CN108138571A - Vacuum pump with longitudinal direction and annular seat component - Google Patents
Vacuum pump with longitudinal direction and annular seat component Download PDFInfo
- Publication number
- CN108138571A CN108138571A CN201680058427.4A CN201680058427A CN108138571A CN 108138571 A CN108138571 A CN 108138571A CN 201680058427 A CN201680058427 A CN 201680058427A CN 108138571 A CN108138571 A CN 108138571A
- Authority
- CN
- China
- Prior art keywords
- annular seat
- vacuum pump
- component
- seat component
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/10—Outer members for co-operation with rotary pistons; Casings
- F01C21/104—Stators; Members defining the outer boundaries of the working chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C19/00—Sealing arrangements in rotary-piston machines or engines
- F01C19/005—Structure and composition of sealing elements such as sealing strips, sealing rings and the like; Coating of these elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/10—Outer members for co-operation with rotary pistons; Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
Abstract
The present invention relates to a kind of multistage vacuum pump, the multistage vacuum pump includes：First and second half-shell stator components（102、104）, limit multiple pumping chambers（106‑116）And for along corresponding longitudinally extending seal face（118、120）It fits together；First and second end stator components（122、124）, it is used to be assembled in the corresponding longitudinal terminal surfaces of the first and second half-shell stator components（126、128）Place；Transverse seals（12）, it is used for when being assembled together, is sealed between the first and second half-shell stator components；And lip ring（146）, it is used to when assembled, be sealed between the first and second end stator components and the first and second half-shell stator components；Annular seat component and longitudinal sealing element form planar sealed interface in-between.
Description
Technical field
The present invention relates to a kind of vacuum pump, particularly multistage vacuum pump, including for the stator component of vacuum pump it
Between the improved sealing arrangement that is sealed, and be related to the rotor of such vacuum pump.
Background technology
Vacuum pump can be by such as lobe pump（roots pump）Or claw type pump（claw pump）There are one or more strings
The positive displacement pump for joining the pump stage of connection is formed.Multistage pump is satisfactory, because compared with multiple single-stage pumps of series connection, it is more
Grade pump is related to lower manufacture cost and built-up time.
The applicant has had submitted the earlier patent application number for the sealing arrangement for covering vacuum pump（Publication number WO2012/
127198 and GB2508405）, the content of the published application is incorporated herein by reference.As earlier application, such as
Shown in embodiment described herein this application involves a kind of multistage vacuum pump, the multistage vacuum pump is included in this
Clamshell style is referred to as in field（clam shell）The structure of stator arrangement.The stator arrangement of this type is determined including two half-shells
Subassembly, the longitudinally extending seal face that described two half-shell stator components are interconnected along two Duis is sealed, so as to close
Multiple pumping chambers.Pumping chamber is from high-vacuum chamber to low vacuum chamber along the axial dimension of vacuum pump by cloth adjacent to each other
It puts.
Stator component is held at the often end of half-shell stator component.It is fixed that the axial end of one or more drive shaft extends to end
In subassembly, and by bearings, usually also to be rotated by means of motor and by means of gear mechanism.Hold stator component
It is sealed at the end sealing surface being interconnected with assembled half-shell stator component.
The sealing arrangement as disclosed in the earlier application of the applicant includes two longitudinal directions or axially extending containment member,
For being sealed between each pair of longitudinally extending seal face being interconnected.Sealing arrangement further includes two annular seat components,
Described two annular seat components extend around one or more axis of the pump, around the pumping chamber, and each pair of
It is sealed between the end face being interconnected.
Each annular seat component forms two sealed interfaces with longitudinal sealing element at the often end of longitudinal sealing element.
Therefore in total there are four sealed interfaces, and the sealed interface at the often end of stator is each other approx relatively diametrically.Make
In, the inside of the vacuum pump is maintained in the pressure less than environmental pressure, this generates pressure differential.The pressure differential causes
Gas is flow at sealed interface in vacuum pump.It is desirable that the gas is inhibited to flow.
Known alternative sealing arrangement is disclosed in US2002155014, the document provides single type containment member,
The containment member includes two longitudinal components and two annular sections.However, the containment member is in place generally for cooperation
For be sufficiently complex, and manufacture of high cost.
Invention content
The present invention provides a kind of multistage vacuum pump, and the multistage vacuum pump includes：First and second half-shell stator components,
The first and second half-shells stator component limits multiple pumping chambers, and the first and second half-shells stator component is used for
It is fitted together along the longitudinally extending seal face being interconnected in pairs accordingly；First and second end stator components, described
One and second end stator component be used for be assembled in end stator component and the first and second half-shell stator components it is corresponding into
To at the end sealing surface that is interconnected；Longitudinal sealing element, the longitudinal sealing element are used in each pair of longitudinal direction being interconnected
It is sealed between extension sealing surface；And annular seat component, the annular seat component are used to be interconnected each pair of
It is sealed between the sealing surface of end；Wherein, the sealing between the annular seat component and the longitudinal sealing element connects
Mouth is planar.
Other preferred and/or optional features of the present invention limit in the following claims.
Description of the drawings
In order to be well understood that the present invention, some implementations of the present invention are more fully described now with reference to attached drawing
Example, in the accompanying drawings：
Fig. 1 generally illustrates the component of clamshell style stator；
Fig. 2 shows across the section of the clamshell style stator according to an embodiment of the invention with sealing arrangement；
Fig. 2 a show the enlarged view of the sealing arrangement in Fig. 2；
Fig. 3 shows modified sealing arrangement；And
Fig. 4 shows other modified sealing arrangement.
Specific embodiment
With reference to Fig. 1, the stator of multistage vacuum pump is illustrated in greater detail.The view shown in Fig. 1 is for this specification
It is common for prior art vacuum pump and the embodiment of the present invention discussed in preface part.Vacuum pump include in order to
Simplified and not shown in FIG. 1 rotor mechanism, but it may include such as Roots mechanism（roots mechanism）Or claw type machine
Structure（claw mechanism）.The stator 100 of pump include the first and second half-shell stator components 102,104, first and second
Half-shell stator component 102,104 limits multiple pumping chambers 106,108,110,112,114,116 jointly.It is each in half-shell
Face is longitudinally extended with first and second, when half-shell is engaged in together, first and second are longitudinally extended face and another half-shell
Corresponding be longitudinally extended face and be interconnected.Only it is visible in the accompanying drawings to be longitudinally extended face 118,120 by two of half-shell 102.In group
During dress, two half-shells edges is made to be stitched together by the generally radial direction shown in arrow R.
Stator 100 further includes the first and second end stator components 122,124.When half-shell has been engaged in together, the
One and second end component along by shown in arrow L generally axially or longitudinal direction is fitted to the corresponding end of the half-shell being combined
Face 126,128.The inner face 130,132 of end pieces is interconnected with the corresponding end-faces 126,128 of half-shell.
Being each formed between the transverse wall 134 of half-shell in pumping chamber 106-116.It can be only seen in Fig. 1
The transverse wall of half-shell 102.When half-shell is assembled, transverse wall provides axis between a pumping chamber and adjacent pumping chamber
It is provided to separation or between end pumping chamber 106,116 and end stator component axially spaced.This example is shown for Roots
There are two the axis being longitudinally extended for the typical stator arrangement of pump or claw type pump, the lobe pump or claw type pump tool（It is not shown）, when
When half-shell is engaged in together, the axis is positioned in the aperture 136 being formed in transverse wall 134.Before assembly, rotor
（It is not shown）Axis is cooperated to, so that there are two rotors for positioning in each pumping chamber.Although in the attached drawing simplified not at this
Show, but end pieces each have axis extension by two apertures.Axis by bearings in end pieces, and by motor and
Gear mechanism drives.
Multistage vacuum pump in the indoor pressure of pump chamber less than air and to be possible to down to 10-3The condition of Mbar is come
Operation.Therefore, there will be pressure differentials between air and pump inside.Therefore, at the engaging portion between stator component, it is necessary to anti-
Only ambient gas is leaked into pump, and the engaging portion is formed between the lengthwise extending surface 118,120 of half-shell and is formed in
Between the end face 126,128 of half-shell and the inner surface 130,132 of end pieces.Come between half-shell usually using adhesive and
It is sealed between half-shell and end pieces, but adhesive is particularly susceptible to the damage of corrosive gas being pumped up, and
Consistently apply adhesive to be difficult and time-consuming.It can also hinder to dismantle and safeguard.
Fig. 2 shows the plan view of half-shell 102 and through the section that end pieces 122,124 intercept.Two longitudinal sealing structures
Part 10 is located in channel 12, and channel 12 is formed in the face of being longitudinally extended 118,120.Assembling and extruding between half case member
Period, during channel 12 positions longitudinal sealing element in correct position.Channel may be disposed in half case member of only one or
Person is in two and half case members.Alternatively, if being longitudinally extended for being interconnected is each pair of including at least one channel in face,
Then a channel may be provided in one and half case members, and another channel may be provided in the second half case members.
Channel 12 sinks to the depth of the depth less than longitudinal sealing element in the face that is longitudinally extended 118,120 with relative mode
Degree, so that when half-shell stator component is assembled together, their crush seal components are to ensure reliably to seal.Sealing
Component is elastic, and is subjected to elastic deformation when being extruded.
As shown in Figure 2, two generally annular containment members 14 are located in the inner face 130,132 of end pieces 122,124
Corresponding generally annular channel 16 in.During assembling and extruding between end stator component and half-shell stator component,
During channel 16 positions containment member in correct position.Channel can be as shown in the figure and in following Fig. 3
It is arranged in the stator component of end or containment member can be positioned in half before assembly as shown in following Fig. 4
In appropriate location in shell-type stator component.Go out as shown in Figures 2 and 3, channel 16 is in end face 130,132 with contra
Formula sinks to the depth of the depth less than containment member so that during assembly containment member be extruded it is reliable close to provide
Envelope.During extruding, annular seat component experience elastic deformation.
Longitudinal sealing element 10 prevents environmental gas from being leaked into pump along the length of the interface between half case member.Annular
Containment member prevents interface edge of the environmental gas between end pieces and half case member around one or more axis pumped
Substantially inside radial direction leakage.
In this example, there is vertical passage 12 straight line along the direction interception of one or more axis perpendicular to pump to enclose
Into or rectangle section.Section consistently extends to the other end along the length of half case member from an end face 126,128
Face.The containment member 10 being longitudinally extended has complementary consistent section, and the section is sized to close when squeezing
Ground coordinates in the channel and is completely filled with channel.The end surfaces of containment member are planar, and along perpendicular to the sealing
The plane extension of the length of component.The length of containment member cause when between half case member exist squeeze when, their end table
Face engages annular seat component and is tightly connected with being formed, so as to resist the leakage of the gas between containment member.In one example,
Longitudinal sealing element, which is squeezed into, to be protruded outward to engage annular seat component from end face.Longitudinal sealing element is by when squeezed
It is subjected to the elasticity either plastics of resilience deformation, rubber or metallic alloy（Such as it pads）It is made.
In this example, circular passage 16 is circular, and when along essentially radially in one or more axis of the pump
Come when intercepting, circular passage 16 has section that straight line surrounds or rectangle in the direction of line.Section is in the entire week of circular passage
It is consistent in range or unanimous on the whole.The diameter of channel is sized to so that ought be at two of circular passage
Circular passage is intersected or is overlapped with the end of vertical passage 12 when being assembled at position relatively diametrically.Annular seat component has
There is the construction with circular passage complementation, and it is also section that straight line surrounds or rectangle to have.The ruler of annular seat component
It is very little to be configured to be snugly fit inside in circular passage when holding and between stator component and half-shell stator component existing and squeeze
And filling channel.Lip ring has planar or generally planar ring portion, the half case member edge of ring portion direction
Axial direction is inward-facing.The ring portion is the region between the inner and outer concentric circles of containment member, and in this example from end
The end surfaces 130,132 of stator component protrude outward.Each ring containment member has two contact surfaces or the part of ring portion, when
When being extruded, two contact surfaces or part are corresponding to longitudinal sealing element at the cross-shaped portion between annular and vertical passage
End surfaces engagement, to form planar or generally planar sealed interface.
Fig. 2 is that have the stator component of containment member in place before final assembling and before crush seal component
View.The position of sealed interface is generally shown by reference numeral 18 in the accompanying drawings.Fig. 2 a are the IIa parts in Fig. 2
Enlarged view is shown by the way that stator component is stitched together come after crush seal component along by the direction shown in arrow
An illustrative sealed interface 18.As shown in Figure 2 a, squeezing leads to longitudinal sealing element 10 and annular seat component 14
It expands and fills corresponding vertical passage 12 and circular passage 16, resisted with forming reliable sealing across containment member
10th, 14 leakage.Longitudinal sealing element and/or annular expand toward each other with form sealed interface 18 with resist containment member it
Between leakage.It is another that the size of containment member and other constructions are selected such that enough power is applied to from a containment member
Containment member, to generate reliable sealing at sealed interface.In pump during use, with containment member thermal expansion and receipts
Contracting, the power change, and the arrangement ensures to run through using the reliable sealing of whole maintenance.
In our previous application, multiple technologies scheme is disclosed to be generated simultaneously in interface between the sealing members
Enough contacts are maintained, to resist the leakage of gas.Disclosed annular seat component includes O-ring, and the section of O-ring has
The curved form surrounded is received in the circular passage that the straight line in stator component is held to surround.Ensure longitudinal sealing element
End and annular seat component the curved section surrounded between tight fit be intractable, and in design earlier
In, technical solution includes being set to extend sealing surfaces by the shape of the end of longitudinal sealing element, such as provide curved enclose
Into end surfaces.It should also be noted that the problem of excessive power between containment member causes for example to twist together, and can also make
The material degradation of containment member.For example, if longitudinal sealing element is metal gasket, excessive power can be it is possible that tear rubber
Lip ring, because the contact point between containment member is small.
Therefore, in the present embodiment, the interface between containment member is planar, close at sealed interface to increase
Seal available contact surface area.Increased surface area spreads load over a greater surface area, this additionally makes gas can
Extended with the area leaked on it between the sealing members.In this example, in the planar end of longitudinal sealing element and
Planar sealed interface is formed between the planar ring portion of annular seat component.In other arrangements, ring portion can be only in sealing structure
It is planar at cross-shaped portion between part, and there can be different shapes on the rest part of their circumferential portion.It is excellent
Choosing, as shown, annular seat component have the section that surrounds of straight line at cross-shaped portion, and it is further preferred that
Have what the consistent straight line of cross-section complementary that the straight line with circular passage 16 surrounds surrounded in the entire circumferential portion of containment member
Section.
Between stator component exist squeeze during or during thermal expansion, when longitudinal sealing element along its length
During extension, there is the reaction force generated by annular seat component on longitudinal sealing element.The reaction force can cause to indulge
It twists together to containment member along its length and damages reliable sealing.Fig. 3 shows similar through repairing to the view shown in Fig. 2 a
The sealing arrangement changed, wherein longitudinal sealing element are supported in their end portion.In the modified arrangement in addition
Three sealed interfaces can have similar construction.
In figure 3, vertical passage 22 is formed in at least one vertical of each pair of opposite face of half-shell stator component 102,104
Into extended surface 118,120.Channel 22 includes sinking to two parallel longitudinal direction channel parts in face 120 with relative mode longitudinally in each
Divide 24, separated by Central District 26, Central District 26 and the rest part in the face are coplanar.28 connection position of end part of channel
Two channels at the often end of pump, and a pair of shoulder 30 outwardly is provided.
The shape of longitudinal sealing element 32 be configured to it is corresponding with the shape of channel 22 and including a pair of of longitudinal component 34, with
Just the either side in area 26 is located in channel part 24.Part 34 is connected by end part 36.End point includes a pair of outside
The shoulder 38 of direction.During squeezing with thermal expansion, the shoulder 30 of channel serves as retainer, and the shoulder 38 of containment member is pressed against shoulder
Portion 30 is to resist movement of the end far from annular seat component of longitudinal sealing element.Containment member is maintained to the resistance of movement
Pressure between planar sealing surfaces 40,42 at interface 18 and the reliability for improving sealing.Similarly, area 26 has end
Wall 44, center portion 46 abut against end wall 44 to resist movement of the end far from annular seat component of longitudinal sealing element,
So as to improve the reliability of sealing.
In figure 3, annular seat component 14 is received in the circular passage 16 in the stator component 122 of end.Channel will be close
It seals component and is positioned relative to longitudinal sealing element in place, and during extruding, annular seat component is from channel protrusion to engage
The end surfaces of longitudinal sealing element are to form sealed interface 18.In the different configuration being shown in FIG. 4, at least one end stator
Circular passage is omitted, and connect together as half-shell stator component is substituted in component and preferably two end stator components
Receive annular seat component.
Fig. 4 is the view similar to the view shown in Fig. 3, shows a sealed interface 18.The arrangement other
Three sealed interfaces can have similar construction.In more detail, the part of end stator component 122 is shown, including end face
130, end face 130 is used to be interconnected with the end face 128 of half assembled case member 102,104.End face 130 be it is planar,
And the circular passage 16 shown in Fig. 2 and Fig. 3 is omitted.It is received during assembly alternatively, vertical passage 22 is arranged to
Annular seat component.The end part 28 of vertical passage forms the ring in the end face that half assembled case member is sunk to relative mode
The part of shape channel（It is formed by two semi-circular channels in each half case member）.The profile of circular passage is straight line
It is surrounding or rectangle, and its shape is set to and the complementation of the shape of annular seat component 14.In this way, circular passage
It is similar in the function and structure to channel 16, and be arranged to receive annular seat component 14.In one example, such as institute in Fig. 4
It shows, compared with Fig. 3,36 size of central attaching part of longitudinal sealing element 32 reduces, and ring is accommodated to provide space
Shape containment member.In addition to the above modifications, Fig. 4 embodiments are similar to Fig. 3 embodiments.
Claims (8)
1. a kind of multistage vacuum pump, including：
First and second half-shell stator components, the first and second half-shells stator component limit multiple pumping chambers, institute
The first and second half-shell stator components are stated for being assembled in one along the longitudinally extending seal face being interconnected in pairs accordingly
It rises；
First and second end stator components, first and second end stator component for be assembled in the end stator component and
At the corresponding end sealing surface being interconnected in pairs of the first and second half-shells stator component；
Longitudinal sealing element, the longitudinal sealing element are close for being carried out between each pair of longitudinally extending seal face being interconnected
Envelope；And
Annular seat component, the annular seat component are used to be sealed between each pair of end sealing surface being interconnected；
Wherein, the sealed interface between the annular seat component and the longitudinal sealing element is planar.
2. multistage vacuum pump according to claim 1, wherein, the annular seat component has corresponding generally planar
Sealing surface portion, for being sealed against the end sealing surfaces of the generally planar of the longitudinal sealing element.
3. multistage vacuum pump according to claim 1 or 2, wherein, the sealing surface portion of the generally planar is cut
Profile in face is that straight line surrounds.
4. multistage vacuum pump according to claim 3, wherein, the profile in the section of the annular seat component is described
It is that straight line surrounds in the entire circumferential portion of annular seat component.
5. multistage vacuum pump according to any one of the preceding claims, wherein, the end stator component each includes
Circular passage in its end sealing surface, for receiving one of described annular seat component.
6. multistage vacuum pump according to any one of the preceding claims, wherein, assembled half-shell stator component
Include circular passage at each end sealing surface, for receiving one of described annular seat component.
7. multistage vacuum pump according to claim 5 or 6, wherein, the shape and size of the circular passage be set to
The annular seat component is complementary.
8. multistage vacuum pump according to any one of the preceding claims, the profile of the circular passage is in the annular
It is surrounded in a uniform matter by straight line in the entire circumferential portion of channel.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1513804.3 | 2015-08-04 | ||
| GB1513804.3A GB2540999A (en) | 2015-08-04 | 2015-08-04 | Vacuum Pump |
| PCT/GB2016/052290 WO2017021695A1 (en) | 2015-08-04 | 2016-07-27 | Vacuum pump with longitudinal and annular sealing members |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108138571A true CN108138571A (en) | 2018-06-08 |
Family
ID=54063194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680058427.4A Pending CN108138571A (en) | 2015-08-04 | 2016-07-27 | Vacuum pump with longitudinal direction and annular seat component |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20180231001A1 (en) |
| EP (1) | EP3332093A1 (en) |
| JP (1) | JP2018523776A (en) |
| KR (1) | KR20180037998A (en) |
| CN (1) | CN108138571A (en) |
| GB (1) | GB2540999A (en) |
| TW (1) | TW201712229A (en) |
| WO (1) | WO2017021695A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112654767A (en) * | 2018-07-30 | 2021-04-13 | 爱德华兹有限公司 | Seal assembly |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2561899B (en) * | 2017-04-28 | 2020-11-04 | Edwards Ltd | Vacuum pumping system |
| GB2592030B (en) * | 2020-02-12 | 2022-03-09 | Edwards Ltd | Multiple stage vacuum pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3809509A (en) * | 1970-04-14 | 1974-05-07 | Daimler Benz Ag | Rotary piston internal combustion engine, especially of trochoidal construction |
| GB2489248A (en) * | 2011-03-22 | 2012-09-26 | Edwards Ltd | Vacuum pump with stator joint seals |
| US20140065002A1 (en) * | 2012-08-31 | 2014-03-06 | Ampco Pumps Company | Positive Displacement Pump With Improved Sealing Arrangement and Related Method of Making |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5641041Y2 (en) * | 1972-09-09 | 1981-09-25 | ||
| US3981688A (en) * | 1973-07-05 | 1976-09-21 | Ford Motor Company | Coating for rotary engine rotor housings and method of making |
| FR2813104B1 (en) * | 2000-08-21 | 2002-11-29 | Cit Alcatel | SEAL FOR VACUUM PUMP |
| GB0719394D0 (en) * | 2007-10-04 | 2007-11-14 | Edwards Ltd | A multi stage clam shell vacuum pump |
| JP5385826B2 (en) * | 2010-03-10 | 2014-01-08 | 株式会社アルバック | Airtight container, vacuum pump |
| GB2512095B (en) * | 2013-03-20 | 2015-07-08 | Edwards Ltd | Pump |
-
2015
- 2015-08-04 GB GB1513804.3A patent/GB2540999A/en not_active Withdrawn
-
2016
- 2016-07-27 CN CN201680058427.4A patent/CN108138571A/en active Pending
- 2016-07-27 US US15/749,964 patent/US20180231001A1/en not_active Abandoned
- 2016-07-27 WO PCT/GB2016/052290 patent/WO2017021695A1/en active Application Filing
- 2016-07-27 EP EP16747562.3A patent/EP3332093A1/en not_active Withdrawn
- 2016-07-27 JP JP2018506159A patent/JP2018523776A/en active Pending
- 2016-07-27 KR KR1020187006154A patent/KR20180037998A/en unknown
- 2016-08-04 TW TW105124822A patent/TW201712229A/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3809509A (en) * | 1970-04-14 | 1974-05-07 | Daimler Benz Ag | Rotary piston internal combustion engine, especially of trochoidal construction |
| GB2489248A (en) * | 2011-03-22 | 2012-09-26 | Edwards Ltd | Vacuum pump with stator joint seals |
| US20140065002A1 (en) * | 2012-08-31 | 2014-03-06 | Ampco Pumps Company | Positive Displacement Pump With Improved Sealing Arrangement and Related Method of Making |
Non-Patent Citations (1)
| Title |
|---|
| 陈启松等: "《液压传动与控制手册》", 31 December 2006 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112654767A (en) * | 2018-07-30 | 2021-04-13 | 爱德华兹有限公司 | Seal assembly |
| CN112654767B (en) * | 2018-07-30 | 2022-09-20 | 爱德华兹有限公司 | Seal assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018523776A (en) | 2018-08-23 |
| KR20180037998A (en) | 2018-04-13 |
| TW201712229A (en) | 2017-04-01 |
| WO2017021695A1 (en) | 2017-02-09 |
| US20180231001A1 (en) | 2018-08-16 |
| GB201513804D0 (en) | 2015-09-16 |
| GB2540999A (en) | 2017-02-08 |
| EP3332093A1 (en) | 2018-06-13 |
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Application publication date: 20180608 |