CN113495259A - MEMS scanning mirror deflection angle calibrating device - Google Patents
MEMS scanning mirror deflection angle calibrating device Download PDFInfo
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- CN113495259A CN113495259A CN202010265803.5A CN202010265803A CN113495259A CN 113495259 A CN113495259 A CN 113495259A CN 202010265803 A CN202010265803 A CN 202010265803A CN 113495259 A CN113495259 A CN 113495259A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
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Abstract
The invention discloses a MEMS scanning mirror deflection angle calibration device, which comprises: an installation table; the first adjusting bracket is arranged on the mounting table and used for mounting the MEMS scanning mirror; the camera module is arranged on the mounting table and used for acquiring image information of the MEMS scanning mirror and measuring the azimuth deviation of the MEMS scanning mirror according to the image information so as to adjust the azimuth of the MEMS scanning mirror through the first adjusting bracket; the laser emitter is used for emitting laser beams to the MEMS scanning mirror; the second adjusting bracket is arranged on the mounting table, the laser emitter is mounted on the second adjusting bracket, and the second adjusting bracket is used for adjusting the position of the laser emitter; and the position detector is arranged on the mounting table, the MEMS scanning mirror can focus a laser beam on a photosensitive surface of the position detector, and the position detector can acquire an actual deflection angle of the MEMS scanning mirror according to the detected laser spots so as to obtain an angle deviation between the actual deflection angle and a theoretical deflection angle.
Description
Technical Field
The invention relates to the technical field of laser radar detection, in particular to a calibration device for an deflection angle of an MEMS (micro-electromechanical system) scanning mirror.
Background
The MEMS scanning mirror is an MEMS optical device formed by integrating a micro light reflector and an MEMS driver, and the micro light reflector is driven by the MEMS driver to deflect, so that the deflection angle of the MEMS scanning mirror is changed to realize scanning. The scanning performance of the MEMS scanning mirror is an important parameter of the MEMS scanning mirror, and the scanning performance and reliability of the MEMS scanning mirror need to be measured and evaluated to ensure that the MEMS scanning mirror meets the vehicle specifications.
At present, the deflection angle of the MEMS scanning mirror is estimated by measuring the deflection angle of the micro-light mirror and calculating the driving voltage and current, and the precision and the stability are lacked. The micromirror controls the deflection of the laser beam in a deterministic and repeatable manner according to the input signal, so that the MEMS scan mirror needs to measure the deflection angle of the micromirror and the driving voltage and current signals in real time, and the measuring device itself needs to be calibrated to ensure the measurement accuracy.
Disclosure of Invention
The invention aims to provide an MEMS scanning mirror deflection angle calibration device capable of improving measurement accuracy and stability.
In order to achieve the purpose, the invention adopts the following technical scheme:
a MEMS scan mirror deflection angle calibration apparatus comprising:
an installation table;
the first adjusting bracket is arranged on the mounting table and used for mounting the MEMS scanning mirror;
the camera module is arranged on the mounting table and used for acquiring image information of the MEMS scanning mirror and measuring the azimuth deviation of the MEMS scanning mirror according to the image information so as to adjust the azimuth of the MEMS scanning mirror through the first adjusting bracket;
the laser transmitter is used for transmitting a laser beam to the MEMS scanning mirror;
the second adjusting bracket is arranged on the mounting table, the laser emitter is mounted on the second adjusting bracket, and the second adjusting bracket is used for adjusting the direction of the laser emitter; and
the position detector is arranged on the mounting table, the MEMS scanning mirror can focus the laser beam on a photosensitive surface of the position detector, and the position detector can obtain an actual deflection angle of the MEMS scanning mirror according to the detected laser spots so as to obtain an angle deviation between the actual deflection angle and a theoretical deflection angle.
In some embodiments, the MEMS scan mirror deflection angle calibration apparatus further comprises:
the distance measuring sensor is arranged on the position detector and used for measuring the initial distance between the position detector and the MEMS scanning mirror so as to obtain the distance deviation between the initial distance and the ideal initial distance; and
and the third adjusting bracket is arranged on the mounting table, the position detector is arranged on the third adjusting bracket, and the third adjusting bracket can adjust the initial distance between the position detector and the MEMS scanning mirror according to the distance deviation.
In some embodiments, the third adjustment mount is a one-dimensional motorized translation mount capable of adjusting the horizontal displacement of the position detector.
In some embodiments, the MEMS scan mirror deflection angle calibration apparatus further comprises:
the computer is in communication connection with the third adjusting bracket and is used for sending a moving signal to the third adjusting bracket, and the third adjusting bracket can drive the position detector to displace along the direction vertical to the photosensitive surface of the third adjusting bracket according to the moving signal; and
and the displacement sensor is arranged on the position detector, is in communication connection with the computer, and is used for measuring the displacement of the position detector and feeding the displacement back to the computer, and the computer records the displacement and the actual deflection angle corresponding to the displacement.
In some embodiments, the MEMS scan mirror deflection angle calibration apparatus further comprises:
the control circuit board is arranged on the third adjusting bracket;
the anti-interference module is electrically connected with the control circuit board, is electrically connected with the position detector and is used for eliminating electromagnetic interference on the position detector; and
and the signal processing module is electrically connected with the control circuit board, is electrically connected with the position detector and is used for processing the voltage/current signals corresponding to the laser faculae detected by the position detector.
In some embodiments, the camera module may be capable of acquiring image information of a laser beam emitted by the laser emitter and acquiring an orientation of the laser beam according to the image information of the laser beam, so as to adjust the orientation of the laser emitter through the second adjustment bracket.
In some embodiments, the camera module comprises:
a camera for photographing the MEMS scanning mirror to acquire image information of the MEMS scanning mirror; and
and the image processing unit is in communication connection with the camera and is used for receiving and processing the image information so as to acquire the azimuth deviation of the MEMS scanning mirror.
In some embodiments, the camera is mounted on the mounting table by a fourth adjustment bracket for adjusting the orientation of the camera.
In some embodiments, the fourth adjustment bracket is a one-dimensional adjustment bracket for adjusting the height of the camera.
In some embodiments, the first and/or second adjustment carriages are five-dimensional adjustment carriages having five degrees of freedom in three-dimensional translation and two-dimensional angular rotation.
The MEMS scanning mirror deflection angle calibration device at least has the following beneficial effects: the deflection angle of the MEMS scanning mirror is measured in real time at high precision through the position detector so as to calibrate the deflection angle of the MEMS scanning mirror, and the measurement precision of the deflection angle of the MEMS scanning mirror is improved; the MEMS scanning mirror can be independently calibrated through the first adjusting support and the camera module while the deflection angle of the MEMS scanning mirror is measured, the laser transmitter is independently calibrated through the second adjusting support, and the calibration processes of all mechanisms are mutually cooperated, so that the measurement precision and stability of the whole calibration device are improved, the structure is simple, and the operation is convenient.
Drawings
FIG. 1 is a schematic structural diagram of a MEMS scanning mirror deflection angle calibration apparatus provided in an embodiment of the present invention;
FIG. 2 is an exploded view of a MEMS scanning mirror deflection angle calibration apparatus provided in an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of another angle of the MEMS scanning mirror deflection angle calibration device shown in FIG. 1;
FIG. 4 is a schematic diagram of an MEMS scanning mirror deflection angle calibration apparatus provided in an embodiment of the present invention;
the reference numbers illustrate:
the system comprises a mounting table 10, a MEMS scanning mirror 20, a MEMS driver 21, a laser emitter 30, a collimator 31, a position detector 40, a camera 51, a first adjusting bracket 61, a second adjusting bracket 62, a third adjusting bracket 63, a fourth adjusting bracket 64 and a computer 70.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
The present embodiment provides a MEMS scan mirror deflection angle calibration apparatus, as shown in fig. 1 to 4, which includes a mounting table 10, a first adjustment bracket 61, a laser transmitter 30, a second adjustment bracket 62, a position detector 40, and a camera module.
Wherein, the first adjusting bracket 61 is arranged on the mounting table 10 and is used for mounting the MEMS scanning mirror 20; the laser emitter 30 is used for emitting laser beams to the MEMS scanning mirror 20; the camera module is arranged on the mounting table 10 and is used for acquiring image information of the MEMS scanning mirror 20 and measuring an orientation deviation of the MEMS scanning mirror 20 according to the image information so as to adjust the orientation of the MEMS scanning mirror 20 through the first adjusting bracket 61; a second adjusting bracket 62 is arranged on the mounting table 10, the laser emitter 30 is mounted on the second adjusting bracket 62, and the second adjusting bracket 62 is used for adjusting the orientation (i.e. direction and position) of the laser emitter 30; the position detector 40 is arranged on the mounting table 10, the MEMS scanning mirror 20 can focus laser beams on a photosensitive surface of the position detector 40, and the position detector 40 can obtain an actual deflection angle of the MEMS scanning mirror 20 according to detected laser spots so as to obtain an angle deviation between the actual deflection angle and a theoretical deflection angle.
According to the MEMS scanning mirror deflection angle calibration device, the deflection angle of the MEMS scanning mirror 20 is measured in real time and at high precision through the position detector 40, so that the deflection angle of the MEMS scanning mirror 20 is calibrated, and the measurement precision of the deflection angle of the MEMS scanning mirror is improved; and can carry out MEMS scanning mirror 20's independent calibration through first adjustment support 61 and camera module when measuring MEMS scanning mirror 20's deflection angle, carry out laser emitter 30's independent calibration through second adjustment support 62, the calibration process of each mechanism is in coordination each other, has improved whole calibrating device's measurement accuracy and stability, simple structure, convenient operation.
Specifically, the MEMS scan mirror deflection angle calibration apparatus can calibrate the deflection angle of different MEMS scan mirrors 20, and the process of replacing different MEMS scan mirrors 20 mounted on the first adjustment bracket 61 may cause an orientation error of the MEMS scan mirror 20, so that the image information of the current MEMS scan mirror 20 can be obtained through the camera module, the orientation of the current MEMS scan mirror 20 can be obtained according to the image information, the orientation of the current MEMS scan mirror 20 is compared with the target orientation to obtain an orientation deviation of the MEMS scan mirror 20, and then the orientation of the current MEMS scan mirror 20 is adjusted through the first adjustment bracket 61, so that the orientation of the current MEMS scan mirror 20 is the same as the target orientation. Alternatively, the first adjustment bracket 61 may be manually adjusted or may be automatically adjusted.
In some embodiments, the first adjustment leg 61 is a five-dimensional adjustment leg having five degrees of freedom in three-dimensional translation and two-dimensional angular rotation, and is oriented at X, Y,Z、θXAnd thetaYThe five directions move, and the adjusting precision is higher.
In this embodiment, the laser emitter 30 is a fiber laser source with a fiber laser collimator 31, and the laser beam is projected to the central region of the MEMS scanning mirror 20 (i.e. the center of the mirror surface of the micromirror) through the collimator 31 and then focused on the position detector 40 by the central region of the MEMS scanning mirror 20. Specifically, the second adjusting bracket 62 can be used to adjust the orientation of the collimator 31 before the calibration is started, so that the laser beam emitted by the laser emitter 30 is precisely aligned with the central area of the MEMS scan mirror 20, thereby improving the measurement accuracy of the deflection angle of the MEMS scan mirror. Alternatively, the second adjustment bracket 62 may be manually adjusted or may be automatically adjusted.
In some embodiments, the second adjustment bracket 62 is a five-dimensional adjustment bracket having five degrees of freedom in three-dimensional translation and two-dimensional angular rotation, which can be oriented at X, Y, Z θXAnd thetaYThe five directions move, and the adjusting precision is higher.
In some embodiments, the camera module comprises a camera 51 and an image processing unit, the camera 51 is used for photographing the MEMS scanning mirror 20 to acquire image information of the MEMS scanning mirror 20; the image processing unit is communicatively connected to the camera 51 for receiving and processing image information to obtain an orientation deviation of the MEMS scanning mirror 20. Specifically, the camera 51 is connected to the computer 70, and the computer 70 is installed with image processing software, which can obtain the orientation deviation of the MEMS scanning mirror 20 according to the image information of the MEMS scanning mirror 20, thereby providing intuitive support for correctly determining and adjusting the installation position of the MEMS scanning mirror 20.
The camera 51 may be mounted on the mounting table 10 through a fourth adjusting bracket 64, and the orientation of the camera 51 may be adjusted through the fourth adjusting bracket 64 to adjust the shooting angle of the camera 51. In this embodiment, the fourth adjusting bracket 64 is a one-dimensional adjusting bracket for adjusting the height of the camera 51, and the height of the camera 51 is adjusted by the one-dimensional adjusting bracket, so that the camera 51 can shoot the MEMS scanning mirror 20 and is prevented from being blocked by other components. It should be understood that in other embodiments, the fourth adjustment bracket 64 may also be a multi-dimensional adjustment bracket.
In this embodiment, the camera 51 is a high-resolution digital camera with a telecentric objective (i.e., a telecentric lens), and the telecentric objective can prevent the magnification of the obtained image from changing within a certain object distance range, so that the azimuth error caused by replacing different MEMS scanning mirrors 20 can be measured more accurately.
In some embodiments, the camera module can acquire image information of the laser beam emitted by the laser emitter 30 and acquire the orientation of the laser beam according to the image information of the laser beam, so that the orientation of the laser emitter 30 is adjusted through the second adjusting bracket 62, the laser beam is directly adjusted, and the calibration effect is better.
The Position Detector (PSD) 40 can accurately track the Position of a laser spot on the photosensitive surface of the MEMS scanning mirror in real time to obtain the deflection angle of the MEMS scanning mirror corresponding to the laser spot, thereby realizing real-time high-precision measurement of the deflection angle of the MEMS scanning mirror, so as to calibrate the deflection angle of the MEMS scanning mirror 20, and improve the calibration accuracy of the deflection angle of the MEMS scanning mirror.
In some embodiments, the MEMS scanning mirror deflection angle calibration apparatus further includes a ranging sensor and a third adjusting bracket 63, the ranging sensor is disposed on the position detector 40 and is used for measuring an initial distance between the position detector 40 and the MEMS scanning mirror 20 to obtain a distance deviation between the initial distance and an ideal initial distance; the third adjusting bracket 63 is disposed on the mounting table 10, the position detector 40 is mounted on the third adjusting bracket 63, and the third adjusting bracket 63 can adjust the initial distance between the position detector 40 and the MEMS scanning mirror 20 according to the distance deviation.
The system error generated by the alignment of a single mechanism is a main factor influencing the measurement accuracy of the deflection angle of the MEMS scanning mirror, wherein one main error source is the initial distance between the position detector 40 and the MEMS scanning mirror 20, and the initial distance between the position detector 40 and the MEMS scanning mirror 20 needs to be determined under the condition that the uncertainty is less than tens of microns so as to ensure the accuracy required by the measurement. Therefore, the initial distance between the position detector 40 and the MEMS scanning mirror 20 can be measured by the ranging sensor, and then the position of the position detector 40 is adjusted by the third adjusting bracket 63 according to the detected initial distance, so that the initial distance between the position detector 40 and the MEMS scanning mirror 20 approaches to an ideal initial distance, thereby eliminating a deflection angle test error caused by the initial distance between the position detector 40 and the MEMS scanning mirror 20, and improving the reliability and stability of the measurement result. It should be understood that the distance between the position detector 40 and the MEMS scanning mirror 20 refers to the length of the line connecting the center of the photosensitive surface of the position detector 40 and the center of the mirror surface of the MEMS scanning mirror 20.
In some embodiments, the third adjustment mount 63 is a one-dimensional motorized translation mount capable of adjusting the horizontal displacement of the position detector 40. In other embodiments, the third adjusting bracket 63 may be a bracket capable of adjusting the horizontal displacement and height of the position detector 40.
In some embodiments, the MEMS scanning mirror deflection angle calibration apparatus further includes a computer 70 and a displacement sensor, the computer 70 is communicatively connected to the third adjusting bracket 63, and is configured to send a moving signal to the third adjusting bracket 63, and the third adjusting bracket 63 can drive the position detector 40 to displace along a direction perpendicular to its own photosensitive surface according to the moving signal; the displacement sensor is disposed on the position detector 40, and is in communication connection with the computer 70, and is configured to measure the displacement of the position detector 40 and feed back the displacement to the computer 70, and the computer 70 records the displacement and an actual deflection angle corresponding to the displacement. Preferably, the lead-out wires of the displacement sensor are shielded wires to reduce electromagnetic interference. In addition, in order to reduce the pulse interference caused by the switching power supply, a decoupling capacitor is connected between the positive power supply and the negative power supply and the ground so as to reduce noise.
Specifically, as shown in FIG. 4, the MEMS driver 21 of the MEMS scanning mirror 20 is connected to the output interface A1 of the computer 70; the output interface of the position detector 40 is respectively connected with a first input interface a2, a second input interface A3 and a third input interface a4 of the computer 70, and transmits an X-axis signal to the computer 70 through the first input interface a2, transmits a Y-axis signal to the computer 70 through the second input interface A3, and transmits a working state signal to the computer 70 through the third input interface a 4; the camera 51 is connected to the fourth input interface a5 of the computer 70, alternatively, the fourth input interface a5 may be a USB interface.
In the process that the position detector 40 moves along the direction vertical to the photosensitive surface of the position detector, the displacement sensor measures the displacement of the position detector 40 and feeds the displacement back to the computer 70, meanwhile, the position detector 40 sends the detected coordinates corresponding to the laser spots to the computer 70 to obtain the actual deflection angle of the MEMS scanning mirror 20, so that one displacement can correspondingly obtain an actual deflection angle, a plurality of displacements can correspondingly obtain a plurality of actual deflection angles, the computer 70 averages the plurality of actual deflection angles, and the average value is used as the deflection angle of the MEMS scanning mirror 20, so that the measurement accuracy of the deflection angle of the MEMS scanning mirror is better. Illustratively, the MEMS driver 21 of the MEMS scanning mirror 20 outputs a first driving voltage to drive the mirror surface of the micro optical mirror to deflect, and the position detector 40 moves 5 mm in a direction perpendicular to the self optical sensitive surface to be away from the MEMS scanning mirror 20; in the moving process of the position detector 40, when the position detector 40 moves by 1 mm, a signal is sent to the computer 70 by the displacement sensor, meanwhile, the position detector 40 sends the coordinates corresponding to the laser spots detected at the position to the computer 70, and each coordinate corresponds to one deflection angle of the MEMS scanning mirror, so that five coordinates are obtained in the moving process of 5 mm, and five coordinates correspond to five deflection angles of the MEMS scanning mirror; similarly, five coordinates are obtained in the moving process of the position detector 40 returning to the initial position, five MEMS scan mirror deflection angles are obtained by the five coordinates, the obtained ten MEMS scan mirror deflection angles are averaged by the computer 70, and the average value is used as the actual deflection angle corresponding to the first driving voltage.
Since the high-voltage driving of the MEMS scan mirror 20 may generate electromagnetic interference, which may affect the stability of the calibration apparatus, resulting in measurement errors, the calibration apparatus for the deflection angle of the MEMS scan mirror further includes a control circuit board, an anti-interference module, and a signal processing module, and the control circuit board is disposed on the third adjusting bracket 63; the anti-interference module is electrically connected with the control circuit board, and is electrically connected with the position detector 40 and used for eliminating electromagnetic interference on the position detector 40 and improving the stability of the calibration device; the signal processing module is electrically connected to the control circuit board, and the signal processing module is electrically connected to the position detector 40 and is configured to process the voltage/current signal corresponding to the laser spot detected by the position detector 40.
Optionally, the anti-interference module includes a transimpedance amplifier, the transimpedance amplifier has a small input bias current, a small detuning, a high gain, a strong common mode rejection capability, a fast response, a low drift and a stable performance, and can improve the measurement accuracy of the calibration device. All resistors in the signal processing module are preferably high-precision and high-stability metal film resistors so as to improve the measurement precision of the calibration device.
The operation principle of the MEMS scan mirror deflection angle calibration apparatus is described below with reference to fig. 3 and 4:
before calibration, the orientation of the MEMS scanning mirror 20 is adjusted by the first adjusting bracket 61, so that the mirror surface of the MEMS scanning mirror 20 is parallel to the photosensitive surface of the position detector 40, and the center of the mirror surface of the MEMS scanning mirror 20 is highly overlapped with the center of the photosensitive surface of the position detector 40 (as shown in fig. 3), then the orientation of the laser emitter 30 is adjusted by the second adjusting bracket 62, so that the laser beam emitted by the laser emitter 30 hits the center of the mirror surface of the MEMS scanning mirror 20, and is focused on the photosensitive surface of the position detector 40 after being reflected by the mirror surface of the MEMS scanning mirror 20, and then calibration is started; in the calibration process, the MEMS driver 21 of the MEMS scanning mirror 20 outputs a driving voltage to drive the mirror surface of the micro light reflector to deflect, the laser beam is focused on the photosensitive surface of the position detector 40 after being reflected by the mirror surface of the micro light reflector, the position detector 40 outputs two paths of analog voltage signals after detecting laser spots, the voltage signals respectively represent the position of the laser spot on the position detector 40, the computer 70 records the position coordinates corresponding to the two analog voltage signals, the position coordinate reflects the deflection angle of the MEMS scanning mirror corresponding to the current driving voltage, when the MEMS driver 21 of the MEMS scanning mirror 20 sequentially outputs a plurality of different driving voltages, a plurality of deflection angles of the MEMS scanning mirror can be obtained, the deflection angle calibration coefficient of the MEMS scan mirror 20 can be obtained by fitting a plurality of MEMS scan mirror deflection angles with a plurality of driving voltages by the computer 70.
It should be noted that when one portion is referred to as being "secured to" another portion, it may be directly on the other portion or there may be an intervening portion. When a portion is said to be "connected" to another portion, it may be directly connected to the other portion or intervening portions may be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. An MEMS scanning mirror deflection angle calibration device, comprising:
an installation table;
the first adjusting bracket is arranged on the mounting table and used for mounting the MEMS scanning mirror;
the camera module is arranged on the mounting table and used for acquiring image information of the MEMS scanning mirror and measuring the azimuth deviation of the MEMS scanning mirror according to the image information so as to adjust the azimuth of the MEMS scanning mirror through the first adjusting bracket;
the laser transmitter is used for transmitting a laser beam to the MEMS scanning mirror;
the second adjusting bracket is arranged on the mounting table, the laser emitter is mounted on the second adjusting bracket, and the second adjusting bracket is used for adjusting the direction of the laser emitter; and
the position detector is arranged on the mounting table, the MEMS scanning mirror can focus the laser beam on a photosensitive surface of the position detector, and the position detector can obtain an actual deflection angle of the MEMS scanning mirror according to the detected laser spots so as to obtain an angle deviation between the actual deflection angle and a theoretical deflection angle.
2. The MEMS scan mirror deflection angle calibration device of claim 1, further comprising:
the distance measuring sensor is arranged on the position detector and used for measuring the initial distance between the position detector and the MEMS scanning mirror so as to obtain the distance deviation between the initial distance and the ideal initial distance; and
and the third adjusting bracket is arranged on the mounting table, the position detector is arranged on the third adjusting bracket, and the third adjusting bracket can adjust the initial distance between the position detector and the MEMS scanning mirror according to the distance deviation.
3. The MEMS scan mirror deflection angle calibration device of claim 2, wherein the third adjustment bracket is a one-dimensional motorized translation bracket that can adjust the horizontal displacement of the position detector.
4. The MEMS scan mirror deflection angle calibration device of claim 2, further comprising:
the computer is in communication connection with the third adjusting bracket and is used for sending a moving signal to the third adjusting bracket, and the third adjusting bracket can drive the position detector to displace along the direction vertical to the photosensitive surface of the third adjusting bracket according to the moving signal; and
and the displacement sensor is arranged on the position detector, is in communication connection with the computer, and is used for measuring the displacement of the position detector and feeding the displacement back to the computer, and the computer records the displacement and the actual deflection angle corresponding to the displacement.
5. The MEMS scanning mirror deflection angle calibration device of any one of claims 2 to 4, further comprising:
the control circuit board is arranged on the third adjusting bracket;
the anti-interference module is electrically connected with the control circuit board, is electrically connected with the position detector and is used for eliminating electromagnetic interference on the position detector; and
and the signal processing module is electrically connected with the control circuit board, is electrically connected with the position detector and is used for processing the voltage/current signals corresponding to the laser faculae detected by the position detector.
6. The MEMS scanning mirror deflection angle calibration device of claim 1, wherein the camera module is capable of acquiring image information of a laser beam emitted by the laser emitter and acquiring the orientation of the laser beam according to the image information of the laser beam, so as to adjust the orientation of the laser emitter through the second adjusting bracket.
7. The MEMS scan mirror deflection angle calibration device of claim 1, wherein the camera module comprises:
a camera for photographing the MEMS scanning mirror to acquire image information of the MEMS scanning mirror; and
and the image processing unit is in communication connection with the camera and is used for receiving and processing the image information so as to acquire the azimuth deviation of the MEMS scanning mirror.
8. The MEMS scanning mirror deflection angle calibration device of claim 7, wherein the camera is mounted on the mounting stage by a fourth adjustment bracket, the fourth adjustment bracket being configured to adjust an orientation of the camera.
9. The MEMS scan mirror deflection angle calibration apparatus of claim 8, wherein the fourth adjustment bracket is a one-dimensional adjustment bracket for adjusting the height of the camera.
10. The MEMS scanning mirror deflection angle calibration device of claim 1, wherein the first adjustment support and/or the second adjustment support is a five-dimensional adjustment support having five degrees of freedom in three-dimensional translation and two-dimensional angular rotation.
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| CN118226423A (en) * | 2024-05-27 | 2024-06-21 | 杭州洛微科技有限公司 | Semi-solid LiDAR turning mirror stability detection system, method and equipment |
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