CN108153033A - Optical filter and its manufacturing method, mask plate and liquid crystal display device - Google Patents
Optical filter and its manufacturing method, mask plate and liquid crystal display device Download PDFInfo
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- CN108153033A CN108153033A CN201611109480.0A CN201611109480A CN108153033A CN 108153033 A CN108153033 A CN 108153033A CN 201611109480 A CN201611109480 A CN 201611109480A CN 108153033 A CN108153033 A CN 108153033A
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- uvea
- black matrix
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
Abstract
A kind of optical filter and its manufacturing method, mask plate and liquid crystal display device, optical filter include：Black matrix on substrate, there are the multiple open areas for exposing the substrate surface in the black matrix, the open area has long side and short side, and the multiple open area lines up along the short side extending direction, and the multiple open area is arranged in columns along the long side extending direction；Several in the multiple open area are along the row to the pigment layer unit of arrangement, the pigment layer unit includes the uvea of the different colours along the row to arrangement, wherein, each uvea is with having overlapping region on black matrix row item, and the adjacent column uvea side wall on the black matrix row item is in occlusion shape splicing；Flatness layer on the pigment layer unit；Spacer on the flatness layer, and the spacer is located above the overlapping region.The present invention improves spacer high level of homogeneity, improves the display effect of liquid crystal display device.
Description
Technical field
The present invention relates to LCD technology, more particularly to a kind of optical filter and its manufacturing method, mask plate and liquid crystal
Display device.
Background technology
In recent years, with the rapid development of field of information communication, the demand to various types of display equipment is increasing.
The display device of mainstream has at present：Liquid crystal display (LCD), plasma scope (PDP), electroluminescent display (ELD)
With vacuum fluorescent display (VDF) etc..Since liquid crystal display device has the advantages that light, thin, small, power consumption is small, radiation is low,
It is widely used in various data processing settings, such as in TV, laptop, mobile phone, individual digital array etc..
Liquid crystal display mainly includes：Between tft array substrate, color filter, tft array substrate and color filter
Liquid crystal layer.With the development of production of liquid crystal displays industry, consumer increasingly improves liquid crystal display quality requirements, pushes
Liquid crystal display develops towards the fine direction such as high-resolution, high-resolution and wide viewing angle, i.e., from TN technologies to IPS (In-Plane
Switching) technology develops.
Structure diagrams of the Fig. 1 and Fig. 2 for colored filter in the IPS mode LCDs of the prior art, Fig. 1 is bows
Depending on structure diagram, along the cross-sectional view of AA1 hatching lines in Fig. 2 Fig. 1, with reference to figure 1 and Fig. 2, IPS mode LCD
Optical filter 29 include：Transparent glass substrate 21, the black matrix (BM layers) 22 on the transparent glass substrate 21, positioned at institute
State chromatic filter layer (RGB layer) 23, the flatness layer on chromatic filter layer 23 in black matrix 22 and transparent glass substrate 21
(OC layers) 26, the spacer (PS, Photo Spacer) 25 on flatness layer 26.Wherein, the RGB color in chromatic filter layer 23
Element is covered in the open area of shielding pattern layer 22, and is had with black matrix 22 certain overlapping.It is used in IPS display patterns
In filter, due to the requirement of 22 graph thinning of black matrix, RGB color element generates overlapping usually in black matrix 22, in order to reduce
Picture element ox horn caused by stating overlapping is higher, and the flatness layer 26 is provided in black matrix 22 and chromatic filter layer 23.It is described
Spacer 25 is arranged on flatness layer 26, and positioned at black matrix 22 and the top of RGB color element overlapping region.
However, in the prior art, after colored filter is carried out being bonded processing procedure liquid crystal display with tft array substrate,
Often there is liquid crystal display device and show the problem of bad.
Invention content
It is of the invention to solve the problems, such as to be to provide a kind of optical filter and its manufacturing method, mask plate and liquid crystal display device,
Spacer high level of homogeneity is improved, so as to improve the display effect of liquid crystal display device.
To solve the above problems, the present invention provides a kind of optical filter, including：Substrate；Black matrix on the substrate,
There are the multiple open areas for exposing the substrate surface in the black matrix, the open area has long side and short side,
The multiple open area lines up along the short side extending direction, and the multiple open area is arranged along the long side extending direction
In column；Several in the multiple open area are along the row to the pigment layer unit of arrangement, the pigment layer unit
Include the uvea of the different colours along the row to arrangement, wherein, each uvea is with having overlay region on black matrix row item
Domain, and the adjacent column uvea side wall on the black matrix row item is in occlusion shape splicing；On the pigment layer unit
Flatness layer；Spacer on the flatness layer, and the spacer is located above the overlapping region.
Optionally, the black matrix array extending direction is consistent with the long side extending direction, and the black matrix row item
Orientation is consistent with the short side extending direction；The black matrix further includes：It is several between the black matrix row item
Black matrix row item, the black matrix row item intersect vertically with the black matrix row item；And between adjacent black matrix row item
The orientation of black matrix row is consistent with the long side direction；Wherein, the spacer is also located at the black matrix row item along institute
State the surface of short side extending direction.
Optionally, the spacer is located on a kind of uvea of color above the overlapping region；Alternatively, between described
Spacer post is located on the uvea of two kinds of colors above the overlapping region.
Optionally, the sidewall shape that the uvea is located on the black matrix row item is zigzag；Wherein, same face
The sidewall shape that the uvea of color is located on the black matrix row item is the first zigzag；The uvea adjacent with the uvea
Sidewall shape on the black matrix row item is the second zigzag, and the second jagged shape is sawed with described first
The shape of dentation matches so that the second jagged sawtooth is mutually twisted with the described first jagged sawtooth.
Optionally, first zigzag is formed, and second sawtooth for several lug bosses along arranging to being sequentially connected with
Shape is formed for several recessed portions along arranging to being sequentially connected with, and the shape of the recessed portion and the shape of the lug boss match.
Optionally, arranged on direction along described, the maximum length size of the lug boss and the adjacent lug boss it
Between distance it is equal；The maximum length size of the recessed portion is equal with the distance between adjacent depression.
Optionally, the shape of the lug boss is rectangle, and the shape of the recessed portion is rectangle；Alternatively, the lug boss
Shape for triangle, the shape of the recessed portion is triangle；Alternatively, the shape of the lug boss is trapezoidal, the recess
The shape in portion is trapezoidal；Alternatively, the shape of the lug boss is semicircle, the shape of the recessed portion is semicircle.
Optionally, along going on direction, the width dimensions of the lug boss are less than or equal to the black matrix row item
Width dimensions.
Optionally, along row on direction, the lug boss and the black matrix row boundary between minimum range be
0.5μm；Along going on direction, the minimum range between the recessed portion and black matrix row boundary is 0.5 μm.
Optionally, along arranging on direction, the length dimension of the lug boss is greater than or equal to 6 μm and less than uvea
Length dimension；Along arranging on direction, the length dimension of the recessed portion is greater than or equal to 6 μm and less than the length ruler of uvea
It is very little.
Optionally, same uvea along arrange to two opposing sidewalls shapes be zigzag, and described two opposite
Sidewall shape meets：It is being parallel to row upwards, the width dimensions of same uvea are equal；Alternatively, same uvea is along institute
State row to two opposing sidewalls patterns it is symmetrical.
Optionally, in the uvea of the different colours, it is being parallel to row upwards, the width dimensions of same uvea are equal
It is equal.
Optionally, in the uvea of the different colours, two different colors of uvea separately along arrange to
Two opposing sidewalls patterns it is symmetrical；And a kind of uvea between described two uveas is being parallel to row upwards
Width dimensions be equal.
The present invention also provides a kind of manufacturing method of optical filter, including：Substrate is provided；Black square is formed on the substrate
Battle array, has the multiple open areas for exposing the substrate surface in the black matrix, and the open area has long side and short
Side, wherein, the multiple open area lines up along the short side extending direction, and the multiple open area is prolonged along the long side
It is arranged in columns to stretch direction；Several pigment layer units arranged along the line direction are formed in the multiple open area, it is described
Pigment layer unit includes the uvea of different colours, wherein, each uvea is with having overlapping region, and position on black matrix row item
In the adjacent column uvea side wall on the black matrix row item in occlusion shape splicing；It is formed on the pigment layer unit flat
Layer；Spacer is formed on the flatness layer, and the spacer is located above the overlapping region.
Optionally, using photoetching process, the uvea of the different colours in the pigment layer unit is formed.
Optionally, using same mask plate, it is respectively formed the uvea of the different colours in the pigment layer unit；Or
Person forms the uvea of adjacent column in the pigment layer unit using different mask plates.
The present invention also provides a kind of mask plate for being used to form optical filter, including：Substrate；Shading in the substrate
Graph layer, has the first open area of strip in the shading graph layer and to be located at first open area respectively opposite
Second open area of both sides and third open area, wherein, first open area has long side and a short side, and described the
Two open areas and third open area are adjacent with opposite long side respectively；It is whole with exposing in first open area
First opening of a first open area substrate；Have in second open area it is several arranged along long side extending direction the
Two opening, and it is described second opening boundary with described first opening boundary be connected composition the first zigzag；The third opening
There are several thirds arranged along long side extending direction to be open, the third opening boundary and the described first opening boundary in region
It is connected and forms the second zigzag, and the second jagged shape matches with the described first jagged shape.
Optionally, the described first jagged pattern and the described second jagged pattern are symmetrical.
Optionally, the described first jagged pattern meets with the described second jagged pattern：Prolong being parallel to short side
It stretches on direction, the width dimensions between the second opening boundary and third opening boundary are equal.
The present invention also provides a kind of liquid crystal display device, including aforementioned optical filter.
Compared with prior art, technical scheme of the present invention has the following advantages：
In the technical solution of optical filter provided by the invention, including several edges being located in the open area in black matrix
The pigment layer unit gone to arrangement, each pigment layer unit are located at the black square with having overlapping region on black matrix row item
Adjacent column uvea on array bar is without being in occlusion shape splicing so that the adjacent column uvea above the overlapping region
Overlapping area on substrate surface direction is parallel to is small by even zero；Therefore, the adjacent color above the overlapping region
The harmful effect caused by flatness layer top surface flatness of plain layer is small so that the flatness layer top surface flatness is good；Phase
It answers, the spacer on the flatness layer also has good high level of homogeneity, so as to improve the liquid crystal cell of display device
Thick homogeneity improves the display effect of display device.
Description of the drawings
Structure diagrams of the Fig. 1 and Fig. 2 for colored filter in the IPS mode LCDs of the prior art；
Fig. 3 to Fig. 5 is the structure diagram of optical filter that one embodiment of the invention provides；
Fig. 6 is the overlooking the structure diagram of black matrix in Fig. 3；
Fig. 7 is the overlooking the structure diagram of optical filter that further embodiment of this invention provides；
Fig. 8 is the overlooking the structure diagram of optical filter that another embodiment of the present invention provides；
Fig. 9 is the overlooking the structure diagram of optical filter that yet another embodiment of the invention provides；
Figure 10 is the process flow diagram provided in an embodiment of the present invention for forming optical filter；
Figure 11 is the overlooking the structure diagram of mask plate that one embodiment of the invention provides；
Figure 12 is the overlooking the structure diagram of mask plate that another embodiment of the present invention provides.
Specific embodiment
By background technology it is found that liquid crystal display device of the prior art, which has, shows the problem of bad.
With reference to figure 1 and Fig. 2, the spacer 25 is arranged on the overlapping region of chromatic filter layer 23 and black matrix 22
On flatness layer 26, the height of the spacer 25 determines that the liquid crystal cell in liquid crystal display device is thick (cell gap), and uniform
Stable box thickness is the basis that liquid crystal display device obtains stable and uniform display effect.
Through analysis, the chromatic filter layer 23 includes R color filter layers 11, G color filter layers 12 and B color filter layers
13, and there is overlapping region so as to form protrusion between adjacent filter layer；The flatness layer 26 is only capable of reducing the protrusion, and difficult
To eliminate the protrusion.
Also, the height of the protrusion is simultaneously uneven, and the protrusion of some overlapping regions is high, the protrusion of some overlapping regions
It is low, therefore 26 surface of flatness layer will also be influenced by these protrusions, cause 26 surface of flatness layer also and not horizontally planar.Cause
This, the high level of homogeneity of the spacer on the flatness layer 26 changes also with the height change of the flatness layer 26,
It causes liquid crystal box thickness ununiformity even, so as to cause liquid crystal display device color uneven, influences display effect.
To solve the above problems, the present invention provides a kind of optical filter, including：Substrate；Black matrix on the substrate,
There are the multiple open areas for exposing the substrate surface in the black matrix, the open area has long side and short side,
The multiple open area lines up along the short side extending direction, and the multiple open area is arranged along the long side extending direction
In column；Several in the multiple open area are along the row to the pigment layer unit of arrangement, the pigment layer unit
Include the uvea of the different colours along the row to arrangement, wherein, each uvea is with having overlay region on black matrix row item
Domain, and the adjacent column uvea side wall on the black matrix row item is in occlusion shape splicing；On the pigment layer unit
Flatness layer；Spacer on the flatness layer, and the spacer is located above the overlapping region.
In the technical solution of optical filter provided by the invention, due to the adjacent column uvea side wall being located on black matrix row item
In occlusion shape splicing so that weight of the adjacent column uvea on substrate surface direction is parallel to above the overlapping region
It is small by even zero to close area；Therefore, the adjacent uvea above the overlapping region is to flatness layer top surface flatness
Caused by harmful effect it is small so that the flatness layer top surface flatness is good；Correspondingly, the interval on the flatness layer
Column also has good high level of homogeneity, so as to improve the liquid crystal cell thickness homogeneity of display device, improves the display of display device
Effect.
It is understandable for the above objects, features and advantages of the present invention is enable to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
Fig. 3 to Fig. 5 is the structure diagram of optical filter that one embodiment of the invention provides, and Fig. 3 is overlooking the structure diagram,
Fig. 4 is along the cross-sectional view of BB1 hatching lines in Fig. 3, and Fig. 5 is along the cross-sectional view of CC1 hatching lines in Fig. 3.
With reference to figure 3 to Fig. 5, the optical filter includes：
Substrate 101；
Black matrix 102 on the substrate 101 has in the black matrix 102 and exposes 101 surface of substrate
Multiple open areas, the open area have long side and short side, and the multiple open area is along the short side extending direction
0W lines up, and the multiple open area is arranged in columns along the long side extending direction 0L extending directions；
Several pigment layer units 103 arranged along the row to 0W positioned at the multiple open area, the pigment
Layer unit 103 includes the uvea of different colours, wherein, each uvea is with having overlay region on the black matrix row item 112
Domain, and the adjacent uvea side wall on the black matrix row item 112 is in occlusion shape splicing；
Flatness layer 104 on the pigment layer unit 103；
Spacer 105 on the flatness layer 104, and the spacer 105 is located above the overlapping region.
Optical filter provided in an embodiment of the present invention is described in detail below with reference to attached drawing.
The material of the substrate 101 is transparent material.In the present embodiment, the substrate 101 is glass substrate.
The material of the black matrix 102 is black material, and the black matrix 102 has opaqueness.In the present embodiment, institute
The material for stating black matrix 102 is black color photosensitive resin material, and OD value is larger, and the display contrast of formation is high.At it
In his embodiment, the material of the black matrix can also be crome metal material.
In the present embodiment, the thickness range of the black matrix 102 is between 0.5 μm~1.5 μm.
The black matrix 102 is in reticular structure.For the ease of illustration and explanation, Fig. 6 show base in the embodiment of the present invention
The overlooking the structure diagram of plate 101 and black matrix 102, wherein, there is multiple open areas 10, institute in the black matrix 102
Open area 10 is stated with long side L and short side W, the multiple open area 10 lines up along the short side extending direction 0W,
The multiple open area 10 is arranged in columns along the long side extending direction 0L.
Wherein, the short side extending direction 0W also referred to as rows are also referred to as arranged to 0W, the long side extending direction 0L to 0L.
With reference to figure 6, the black matrix 102 includes several black matrix row items 112,112 extending direction of black matrix row item
It is consistent with long side extension 0L, and the orientation of several black matrix row items 112 and the short side extending direction 0W mono-
It causes.The black matrix 102 further includes several black matrix row items 122 between black matrix row item 112, the black matrix row item
122 intersect vertically with the black matrix row item 112；Several black matrix row items between the adjacent black matrix row item 112
122 orientation is consistent with the long side direction 0L.
Wherein, the open area 10 is surrounded between the black matrix row item 112 and the black matrix row item 122.
In the present embodiment, in order to improve the surface flatness of flatness layer 104,112 top of black matrix row item with it is described
122 top of black matrix row item flushes.
The pigment layer unit 103 includes the uvea of different colours arranged along the row to 0W directions.The present embodiment
In, red (R) uvea 113, green (G) uvea 123 and blue (B) uvea are included with the pigment layer unit 103
133 are used as example.In other embodiments, the pigment layer unit can also include xanthein layer or transparent uvea.
It should be noted that in other embodiments, needing in setting pigment layer unit for color can also be shown according to the display device
The color of uvea.
In the present embodiment, in the pigment layer unit 103, the thickness of each uvea is equal.And positioned at the overlapping
The uvea overhead height of overlying regions is identical.
Each uvea is with having overlapping region, and the phase on the black matrix row item 112 on black matrix row item 112
Adjacent uvea side wall is in occlusion shape splicing.Since the adjacent uvea side wall being located on the black matrix row item 112 is in occlusion shape
Splicing so that the overlapping region between adjacent uvea on the black matrix row item 112 is obviously reduced, flat so as to improve
The top surface flatness of smooth layer 104, and then improve the high homogeneity of spacer 105.
The sidewall shape that the uvea is located on the black matrix row item 112 is zigzag.Specifically, the red color
Plain layer 113, the green pigment layer 123 and the blue pigment layer 133 are located at the side wall shape on the black matrix row item 112
Shape is zigzag.
Wherein, the sidewall shape that the uvea of same color is located on the black matrix row item 112 is the first zigzag；
The sidewall shape that the uvea adjacent with the uvea is located on the black matrix row item 112 is the second zigzag, and described
Second jagged shape matches with the described first jagged shape so that the second jagged sawtooth and described the
One jagged sawtooth is mutually twisted.
First zigzag is formed for several lug bosses along arranging to being sequentially connected with, and second zigzag is several
A recessed portion is formed along arranging to being sequentially connected with, and the shape of the recessed portion and the shape of the lug boss match.
Specifically, when the shape of the lug boss is rectangle, the shape of the recessed portion is rectangle；The shape of the lug boss
When shape is triangle, the shape of the recessed portion is triangle；When the shape of the lug boss is trapezoidal, the shape of the recessed portion
Shape is trapezoidal；When the shape of the lug boss is semicircle, the shape of the recessed portion is semicircle.
In the present embodiment, in order to ensure that the shape of the recessed portion and the shape of the lug boss match, along described
It arranges on 0L directions, the maximum length size of the lug boss is equal with the distance between adjacent projections；The recessed portion
The distance between maximum length size and adjacent depression are equal.
Also, in the present embodiment, along going on 0W directions, the width dimensions of the lug boss are less than or equal to described black
The width dimensions of rectangular array item 112 avoid the lug boss from crossing the black matrix row item 112 and shown to the color of optical filter and make
Into harmful effect.
In the present embodiment, same uvea is being zigzag, and institute along arranging to two opposing sidewalls shapes in 0L directions
Two opposing sidewalls shapes are stated to meet：Row is being parallel on 0W directions, the width dimensions of same uvea are equal.
That is, being parallel to row on 0W directions, the width dimensions of the red pigments layer 113 are equal；It is described
The width dimensions of green pigment layer 123 are equal；The width dimensions of the blue pigment layer 133 are equal.The red pigments
Layer 113, green pigment layer 123 and blue pigment layer 133 manufacture to be formed using same mask plate.
In the present embodiment, in the uvea of the different colours, row is being parallel on 0W directions, same uvea
Width dimensions are equal.
In the present embodiment, the shape of the lug boss is rectangle, and the shape of the recessed portion is also rectangle.
Along going on 0W directions, the minimum range between the lug boss and 112 boundary of black matrix row item is unsuitable
It is too small；If the minimum range between the lug boss and 112 boundary of black matrix row item is too small, the lug boss is corresponding
Uvea, which can show the color of adjacent open regions, causes harmful effect.For this purpose, in the present embodiment, along capable to direction 0W
On, the minimum range between the lug boss and 112 boundary of black matrix row item is 0.5 μm.
Correspondingly, along row on 0W directions, the most narrow spacing between the recessed portion and 112 boundary of black matrix row item
Unsuitable too small from also, otherwise the corresponding uvea of the recessed portion, which can show the color of adjacent open regions, causes bad shadow
It rings.For this purpose, in the present embodiment, along row on 0W directions, between the recessed portion and 112 boundary of black matrix row item most
Small distance is 0.5 μm.
Along arranging on 0L directions, the length dimension of the lug boss is unsuitable too small；If the length dimension of the lug boss
Formation process difficulty that is too small, then will increasing uvea, and the shape of the lug boss and the shape difficulty of matching of recessed portion
It will increase；In addition, the length dimension of the lug boss is related with forming the mask plate opening size that the uvea uses, if institute
State that mask plate opening size is too small, then lug boss and recessed portion can be because of exposure lights during the uvea is formed
Diffraction and fog.For this purpose, in the present embodiment, along arranging on 0L directions, the length dimension of the lug boss is greater than or equal to 6
μm。
In addition, along arranging on 0L directions, the length dimension of the lug boss is also less than the length dimension of the uvea.
Correspondingly, in the present embodiment, along arranging on 0L directions, the length dimension of the recessed portion is greater than or equal to 6 μm
And less than the length dimension of uvea.
Specifically, when the length dimension of the lug boss of the uvea and recessed portion is only by the shadow of mask plate opening size
It rings, and when the mask plate opening size is 6 μm, along arranging on 0L directions, the length dimension of the lug boss is 6 μm, institute
The length dimension for stating recessed portion is 6 μm.
It should be noted that when the mask plate opening size is 6 μm, and the lug boss of the uvea and recessed portion
Length dimension is not only influenced by mask plate opening size, is also influenced by the size penalty (CD loss) of uvea in itself
When, along arranging on 0L directions, the size of the length of the lug boss is more than 6 μm, and the length dimension of the recessed portion is more than 6 μ
m.For example, when the CD loss of uvea in itself are 9 μm, in row on 0L directions, the length dimension of the lug boss is 15 μ
M, the length dimension of the recessed portion is 15 μm.
The flatness layer 104 covers the pigment layer unit 103, plays and 103 surface of pigment layer unit is planarized
Purpose, prevent pigment layer unit 103 the problem of causing picture element ox horn higher Chong Die with black matrix 102.
In the present embodiment, since the adjacent uvea side wall being located on black matrix row item 112 is in occlusion shape splicing so that position
Few even zero overlapping in overlapping region between the adjacent uvea on black matrix row item 112, therefore, positioned at the uvea
104 top surface flatness of flatness layer on unit 103 is improved so that the 104 top surface flatness of flatness layer is high.
The spacer 105 is located at the overlapping region top of the uvea and the black matrix row item 112.The interval
Column 105 is located on 104 top of flatness layer, due to the 104 top surface flatness of flatness layer height, is located at described flat
Spacer 105 on smooth layer 104 has good high homogeneity, can be with when the optical filter is applied in display device
The liquid crystal cell for obtaining stable homogeneous is thick, and then obtains the display effect of stable and uniform.
In the present embodiment, the spacer 105 is located on the uvea of two kinds of colors above the overlapping region, example
Such as, the spacer 105 is located on the red pigments layer 113 above the overlapping region and green pigment layer 123, between described
Spacer post 105 is located on the green pigment layer 123 above the overlapping region and blue pigment layer 133.
In other embodiments, the spacer can also be only located at a kind of pigment of color above the overlapping region
On layer.
In the present embodiment, the spacer 105 is also located at the black matrix row item 122 along the short side extending direction just
Top.
Fig. 7 is the overlooking the structure diagram of optical filter that further embodiment of this invention provides.
The optical filter includes：
Substrate (not shown)；Black matrix 202 on the substrate has in the black matrix 202 and exposes the base
Multiple open areas of plate surface, the open area have long side L and short side W, and the multiple open area is along described short
Side extending direction 0W lines up, and the multiple open area is arranged in columns along the long side extending direction 0L；It is opened positioned at the multiple
Several pigment layer units 203 arranged along the row to 0W in the domain of mouth region, the pigment layer unit 203 are included along the row
The uvea for the different colours arranged to 0W, wherein, each uvea is located at institute with having overlapping region on black matrix row item
The adjacent column uvea side wall on black matrix row item is stated in occlusion shape splicing；Flatness layer on the pigment layer unit is (not
Diagram)；Spacer 205 on the flatness layer, and the spacer 205 is located above the overlapping region.
Description in relation to the substrate and black matrix 202 can refer to the corresponding description of previous embodiment, no longer superfluous herein
It states.
In the present embodiment, the pigment layer unit 203 includes：Red pigments layer 213, green pigment layer 223 and blue
Uvea 233.
The sidewall shape that the uvea is located on the black matrix row item is zigzag；Wherein, the color of same color
The sidewall shape that plain layer is located on the black matrix row item is the first zigzag；The uvea adjacent with the uvea is located at institute
Sidewall shape on black matrix row item is stated as the second zigzag, and the second jagged shape and described first jagged
Shape matches so that the second jagged sawtooth is mutually twisted with the described first jagged sawtooth.
It can refer to the corresponding description of previous embodiment in relation to the jagged detailed description of first zigzag and second.
In the present embodiment, same uvea is being zigzag, and institute along arranging to two opposing sidewalls shapes in 0L directions
Two opposing sidewalls shapes are stated to meet：Row is being parallel on 0W directions, the width dimensions of same uvea are equal.Described
In the uvea of different colours, row is being parallel on 0W directions, the width dimensions of same uvea are equal.
First zigzag is formed for several lug bosses along arranging to being sequentially connected with, and second zigzag is several
A recessed portion is formed along arranging to being sequentially connected with, and the shape of the recessed portion and the shape of the lug boss match.
Unlike previous embodiment, in the present embodiment, the shape of the lug boss is triangle, the recessed portion
Shape is also triangle.
Since the adjacent uvea side wall being located on the black matrix row item is in occlusion shape splicing so that positioned at the pigment
Flatness layer top surface flatness on layer unit 203 is high, correspondingly, the spacer 205 above the overlapping region
High level of homogeneity is good.
Fig. 8 is the overlooking the structure diagram of optical filter that another embodiment of the present invention provides.
The optical filter includes：
Substrate (not shown)；Black matrix 302 on the substrate has in the black matrix 302 and exposes the base
Multiple open areas of plate surface, the open area have long side L and short side W, and the multiple open area is along described short
Side extending direction 0W lines up, and the multiple open area is arranged in columns along the long side extending direction 0L；It is opened positioned at the multiple
Several pigment layer units 303 arranged along the row to 0W in the domain of mouth region, the pigment layer unit 303 are included along the row
The uvea for the different colours arranged to 0W, wherein, each uvea is located at institute with having overlapping region on black matrix row item
The adjacent column uvea side wall on black matrix row item is stated in occlusion shape splicing；Flatness layer on the pigment layer unit is (not
Diagram)；Spacer 305 on the flatness layer, and the spacer 305 is located above the overlapping region.
Description in relation to the substrate and black matrix 302 can refer to the corresponding description of previous embodiment, no longer superfluous herein
It states.
In the present embodiment, the pigment layer unit 303 includes：Red pigments layer 313, green pigment layer 323 and blue
Uvea 333.
The sidewall shape that the uvea is located on the black matrix row item is zigzag；Wherein, the color of same color
The sidewall shape that plain layer is located on the black matrix row item is the first zigzag；The uvea adjacent with the uvea is located at institute
Sidewall shape on black matrix row item is stated as the second zigzag, and the second jagged shape and described first jagged
Shape matches so that the second jagged sawtooth is mutually twisted with the described first jagged sawtooth.
It can refer to the corresponding description of previous embodiment in relation to the jagged detailed description of first zigzag and second.
In the present embodiment, same uvea is being zigzag, and described two along arranging to two opposing sidewalls shapes of 0L
A opposing sidewalls shape meets：Row is being parallel on 0W, the width dimensions of same uvea are equal.In the different colours
Uvea in, be parallel to row on 0W, the width dimensions of same uvea are equal.
First zigzag is formed for several lug bosses along arranging to being sequentially connected with, and second zigzag is several
A recessed portion is formed along arranging to being sequentially connected with, and the shape of the recessed portion and the shape of the lug boss match.
Unlike previous embodiment, in the present embodiment, the shape of the lug boss is trapezoidal, the shape of the recessed portion
Shape is also trapezoidal.
Since the adjacent uvea side wall being located on the black matrix row item is in occlusion shape splicing so that positioned at the pigment
Flatness layer top surface flatness on layer unit 303 is high, correspondingly, the spacer 305 above the overlapping region
High level of homogeneity is good.
It should be noted that in other embodiments, the shape of the lug boss can also be semicircle, correspondingly, institute
The shape for stating recessed portion is semicircle.
Fig. 9 is the overlooking the structure diagram of optical filter that yet another embodiment of the invention provides.
The optical filter includes：
Substrate (not shown)；Black matrix 402 on the substrate has in the black matrix 402 and exposes the base
Multiple open areas of plate surface, the open area have long side L and short side W, and the multiple open area is along described short
Side extending direction 0W lines up, and the multiple open area is arranged in columns along the long side extending direction 0L；It is opened positioned at the multiple
Several pigment layer units 403 arranged along the row to 0W in the domain of mouth region, the pigment layer unit 403 are included along the row
The uvea for the different colours arranged to 0W, wherein, each uvea is located at institute with having overlapping region on black matrix row item
The adjacent column uvea side wall on black matrix row item is stated in occlusion shape splicing；Flatness layer on the pigment layer unit is (not
Diagram)；Spacer 405 on the flatness layer, and the spacer 405 is located above the overlapping region.
Description in relation to the substrate and black matrix 402 can refer to the corresponding description of previous embodiment, no longer superfluous herein
It states.
In the present embodiment, the pigment layer unit 403 includes：Red pigments layer 413, green pigment layer 423 and blue
Uvea 433.
The sidewall shape that the uvea is located on the black matrix row item is zigzag；Wherein, the color of same color
The sidewall shape that plain layer is located on the black matrix row item is the first zigzag；The uvea adjacent with the uvea is located at institute
Sidewall shape on black matrix row item is stated as the second zigzag, and the second jagged shape and described first jagged
Shape matches so that the second jagged sawtooth is mutually twisted with the described first jagged sawtooth.
First zigzag is sequentially connected with composition along arranging to 0L for several lug bosses, and if second zigzag be
Dry recessed portion edge arranges to 0L and is sequentially connected with composition, and the shape of the recessed portion and the shape of the lug boss match.
It can refer to the corresponding description of previous embodiment in relation to the jagged detailed description of first zigzag and second.
Unlike previous embodiment, in the present embodiment, same uvea arranges two opposing sidewalls shapes to 0L on edge
Shape is zigzag, and described two opposing sidewalls shapes meet：Same uvea is along two opposite sides arranged to 0L
Wall pattern is symmetrical.
In the present embodiment, in the uvea of the different colours, two different colors of uvea separately is on edge
It arranges symmetrical to two opposing sidewalls patterns of 0L；And a kind of uvea between described two uveas is being parallel to
Width dimensions of the row on 0W are equal.
Specifically, in the present embodiment, the red pigments layer 413 is opposite to two opposing sidewalls patterns of 0L along arranging
Claim；Two opposing sidewalls patterns of the blue pigment layer 433 in row to 0L are symmetrical；Positioned at the red pigments layer 413 with
Green pigment layer 423 between blue pigment layer 433 is equal being parallel to width dimensions of the row on 0W.
In the present embodiment, the lug boss is rectangle, correspondingly, the recessed portion is rectangle.In other embodiments, institute
The shape for stating lug boss can also be triangle, and the shape of the recessed portion is also triangle；Alternatively, the shape of the lug boss
To be trapezoidal, the shape of the recessed portion is also trapezoidal；Alternatively, the shape of the lug boss is semicircle, the shape of the recessed portion
Shape is also semicircle.
Since the adjacent uvea side wall being located on the black matrix row item is in occlusion shape splicing so that positioned at the pigment
Flatness layer top surface flatness on layer unit 403 is high, correspondingly, the spacer 405 above the overlapping region
High level of homogeneity is good.
Correspondingly, the present invention also provides a kind of manufacturing method of optical filter, including：Substrate is provided；Shape on the substrate
There are the multiple open areas for exposing the substrate surface into black matrix, in the black matrix, the open area has long side
And short side, wherein, the multiple open area lines up along the short side extending direction, and the multiple open area is along described
Long side extending direction is arranged in columns；Several uvea lists arranged along the column direction are formed in the multiple open area
Member, the pigment layer unit include the uvea of different colours, wherein, each uvea is with having weight on the black matrix row item
Folded region, and the adjacent column uvea side wall on the black matrix row item is in occlusion shape splicing；In the pigment layer unit
Upper formation flatness layer；Spacer is formed on the flatness layer, and the spacer is located above the overlapping region.
In the manufacturing method of optical filter provided by the invention, due to the adjacent uvea side being located on the black matrix row item
Wall is in occlusion shape splicing so that the flatness layer Top flatness formed on the pigment layer unit is good；Correspondingly, described
The high level of homogeneity of the spacer formed on flatness layer is good.
Figure 10 is the process flow diagram provided in an embodiment of the present invention for forming optical filter.
With reference to figure 10, the processing step for forming the optical filter includes：
Step S1, substrate is provided；
Step S2, black matrix is formed on the substrate, is had in the black matrix and is exposed the multiple of the substrate surface
Open area, the open area have long side and short side, wherein, the multiple open area is along the short side extending direction
It lines up, the multiple open area is arranged in columns along the long side extending direction.
Corresponding description in relation to the black matrix can refer to the respective description of previous embodiment, and details are not described herein.
Step S3, several pigment layer units arranged along the line direction, institute are formed in the multiple open area
The uvea that pigment layer unit includes different colours is stated, wherein, there is overlapping region on each uvea and black matrix row item, and
Adjacent uvea side wall on the black matrix row item is in occlusion shape splicing.
In the present embodiment, using photoetching process, the uvea of the different colours in the pigment layer unit is formed.
Same mask plate may be used, be respectively formed the uvea of the different colours in the pigment layer unit；Alternatively,
The uvea of adjacent column in the pigment layer unit is formed using different mask plates.
Step S4, flatness layer is formed on the pigment layer unit.
The either types such as decoration method, pigment dispersion method, print process, electrodeposition process or ink-jet method are may be used, described in formation
Flatness layer.
Since the adjacent uvea side wall being located on the overlapping region is in occlusion shape splicing so that positioned at the overlay region
Pigment layer unit top surface flatness above domain is good；Therefore, at the top of the flatness layer formed on the pigment layer unit
Accordingly there is good flatness.
Step S5, spacer is formed on the flatness layer, and the spacer is located above the overlapping region.
In the present embodiment, the material of the spacer is colored transparent sexuality photosensitiveness fluent material.
The method for forming the spacer can include：The colored transparent sexuality photosensitiveness liquid is coated on the flatness layer
Body material；Then the prebake conditions under 80 DEG C~110 DEG C of temperature condition, wall is formed on the flatness layer；Between described
Interlayer is exposed processing and development treatment, obtains the spacer.
It is also corresponding at the top of coating acquisition wall on the flatness layer since the flatness layer Top flatness is good
With high flat degree；Correspondingly, the high level of homogeneity of the spacer formed is good.
Correspondingly, the present invention also provides a kind of liquid crystal display device, including aforementioned optical filter.Between in optical filter
The high level of homogeneity of spacer post is good, so that the liquid crystal cell thickness homogeneity of liquid crystal display device is good, so as to improve liquid crystal display dress
The display effect put.
The present invention also provides a kind of mask plates for being used to form above-mentioned optical filter.
Figure 11 is the overlooking the structure diagram of mask plate that one embodiment of the invention provides.With reference to figure 11, the mask plate
Including：
Substrate (not shown)；
Shading graph layer 501 in the substrate has the first open area of strip in the shading graph layer 501
I, and respectively it is located at the second open area II of the first open area I opposite sides and third open area III,
In, the first open area I has long side l and short side w, the second open area II and third open area III
It is adjacent with opposite long side l respectively；
There is the first opening 502 for exposing entire first open area I substrates in the first open area I；
There are several the second openings 503 arranged along long side extending direction 0l, and described in the second open area II
Second 503 boundaries of opening are connected with the described first 502 boundaries of opening forms the first zigzag；
There are several thirds openings 504 arranged along long side extending direction 0l in the third open area III, described the
Three 504 boundaries of opening are connected with the described first 502 boundaries of opening forms the second zigzag, and the second jagged shape
Match with the described first jagged shape.
Mask plate provided in this embodiment is described in detail below with reference to attached drawing.
Along along institute short side extending direction 0w, the width dimensions of the second area II are equal to the third region III's
Width dimensions, and the width dimensions of second opening 503 are equal to the width dimensions of third opening 504.Along the length
On the extending direction 0l of side, the length dimension of second opening 503 is equal to the length dimension of third opening 504.
In the present embodiment, the shape of first opening 502 is rectangular.First opening 502 shown in dotted line in Figure 11
Boundary position.
First zigzag is sequentially connected with composition, and second saw for several lug bosses along short side extending direction 0w
Dentation is sequentially connected with composition, the shape of the recessed portion and the lug boss for several recessed portions along short side extending direction 0w
Shape matches.
In the present embodiment, the shape of the lug boss and recessed portion is rectangle.
In other embodiments, the shape of the lug boss is triangle, and the shape of the recessed portion is triangle；Or
Person, the shape of the lug boss is trapezoidal, and the shape of the recessed portion is trapezoidal；Alternatively, the shape of the lug boss is semicircle
Shape, the shape of the recessed portion is semicircle.
In the present embodiment, the first jagged pattern and the described second jagged pattern are symmetrical.Correspondingly, it adopts
It is also symmetrical with the uvea sidewall profile in the optical filter of mask plate formation.
Figure 12 is the overlooking the structure diagram of mask plate that another embodiment of the present invention provides.
Unlike previous embodiment, in the present embodiment, the first jagged pattern and second zigzag
Pattern meet：On short side extending direction 0w is parallel to, second 503 boundaries of opening and 504 boundaries of third opening
Width dimensions be equal.
During optical filter is made, you can made in optical filter with the mask plate provided only with previous embodiment
Pigment layer unit；Above two mask plate can also be used to make the pigment layer unit in optical filter.
Since the first jagged shape matches with the second jagged shape in the mask plate so that the color of formation
Adjacent uvea side wall is in occlusion shape splicing in plain layer unit.
Although present disclosure is as above, present invention is not limited to this.Any those skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (20)
1. a kind of optical filter, which is characterized in that including：
Substrate；
Black matrix on the substrate has the multiple open areas for exposing the substrate surface, institute in the black matrix
Open area is stated with long side and short side, the multiple open area lines up along the short side extending direction, the multiple
Open area is arranged in columns along the long side extending direction；
Several in the multiple open area are along the row to the pigment layer unit of arrangement, the pigment layer unit packet
The uvea of the different colours along the row to arrangement is included, wherein, there is overlapping region on each uvea and black matrix row item,
And the adjacent column uvea side wall on the black matrix row item is in occlusion shape splicing；
Flatness layer on the pigment layer unit；
Spacer on the flatness layer, and the spacer is located above the overlapping region.
2. optical filter as described in claim 1, which is characterized in that the black matrix array extending direction extends with the long side
Direction is consistent, and black matrix row orientation is consistent with the short side extending direction；The black matrix further includes：
Several black matrix row items between the black matrix row item, the black matrix row item are vertical with the black matrix row item
It is intersecting；And the black matrix row orientation between adjacent black matrix row item is consistent with the long side direction；
Wherein, the spacer is also located at surface of the black matrix row item along the short side extending direction.
3. optical filter as claimed in claim 1 or 2, which is characterized in that the spacer is located above the overlapping region
On a kind of uvea of color；Alternatively, the spacer is located on the uvea of two kinds of colors above the overlapping region.
4. optical filter as described in claim 1, which is characterized in that the uvea is located at the side wall on the black matrix row item
Shape is zigzag；
Wherein, the sidewall shape that the uvea of same color is located on the black matrix row item is the first zigzag；With it is described
The adjacent uvea of uvea is located at sidewall shape on the black matrix row item for the second zigzag, and second zigzag
Shape match with the described first jagged shape so that the second jagged sawtooth and described first jagged
Sawtooth is mutually twisted.
5. optical filter as claimed in claim 4, which is characterized in that first zigzag is arranged for several lug bosses edge to suitable
It is secondary to connect and compose, and second zigzag is formed for several recessed portions along arranging to being sequentially connected with, the shape of the recessed portion
Match with the shape of the lug boss.
6. optical filter as claimed in claim 5, which is characterized in that arranged on direction along described, the maximum of the lug boss
The distance between length dimension and the adjacent lug boss are equal；The maximum length size of the recessed portion and adjacent depression it
Between distance it is equal.
7. optical filter as claimed in claim 5, which is characterized in that the shape of the lug boss is rectangle, the recessed portion
Shape is rectangle；Alternatively, the shape of the lug boss is triangle, the shape of the recessed portion is triangle；It is alternatively, described convex
The shape in the portion of rising is trapezoidal, and the shape of the recessed portion is trapezoidal；Alternatively, the shape of the lug boss is semicircle, it is described recessed
The shape of concave portion is semicircle.
8. optical filter as claimed in claim 5, which is characterized in that along row on direction, the width dimensions of the lug boss
Less than or equal to the width dimensions of the black matrix row item.
9. optical filter as claimed in claim 5, which is characterized in that along row on direction, the lug boss and the black square
Minimum range between array bar boundary is 0.5 μm；Along going on direction, the recessed portion arranges a boundary with the black matrix
Between minimum range be 0.5 μm.
10. optical filter as claimed in claim 5, which is characterized in that arranged on direction on edge, the length dimension of the lug boss
More than or equal to 6 μm and less than the length dimension of uvea；Along arranging on direction, the length dimension of the recessed portion be more than or
Equal to 6 μm and less than the length dimension of uvea.
11. optical filter as claimed in claim 4, which is characterized in that same uvea along arrange to two opposing sidewalls shapes
Shape is zigzag, and described two opposing sidewalls shapes meet：It is being parallel to row upwards, the width dimensions of same uvea are equal
It is equal；Alternatively, same uvea along it is described arrange to two opposing sidewalls patterns it is symmetrical.
12. optical filter as claimed in claim 11, which is characterized in that in the uvea of the different colours, be parallel to
Row is upward, and the width dimensions of same uvea are equal.
13. optical filter as claimed in claim 11, which is characterized in that in the uvea of the different colours, separately
Two different colors of uvea along arrange to two opposing sidewalls patterns it is symmetrical；And positioned at described two uveas it
Between a kind of uvea be equal being parallel to the upward width dimensions of row.
14. a kind of manufacturing method of optical filter, which is characterized in that including：
Substrate is provided；
Black matrix is formed on the substrate, and there is the multiple open areas for exposing the substrate surface, institute in the black matrix
Open area is stated with long side and short side, wherein, the multiple open area lines up along the short side extending direction, described
Multiple open areas are arranged in columns along the long side extending direction；
Several pigment layer units arranged along the line direction, the pigment layer unit are formed in the multiple open area
Uvea including different colours, wherein, each uvea is located at the black square with having overlapping region on black matrix row item
Adjacent column uvea side wall on array bar is in occlusion shape splicing；
Flatness layer is formed on the pigment layer unit；
Spacer is formed on the flatness layer, and the spacer is located above the overlapping region.
15. the manufacturing method of optical filter as claimed in claim 14, which is characterized in that using photoetching process, form the color
The uvea of different colours in plain layer unit.
16. the manufacturing method of optical filter as claimed in claim 15, which is characterized in that use same mask plate, respectively shape
Into the uvea of the different colours in the pigment layer unit；Alternatively, it is formed in the pigment layer unit using different mask plates
The uvea of adjacent column.
17. a kind of mask plate for being used to form optical filter, which is characterized in that including：
Substrate；
Shading graph layer in the substrate has the first open area of strip and respectively in the shading graph layer
Positioned at the second open area of first open area opposite sides and third open area, wherein, first open region
Domain has long side and short side, and second open area and third open area are adjacent with opposite long side respectively；
There is the first opening for exposing entire first open area substrate in first open area；
There is several the second openings arranged along long side extending direction, and the second opening boundary in second open area
It is connected with the described first opening boundary and forms the first zigzag；
There are several thirds arranged along long side extending direction to be open in the third open area, third opening boundary with
The first opening boundary, which is connected, forms the second zigzag, and the second jagged shape and described first jagged
Shape matches.
18. mask plate as claimed in claim 17, which is characterized in that the first jagged pattern and second sawtooth
The pattern of shape is symmetrical.
19. mask plate as claimed in claim 17, which is characterized in that the first jagged pattern and second sawtooth
The pattern of shape meets：On short side extending direction is parallel to, between the second opening boundary and third opening boundary
Width dimensions are equal.
20. a kind of liquid crystal display device, which is characterized in that including：
Such as claim 1~13 any one of them optical filter.
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| CN201611109480.0A CN108153033A (en) | 2016-12-02 | 2016-12-02 | Optical filter and its manufacturing method, mask plate and liquid crystal display device |
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| CN110824760A (en) * | 2019-10-24 | 2020-02-21 | 深圳市华星光电技术有限公司 | Color film substrate and manufacturing method thereof |
| CN112558346A (en) * | 2020-12-01 | 2021-03-26 | 惠科股份有限公司 | Liquid crystal display device and manufacturing method thereof |
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Application publication date: 20180612 |