CN108152011A - The measuring method of scanning mirror dynamic return difference in scanning imaging system - Google Patents
The measuring method of scanning mirror dynamic return difference in scanning imaging system Download PDFInfo
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- CN108152011A CN108152011A CN201711138593.8A CN201711138593A CN108152011A CN 108152011 A CN108152011 A CN 108152011A CN 201711138593 A CN201711138593 A CN 201711138593A CN 108152011 A CN108152011 A CN 108152011A
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- scanning
- scanning mirror
- screen
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- photodetector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The invention discloses a kind of measuring method of scanning mirror dynamic return difference in scanning imaging system, including step：Point light source and photodetector are individually fixed in the image space and object space of imaging system；Photodetector is installed on the screen；Record the output valve of the picture of point light source on the screen rotary encoder of scanning mirror when scanning backhaul and inswept photodetector is distinguished in backhaul；The dynamic return difference of the difference of backhaul and the rotary encoder output valve of backhaul, as scanning mirror in a scan period is obtained.The present invention can quickly measure true return difference of the scanning mirror during dynamic scan, avoid and substitute measurement error caused by dynamic measures using static measurement or indirectly measurement, and high certainty of measurement, means are simple.
Description
Technical field
The invention belongs to detection imaging technical fields, are related to the error measure of scanning imaging system, refer specifically to one kind
The measuring method of scanning mirror dynamic return difference in scanning imaging system.
Background technology
Scanning imagery is a kind of common optical imaging modalities, its main feature is that sacrifice certain image taking speed, so as to compared with
The detector of small number acquires the spatial image of high-resolution.Be not suitable for using planar array detector and to image taking speed
Occasion of less demanding, scanning imagery have a wide range of applications.
In scanning imaging system, the motion mode of scanning mirror is to make reciprocally swinging around rotary shaft, and swash angle position passes through
In rotary encoder accurate feedback to scanning control system.When between scanning mirror and rotary encoder there are during drive gap, rotation
Turning encoder just cannot accurately reflect the true swash angle position of scanning mirror, show as rotary encoder in scanning mirror backhaul and return
When output valve is identical in journey, the corresponding swash angle position for retouching mirror reality simultaneously differs, but a poor drive gap angle, should
Clearance angle is known as dynamic return difference.
Since the image finally obtained need to carry out split according to the output valve of rotary encoder, dynamic return difference is deposited
It can cause there is dislocation between backhaul image and backhaul image.Therefore the dynamic return difference of scanning mirror how is accurately measured, is pair
The important link that the dislocation of backhaul and backhaul image is modified.
, can not be acquired in system itself since dynamic return difference belongs to systematic error, it is therefore desirable to by supplementary means into
Row measures, method be typically by the locked rotor of motor, it is reciprocating with hand rotary scanning mirror, will rotary encoder at this time
Dynamic return difference of the variation range of output valve as scanning mirror.The shortcomings that this mode, mainly has：
1st, scanning mirror is precison optical component, may be very frivolous, and the deformation of scanning mirror may be caused by turning scanning mirror with hand
Even damage；
2nd, the speed with the speed and motor of hand rotary scanning mirror driving scanning mirror and scanning mirror that is unequal, therefore measuring
Dynamic return difference is actually as a result, can not equivalent with true dynamic return difference with static return difference approximate substitution.
Therefore, it is necessary to find a kind of accurate dynamic return difference measuring method, can easily measure in scanning imaging system
The dynamic return difference of scanning mirror, and to correct image offset so that scanning backhaul and the image of backhaul can be precisely aligned.
Invention content
For the defects in the prior art, the purpose of the present invention is to provide scanning mirror dynamics in a kind of scanning imaging system
The measuring method of return difference, measurement process accurately facilitate, and means of testing is easily achieved, convenient for promoting.
It is realized when of the invention according to following technical scheme：
The measuring method of scanning mirror dynamic return difference in a kind of scanning imaging system, it is characterised in that：Include the following steps：
Step 1：Scanning imaging system object space place a screen, and image space place a point light source, adjust screen and
The position of point light source, make after the scanned imaging system of the light that point light source is sent out and scanning mirror on the screen into picture become clear, and
The position of point light source and screen is fixed；
Step 2：Start scanning mirror driving motor, it is seen that on the screen into picture move back and forth on the screen and form fixation
Path line, the path line is marked on screen with pen；
Step 3：Scanning mirror driving motor is closed, a photodetector is fixed on screen, and positioned at fixed track
On line, fine-tune the position of photodetector, make on the screen into picture inswept photodetector when, photodetector has letter
Number output；
Step 4：Be again started up scanning mirror driving motor, with scanning monitor record on the screen into picture gone in scanning
Instantaneous, the position signal output valve of scanning mirror rotary encoder of inswept photodetector is distinguished in journey and backhaul；
Step 5：A scanning and the difference of backhaul and backhaul rotary encoder output valve in the period are calculated, is scanning imagery system
The dynamic return difference of scanning mirror in system.
In above-mentioned technical proposal, the scanning mirror driving motor drives scanning mirror to make one-dimensional reciprocally swinging.
In above-mentioned technical proposal, the photodetector receives window and a signal output port, and light comprising a light
There are interaction relations for line reception window and signal output window：After light receives window reception to optical signal, signal output end
Mouth has signal output.
In above-mentioned technical proposal, the scanning mirror rotary encoder is installed on the rotor of scanning mirror driving motor, motor
Any position on the output shaft of deceleration mechanism or in scanning mirror shaft, and the position of scanning mirror rotary encoder output
Signal can be increment type or absolute type.
In above-mentioned technical proposal, the position of the output signal of the photodetector and scanning mirror rotary encoder output
Confidence number all inputs scanning monitor, after scanning monitor receives the output signal of photodetector, can record and show
The value of instantaneous scanning mirror rotary encoder.
Compared with prior art, the present invention has following advantageous effect：
By method provided by the invention, the dynamic return difference of scanning mirror in scanning imaging system can be quickly measured, significantly
It improves picture quality and substantially reduces the R＆D cycle of scanning imaging system.The present invention has very strong versatility, is suitable for
The scanning imaging system of various wavelength from visible ray to microwave.In addition, detecting element according to the present invention is normal in the market
The element seen, testing cost are very cheap.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon：
Fig. 1 is the measuring device figure of one embodiment of scanning mirror dynamic return difference measuring method in scanning imaging system of the present invention；
Wherein, reference numeral：1- screens, 2- scanning mirrors, 3- scanning mirror driving motors, 4- point light sources, the rotation of 5- scanning mirrors
Encoder, 6- light, 7- photodetectors, 8- path lines, 9- scanning imaging systems, 10- pictures, 11- scanning monitors.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill to this field
For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention
Protection domain.
Below in conjunction with the accompanying drawings in 1 pair of oscillatory scanning imaging system proposed by the present invention scanning mirror dynamic return difference measuring method
A specific embodiment elaborate.
Step 1：A screen 1 is placed, and a point light source is placed in image space in the object space of scanning imaging system 9, adjust screen 1
With the position of point light source 4, make after 6 scanned imaging system 9 of light that point light source 4 is sent out and scanning mirror 2 on the screen 1 into picture become
Clearly, and by the position of point light source 4 and screen 1 it fixes；
Step 2：Start scanning mirror driving motor 3, it is seen that on the screen 1 into move back and forth and formed on the screen as 10
The path line 8 is marked on screen 1 by fixed path line 8 with pen；
Step 3：Scanning mirror driving motor 3 is closed, a photodetector 7 is fixed on screen 1, and positioned at fixed rail
On trace 8, fine-tune the position of photodetector 7, make on the screen into 10 inswept photodetector 7 of picture when, photoelectricity visit
Surveying device 7 has signal output；
Step 4：Be again started up scanning mirror driving motor 3, with scanning monitor 11 record on the screen 1 into as 10 are sweeping
Instantaneous, the position signal output valve of scanning mirror rotary encoder 5 of inswept photodetector 7 is distinguished in the backhaul retouched and backhaul；
Step 5：A scanning and the difference of 5 output valve of backhaul and backhaul rotary encoder in the period are calculated, is scanning imagery
The dynamic return difference of scanning mirror 2 in system 9.
The output shaft of scanning mirror driving motor 3 and the shaft of scanning mirror 2 are coupled, when the motor of scanning mirror driving motor 3 subtracts
When fast mechanism output shaft rotates back and forth, scanning mirror 2 can be driven to make one-dimensional reciprocally swinging.
Photodetector 7 receives window and a signal output port comprising a light, and light receiver window and signal are defeated
Going out window, there are interaction relations：After light receives window reception to optical signal, signal output port has signal output.
Scanning mirror rotary encoder 5 is mountable on the rotor of scanning mirror driving motor 3, on motor decelerating mechanism output shaft
Or any position in 2 shaft of scanning mirror.When scanning mirror driving motor 3 rotates, scanning mirror rotary encoder 5 can be correspondingly
The corner of the angle of rotor of reflection scanning mirror driving motor 3,2 shaft of corner or scanning mirror of motor decelerating mechanism output shaft,
And the position signal that the scanning mirror rotary encoder 5 exports can be increment type or absolute type.
The output signal of photodetector 7 and the position signal of the scanning mirror rotary encoder 5 output all input scanning
Controller 11 is handled by the scanning monitor 11：When scanning monitor 11 receives the output letter of photodetector 7
After number, the position signal output valve of the instantaneous scanning mirror rotary encoder 5 can be recorded and shown.
Measuring method using the present invention can quickly measure the dynamic return difference of scanning mirror in a set of scanning imaging system,
And high certainty of measurement, means are simple.
What is do not elaborated in the present invention partly belongs to known technology in the art.Above example is merely to illustrate this
It the technical solution of invention rather than is limited in specific practical range, for those of ordinary skill in the art, as long as respectively
Within the scope of the present invention that claim limits and determines, these variations are it will be apparent that all are sharp for kind variation
It is created with the design of the present invention in the row of protection.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make a variety of changes or change within the scope of the claims, this not shadow
Ring the substantive content of the present invention.In the absence of conflict, the feature in embodiments herein and embodiment can arbitrary phase
Mutually combination.
Claims (5)
1. a kind of measuring method of scanning mirror dynamic return difference in scanning imaging system, it is characterised in that：Include the following steps：
Step 1：A screen is placed, and a point light source is placed in image space in the object space of scanning imaging system, adjust screen and point light
The position in source, make after the scanned imaging system of the light that point light source is sent out and scanning mirror on the screen into picture become clear, and by point
The position of light source and screen is fixed；
Step 2：Start scanning mirror driving motor, it is seen that on the screen into picture move back and forth on the screen and form fixed rail
The path line is marked on screen by trace with pen；
Step 3：Scanning mirror driving motor is closed, a photodetector is fixed on screen, and in fixed path line,
Fine-tune the position of photodetector, make on the screen into picture inswept photodetector when, photodetector has the signal defeated
Go out；
Step 4：Be again started up scanning mirror driving motor, with scanning monitor record on the screen into picture scanning backhaul and
Instantaneous, the position signal output valve of scanning mirror rotary encoder of inswept photodetector is distinguished in backhaul；
Step 5：A scanning and the difference of backhaul and backhaul rotary encoder output valve in the period are calculated, is in scanning imaging system
The dynamic return difference of scanning mirror.
2. the measuring method of scanning mirror dynamic return difference, feature exist in a kind of scanning imaging system according to claim 1
In：The scanning mirror driving motor drives scanning mirror to make one-dimensional reciprocally swinging.
3. the measuring method of scanning mirror dynamic return difference, feature exist in a kind of scanning imaging system according to claim 1
In：The photodetector receives window and a signal output port, and light receiver window and signal output comprising a light
There are interaction relations for window：After light receives window reception to optical signal, signal output port has signal output.
4. the measuring method of scanning mirror dynamic return difference, feature exist in a kind of scanning imaging system according to claim 1
In：The scanning mirror rotary encoder is installed on the rotor of scanning mirror driving motor, on motor decelerating mechanism output shaft or
Any position in scanning mirror shaft, and the scanning mirror rotary encoder output position signal can be increment type or
Absolute type.
5. the measuring method of scanning mirror dynamic return difference, feature exist in a kind of scanning imaging system according to claim 1
In：The output signal of the photodetector and the position signal of scanning mirror rotary encoder output all input scan control
Device after scanning monitor receives the output signal of photodetector, can record and show instantaneous scanning mirror rotary coding
The value of device.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711138593.8A CN108152011A (en) | 2017-11-16 | 2017-11-16 | The measuring method of scanning mirror dynamic return difference in scanning imaging system |
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| CN201711138593.8A CN108152011A (en) | 2017-11-16 | 2017-11-16 | The measuring method of scanning mirror dynamic return difference in scanning imaging system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113495259A (en) * | 2020-04-07 | 2021-10-12 | 广东博智林机器人有限公司 | MEMS scanning mirror deflection angle calibrating device |
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Inventor after: Yuan Yi Inventor after: Hou Liwei Inventor after: Xie Wei Inventor after: Zhou Deliang Inventor after: Cang Yuanzhang Inventor after: Cao Dehua Inventor after: Lin Yichao Inventor before: Hou Liwei Inventor before: Xie Wei Inventor before: Zhou Deliang Inventor before: Cang Yuanzhang Inventor before: Cao Dehua Inventor before: Lin Yichao |
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Application publication date: 20180612 |