections, the reflection laser after being deflected is directed to energy
The amount progress energy of absorption plant 104 declines scattered.
In some embodiments, the energy absorbing device 104 includes cooling fin, and the cooling fin is ring fin or cross
Longitudinal type fin.
The energy absorbing device 104 is available quickly to be prevented the special substance of laser energy absorption or structure
Mirror-reflection.The needs of energy absorbing device 104 quickly carry out dissipation processing after receiving reflection laser 205 to it, meet light portion
Position should use the structure that laser specular reflection will not be returned to original light path, and its material will not be because of instantaneously receiving amount of heat
And scorification, heat need radiator structure quickly to shed after passing to.It, which connects light position taper can be used, connects photo structure, and laser is made to bore
Shape is continuously launched in face, and energy rapid decay is simultaneously shed by radiator structure；Foamed aluminium, foam copper, nickel foam etc. can also be used
Intensive porous material is to connect light component, and guarantee heat exchange efficiency need to be fitted closely by connecing luminescent material and radiator structure, can use tight dress
Match or fill heat conductive silica gel, heat dissipation position is radiated using chip, can be ring fin or transverse and longitudinal type fin.According to laser frequency
F, unit interval ceiling capacity W, coefficient of heat transfer α, exothermic temperature (ceiling temperature-environment temperature) △ t, heat dissipation formula Q=Wf=α
S △ t find out the minimum heat area S for needing to design, and fin density and depth are designed according to S.This exemplary energy absorption plant is such as
Shown in Fig. 4,401 foamed aluminiums are used to connect luminescent material, intensive pore structure generates diffusing reflection after so that laser is entered foamed aluminium
And interfere with each other, so that luminous energy is quickly converted to thermal energy, can prevent laser from mirror-reflection occurs and protect original light path, and fusing point is very
Height is more than 1400 DEG C, is far above the fusing point (600-700 DEG C) of common aluminium material, and foamed aluminium and 402 horizontal type fin radiating blocks use
Interference fit connection.
In some embodiments, the shutter main body 103 further includes：Shutter cover board 601, the shutter cover board 601 are installed
On the guide assembly 505, the shutter cover board 601 is in the position that the shutter main body 103 is opened and is closed completely completely
It is respectively arranged with contact-making switch 602, to monitor the state that shutter is opened and closed.
The embodiment of the present invention realizes the real time monitoring to fast door state by contact-making switch, improve equipment reliability and
It is maintainable.
On the other hand, the embodiment of the present invention additionally provides a kind of for laser.The laser includes foregoing
Shutter device for laser.
The technique effect of the present invention：Shutter device and laser disclosed by the invention for laser passes through energy absorption
Device, in shutter close, laser realizes energy absorption by energy absorbing device, and realizes rapid cooling, to reach protection
Light path, component life realize the purpose of system safety.And shutter device disclosed by the invention is made by using pneumatic actuating device
For the driving of shutter main body, the action execution time more stablizes, is controllable, will not be influenced by electromagnetic interference.
The shutter device 100 provided by the present invention for laser is carried out specifically with reference to specific embodiment
It is bright.
Embodiment 1：
As shown in Figures 1 to 7, it is the shutter device 100 provided in an embodiment of the present invention for laser.
The shutter device 100 of laser is the device for controlling laser device laser output, shutter device performance and function it is good
The bad function and reliability for directly or indirectly affecting laser complete machine.
In shutter device 100 for laser as shown in Figure 1 casing assembly 101 be the protection structure of shutter unit simultaneously
Including laser output into optical interface, can be by metal or other opaque structure compositions for being easy to heat conduction.Pneumatic actuating device
102 be drive shutter opening, closure device；Shutter main body 103 is the carrier for carrying entire shutter device；Energy absorbing device
104 be the mechanism that energy absorption is carried out to blocking laser.
The original state of shutter device 100 can be to open and close, this example is designed by normality of shutter close, is closed
Close that block optical path states as shown in Figure 2.Laser 201 is injected by entering shutter main body into optical interface 202 on casing assembly 101
Can be that round, rectangle or arbitrary other can be injected laser 201 and pass through shutter master by the shape of laser into optical interface inside 203
Reflection subassembly 203 on body 103 deflects at an angle, this example is using 45 ° of deflections, the reflection laser quilt after being deflected
Be directed to energy absorbing device 104 carry out energy decline it is scattered.
203 reflection laser of reflection subassembly can realize by modes such as reflecting prism or total reflective mirrors, mounting means can be by
It is pasted in the plane, can also be fixed on its reflection position using tooling, angle of reflection using the special ultraviolet glue of optical element
Degree can be any angle that can reach energy absorbing device 104.This example uses the side being mounted on speculum on 45 ° of parts
Formula realization, as shown in Figure 3.Reflective mirror pedestal 301 is 45 ° of eyeglass installation pedestals, will be anti-by screw 303 and installation gasket 304
Light microscopic 302 is pressed on reflective mirror pedestal 301, and installation gasket 304 should select the bright and clean non-metallic gasket with certain elasticity, prevent
Only when pushing down eyeglass, reflective mirror is damaged by excessive stresses, this example using polytetrafluoroethylene (PTFE) material installation pad
Piece.
The needs of energy absorbing device 104 quickly carry out dissipation processing after receiving reflection laser 205 to it, connect light position
Should use will not return laser specular reflection the structure of original light path, and its material will not receive amount of heat because instantaneous and
Scorification, heat need radiator structure quickly to shed after passing to.It, which connects light position taper can be used, connects photo structure, makes laser in taper
It is continuously launched in face, energy rapid decay is simultaneously shed by radiator structure；Foamed aluminium, foam copper, nickel foam etc. can also be used close
Collection porous material is to connect light component, and guarantee heat exchange efficiency need to be fitted closely by connecing luminescent material and radiator structure, can use be closely assembled
Or filling heat conductive silica gel, heat dissipation position are radiated using chip, can be ring fin or transverse and longitudinal type fin.According to laser frequency f,
Unit interval ceiling capacity W, coefficient of heat transfer α, exothermic temperature (ceiling temperature-environment temperature) △ t, heat dissipation formula Q=Wf=α S
△ t find out the minimum heat area S for needing to design, and fin density and depth are designed according to S.This exemplary energy absorption plant is such as
Shown in Fig. 4,401 foamed aluminiums are used to connect luminescent material, intensive pore structure generates diffusing reflection after so that laser is entered foamed aluminium
And interfere with each other, so that luminous energy is quickly converted to thermal energy, can prevent laser from mirror-reflection occurs and protect original light path, and fusing point is very
Height is more than 1400 DEG C, is far above the fusing point (600-700 DEG C) of common aluminium material, and foamed aluminium and 402 horizontal type fin radiating blocks use
Interference fit connection.
Pneumatic actuating device 102 is used using gas sensitization switch as the pneumatic element of trigger condition, it is possible to prevente effectively from electric
The problems such as shutter trigger delay that magnetic disturbance is brought, ensures the response time, is constrained according to shutter stroke, overall dimensions, action is anti-
The conditions type selecting such as between seasonable；Pneumatic actuating device drives shutter sliding block to be moved in the guide rail on shutter pedestal, and guide rail can make
With forms such as V-groove, balls, ensure that shutter movement is smooth.
The pneumatic actuating device of this example can refer to shown in Fig. 5,501 conduct of cylinder for selecting initial state pop-up, triggering to withdraw
Cylinder 501 is fixed on by cylinder mounting plate 502 on shutter base plate component 503 by pneumatic actuating device, and slide block assembly 504 can
With movement in the guide assembly 505 on shutter base plate component 503, guide assembly 505 uses spherical guide, low-friction coefficient
The characteristics of the more smooth of shutter movement, slide block assembly 504 can be allowed to be coupled with cylinder 501 by the screw thread on 501 bar of cylinder
Together, it is fixed by fastening screw 506, the gas-powered that cylinder 501 obtains meeting operating pressure is retracted, and slide block assembly is driven
504 movements, expose the light hole 507 on shutter base plate component 503 after opening completely, laser is able to be output to out of shutter main body
Next module.
In place detection function realization as shown in fig. 6, by shutter cover board 601 be mounted on guide assembly 505 on, it is complete in shutter
The full position installation contact-making switch 602 opened and be closed completely, to monitor the state that shutter is opened and closed.
The technique effect of the present invention：Shutter device and laser disclosed by the invention for laser passes through energy absorption
Device, in shutter close, laser realizes energy absorption by energy absorbing device, and realizes rapid cooling, to reach protection
Light path, component life realize the purpose of system safety.And shutter device disclosed by the invention is made by using pneumatic actuating device
For the driving of shutter main body, the action execution time more stablizes, is controllable, will not be influenced by electromagnetic interference.And the present invention is real
Real time monitoring to fast door state can be realized by applying the shutter device of example, improve the reliability and maintainability of equipment.
Those skilled in the art should further appreciate that, be described in conjunction with the embodiments described herein
Each exemplary unit and algorithm steps, can be realized with electronic hardware, computer software, or a combination of the two, in order to clear
Illustrate to Chu the interchangeability of hardware and software, generally describes each exemplary group according to function in the above description
At and step.These functions are implemented in hardware or software actually, depend on the specific application and design of technical solution
Constraints.Professional technician can use different methods to achieve the described function each specific application, but
It is that such implementation should not be considered as beyond the scope of the present invention.
The step of method described in conjunction with the examples disclosed in this document or algorithm, can use hardware, processor to execute
The combination of software module or the two is implemented.Software module can be placed in random access memory (RAM), memory, read-only memory
(ROM), electrically programmable ROM, electrically erasable ROM, register, hard disk, moveable magnetic disc, CD-ROM or technical field
In any other form of storage medium well known to interior.
In the description of the present invention, it is to be understood that, term "center", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be orientation based on ... shown in the drawings or
Position relationship is merely for convenience of description of the present invention and simplification of the description, and does not indicate or imply the indicated device or element must
There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；Can be that machinery connects
It connects, can also be electrical connection；It can be directly connected, can also can be indirectly connected through an intermediary in two elements
The interaction relationship of the connection in portion or two elements, unless otherwise restricted clearly.For those of ordinary skill in the art
For, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be with "above" or "below" second feature
It is that the first and second features are in direct contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is directly under or diagonally below the second feature, or is merely representative of fisrt feature level height and is less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiments or example.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
The specific implementation mode of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes made by the technical concept of the present invention and deformation, should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (10)
1. a kind of shutter device for laser, which is characterized in that the shutter device for laser includes：Shell group
Part, pneumatic actuating device, shutter main body and energy absorbing device；
Be provided on the casing assembly for laser export into optical interface；
The pneumatic actuating device is used to drive unlatching and the closure of the shutter main body；
The energy absorbing device by the laser that the shutter main body blocks for that will carry out energy absorption；
The pneumatic actuating device, the shutter main body and the energy absorbing device are all disposed in the casing assembly.
2. the shutter device according to claim 1 for laser, which is characterized in that the shutter main body includes：Instead
Penetrate component, shutter base plate component and guide assembly；
The reflection subassembly is fixed on the shutter base plate component, and the injection laser can be anti-by passing through into optical interface
Component is penetrated to deflect, it is deflected after reflection laser be directed to the energy absorbing device carry out energy decline it is scattered；
It is provided with light hole on the shutter base plate component；
The guide assembly is fixed on the shutter base plate component.
3. the shutter device according to claim 2 for laser, which is characterized in that the pneumatic actuating device includes
Pneumatic element and slide block assembly；
The slide block assembly coordinates with the guide assembly, and can be in the guide assembly under the driving of the pneumatic element
Sliding, and the light hole can be made to expose.
4. the shutter device according to claim 3 for laser, which is characterized in that the pneumatic element passes through cylinder
Mounting plate is fixed on the shutter base plate component.
5. the shutter device according to claim 3 for laser, which is characterized in that the guide assembly is led for ball
Rail, the pneumatic element are cylinder.
6. the shutter device according to claim 2 for laser, which is characterized in that the reflection subassembly includes：Instead
Light microscopic pedestal and reflective mirror；
The reflective mirror pedestal is 45 ° of eyeglass installation pedestals；
The reflective mirror is fitted in by screw and installation gasket on the reflective mirror pedestal.
7. the shutter device according to claim 1 for laser, which is characterized in that the shape into optical interface is
Round or rectangle.
8. the shutter device according to claim 1 for laser, which is characterized in that the energy absorbing device includes
Light component and cooling fin are connect, the light component that connects is intensive pore structure, and the cooling fin is annular or transverse and longitudinal type fin.
9. the shutter device according to claim 2 for laser, which is characterized in that the shutter main body further includes fast
Door cover plate, the shutter cover board be mounted on the guide assembly on, the shutter cover board the shutter main body completely open and
The position being closed completely is respectively arranged with contact-making switch, to monitor the state that shutter is opened and closed.
10. a kind of laser, which is characterized in that include the shutter dress such as claim 1-9 any one of them for laser
It sets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810132208.7A CN108281881A (en) | 2018-02-09 | 2018-02-09 | A kind of shutter device and laser for laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810132208.7A CN108281881A (en) | 2018-02-09 | 2018-02-09 | A kind of shutter device and laser for laser |
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| Publication Number | Publication Date |
|---|---|
| CN108281881A true CN108281881A (en) | 2018-07-13 |
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| CN201810132208.7A Pending CN108281881A (en) | 2018-02-09 | 2018-02-09 | A kind of shutter device and laser for laser |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN201348677Y (en) * | 2009-01-16 | 2009-11-18 | 北京工业大学 | Optical gate of fast response laser capable of bearing high power |
| CN102157895A (en) * | 2011-03-17 | 2011-08-17 | 华中科技大学 | Mechanical optical gate of high-power laser |
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Application publication date: 20180713 |