CN108169923A - A kind of light source polarizer - Google Patents
A kind of light source polarizer Download PDFInfo
- Publication number
- CN108169923A CN108169923A CN201711389941.9A CN201711389941A CN108169923A CN 108169923 A CN108169923 A CN 108169923A CN 201711389941 A CN201711389941 A CN 201711389941A CN 108169923 A CN108169923 A CN 108169923A
- Authority
- CN
- China
- Prior art keywords
- light source
- mirror
- layer
- side mirror
- centre
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims abstract description 14
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000010931 gold Substances 0.000 description 7
- 238000002310 reflectometry Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/288—Filters employing polarising elements, e.g. Lyot or Solc filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Polarising Elements (AREA)
Abstract
The invention discloses a kind of light source polarizer, including 3 face speculums, respectively centre mirror, left side mirror, right side mirror.Wherein left side mirror and right side mirror are symmetrically placed with respect to centre mirror, and ensure that light source is 2 times of centre mirror in the incidence angle of two side mirrors, and for centre mirror using coating structure, coating is silicon.After this light source polarizer can effectively inhibit the higher hamonic wave of corresponding wave band, and light source is by light source polarizer, transmitance greatly improves, and has expanded the utilization ratio of polarised light.
Description
Technical field
The present invention relates to a kind of light source polarizer, more particularly, to a kind of light having the function of to limitation of high harmonics
Source polarizer.
Background technology
Synchrotron radiation is a kind of continuous spectrum, and the monochromatic light after being filtered by monochromator is inevitably humorous containing high order
Wave, and higher hamonic wave seriously affects light source, detector and optical element.In the light source polarizer of the prior art, generally use
The method of filter disc is added to inhibit higher hamonic wave, and placed in the optical path using tin filter disc substantially, this causes the entirety of light source
Transmitance substantially reduces.
For the reduction light source permeability that addition tin filter disc inhibition higher hamonic wave traditional at present is brought, optical path direction is influenced
Etc. technical problems, at present not yet propose efficiently solve scheme.
Invention content
The present invention proposes a kind of new type light source polarizer, to solve light source permeability present in existing light source polarization circuit
Low, optical path direction such as is easily changed at the technical problems.
In order to solve the above technical problems, the present invention proposes a kind of light source polarizer, including 3 face speculums, respectively in
Heart mirror, left side mirror, right side mirror, the left side mirror and right side mirror are symmetrically placed with respect to centre mirror, and light source is in the incidence of two side mirrors
Angle is 2 times of centre mirror, which is characterized in that the centre mirror uses coating structure, and coating is silicon, thickness for 400nm~
600nm。
Further, the left side mirror uses two-layer coating structure, and first layer is silicon, and thickness is 1~10nm, and the second layer plates
Gold, thickness are 10~30nm.
Further, the right side mirror uses two-layer coating structure, and first layer is silicon, and thickness is 1~10nm, and the second layer plates
Gold, thickness are 10~30nm.
The advantageous effects of the present invention：This light source polarizer can effectively inhibit the higher hamonic wave of corresponding wave band, and light
After source is by light source polarizer, transmitance greatly improves, and has expanded the utilization ratio of polarised light.
Description of the drawings
Fig. 1 shows the light source polarizer structure of the embodiment of the present invention.
Fig. 2 shows light sources to pass through the reflectivity of the S and P components after tri- speculums of Au-Si-Au.
Specific embodiment
Hereinafter, one embodiment of the light source polarizer of the present invention is illustrated with reference to attached drawing.It is disclosed by the invention
For light source polarizer using the combination of 3 pieces of mirrors, the incidence angle of two side mirrors is twice of centre mirror.As shown in Figure 1, light source polarizer
Include including 3 face speculums, respectively centre mirror M1, left side mirror M2, right side mirror M3.Wherein left side mirror M2 and right side mirror M3 phases
It is symmetrically placed to centre mirror M1, and angle is 30 °, at this time when light source is with 60 ° of incidences, so as to ensure incidence of the light source in two side mirrors
Angle is 2 times of centre mirror.
3 pieces of speculums are all using coating structure, and wherein centre mirror M1 plating silicon Si, thickness is 400nm~600nm；
Left side mirror uses two-layer coating structure, and first layer is silicon Si, and thickness is 1~10nm, the gold-plated Au of the second layer, and thickness is
10~30nm；
Right side mirror uses two-layer coating structure, and first layer is silicon Si, and thickness is 1~10nm, the gold-plated Au of the second layer, and thickness is
10~30nm.
In the present embodiment, 3 face speculums are all using coating structure, wherein centre mirror M1 platings silicon Si, thickness 500nm.It is left
Side mirror first layer plates silicon Si, and thickness is taken as 3nm, the gold-plated Au of the second layer, and thickness is taken as 30nm.Right side mirror first layer plating silicon
Si, thickness are taken as 3nm, the gold-plated Au of the second layer, and thickness is taken as 30nm.
After light source is put into three speculums with 60 ° of incidence angles from left side, the reflectivity of S and P components is as shown in Figure 2.
The reflectivity of P components is almost 0 as can be seen from Figure 2, and S components are almost complete suppressed after 30eV, therefore this light source is inclined
The device that shakes can effectively inhibit the higher hamonic wave of corresponding wave band.Fig. 2 can be seen that the reflectivity when fundamental wave is 12eV is 12% left side
The right side, and the reflectivity of second harmonic 24eV and triple-frequency harmonics 36eV are almost 0.Light source passes through the degree of polarization after this light source polarizer
P the wave band polarizability up to more than 99%, substantially increase the degree of polarization of light source, widened the utilization rate of light source.
The present invention is illustrated by specific implementation process, without departing from the present invention, can be with
Various transformation and equal replacement are carried out to patent of the present invention, therefore patent of the present invention is not limited to disclosed specific implementation
Journey, and should include falling into whole embodiments in scope of the patent claims of the present invention, the scope of the present invention is by appended power
Profit requires rather than describes to indicate, and all changes in the meaning and scope of equivalent are intended to be included therein.
Claims (3)
1. a kind of light source polarizer, including 3 face speculums, respectively centre mirror, left side mirror, right side mirror, the left side mirror and the right side
Side mirror is symmetrically placed with respect to centre mirror, and light source is in 2 times that the incidence angle of two side mirrors is centre mirror, which is characterized in that in described
Heart mirror uses coating structure, and coating is silicon, and thickness is 400nm~600nm.
2. light source polarizer according to claim 1, the left side mirror uses two-layer coating structure, and first layer is silicon, thick
It spends for 1~10nm, the second layer is gold-plated, and thickness is 10~30nm.
3. light source polarizer according to claim 1, the right side mirror uses two-layer coating structure, and first layer is silicon, thick
It spends for 1~10nm, the second layer is gold-plated, and thickness is 10~30nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711389941.9A CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711389941.9A CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108169923A true CN108169923A (en) | 2018-06-15 |
| CN108169923B CN108169923B (en) | 2021-01-26 |
Family
ID=62523229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711389941.9A Active CN108169923B (en) | 2017-12-21 | 2017-12-21 | Light source polarizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108169923B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5546706A (en) * | 1978-09-29 | 1980-04-02 | Canon Inc | Phase difference reflecting mirror |
| CN104885012A (en) * | 2012-11-06 | 2015-09-02 | 株式会社尼康 | Polarization beam splitter, substrate processing apparatus, device manufacturing system, and device manufacturing method |
| CN105334556A (en) * | 2015-12-01 | 2016-02-17 | 苏州谱道光电科技有限公司 | Reflecting prism for optical resonant cavity and optical resonant cavity and optical spectrum measuring instrument applying same |
-
2017
- 2017-12-21 CN CN201711389941.9A patent/CN108169923B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5546706A (en) * | 1978-09-29 | 1980-04-02 | Canon Inc | Phase difference reflecting mirror |
| CN104885012A (en) * | 2012-11-06 | 2015-09-02 | 株式会社尼康 | Polarization beam splitter, substrate processing apparatus, device manufacturing system, and device manufacturing method |
| CN105334556A (en) * | 2015-12-01 | 2016-02-17 | 苏州谱道光电科技有限公司 | Reflecting prism for optical resonant cavity and optical resonant cavity and optical spectrum measuring instrument applying same |
Non-Patent Citations (1)
| Title |
|---|
| 鲜于子安 等: "金属镜面双反射消偏研究", 《航天返回与遥感》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108169923B (en) | 2021-01-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105589228B (en) | A kind of both view angle adjustment device and liquid crystal display | |
| Kim et al. | Excitonic resonance effects and Davydov splitting in circularly polarized Raman spectra of few-layer WSe2 | |
| ATE470172T1 (en) | DEVICE FOR GENERATING POLARIZATION-ENTRAGED PHOTONS | |
| Jin et al. | Polarization-independent electromagnetically induced transparency-like effects in stacked metamaterials based on Fabry–Perot resonance | |
| Bagley et al. | Laser-induced plasma generation of terahertz radiation using three incommensurate wavelengths | |
| Kovaleva et al. | Anomalous multi-order Raman scattering in LaMnO3: a signature of quantum lattice effects in a Jahn–Teller crystal | |
| Lyons et al. | 33. Phthalocyanine crystal spectra | |
| CN108169923A (en) | A kind of light source polarizer | |
| WO2004047082A3 (en) | Independent research consensus earnings estimates and methods of determining such | |
| Mirhosseini et al. | Ab initio spin-resolved photoemission and electron pair emission from a Dirac-type surface state in W (110) | |
| Kienberger et al. | 10th anniversary of attosecond pulses | |
| Smetanin et al. | Realisation of four-wave mixing phase matching for frequency components at intracavity stimulated Raman scattering in a calcite crystal | |
| CN111123534A (en) | Light source polarizer | |
| Suzuki et al. | Transmission, reflection, and absorption spectroscopy of graphene microribbons in the terahertz region | |
| Antonosyan et al. | Chirped quasi-phase-matching with Gauss sums for production of biphotons | |
| Qu et al. | Highly efficient 355 nm UV generation with non-collinear phase-matching by a prism-coupled device based on CsLiB6O10 | |
| Zhang et al. | Generation of femtosecond laser pulses at 396 nm in K3B6O10Cl crystal | |
| Sun et al. | Degenerate polarization entangled photon source based on a single Ti-diffusion lithium niobate waveguide in a polarization Sagnac interferometer | |
| Liu et al. | Generation and manipulation of higher order Fano resonances in plasmonic nanodisks with a built-in missing sectorial slice | |
| Oh et al. | Modification of interlayer interaction in bilayer MoS2 due to monolayer WSe2 in heterostructures | |
| Ren et al. | β-BaB2O4 with special cut-angle applied to single crystal cascaded third-harmonic generation | |
| Teshima et al. | Resonant second-harmonic generation in metal–insulator–metal structure | |
| Imai et al. | Preparation and physical properties of nanoaggregates composed of charge-transfer complexes containing butadiyne derivatives with tetrathiafulvalene moieties | |
| Kawamura et al. | Second-order nonlinear optical behavior of amorphous SiOx thin films grown by sputtering | |
| Zhai et al. | Frequency entanglement characterization of short-pulse pumped SPDC biphoton source with a Mach-Zehnder interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Feng Jie Inventor after: Ren Qing Inventor after: Ma Su Inventor before: Ma Su |
|
| CB03 | Change of inventor or designer information | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20210107 Address after: 518100 building 2-2, tongfuyu Industrial Zone, Aiqun Road, Shiyan street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Feng Jie Applicant after: Ren Qing Address before: Room 501, block a, building 3, service outsourcing base, new Changhai center, 29 Bancang South Road, Changsha Economic and Technological Development Zone, Changsha City, Hunan Province, 410000 Applicant before: CHANGSHA TUOPU LUCHUAN NEW MATERIAL TECHNOLOGY Co.,Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210507 Address after: 215600 No.27, Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee after: Suzhou Yuchuan Optical Technology Co.,Ltd. Address before: 518100 building 2-2, tongfuyu Industrial Zone, Aiqun Road, Shiyan street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Feng Jie Patentee before: Ren Qing |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240417 Address after: Room 401, Building 5, No. 27 Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province, 215600 Patentee after: Suzhou Yuchuan Optical Instrument Co.,Ltd. Country or region after: China Address before: 215600 No.27, Jinxing Road, Jinfeng Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: Suzhou Yuchuan Optical Technology Co.,Ltd. Country or region before: China |
|
| TR01 | Transfer of patent right |