CN108169923A - A kind of light source polarizer - Google Patents
A kind of light source polarizer Download PDFInfo
- Publication number
- CN108169923A CN108169923A CN201711389941.9A CN201711389941A CN108169923A CN 108169923 A CN108169923 A CN 108169923A CN 201711389941 A CN201711389941 A CN 201711389941A CN 108169923 A CN108169923 A CN 108169923A
- Authority
- CN
- China
- Prior art keywords
- light source
- mirror
- layer
- thickness
- source polarizer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims abstract description 14
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/288—Filters employing polarising elements, e.g. Lyot or Solc filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Polarising Elements (AREA)
Abstract
Description
技术领域technical field
本发明涉及一种光源偏振器，更具体地，涉及一种具有对高次谐波抑制功能的光源偏振器。The present invention relates to a light source polarizer, more specifically, to a light source polarizer with the function of suppressing higher harmonics.
背景技术Background technique
同步辐射是一种连续光谱，在通过单色器过滤后的单色光不可避免地含有高次谐波，而高次谐波严重影响光源、探测器和光学元件。在现有技术的光源偏振器中，普遍采用添加滤片的方法来抑制高次谐波，而且基本采用锡滤片放置在光路中，这使得光源的整体透过率大大降低。Synchrotron radiation is a continuous spectrum. The monochromatic light filtered by the monochromator inevitably contains high-order harmonics, and the high-order harmonics seriously affect the light source, detector and optical components. In the prior art light source polarizers, the method of adding filters is generally used to suppress high-order harmonics, and tin filters are basically placed in the optical path, which greatly reduces the overall transmittance of the light source.
针对目前传统的添加锡滤片抑制高次谐波带来的降低光源透过性，影响光路方向等技术问题，目前尚未提出有效地解决方案。For the traditional technical problems of adding tin filters to suppress high-order harmonics, which reduce light source transmittance and affect the direction of light path, no effective solution has been proposed yet.
发明内容Contents of the invention
本发明提出一种新型光源偏振器，以解决现有光源偏振电路中存在的光源透过性低、光路方向易被改变等技术问题。The invention proposes a novel light source polarizer to solve technical problems such as low light source transmittance and easy change of light path direction existing in the existing light source polarizing circuit.
为解决上述技术问题，本发明提出一种光源偏振器，其包括3面反射镜，分别为中心镜，左侧镜，右侧镜，所述左侧镜和右侧镜相对中心镜对称放置，且光源在两侧镜的入射角是中心镜的2倍，其特征在于，所述中心镜采用镀膜结构，镀层为硅，厚度为400nm～600nm。In order to solve the above-mentioned technical problems, the present invention proposes a light source polarizer, which includes three reflectors, which are respectively a central mirror, a left mirror, and a right mirror, and the left mirror and the right mirror are symmetrically placed relative to the central mirror, In addition, the incident angle of the light source on both side mirrors is twice that of the center mirror, and the feature is that the center mirror adopts a coating structure, the coating is silicon, and the thickness is 400nm-600nm.
进一步地，所述左侧镜采用双层镀膜结构，第一层为硅，厚度为1～10nm，第二层镀金，厚度为10～30nm。Further, the left mirror adopts a double-layer coating structure, the first layer is silicon with a thickness of 1-10 nm, and the second layer is gold-plated with a thickness of 10-30 nm.
进一步地，所述右侧镜采用双层镀膜结构，第一层为硅，厚度为1～10nm，第二层镀金，厚度为10～30nm。Further, the right side mirror adopts a double-layer coating structure, the first layer is silicon with a thickness of 1-10 nm, and the second layer is gold-plated with a thickness of 10-30 nm.
本发明的有益技术效果：本光源偏振器能有效地抑制相应波段的高次谐波，且光源通过光源偏振器后，透过率大大提高，拓展了偏振光的利用效率。Beneficial technical effects of the present invention: the light source polarizer can effectively suppress high-order harmonics in corresponding bands, and after the light source passes through the light source polarizer, the transmittance is greatly improved, and the utilization efficiency of polarized light is expanded.
附图说明Description of drawings
图1示出了本发明实施例的光源偏振器结构。Fig. 1 shows the structure of a light source polarizer according to an embodiment of the present invention.
图2示出了光源通过Au-Si-Au三反射镜后的S和P分量的反射率。Figure 2 shows the reflectance of the S and P components after the light source passes through the Au-Si-Au three-mirror.
具体实施方式Detailed ways
以下，参照附图对本发明的光源偏振器的一个实施方式进行说明。本发明公开的光源偏振器采用3块镜子的组合，两侧镜的入射角是中心镜的两倍。如图1所示，光源偏振器包括了包括3面反射镜，分别为中心镜M1，左侧镜M2，右侧镜M3。其中左侧镜M2和右侧镜M3相对中心镜M1对称放置，且夹角为30°，此时当光源以60°入射，从而保证光源在两侧镜的入射角是中心镜的2倍。Hereinafter, one embodiment of the light source polarizer of the present invention will be described with reference to the drawings. The light source polarizer disclosed by the invention adopts a combination of three mirrors, and the incident angles of the mirrors on both sides are twice that of the central mirror. As shown in FIG. 1 , the light source polarizer includes three reflectors, namely a center mirror M1 , a left mirror M2 and a right mirror M3 . The left mirror M2 and the right mirror M3 are placed symmetrically with respect to the central mirror M1, and the included angle is 30°. At this time, when the light source is incident at 60°, the incident angle of the light source on the two side mirrors is twice that of the central mirror.
3块反射镜都采用镀膜结构，其中中心镜M1镀硅Si，厚度为400nm～600nm；The three reflectors all adopt coating structure, among which the center mirror M1 is coated with silicon Si, with a thickness of 400nm~600nm;
左侧镜采用双层镀膜结构，第一层为硅Si，厚度为1～10nm，第二层镀金Au，厚度为10～30nm；The left mirror adopts a double-layer coating structure, the first layer is silicon Si, with a thickness of 1-10nm, and the second layer is gold-plated with Au, with a thickness of 10-30nm;
右侧镜采用双层镀膜结构，第一层为硅Si，厚度为1～10nm，第二层镀金Au，厚度为10～30nm。The right mirror adopts a double-layer coating structure, the first layer is silicon Si with a thickness of 1-10nm, and the second layer is gold-plated Au with a thickness of 10-30nm.
本实施例中，3面反射镜都采用镀膜结构，其中中心镜M1镀硅Si，厚度为500nm。左侧镜第一层镀硅Si，其厚度取为3nm，第二层镀金Au，其厚度取为30nm。右侧镜第一层镀硅Si，其厚度取为3nm，第二层镀金Au，其厚度取为30nm。In this embodiment, the three reflecting mirrors all adopt a coating structure, and the central mirror M1 is coated with Si with a thickness of 500 nm. The first layer of the left mirror is coated with silicon Si, and its thickness is 3nm, and the second layer is gold-plated with Au, and its thickness is 30nm. The first layer of the right side mirror is plated with silicon Si, and its thickness is taken as 3nm, and the second layer is plated with gold Au, and its thickness is taken as 30nm.
当光源以60°入射角从左侧就进入三反射镜后，其S和P分量的反射率如图2所示。从图2可以看出P分量的反射率几乎为0，而S分量在30eV以后几乎全被抑制，因此本光源偏振器能有效地抑制相应波段的高次谐波。图2可以看出当基波为12eV时的反射率为12％左右，而二次谐波24eV和三次谐波36eV的反射率几乎为0。光源通过本光源偏振器后的偏振度P在该波段的偏振性可达99％以上，大大提高了光源的偏振度，拓宽了光源的利用率。When the light source enters the three mirrors from the left at an incident angle of 60°, the reflectivity of its S and P components is shown in Figure 2. It can be seen from Figure 2 that the reflectivity of the P component is almost 0, and the S component is almost completely suppressed after 30eV, so the light source polarizer can effectively suppress the higher harmonics of the corresponding band. It can be seen from Fig. 2 that when the fundamental wave is 12eV, the reflectivity is about 12%, while the reflectivity of the second harmonic 24eV and the third harmonic 36eV is almost 0. After the light source passes through the light source polarizer, the polarization degree P of the light source can reach more than 99% in this wave band, which greatly improves the polarization degree of the light source and widens the utilization rate of the light source.
本发明是通过具体实施过程进行说明的，在不脱离本发明范围的情况下，还可以对本发明专利进行各种变换及同等代替，因此本发明专利不局限于所公开的具体实施过程，而应该包括落入本发明专利权利要求范围内的全部实施方案，本发明的范围由所附权利要求而不是描述来指示，并且在等同物的含义和范围内的所有变化旨在被包含在其中。The present invention is illustrated through a specific implementation process. Without departing from the scope of the present invention, various transformations and equivalent substitutions can be made to the patent of the present invention. Therefore, the patent of the present invention is not limited to the disclosed specific implementation process, but should be All embodiments falling within the scope of the patent claims of the invention are included, the scope of the invention is indicated by the appended claims rather than the description, and all changes within the meaning and range of equivalents are intended to be embraced therein.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711389941.9A CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711389941.9A CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108169923A true CN108169923A (en) | 2018-06-15 |
| CN108169923B CN108169923B (en) | 2021-01-26 |
Family
ID=62523229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711389941.9A Active CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108169923B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5546706A (en) * | 1978-09-29 | 1980-04-02 | Canon Inc | Phase difference reflecting mirror |
| CN104885012A (en) * | 2012-11-06 | 2015-09-02 | 株式会社尼康 | Polarization beam splitter, substrate processing apparatus, device manufacturing system, and device manufacturing method |
| CN105334556A (en) * | 2015-12-01 | 2016-02-17 | 苏州谱道光电科技有限公司 | Reflecting prism for optical resonant cavity and optical resonant cavity and optical spectrum measuring instrument applying same |
-
2017
- 2017-12-21 CN CN201711389941.9A patent/CN108169923B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5546706A (en) * | 1978-09-29 | 1980-04-02 | Canon Inc | Phase difference reflecting mirror |
| CN104885012A (en) * | 2012-11-06 | 2015-09-02 | 株式会社尼康 | Polarization beam splitter, substrate processing apparatus, device manufacturing system, and device manufacturing method |
| CN105334556A (en) * | 2015-12-01 | 2016-02-17 | 苏州谱道光电科技有限公司 | Reflecting prism for optical resonant cavity and optical resonant cavity and optical spectrum measuring instrument applying same |
Non-Patent Citations (1)
| Title |
|---|
| 鲜于子安 等: "金属镜面双反射消偏研究", 《航天返回与遥感》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108169923B (en) | 2021-01-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101403806B (en) | Visible/infrared wide-spectrum color separation film based on germanium substrate | |
| CN104880755A (en) | Sub-wavelength metal grating polarizing film monolithically integrated on high-refractive-index substrate | |
| JP2013526730A5 (en) | ||
| CN110568693B (en) | Forecasting single photon generation system and method | |
| TW200907415A (en) | Wide-angle and broadband polarization converter | |
| CN109557604B (en) | Ultraviolet-resistant antireflection film and application thereof | |
| CN104749676A (en) | Grid Polarizing Element, Ultraviolet Polarized Light Irradiation Method And Device, And Light Orientation Device | |
| CN104021817A (en) | Dynamic tunable absorber based on coherent control | |
| CN106443853A (en) | Broadband spectrum color separation film with infrared reflection of middle and long waves of near-infrared transmission of visible light | |
| CN102928907B (en) | The full medium F-P of two half-waves arrowband polarization separation optical filter | |
| CN108169923A (en) | A kind of light source polarizer | |
| CN111123534A (en) | Light source polarizer | |
| CN105549133B (en) | A kind of near-infrared omnidirectional absorber based on hyperbolic metamaterials microcavity | |
| CN104914495B (en) | It is a kind of to realize the sub-wavelength metal micro structure array for the unidirectional circular polarizing disk for working in two frequency ranges | |
| CN203849492U (en) | Depolarizing light splitter | |
| CN103018815A (en) | Deep ultraviolet aluminum grating polarizer | |
| TW201721189A (en) | Wideband phase retarder film and wideband circular polarizer using the same | |
| CN112567270B (en) | Polarizing plate and display and ultraviolet irradiation device using the same | |
| CN103984054A (en) | All-medium F-P narrow-band depolarization optical filter | |
| CN103151694A (en) | Ultraviolet solid-state laser with wavelength of 193 nm | |
| CN103235355B (en) | Double-frequency beam splitting film with half-wave hole suppressing function | |
| JP2005514309A5 (en) | ||
| CN103592774A (en) | Wollaston prism for generating one beam of linearly polarized light | |
| Qu et al. | Highly efficient 355 nm UV generation with non-collinear phase-matching by a prism-coupled device based on CsLiB6O10 | |
| CN211014703U (en) | Ultraviolet filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Feng Jie Inventor after: Ren Qing Inventor after: Ma Su Inventor before: Ma Su |
|
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20210107 Address after: 518100 building 2-2, tongfuyu Industrial Zone, Aiqun Road, Shiyan street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Feng Jie Applicant after: Ren Qing Address before: Room 501, block a, building 3, service outsourcing base, new Changhai center, 29 Bancang South Road, Changsha Economic and Technological Development Zone, Changsha City, Hunan Province, 410000 Applicant before: CHANGSHA TUOPU LUCHUAN NEW MATERIAL TECHNOLOGY Co.,Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210507 Address after: 215600 No.27, Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee after: Suzhou Yuchuan Optical Technology Co.,Ltd. Address before: 518100 building 2-2, tongfuyu Industrial Zone, Aiqun Road, Shiyan street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Feng Jie Patentee before: Ren Qing |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240417 Address after: Room 401, Building 5, No. 27 Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province, 215600 Patentee after: Suzhou Yuchuan Optical Instrument Co.,Ltd. Country or region after: China Address before: 215600 No.27, Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: Suzhou Yuchuan Optical Technology Co.,Ltd. Country or region before: China |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20250106 Address after: 215600 No.27, Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee after: Suzhou Yuchuan Optical Technology Co.,Ltd. Country or region after: China Address before: Room 401, Building 5, No. 27 Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province, 215600 Patentee before: Suzhou Yuchuan Optical Instrument Co.,Ltd. Country or region before: China |