CN108231521B - A kind of quartz barrel sealing structure for low pressure radio frequency discharge - Google Patents
A kind of quartz barrel sealing structure for low pressure radio frequency discharge Download PDFInfo
- Publication number
- CN108231521B CN108231521B CN201810005112.4A CN201810005112A CN108231521B CN 108231521 B CN108231521 B CN 108231521B CN 201810005112 A CN201810005112 A CN 201810005112A CN 108231521 B CN108231521 B CN 108231521B
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- metal
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- quartz
- quartz barrel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/327—Arrangements for generating the plasma
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Abstract
The invention discloses a kind of quartz barrel sealing structures for low pressure radio frequency discharge, including quartz barrel, metal vacuum room cover plate and metal sealing top plate, metal vacuum room cover plate is equipped with the first groove, metal sealing top plate is equipped with the second groove, one end of quartz barrel is inserted in the first groove, the other end of quartz barrel is inserted in the second groove, a rectangular seal is respectively equipped between the end face of quartz barrel and the first groove and the second groove, the both ends of quartz barrel are respectively equipped with an O-ring seals, O-ring seals pass through a clamping portion respectively and are against on the end face of metal vacuum room cover plate or metal sealing top plate, coolant liquid loop structure is equipped in metal vacuum room cover plate and metal sealing top plate, coolant liquid loop structure can cool down the end that quartz barrel is inserted into the first groove and the second groove.The continuous steady-state operation of device when high power RF electric discharge may be implemented in sealing structure of the invention.
Description
Technical field
The present invention relates to sealing structure technical fields, seal more particularly to a kind of quartz barrel for low pressure radio frequency discharge
Structure.
Background technique
Cylinder coil low pressure it is radio frequency inductive coupled electric discharge it is very widely used, as polysilicon membrane preparation, radio-frequency ion source,
Radio frequency discharge neutral beam injection etc..In the radio frequency inductive coupled electric discharge of cylinder coil low pressure, medium bucket must be used, as etc.
The generation area of gas ions.And medium bucket is usually to use quartz material or ceramic material.However for quartz barrel and metal material
Vacuum seal structure since the coefficient of thermal expansion and contraction of metal material and quartz material is different, therefore cannot be sintered together progress
Vacuum sealing.Currently used sealing structure is exactly to use O-ring seals, by cutting ferrule compress O-ring seals in metal covering and
It is sealed on the outside of quartz barrel.
The quartz barrel sealing structure of traditional low pressure radio frequency discharge is as shown in Figure 2: being welded with and has on stainless steel chamber 1
The cylinder 2 of screw thread, quartz barrel 6 is inserted into inside cylinder 2, and the screw thread of 2 outside of cylinder is connected with cutting ferrule nut 3 by screw thread.Its
In metallic cylinder 2 above 1 top on the inside of have chamfering.By rotating cutting ferrule nut 3, drives chuck 5 to move up and down and squeeze O shape
Sealing ring 4 and the outer wall of quartz barrel 6 fit closely, to reach vacuum-packed requirement (vacuum degree about 10-3Pa)。
This sealing structure is for low-power radio frequency electric discharge, and the temperature of quartz barrel is at 300 DEG C hereinafter, in O-ring seals
Temperature resistant range within will not be burned.But in high-power (> 2kW) radio frequency discharge, the plasma temperature of generation exists
1000 DEG C or so, the temperature of quartz barrel at this time is also close to this temperature, and the heat resisting temperature of heat-resisting O-ring seals also just exists
300 DEG C or so, thus O-ring seals quickly by can the quartz barrel of high fever bake bad, lose the effect of sealing.
Summary of the invention
It is above-mentioned existing to solve the object of the present invention is to provide a kind of quartz barrel sealing structure for low pressure radio frequency discharge
Technology there are the problem of, the both ends of quartz barrel cool down when by discharging high power RF, to protect sealing ring will not be by
It bakes bad, and secondary seal structure is set, the continuous steady-state operation of device when realizing high power RF electric discharge.
To achieve the above object, the present invention provides following schemes:
The present invention provides a kind of quartz barrel sealing structures for low pressure radio frequency discharge, including quartz barrel, metal vacuum
Room cover plate and metal sealing top plate, the metal vacuum room cover plate are equipped with the first groove, and the metal sealing top plate is equipped with
Second groove, one end of the quartz barrel are inserted in first groove, and it is recessed that the other end of the quartz barrel is inserted in described second
In slot, a rectangular seal, institute are respectively equipped between the end face of the quartz barrel and first groove and second groove
The both ends for stating quartz barrel are respectively equipped with an O-ring seals, and the O-ring seals pass through a clamping portion respectively, and to be against the metal true
On the end face of empty room cover board or the metal sealing top plate, it is all provided in the metal vacuum room cover plate and the metal sealing top plate
There is a coolant liquid loop structure, the coolant liquid loop structure can cool down the quartz barrel and be inserted into first groove and described
End in second groove.
Preferably, the coolant liquid loop structure includes inlet, circulation pipe and liquid outlet, the metal vacuum room cover plate
It is cavity structure with the metal sealing top plate, and is respectively equipped with an inlet and the liquid outlet, the circulation pipe
One end is connected to the inlet, and there are two branch pipe, the end difference of two branch pipes for the other end connection of the circulation pipe
It extends in first groove or the cavity of second groove two sides.
Preferably, the coolant liquid loop structure includes inlet, runner and liquid outlet, the metal vacuum room cover plate and
An inlet and the liquid outlet are respectively equipped on the metal sealing top plate, the runner is provided with the metal vacuum
Inside room cover plate and the metal sealing top plate, one end of the runner is connected to the inlet, the other end of the runner
It is connected to the liquid outlet, the runner passes through the two sides of first groove or second groove.
Preferably, the inlet and the liquid outlet are communicated with cooling water radiator or tank for coolant, institute by pipeline
It states the pipeline that inlet is connected with the cooling water radiator or the tank for coolant and is equipped with circulating pump.
Preferably, the clamping portion includes sealing flange and sealing snap-gauge, and the sealing flange passes through bolt and the gold
Belong to vacuum chamber cover board or metal sealing top plate connection, the sealing snap-gauge are set in the quartz barrel, and by described close
Flange clamping is sealed, is equipped with coolant liquid loop structure in the sealing snap-gauge.
Preferably, the section of the sealing snap-gauge and the sealing flange is in " L " type convenient for clamping.
Preferably, the end that the metal vacuum room cover plate or the metal sealing top plate are in contact with the O-ring seals
Chamfering is equipped on the inside of face.
Preferably, the O-ring seals and the rectangular seal are made of heat resistant rubber.
Preferably, vacuumize process, the self-suction of vacuum make the quartz barrel and institute before electric discharge inside the quartz barrel
Rectangular seal is stated to fit closely and seal with the metal vacuum room cover plate and the metal sealing top plate respectively.
Preferably, the length that the quartz barrel is inserted into first groove and second groove is at least 20cm.
The present invention achieves following technical effect compared with the existing technology:
Rectangular seal and O-ring seals of the invention realizes the secondary seal to quartz barrel, and rectangular seal passes through
Self-suction and quartz barrel, the metal vacuum room cover plate and metal sealing top plate of vacuum keep palette, and it is true to can be realized background
Reciprocal of duty cycle is 10-4Pa.Circulate coolant liquid in coolant liquid loop structure in metal vacuum room cover plate and metal sealing top plate of the present invention,
Coolant liquid can cooling high power low pressure radio frequency discharge when metal vacuum room cover plate and metal sealing top plate, thus reduce be inserted into
The temperature rise of quartz barrel, protects rectangular seal and O-ring seals not to be scorched, has reached Gao Gong in first groove and the second groove
Device when rate radio frequency discharge can continuous steady-state operation purpose.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is structural schematic diagram of the present invention for the quartz barrel sealing structure of low pressure radio frequency discharge；
Fig. 2 is the structural schematic diagram of the quartz barrel sealing structure of traditional low pressure radio frequency discharge；
In Fig. 1: 1- quartz barrel, 2- metal vacuum room cover plate, 3- metal sealing top plate, the first groove of 4-, the second groove of 5-,
6- rectangular seal, 7-O shape sealing ring, 8- inlet, 9- circulation pipe, 10- liquid outlet, 11- branch pipe, 12- sealing flange, 13-
Seal snap-gauge.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It is above-mentioned existing to solve the object of the present invention is to provide a kind of quartz barrel sealing structure for low pressure radio frequency discharge
Technology there are the problem of, the both ends of quartz barrel cool down when by discharging high power RF, to protect sealing ring will not be by
It bakes bad, and secondary seal structure is set, the continuous steady-state operation of device when realizing high power RF electric discharge.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
A kind of quartz barrel sealing structure for low pressure radio frequency discharge, including quartz are present embodiments provided as shown in Figure 1:
Bucket 1, metal vacuum room cover plate 2 and metal sealing top plate 3.
Metal vacuum room cover plate 2 is equipped with the first groove 4, and metal sealing top plate 3 is equipped with the second groove 5, quartz barrel 1
One end is inserted in the first groove 4, and the other end of quartz barrel 1 is inserted in the second groove 5, metal vacuum room cover plate 2 and metal sealing
Coolant liquid loop structure is equipped in top plate 3, coolant liquid loop structure can cool down quartz barrel 1 and be inserted into the first groove 4 and
End in two grooves 5.Length in first groove of the insertion of quartz barrel 14 and the second groove 5 of insertion is at least 20cm, first is that being
Connective stability is improved, second is that reducing its temperature rise in order to which the end of quartz barrel 1 can be fully cooled.
Specifically, the coolant liquid loop structure of metal vacuum room cover plate 2 and metal sealing top plate 3 includes inlet 8, circulation
Pipe 9 and liquid outlet 10, metal vacuum room cover plate 2 and metal sealing top plate 3 are cavity structure, and are respectively equipped with 8 He of an inlet
One end of liquid outlet 10, circulation pipe 9 is connected to inlet 8, and the other end of circulation pipe 9 is connected to there are two branch pipe 11, branch pipe 11
End extends respectively in the cavity of 5 two sides of the first groove 4 or the second groove.
Generally, inlet 8 is connected to liquid feed device, and liquid outlet 10 is connected to recyclable device；Preferably, inlet 8 and out liquid
Mouth 10 is communicated with cooling water radiator or tank for coolant by pipeline, and inlet 8 is connected with cooling water radiator or tank for coolant
Logical pipeline is equipped with circulating pump, it can be achieved that the recycling of coolant liquid, reduces the waste of coolant liquid.
A rectangular seal 6, rectangular seal are respectively equipped between the end face of quartz barrel 1 and the first groove 4 and the second groove 5
Circle 6 is preferably made of heat resistant rubber.Vacuumize process can all be passed through inside quartz barrel 1 before electric discharge, and the self-suction of vacuum is then
Quartz barrel 1 and rectangular seal 6 can be made to fit closely and seal with metal vacuum room cover plate 2 and metal sealing top plate 3 respectively.
The both ends of quartz barrel 1 are respectively equipped with an O-ring seals 7, and O-ring seals 7 are preferably made of heat resistant rubber.O shape is close
Seal 7 is against on the end face of metal vacuum room cover plate 2 or metal sealing top plate 3 respectively by a clamping portion, metal vacuum chamber cap
It is preferably provided with chamfering on the inside of the end face that plate 2 or metal sealing top plate 3 are in contact with O-ring seals 7, in order to the sealing of clamping O shape
Circle 7.Rectangular seal 6 and O-ring seals 7 constitute secondary seal structure, it can be achieved that background vacuum is 10-4Pa。
Clamping portion preferably includes sealing flange 12 and sealing snap-gauge 13, and sealing flange 12 passes through bolt and metal vacuum chamber cap
Plate 2 or metal sealing top plate 3 connect, and metal vacuum room cover plate 2 or metal sealing top plate 3 are corresponding with the mounting hole of sealing flange 12
Position offer tapped blind hole.Sealing snap-gauge 13 is set in quartz barrel 1, and by 12 clamping of sealing flange, seals snap-gauge 13
Section with sealing flange 12 is in " L " type convenient for clamping.It seals and is equipped with coolant liquid loop structure in snap-gauge 13.
The coolant liquid loop structure sealed in snap-gauge 13 is similar with metal vacuum room cover plate 2 and metal sealing top plate 3, sealing
Snap-gauge 13 is also cavity structure, and inlet 8 is close to inner wall side, and liquid outlet 10 is close to outer wall side.But due to sealing snap-gauge 13
Small volume, 9 end of circulation pipe are not provided with branch pipe 11, and circulation pipe 9 enters along the inner wall of sealing snap-gauge 13, the end of circulation pipe 9
Horizontal ends are extended to end close to the position of outer wall.
The application method of the present embodiment are as follows: rectangular seal 6 is individually positioned in the bottom of the first groove 4 and the second groove 5
O-ring seals 7, sealing snap-gauge 13 and sealing flange 12 are set in quartz barrel 1, then use bolt by sealing flange by portion
12 connect with metal vacuum room cover plate 2 and metal sealing top plate 3, should be noted during connection sealing flange to be made 12 with
Metal vacuum room cover plate 2 and metal sealing top plate 3 are uniformly bonded.When vacuum chamber, the self-suction of vacuum then can
Quartz barrel 1 and rectangular seal 6 is set to fit closely and seal with metal vacuum room cover plate 2 and metal sealing top plate 3 respectively.Into
Before row radio frequency discharge, it need to make to be full of coolant liquid in sealing structure and form stable water circulation, coolant liquid is chosen as water
Or lotion.When carrying out the radio frequency discharge of high power low pressure, the coolant liquid of circulation can coolant seal snap-gauge 13, metal vacuum room cover plate 2
With metal sealing top plate 3, to reduce the temperature rise for being inserted into quartz barrel 1 in the first groove 4 and the second groove 5, protection rectangle is close
Seal 6 and O-ring seals 7 are not scorched.
The sealing structure of the present embodiment and metal vacuum room are tightly connected, discharging antenna is then wrapped in quartz barrel 1
On, working gas is passed into quartz barrel 1 by the air inlet at 3 middle part of metal sealing top plate then, operating air pressure is maintained to exist
Then high power (> 2kW) radio-frequency power is input on discharging antenna by 0.1-10000Pa, will be generated in quartz barrel 1 etc.
Gas ions.By being not less than 1 hour continuous operation, heat radiation makes the temperature at 1 middle part of quartz barrel be no more than 2000 DEG C, this implementation
The sealing structure of example still is able to that background vacuum is made to reach 10-4Pa.The sealing structure of the present embodiment realizes the continuous steady of device
State operation.
It is to be understood that the concrete form of coolant liquid loop structure is not limited to the form in embodiment 1, it can also be in gold
The inside for belonging to vacuum chamber cover board 2, metal sealing top plate 3 and sealing snap-gauge 13 opens up runner.Concretely metal vacuum room cover plate 2
Coolant liquid loop structure with metal sealing top plate 3 includes inlet 8, runner and liquid outlet 10, metal vacuum room cover plate 2 and gold
Belong to and be respectively equipped with an inlet 8 and liquid outlet 10 on sealing top plate 3, runner is provided with metal vacuum room cover plate 2 and metal sealing
Inside top plate 3, one end of runner is connected to inlet 8, and the other end of runner is connected to liquid outlet 10, and runner passes through the first groove
4 or second groove 5 two sides.And the coolant liquid loop structure for sealing snap-gauge 13 is then similar, inlet 8 is close to inner wall one
Side, runner opens up and enters close to the inner wall of sealing snap-gauge 13, and extends to the outer wall side of horizontal ends, returns further along outer wall side
To liquid outlet 10.
Apply that a specific example illustrates the principle and implementation of the invention in this specification, above embodiments
Explanation be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art,
According to the thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion in this specification
Appearance should not be construed as limiting the invention.
Claims (9)
1. a kind of quartz barrel sealing structure for low pressure radio frequency discharge, it is characterised in that: including quartz barrel, metal vacuum chamber cap
Plate and metal sealing top plate, the metal vacuum room cover plate are equipped with the first groove, and the metal sealing top plate is equipped with second
Groove, one end of the quartz barrel are inserted in first groove, and the other end of the quartz barrel is inserted in second groove,
A rectangular seal, the quartz are respectively equipped between the end face of the quartz barrel and first groove and second groove
The both ends of bucket are respectively equipped with an O-ring seals, and the O-ring seals pass through a clamping portion respectively and are against the metal vacuum chamber cap
On the end face of plate or the metal sealing top plate, cooling is equipped in the metal vacuum room cover plate and the metal sealing top plate
Liquid loop structure, the coolant liquid loop structure can cool down the quartz barrel and be inserted into first groove and described second recessed
End in slot；
The coolant liquid loop structure includes inlet, runner and liquid outlet, and the metal vacuum room cover plate and the metal are close
It binds and is respectively equipped with an inlet and the liquid outlet on plate, the runner is provided with the metal vacuum room cover plate and institute
It states inside metal sealing top plate, one end of the runner is connected to the inlet, the other end of the runner and the liquid out
Mouth connection, the runner pass through the two sides of first groove or second groove.
2. the quartz barrel sealing structure according to claim 1 for low pressure radio frequency discharge, it is characterised in that: the cooling
Liquid loop structure includes inlet, circulation pipe and liquid outlet, and the metal vacuum room cover plate and the metal sealing top plate are sky
Cavity configuration, and it is respectively equipped with an inlet and the liquid outlet, one end of the circulation pipe is connected to the inlet, institute
The other end connection of circulation pipe is stated there are two branch pipe, the end of two branch pipes extends respectively to first groove or described
In the cavity of second groove two sides.
3. being used for the quartz barrel sealing structure of low pressure radio frequency discharge according to claim 2 or 1, it is characterised in that: described
Inlet and the liquid outlet are communicated with cooling water radiator or tank for coolant, the inlet and the coolant liquid by pipeline
The pipeline that radiator or the tank for coolant are connected is equipped with circulating pump.
4. the quartz barrel sealing structure according to claim 1 for low pressure radio frequency discharge, it is characterised in that: the clamping
Portion includes sealing flange and sealing snap-gauge, and the sealing flange is close by bolt and the metal vacuum room cover plate or the metal
The plate that binds connection, the sealing snap-gauge is set in the quartz barrel, and by the sealing flange clamping, in the sealing snap-gauge
Equipped with coolant liquid loop structure.
5. the quartz barrel sealing structure according to claim 4 for low pressure radio frequency discharge, it is characterised in that: the sealing
The section of snap-gauge and the sealing flange is in " L " type convenient for clamping.
6. the quartz barrel sealing structure according to claim 1 for low pressure radio frequency discharge, it is characterised in that: the metal
Chamfering is equipped on the inside of the end face that vacuum chamber cover board or the metal sealing top plate are in contact with the O-ring seals.
7. the quartz barrel sealing structure according to claim 1 for low pressure radio frequency discharge, it is characterised in that: the O shape
Sealing ring and the rectangular seal are made of heat resistant rubber.
8. the quartz barrel sealing structure according to claim 1 for low pressure radio frequency discharge, it is characterised in that: the quartz
The internal vacuumize process before electric discharge of bucket, the self-suction of vacuum make the quartz barrel and the rectangular seal respectively with the gold
Belong to vacuum chamber cover board and the metal sealing top plate is fitted closely and sealed.
9. the quartz barrel sealing structure according to claim 1 for low pressure radio frequency discharge, it is characterised in that: the quartz
The length that bucket is inserted into first groove and second groove is at least 20cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810005112.4A CN108231521B (en) | 2018-01-03 | 2018-01-03 | A kind of quartz barrel sealing structure for low pressure radio frequency discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810005112.4A CN108231521B (en) | 2018-01-03 | 2018-01-03 | A kind of quartz barrel sealing structure for low pressure radio frequency discharge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108231521A CN108231521A (en) | 2018-06-29 |
| CN108231521B true CN108231521B (en) | 2019-09-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810005112.4A Active CN108231521B (en) | 2018-01-03 | 2018-01-03 | A kind of quartz barrel sealing structure for low pressure radio frequency discharge |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102560434A (en) * | 2010-12-13 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Chamber component and metal organic compound chemical vapor deposition equipment with same |
| CN203429246U (en) * | 2013-07-17 | 2014-02-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Leakproof structure, reaction chamber and semiconductor processing equipment |
| CN103628140A (en) * | 2013-10-09 | 2014-03-12 | 东莞市天域半导体科技有限公司 | Dual sealing structure for ultra high temperature double-layer water cooling quartz tube vacuum chamber |
| CN104726843A (en) * | 2013-12-19 | 2015-06-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Transparent window sealing device and reaction chamber |
| CN206516605U (en) * | 2017-01-04 | 2017-09-22 | 广东先导先进材料股份有限公司 | Welded tube card cover device |
-
2018
- 2018-01-03 CN CN201810005112.4A patent/CN108231521B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560434A (en) * | 2010-12-13 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Chamber component and metal organic compound chemical vapor deposition equipment with same |
| CN203429246U (en) * | 2013-07-17 | 2014-02-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Leakproof structure, reaction chamber and semiconductor processing equipment |
| CN103628140A (en) * | 2013-10-09 | 2014-03-12 | 东莞市天域半导体科技有限公司 | Dual sealing structure for ultra high temperature double-layer water cooling quartz tube vacuum chamber |
| CN104726843A (en) * | 2013-12-19 | 2015-06-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Transparent window sealing device and reaction chamber |
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| Publication number | Publication date |
|---|---|
| CN108231521A (en) | 2018-06-29 |
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