CN108193190A - A kind of vacuum plant - Google Patents
A kind of vacuum plant Download PDFInfo
- Publication number
- CN108193190A CN108193190A CN201711461752.8A CN201711461752A CN108193190A CN 108193190 A CN108193190 A CN 108193190A CN 201711461752 A CN201711461752 A CN 201711461752A CN 108193190 A CN108193190 A CN 108193190A
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- China
- Prior art keywords
- chamber
- door body
- operated valve
- pneumatic operated
- vacuum
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Abstract
The invention discloses a kind of vacuum plant, including：First chamber, first chamber are equipped with first passage mouth；Second chamber, second chamber is equipped with second channel mouth and respectively with first chamber and the third chamber that is connected of second chamber sealing, first passage mouth and second channel mouth with third chamber, are equipped in third chamber respectively and seal door component；Sealing door component includes：The second door body of elevating mechanism, the first door body of the salable first passage mouth being arranged on elevating mechanism and the salable second channel mouth being arranged on elevating mechanism that can be lifted in third chamber, wherein：The controlled sealing first passage mouth of first door body and/or the second door body synchronize controlled sealing second channel mouth.The vacuum plant of the implementation present invention can correspond to and seal corresponding vacuum chamber respectively, the vacuum state for the chamber that is mutually independent of each other, and can improve the operation effectiveness of equipment；Structure is simplified, and for ease of maintenaince and is safeguarded.
Description
Technical field
The present invention relates to the vacuum holdings in display panel manufacturing field more particularly to a kind of manufacturing for display panel
It puts.
Background technology
The prior art is used to be driven the vacuum equipment of glass substrate because structure design is unreasonable, is primarily present following defect：
1st, sealing element is mounted on the cavity inner wall of passway both sides, when replacing it, needs to carry out corresponding chamber
Vacuum breaker operates, and influences the operation effectiveness of complete machine；Meanwhile operating personnel are needed in chamber interior operation, it is less efficient；
When the 2nd, the chamber for being equipped with hermatic door being cleaned and repaired, need the vacuum breaker operation simultaneously of corresponding chamber, operation
Personnel need the operation in the narrow space equipped with hermatic door chamber, and efficiency is low.
3rd, vacuum plant powers off or in the case of the CDA long periods of breaking, vacuum pump and lifting cylinder can not work, sealing
Men Yin dead weights fall and chamber passage are caused to be opened, and lead to corresponding chambers vacuum breaker, and efficiency of answering a pager's call reduces.
Invention content
The technical problems to be solved by the invention are, provide a kind of vacuum plant, and it is corresponding can to correspond to sealing respectively
Vacuum chamber, the vacuum state for the chamber that is independent of each other can improve the operation effectiveness of equipment；Structure is simplified, and for ease of maintenaince and is tieed up
Shield.
In order to solve the above-mentioned technical problem, an embodiment of the present invention provides a kind of vacuum plant, including：First chamber, the
One chamber is equipped with first passage mouth；Second chamber, second chamber be equipped with second channel mouth and respectively with first chamber and second
The third chamber that cavity seal is connected, first passage mouth and second channel mouth with third chamber, are set in third chamber respectively
There is sealing door component；Sealing door component includes：The elevating mechanism that can be lifted in third chamber is arranged on elevating mechanism
Second door body of the first door body of salable first passage mouth and the salable second channel mouth being arranged on elevating mechanism,
In：The controlled sealing first passage mouth of first door body and/or the second door body synchronize controlled sealing second channel mouth.
Wherein, vacuumizing assembly is equipped between third chamber and first chamber, vacuumizing assembly includes：It is connected to the first chamber
The first vacuum pump in room；The vacuum line being connected respectively with the first vacuum pump and third chamber is equipped with first in vacuum line
Pneumatic operated valve is equipped with the second pneumatic operated valve between vacuum pump and the first pneumatic operated valve, third is equipped between the first pneumatic operated valve and third chamber
Pneumatic operated valve.
Wherein, the controlled sealing first passage mouth of the first door body, the first pneumatic operated valve are closed, the second pneumatic operated valve and third pneumatic operated valve
Open, the first vacuum pump, which vacuumizes, makes first chamber keep vacuum state, third chamber with it is external connect and with first chamber shape
Into pressure difference.
Wherein, second chamber the second vacuum pump in succession is equipped with the 4th pneumatic operated valve between the second vacuum pump and second chamber；The
Two chambers also have the pipeline of the 5th pneumatic operated valve in succession.
Wherein, the controlled sealing second channel mouth of the second door body, the 5th pneumatic operated valve are closed, and the 4th pneumatic operated valve is opened, and second is true
Empty pumping vacuum makes second chamber keep vacuum state, and third chamber connects with outside and forms pressure difference with second chamber.
Wherein, the controlled sealing first passage mouth of the first door body and the second door body synchronize controlled sealing second channel mouth；Third
Pneumatic operated valve and the 5th pneumatic operated valve are closed, and the first pneumatic operated valve, the second pneumatic operated valve and the 4th pneumatic operated valve are opened, the first vacuum pump and the
Two vacuum pumps vacuumize respectively makes first chamber, second chamber and third chamber keep vacuum state.
Wherein, the 5th pneumatic operated valve is kept to close, the first pneumatic operated valve, the second pneumatic operated valve and the 4th pneumatic operated valve is closed, the
Three pneumatic operated valves are opened, and first chamber and second chamber keep vacuum state, third chamber with it is external connect and with first chamber and
Second chamber forms pressure difference.
Wherein, it is respectively equipped with sealing ring in the first door body and the second door body.
Wherein, elevating mechanism includes：The guide post being located in third chamber；The mobile bushing being socketed on guide post, first
Body and the second door body are respectively provided at the opposite sides of mobile bushing；And it is located at the outside of third chamber and is connected with mobile bushing
Cylinder, wherein：Cylinder is moved back and forth by indoor first door body of mobile bushing linkage third chamber and the second door body.
Wherein, it the shape of the first door body and the second door body and is adapted, enables with the shape of respective corresponding passway
It is enough when mobile bushing pushes the first door body and the second door body respectively corresponding sealing be pressed on on respective corresponding passway；
Pressure sensor is set respectively in first chamber, second chamber and third chamber.
Implement vacuum plant provided by the present invention, have the advantages that, sealing door component includes：It can be in third
The elevating mechanism that is lifted in chamber, the first door body of the salable first passage mouth being arranged on elevating mechanism and it is arranged on liter
Second door body of the salable second channel mouth on descending mechanism, wherein：The controlled sealing first passage mouth and/or second of first door body
Door body synchronizes controlled sealing second channel mouth, can correspond to the corresponding vacuum chamber of sealing respectively, be mutually independent of each other the true of chamber
Dummy status can improve the operation effectiveness of equipment；Structure is simplified, and for ease of maintenaince and is safeguarded.
Description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention, for those of ordinary skill in the art, without creative efforts, can be with
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the longitudinal plane structure schematic diagram of vacuum plant embodiment one of the present invention.
Fig. 2 is the cross-sectional configuration schematic diagram of the first operating status of vacuum plant embodiment one of the present invention.
Fig. 3 is the cross-sectional configuration schematic diagram of the second operating status of vacuum plant embodiment one of the present invention.
Fig. 4 is the cross-sectional configuration schematic diagram of the third operating status of vacuum plant embodiment one of the present invention.
Fig. 5 is the cross-sectional configuration schematic diagram of the first job state of vacuum plant embodiment two of the present invention.
Fig. 6 is the cross-sectional configuration schematic diagram of the second job state of vacuum plant embodiment two of the present invention.
Fig. 7 is the cross-sectional configuration schematic diagram of the third job state of vacuum plant embodiment two of the present invention.
Fig. 8 is the cross-sectional configuration schematic diagram of the 4th job state of vacuum plant embodiment two of the present invention.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without creative efforts
Embodiment shall fall within the protection scope of the present invention.
It is the embodiment one of vacuum plant of the present invention referring to Fig. 1-Fig. 4.
Vacuum plant in the present embodiment is mainly used in needing carrying out glass substrate in different vacuum chambers defeated
In the equipment of fortune, such as：Glass substrate in the present embodiment is sent to second chamber 2, then by second chamber 2 by first chamber 1
Be back to first chamber 1, need to keep the vacuum tightness of respective chamber in the process, so as to fulfill different preparations into
Journey.
Vacuum plant in the present embodiment includes：First chamber 1, first chamber 1 are equipped with first passage mouth 11；Second chamber
2, second chamber 2 is equipped with second channel mouth 21 and seals the third chamber being connected with first chamber 1 and second chamber 2 respectively
3, first passage mouth 11 and second channel mouth 1 connect respectively with third chamber 3, and sealing door component 4 is equipped in third chamber 3；It is close
Closure door component 4 includes：The elevating mechanism 41 that can be lifted in third chamber, salable first be arranged on elevating mechanism 41
Second door body 43 of the first door body 42 of passway 11 and the salable second channel mouth 21 being arranged on elevating mechanism 41,
In：First door body, 42 controlled sealing first passage mouth 11 and/or the second door body 43 synchronize controlled sealing second channel mouth 21.
First chamber 1, second chamber 2 and third chamber 3 in the present embodiment are in cubic, 1 He of first chamber respectively
The structure of second chamber 2 is set as symmetrical, and third chamber 3 is sealedly connected between first chamber 1 and second chamber 2 and its volume is omited
Less than first chamber 1,
The position that first passage mouth 11 and second channel mouth 21 are set is opposite and size is identical, rectangular.That is, work as third
When sealing door component 4 in chamber 3 does not implement sealing function, pass through first passage between first chamber 1 and third chamber 3
Mouthfuls 11, it is communicated with each other between third chamber 3 and second chamber 2 by second channel mouth 21, set first passage mouth 11 and the
Another effect of two passways 21 is transmission glass substrate.
Further, sealing door component 4 includes the elevating mechanism 41 that can be lifted in third chamber 3, is arranged on lifting
It first door body 42 of the salable first passage mouth 11 in mechanism 41 and is arranged on elevating mechanism 41 salable second logical
Second door body 43 at road junction 21.
Elevating mechanism 41 includes：The guide post 411 being located in third chamber 3；Be socketed on guide post 411 can be along guide post
The 411 mobile bushings 412 moved up and down, the first door body 42 and the second door body 43 are respectively provided at the opposite of mobile bushing 412
Both sides, the first door body 42 and the second door body 43 can distinguish the controlled fortune for carrying out release or contraction relative to mobile bushing 412
It is dynamic, so realize that the sealing of the first door body 42 is pressed on first passage mouth 11, the sealing of the second door body 43 is pressed on second channel mouth
Operation on 21；And the outside of third chamber 3 and the cylinder 413 being connected with mobile bushing 412 are located at, wherein：Cylinder 413 is logical
It crosses and moves that bushing 412 links the first door body 42 in third chamber 3 and the second door body 43 moves back and forth.
Wherein：It the shape of first door body 42 and the second door body 43 and is adapted with the shape of respective corresponding passway,
Such as：The first door body 42 in the present embodiment is size slightly larger than 11 section of first passage mouth and with certain thickness rectangle
Plate.It designs, makes during cylinder 413 moves up and down with this configuration, it can be by the mobile bushing 412 of promotion so as to link it
On the first door body 42 sealing be pressed on first passage mouth 11, the second door body 43 sealing be pressed on second channel mouth 21.
Preferably, it is respectively equipped with sealing ring 421,431 in the first door body 42 and the second door body 43.It is circular close by section
The effect that seal 421,431 is arranged in door body is：It can keep directly being removed in third chamber 3 and be replaced, also just
On the basis of vacuum breaker does not influence operating efficiency in the first chamber 1 of vacuum plant or second chamber 2, sealing ring is completed
421,431 repairs are safeguarded and are replaced.
In the present embodiment the elevating mechanism 41 of vacuum plant in the specific implementation, when glass substrate is transmitted by first chamber 1
To second chamber 2, cylinder 413 pushes mobile bushing 412 to rise, when the first door body 42 and the second door body 43 rise to and lead to first
When road junction 11 and the horizontal position of second channel mouth 21 flush, the first door body 42 or the second door body 43 are controlled relative to movement respectively
Bushing 412 is horizontal to be released, and the sealing of the first door body 42 is pressed on first passage mouth 11 and is locked after sealing first chamber 1, second
The sealing of body 43 is pressed on second channel mouth 21 and is locked after sealing second chamber 2.Glass substrate is completed after being made accordingly, lifting
Mechanism 41 is realized according to the process of above-mentioned contrary shrinks, and glass substrate is transmitted to first chamber 1 by second chamber 2.
The vacuum plant of above structure can separately or concurrently realize the sealing of first chamber 1 and second chamber 2, during operation
Do not influence vacuum state, lifting means operating efficiency.
Further, as shown in figure 5, the cross-sectional configuration of the first job state for vacuum plant embodiment two of the present invention
Schematic diagram.
Vacuumizing assembly 5 is equipped in the present embodiment between third chamber 3 and first chamber 1, vacuumizing assembly 5 includes：Even
The first vacuum pump 51 being connected in first chamber 1；The vacuum line 52 being connected respectively with the first vacuum pump 51 and third chamber 3,
The first pneumatic operated valve V1 is equipped in vacuum line 52, the second pneumatic operated valve V2 is equipped between the first vacuum pump 51 and the first pneumatic operated valve V1,
Third pneumatic operated valve V3 is equipped between first pneumatic operated valve V1 and third chamber 3.
Second vacuum pump 61 in succession of second chamber 2 is equipped with the 4th pneumatic operated valve between second vacuum pump 61 and second chamber 2
V4；Second chamber 2 also has the pipeline 62 of the 5th pneumatic operated valve V5 in succession.
During implementation, when 42 controlled sealing first passage mouth 11 of the first door body, the first pneumatic operated valve V1 is closed, the second pneumatic operated valve V2
It is opened with third pneumatic operated valve V3, the first vacuum pump 51, which vacuumizes, makes first chamber 1 keep vacuum state, third chamber 3 and outside
It connects and forms certain pressure difference with first chamber 1, prevent the dead weight because of lifting gear from leading to 1 vacuum breaker of first chamber.
Further, as shown in fig. 6, the cross-sectional configuration of the second job state for vacuum plant embodiment two of the present invention
Schematic diagram.
During implementation, 43 controlled sealing second channel mouth 21 of the second door body, the 5th pneumatic operated valve V5 is closed, and the 4th pneumatic operated valve V4 is opened
Open, the second vacuum pump 61, which vacuumizes, makes second chamber 2 keep vacuum state, third chamber 3 with it is external connect and with second chamber 2
Certain pressure difference is formed, prevents the dead weight because of lifting gear from leading to 2 vacuum breaker of second chamber.
Further, as shown in fig. 7, the cross-sectional configuration of the third job state for vacuum plant embodiment two of the present invention
Schematic diagram.
During implementation, 42 controlled sealing first passage mouth 11 of the first door body and 43 synchronous controlled sealing second channel of the second door body
Mouth 21；Third pneumatic operated valve V3 and the 5th pneumatic operated valve V5 is closed, the first pneumatic operated valve V1, the second pneumatic operated valve V2 and the 4th pneumatic operated valve V4
Unlatching, the first vacuum pump 51 and the second vacuum pump 61 vacuumize respectively keeps first chamber 1, second chamber 2 and third chamber 3
Vacuum state, making lifting gear, there is no larger pressure differences between cavity in action, do not influence to act.
Further, as shown in figure 8, the cross-sectional configuration of the 4th job state for vacuum plant embodiment two of the present invention
Schematic diagram.
During implementation, the 5th pneumatic operated valve V5 is kept to close, by the first pneumatic operated valve V1, the second pneumatic operated valve V2 and the 4th pneumatic operated valve
V4 is closed, and third pneumatic operated valve V3 is opened, and first chamber 1 and second chamber 2 keep vacuum state, and third chamber 3 is connected with outside
And pressure difference is formed with first chamber 1 and second chamber 2, prevent the dead weight because of lifting gear from leading to first chamber 1 and second chamber 2
Vacuum breaker.
Preferably, pressure sensor 7 is set respectively in first chamber 1 and second chamber 2, effect is detecting vacuum condition.
In addition, above-mentioned pneumatic operated valve is solenoid valve, ensure that excessive pressure difference will not be generated between cavity during valve body action.
Implement vacuum plant provided by the present invention, have the advantages that：Sealing door component includes：It can be in third
The elevating mechanism that is lifted in chamber, the first door body of the salable first passage mouth being arranged on elevating mechanism and it is arranged on liter
Second door body of the salable second channel mouth on descending mechanism, wherein：The controlled sealing first passage mouth and/or second of first door body
Door body synchronizes controlled sealing second channel mouth, can correspond to the corresponding vacuum chamber of sealing respectively, be mutually independent of each other the true of chamber
Dummy status can improve the operation effectiveness of equipment；Structure is simplified, and for ease of maintenaince and is safeguarded.
Claims (10)
1. a kind of vacuum plant, which is characterized in that including：
First chamber, the first chamber are equipped with first passage mouth；
Second chamber, the second chamber be equipped with second channel mouth and respectively with the first chamber and the second chamber
The connected third chamber of sealing, the first passage mouth and the second channel mouth are described respectively with the third chamber
Sealing door component is equipped in third chamber；
The sealing door component includes：The elevating mechanism that can be lifted in the third chamber is arranged on the elevating mechanism
On the salable first passage mouth the first door body and be arranged on the elevating mechanism salable described second logical
Second door body at road junction, wherein：
It is logical that the first door body controlled sealing first passage mouth and/or second door body synchronize controlled sealing described second
Road junction.
2. vacuum plant as described in claim 1, which is characterized in that be equipped between the third chamber and the first chamber
Vacuumizing assembly, the vacuumizing assembly include：
The first vacuum pump being connected in the first chamber；
The vacuum line being connected respectively with first vacuum pump and the third chamber is equipped with the first gas in the vacuum line
Dynamic valve, is equipped with the second pneumatic operated valve, first pneumatic operated valve and third chamber between first vacuum pump and first pneumatic operated valve
Third pneumatic operated valve is equipped between room.
3. vacuum plant as claimed in claim 2, which is characterized in that the controlled sealing first passage of the first door body
Mouthful, first pneumatic operated valve is closed, and second pneumatic operated valve and the third pneumatic operated valve are opened, and first vacuum pump vacuumizes
The first chamber is made to keep vacuum state, the third chamber is connected with outside while forming pressure difference with first chamber.
4. such as Claims 2 or 3 any one of them vacuum plant, which is characterized in that the second chamber the second vacuum in succession
Pump is equipped with the 4th pneumatic operated valve between second vacuum pump and the second chamber；
The second chamber also has the pipeline of the 5th pneumatic operated valve in succession.
5. vacuum plant as claimed in claim 4, which is characterized in that the controlled sealing second channel of the second door body
Mouthful, the 5th pneumatic operated valve is closed, and the 4th pneumatic operated valve is opened, and second vacuum pump, which vacuumizes, protects the second chamber
Vacuum state is held, the third chamber connects with outside and forms pressure difference with the second chamber.
6. vacuum plant as claimed in claim 4, which is characterized in that the controlled sealing first passage mouth of the first door body
The controlled sealing second channel mouth synchronous with second door body；
The third pneumatic operated valve and the 5th pneumatic operated valve are closed, first pneumatic operated valve, second pneumatic operated valve and described
4th pneumatic operated valve is opened, and first vacuum pump and second vacuum pump vacuumize respectively makes the first chamber, described the
Two chambers and the third chamber keep vacuum state.
7. vacuum plant as claimed in claim 6, which is characterized in that the 5th pneumatic operated valve is kept to close, by described first
Pneumatic operated valve, second pneumatic operated valve and the 4th pneumatic operated valve are closed, and the third pneumatic operated valve is opened, the first chamber and
The second chamber keeps vacuum state, the third chamber with it is external connect and with the first chamber and the second chamber
Form pressure difference.
8. vacuum plant as described in claim 1, which is characterized in that set respectively in first door body and second door body
There is sealing ring.
9. the vacuum plant as described in claim 1 or 8, which is characterized in that the elevating mechanism includes：
The guide post being located in the third chamber；
The mobile bushing being socketed on the guide post, first door body and second door body are respectively provided at the mobile bushing
Opposite sides；And
The outside of the third chamber and the cylinder being connected with the mobile bushing are located at, wherein：The cylinder passes through the shifting
Dynamic bushing linkage indoor first door body of third chamber and second door body move back and forth.
10. vacuum plant as claimed in claim 9, which is characterized in that the shape of first door body and second door body
It is adapted with the shape with respective corresponding passway, allows to push first door body and described in the mobile bushing
During the second door body respectively corresponding sealing be pressed on on respective corresponding passway；
Pressure sensor is set respectively in the first chamber, the second chamber and the third chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711461752.8A CN108193190B (en) | 2017-12-28 | 2017-12-28 | Vacuum device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711461752.8A CN108193190B (en) | 2017-12-28 | 2017-12-28 | Vacuum device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108193190A true CN108193190A (en) | 2018-06-22 |
| CN108193190B CN108193190B (en) | 2020-06-09 |
Family
ID=62585505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711461752.8A Active CN108193190B (en) | 2017-12-28 | 2017-12-28 | Vacuum device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108193190B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109065476A (en) * | 2018-07-26 | 2018-12-21 | 南通大学 | Vacuum bonding device |
| CN109681652A (en) * | 2018-12-21 | 2019-04-26 | 东泰高科装备科技有限公司 | Gate valve component and vacuum coating equipment |
| CN111424253A (en) * | 2020-04-16 | 2020-07-17 | 深圳市提姆光电科技有限公司 | Anticorrosive coating system of 5G antenna |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103486308A (en) * | 2013-10-11 | 2014-01-01 | 湖州三井低温设备有限公司 | Vacuum protection valve used at super-low temperature |
| CN106763841A (en) * | 2017-03-02 | 2017-05-31 | 北京创世威纳科技有限公司 | A kind of vacuum lock |
-
2017
- 2017-12-28 CN CN201711461752.8A patent/CN108193190B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103486308A (en) * | 2013-10-11 | 2014-01-01 | 湖州三井低温设备有限公司 | Vacuum protection valve used at super-low temperature |
| CN106763841A (en) * | 2017-03-02 | 2017-05-31 | 北京创世威纳科技有限公司 | A kind of vacuum lock |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109065476A (en) * | 2018-07-26 | 2018-12-21 | 南通大学 | Vacuum bonding device |
| CN109065476B (en) * | 2018-07-26 | 2023-08-22 | 苏州锐杰微科技集团有限公司 | Vacuum bonding device |
| CN109681652A (en) * | 2018-12-21 | 2019-04-26 | 东泰高科装备科技有限公司 | Gate valve component and vacuum coating equipment |
| CN111424253A (en) * | 2020-04-16 | 2020-07-17 | 深圳市提姆光电科技有限公司 | Anticorrosive coating system of 5G antenna |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108193190B (en) | 2020-06-09 |
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