CN103486308A - Vacuum protection valve used at super-low temperature - Google Patents
Vacuum protection valve used at super-low temperature Download PDFInfo
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- CN103486308A CN103486308A CN201310471698.0A CN201310471698A CN103486308A CN 103486308 A CN103486308 A CN 103486308A CN 201310471698 A CN201310471698 A CN 201310471698A CN 103486308 A CN103486308 A CN 103486308A
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- vacuum
- valve body
- sealing
- low temperature
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
Abstract
The invention relates to a vacuum protection valve, in particular to a vacuum protection valve used at a super-low temperature and needed in the chemical industry, industrial and mining enterprises, the national defense and scientific research industry and other industries. The vacuum protection valve comprises a vacuum valve body, wherein the vacuum valve body is provided with a cylindrical connection outer wall, a vacuum sleeve is connected with the connection outer wall in a sleeved mode, an atmosphere through hole is formed in the vacuum sleeve, the vacuum valve body is provided with a limiting stand used for limiting the position of the vacuum sleeve along the periphery of the connection outer wall, the communication portion of the vacuum valve body and the vacuum sleeve is provided with a vacuum plug, the vacuum plug comprises a sealing plugging cylinder capable of moving in the vacuum valve body and a sealing plugging plate integrally connected with the sealing plugging cylinder and capable of moving in the vacuum sleeve, the sealing plugging cylinder is provided with an annular concave sealing groove, an inner sealing ring is arranged between the concave sealing groove and the vacuum valve body, and an outer sealing ring is arranged in an area defined by the sealing plugging plate, the end portion of the vacuum valve body and the inner wall of the vacuum sleeve in an enclosed mode, and accordingly vacuum sealing and overpressure protection functions can be effectively achieved.
Description
Technical field
the present invention relates to vacuum protective valve, relate in particular to the required used at ultra-low temperature vacuum protective valves of industry such as a kind of chemical industry, industrial and mining enterprise, national defence scientific research.
Background technique
vacuum protective valve mainly compresses valve gap by spring force at present, by linear sealing, makes itself and valve seat realize sealing or adopts hydraulic seal to guarantee its vacuum seal.1) under the spring force structure, vacuum seal mainly relies on spring force to realize, very high to the requirement of spring force, when too greatly the vacuum chamber internal pressure increases, can not open fast, and the protection vaccum case, too littlely can not effectively realize vacuum seal; 2) liquid sealing structure need to pour into seal fluid in vacuum tube, but, in ultralow temperature (196 ℃) Environmental Conditions, the easy ice of conventional seal fluid changes into solid-state, can not be for ultra-low temperature surroundings.The modified model of improvement vacuum protective valve is arranged again, and the disclosed vacuum protective valve the present invention of China Patent No.: 201010241623.X has disclosed a kind of vacuum protective valve, comprising: upper valve body; Lower valve body, with described upper valve body fit; Adjusting bolt, be connected with lower valve body; Spool, be placed in lower valve body, and with the adjusting bolt fit; Movable valve seat, be placed in lower valve body, and with the spool butt; Drive link, be placed in upper valve body and movable valve seat, and with the spool butt; The pressure-sensitive chamber, be connected in upper valve body, and with the drive link butt.Its solves in prior art, because avoiding the vacuum crosstalk phenomenon to cause vacuum system in vacuum hold and destroying that the operating mode down-off of vacuum is too small, vacuum terminal response Speed Reduction, the even technical problems such as impact destruction vacuum, high-pressure blowing operating mode.But this invention is for the normal temperature equipment development, and for vacuum failure under ultra-low temperature surroundings, the safety issue produced when sealing descends can not be accomplished good solution.
Summary of the invention
the purpose of this invention is to provide a kind of used at ultra-low temperature vacuum protective valve that can effectively realize vacuum seal and overpressure protection function.
above-mentioned technical purpose of the present invention is achieved by the following technical programs: a kind of used at ultra-low temperature vacuum protective valve, comprise the vacuum valve body, described vacuum valve body has columniform connection outer wall, be socketed with vacuum envelope along described connection outer wall, have large vent hole on described vacuum envelope, described vacuum valve body is provided with for limiting the limit dais of described vacuum envelope position along described connection outer wall periphery, described vacuum valve body and described vacuum envelope connectivity part are provided with vacuum stopper, described vacuum stopper comprises movable sealing stick harness in described vacuum valve body and is connected movable sealing plug dish in described vacuum envelope with described sealing stick harness one, described sealing stick harness is provided with annular depression seal groove, be provided with inner seal ring between described depression seal groove and described vacuum valve body, described sealing plug dish, be provided with exterior seal ring in the zone surrounded between the end of described vacuum valve body and described vacuum envelope inwall three.
in technique scheme, during extracting vacuum, vacuum valve body (connection vacuum chamber) internal pressure P2 is negative pressure, and vacuum envelope is provided with large vent hole and atmosphere is connected, its pressure P 1 equals atmospheric pressure, P1>P2, under the pressure difference effect, vacuum stopper and vacuum valve are shown consideration for tight, the exterior seal ring compression, realize end face seal, add in addition the inner seal ring sealing, guaranteed the reliability of sealing.In vacuum chamber, due to the internal cavity medium, reveal; when pressure raises; during to P2 >=P1, the pressure difference that acts on vacuum stopper disappears, and the seal ring seal compression disappears; seal failure; cavity pressure discharges, protection vaccum case, the Security that has improved equipment; avoid housing to continue supercharging, bursting accident occurred.
as to of the present invention preferably, inner seal ring and exterior seal ring are the O RunddichtringO.
as to of the present invention preferably, large vent hole is positioned at the same level position and is symmetry shape and distributes on vacuum envelope.Effectively improve the stability of vacuum seal and vacuum overpressure protection
as to of the present invention preferred, seal stick harness and be provided with the depression seal groove that three road vertical directions are arranged in parallel.Improve the stability of structure and the reliability of sealing.
as to of the present invention preferably, the perpendicular distance between the adjacent recessed seal groove all equates.Improve stability, the reliability of sealing and the Security of overpressure protection of structure.
beneficial effect of the present invention: vacuum valve body of the present invention embed vacuum envelope overlap with; Vacuum stopper embed the vacuum valve body overlap with.Vacuum valve body hollow, be not connected with negative pressure generation equipment with vacuum envelope fit end.Vacuum envelope is provided with large vent hole, and large vent hole is connected with atmosphere.Be provided with exterior seal ring between the port of vacuum stopper and vacuum valve body.During extracting vacuum, vacuum valve (connection vacuum chamber) internal pressure is negative pressure, vacuum envelope is provided with large vent hole and atmosphere is connected, and internal pressure equals atmospheric pressure, under the pressure difference effect, vacuum stopper and vacuum valve are shown consideration for tight, the exterior seal ring compression, realize end face seal, simultaneously, the reliability of sealing has been guaranteed in the design of inner seal ring, and inside and outside seal ring closely cooperates and further guaranteed the reliability sealed with other structural members.
The accompanying drawing explanation
fig. 1 is the structural representation of the embodiment of the present invention 1.
in figure: 1, vacuum valve body, 10, connect outer wall, 11, limit dais, 2, vacuum envelope, 20, large vent hole, 3, vacuum stopper, 31, the sealing stick harness, 32, the sealing plug dish, 310, the depression seal groove, 4, inner seal ring, 5, exterior seal ring.
Embodiment
following specific embodiment is only explanation of the invention; it is not limitation of the present invention; those skilled in the art can make to the present embodiment the modification that there is no creative contribution as required after reading this specification, but as long as all are subject to the protection of Patent Law in claim scope of the present invention.
Claims (5)
1. a used at ultra-low temperature vacuum protective valve, it is characterized in that: comprise vacuum valve body (1), described vacuum valve body (1) has columniform connection outer wall (10), be socketed with vacuum envelope (2) along described connection outer wall (10), have large vent hole (20) on described vacuum envelope (2), described vacuum valve body (1) is provided with for limiting the limit dais (11) of described vacuum envelope (2) position along described connection outer wall (10) periphery, described vacuum valve body (1) is provided with vacuum stopper (3) with described vacuum envelope (2) connectivity part, described vacuum stopper (3) comprises movable sealing stick harness (31) in described vacuum valve body (1) and is connected movable sealing plug dish (32) in described vacuum envelope (2) with described sealing stick harness (31) one, described sealing stick harness (31) is provided with annular depression seal groove (310), be provided with inner seal ring (4) between described depression seal groove (310) and described vacuum valve body (1), described sealing plug dish (32), be provided with exterior seal ring (5) in the zone surrounded between the end of described vacuum valve body (1) and described vacuum envelope (2) inwall three.
2. a kind of used at ultra-low temperature vacuum protective valve according to claim 1, it is characterized in that: inner seal ring (4) and exterior seal ring (5) are the O RunddichtringO.
3. a kind of used at ultra-low temperature vacuum protective valve according to claim 1 and 2 is characterized in that: large vent hole (20) is positioned at the same level position and is symmetry shape and distributes on vacuum envelope (2).
4. a kind of used at ultra-low temperature vacuum protective valve according to claim 1 and 2, is characterized in that: seal stick harness (31) and be provided with the depression seal groove (310) that three road vertical directions are arranged in parallel.
5. a kind of used at ultra-low temperature vacuum protective valve according to claim 4 is characterized in that: the perpendicular distance between adjacent recessed seal groove (310) all equates.
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CN201310471698.0A CN103486308B (en) | 2013-10-11 | 2013-10-11 | A kind of used at ultra-low temperature vacuum protective valve |
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CN201310471698.0A CN103486308B (en) | 2013-10-11 | 2013-10-11 | A kind of used at ultra-low temperature vacuum protective valve |
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CN103486308A true CN103486308A (en) | 2014-01-01 |
CN103486308B CN103486308B (en) | 2015-12-09 |
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CN201310471698.0A Active CN103486308B (en) | 2013-10-11 | 2013-10-11 | A kind of used at ultra-low temperature vacuum protective valve |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108193190A (en) * | 2017-12-28 | 2018-06-22 | 深圳市华星光电半导体显示技术有限公司 | A kind of vacuum plant |
US20190293200A1 (en) * | 2018-03-26 | 2019-09-26 | Yamada Manufacturing Co., Ltd. | Thermo valve and method of manufacturing same |
Citations (6)
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---|---|---|---|---|
JPS5350459Y2 (en) * | 1971-04-24 | 1978-12-02 | ||
CN2532329Y (en) * | 2002-03-29 | 2003-01-22 | 孙昭楠 | Vacuum seal valve |
US7086388B2 (en) * | 2003-08-04 | 2006-08-08 | Delphi Technologies, Inc. | Combination valve for fuel system |
CN101235919A (en) * | 2008-03-07 | 2008-08-06 | 中国重型机械研究院 | Vacuum pump heating interlining pressure release device |
CN102966774A (en) * | 2012-11-14 | 2013-03-13 | 金祖贻 | Pressure reducing valve |
CN203516890U (en) * | 2013-10-11 | 2014-04-02 | 湖州三井低温设备有限公司 | Ultra-low-temperature vacuum protective valve |
-
2013
- 2013-10-11 CN CN201310471698.0A patent/CN103486308B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5350459Y2 (en) * | 1971-04-24 | 1978-12-02 | ||
CN2532329Y (en) * | 2002-03-29 | 2003-01-22 | 孙昭楠 | Vacuum seal valve |
US7086388B2 (en) * | 2003-08-04 | 2006-08-08 | Delphi Technologies, Inc. | Combination valve for fuel system |
CN101235919A (en) * | 2008-03-07 | 2008-08-06 | 中国重型机械研究院 | Vacuum pump heating interlining pressure release device |
CN102966774A (en) * | 2012-11-14 | 2013-03-13 | 金祖贻 | Pressure reducing valve |
CN203516890U (en) * | 2013-10-11 | 2014-04-02 | 湖州三井低温设备有限公司 | Ultra-low-temperature vacuum protective valve |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108193190A (en) * | 2017-12-28 | 2018-06-22 | 深圳市华星光电半导体显示技术有限公司 | A kind of vacuum plant |
CN108193190B (en) * | 2017-12-28 | 2020-06-09 | 深圳市华星光电半导体显示技术有限公司 | Vacuum device |
US20190293200A1 (en) * | 2018-03-26 | 2019-09-26 | Yamada Manufacturing Co., Ltd. | Thermo valve and method of manufacturing same |
US10920897B2 (en) * | 2018-03-26 | 2021-02-16 | Yamada Manufacturing Co., Ltd. | Thermo valve and method of manufacturing same |
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CN103486308B (en) | 2015-12-09 |
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