CN108151876A - A kind of optical fiber Fabry-Perot cavity microphone - Google Patents
A kind of optical fiber Fabry-Perot cavity microphone Download PDFInfo
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- CN108151876A CN108151876A CN201810160878.XA CN201810160878A CN108151876A CN 108151876 A CN108151876 A CN 108151876A CN 201810160878 A CN201810160878 A CN 201810160878A CN 108151876 A CN108151876 A CN 108151876A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
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- General Physics & Mathematics (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The present invention provides a kind of good Fabry-perot optical fiber cavity microphone of stability, Fabry-perot optical fiber cavity microphone probe, the photodetector that monochromatic monochromatic source can be launched, realize photoelectric signal transformation, three port one-way light guide units, optical fiber, preposition modulate circuit and the optical fiber flange for realizing ring of light shape one way propagation including sensing acoustic vibration；The monochromatic source is connected with the port I of three port one-way light guide units, and Fabry-perot optical fiber cavity microphone probe is connected with the port II of three port one-way light guide units, and photodetector is connected with three port one-way light guide units；Optical fiber for connecting monochromatic source, three port one-way light guide units, probe and photodetector, forms light path；Optical fiber flange, for connecting probe optical fiber and light path optical fiber；Preposition adjustment circuit is connected with the output terminal of photodetector.A kind of Fabry-perot optical fiber cavity microphone of the present invention is simple in structure, be easy to make, stability is good, has a good application prospect.
Description
Technical field
The invention belongs to sound field of sensing technologies, more particularly to a kind of stability is good, cost is relatively low, simple in structure optical fiber
Fabry-Perot cavity microphone.
Background technology
With the development of optical fiber technology, particularly optical fiber communication technology, optical fiber sensing technology consequently also get up by fast development,
In the decades gone out till now of fibre optical sensor concept proposition, optical fiber sensing technology is in machinery, electronic instrument, aviation boat
The production process in the fields such as body, oil, chemical industry, food security automatically controls, on-line checking, fault diagnosis etc. obtained it is wide
General application.
Compared with traditional all kinds of electric transducers, fibre optical sensor has the advantages that some unique high sensitivity, anti-electromagnetism
The advantages that interference, corrosion-resistant, explosion-proof, loss low, long transmission distance.As a branch of fiber optic sensing device, from 20th century
From the sixties, fiber microphone starts to be concerned, and is widely studied.Fiber microphone is the one kind for picking up acoustic signals
Novel microphone, it utilizes various photo structures, realizes modulation of the sound wave to the parameter of light, by the demodulation to optical signal, obtains
Acoustic signals.Different according to the optical parameter of modulation, fiber microphone is broadly divided at present：Intensity modulation type, wavelength modulation type, phase
Position modulation type and polarization-modulating type.
In the fiber microphone device of various principles, the optical fiber Fabry-Perot cavity microphone based on phase-modulation because it is simple in structure,
High sensitivity, using monochromatic light as work light when demodulation method it is simple and be widely studied.But the optical fiber of existing structure
There is also shortcomings for Fabry-Perot cavity microphone.Optical fiber Fabry-Perot cavity microphone is based on highly sensitive optical interference detection method, this makes it
With high sensitivity, however this also causes its stability poor, the reason is that optical fiber Fabry-Perot cavity microphone is vulnerable to extraneous shadow
It rings, when external influence makes the length of optical fiber Fabry-Perot chamber that the variation of 1/8th optical wavelength occur, as 1552nm
Light, when variation reaches 194nm, optical fiber Fabry-Perot cavity microphone will change to failure from most sensitive, this significantly limits its
Practical application.
The principal element for influencing the stability of optical fiber Fabry-Perot cavity microphone has environment temperature, especially for using monochromatic
Light source, using the optical fiber Fabry-Perot cavity microphone of intensity demodulation, output signal is very sensitive to temperature, to find out its cause, be because
The chamber length of optical fiber Fabry-Perot chamber can be varied with temperature and be changed, and be drifted about so as to cause interference spectrum.
The principal element for influencing the stability of optical fiber Fabry-Perot cavity microphone also has external force effect.In existing fiber Fabry-Perot cavity
In microphone sonde configuration, generally all using a reflective surface of the vibrating diaphragm as Fabry-Perot cavity, it is directly anchored on external structure；
Fiber end face is fixed as another reflective surface, the optical fiber by another structure, and the usual structure part is fixed on outer knot
Inside structure, another part can be except external structure.This structure type can cause the fixed structure of fiber end face easily directly by
To the effect of external force, so as to make the position of fiber end face that small variation occur, so as to make the bad stability of interference structure.
The prior art goes to solve the stability problem of optical fiber Fabry-Perot cavity microphone probe not from probe in itself.Such as invention
A kind of optical fiber FP chamber sonic probes have been recorded in patent CN104019884B, in this configuration, carrying optical fiber Fabry-Perot cavity configuration
The core arrangement of one reflective surface, the effect of the easy external force in thinner tail portion, and also inner core is fixed by jackscrew, for a long time
Mechanical stability must arrive guarantee, in addition in that patent, also without recording the method for solving temperature and influencing.
For this poor problem of this optical fiber Fabry-Perot cavity microphone stability, there are mainly two types of solutions at present：(1) it adjusts
The operation wavelength of light is saved, this scheme is using tunable laser, operation wavelength is allowed to change with change of cavity length, so as to ensure
Interference spectrum is stablized relatively；(2) using orthogonal signalling, orthogonal signalling is generated including the use of double work wavelength and double optical fiber generate just
Signal is handed over, orthogonal signalling demodulation method is recycled, obtains acoustic signals.Both the above scheme be directed to complicated signal processing and
System structure, cost is higher, is unfavorable for applying.
Invention content
(1) technical problems to be solved
In order to overcome the prior art there are stability is poor, of high cost, system complex, be unfavorable for using the problems such as, the present invention
A kind of optical fiber Fabry-Perot cavity microphone is provided, it has the characteristics that, and stability is good, cost is relatively low, composition is simple, is easy to make.
(2) technical solution
A kind of optical fiber Fabry-Perot cavity microphone of the present invention, including：
Sense the optical fiber Fabry-Perot cavity microphone probe of acoustic vibration；
Monochromatic monochromatic source can be launched；
Realize the photodetector of photoelectric signal transformation；
Realize three port one-way light guide units of ring of light shape one way propagation；
And optical fiber, preposition modulate circuit, optical fiber flange；
The monochromatic source is connected with the port I of three port one-way light guide units, optical fiber Fabry-Perot cavity microphone probe with
The port II of three port one-way light guide units is connected, and photodetector is connected with three port one-way light guide unit port III；
Optical fiber, for connecting monochromatic source, three port one-way light guide units, optical fiber Fabry-Perot cavity microphone probe and photodetector, shape
Into light path；Optical fiber flange, for connecting probe optical fiber and light path optical fiber；Preposition adjustment circuit and the output terminal phase of photodetector
Connection；
The monochromatic light of the monochromatic source transmitting enters three port one-way light guides from the port I of three port one-way light guide units
In unit, project and enter in optical fiber Fabry-Perot cavity microphone probe from the port II of three port one-way light guide units, realize sound wave pair
Interfere light modulation；The port II of the interference light modulated from three port one-way light guide units enters one-way light guide unit, then from three
The port III of port one-way light guide unit projects to enter in photodetector is converted to Electric signal processing into traveling optical signal；
The optical fiber Fabry-Perot cavity microphone probe includes：
Shell is a hollow structure, screw thread is equipped in the middle part of inner wall, and its underpart is equipped with fixed screw perpendicular to the direction of axis
Hole, the number in hole is 2-4, is circumferentially uniformly distributed；
Vibrating diaphragm is a film, is set to case nose, for sensitive sound wave, has towards the face of enclosure side
Reflection action, a reflective surface as optical fiber Fabry-Perot cavity configuration；
Fiber stub is a hollow columnar structures, is made of homogenous material or different materials are connected compound composition；
Lock pin set is a hollow cylindrical structure, and outside middle portion is equipped with screw thread, and the lock pin set is installed on the shell
Inside is used to install fiber stub towards the side of vibrating diaphragm；Its side covers end from threaded top to lock pin and is equipped with air channel,
For the equilibrium of vibrating diaphragm both sides static pressure；Its bottom is a round platform, and tooling mounting hole is equipped in bottom round platform lower face, using tooling,
The lock pin set is installed on by enclosure by tooling mounting hole, after installation is complete, lateral surface and the shell bottom of bottom round platform
Portion's inner surface is in contact, and contact seam is welded using laser welding process, so as to which lock pin set be made to form reliable connection with shell,
Improve the stability of structure；
Housing is the cap-like structure of a both ends open, is installed on housing exterior from the lower end of shell, lock pin set is wrapped in it
The stability of optical fiber Fabry-Perot cavity microphone probe so as to which lock pin set be avoided directly to be acted on by external force, is improved in inside；
Probe optical fiber by housing via the lock pin set, is fixed in fiber stub, probe optical fiber upper surface is as light
Another reflective surface of nanofarads-amber cavity configuration.
Fixed screw, number is consistent with the number of fixed screw holes, is installed in fixed screw holes, for assisting fixing
Lock pin set；
Front shroud is mounted on the outside of shell from vibrating diaphragm side, and for protecting vibrating diaphragm, top is provided with tone-entering hole.
In the optical fiber Fabry-Perot cavity microphone structure, vibrating diaphragm reflective surface and probe optical fiber upper surface form Fiber Optic Sensor-
Amber chamber, the coefficient of thermal expansion for the composite structure that lock pin set-fiber stub is formed are more than the coefficient of thermal expansion of shell.
(3) advantageous effect
From above-mentioned technical proposal and embodiment experimental result it is found that a kind of optical fiber Fabry-Perot cavity microphone of the present invention has such as
Lower advantageous effect：
(1) lead to thermostabilization for material thermal expansion coefficient is improper in existing fiber Fabry-Perot cavity microphone sonde configuration
Property it is poor the problem of, in the present invention, shell is more than using the coefficient of thermal expansion of composite structure that lock pin set-fiber stub is formed
The method of coefficient of thermal expansion, when ambient temperature changes, the structure of carrying optical fiber upper surface can be obtained than carrying vibrating diaphragm
The shell mechanism of reflective surface has the variable quantity of bigger, and then can realize, vibrating diaphragm reflective surface and the distance of optical fiber upper surface are basic
It is constant, i.e., optical fiber Fabry-Perot chamber chamber length be basically unchanged, ensure optical fiber Fabry-Perot cavity configuration high stability, so as to make Fiber Optic Sensor-
Amber cavity microphone has good thermal adaptability；
(2) it is easily directly acted on for the fixed structure of fiber end face in prior art by external force, makes optical fiber
Small variation occurs for the position of end face, the problem of causing sonde configuration stability poor, and the present invention is by jacket structure by lock pin
Set is wrapped in inside it, and lock pin set is avoided directly to be acted on by external force, while utilizes laser welding process by lock pin set and shell
Weld together, reliable connection is formed, so as to make optical fiber Fabry-Perot cavity microphone with good stability；
(3) a kind of system structure of optical fiber Fabry-Perot cavity microphone of the present invention is simple, and cost is relatively low.
Description of the drawings
Fig. 1 is according to a kind of optical fiber Fabry-Perot cavity microphone composition schematic diagram of first embodiment of the invention；
Fig. 2 is according to a kind of sonde configuration diagrammatic cross-section of optical fiber Fabry-Perot cavity microphone of first embodiment of the invention；
Fig. 3 is to be illustrated according to a kind of probing shell structural profile of optical fiber Fabry-Perot cavity microphone of first embodiment of the invention
Figure；
Fig. 4 is to cover three-dimensional structure according to a kind of probe lock pin of optical fiber Fabry-Perot cavity microphone of first embodiment of the invention to show
It is intended to；
Fig. 5 is the interference spectrum that conventional fiber Fabry-Perot cavity microphone is popped one's head at different temperatures；
Fig. 6 is according to a kind of probe of optical fiber Fabry-Perot cavity microphone of first embodiment of the invention at different temperatures dry
Relate to spectrum；
Fig. 7 is according to a kind of normalization at different temperatures of optical fiber Fabry-Perot cavity microphone of first embodiment of the invention
Sensitivity；
Fig. 8 is to be changed with time according to a kind of probe chamber of optical fiber Fabry-Perot cavity microphone of first embodiment of the invention length
Relationship；
Fig. 9 is to be formed according to a kind of three port one-way light guide unit of optical fiber Fabry-Perot cavity microphone of second embodiment of the invention
Schematic diagram；
Figure 10 is according to a kind of sonde configuration diagrammatic cross-section of optical fiber Fabry-Perot cavity microphone of second embodiment of the invention；
Figure 11 is the probe fiber stub structural representation according to a kind of optical fiber Fabry-Perot cavity microphone of second embodiment of the invention
Figure.
【Main element symbol description of the present invention】
1- optical fiber Fabry-Perots cavity microphone probe 102a- vibrating diaphragm reflective surfaces
2- monochromatic source 103- fiber stubs
Tri- port one-way light guide unit 103a- of 3- ceramics or metal
The port I 103b- rigid polymers of tri- port one-way light guide units of 301-
The port II 104- lock pin sets of tri- port one-way light guide units of 302-
The port III 104a- sleeve external screw threads of tri- port one-way light guide units of 301-
3a- isolator 104b- air channels
3b- fiber coupler 104c- tooling mounting holes
4- photodetector 104d- bottoms round platform
The preposition modulate circuit 105- housings of 5-
6- optical fiber 106- probe optical fiber
7- optical fiber flanges 106a- probe optical fiber upper surface
101- shell 107- front shrouds
101a- shell internal thread 107a- tone-entering holes
101b- fixed screw holes 108- fixed screws
102- vibrating diaphragms
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.It should be noted that in attached drawing or specification description, similar or identical portion
Divide and all use identical figure number.The realization method for not being painted or describing in attached drawing is those of ordinary skill in the technical field
Known form.In addition, though the parameter demonstration comprising particular value can be provided herein, it is to be understood that parameter is without definite etc.
In analog value, but can be similar to be worth accordingly in acceptable error margin or design constraint.The side mentioned in embodiment
Only it is the direction of refer to the attached drawing to term, such as " on ", " under ", "left", "right" etc..Therefore, for the direction term used is
It is bright to be not used for limiting the scope of the invention.
[first embodiment]
In first exemplary embodiment of the present invention, a kind of optical fiber Fabry-Perot cavity microphone is provided.First embodiment
A kind of optical fiber Fabry-Perot cavity microphone composition schematic diagram, as shown in Figure 1, a kind of optical fiber Fabry-Perot cavity microphone of the present embodiment includes：
The optical fiber Fabry-Perot cavity microphone probe 1 of sensing acoustic vibration can launch monochromatic monochromatic source 2, realize ring of light shape list
Photodetector 4, preposition modulate circuit 5, the optical fiber of three port one-way light guide units 3, realization photoelectric signal transformation to propagation
6th, optical fiber flange 7；The monochromatic source 2 is connected with the port I301 of three port one-way light guide units, and optical fiber Fabry-Perot chamber is transaudient
Device probe 1 is connected with the port II302 of three port one-way light guide units, 4 and three port one-way light guide unit of photodetector
Port III303 is connected；Optical fiber 6, it is transaudient for connecting monochromatic source 2, three port one-way light guide units 3, optical fiber Fabry-Perot chamber
Device probe 1 and photodetector 4, form light path；Optical fiber flange 7, for connecting probe optical fiber 106 and light path optical fiber 6；Preposition tune
Whole circuit 5 is connected with the output terminal of photodetector 4；The monochromatic light of the monochromatic source transmitting 2 is single from three ports through optical fiber
Enter in three port one-way light guide units 3 to the port I301 of light element, from the port II302 of three port one-way light guide units
It projects and enters in optical fiber Fabry-Perot cavity microphone probe 1, realize sound wave to interfering light modulation；The interference light modulated is from three ports
The port II302 of one-way light guide unit enters three port one-way light guide units, then from the port of three port one-way light guide units
III303 projects to enter in photodetector 4 is converted to Electric signal processing into traveling optical signal.
It is described in detail below for a kind of each section of optical fiber Fabry-Perot cavity microphone of first embodiment.
The monochromatic source 2 for laser or by ASE wide spectrum light sources and optical filter ditch into.
The three ports one-way light guide unit 3 is made of for circulator or isolator 3a and fiber coupler 3b.
A kind of sonde configuration diagrammatic cross-section of optical fiber Fabry-Perot cavity microphone of first embodiment, as shown in Fig. 2, this implementation
A kind of probe 1 of optical fiber Fabry-Perot cavity microphone of example includes：Shell 101, vibrating diaphragm 102, fiber stub 103, lock pin set 104, housing
105th, it pops one's head in optical fiber 106, front shroud 107 and fixed screw 108, the probe of optical fiber Fabry-Perot cavity microphone specifically describes as follows：
Shell 101 is illustrated in figure 3 a kind of optical fiber Fabry-Perot cavity microphone probing shell according to a first embodiment of the present invention
Structural profile illustration is a hollow structure, is equipped with shell internal thread 101a in the middle part of inner wall, 101 lower part of shell is hung down
Fixed screw holes 101b directly is equipped in the direction of axis, the number in hole is 2-4, is circumferentially uniformly distributed；
Vibrating diaphragm 102 is a film, 101 front end of shell is set to, for sensitive sound wave, towards enclosure side
Face has reflection action, a reflective surface 102a as optical fiber Fabry-Perot cavity configuration；
Fiber stub 103 is a hollow columnar structures, is made of homogenous material or different materials are connected compound composition；
Lock pin set 104, be a hollow cylindrical structure, be illustrated in figure 4 according to a first embodiment of the present invention a kind of Fiber Optic Sensor-
Amber cavity microphone probe lock pin set three dimensional structure diagram, outside middle portion be equipped with lock pin cover external screw thread 104a, side from
Threaded top to lock pin set end is equipped with air channel 104b, for the equilibrium of vibrating diaphragm both sides static pressure；Its bottom is a round platform 104d,
Bottom round platform lower face is equipped with tooling mounting hole 104c, using tooling, is pacified lock pin set 104 by tooling mounting hole 104c
Inside shell 101；The lock pin set 104 is installed on inside the shell 101, is used for towards the side of vibrating diaphragm 102
Fiber stub 103 is installed, lock pin set 104 is after installation is complete, lateral surface and 101 bottom of shell of bottom round platform 104d
Inner surface is in contact, and contact seam is welded using laser welding process, so as to which lock pin set 104 be made to be formed reliably with shell 101
Connection improves the stability of structure.
Housing 105 is the cap-like structure of a both ends open, is installed on outside shell 101 from the lower end of shell 101, will be inserted
Core retainer plate 104 is wrapped in inside it, so as to which lock pin set 104 be avoided directly to be acted on by external force；
Optical fiber 106 by housing 105 via the lock pin set 104, is fixed in fiber stub 103, optical fiber upper surface
Another reflective surfaces of the 106a as optical fiber Fabry-Perot cavity configuration；
Front shroud 107 is mounted on the outside of shell 101 from vibrating diaphragm side, and for protecting vibrating diaphragm 102, top is provided with entering tone
Hole 107a；
Fixed screw 108, number is consistent with the number of fixed screw holes 101b, is installed in fixed screw holes 101b,
For assisting fixed lock pin set 104.
The reflective surface 102a of the vibrating diaphragm is vibrating diaphragm in itself towards the face of enclosure；Or the reflective surface of the vibrating diaphragm
102a is to be plated on metallic reflector or dielectric reflective layer of the vibrating diaphragm towards enclosure side.
The fiber stub 103 is made of homogenous material, is ceramic insertion core or metal lock pin；Or the fiber stub
103 by different materials connect it is compound form, connect for ceramics or metal 103a with rigid polymer 103b compound composition；
The optical fiber 106 is single mode optical fiber or polarization maintaining optical fibre.
The vibrating diaphragm 102 is one kind in following diaphragm：Metallic membrane, silicon diaphragm, silicon nitride membrane, silicon dioxide film
Piece, glass membrane, organic polymer diaphragm.
The shell 101, lock pin set 104 are prepared by following material one or more of metal materials therein：Stainless steel,
Titanium, copper, aluminium, aluminium alloy, titanium alloy, monel, nichrome.
In the present embodiment, monochromatic source selects DFB semiconductor laser, and three port one-way light guide units select annular
Device.In sonde configuration, sheathing material selects titanium alloy material, and coefficient of thermal expansion is about 9 × 10-6/ DEG C, the fixation of its underpart
Screw hole is 4；Vibrating diaphragm selects metallic nickel diaphragm, and vibrating diaphragm reflective surface is face of the metallic nickel film towards enclosure side；Optical fiber
Lock pin is homogenous material ceramic lock pin based on zirconium oxide, and coefficient of thermal expansion is about 9.65 × 10-6/℃；Probe optical fiber is single mode optical fiber；
Lock pin set selects nickel-copper alloy material, and coefficient of thermal expansion is about 14.4 × 10-6/℃.According to data above, lock pin set-optical fiber
The coefficient of thermal expansion for the composite structure that lock pin is formed is more than the coefficient of thermal expansion of shell, in this way, carrying probe optical fiber upper surface
Structure can obtain the shell mechanism than carrying vibrating diaphragm reflective surface when ambient temperature changes, the variable quantity for having bigger, into
And can realize, vibrating diaphragm reflective surface and the distance of probe optical fiber upper surface are basically unchanged, and ensure that the height of optical fiber Fabry-Perot cavity configuration is steady
It is qualitative, so as to make optical fiber Fabry-Perot cavity microphone that there is good thermal adaptability.
The temperature adaptive of conventional optical fiber Fabry-Perot cavity microphone is poor, is because the chamber length of optical fiber Fabry-Perot chamber can become with temperature
Change and change, drift about so as to cause interference spectrum.It is illustrated in figure 5 the conventional fiber Fabry-Perot cavity recorded in experiment
The interference spectrum of microphone at different temperatures, it can be seen from the figure that with the variation of temperature, interference spectrum has occurred significantly
Offset.
A kind of optical fiber Fabry-Perot cavity microphone of the present invention has good thermal adaptability, this is because lock pin set-optical fiber is inserted
The coefficient of thermal expansion for the composite structure that core is formed is more than the coefficient of thermal expansion of shell, in this way, the knot of carrying probe optical fiber upper surface
Structure can obtain the shell mechanism than carrying vibrating diaphragm reflective surface when ambient temperature changes, the variable quantity for having bigger, and then
It can realize, vibrating diaphragm reflective surface and the distance of probe optical fiber upper surface are basically unchanged, and ensure the high stable of optical fiber Fabry-Perot cavity configuration
Property.The optical fiber Fabry-Perot cavity microphone a kind of according to a first embodiment of the present invention recorded in experiment is illustrated in figure 6 in different temperatures
Under interference spectrum, it can be seen from the figure that when temperature changes, interference spectrum essentially coincides, and stability is high.In experiment
A kind of normalization sensitivity at different temperatures of optical fiber Fabry-Perot cavity microphone of first embodiment of the invention is also recorded for, such as
Shown in Fig. 7, it can be seen from the figure that sensitivity during using 20 DEG C is as with reference to sensitivity, then in -20 DEG C~40 DEG C of temperature model
In enclosing, the opposite variation of sensitivity is 9.2%, which is acceptable in engineering, which shows this hair
A kind of bright optical fiber Fabry-Perot cavity microphone has good thermal adaptability.
A kind of optical fiber Fabry-Perot cavity microphone of the present invention also has good long-time stability, this is because fixed fiber end face
Lock pin nested structure be installed on enclosure, lock pin set bottom round platform is welded with outer casing bottom by laser welding process, will be slotting
Core retainer plate is firmly fixed in shell, while is wrapped in lock pin set wherein using housing, so as to avoid lock pin set directly by outer
The effect of power, so as to improve the long-time stability of optical fiber Fabry-Perot cavity microphone probe.As shown in figure 8, to record in experiment
The variation relation of the chamber length of a kind of optical fiber Fabry-Perot cavity microphone at any time according to a first embodiment of the present invention, can from figure
Go out, within the testing time of more than 30 days, the length of optical fiber Fabry-Perot chamber does not occur significantly to change, one, ordinate in Fig. 8
The length that scale represents is 100nm, as it can be observed in the picture that the undulating value that chamber was grown in more than 30 days is less than 15nm, is worked caused by the value
The offset that point deviates orthogonal operating point is less than 10%, this ensures that a kind of optical fiber Fabry-Perot cavity microphone of the present invention is reliable enough
Work.
[second embodiment]
A kind of optical fiber Fabry-Perot cavity microphone of second embodiment of the invention and the first example example difference lies in：
Monochromatic source is formed using wide range ASE light sources and the DWDM wavelength division multiplexers with wave filter effect；Three ports are single
It is made of to light element isolator 3a and coupler 3b, as shown in Figure 9；Optical fiber Fabry-Perot cavity microphone sonde configuration is also different.
A kind of sonde configuration diagrammatic cross-section of optical fiber Fabry-Perot cavity microphone of second embodiment of the invention is as shown in Figure 10,
With a kind of probe of optical fiber Fabry-Perot cavity microphone of first embodiment difference lies in：
Sheathing material is monel, and coefficient of thermal expansion is about 14.4 × 10-6/℃；Lock pin set is monel, hot
The coefficient of expansion is about 14.4 × 10-6/℃；Fiber stub 3 by different materials connect it is compound form, be rigid polymer epoxy resin
301 connect compound composition with zirconia ceramics 302, and the coefficient of thermal expansion of epoxy resin is about 54.77 × 10-6/ DEG C, oxidation
Zircon ceramic coefficient of thermal expansion is about 9.65 × 10-6/ DEG C, by the ratio for controlling rigid polymer epoxy resin and zirconia ceramics
Example, obtains the thermal expansion of fiber stub 3 being compounded to form of being connected by zirconia ceramics 301 with rigid polymer epoxy resin 302
Coefficient is 20.2 × 10-6/℃.According to data above, the coefficient of thermal expansion for the composite structure that lock pin set-fiber stub is formed is more than
The coefficient of thermal expansion of shell, in this way, the structure of carrying optical fiber upper surface can be obtained when ambient temperature changes than carrying
The shell mechanism of vibrating diaphragm reflective surface has the variable quantity of bigger, and then can realize, vibrating diaphragm reflective surface and the distance of optical fiber upper surface
It is basically unchanged, ensures the high stability of optical fiber Fabry-Perot cavity configuration, so as to make optical fiber Fabry-Perot cavity microphone that there is good temperature
Adaptability.
When fiber stub connects compound composition for ceramic or metal with rigid polymer, the coefficient of thermal expansion of fiber stub
It is determined by the coefficient of thermal expansion of two kinds of materials and the ratio of two kinds of materials.It is according to second embodiment of the invention one as shown in figure 11
Kind optical fiber Fabry-Perot cavity microphone probe fiber stub structure diagram, the wherein coefficient of thermal expansion of rigid polymer is α21, its length
It spends for L21, ceramic or metal coefficient of thermal expansion is α22, the length of L22, then the thermalexpansioncoefficientα of composite fiber lock pin is under
Formula obtains：
By above formula, suitable material can be selected, and passes through and controls its ratio, realizes the regulation and control of coefficient of thermal expansion, from
And ensure the coefficient of thermal expansion for the composite structure that lock pin set-fiber stub is formed and be more than the coefficient of thermal expansion of shell.
Above-mentioned specific embodiment further illustrates the purpose of the present invention, technical solution and advantageous effect, is answered
Understand, the above is only a specific embodiment of the present invention, is not intended to restrict the invention, all essences in the present invention
Any modification, equivalent substitution, improvement and etc. done within refreshing and principle, should all be included in the protection scope of the present invention.
In conclusion a kind of present invention optical fiber Fabry-Perot cavity microphone probe, have it is simple in structure, be easy to make, stability
, there is good application prospect in the advantages of good.
Claims (11)
1. a kind of optical fiber Fabry-Perot cavity microphone, it is characterised in that including：
Sense the optical fiber Fabry-Perot cavity microphone probe of acoustic vibration；
Monochromatic monochromatic source can be launched；
Realize the photodetector of photoelectric signal transformation；
Realize three port one-way light guide units of ring of light shape one way propagation；
The monochromatic source is connected with the port I of three port one-way light guide units, optical fiber Fabry-Perot cavity microphone probe and three ends
The port II of mouth one-way light guide unit is connected, and photodetector is connected with three port one-way light guide unit port III；
The monochromatic light of the monochromatic source transmitting enters three port one-way light guide units from the port I of three port one-way light guide units
In, it projects and enters in optical fiber Fabry-Perot cavity microphone probe from the port II of three port one-way light guide units, realize sound wave to interference
Light modulation；The port II of the interference light modulated from three port one-way light guide units enters one-way light guide unit, then from three ports
The port III of one-way light guide unit projects to enter in photodetector is converted to Electric signal processing into traveling optical signal；
The optical fiber Fabry-Perot cavity microphone probe includes：
Shell is a hollow structure, screw thread is equipped in the middle part of inner wall；
Vibrating diaphragm is a film, is set to case nose, for sensitive sound wave, is had towards the face of enclosure side reflective
Effect, a reflective surface as optical fiber Fabry-Perot cavity configuration；
Fiber stub is a hollow columnar structures, is made of homogenous material or different materials are connected compound composition；
Lock pin set is a hollow cylindrical structure, and outside middle portion is equipped with screw thread, and the lock pin set is installed in the shell
Portion is used to install fiber stub towards the side of vibrating diaphragm；
Housing is the cap-like structure of a both ends open, housing exterior is installed on from the lower end of shell, by lock pin set packet in the inner
Portion；
Probe optical fiber by housing via the lock pin set, is fixed in fiber stub, probe optical fiber upper surface is as optical fiber
Another reflective surface of Fabry-Perot cavity structure.
In the optical fiber Fabry-Perot cavity microphone sonde configuration, vibrating diaphragm reflective surface and probe optical fiber upper surface form Fiber Optic Sensor-
Amber chamber, the coefficient of thermal expansion for the composite structure that lock pin set-fiber stub is formed are more than the coefficient of thermal expansion of shell.
A kind of 2. optical fiber Fabry-Perot cavity microphone according to claim 1, which is characterized in that the reflective surface of the vibrating diaphragm
It is vibrating diaphragm in itself towards the face of enclosure；
Or the reflective surface of the vibrating diaphragm is to be plated on metallic reflector or dielectric reflective layer of the vibrating diaphragm towards enclosure side.
3. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, which is characterized in that the lock pin set, side
End is covered from threaded top to lock pin and is equipped with air channel, for the equilibrium of vibrating diaphragm both sides static pressure；Its bottom is a round platform, is justified in bottom
Platform lower face is equipped with tooling mounting hole, and using tooling, the lock pin set is installed on enclosure by tooling mounting hole, installs
After the completion, the lateral surface of bottom round platform is in contact with outer casing bottom inner surface, and contact seam is welded using laser welding process, from
And lock pin set is made to form reliable connection with shell.
4. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, which is characterized in that the fiber stub is by list
One material is formed, and is ceramic insertion core or metal lock pin；
Or the fiber stub by different materials connect it is compound form, connect for ceramics or metal with rigid polymer compound structure
Into.
5. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, which is characterized in that the probe optical fiber is single mode
Optical fiber or polarization maintaining optical fibre.
6. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, which is characterized in that the vibrating diaphragm is with lower film
One kind in piece：Metallic membrane, silicon diaphragm, silicon nitride membrane, silica diaphragm, glass membrane, organic polymer diaphragm.
7. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, feature is in the outer casing underpart perpendicular to axis
Direction be equipped with fixed screw holes, the number in hole is 2-4, is circumferentially uniformly distributed；Fixed screw is further included, number is with consolidating
The number for determining screw hole is consistent, is installed in fixed screw holes, for fixing lock pin set；Front shroud is mounted on outer from vibrating diaphragm side
The outside of shell, for protecting vibrating diaphragm, top is provided with tone-entering hole.
8. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, which is characterized in that the shell, lock pin set by with
It is prepared by lower material one or more of metal materials therein：Stainless steel, titanium, copper, aluminium, aluminium alloy, titanium alloy, monel, nickel
Evanohm.
9. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, it is characterised in that the monochromatic source is laser
Device or by ASE wide spectrum light sources and optical filter ditch into.
A kind of 10. optical fiber Fabry-Perot cavity microphone according to claim 1, it is characterised in that three port one-way light guide
Unit is circulator or is made of isolator and fiber coupler.
11. a kind of optical fiber Fabry-Perot cavity microphone according to claim 1, it is characterised in that further include：Optical fiber, for even
Order color light source, three port one-way light guide units, optical fiber Fabry-Perot cavity microphone probe and photodetector, form light path；Optical fiber
Flange, for connecting probe optical fiber and light path optical fiber；The output terminal of the photodetector is also associated with preposition adjustment circuit.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110646083A (en) * | 2019-10-21 | 2020-01-03 | 安徽大学 | Optical fiber vibration sensing probe, installation method thereof and optical fiber vibration sensor |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103152685A (en) * | 2013-03-12 | 2013-06-12 | 中国电子科技集团公司第三研究所 | F-P (Fabry-Perot) interference principle-based optical fiber microphone |
| CN104019884A (en) * | 2014-06-23 | 2014-09-03 | 中国科学院电子学研究所 | Optical fiber FP cavity sonic probe |
| CN105675114A (en) * | 2016-01-08 | 2016-06-15 | 杨志强 | Optical fiber EFPI ultrasonic sensor |
| CN105758434A (en) * | 2015-10-12 | 2016-07-13 | 北京信息科技大学 | FBG reflectance spectrum sensing demodulation method based on linear array InGaAs scanning |
| CN106482760A (en) * | 2015-10-14 | 2017-03-08 | 北京信息科技大学 | A kind of system of all-metal packaged fiber grating strain transducer |
| CN106644036A (en) * | 2016-12-26 | 2017-05-10 | 华中科技大学 | Sound wave detector based on polymer thin film and dual-wavelength demodulation method |
| CN208043243U (en) * | 2018-02-27 | 2018-11-02 | 北京信息科技大学 | A kind of optical fiber Fabry-Perot cavity microphone |
-
2018
- 2018-02-27 CN CN201810160878.XA patent/CN108151876B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103152685A (en) * | 2013-03-12 | 2013-06-12 | 中国电子科技集团公司第三研究所 | F-P (Fabry-Perot) interference principle-based optical fiber microphone |
| CN104019884A (en) * | 2014-06-23 | 2014-09-03 | 中国科学院电子学研究所 | Optical fiber FP cavity sonic probe |
| CN105758434A (en) * | 2015-10-12 | 2016-07-13 | 北京信息科技大学 | FBG reflectance spectrum sensing demodulation method based on linear array InGaAs scanning |
| CN106482760A (en) * | 2015-10-14 | 2017-03-08 | 北京信息科技大学 | A kind of system of all-metal packaged fiber grating strain transducer |
| CN105675114A (en) * | 2016-01-08 | 2016-06-15 | 杨志强 | Optical fiber EFPI ultrasonic sensor |
| CN106644036A (en) * | 2016-12-26 | 2017-05-10 | 华中科技大学 | Sound wave detector based on polymer thin film and dual-wavelength demodulation method |
| CN208043243U (en) * | 2018-02-27 | 2018-11-02 | 北京信息科技大学 | A kind of optical fiber Fabry-Perot cavity microphone |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110646083A (en) * | 2019-10-21 | 2020-01-03 | 安徽大学 | Optical fiber vibration sensing probe, installation method thereof and optical fiber vibration sensor |
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