CN108204965A - A kind of micro-fluidic light quantum substance finger print target of NERS-SERS substrates - Google Patents
A kind of micro-fluidic light quantum substance finger print target of NERS-SERS substrates Download PDFInfo
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- CN108204965A CN108204965A CN201810328541.5A CN201810328541A CN108204965A CN 108204965 A CN108204965 A CN 108204965A CN 201810328541 A CN201810328541 A CN 201810328541A CN 108204965 A CN108204965 A CN 108204965A
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- 238000004416 surface enhanced Raman spectroscopy Methods 0.000 title claims abstract description 54
- 239000000758 substrate Substances 0.000 title claims abstract description 39
- 239000000126 substance Substances 0.000 title claims abstract description 20
- 239000002082 metal nanoparticle Substances 0.000 claims abstract description 109
- 239000012530 fluid Substances 0.000 claims abstract description 101
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052709 silver Inorganic materials 0.000 claims abstract description 21
- 239000004332 silver Substances 0.000 claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- 239000004065 semiconductor Substances 0.000 claims abstract description 15
- 230000002708 enhancing effect Effects 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims description 22
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000008187 granular material Substances 0.000 claims description 3
- 238000000025 interference lithography Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 2
- 238000001069 Raman spectroscopy Methods 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 239000002360 explosive Substances 0.000 abstract description 5
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 230000005672 electromagnetic field Effects 0.000 description 6
- 239000002105 nanoparticle Substances 0.000 description 6
- 235000013339 cereals Nutrition 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000005068 transpiration Effects 0.000 description 4
- 238000006471 dimerization reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 239000000539 dimer Substances 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 241000282465 Canis Species 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 210000003928 nasal cavity Anatomy 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
Abstract
The present invention provides a kind of micro-fluidic light quantum substance finger print targets of NERS SERS substrates.Its structure includes micro-channel unit and temperature gradient controller；Temperature gradient controller includes two micro temperature sensors, a semiconductor chilling plate and a Miniature heating plate；Micro-channel unit includes metal nanoparticle colloidal sol memory, recover and level Four fluid channel.Gap enhancing Raman scattering is equipped in third level fluid channel to be combined with Surface enhanced Raman scattering（NERS‑SERS）Substrate, NERS SERS substrates are made of sinusoidal pattern silver grating and metal nanoparticle colloidal sol；The setting of semiconductor chilling plate and Miniature heating plate can ensure to generate temperature gradient at micro-channel unit both ends.The present invention have many advantages, such as light, high integration, high sensitivity, can continuously detect, the feature of environmental protection it is good, particularly suitable for portable, the repeatable type, kind and its " Raman fingerprint " for identifying the explosives such as trace ammunition present in air.
Description
Technical field
The present invention relates to light quantum Surface enhanced Raman scattering（SERS）Spectral detection, the detection of micro-fluidic substance and trace are quick-fried
Fried analyte detection technical field, specifically a kind of micro-fluidic light quantum substance finger print target of NERS-SERS substrates.
Background technology
Current surface enhances Raman scattering（Surface Enhanced Raman Scattering, SERS）Micro-fluidic inspection
In survey technology, there are mainly two types of widely used Raman enhancing substrates：One kind is single metal nanoparticle colloidal sol, including Jenner
Rice grain colloidal sol and silver nano-grain colloidal sol；Another kind is nano array structure, including hemisphere nano array structure, columnar nanometer
Array structure etc..The SERS enhancement factors of single metal nanoparticle colloidal sol are generally capable of up to 108, it is sensitive to improve detection
Degree, SERS enhancement factors need to be improved.Nano array structure Raman enhancing substrate have can not realize continuously detect lack
It falls into, the reason is that：Detection molecules are readily adsorbed on nano array structure, are needed to clean substrate after detection is primary, be gone
Except the detection molecules of absorption, in order to avoid next testing result is had an impact.
Invention content
It is an object of the invention to provide a kind of micro-fluidic light quantum substance finger print target of NERS-SERS substrates, to solve
Existing micro-fluidic SERS detection can not continuous sampling detection and the problem of low detectivity.
The object of the present invention is achieved like this：A kind of micro-fluidic light quantum substance finger print target of NERS-SERS substrates, packet
Include micro-channel unit and the temperature gradient controller for controlling micro-channel unit both ends temperature gradient；
The micro-channel unit includes metal nanoparticle colloidal sol memory, first order fluid channel, second level fluid channel, the third level
Fluid channel, fourth stage fluid channel and metal nanoparticle colloidal sol recover；The metal nanoparticle colloidal sol memory is used to deposit
Savings metal nano-particle colloidal sol, the metal nanoparticle colloidal sol recover are used to recycle metal nanoparticle colloidal sol；
The first order fluid channel, the second level fluid channel, the third level fluid channel and the fourth stage fluid channel are sequentially connected,
Metal nanoparticle colloidal sol in the metal nanoparticle colloidal sol memory can be sequentially through the first order fluid channel, described
Enter the metal nanoparticle colloidal sol after two level fluid channel, the third level fluid channel and the fourth stage fluid channel to recycle
Device；The upper surface of the metal nanoparticle colloidal sol recover is in Open architecture；
The second level fluid channel includes at least three capillary fluid channels, and the upper surface of each capillary fluid channel is to open completely
Put structure；The second level fluid channel is used to make in the metal nanoparticle gel absorption condensed air in the micro-channel unit
Trace materials to be detected；
The third level fluid channel is to be integrated with the fluid channel of SERS enhancing detection zones；In the upper surface of the third level fluid channel
There are one laser light incidents and detectable signal acquisition aperture for setting；Lower surface in the third level fluid channel is integrated with periodicity
Sinusoidal pattern silver grating, the sinusoidal pattern silver grating together constitutes with the metal nanoparticle colloidal sol flowed thereon
NERS-SERS substrates；
The temperature gradient controller include the first micro temperature sensor, the second micro temperature sensor, Miniature heating plate and
Semiconductor chilling plate；
First micro temperature sensor is located at the lower section of the metal nanoparticle colloidal sol recover, for detecting the gold
Temperature around metal nano-particle colloidal sol recover；Second micro temperature sensor is located at the metal nanoparticle colloidal sol
The lower section of memory, for detecting the temperature around the metal nanoparticle colloidal sol memory；
The Miniature heating plate is located at the lower section of first micro temperature sensor, molten for increasing the metal nanoparticle
Temperature around glue recover；The semiconductor chilling plate is located at the lower section of second micro temperature sensor, for reducing
Temperature around the metal nanoparticle colloidal sol memory.
The sinusoidal pattern silver grating is process by laser interference lithography and physical gas-phase deposition.It is described just
The period of chordwise silver grating be 400nm~1000nm, sinusoidal pattern amplitude be 10nm~100nm, grating silver thickness for 50nm~
200nm。
The shape of the metal nanoparticle colloidal sol flowed in the micro-channel unit is spherical shape, spheric granules it is a diameter of
50nm~200nm.
The metal nanoparticle colloidal sol memory and the metal nanoparticle colloidal sol recover are the appearance of cuboid
Device structure；A length of 1000 μm~5000 μm of the metal nanoparticle colloidal sol memory, width are 1000 μm~5000 μm, depth
It is 50 μm~200 μm；A length of 1000 μm~5000 μm of the metal nanoparticle colloidal sol recover, width are 1000 μm~5000
μm, depth is 50 μm~200 μm.
The first order fluid channel and the fourth stage fluid channel are strip channel designs, and cross section is rectangle
It is or round；The length of the first order fluid channel is 1 mm~5mm, and width is 100 μm~500 μm, and depth is 50 μm~200 μ
m；The length of the fourth stage fluid channel is 1 mm~5mm, and width is 100 μm~500 μm, and depth is 50 μm~200 μm.
The width of every capillary fluid channel is 10 μm~30 μm in the second level fluid channel, and length is 1 mm~5mm, deep
Spend is 5 μm~20 μm.
The third level fluid channel is strip channel design；The length of the third level fluid channel is 0.2 mm~2mm,
Width is 100 μm~500 μm, and depth is 5 μm~20 μm.
Lower bottom part 2mm~5mm of first micro temperature sensor away from the metal nanoparticle colloidal sol recover；
Lower bottom part 5mm~15mm of the Miniature heating plate away from the metal nanoparticle colloidal sol recover.
Lower bottom part 2mm~5mm of second micro temperature sensor away from the metal nanoparticle colloidal sol memory；
Lower bottom part 5mm~15mm of metal nanoparticle colloidal sol memory described in the semiconductor refrigerating pitch of fins.
Micro-channel unit in the present invention is bionical canine nasal cavity structure, the present invention can in continuous probe air whether
Containing explosives such as trace ammunitions, and detectivity is high.By controlling micro-channel unit both ends temperature gradient, fluid channel is adjusted
The flowing velocity of metal nanoparticle colloidal sol in unit ensures to integrate dimerization in the fluid channel of SERS enhancing detection zones in the third level
Body has higher concentration, so as to fulfill the effect of NERS-SERS substrates, further improves the sensitivity of SERS detections.Pass through control
Micro-channel unit both ends temperature gradient realizes metal nanoparticle colloidal sol in micro-channel unit using bionic plant transpiration
Continuous renewal flowing, solve the problems, such as current micro-fluidic SERS detection techniques can not continuous sampling quickly detect.Therefore, originally
Invention have many advantages, such as high integration, high sensitivity, can continuous sampling.
Cycle sinusoidal type silver grating in the present invention in NERS-SERS substrates is not easy to adsorb detection molecules, without cleaning just
It can detect again, while control the metal nanoparticle in micro-channel unit molten by the temperature gradient controller in the present invention
The continuous flowing of glue, so as to fulfill can continuously detect.The present invention is by microflow control technique and the organic knot of NERS-SERS detection techniques
It closes, combines the characteristic and advantage of the two, realize the high sensitivity to trace explosive gas, continuous on-line detection.
Description of the drawings
Fig. 1 is a kind of structure diagram of the light quantum substance finger print target that NERS-SERS substrates are micro-fluidic in the present invention,
What is wherein represented in " 1 " i.e. dotted line frame is " micro-channel unit " in the present invention.
Fig. 2 is the second level fluid channel of micro-channel unit in the present invention and the structure diagram of third level fluid channel.
Fig. 3 is the structure diagram of the NERS-SERS substrates of lower surface in third level fluid channel in the present invention.
Fig. 4 is the electromagnetic field intensity distribution schematic diagram between common single gold nano particle colloidal sols.
Fig. 5 is the electromagnetic field intensity distribution signal between the gold nano particle colloidal sols in the present invention in NERS-SERS substrates
Figure.
Fig. 6 is the metal nanoparticle colloidal sol dimer concentration distribution schematic diagram in level Four fluid channel in the present invention.
In figure：1st, micro-channel unit, 2, metal nanoparticle colloidal sol memory, 3, the loading of metal nanoparticle colloidal sol it is logical
Road, 4, first order fluid channel, 5, second level fluid channel, 6, third level fluid channel, 7, laser light incident and detectable signal acquisition aperture,
8th, fourth stage fluid channel, 9, metal nanoparticle colloidal sol recover, the 10, first micro temperature sensor, 11, Miniature heating plate,
12nd, semiconductor chilling plate, the 13, second micro temperature sensor, 14, NERS-SERS substrates, 15, sinusoidal pattern silver grating, 16, gold
Metal nano-particle colloidal sol.
Specific embodiment
As shown in Figure 1, target of the present invention includes micro-channel unit 1 and temperature gradient controller.Micro-channel unit 1 includes gold
Metal nano-particle colloidal sol memory 2, first order fluid channel 4, second level fluid channel 5, third level fluid channel 6, fourth stage fluid channel 8
With metal nanoparticle colloidal sol recover 9.Temperature gradient controller includes the first micro temperature sensor 10, the second Miniature temperature
Sensor 13, Miniature heating plate 11 and semiconductor chilling plate 12.
Metal nanoparticle colloidal sol memory 2 and metal nanoparticle colloidal sol recover 9 are the structure of container of cuboid,
Metal nanoparticle colloidal sol memory 2 is enclosed construction, and the upper surface of metal nanoparticle colloidal sol recover 9 is completely open
Structure, convenient for the generation of transpiration.A length of 1000 μm~5000 μm of metal nanoparticle colloidal sol memory 2, width are 1000 μ
M~5000 μm, depth are 50 μm~200 μm.A length of 1000 μm~5000 μm of metal nanoparticle colloidal sol recover 9, width are
1000 μm~5000 μm, depth is 50 μm~200 μm.
Metal nanoparticle colloidal sol is equipped in the upper surface of metal nanoparticle colloidal sol memory 2 and loads channel 3, and metal is received
Rice grain colloidal sol loading channel 3 for example can be vertical circular tube structure, and metal nanoparticle colloidal sol loading channel 3 is received with metal
The inner cavity of rice grain colloidal sol memory 2 is connected, and loading channel 3 by metal nanoparticle colloidal sol can be molten to metal nanoparticle
Metal nanoparticle colloidal sol is passed through in glue memory 2.
Metal nanoparticle colloidal sol in metal nanoparticle colloidal sol memory 2 can sequentially pass through first order fluid channel 4,
Enter in metal nanoparticle colloidal sol recover 9 after two level fluid channel 5, third level fluid channel 6 and fourth stage fluid channel 8.First
Grade fluid channel 4 is connected with metal nanoparticle colloidal sol memory 2, and fourth stage fluid channel 8 is recycled with metal nanoparticle colloidal sol
Device 9 is connected.First order fluid channel 4 and fourth stage fluid channel 8 are strip channel designs, cross section can be rectangle or
It is round.The length of first order fluid channel 4 is 1 mm~5mm, and width is 100 μm~500 μm, and depth is 50 μm~200 μm.4th
The length of grade fluid channel 8 is 1 mm~5mm, and width is 100 μm~500 μm, and depth is 50 μm~200 μm.
As shown in Fig. 2, second level fluid channel 5 is made of at least three parallel arrangement of capillary fluid channels, each capillary is micro-
Runner upper surface is complete open architecture, and the width of each capillary fluid channel is 10 μm~30 μm, and length is 1 mm~5mm, deep
Spend is 5 μm~20 μm.Second level fluid channel 5 is used to make the metal nanoparticle gel absorption condensed air in micro-channel unit 1
In trace materials to be detected, therefore it is opening fluid channel.
Third level fluid channel 6 is equally strip channel design, and third level fluid channel 6 is to be integrated with SERS enhancing detection zones
Fluid channel, the length of third level fluid channel 6 is 0.2 mm~2mm, and width is 100 μm~500 μm, and depth is 5 μm~20 μm.
In the upper surface of third level fluid channel 6, there are one laser light incident and detectable signal acquisition aperture 7, laser emits signal for setting
It can be irradiated to by the aperture in third level fluid channel 6, Raman spectrometer also can be by the keyhole detection third level fluid channel 6
Raman signal caused by NERS-SERS substrates 14.SERS enhancing detection zone matching laser work wavelength for 470nm,
532nm, 658nm or 785nm.
With reference to Fig. 3, the lower surface in third level fluid channel 6 is integrated with periodic sinusoidal pattern silver grating 15, sinusoidal pattern
Silver-colored grating 15 together forms NERS (Nanogap Enhanced Raman with the metal nanoparticle colloidal sol 16 flowed thereon
Scattering)-SERS substrates 14, NERS-SERS substrates 14 are gap enhancing Raman scattering and Surface enhanced Raman scattering
With reference to substrate.Sinusoidal pattern silver grating 15 is by laser interference lithography and physical gas-phase deposition process to third
Lower surface in grade fluid channel 6.The period of sinusoidal pattern silver grating 15 is 400 nm~1000nm, and sinusoidal pattern amplitude is 10 nm
~100nm, silver-colored grating thicknesses of layers are 50 nm~200nm.Metal nanoparticle colloidal sol 16 flows in entire micro-channel unit 1
It is dynamic, it can be silver or gold nano particle colloidal sols, for adsorbing the trace materials molecule to be detected in air, and form dimer.
The shape of metal nanoparticle colloidal sol 16 is spherical, a diameter of 50~200nm of spheric granules.
As shown in fig. 6, Fig. 6 is the distribution schematic diagram of the metal nanoparticle colloidal sol dimerization bulk concentration in level Four fluid channel,
In figure, the small Regional Representative's concentration of gray value is smaller, and the big Regional Representative's concentration of gray value is larger, it can be seen that micro- from the first order
The metal nanoparticle colloidal sol dimerization bulk concentration of runner to fourth stage fluid channel gradually increases and has reached in third level fluid channel
Larger concentration.
As shown in Figure 4 and Figure 5, by taking gold nano particle colloidal sols as an example, Fig. 4 is between common single gold nano particle colloidal sols
Electromagnetic field intensity is distributed, and Fig. 5 is the electromagnetic field intensity distribution between the gold nano particle colloidal sols in NERS-SERS substrates, it is clear that
The latter is obviously improved than the former electromagnetic field intensity, so the sensitivity of detection can be improved by the present invention.
The present invention is combined using NERS-SERS substrates, i.e. metal nanoparticle colloidal sol with cycle sinusoidal type silver grating, the period
The local plasma that the surface plasmon resonance effect and metal nanoparticle colloidal sol that sinusoidal pattern silver grating is formed are formed is total to
Coupling can occur for effect of shaking, and the local electromagnetic field between metal nanoparticle colloidal sol be made to be further enhanced, SERS
Enhancement factor is up to 109, an order of magnitude is improved compared to existing technologies, so as to improve the sensitivity of SERS detections,
Realize highly sensitive detection.
First micro temperature sensor 10 is located at the lower section of metal nanoparticle colloidal sol recover 9, and the first Miniature temperature passes
Lower bottom part 2mm~5mm of the sensor 10 away from metal nanoparticle colloidal sol recover 9.Miniature heating plate 11 is located at the first miniature temperature
Spend the lower section of sensor 10, lower bottom part 5mm~15mm of the Miniature heating plate 11 away from metal nanoparticle colloidal sol recover 9.It is micro-
The size of type heating plate 11 is millimeter magnitude, and the size of Miniature heating plate 11 is 8 × 8 × 3.5mm in the present embodiment.
Second micro temperature sensor 13 is located at the lower section of metal nanoparticle colloidal sol memory 2, and the second Miniature temperature passes
Lower bottom part 2mm~5mm of the sensor 13 away from metal nanoparticle colloidal sol memory 2.The size of micro temperature sensor is millimeter
Magnitude, the size of the first micro temperature sensor 10 and the second micro temperature sensor 13 is 4 × 4 × 3mm in the present embodiment.
Semiconductor chilling plate 12 is located at the lower section of the second micro temperature sensor 13, and semiconductor chilling plate 12 is away from metal nanoparticle colloidal sol
Lower bottom part 5mm~15mm of memory 2.
Semiconductor chilling plate 12 is for reducing the temperature of 2 peripheral region of metal nanoparticle colloidal sol memory, miniature heating
Piece 11 is used to increase the temperature of 9 peripheral region of metal nanoparticle colloidal sol recover, is surveyed using the first micro temperature sensor 10
The temperature of 9 peripheral region of metal nanoparticle colloidal sol recover is measured, metal nano is measured using the second micro temperature sensor 13
The temperature of 2 peripheral region of particle colloidal sols memory, so as to control the temperature gradient at 1 both ends of micro-channel unit.Utilize transpiration
The flowing velocity of metal nanoparticle colloidal sol 16 in micro-channel unit 1 is adjusted, metal nanoparticle colloidal sol 16 is from metal nano
Grain colloidal sol memory 2 flows to metal nanoparticle colloidal sol recover 9.
The present invention provides one kind to be combined with Raman spectrometer, laser, for detecting trace explosive in air
The micro-fluidic light quantum substance finger print target of NERS-SERS substrates of molecule.The micro-fluidic light quantum substance of NERS-SERS substrates
Fingerprint target includes micro-channel unit and temperature gradient controller；Temperature gradient controller include two micro temperature sensors,
One semiconductor chilling plate and a Miniature heating plate；Micro-channel unit includes metal nanoparticle colloidal sol memory, recover
And level Four fluid channel.NERS-SERS substrates are equipped in third level fluid channel, NERS-SERS substrates are by cycle sinusoidal type silver
Grating and thereon metal nanoparticle colloidal sol composition；The setting of semiconductor chilling plate and Miniature heating plate can ensure micro-
Flow passage unit both ends generate temperature gradient, then go by micro temperature sensor testing result to control required temperature gradient, from
And metal nanoparticle colloidal sol in transpiration driving micro-channel unit is utilized to constantly update flowing.The present invention has light, high
Integrated level high sensitivity, can be detected continuously, the advantages that feature of environmental protection is good, particularly suitable for being deposited in portable, repeatable identification air
The types of the explosives such as trace ammunition, kind and its " Raman fingerprint ".
Claims (10)
1. a kind of micro-fluidic light quantum substance finger print target of NERS-SERS substrates, it is characterized in that, including micro-channel unit and it is used for
Control the temperature gradient controller of micro-channel unit both ends temperature gradient；
The micro-channel unit includes metal nanoparticle colloidal sol memory, first order fluid channel, second level fluid channel, the third level
Fluid channel, fourth stage fluid channel and metal nanoparticle colloidal sol recover；The metal nanoparticle colloidal sol memory is used to deposit
Savings metal nano-particle colloidal sol, the metal nanoparticle colloidal sol recover are used to recycle metal nanoparticle colloidal sol；
The first order fluid channel, the second level fluid channel, the third level fluid channel and the fourth stage fluid channel are sequentially connected,
Metal nanoparticle colloidal sol in the metal nanoparticle colloidal sol memory can be sequentially through the first order fluid channel, described
Enter the metal nanoparticle colloidal sol after two level fluid channel, the third level fluid channel and the fourth stage fluid channel to recycle
Device；The upper surface of the metal nanoparticle colloidal sol recover is in Open architecture；
The second level fluid channel includes at least three capillary fluid channels, and the upper surface of each capillary fluid channel is to open completely
Put structure；The second level fluid channel is used to make in the metal nanoparticle gel absorption condensed air in the micro-channel unit
Trace materials to be detected；
The third level fluid channel is to be integrated with the fluid channel of SERS enhancing detection zones；In the upper surface of the third level fluid channel
There are one laser light incidents and detectable signal acquisition aperture for setting；Lower surface in the third level fluid channel is integrated with periodicity
Sinusoidal pattern silver grating, the sinusoidal pattern silver grating together constitutes with the metal nanoparticle colloidal sol flowed thereon
NERS-SERS substrates；
The temperature gradient controller include the first micro temperature sensor, the second micro temperature sensor, Miniature heating plate and
Semiconductor chilling plate；
First micro temperature sensor is located at the lower section of the metal nanoparticle colloidal sol recover, for detecting the gold
Temperature around metal nano-particle colloidal sol recover；Second micro temperature sensor is located at the metal nanoparticle colloidal sol
The lower section of memory, for detecting the temperature around the metal nanoparticle colloidal sol memory；
The Miniature heating plate is located at the lower section of first micro temperature sensor, molten for increasing the metal nanoparticle
Temperature around glue recover；The semiconductor chilling plate is located at the lower section of second micro temperature sensor, for reducing
Temperature around the metal nanoparticle colloidal sol memory.
2. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
Sinusoidal pattern silver grating is process by laser interference lithography and physical gas-phase deposition.
3. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
The period of sinusoidal pattern silver grating is 400nm~1000nm, and sinusoidal pattern amplitude is 10nm~100nm, and grating silver thickness is 50nm
~200nm.
4. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
The shape of the metal nanoparticle colloidal sol flowed in micro-channel unit is spherical, a diameter of 50nm~200nm of spheric granules.
5. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
Metal nanoparticle colloidal sol memory and the metal nanoparticle colloidal sol recover are the structure of container of cuboid；The gold
A length of 1000 μm~5000 μm of metal nano-particle colloidal sol memory, width are 1000 μm~5000 μm, and depth is 50 μm~200 μ
m；A length of 1000 μm~5000 μm of the metal nanoparticle colloidal sol recover, width are 1000 μm~5000 μm, and depth is 50 μ
M~200 μm.
6. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
First order fluid channel and the fourth stage fluid channel are strip channel designs, and cross section is rectangle or circle；It is described
The length of first order fluid channel is 1 mm~5mm, and width is 100 μm~500 μm, and depth is 50 μm~200 μm；The fourth stage
The length of fluid channel is 1 mm~5mm, and width is 100 μm~500 μm, and depth is 50 μm~200 μm.
7. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
The width of every capillary fluid channel is 10 μm~30 μm in the fluid channel of the second level, and length is 1 mm~5mm, and depth is 5 μm~20 μ
m。
8. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
Third level fluid channel is strip channel design；The length of the third level fluid channel is 0.2 mm~2mm, and width is 100 μm
~500 μm, depth is 5 μm~20 μm.
9. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
Lower bottom part 2mm~5mm of first micro temperature sensor away from the metal nanoparticle colloidal sol recover；The miniature heating
Lower bottom part 5mm~15mm of metal nanoparticle colloidal sol recover described in a pitch of fins.
10. the micro-fluidic light quantum substance finger print target of NERS-SERS substrates according to claim 1, it is characterized in that, it is described
Lower bottom part 2mm~5mm of second micro temperature sensor away from the metal nanoparticle colloidal sol memory；The semiconductor system
Lower bottom part 5mm~15mm of metal nanoparticle colloidal sol memory described in a cold pitch of fins.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019809A1 (en) * | 2018-07-26 | 2020-01-30 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer |
| CN114019762A (en) * | 2021-10-27 | 2022-02-08 | 电子科技大学 | Method for preparing nano array by laser evanescent wave near-field interference quantum lithography |
| CN115753730A (en) * | 2022-11-17 | 2023-03-07 | 成都理工大学 | Trace explosive detection device under multi-environment |
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| US20060034729A1 (en) * | 2004-05-19 | 2006-02-16 | Vladimir Poponin | Optical sensor with layered plasmon structure for enhanced detection of chemical groups by SERS |
| US20100210029A1 (en) * | 2007-04-27 | 2010-08-19 | The Regents Of The University Of California | Device and methods of detection of airborne agents |
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| US20060034729A1 (en) * | 2004-05-19 | 2006-02-16 | Vladimir Poponin | Optical sensor with layered plasmon structure for enhanced detection of chemical groups by SERS |
| US20100210029A1 (en) * | 2007-04-27 | 2010-08-19 | The Regents Of The University Of California | Device and methods of detection of airborne agents |
| US20130140976A1 (en) * | 2010-08-06 | 2013-06-06 | Fujikura Ltd. | Method of manufacturing microfluidic chip, microfluidic chip, and apparatus for generating surface plasmon resonant light |
| CN107075661A (en) * | 2014-09-26 | 2017-08-18 | 韩国机械研究院 | It is formed with substrate of multiple nano gaps and preparation method thereof |
| CN105136769A (en) * | 2015-08-12 | 2015-12-09 | 中国人民解放军总装备部军械技术研究所 | Trace ammunition detector and detection method |
| CN208140585U (en) * | 2018-04-13 | 2018-11-23 | 中国人民解放军63908部队 | A kind of micro-fluidic light quantum substance finger print target of NERS-SERS substrate |
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| WO2020019809A1 (en) * | 2018-07-26 | 2020-01-30 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer |
| US11344884B2 (en) | 2018-07-26 | 2022-05-31 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer |
| CN114019762A (en) * | 2021-10-27 | 2022-02-08 | 电子科技大学 | Method for preparing nano array by laser evanescent wave near-field interference quantum lithography |
| CN115753730A (en) * | 2022-11-17 | 2023-03-07 | 成都理工大学 | Trace explosive detection device under multi-environment |
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