CN108169923B - Light source polarizer - Google Patents
Light source polarizer Download PDFInfo
- Publication number
- CN108169923B CN108169923B CN201711389941.9A CN201711389941A CN108169923B CN 108169923 B CN108169923 B CN 108169923B CN 201711389941 A CN201711389941 A CN 201711389941A CN 108169923 B CN108169923 B CN 108169923B
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- China
- Prior art keywords
- light source
- mirror
- side mirror
- layer
- polarizer
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- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 238000000576 coating method Methods 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 239000010703 silicon Substances 0.000 claims abstract description 10
- 239000010931 gold Substances 0.000 claims description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 238000002834 transmittance Methods 0.000 abstract description 3
- 239000007888 film coating Substances 0.000 abstract description 2
- 238000009501 film coating Methods 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/288—Filters employing polarising elements, e.g. Lyot or Solc filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Polarising Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a light source polarizer, which comprises a 3-surface reflector, namely a central mirror, a left side mirror and a right side mirror. The left side mirror and the right side mirror are symmetrically arranged relative to the central mirror, the incident angle of the light source on the two side mirrors is guaranteed to be 2 times that of the central mirror, the central mirror is of a film coating structure, and a coating is made of silicon. The light source polarizer can effectively inhibit higher harmonics of corresponding wave bands, and the transmittance of a light source is greatly improved after the light source passes through the light source polarizer, so that the utilization efficiency of polarized light is expanded.
Description
Technical Field
The present invention relates to a light source polarizer, and more particularly, to a light source polarizer having a function of suppressing higher harmonics.
Background
Synchrotron radiation is a continuous spectrum, and monochromatic light filtered by a monochromator inevitably contains higher harmonics, which seriously affect the light source, detector and optical elements. In the prior art light source polarizer, a method of adding a filter is generally adopted to suppress higher harmonics, and a tin filter is basically adopted to be placed in a light path, so that the overall transmittance of the light source is greatly reduced.
Aiming at the technical problems of reduction of light source permeability, influence on light path direction and the like caused by the fact that a tin filter is added to inhibit higher harmonics in the prior art, no effective solution is provided at present.
Disclosure of Invention
The invention provides a novel light source polarizer, which aims to solve the technical problems that the light source transmission is low, the direction of an optical path is easy to change and the like in the existing light source polarizing circuit.
In order to solve the technical problem, the invention provides a light source polarizer, which comprises 3 reflectors, namely a central reflector, a left reflector and a right reflector, wherein the left reflector and the right reflector are symmetrically arranged relative to the central reflector, and the incident angle of a light source on the two reflectors is 2 times of that of the central reflector.
Furthermore, the left side mirror adopts a double-layer coating structure, the first layer is made of silicon and is 1-10 nm thick, and the second layer is plated with gold and is 10-30 nm thick.
Furthermore, the right side mirror adopts a double-layer coating structure, the first layer is made of silicon and is 1-10 nm thick, and the second layer is plated with gold and is 10-30 nm thick.
The invention has the beneficial technical effects that: the light source polarizer can effectively inhibit higher harmonics of corresponding wave bands, and the transmittance of a light source is greatly improved after the light source passes through the light source polarizer, so that the utilization efficiency of polarized light is expanded.
Drawings
FIG. 1 illustrates a light source polarizer structure according to an embodiment of the present invention.
FIG. 2 shows the reflectance of the S and P components of a light source after passing through an Au-Si-Au triple mirror.
Detailed Description
Hereinafter, an embodiment of a light source polarizer according to the present invention will be described with reference to the drawings. The light source polarizer disclosed by the invention adopts a combination of 3 mirrors, and the incidence angles of the two side mirrors are twice of that of the central mirror. As shown in FIG. 1, the source polarizer includes 3-sided mirrors, a center mirror M1, a left side mirror M2, and a right side mirror M3. Wherein the left side mirror M2 and the right side mirror M3 are symmetrically arranged relative to the central mirror M1, and the included angle is 30 degrees, at the moment, when the light source is incident at 60 degrees, the incident angle of the light source on the two side mirrors is ensured to be 2 times that of the central mirror.
The 3 reflectors all adopt a film coating structure, wherein the central mirror M1 is coated with silicon Si, and the thickness is 400 nm-600 nm;
the left side mirror adopts a double-layer coating structure, the first layer is made of silicon Si and is 1-10 nm thick, and the second layer is plated with gold Au and is 10-30 nm thick;
the right side mirror adopts a double-layer coating structure, the first layer is made of silicon Si and is 1-10 nm thick, and the second layer is plated with gold Au and is 10-30 nm thick.
In this embodiment, the 3-sided mirrors all adopt a coating structure, wherein the central mirror M1 is coated with Si, and the thickness is 500 nm. The left mirror was silicon-coated Si with a thickness of 3nm for the first layer and gold-coated Au with a thickness of 30nm for the second layer. The right side mirror had a first layer of silicon-plated Si with a thickness of 3nm and a second layer of gold-plated Au with a thickness of 30 nm.
When the light source enters the three mirrors from the left at an angle of incidence of 60, the reflectance of the S and P components is shown in fig. 2. It can be seen from fig. 2 that the reflectance of the P component is almost 0, and the S component is almost completely suppressed after 30eV, so that the present light source polarizer can effectively suppress the higher harmonics of the corresponding wavelength band. It can be seen from fig. 2 that the reflectance is around 12% when the fundamental wave is 12eV, while the reflectance of the second harmonic 24eV and the third harmonic 36eV is almost 0. The polarization of the light source in the wave band can reach more than 99% after passing through the light source polarizer, so that the polarization of the light source is greatly improved, and the utilization rate of the light source is widened.
The invention has been described in terms of specific embodiments, and it is therefore intended that the invention not be limited to the disclosed embodiments, but that it will include all embodiments falling within the scope of the appended claims, rather than the description, and all changes that come within the meaning and range of equivalents are intended to be embraced therein.
Claims (1)
1. A light source polarizer comprises 3 reflectors which are respectively a central mirror, a left side mirror and a right side mirror, wherein the left side mirror and the right side mirror are symmetrically arranged, and the light source polarizer is characterized in that the left side mirror and the right side mirror are symmetrically arranged on one side of the central mirror and have an included angle of 120 degrees, and when a light source is incident at 60 degrees, the incident angle of the light source on the two side mirrors is 2 times that of the central mirror;
the central mirror adopts a coating structure, the coating is silicon, and the thickness is 400 nm-600 nm; the left side mirror adopts a double-layer coating structure, the first layer is made of silicon and is 1-10 nm thick, and the second layer is plated with gold and is 10-30 nm thick; and the right side mirror adopts a double-layer coating structure, the first layer is silicon and has the thickness of 1-10 nm, and the second layer is plated with gold and has the thickness of 10-30 nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711389941.9A CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711389941.9A CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108169923A CN108169923A (en) | 2018-06-15 |
| CN108169923B true CN108169923B (en) | 2021-01-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711389941.9A Active CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108169923B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5546706A (en) * | 1978-09-29 | 1980-04-02 | Canon Inc | Phase difference reflecting mirror |
| CN104885012A (en) * | 2012-11-06 | 2015-09-02 | 株式会社尼康 | Polarization beam splitter, substrate processing apparatus, device manufacturing system, and device manufacturing method |
| CN105334556A (en) * | 2015-12-01 | 2016-02-17 | 苏州谱道光电科技有限公司 | Reflecting prism for optical resonant cavity and optical resonant cavity and optical spectrum measuring instrument applying same |
-
2017
- 2017-12-21 CN CN201711389941.9A patent/CN108169923B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5546706A (en) * | 1978-09-29 | 1980-04-02 | Canon Inc | Phase difference reflecting mirror |
| CN104885012A (en) * | 2012-11-06 | 2015-09-02 | 株式会社尼康 | Polarization beam splitter, substrate processing apparatus, device manufacturing system, and device manufacturing method |
| CN105334556A (en) * | 2015-12-01 | 2016-02-17 | 苏州谱道光电科技有限公司 | Reflecting prism for optical resonant cavity and optical resonant cavity and optical spectrum measuring instrument applying same |
Non-Patent Citations (1)
| Title |
|---|
| 金属镜面双反射消偏研究;鲜于子安 等;《航天返回与遥感》;20151031;第36卷(第5期);第67-75页 * |
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| Publication number | Publication date |
|---|---|
| CN108169923A (en) | 2018-06-15 |
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| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Feng Jie Inventor after: Ren Qing Inventor after: Ma Su Inventor before: Ma Su |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20210107 Address after: 518100 building 2-2, tongfuyu Industrial Zone, Aiqun Road, Shiyan street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Feng Jie Applicant after: Ren Qing Address before: Room 501, block a, building 3, service outsourcing base, new Changhai center, 29 Bancang South Road, Changsha Economic and Technological Development Zone, Changsha City, Hunan Province, 410000 Applicant before: CHANGSHA TUOPU LUCHUAN NEW MATERIAL TECHNOLOGY Co.,Ltd. |
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| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210507 Address after: 215600 No.27, Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee after: Suzhou Yuchuan Optical Technology Co.,Ltd. Address before: 518100 building 2-2, tongfuyu Industrial Zone, Aiqun Road, Shiyan street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Feng Jie Patentee before: Ren Qing |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240417 Address after: Room 401, Building 5, No. 27 Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province, 215600 Patentee after: Suzhou Yuchuan Optical Instrument Co.,Ltd. Country or region after: China Address before: 215600 No.27, Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: Suzhou Yuchuan Optical Technology Co.,Ltd. Country or region before: China |