CN108274647A - A kind of monocrystal material cuts adaptive fine tuning tool rest and cutting process - Google Patents
A kind of monocrystal material cuts adaptive fine tuning tool rest and cutting process Download PDFInfo
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- CN108274647A CN108274647A CN201810308949.6A CN201810308949A CN108274647A CN 108274647 A CN108274647 A CN 108274647A CN 201810308949 A CN201810308949 A CN 201810308949A CN 108274647 A CN108274647 A CN 108274647A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
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Abstract
A kind of monocrystal material cuts adaptive fine tuning tool rest and cutting process, and knife rest includes cutter holder, cutter trip bolt, cutter holder support plate, tool sharpening anterior angle adjustment component and Tool in Cutting depth adjustment component;It includes preceding pitching driving mechanism and rear pitching driving mechanism that tool sharpening anterior angle, which adjusts component,;Tool in Cutting depth adjustment component includes pedestal, front apron, rear baffle, sliding block, sliding rail, flexible balance mechanism and telescoping drive mechanism;Method is:Average cutting force database is established, the optimum combination data of tool sharpening anterior angle and Tool in Cutting depth are also stored in database;Start cutting, compares real data and database data, select matched data;According to the optimum combination data for selecting data and recalling tool sharpening anterior angle and Tool in Cutting depth;Control signal is sent out to piezoelectric actuator, tool sharpening anterior angle and Tool in Cutting depth are finely adjusted, until practical tool sharpening anterior angle and Tool in Cutting depth data splitting are consistent with optimum combination data in database.
Description
Technical field
The invention belongs to monocrystal material Machining Technology for Cutting fields, adaptive micro- more particularly to a kind of cutting of monocrystal material
Toolsetting frame and cutting process.
Background technology
Since monocrystal material has the anisotropy of mechanics and physical property, after Vehicle Processing, the circle of monocrystal material
The processing quality of all outer surfaces can also be not quite similar.For certain monocrystal materials, extremely strong brittle property can be also shown, is passed through
After crossing the turning of single-point diamond cutter, or even it can be cracked in finished surface.
During actual cut, the machining of monocrystal material is typically to be completed under identical stress condition, still
Since plastic deformation ability of the monocrystal material on different crystal orientations is different, cutting force can be caused to generate fluctuation with crystal orientation
The phenomenon that, the fluctuation of this cutting force also results in surface quality and fluctuates, and crisp modeling may occur in some crystal orientation and turn
Become phenomenon, since the surface roughness after processing has differences, to which light and dark sector distribution characteristics be presented.
And many because being known as of monocrystal material suface processing quality are influenced, wherein diamond cutter geometric parameter and processing
Technological parameter can all influence suface processing quality.For example, when cutting monocrystalline silicon using diamond cutter, before suitable bear
Angle, smaller cutting edge roundness and smaller cutting depth can be easier to obtain uniform finished surface.
In order to realize the clamped one time of cutter, raising processing efficiency, and smaller tool edge radius is selected, then according to single
The brilliant distinctive mechanical characteristic of material, is combined using best tool orthogonal rake and optimal cutting depth, and it is equal just to process surface
Even consistent monocrystal material workpiece.
But be combined to find suitable best tool orthogonal rake and optimal cutting depth, it needs in process
In to cutter carry out repeatedly clamping can just find suitable combination to adjust the processing anterior angle and cutting depth of cutter.But
It is that clamping cutter will seriously affect processing efficiency repeatedly, while clamping also needs to again to knife and centering every time, this is to processing essence
Degree, which also will produce, to be seriously affected.
Currently, being broadly divided into two classes for the fast servo tool of monocrystal material cutting, first kind servo saddle only can
Change Tool in Cutting depth in process, the second class servo saddle can only change tool sharpening anterior angle.Although above-mentioned two
Class servo saddle can improve the machined surface quality of monocrystal material to a certain extent, but the factor for influencing surface quality is not
Single, since above-mentioned two classes servo saddle can only all meet the adjustment of single parameter, it can not further increase list
The machined surface quality of brilliant material.
Invention content
In view of the problems of the existing technology, a kind of monocrystal material of present invention offer cuts adaptive fine tuning tool rest and cutting
Method can change simultaneously tool sharpening anterior angle and Tool in Cutting depth in process, and cutter need to only carry out clamped one time,
The influence to processing efficiency and processing quality because of multiple clamping cutter is avoided, the processing table of monocrystal material can be further increased
Face quality.
To achieve the goals above, the present invention adopts the following technical scheme that:A kind of adaptive fine-adjustment cutter of monocrystal material cutting
Frame, including cutter holder, cutter trip bolt, cutter holder support plate, tool sharpening anterior angle adjustment component and Tool in Cutting depth adjustment group
Part;The tool sharpening anterior angle adjustment component includes preceding pitching driving mechanism and rear pitching driving mechanism;The Tool in Cutting is deep
Degree adjustment component includes pedestal, front apron, rear baffle, sliding block, sliding rail, flexible balance mechanism and telescoping drive mechanism;The knife
Clamping to be mounted in cutter holder support plate, cutter is fixedly connected by cutter trip bolt with cutter holder;Before the cutter holder support plate passes through
Pitching driving mechanism and rear pitching driving mechanism are connected with sliding block, and cutter holder support plate is located above sliding block;The front apron,
Rear baffle and sliding rail are fixed on pedestal, sliding rail between front apron and rear baffle, and sliding rail perpendicular to front apron and
Rear baffle;The sliding block is mounted on sliding rail, and sliding block has linear movement degree of freedom relative to sliding rail;The front apron and sliding block
Between be connected by flexible balance mechanism, be connected by telescoping drive mechanism between the rear baffle and sliding block.
The preceding pitching driving mechanism is identical as rear pitching driving mechanism structure, includes the first piezoelectric actuator, first
Power transmission gasket, first are oriented to quiet cylinder, the dynamic cylinder of the first guiding and the first support spring;Described first, which is oriented to quiet cylinder, passes through on sliding block
Mounting hole is packed in upper end of slide block face vertically, and described first, which is oriented to dynamic cylinder lower end, is plugged in the quiet cylinder of the first guiding, and first is oriented to
Dynamic cylinder is oriented to quiet cylinder relative to first has linear movement degree of freedom;Described first, which is oriented to dynamic cylinder upper end, passes through universal ball end structure
It is connected with cutter holder lower end face of support plate;First piezoelectric actuator is packed in the lowermost end of the quiet cylinder of the first guiding, and described
One power transmission gasket is positioned on the first piezoelectric actuator;First support spring is vertically placed to the quiet cylinder of the first guiding and first leads
Into dynamic cylinder, the first support spring lower end and the first power transmission gasket abutting contact, the first support spring upper end and universal ball end knot
Structure abutting contact;The control terminal of first piezoelectric actuator is connected with machine tool control system.
For the preceding pitching driving mechanism quantity for two, two preceding pitching driving mechanisms are symmetrically distributed in sliding rail both sides;
Pitching driving mechanism is symmetrically distributed in sliding rail both sides after pitching driving mechanism quantity is two, two after described.
The telescoping drive mechanism includes the second piezoelectric actuator, the second power transmission gasket, the quiet cylinder of the second guiding, the second guiding
Dynamic cylinder and the second support spring;Described second, which is oriented to quiet cylinder, is packed in by the installation hole horizontal on rear baffle on the inside of rear baffle
Face, described second, which is oriented to dynamic cylinder one end, is plugged in the quiet cylinder of the second guiding, and second is oriented to the dynamic cylinder other end is fixedly connected with sliding block;Institute
The right end that the second piezoelectric actuator is packed in the quiet cylinder of the second guiding is stated, the second power transmission gasket and the second piezoelectric actuator paste
It is close together;Second support spring is horizontally placed at the quiet cylinder of the second guiding and the second guiding is moved in cylinder, the second support spring one
End and the second power transmission gasket abutting contact, the second support spring other end and sliding block abutting contact;Second piezoelectric actuator
Control terminal be connected with machine tool control system.
The flexible balance mechanism includes that third is oriented to quiet cylinder, third is oriented to and moves cylinder and third support spring;The third
It is oriented to quiet cylinder one end to be fixedly connected with front apron, the third is oriented to dynamic cylinder one end and is plugged in the quiet cylinder of third guiding, and third is oriented to
The dynamic cylinder other end is fixedly connected with sliding block;The third support spring is horizontally placed at third and is oriented in quiet cylinder and the dynamic cylinder of third guiding,
Third support spring one end and front apron abutting contact, the third support spring other end and sliding block abutting contact.
A kind of monocrystal material cutting process uses the monocrystal material and cuts adaptive fine tuning tool rest, including as follows
Step:
Step 1:Surface roughness after default monocrystal material processing, is determined using Molecular Dynamics software and is met
Required average cutting force when the surface roughness;
Step 2:A database is established in machine tool control system, what which was used to obtain in storing step one
Force data is averagely cut, the optimum combination data of tool sharpening anterior angle and Tool in Cutting depth are also stored in the database,
The optimum combination data of each group of tool sharpening anterior angle and Tool in Cutting depth are matched with one group of corresponding average cutting force
Data;
Step 3:Start cutting, is fed back to actual cut force data in machine tool control system by piezoelectric actuator, machine
Bed control system compares actual cut force data with the average cutting force data stored in database, and selects and reality
Corresponding one group of force data of cutting averagely cuts force data;
Step 4:Force data is averagely cut according to this group that machine tool control system is selected, is further recalled average with the group
Cut the optimum combination data of tool sharpening anterior angle and Tool in Cutting depth that force data matches;
Step 5:Machine tool control system is according to the tool sharpening anterior angle recalled and the optimum combination number of Tool in Cutting depth
According to, control signal is sent out to piezoelectric actuator, adjusting component by tool sharpening anterior angle is finely adjusted tool sharpening anterior angle,
Component is adjusted by Tool in Cutting depth to be finely adjusted Tool in Cutting depth, until actual tool sharpening anterior angle and cutter are cut
The data splitting for cutting depth is consistent with the optimum combination data in database.
Beneficial effects of the present invention:
Compared with prior art, the present invention tool sharpening anterior angle and Tool in Cutting depth can be changed simultaneously in process
Degree, cutter need to only carry out clamped one time, avoid the influence to processing efficiency and processing quality, Neng Goujin because of multiple clamping cutter
One step improves the machined surface quality of monocrystal material.
Description of the drawings
Fig. 1 is that a kind of monocrystal material of the present invention cuts the structural schematic diagram of adaptive fine tuning tool rest;
Fig. 2 is A-A sectional views in Fig. 1;
Fig. 3 is B-B sectional views in Fig. 1;
In figure, 1-cutter holder, 2-cutter trip bolts, 3-cutter holder support plates, 4-preceding pitching driving mechanisms bow after 5-
Face upward driving mechanism, 6-pedestals, 7-front aprons, 8-rear baffles, 9-sliding blocks, 10-sliding rails, 11-flexible balance mechanisms, 12-
Telescoping drive mechanism, 13-cutters, the 14-the first piezoelectric actuator, the 15-the first power transmission gasket, 16-the first is oriented to quiet cylinder,
The dynamic cylinder of 17-the first guiding, the 18-the first support spring, 19-universal ball end structures, the 20-the second piezoelectric actuator, 21-the
Two power transmission gaskets, 22-the second is oriented to quiet cylinder, and 23-the second is oriented to dynamic cylinder, and the 24-the second support spring, 25-thirds are oriented to quiet
Cylinder, 26-thirds, which are oriented to, moves cylinder, 27-third support springs.
Specific implementation mode
The present invention is described in further detail in the following with reference to the drawings and specific embodiments.
As shown in Figures 1 to 3, a kind of monocrystal material cuts adaptive fine tuning tool rest, including cutter holder 1, cutter trip bolt 2,
Cutter holder support plate 3, tool sharpening anterior angle adjustment component and Tool in Cutting depth adjust component;The tool sharpening anterior angle adjustment group
Part includes preceding pitching driving mechanism 4 and rear pitching driving mechanism 5;The Tool in Cutting depth adjustment component includes pedestal 6, front
Plate 7, rear baffle 8, sliding block 9, sliding rail 10, flexible balance mechanism 11 and telescoping drive mechanism 12;The cutter holder 1 is packed in cutter holder branch
On fagging 3, cutter 13 is fixedly connected by cutter trip bolt 2 with cutter holder 1;The cutter holder support plate 3 is driven by preceding pitching
Mechanism 4 and rear pitching driving mechanism 5 are connected with sliding block 9, and cutter holder support plate 3 is located at 9 top of sliding block;The front apron 7, after
Baffle 8 and sliding rail 10 are fixed on pedestal 6, sliding rail 10 between front apron 7 and rear baffle 8, and sliding rail 10 perpendicular to
Front apron 7 and rear baffle 8;The sliding block 9 is mounted on sliding rail 10, and sliding block 9 has linear movement degree of freedom relative to sliding rail 10;
It is connected by flexible balance mechanism 11 between the front apron 7 and sliding block 9, by flexible between the rear baffle 8 and sliding block 9
Driving mechanism 12 is connected.
The preceding pitching driving mechanism 4 is identical as rear 5 structure of pitching driving mechanism, include the first piezoelectric actuator 14,
First power transmission gasket 15, first is oriented to quiet cylinder 16, first and is oriented to 17 and first support spring 18 of dynamic cylinder;Described first is oriented to quiet cylinder
16 are packed in 9 upper surface of sliding block vertically by the mounting hole on sliding block 9, and dynamic 17 lower end of cylinder of the first guiding is plugged in first and leads
Into quiet cylinder 16, first is oriented to dynamic cylinder 17 is oriented to quiet cylinder 16 relative to first has linear movement degree of freedom;Described first is oriented to
Dynamic 17 upper end of cylinder is connected by universal ball end structure 19 with 3 lower face of cutter holder support plate;First piezoelectric actuator 14 is solid
The lowermost end for being oriented to quiet cylinder 16 mounted in first, the first power transmission gasket 15 are positioned on the first piezoelectric actuator 14;Described
One support spring 18 is vertically placed to the quiet cylinder 16 and first of the first guiding and is oriented in dynamic cylinder 17,18 lower end of the first support spring and first
15 abutting contact of power transmission gasket, 18 upper end of the first support spring and 19 abutting contact of universal ball end structure;First piezoelectricity drives
The control terminal of dynamic device 14 is connected with machine tool control system.
For preceding 4 quantity of pitching driving mechanism for two, two preceding pitching driving mechanisms 4 are symmetrically distributed in 10 liang of sliding rail
Side;Pitching driving mechanism 5 is symmetrically distributed in 10 both sides of sliding rail after 5 quantity of pitching driving mechanism is two, two after described.
The telescoping drive mechanism 12 include the second piezoelectric actuator 20, the second power transmission gasket 21, second be oriented to quiet cylinder 22,
Second is oriented to 23 and second support spring 24 of dynamic cylinder;Described second is oriented to quiet cylinder 22 is consolidated by the installation hole horizontal on rear baffle 8
Mounted in 8 medial surface of rear baffle, described second is oriented to and moves 23 one end of cylinder and be plugged in the quiet cylinder of the second guiding 22, and second is oriented to and moves cylinder 23
The other end is fixedly connected with sliding block 9;Second piezoelectric actuator 20 is packed in the right end of the quiet cylinder of the second guiding 22, and described second
Power transmission gasket 21 is sticked together with the second piezoelectric actuator 20;Second support spring 24 is horizontally placed at the quiet cylinder of the second guiding
It 22 and second is oriented to and moves in cylinder 23,24 one end of the second support spring and 21 abutting contact of the second power transmission gasket, the second support spring
24 other ends and 9 abutting contact of sliding block;The control terminal of second piezoelectric actuator 20 is connected with machine tool control system.
The flexible balance mechanism 11 includes that third is oriented to quiet cylinder 25, third is oriented to and moves cylinder 26 and third support spring 27;
The third is oriented to quiet 25 one end of cylinder and is fixedly connected with front apron 7, and it is quiet that described dynamic 26 one end of cylinder of third guiding is plugged in third guiding
In cylinder 25, third is oriented to dynamic 26 other end of cylinder and is fixedly connected with sliding block 9;It is quiet that the third support spring 27 is horizontally placed at third guiding
Cylinder 25 and third, which are oriented to, to be moved in cylinder 26, and 27 one end of third support spring and 7 abutting contact of front apron, third support spring 27 are another
End and 9 abutting contact of sliding block.
A kind of monocrystal material cutting process uses the monocrystal material and cuts adaptive fine tuning tool rest, including as follows
Step:
Step 1:Surface roughness after default monocrystal material processing, is determined using Molecular Dynamics software and is met
Required average cutting force when the surface roughness;
Step 2:A database is established in machine tool control system, what which was used to obtain in storing step one
Force data is averagely cut, the optimum combination data of tool sharpening anterior angle and Tool in Cutting depth are also stored in the database,
The optimum combination data of each group of tool sharpening anterior angle and Tool in Cutting depth are matched with one group of corresponding average cutting force
Data;
Step 3:Start cutting, is fed back to actual cut force data in machine tool control system by piezoelectric actuator, machine
Bed control system compares actual cut force data with the average cutting force data stored in database, and selects and reality
Corresponding one group of force data of cutting averagely cuts force data;
Step 4:Force data is averagely cut according to this group that machine tool control system is selected, is further recalled average with the group
Cut the optimum combination data of tool sharpening anterior angle and Tool in Cutting depth that force data matches;
Step 5:Machine tool control system is according to the tool sharpening anterior angle recalled and the optimum combination number of Tool in Cutting depth
According to, control signal is sent out to piezoelectric actuator, adjusting component by tool sharpening anterior angle is finely adjusted tool sharpening anterior angle,
Component is adjusted by Tool in Cutting depth to be finely adjusted Tool in Cutting depth, until actual tool sharpening anterior angle and cutter are cut
The data splitting for cutting depth is consistent with the optimum combination data in database.
Below in conjunction with the detailed trim process of description of the drawings tool sharpening anterior angle and Tool in Cutting depth.
When needing to increase tool sharpening anterior angle, preceding pitching driving mechanism 4 acts, and then pitching driving mechanism 5 is failure to actuate.
The first piezoelectric actuator 14 in preceding pitching driving mechanism 4 can make after being connected to the control signal that machine tool control system is sent out
Piezoelectric ceramics in one piezoelectric actuator 14 generates radial extent, and then pushes up the first support by the first power transmission gasket 15
Spring 18, while cutter holder support plate 3 being made to rotate and face upward around universal ball end structure 19, eventually by facing upward for cutter holder support plate 3
Realize that the fine tuning of the processing anterior angle of cutter 13 increases.
When needing to reduce tool sharpening anterior angle, preceding pitching driving mechanism 4 is failure to actuate, and then pitching driving mechanism 5 acts.
The first piezoelectric actuator 14 in pitching driving mechanism 5 can make after being connected to the control signal that machine tool control system is sent out afterwards
Piezoelectric ceramics in one piezoelectric actuator 14 generates radial extent, and then pushes up the first support by the first power transmission gasket 15
Spring 18, while making cutter holder support plate 3 around the rotation of universal ball end structure 19 and nutation, eventually by the nutation of cutter holder support plate 3
Realize that the fine tuning of the processing anterior angle of cutter 13 reduces.
When needing to increase Tool in Cutting depth, telescoping drive mechanism 12 acts.The second pressure in telescoping drive mechanism 12
Electric drive 20 can make the piezoelectric ceramics in the second piezoelectric actuator 20 after being connected to the control signal that machine tool control system is sent out
Radial extent is generated, and then the second support spring 24 is pushed to the left by the second power transmission gasket 21, at this time the second support spring 24
Synchronous compression is realized with third support spring 27, while sliding block 9 being made to be moved to the left along sliding rail 10, passes through the mobile synchronization of sliding block 9
Cutter holder support plate 3 thereon is driven to move, eventually by the fine tuning for moving to left the cutting depth for realizing cutter 13 of cutter holder support plate 3
Increase.
When needing to reduce Tool in Cutting depth, telescoping drive mechanism 12 acts.The second pressure in telescoping drive mechanism 12
Electric drive 20 can make the piezoelectric ceramics in the second piezoelectric actuator 20 after being connected to the control signal that machine tool control system is sent out
Radial retraction is generated, at this time the elongation synchronous with the realization of third support spring 27 of the second support spring 24, while making sliding block 9 along sliding rail
10 move right, and are moved by the dynamic cutter holder support plate 3 thereon of movement synchronous belt of sliding block 9, eventually by cutter holder support plate 3
The fine tuning for moving to right the cutting depth for realizing cutter 13 reduces.
Scheme in embodiment be not to limit the scope of patent protection of the present invention, it is all without departing from carried out by the present invention etc.
Effect implements or change, is both contained in the scope of the claims of this case.
Claims (6)
1. a kind of monocrystal material cuts adaptive fine tuning tool rest, it is characterised in that:Including cutter holder, cutter trip bolt, cutter holder branch
Fagging, tool sharpening anterior angle adjustment component and Tool in Cutting depth adjust component;The tool sharpening anterior angle adjusts component
Preceding pitching driving mechanism and rear pitching driving mechanism;The Tool in Cutting depth adjustment component includes pedestal, front apron, rear gear
Plate, sliding block, sliding rail, flexible balance mechanism and telescoping drive mechanism;The cutter holder is packed in cutter holder support plate, and cutter passes through knife
Tool trip bolt is fixedly connected with cutter holder;The cutter holder support plate passes through preceding pitching driving mechanism and rear pitching driving mechanism and cunning
Block is connected, and cutter holder support plate is located above sliding block;The front apron, rear baffle and sliding rail are fixed on pedestal, sliding
Rail is between front apron and rear baffle, and sliding rail is perpendicular to front apron and rear baffle;The sliding block is mounted on sliding rail, sliding block
There is linear movement degree of freedom relative to sliding rail;It is connected by flexible balance mechanism between the front apron and sliding block, it is described
It is connected by telescoping drive mechanism between rear baffle and sliding block.
2. a kind of monocrystal material according to claim 1 cuts adaptive fine tuning tool rest, it is characterised in that:The preceding pitching
Driving mechanism is identical as rear pitching driving mechanism structure, is oriented to including the first piezoelectric actuator, the first power transmission gasket, first quiet
Cylinder, first, which are oriented to, moves cylinder and the first support spring;Described first is oriented to quiet cylinder is packed in cunning vertically by the mounting hole on sliding block
Block upper surface, described first, which is oriented to dynamic cylinder lower end, is plugged in the quiet cylinder of the first guiding, and first is oriented to dynamic cylinder is oriented to relative to first
Quiet cylinder has linear movement degree of freedom;Described first, which is oriented to dynamic cylinder upper end, passes through universal ball end structure and cutter holder lower end face of support plate
It is connected;First piezoelectric actuator is packed in the lowermost end of the quiet cylinder of the first guiding, and the first power transmission gasket is positioned over
On one piezoelectric actuator;First support spring is vertically placed to the quiet cylinder of the first guiding and the first guiding is moved in cylinder, the first support
Lower spring end and the first power transmission gasket abutting contact, the first support spring upper end and universal ball end structure abutting contact;Described
The control terminal of one piezoelectric actuator is connected with machine tool control system.
3. a kind of monocrystal material according to claim 2 cuts adaptive fine tuning tool rest, it is characterised in that:The preceding pitching
For driving mechanism quantity for two, two preceding pitching driving mechanisms are symmetrically distributed in sliding rail both sides;Pitching driving mechanism after described
Pitching driving mechanism is symmetrically distributed in sliding rail both sides after quantity is two, two.
4. a kind of monocrystal material according to claim 1 cuts adaptive fine tuning tool rest, it is characterised in that:The flexible drive
Motivation structure includes the second piezoelectric actuator, the second power transmission gasket, the quiet cylinder of the second guiding, the dynamic cylinder of the second guiding and the second support bullet
Spring;Described second is oriented to quiet cylinder is packed in rear baffle medial surface by the installation hole horizontal on rear baffle, and second guiding is dynamic
Cylinder one end is plugged in the quiet cylinder of the second guiding, and second is oriented to the dynamic cylinder other end is fixedly connected with sliding block;Second piezoelectric actuator
It is packed in the right end of the quiet cylinder of the second guiding, the second power transmission gasket is sticked together with the second piezoelectric actuator;Described
Two support springs are horizontally placed at the quiet cylinder of the second guiding and the second guiding is moved in cylinder, second support spring one end and the second power transmission gasket
Abutting contact, the second support spring other end and sliding block abutting contact;The control terminal of second piezoelectric actuator and lathe control
System processed is connected.
5. a kind of monocrystal material according to claim 1 cuts adaptive fine tuning tool rest, it is characterised in that:It is described flexible flat
Weighing apparatus mechanism includes that third is oriented to quiet cylinder, third is oriented to and moves cylinder and third support spring;The third is oriented to quiet cylinder one end and front
Plate is fixedly connected with, and the third is oriented to dynamic cylinder one end and is plugged in the quiet cylinder of third guiding, and third, which is oriented to, moves the cylinder other end and sliding block phase
It is connected;The third support spring is horizontally placed at that third is oriented to quiet cylinder and third is oriented to and moves in cylinder, third support spring one end with
Front apron abutting contact, the third support spring other end and sliding block abutting contact.
6. a kind of monocrystal material cutting process uses monocrystal material described in claim 1 and cuts adaptive fine tuning tool rest,
It is characterized in that including the following steps:
Step 1:Surface roughness after default monocrystal material processing meets the table using the determination of Molecular Dynamics software
Required average cutting force when surface roughness;
Step 2:A database is established in machine tool control system, what which was used to obtain in storing step one is averaged
Force data is cut, the optimum combination data of tool sharpening anterior angle and Tool in Cutting depth are also stored in the database, it is each
The optimum combination data of group tool sharpening anterior angle and Tool in Cutting depth are matched with one group and corresponding averagely cut force data;
Step 3:Start cutting, is fed back to actual cut force data in machine tool control system by piezoelectric actuator, lathe control
System processed compares actual cut force data with the average cutting force data stored in database, and selects and actual cut
Corresponding one group of force data averagely cuts force data;
Step 4:Force data is averagely cut according to this group that machine tool control system is selected, further recalls and is averagely cut with the group
The optimum combination data for the tool sharpening anterior angle and Tool in Cutting depth that force data matches;
Step 5:Machine tool control system according to the tool sharpening anterior angle recalled and the optimum combination data of Tool in Cutting depth, to
Piezoelectric actuator sends out control signal, and adjusting component by tool sharpening anterior angle is finely adjusted tool sharpening anterior angle, passes through
Tool in Cutting depth adjustment component is finely adjusted Tool in Cutting depth, until actual tool sharpening anterior angle and Tool in Cutting are deep
The data splitting of degree is consistent with the optimum combination data in database.
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CN110142089A (en) * | 2019-06-25 | 2019-08-20 | 绍兴文理学院 | A kind of high-pressure roller mill of good fixing effect |
CN110142089B (en) * | 2019-06-25 | 2021-09-28 | 绍兴文理学院 | Fixed effectual high pressure grinding roller |
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