CN108169870A - Prefocusing auto-focusing galvanometer and prefocusing Atomatic focusing method - Google Patents
Prefocusing auto-focusing galvanometer and prefocusing Atomatic focusing method Download PDFInfo
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- CN108169870A CN108169870A CN201711470120.8A CN201711470120A CN108169870A CN 108169870 A CN108169870 A CN 108169870A CN 201711470120 A CN201711470120 A CN 201711470120A CN 108169870 A CN108169870 A CN 108169870A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/09—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted for automatic focusing or varying magnification
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
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Abstract
The present invention relates to laser mirror techniques field, more particularly, to a kind of prefocusing auto-focusing galvanometer and prefocusing Atomatic focusing method, to alleviate the technical issues of focusing structure in the prior art is complex.Including focusing microscope group, galvanometer and distance measuring sensor；Light enters galvanometer through focusing microscope group, is then exported by galvanometer to mark plane；Distance measuring sensor is used to measure range data of the galvanometer apart from mark plane, and range data is fed back to focusing microscope group；Focusing microscope group adjusts self-position so that the focus of light path reaches mark plane according to range data.Technical solution provided by the invention realizes automatic focusing, and focus adjustment method is simple.
Description
Technical field
The present invention relates to laser mirror techniques field, more particularly, to a kind of prefocusing auto-focusing galvanometer and prefocusing from
Dynamic focusing method.
Background technology
Vibration mirror scanning type labelling head is mainly made of mark software of XY scanning mirrors, field lens, galvanometer and computer control etc..
Corresponding optical component is selected according to the difference of optical maser wavelength.Relevant option further includes laser beam expanding lens, laser etc..Its
Operation principle is that laser beam is incident on two first speculums (scanning mirror), the angle of reflection for first speculum that computerizeds control
Degree, the two first speculums, so as to reach the deflection of laser beam, can make with certain power density respectively along X, Y axis scanning
Laser focus point on mark material by required requirement campaign, so as to leave permanent label on material surface.
But existing most of laser galvanometer does not have automatic focusing function, certain laser with automatic focusing function
The technical issues of focusing structure of galvanometer is complex.
Invention content
The purpose of the present invention is to provide a kind of prefocusing auto-focusing galvanometer and prefocusing Atomatic focusing method, to alleviate
The technical issues of focusing structure in the prior art is complex.
To alleviate above-mentioned technical problem, technical solution provided by the invention is：
A kind of prefocusing auto-focusing galvanometer, including focusing microscope group, galvanometer and distance measuring sensor；
Light enters the galvanometer through the focusing microscope group, is then exported by the galvanometer to mark plane；
The distance measuring sensor is for measuring range data of the galvanometer apart from mark plane, and by the range data
The focusing microscope group is fed back to,
The focusing microscope group adjusts self-position so that the focus of light path reaches mark plane according to the range data.
Further,
The measurement light of the distance measuring sensor is emitted directly toward the mark plane.
Further,
The prefocusing auto-focusing galvanometer is additionally provided with the first speculum, and the distance measuring sensor is set to described first
The top of speculum, the measurement light of the distance measuring sensor pass through mark plane described in directive after first speculum.
Further,
The prefocusing auto-focusing galvanometer is provided with the second speculum, and second speculum is set to the focusing lens
Between group and the galvanometer, the distance measuring sensor is set to above second speculum, the measurement of the distance measuring sensor
Light, along galvanometer described in the light path directive of mark laser, is then put down after second speculum reflection through galvanometer directive mark
Face.
Further,
The focusing microscope group includes horizontal glass, index glass and regulating mechanism；
The index glass is coaxially disposed with the horizontal glass, and the regulating mechanism is connect with the index glass, described dynamic for driving
Mirror moves the focus to adjust light path in the axial direction.
Further,
The regulating mechanism includes sliding block and the actuator being connect with the sliding block, the axis of the output shaft of the actuator
Line is oriented parallel to the axis direction of the index glass；The actuator is used to adjust the index glass and the horizontal glass in the axial direction
The distance between.
Further,
The sliding block includes pedestal and connecting seat；
The side of the pedestal is connected with index glass, and the axis for wearing actuator output shaft is provided on the connecting seat
Hole.
A kind of prefocusing Atomatic focusing method, including：
The measurement light of distance measuring sensor is emitted directly toward mark plane to obtain range data of the galvanometer apart from mark plane,
And the range data is fed back into focusing microscope group；
The focusing microscope group adjusts self-position according to the range data, so that the focus of light path reaches mark plane.
A kind of prefocusing Atomatic focusing method, including：
Mark plane described in directive is to obtain vibrating mirror distance after the measurement light of distance measuring sensor passes through first speculum
Range data from mark plane, and the range data is fed back into focusing microscope group；
The focusing microscope group adjusts self-position according to the range data, so that the focus of light path reaches mark plane；
Wherein, the distance measuring sensor is set to the top of first speculum.
A kind of prefocusing Atomatic focusing method, including：
Distance measuring sensor measures light after the reflection of the second speculum along galvanometer described in the light path directive of mark laser, so
By galvanometer directive mark plane to obtain range data of the galvanometer apart from mark plane, and the range data is fed back into tune
Burnt microscope group；
The focusing microscope group adjusts self-position according to the range data, so that the focus of light path reaches mark plane；
With reference to above-mentioned technical proposal, the advantageous effect that the present invention can reach is：
Due to prefocusing auto-focusing galvanometer provided by the invention, including focusing microscope group, galvanometer and distance measuring sensor.Light
Enter the galvanometer through the focusing microscope group, then exported by the galvanometer to mark plane.The distance measuring sensor is used to survey
Range data of the galvanometer apart from mark plane is measured, and the range data is fed back into the focusing microscope group.The focusing
Microscope group adjusts self-position so that the focus of light path reaches mark plane according to the range data.
Auto-focusing galvanometer provided by the invention realizes auto-focusing, and focusing principle is simple, simple in structure.
Description of the drawings
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution of the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in being described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is that the overall structure diagram of one of which prefocusing auto-focusing galvanometer provided in an embodiment of the present invention is (perpendicular
Straight downwardly direction is beam projecting direction)；
Fig. 2 is the overall structure diagram of another prefocusing auto-focusing galvanometer provided in an embodiment of the present invention；
Fig. 3 is the overall structure diagram of another prefocusing auto-focusing galvanometer provided in an embodiment of the present invention；
Fig. 4 is the light path schematic diagram of the prefocusing auto-focusing galvanometer in Fig. 3；
Fig. 5 is the structure diagram of focusing microscope group in prefocusing auto-focusing galvanometer provided in an embodiment of the present invention.
Icon：100- focusing microscope groups；200- galvanometers；300- distance measuring sensors；The first speculums of 400-；500-
Two-mirror；110- horizontal glass；120- index glass；130- regulating mechanisms；131- sliding blocks；132- actuators；1311- pedestals；1312-
Connecting seat；600- mark planes；A- mark laser；B- measures light.
Specific embodiment
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's all other embodiments obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instructions such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Convenient for the description present invention and simplify description rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected；It can
To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Embodiment 1 and embodiment 2 are described in detail below in conjunction with the accompanying drawings：
Fig. 1 is that the overall structure diagram of one of which prefocusing auto-focusing galvanometer provided in an embodiment of the present invention is (perpendicular
Straight downwardly direction is beam projecting direction)；Fig. 2 is another prefocusing auto-focusing galvanometer provided in an embodiment of the present invention
Overall structure diagram；Fig. 3 is that the overall structure of another prefocusing auto-focusing galvanometer provided in an embodiment of the present invention is illustrated
Figure；Fig. 4 is the light path schematic diagram of the prefocusing auto-focusing galvanometer in Fig. 3；Fig. 5 for prefocusing provided in an embodiment of the present invention from
The structure diagram of focusing microscope group in dynamic focusing galvanometer.
Embodiment 1
A kind of prefocusing auto-focusing galvanometer is present embodiments provided, please with reference to Fig. 1 to Fig. 5, including focusing microscope group
100th, galvanometer 200 and distance measuring sensor 300.
Light enters galvanometer 200 through focusing microscope group 100, is then exported by galvanometer 200 to mark plane 600；
Distance measuring sensor 300 is used to measure range data of the galvanometer 200 apart from mark plane 600, and range data is anti-
It is fed to focusing microscope group 100；
Focusing microscope group 100 adjusts self-position so that the focus of light path reaches mark plane 600 according to range data.
The advantageous effect that above-mentioned prefocusing auto-focusing galvanometer can reach is analyzed as follows：
Due to prefocusing auto-focusing galvanometer provided by the invention, sensed including focusing microscope group 100, galvanometer 200 and ranging
Device 300.Light enters galvanometer 200 through focusing microscope group 100, is then exported by galvanometer 200 to mark plane 600.Distance measuring sensor
300 are used to measure range data of the galvanometer 200 apart from mark plane 600, and range data is fed back to focusing microscope group 100.It adjusts
Burnt microscope group 100 adjusts self-position so that the focus of light path reaches mark plane 600 according to range data.It is provided by the invention from
Dynamic focusing galvanometer 200 realizes auto-focusing, and focusing principle is simple, simple in structure.
Three kinds of measurement schemes are present embodiments provided, specifically：
Mode one：Distance measuring sensor 300 directly projects light measurement, specifically please refers to Fig. 1, mark laser is through focusing microscope group
100 directive galvanometers 200, then by 200 directive mark plane 600 (direction is projected in figure as straight down) of galvanometer.Measure light
By 300 directive mark plane 600 of distance measuring sensor, it is parallel with mark laser to measure light.
Mode two, prefocusing auto-focusing galvanometer are additionally provided with the first speculum 400, specifically please refer to Fig. 2, ranging sensing
Device 300 is set to the top of the first speculum 400, and the measurement light (B in figure) of distance measuring sensor 300 is across the first speculum
Directive mark plane 600 after 400.It specifically please refers to, 2, mark laser (A in figure) is through 100 directive galvanometer 200 of focusing microscope group, so
Afterwards by 200 the first speculum of directive 400 of galvanometer (injection be reversed in figure it is horizontal to the right), mark laser is through the first speculum
Directive mark plane 600 after 400 reflection (exit direction be in figure straight down).Light is measured by distance measuring sensor 300
The first speculum of directive 400, across the first speculum 400 after directive mark plane 600, measure pipeline and mark laser at this time and pass through
Light ray parallel after the reflection of first speculum 400.It should be noted that mark laser reflects on the first speculum 400
Phenomenon.Light is measured to occur to transmit phenomenon on the first speculum 400.
Mode three, prefocusing auto-focusing galvanometer are provided with the second speculum 500, and the second speculum 500 is set to focusing
Between microscope group 100 and galvanometer 200, distance measuring sensor 300 is set to 500 top of the second speculum.Mark laser (A in Fig. 4) passes through
Through the second speculum 500 after focusing microscope group 100, then by 500 directive galvanometer 200 of the second speculum, then penetrated by galvanometer 200
To mark plane 600 (such as Fig. 4).The measurement light (B in figure) of distance measuring sensor 300 is beaten on edge after the reflection of the second speculum 500
The light path directive galvanometer 200 of laser is marked, then through 200 directive mark plane 600 of galvanometer, the survey after the reflection of mark plane 600
Light is measured along original route negative direction directive distance measuring sensor 300.It should be noted that mark laser is on the second speculum 500
Transmission phenomenon occurs, measures light and refraction effect occurs on the second speculum 500.
In the alternative of the present embodiment, more preferably,
Focusing microscope group 100 includes horizontal glass 110, index glass 120 and regulating mechanism 130 (please referring to Fig. 5)；
Index glass 120 is coaxially disposed with horizontal glass 110, and regulating mechanism 130 is connect with index glass 120, for driving index glass 120 along axis
Line direction moves the focus to adjust light path.The trend of light path is：Light by 120 directive horizontal glass 110 of index glass (alternatively, light by
110 directive index glass 120 of horizontal glass).The distance between index glass 120 and horizontal glass 110 influence irradiant focal position, therefore, lead to
The distance between index glass 120 and horizontal glass 110 are overregulated, can realize the accurate positionin of the focus of emergent ray.
The shape and structure of regulating mechanism 130 can set a variety of, hereby enumerate in the following manner below and are described in detail：
Mode one：More preferably, regulating mechanism 130 includes sliding block 131 and the actuator 132 being connect with sliding block 131,
The axis direction of the output shaft of actuator 132 is parallel to the axis direction of index glass 120；Actuator 132 is used to adjust in the axial direction
Save the distance between index glass 120 and horizontal glass 110.Further, sliding block 131 includes pedestal 1311 and connecting seat 1312；Bottom
The side of seat 1311 is connected with index glass 120, and the axis hole for wearing 132 output shaft of actuator is provided on connecting seat 1312.More
Further, pedestal 1311 is set as flat structure, and the side of pedestal 1311 is fixedly connected with index glass 120, pedestal 1311
Top is provided with connecting seat 1312, has gap between connecting seat 1312 and index glass 120.Further, connecting seat 1312 is set
Flat structure is set to, and vertical with pedestal 1311.Further, 1312 middle part of connecting seat is provided with through-hole, above-mentioned
Through-hole is used to wear the output shaft for penetrating actuator 132.Further, be provided with bearing in above-mentioned through-hole, actuator 132 it is defeated
Shaft is arranged in bearing, to ensure that actuator 132 extends or keeps smooth during retracting.Further, it drives
The output shaft of part 132 is interference fitted with connecting seat 1312.Further, actuator 132 is set as motor.Further,
Actuator 132 is set as linear motor.Further, actuator 132 is set as cylinder.Further, actuator 132 is set
It is set to hydraulic cylinder.
Mode two：Regulating mechanism 130 includes sliding rail, sliding block 131 and driving mechanism.Sliding block 131 is installed on sliding rail, driving machine
Structure band movable slider 131 moves on sliding rail.Further, sliding rail includes chain and the driving wheel for being set to sliding rail both ends,
Driving mechanism is connect with driving wheel, and for driving wheel to be driven to rotate, driving wheel drives chain movement, chain fortune during rotating
Band movable slider 131 moves in dynamic process.Further, sliding block 131 is fixedly connected with chain.Further, driving machine
Structure is set as electric rotating machine.
In the alternative of the present embodiment, more preferably,
Auto-focusing galvanometer 200 further includes housing, and focusing microscope group 100, galvanometer 200 and distance measuring sensor 300 are respectively positioned on shell
Internal portion.
Embodiment 2
A kind of prefocusing Atomatic focusing method is present embodiments provided, Fig. 1 is please referred to, includes the following steps：
A1, distance measuring sensor 300 measurement light be emitted directly toward mark plane 600 and put down with obtaining galvanometer 200 apart from mark
The range data in face 600, and range data is fed back into focusing microscope group 100；
A2, focusing microscope group 100 adjust self-position according to range data, so that the focus of light path reaches mark plane 600.
The prefocusing auto-focusing galvanometer that prefocusing Atomatic focusing method provided in this embodiment is applicable in please refers to Fig. 1.
Then mark laser (is penetrated through 100 directive galvanometer 200 of focusing microscope group by 200 directive mark plane 600 of galvanometer in figure
Outgoing direction is straight down).Light is measured by 300 directive mark plane 600 of distance measuring sensor, light is measured and is put down with mark laser
Row.
Embodiment 3
A kind of prefocusing Atomatic focusing method is present embodiments provided, please refers to Fig. 2, including：
B1, distance measuring sensor 300 measurement light pass through the first speculum 400 after directive mark plane 600 to be shaken
Range data of the mirror 200 apart from mark plane 600, and range data is fed back into focusing microscope group 100；
B2, focusing microscope group 100 adjust self-position according to range data, so that the focus of light path reaches mark plane 600；
Wherein, distance measuring sensor 300 is set to the top of the first speculum 400.
The prefocusing auto-focusing galvanometer that prefocusing Atomatic focusing method provided in this embodiment is applicable in please refers to Fig. 2.
Then mark laser (is projected through 100 directive galvanometer 200 of focusing microscope group by 200 the first speculum of directive 400 of galvanometer
Be reversed in figure it is horizontal to the right), mark laser 600 (exit direction of directive mark plane after the reflection of the first speculum 400
For in figure straight down).Light is measured by 300 the first speculum of directive 400 of distance measuring sensor, across the first speculum 400
Directive mark plane 600 afterwards measures light ray parallel of the pipeline with mark laser after the reflection of the first speculum 400 at this time.It needs
Illustrate, on the first speculum 400 refraction effect occurs for mark laser.Light is measured on the first speculum 400 to occur
Transmit phenomenon.
Embodiment 4
A kind of prefocusing Atomatic focusing method is present embodiments provided, please refers to Fig. 3 and Fig. 4, including：
C1, distance measuring sensor 300 measurement light shake after the reflection of the second speculum 500 along the light path directive of mark laser
Mirror 200, then through 200 directive mark plane 600 of galvanometer to obtain range data of the galvanometer 200 apart from mark plane 600, and will
Range data feeds back to focusing microscope group 100；
C2, focusing microscope group 100 adjust self-position according to range data, so that the focus of light path reaches mark plane 600；
Wherein, the second speculum 500 is set between focusing microscope group 100 and galvanometer 200, and distance measuring sensor 300 is set to
Second speculum, 500 top.
The prefocusing auto-focusing galvanometer that prefocusing Atomatic focusing method provided in this embodiment is applicable in please refers to Fig. 3 and figure
4。
Mark laser penetrates the second speculum 500 after focusing microscope group 100, then by 500 directive galvanometer of the second speculum
200, then by 200 directive mark plane 600 (such as Fig. 4) of galvanometer.The measurement light of distance measuring sensor 300 is through the second speculum
Along the light path directive galvanometer 200 of mark laser after 500 reflections, then through 200 directive mark plane 600 of galvanometer, through mark plane
Measurement light after 600 reflections is along original route negative direction directive distance measuring sensor 300.It should be noted that mark laser is
Transmission phenomenon occurs on two-mirror 500, measures light and refraction effect occurs on the second speculum 500.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe is described in detail the present invention with reference to foregoing embodiments, it will be understood by those of ordinary skill in the art that：Its according to
Can so modify to the technical solution recorded in foregoing embodiments either to which part or all technical features into
Row equivalent replacement；And these modifications or replacement, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of prefocusing auto-focusing galvanometer, which is characterized in that including focusing microscope group, galvanometer and distance measuring sensor；
Light enters the galvanometer through the focusing microscope group, is then exported by the galvanometer to mark plane；
The distance measuring sensor is used to measure range data of the galvanometer apart from mark plane, and feeding back the range data into
The extremely focusing microscope group,
The focusing microscope group adjusts self-position so that the focus of light path reaches mark plane according to the range data.
2. prefocusing auto-focusing galvanometer according to claim 1, which is characterized in that
The measurement light of the distance measuring sensor is emitted directly toward the mark plane.
3. prefocusing auto-focusing galvanometer according to claim 1, which is characterized in that
The prefocusing auto-focusing galvanometer is additionally provided with the first speculum, and the distance measuring sensor is set to first reflection
The top of mirror, the measurement light of the distance measuring sensor pass through mark plane described in directive after first speculum.
4. prefocusing auto-focusing galvanometer according to claim 1, which is characterized in that
The prefocusing auto-focusing galvanometer is provided with the second speculum, second speculum be set to the focusing microscope group and
Between the galvanometer, the distance measuring sensor is set to above second speculum, the measurement light of the distance measuring sensor
Along galvanometer described in the light path directive of mark laser after second speculum reflection, then through galvanometer directive mark plane.
5. prefocusing auto-focusing galvanometer according to claim 1, which is characterized in that
The focusing microscope group includes horizontal glass, index glass and regulating mechanism；
The index glass is coaxially disposed with the horizontal glass, and the regulating mechanism is connect with the index glass, for driving the index glass edge
Axis direction moves the focus to adjust light path.
6. prefocusing auto-focusing galvanometer according to claim 5, which is characterized in that
The regulating mechanism includes sliding block and the actuator being connect with the sliding block, the axis side of the output shaft of the actuator
To the axis direction for being parallel to the index glass；The actuator is used to adjust in the axial direction between the index glass and the horizontal glass
Distance.
7. prefocusing auto-focusing galvanometer according to claim 6, which is characterized in that
The sliding block includes pedestal and connecting seat；
The side of the pedestal is connected with index glass, and the axis hole for wearing actuator output shaft is provided on the connecting seat.
8. a kind of prefocusing Atomatic focusing method, which is characterized in that including：
The measurement light of distance measuring sensor is emitted directly toward mark plane to obtain range data of the galvanometer apart from mark plane, and will
The range data feeds back to focusing microscope group；
The focusing microscope group adjusts self-position according to the range data, so that the focus of light path reaches mark plane.
9. a kind of prefocusing Atomatic focusing method, which is characterized in that including：
Directive mark plane is to obtain galvanometer apart from mark plane after the measurement light of distance measuring sensor passes through the first speculum
Range data, and the range data is fed back into focusing microscope group；
The focusing microscope group adjusts self-position according to the range data, so that the focus of light path reaches mark plane；
Wherein, the distance measuring sensor is set to the top of first speculum.
10. a kind of prefocusing Atomatic focusing method, which is characterized in that including：
Distance measuring sensor measures light after the reflection of the second speculum along the light path directive galvanometer of mark laser, then through galvanometer
The range data is fed back to focusing microscope group by directive mark plane to obtain range data of the galvanometer apart from mark plane；
The focusing microscope group adjusts self-position according to the range data, so that the focus of light path reaches mark plane；
Wherein, second speculum is set between the focusing microscope group and the galvanometer, and the distance measuring sensor is set to
Above second speculum.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109124576A (en) * | 2018-06-28 | 2019-01-04 | 苏州佳世达光电有限公司 | Can auto-focusing oral cavity scanning machine |
| CN116577900A (en) * | 2023-07-13 | 2023-08-11 | 中国科学院长春光学精密机械与物理研究所 | Photoelectric imaging system with allele focal length adjustment function |
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