CN108163821A - The preparation method of spherical titanium nitride - Google Patents

The preparation method of spherical titanium nitride Download PDF

Info

Publication number
CN108163821A
CN108163821A CN201810089384.7A CN201810089384A CN108163821A CN 108163821 A CN108163821 A CN 108163821A CN 201810089384 A CN201810089384 A CN 201810089384A CN 108163821 A CN108163821 A CN 108163821A
Authority
CN
China
Prior art keywords
titanium nitride
gas
nitrogen
powder
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810089384.7A
Other languages
Chinese (zh)
Other versions
CN108163821B (en
Inventor
赖奇
廖先杰
张树立
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panzhihua University
Original Assignee
Panzhihua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panzhihua University filed Critical Panzhihua University
Priority to CN201810089384.7A priority Critical patent/CN108163821B/en
Publication of CN108163821A publication Critical patent/CN108163821A/en
Application granted granted Critical
Publication of CN108163821B publication Critical patent/CN108163821B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/076Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00Crystal-structural characteristics
    • C01P2002/70Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/03Particle morphology depicted by an image obtained by SEM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/30Particle morphology extending in three dimensions
    • C01P2004/32Spheres

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Ceramic Products (AREA)

Abstract

The present invention relates to the preparation methods of spherical titanium nitride, and in particular to the method that spherical titanium nitride is prepared using radio frequency plasma powder production equipment.The technical problem to be solved by the present invention is to provide a kind of preparation methods of the high spherical titanium nitride of Oxygen potential.The method of the present invention uses radio frequency plasma equipment as reaction unit, using hydride powder as raw material, using nitrogen as reaction gas, titanium nitride powder is prepared in one step, and technological process is short, the reaction time is extremely short, substantially increases production efficiency, the product free from admixture pollution of acquisition, preparation process is simple, relatively low to ingredient requirement, and the industrialized production to realize spherical titanium nitride powder is laid a good foundation.The spherical titanium nitride powder being prepared using the method for the present invention, Oxygen potential and nitriding rate are all very high.It prepares raw material and does not need to be largely broken, particle size is small.

Description

The preparation method of spherical titanium nitride
Technical field
The present invention relates to the preparation methods of spherical titanium nitride, and in particular to utilizes radio frequency plasma powder production equipment system The method of standby spherical shape titanium nitride.
Background technology
Metallic compound TiN has many excellent physics and chemical property, its corrosion resistance, abrasion resistance and anti-oxidant Property it is all very excellent, have higher fusing point (3205 DEG C) and the (× 9.8N/mm of hardness 19902).TiN is deposited on jewellery and lamps and lanterns On can not only reach aesthetic effect, but also wear-resisting property can be enhanced, be the potential material instead of now widely used WC, Ke Yi great The big cost for reducing material application.TiN compounds have higher bio-compatibility, in terms of clinical medicine and dentistry With very high application value.In addition TiN also is used as manufacture crucible, cutting tool, additive etc..The application of TiN powder is wide Degree and depth are extremely unbecoming with excellent properties that it is possessed, need people and research and develop, can indicate, titanium nitride powder will As century new material.
As what TiN was studied deepens continuously, the method for preparing TiN powder is also more and more.It is prepared by traditional TiN powder Method, such as:The TiN powder shape that metallic titanium powder nitriding, titanium dioxide CRN method, vapor phase method etc. obtain is not advised Then, mobility is poor, and performance is had a greatly reduced quality, and nitriding rate is not high, and nitridation time is longer, and particle size range is wider, the energy Consumption is big.Up to the present, there are no effective and the problem above containing lid solutions.
Compared with aspherical titanium nitride powder, the mechanical performance of spherical titanium nitride is the same in all directions, The product haveing excellent performance easily is obtained in powder metallurgy and 3D printing.Therefore, it is simple to be badly in need of a kind of preparation process, Oxygen potential is high The preparation method of spherical titanium nitride.
Patent 200410072553.4 discloses a kind of method of reaction plasma spraying nano crystal titanium nitride powder, uses Plasma gun is sprayed, and what is specifically included have main steps that:Titanium valve is packed into powder feeder, be sent into hybrid ionic gas, to Lead to nitrogen in reative cell, titanium valve powder is sent to enter flame stream, spray and collect into the container being filled with water, using this method, can obtain To the titanium nitride powder particle of a diameter of 30~100nm, still, this method needs pure titanium valve for raw material, needs to prepare not in advance With the titanium powder particle of grain size, then to be nitrogenized.Preparation process is complicated, and equipment requirement is high.Importantly, pure titanium valve is in sky It is oxidizable in gas, form titanium oxide.This is unfavorable for nitridation.In addition, the spontaneous combustion danger of pure titanium valve is much bigger, The safety requirements higher of production.Titanium valve powder is sent to enter flame stream, during spraying and collecting into the container being filled with water, energy damage It loses big.And obtained titanium nitride sphericity is bad, Oxygen potential needs further improve.
Invention content
For disadvantages described above, the technical problem to be solved by the present invention is to provide a kind of preparation process is simple, the high ball of Oxygen potential The preparation method of shape titanium nitride.
The preparation method of spherical shape titanium nitride of the invention, is prepared using radio frequency plasma equipment, specifically included as follows Step:
A, the starting the arc:Using argon gas as the ionized gas starting the arc, while the protective gas of nitrogen from radio frequency plasma equipment is entered It is passed through at mouthful;The operating voltage for controlling radio frequency plasma equipment is 5~15kV, and power is 30~200kW;
B, feeding:After arc stabilization, it is 1 to control the flow-rate ratio of the argon gas being passed through and nitrogen:20~10:1, then by feeding Device is sent into hydride powder, obtains spherical titanium nitride.
Preferably, in a steps, after arc stabilization, ionized gas is become to the mixed gas of argon gas and nitrogen.
Preferably, in the mixed gas of the argon gas and nitrogen, the volume ratio of argon gas and nitrogen is 1:5~10:1.
It is further preferred that in the mixed gas of the argon gas and nitrogen, preferably the volume ratio of argon gas and nitrogen is 1:2~ 3:1。
Preferably, in b step, the grain size of hydride powder is 10~400 μm.
It is further preferred that the hydride powder is fed using vibration, amplitude is 10~80%.
Compared with prior art, the present invention has the advantages that:
The present invention uses radio frequency plasma equipment as reaction unit, using hydride powder as raw material, using nitrogen as reaction gas Titanium nitride powder is prepared in body, a step, and technological process is short, the reaction time is extremely short, substantially increases production efficiency, acquisition Product free from admixture pollutes, and preparation process is simple, relatively low to ingredient requirement, and the industrialized production to realize spherical titanium nitride powder is established Basis is determined.
The spherical titanium nitride powder being prepared using the method for the present invention, Oxygen potential and nitriding rate are all very high.Prepare raw material Do not need to be largely broken, particle size is small.
The present invention is applicable not only to the preparation of spherical nitridation titanium valve, is also applied for spherical nitridation zirconium powder and other nitridation ball powder Preparation.
Description of the drawings
Fig. 1 is the XRD diagram of titanium nitride prepared by the present invention.
Fig. 2 is the SEM figures of titanium nitride prepared by the present invention.
Specific embodiment
The preparation method of spherical shape titanium nitride of the invention, is prepared using radio frequency plasma equipment, specifically included as follows Step:
A, the starting the arc:Using argon gas as the ionized gas starting the arc, while the protective gas of nitrogen from radio frequency plasma equipment is entered It is passed through at mouthful;The operating voltage for controlling radio frequency plasma equipment is 5~15kV, and power is 30~200kW;
B, feeding:After arc stabilization, it is 1 to control the flow-rate ratio of the argon gas being passed through and nitrogen:20~10:1, then by feeding Device is sent into hydride powder, and Direct-Nitridation while hydride powder dehydrogenation, nodularization, obtains the nitrogen of half melt in plasma torch Change titanium;
C, nodularization:The titanium nitride of half melt is under the action of surface tension, and cooled and solidified is into spherical shape.
Radio frequency plasma spheroidizing of powder technology is existing technology, and principle is the indifferent gas under high frequency electric source effect Body is ionized, and forms stable high temperature inert gas plasma;And raw material in irregular shape through feed device be sent into etc. from In daughter torch, a large amount of heat is absorbed in high-temperature plasma, surface is melted rapidly, and enters reactor with high speed, It is quickly cooled down under an inert atmosphere, in the effect of surface tension, cooled and solidified is into spherical powder.And the present invention is by controlling radio frequency The voltage of plasma apparatus, power and the parameters such as particular kind of gas and specific gas flow are passed through, realize and waiting Direct-Nitridation while hydride powder dehydrogenation, nodularization, obtains spherical titanium nitride in gas ions torch.Its reaction principle is:
TiH2=Ti+H2
2Ti+N2=2TiN
The method of the present invention, above-mentioned two-step reaction are being passed through the radio frequency plasma high-temperature field condition of argon gas and nitrogen in next step It carries out.First, argon gas is passed through from radio frequency plasma equipment center, i.e. ionized gas inlet is passed through, and nitrogen is from radio frequency etc. Gas ions device end is passed through, i.e., is passed through at gas atmosphere inlet.Argon gas stream is easy to generate plasma jet in this way, by titantium hydride object Material carries out pyrolytic.Nitrogen is passed through from radio frequency plasma powder production device end can make nitridation reaction more complete.It should The titanium nitride Oxygen potential and nitriding rate that method obtains are higher, and nodularization and nitridation are carried out at the same time, and substantially increase production efficiency.
In order to improve Oxygen potential, it is preferred that in a steps, using argon gas as the ionized gas starting the arc, obtain argon arc, treat that argon arc is steady After fixed, ionized gas is become to the mixed gas of argon gas and nitrogen, at this point, argon gas nitrogen arc will be formed.In plasma torch Nitrogen ionization as heat source for reaction while again be used as reactant, reacted at high temperature with titanium valve and directly obtain spherical titanium nitride Powder can not only save reaction energy consumption, moreover it is possible to improve product purity and Oxygen potential.
It is furthermore preferred that in the mixed gas of the argon gas and nitrogen, the volume ratio of argon gas and nitrogen is 1:5~10:1, more Preferably, the volume ratio of argon gas and nitrogen is 1:2~3:1.When ionized gas is mixed gas, total argon that control is passed through is still needed to The flow-rate ratio of gas and total nitrogen is 1:20~10:1.In the present invention, nitrogen or argon gas, the unit of flow use m3/h。
The grain size of common hydride powder is suitable for the present invention, it is preferred that in b step, the grain size of hydride powder is 40 ~100 μm.
Preferably, the hydride powder is fed using vibration, and amplitude is 10~80%, can cause hydrogen in this way The reaction for changing titanium valve is more complete, improves nitriding rate.
The specific embodiment of the present invention is further described with reference to embodiment, is not therefore limited the present invention System is among the embodiment described range.
Embodiment 1
Spherical titanium nitride powder is produced using radio frequency plasma powder production equipment.The life of radio frequency plasma powder is set The amplitude for producing the feed arrangement of equipment is 20%, operating voltage 10.5kV, power 48kW." side gas " (i.e. gas atmosphere inlet) is logical Enter nitrogen, " middle gas " (i.e. ionized gas entrance) is first passed through the argon gas starting the arc, is passed through the mixing of argon gas and nitrogen again after arc stabilization Gas, it is 2 to control nitrogen flow and argon flow amount ratio:1, spherical titanium nitride powder is prepared in feeding reaction 5min rewindings.Its XRD spectrum is shown in Fig. 1, and SEM spectrum is shown in Fig. 2.Oxygen potential reaches 80%, nitriding rate 83%.
Wherein, Oxygen potential carries out the acquisition of morphology observation nodularization quantity using scanning electron microscope.Nitriding rate is measured using energy disperse spectroscopy Sample surfaces simultaneously combine the acquisition of X-ray diffractometer analysis result.
Embodiment 2
Spherical titanium nitride powder is produced using radio frequency plasma powder production equipment.The life of radio frequency plasma powder is set The amplitude for producing the feed arrangement of equipment is 22%, operating voltage 11.5kV, power 55kW." side gas " (i.e. gas atmosphere inlet) is logical Enter nitrogen, " middle gas " (i.e. ionized gas entrance) is passed through the argon gas starting the arc, and nitrogen flow and argon flow amount ratio are 1:1.Treat that arc is steady Titantium hydride is sent into after fixed, feeding reaction 5min rewindings measure titanium nitride powder quality as 27g.Its XRD spectrum is similar with Fig. 1, SEM spectrum is similar with Fig. 2.Oxygen potential reaches 82%, nitriding rate 76%.
Embodiment 3
Spherical titanium nitride powder is produced using radio frequency plasma powder production equipment.The life of radio frequency plasma powder is set The amplitude for producing the feed arrangement of equipment is 24%, operating voltage 8kV, power 40kW." side gas " (i.e. gas atmosphere inlet) is passed through Nitrogen, " middle gas " (i.e. ionized gas entrance) are first passed through the argon gas starting the arc, are passed through the mixed air of argon gas and nitrogen again after arc stabilization, Nitrogen flow and argon flow amount ratio are 3:2, feeding reaction 5min rewindings measure titanium nitride powder quality as 28g.Its XRD diagram Spectrum is similar with Fig. 1, and SEM spectrum is similar with Fig. 2.Oxygen potential reaches 88%, nitriding rate 78%.
Embodiment 4
Spherical titanium nitride powder is produced using radio frequency plasma powder production equipment.The life of radio frequency plasma powder is set The amplitude for producing the feed arrangement of equipment is 10%, operating voltage 15kV, power 200kW." side gas " (i.e. gas atmosphere inlet) is logical Enter nitrogen, " middle gas " (i.e. ionized gas entrance) is first passed through the argon gas starting the arc, is passed through the mixing of argon gas and nitrogen again after arc stabilization Gas, nitrogen flow and argon flow amount ratio are 3:20, feeding reaction 5min rewindings measure titanium nitride powder quality as 19g.Its XRD spectrum is similar with Fig. 1, and SEM spectrum is similar with Fig. 2.Oxygen potential reaches 91%, nitriding rate 56%.
Embodiment 5
Spherical titanium nitride powder is produced using radio frequency plasma powder production equipment.The life of radio frequency plasma powder is set The amplitude for producing the feed arrangement of equipment is 80%, operating voltage 12kV, power 60kW." side gas " (i.e. gas atmosphere inlet) is passed through Nitrogen, " middle gas " (i.e. ionized gas entrance) are first passed through the argon gas starting the arc, are passed through the mixed air of argon gas and nitrogen again after arc stabilization, Nitrogen flow and argon flow amount ratio are 9:10, feeding reaction 5min rewindings measure titanium nitride powder quality as 42g.Its XRD diagram Spectrum is similar with Fig. 1, and SEM spectrum is similar with Fig. 2.Oxygen potential reaches 81%, nitriding rate 68%.

Claims (6)

1. the preparation method of spherical titanium nitride, it is characterised in that:Be prepared using radio frequency plasma equipment, specifically include as Lower step:
A, the starting the arc:Using argon gas as the ionized gas starting the arc, while by nitrogen at the gas atmosphere inlet of radio frequency plasma equipment It is passed through;The operating voltage for controlling radio frequency plasma equipment is 5~15kV, and power is 30~200kW;
B, feeding:After arc stabilization, it is 1 to control the flow-rate ratio of the argon gas being passed through and nitrogen:20~10:1, then by feed device Hydride powder is sent into, obtains spherical titanium nitride.
2. the preparation method of spherical shape titanium nitride according to claim 1, it is characterised in that:In a steps, after arc stabilization, Ionized gas is become to the mixed gas of argon gas and nitrogen.
3. the preparation method of spherical shape titanium nitride according to claim 2, it is characterised in that:The mixing of the argon gas and nitrogen In gas, the volume ratio of argon gas and nitrogen is 1:5~10:1.
4. the preparation method of spherical shape titanium nitride according to claim 3, it is characterised in that:The mixing of the argon gas and nitrogen In gas, preferably the volume ratio of argon gas and nitrogen is 1:2~3:1.
5. according to the preparation method of Claims 1 to 4 any one of them spherical shape titanium nitride, it is characterised in that:In b step, hydrogen The grain size for changing titanium valve is 10~400 μm.
6. according to the preparation method of Claims 1 to 5 any one of them spherical shape titanium nitride, it is characterised in that:The titantium hydride Powder is fed using vibration, and amplitude is 10~80%.
CN201810089384.7A 2018-01-30 2018-01-30 Preparation method of spherical titanium nitride Active CN108163821B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810089384.7A CN108163821B (en) 2018-01-30 2018-01-30 Preparation method of spherical titanium nitride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810089384.7A CN108163821B (en) 2018-01-30 2018-01-30 Preparation method of spherical titanium nitride

Publications (2)

Publication Number Publication Date
CN108163821A true CN108163821A (en) 2018-06-15
CN108163821B CN108163821B (en) 2019-12-13

Family

ID=62512612

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810089384.7A Active CN108163821B (en) 2018-01-30 2018-01-30 Preparation method of spherical titanium nitride

Country Status (1)

Country Link
CN (1) CN108163821B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109437132A (en) * 2018-12-14 2019-03-08 中信锦州金属股份有限公司 A kind of production method nitrogenizing titanium valve
CN110157937A (en) * 2019-04-09 2019-08-23 中国科学院金属研究所 A kind of titanium nitride block preparation method that ingredient is controllable
CN111620313A (en) * 2020-06-09 2020-09-04 合肥中航纳米技术发展有限公司 Process for preparing nano titanium nitride powder by chemical vapor deposition method
CN114920218A (en) * 2022-04-28 2022-08-19 湖南天际智慧材料科技有限公司 Process for preparing nitride nano or and submicron powder material

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101716686A (en) * 2010-01-05 2010-06-02 北京科技大学 Short-flow preparation method of micro-sized spherical titanium powder
CN101891163A (en) * 2010-07-07 2010-11-24 北京科技大学 Method for preparing superfine spherical iron nitride powder
CN103769594A (en) * 2013-11-25 2014-05-07 王利民 Technological method and device for preparing high-purity spherical superfine/nanoscale powdered materials in plasma atomization mode
CN103880433A (en) * 2012-12-19 2014-06-25 沈阳鑫劲粉体工程有限责任公司 Method for synthesizing silicon nitride powder through plasma gas phase reaction, and method for synthesizing silicon nitride composite powder through plasma gas phase reaction
CN105883731A (en) * 2015-01-22 2016-08-24 南京杰博宏镓新型材料有限公司 Preparation method of compound powder material
CN105967158A (en) * 2015-12-27 2016-09-28 北京工业大学 Ultra-thin titanium nitride powder low-temperature preparation method
CN106927436A (en) * 2015-12-30 2017-07-07 四平市高斯达纳米材料设备有限公司 A kind of preparation method of chromium nitride nano powder

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101716686A (en) * 2010-01-05 2010-06-02 北京科技大学 Short-flow preparation method of micro-sized spherical titanium powder
CN101891163A (en) * 2010-07-07 2010-11-24 北京科技大学 Method for preparing superfine spherical iron nitride powder
CN103880433A (en) * 2012-12-19 2014-06-25 沈阳鑫劲粉体工程有限责任公司 Method for synthesizing silicon nitride powder through plasma gas phase reaction, and method for synthesizing silicon nitride composite powder through plasma gas phase reaction
CN103769594A (en) * 2013-11-25 2014-05-07 王利民 Technological method and device for preparing high-purity spherical superfine/nanoscale powdered materials in plasma atomization mode
CN105883731A (en) * 2015-01-22 2016-08-24 南京杰博宏镓新型材料有限公司 Preparation method of compound powder material
CN105967158A (en) * 2015-12-27 2016-09-28 北京工业大学 Ultra-thin titanium nitride powder low-temperature preparation method
CN106927436A (en) * 2015-12-30 2017-07-07 四平市高斯达纳米材料设备有限公司 A kind of preparation method of chromium nitride nano powder

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109437132A (en) * 2018-12-14 2019-03-08 中信锦州金属股份有限公司 A kind of production method nitrogenizing titanium valve
CN110157937A (en) * 2019-04-09 2019-08-23 中国科学院金属研究所 A kind of titanium nitride block preparation method that ingredient is controllable
CN111620313A (en) * 2020-06-09 2020-09-04 合肥中航纳米技术发展有限公司 Process for preparing nano titanium nitride powder by chemical vapor deposition method
CN114920218A (en) * 2022-04-28 2022-08-19 湖南天际智慧材料科技有限公司 Process for preparing nitride nano or and submicron powder material
CN114920218B (en) * 2022-04-28 2024-01-05 湖南天际智慧材料科技有限公司 Preparation process of nitride nano or submicron powder material

Also Published As

Publication number Publication date
CN108163821B (en) 2019-12-13

Similar Documents

Publication Publication Date Title
CN108163821A (en) The preparation method of spherical titanium nitride
JP7184552B2 (en) Silicon/carbon composite powder
CN108217612A (en) Prepare the method and apparatus of spherical titanium nitride powder
US7125537B2 (en) Method for manufacturing nanopowders of oxide through DC plasma thermal reaction
US20030108459A1 (en) Nano powder production system
CN104772473A (en) Preparation method of fine-particle spherical titanium powder for three-dimensional (3D) printing
JPS60175537A (en) Preparation of ultra-fine ceramic particles
CN106698437A (en) Method for preparing spherical nanometer silicon by virtue of thermal plasma method
CN106216705A (en) A kind of preparation method of 3D printing fine grained simple substance globular metallic powder
CN108557770A (en) A method of preparing nanometer metal oxide powder
CN108046268A (en) The method that plasma enhanced chemical vapor synthetic method prepares high-purity nm boron carbide powder
KR20150027124A (en) Method for production of titanium carbide microparticles
TW201420542A (en) Flame spray pyrolysis method for forming nanoscale lithium metal phosphate powders
CN106623952B (en) A kind of titanium of the micro- hydrogenation in surface or the preparation method of titanium alloy powder
CN102059343B (en) Manufacturing method for nano-fabric NiCr-Cr3C2 compound granulation powder used for hot spraying
CN110385442A (en) A kind of production method of silver paste of solar cells ultrafine silver bismuth powder
CN102864343B (en) Preparation method for in-situ aluminium base composite material inoculant
KR101372469B1 (en) Methods and apparatus for manufacturing nano sized low melting glass powder
CN103224238B (en) Preparation method of nano silicon composite material
KR101621235B1 (en) Preparation method of cubic boron nitride nanopowder by thermal plasma, and the cubic boron nitride nanopowder thereby
KR101566942B1 (en) Synthesis method of gallium oxide nanomaterials by using thermal plasma and the gallium oxide thereby
CN116037944A (en) Method for preparing micron-scale/nano-scale graded spherical copper powder by using plasma
CN108274012A (en) A kind of method that aerosolization prepares spherical shape TiN
JP2002220601A (en) Production method for low oxygen spherical metal powder using dc thermal plasma processing
CN100422074C (en) Method for preparing nanometer titanium carbonitride powder

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant