CN108279561A - Method and motion platform based on the Friction Compensation and realization for reducing disturbance bandwidth - Google Patents
Method and motion platform based on the Friction Compensation and realization for reducing disturbance bandwidth Download PDFInfo
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Abstract
The present invention proposes a kind of based on the Friction Compensation Auto-disturbance-rejection Control for reducing disturbance bandwidth.For reduce automatic disturbance rejection controller motion platform speed zero crossing disturbance bandwidth, propose a kind of design reducing system stiffness, elastic-restoring force ks is reduced, the disturbance eliminated is difficult to which frictional force dead zone autokinesis is low, converts the disturbance of finite stiffness flexible deformation；The present invention has returned the distribution guidance of Coupled Rigid-flexible platform inertia, reduces additional inertance as possible so that product platform inertia accounts for leading, and the control law of frictional dead is approximately rigid motion rule；In motion process, then it is major disturbances by original frictional force, becomes the compound disturbance of frictional force and flexible deformation, to reduce the bandwidth always disturbed, be conducive to total Eliminating disturbance of automatic disturbance rejection controller.
Description
Technical field
The present invention relates to the technical fields of high speed and precision motion control field, certainly anti-based on reducing more particularly, to one
Disturb controller disturbance bandwidth Friction Compensation and the method for realization.
Background technology
In high speed and precision motion control field, based on the motion platform of mechanical guide there are frictional dead, precision can only reach
To micron order.In the occasion that higher precision requires, industrially need to reduce using modes such as air supporting, magnetic suspension and hydrostatic slideways
It even is eliminated the influence of friction, of high cost, use environment requires high, uncomfortable application and the electronic manufacture occasion having a large capacity and a wide range.So
And electronics manufacturing obtain Moore's Law (when price is constant, the number of open ended component on integrated circuit, about every 18-
Will double within 24 months, performance will also promote one times) harsh requirement is proposed to encapsulation equipment accuracy and speed.It passes
The Friction Compensation scheme and control method of system are difficult to meet the requirement of growing high speed and precision motion control.Scientific and technological people
Member is in the control program for making great efforts to seek can to overcome friction, and Active Disturbance Rejection Control algorithm is the effective method of one of which, mould
Type error and the unified consideration of external disturbance, realize and inhibit well to disturbance informations such as frictional force.When precision is micron order,
Without considering that frictional dead compensation also can rapidly and accurately eliminate error.However nanometer (<0.1um) when grade, in speed mistake
There are dynamic errors for zero.Main cause be in frictional dead, although motion platform does not overcome static friction to generate rigid motion,
But the application of driving force, motion platform generate small flexible deformation, control law is a=(f-ks-cv)/m, with whole fortune
Dynamic estimation a=f/M is compared, and flexible deformation restoring force, damping force and attachment inertia all become disturbance term, however flat due to moving
The universal rigid design of platform, rigidity is too big, cause the extension observer of automatic disturbance rejection controller precision of forecasting model be deteriorated and can not
Disturbance is effectively eliminated.
Mr.'s Han Jingqing 1989《Control theory:Model theory or cybernetics》One text proposes linearisation and bandwidth is general
It reads, linearisation and the introducing of bandwidth concept provide completely new visual angle to theoretical research, while reducing the difficulty of research.But
Industrially, bandwidth is exactly cost.Although high bandwidth can be such that tracking velocity improves, many problems are also brought：1) to executing machine
The quality requirements of structure improve；2) encouraged the high frequency dynamic of object that control problem is made to complicate；3) stability margin of closed-loop system
Decline, it is more sensitive to delayed phase and time delay；4) quicker to sensor noise.
Invention content
The present invention is the disturbance bandwidth for reducing automatic disturbance rejection controller in motion platform speed zero crossing, it is proposed that a kind of reduction
The design of system stiffness reduces elastic-restoring force ks, is difficult to the disturbance eliminated to deform frictional force dead zone difficult, turns
Change the disturbance of finite stiffness flexible deformation；In motion process, then it is major disturbances by original frictional force, becomes frictional force and elasticity
The compound disturbance of deformation is conducive to total Eliminating disturbance of automatic disturbance rejection controller to reduce the bandwidth always disturbed.
The technical solution adopted by the present invention is as follows.
A method of disturbing bandwidth Friction Compensation and realization based on automatic disturbance rejection controller is reduced, which is characterized in that institute
The method of stating includes the following steps：S1. the rigid platfor of motion platform is set to Coupled Rigid-flexible platform；The motion platform packet
It includes：Engine base, the linear guide, Rigid-flexible Coupled Motion platform, the Coupled Rigid-flexible platform include：Rigid frame, flexible hinge and core
Heart motion platform；Wherein, the nucleus movement platform is connect by the flexible hinge with the rigid frame；S2. structure is held
Row device and displacement detecting closed-loop system input total inertia M of Rigid-flexible Coupled Motion platform, the Coupled Rigid-flexible under guide supporting
Equivalent stiffness k, the quality m and damping c of motion platform elastic vibration response, the displacement of the Rigid-flexible Coupled Motion platform, speed,
Acceleration uses s, v, a to indicate that inertia effects coefficient indicates that driving force is indicated with f with α respectively；Active Disturbance Rejection Control algorithm is established, if
The prediction model for setting extension observer is a=f/ [m+ α (M-m)]；When paying attention to teaching process responds, α values are 1；Focus on end response
When, α values are 0；When taking into account the two, α values are between 0-1；Wherein, in rigid motion, α=1, Controlling model a
=f/ [m+ α (M-m)], disturbs as frictional force；At frictional dead, platform generates elastic vibration, and Controlling model should be at this time
The elastic vibration of the rigidity of platform responds：Ma+cv+ks=f enables α=0, Controlling model a=f/m disturb and returned for flexible deformation
Multiple power ks damping forces cv.
Further, the elastic stiffness of the platform is reduced, returns restoring force ks to reduce elasticity, flexible hinge is made as
The metal material of low resistance, therefore cv can also be considered as disturbance Controlling model approximation a=f/m.
Further, the frame is made of light material, and the quality m of product platform accounts for main component, and m is approximately equal to M, because
The approximate model a=f/M of this frictional dead, is similar to characteristics of motion when rigid motion.
Further, the nucleus movement platform of the Coupled Rigid-flexible platform is located at the top of the rigid frame, described
Nucleus movement platform is connected with the rigid frame by the flexible hinge.
Further, the flexibility between the nucleus movement platform and the rigid frame of the Coupled Rigid-flexible platform
Hinge is to be arranged symmetrically.
A kind of motion platform, which is characterized in that the motion platform includes：Engine base, the linear guide, Rigid-flexible Coupled Motion are flat
Platform, the Coupled Rigid-flexible platform include：Rigid frame, flexible hinge and nucleus movement platform；Wherein, the nucleus movement platform
It is connect with the rigid frame by the flexible hinge；The Coupled Rigid-flexible platform uses following control method：Structure executes
Device and displacement detecting closed-loop system input total inertia M of Rigid-flexible Coupled Motion platform, the Coupled Rigid-flexible fortune under guide supporting
Equivalent stiffness k, the quality m and damping c of moving platform elastic vibration response, the displacement of the Rigid-flexible Coupled Motion platform, add speed
Speed uses s, v, a to indicate that inertia effects coefficient indicates that driving force is indicated with f with α respectively；Active Disturbance Rejection Control algorithm is established, is arranged
The prediction model for extending observer is a=f/ [m+ α (M-m)]；When paying attention to teaching process responds, α values are 1；When focusing on end response,
α values are 0；When taking into account the two, α values are between 0-1；Wherein, in rigid motion, α=1, Controlling model a=f/
M disturbs as frictional force；At frictional dead, platform generates elastic vibration, and Controlling model should be the bullet of the rigidity of platform at this time
Property vibratory response：Ma+cv+ks=f enables α=0, Controlling model a=f/m disturb as sprung back's power ks damping forces
cv。
Further, the elastic stiffness of the platform is reduced, returns restoring force ks to reduce elasticity, flexible hinge is made as
The metal material of low resistance, therefore cv can also be considered as disturbance Controlling model approximation a=f/m.
Further, the frame is made of light material, and the quality m of platform accounts for main component, and m is approximately equal to M, therefore rubs
The approximate model a=f/M for wiping dead zone, is similar to characteristics of motion when rigid motion
Further, the nucleus movement platform of the Coupled Rigid-flexible platform is located at the top of the rigid frame, described
Nucleus movement platform is connected with the rigid frame by the flexible hinge.
Further, the flexibility between the nucleus movement platform and the rigid frame of the Coupled Rigid-flexible platform
Hinge is to be arranged symmetrically.
Compared with prior art, advantageous effect is：When black box controls (model-free), observer bandwidth wants intrinsic frequency (to disturb
Dynamic bandwidth) 10 times or more when having prediction model, observer bandwidth only needs 3 times of band above of intrinsic frequency higher, control cost
The higher present invention reduces platform intrinsic frequency, then coordinates prediction model, can reduce observer bandwidth, and reduces control cost.
Description of the drawings
Fig. 1 is the rigid motion model of conventional motion platform.
Fig. 2 is the motion model for considering plateau elastic deformation.
Fig. 3 puies forward the unilateral flexible hinge scheme for reducing disturbance bandwidth for the present invention.
Fig. 4 carries the symmetrical flexible hinge for reducing disturbance bandwidth for the present invention.
Specific implementation mode
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；It is attached in order to more preferably illustrate the present embodiment
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of position relationship described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
Traditional PID control directly takes with reference to given and output feedback difference as control signal, leads to response quickly occur
Property occur with the contradiction of overshoot.Automatic disturbance rejection controller comes from PID controller differentiation, takes PID error feedback controls
Core concept.
Automatic disturbance rejection controller is mainly made of three parts：Nonlinear Tracking Differentiator (tracking differentiator), extension
State observer (extended state observer) and nonlinear state error Feedback Control Laws (nonlinear state
error feedback law)。
The effect of Nonlinear Tracking Differentiator is transition process arranging, provides rational control signal, solves response speed and surpass
Contradiction between tonality.Extended mode observer is used for solving unknown-model part and external unknown disturbance synthesis to control object
Influence.It is different from common state observer although being called extended mode observer.Extended mode Design of Observer one
The quantity of state of a extension carrys out the influence of trace model unknown portions and external unknown disturbance.Then providing control- action compensation, these are disturbed
It is dynamic.Control object is become into common integral tandem type control object.The purpose of design extended mode observer is exactly that observation is expanded
It puts on display the state variable come and realizes the feedback linearization of dynamical system for estimating unknown disturbance and control object unmodel parts
Change, control object is become to integrate tandem type.Nonlinearity erron Feedback Control Laws provide the control strategy of controlled device.
Designing extended mode photodetector becomes ADRC using most important link.When not exclusively not knowing object model,
The bandwidth of state photodetector needs that 10 times or more in disturbance bandwidth are arranged.There is more accurately model, it can be by observer band
It is wide only to need 3 times of disturbance bandwidth.Higher observer bandwidth, it is meant that the raising of frequency acquisition and the shortening of servo period,
It is with high costs.
It is of the present invention based on reduce disturbance bandwidth Friction Compensation Auto-disturbance-rejection Control step include：
1) the original rigid platfor of motion platform is changed to Coupled Rigid-flexible platform as shown in Figure 2.
The motion platform includes：Engine base, the linear guide, Rigid-flexible Coupled Motion platform.
The Coupled Rigid-flexible platform includes：Rigid frame, flexible hinge and nucleus movement platform；Nucleus movement platform passes through
Flexible hinge is connect with the rigid frame.
Preferably, as shown in figure 3, unilateral flexible hinge scheme, nucleus movement platform may be used in the flexible couplings platform
Positioned at the top of rigid frame, connected by flexible hinge therebetween.It is cost using the advantages of unilateral flexible hinge scheme
It is relatively low.
It, at this time can be with when to there is requirement for height since unilateral flexible hinge can cause height change during the work time
Using the flexible hinge scheme being arranged symmetrically as shown in Figure 4, the nucleus movement platform and rigid frame of Coupled Rigid-flexible platform it
Between flexible hinge be arranged symmetrically.The variation of height can be avoided well using the flexible hinge scheme being arranged symmetrically.
2) actuator and displacement detecting closed-loop system are built, total inertia M of Rigid-flexible Coupled Motion platform, guide supporting are inputted
Under the Rigid-flexible Coupled Motion plateau elastic vibratory response equivalent stiffness k, quality m and damping c, the Rigid-flexible Coupled Motion
The displacement of platform, speed, acceleration indicate that inertia effects coefficient indicates that driving force is indicated with f with α with s, v, a respectively；It establishes
The prediction model of Active Disturbance Rejection Control algorithm, setting extension observer is a=f/ [m+ α (M-m)].
When paying attention to teaching process responds, α values are 1；When focusing on end response, α values are 0；When taking into account the two, α values are situated between
Between 0-1.
Wherein, in rigid motion, α=1, Controlling model is a=f/ [m+ α (M-m)], is disturbed as frictional force.
At frictional dead, platform generates elastic vibration, and Controlling model should be the elastic vibration of the rigidity of platform at this time
Response：Ma+cv+ks=f enables α=0, Controlling model a=f/m disturb as sprung back's power ks damping forces cv.
The frame is made of light material, and the quality m of platform accounts for main component, and m is approximately equal to M, therefore frictional dead
Approximate model a=f/M, be similar to characteristics of motion when rigid motion.
Existing rigid platfor, rigidity is very big, and disturbance quantity needs very high control bandwidth that could eliminate, and implementation cost is non-
Chang Gao.The present invention proposes the design scheme for reducing disturbance bandwidth, rigidity is reduced, to reduce the bandwidth of disturbance so that bullet
Property the significant decrease of restoring force ks, even if there is displacement output if under smaller control force, avoid traditional rigidity it is too big when,
Small driving force bottom offset output is zero, and leads to the inoperable problem of extended mode observer.The present invention has returned hard and soft coupling
The distribution guidance of platform inertia is closed, reduces additional inertance as possible so that product platform inertia accounts for leading, and frictional dead control law is close
Like being rigid motion rule a=f/M, the stability of active disturbance rejection is improved.
Operation principle of the present invention based on the Friction Compensation Auto-disturbance-rejection Control for reducing disturbance bandwidth is as follows：
Traditional rigid motion model (Fig. 1) is made into consider the model (Fig. 2) that plateau elastic vibrates, in speed zero crossing
(start and stop), when driving force is not enough to overcome static friction, platform generates flexible deformation, and control law at this time is a=
(f-ks-cv)/m.Since existing Platform Designing rigidity is too big, deformation is following in the micron-scale.When the positioning accuracy request of platform exists
When micron order, flexible deformation can not be considered.But if sub-micron even nanoscale, just must take into consideration elastic change when positioning accuracy
The control of shape.Active Disturbance Rejection Control is difficult to eliminate the error of sensitivity very little, therefore the rigidity of platform is reduced, with flexible hinge chain
Motion platform and sliding block are connect, platform rigidity (Fig. 3) is reduced.Since unilateral flexible hinge can cause height to become during the work time
Changing, when to there is requirement for height, the flexible hinge (Fig. 4) being arranged symmetrically can also be used.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
All any modification, equivalent and improvement etc., should be included in the claims in the present invention made by within the spirit and principle of invention
Protection domain within.
Claims (10)
1. a kind of based on the method for reducing automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization, which is characterized in that described
Method includes the following steps：
S1. the rigid platfor of motion platform is set to Coupled Rigid-flexible platform；
The motion platform includes：Engine base, the linear guide, Rigid-flexible Coupled Motion platform,
The Coupled Rigid-flexible platform includes：Rigid frame, flexible hinge and nucleus movement platform；Wherein, the nucleus movement is flat
Platform is connect by the flexible hinge with the rigid frame；
S2. actuator and displacement detecting closed-loop system are built, inputs total inertia M of Rigid-flexible Coupled Motion platform, under guide supporting
The Rigid-flexible Coupled Motion plateau elastic vibratory response equivalent stiffness k, quality m and damping c, the Rigid-flexible Coupled Motion it is flat
The displacement of platform, speed, acceleration indicate that inertia effects coefficient indicates that driving force is indicated with f with α with s, v, a respectively；
Active Disturbance Rejection Control algorithm is established, the prediction model of setting extension observer is a=f/ [m+ α (M-m)]；
When paying attention to teaching process responds, α values are 1；When focusing on end response, α values are 0；When taking into account the two, α values are between 0-1
Between；
Wherein, in rigid motion, α=1, Controlling model is a=f/ [m+ α (M-m)], is disturbed as frictional force；
At frictional dead, platform generates elastic vibration, and Controlling model should be the elastic vibration response of the rigidity of platform at this time：
Ma+cv+ks=f enables α=0, Controlling model a=f/m disturb as sprung back's power ks damping forces cv.
2. the method according to claim 1 based on reduction automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization,
It is characterized in that, the elastic stiffness of the platform is reduced, restoring force ks is returned to reduce elasticity, flexible hinge is made as low-resistance
The metal material of Buddhist nun, therefore cv can also be considered as disturbance Controlling model approximation a=f/m.
3. according to claim 1 or 2 based on the side for reducing automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization
Method, which is characterized in that the frame is made of light material, and the quality m of product platform accounts for main component, and m is approximately equal to M, because
The approximate model a=f/M of this frictional dead, is similar to characteristics of motion when rigid motion.
4. the method according to claim 3 based on reduction automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization,
It is characterized in that, the nucleus movement platform of the Coupled Rigid-flexible platform is located at the top of the rigid frame, the core
Motion platform is connected with the rigid frame by the flexible hinge.
5. the method according to claim 3 based on reduction automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization,
It is characterized in that, the flexible hinge between the nucleus movement platform of the Coupled Rigid-flexible platform and the rigid frame
To be arranged symmetrically.
6. a kind of motion platform, which is characterized in that the motion platform includes：Engine base, the linear guide, Rigid-flexible Coupled Motion are flat
Platform, the Coupled Rigid-flexible platform include：Rigid frame, flexible hinge and nucleus movement platform；Wherein, the nucleus movement platform
It is connect with the rigid frame by the flexible hinge；
The Coupled Rigid-flexible platform uses following control method：
Actuator and displacement detecting closed-loop system are built, total inertia M of Rigid-flexible Coupled Motion platform, the institute under guide supporting are inputted
Equivalent stiffness k, the quality m and damping c of Rigid-flexible Coupled Motion plateau elastic vibratory response are stated, the Rigid-flexible Coupled Motion platform
Displacement, speed, acceleration indicate that inertia effects coefficient indicates that driving force is indicated with f with α with s, v, a respectively；
Active Disturbance Rejection Control algorithm is established, the prediction model of setting extension observer is a=f/ [m+ α (M-m)]；
When paying attention to teaching process responds, α values are 1；When focusing on end response, α values are 0；When taking into account the two, α values are between 0-1
Between；
Wherein, in rigid motion, α=1, Controlling model a=f/M disturbs as frictional force；
At frictional dead, platform generates elastic vibration, and Controlling model should be the elastic vibration response of the rigidity of platform at this time：
Ma+cv+ks=f enables α=0, Controlling model a=f/m disturb as sprung back's power ks damping forces cv.
7. the method according to claim 6 based on the Friction Compensation and realization that reduce disturbance bandwidth, which is characterized in that
The elastic stiffness of the platform is reduced, returns restoring force ks to reduce elasticity, flexible hinge is made as the metal material of low resistance
Material, therefore cv can also be considered as disturbance Controlling model approximation a=f/m.
8. the side based on reduction automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization described according to claim 6 or 7
Method, which is characterized in that the frame is made of light material, and the quality m of platform accounts for main component, and m is approximately equal to M, therefore rubs
The approximate model a=f/M for wiping dead zone, is similar to characteristics of motion when rigid motion.
9. the method according to claim 8 based on reduction automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization,
It is characterized in that, the nucleus movement platform of the Coupled Rigid-flexible platform is located at the top of the rigid frame, the core
Motion platform is connected with the rigid frame by the flexible hinge.
10. the method according to claim 8 based on reduction automatic disturbance rejection controller disturbance bandwidth Friction Compensation and realization,
It is characterized in that, the flexible hinge between the nucleus movement platform of the Coupled Rigid-flexible platform and the rigid frame
To be arranged symmetrically.
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| CN109143858A (en) * | 2018-08-23 | 2019-01-04 | 广东工业大学 | A kind of Rigid-flexible Coupled Motion platform courses method based on perturbed force measurement compensation |
| CN109143858B (en) * | 2018-08-23 | 2021-08-24 | 广东工业大学 | Rigid-flexible coupling motion platform control method based on disturbance force measurement compensation |
| CN109407511A (en) * | 2018-11-22 | 2019-03-01 | 广东工业大学 | Duplex path feedback Coupled Rigid-flexible platform courses method |
| CN109581862A (en) * | 2018-11-22 | 2019-04-05 | 广东工业大学 | The driver of embedded disturbance estimation compensation algorithm |
| CN109617497A (en) * | 2018-11-22 | 2019-04-12 | 广东工业大学 | Duplex path feedback disturbs estimation compensation driver |
| US20210126557A1 (en) * | 2019-10-23 | 2021-04-29 | Guangdong University Of Technology | Novel high-precision rigid-flexible coupling rotating platform and control method thereof |
| US11626815B2 (en) * | 2019-10-23 | 2023-04-11 | Guangdong University Of Technology | High-precision rigid-flexible coupling rotating platform and control method thereof |
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