CN1081250A - A kind of method and device that detects surfaceness - Google Patents
A kind of method and device that detects surfaceness Download PDFInfo
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- CN1081250A CN1081250A CN 92106604 CN92106604A CN1081250A CN 1081250 A CN1081250 A CN 1081250A CN 92106604 CN92106604 CN 92106604 CN 92106604 A CN92106604 A CN 92106604A CN 1081250 A CN1081250 A CN 1081250A
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Abstract
The invention discloses a kind of method and device that detects surfaceness.This method is with Digital image processing technique one or continuous several light to be cut the bright band image to carry out rim detection, obtaining a sample length interior is the edge contour coordinate points and the roughness multiparameter of unit with the pixel, carry out the unit conversion according to calibration, can get the surfaceness multiparameter in the sample length.Making device in this way is by increasing image sensor, image scanner, the making of parts such as calculating and control device on the light-section microscope basis.The present invention has realized that light-section microscope measures automatically to the multiparameter of surfaceness.
Description
The invention belongs to the surface finish measurement field in the length metering, exactly, it is that a kind of light-section microscope that uses is realized the technology that multiparameter is measured automatically.
Principle, structure and the measuring method of light-section microscope are disclosed in " light-section microscope and interference microscope " (" light-section microscope and interference microscope " write group and write China Machine Press 1978.12) book.The great advantage of this light-section microscope is to utilize light cross-section method directly to obtain the roughness bright band image of measured surface non-contactly.Theoretically, as long as can record the each point coordinate figure of this roughness bright band image edge, and edge length reaches a sample length, just can calculate any parameter of roughness by relevant definition.But in fact, present light-section microscope is measured the problems of measurement that approach does not all have fine solution sample length inward flange point.So present light-section microscope is not suitable for providing other roughness parameters except that Rz and Ry parameter under regular service condition, can not measure automatically, this is restricted the use of light-section microscope; Particularly, limited the application of this instrument more owing to after recommending the preferential Ra of use parameter in the surfaceness new national standard (GB1031-83), make existing light-section microscope can't satisfy the new national standard requirement.
Purpose of the present invention is exactly at above-mentioned the deficiencies in the prior art, and a kind of surfaceness detection method and device that can automatically detect Ra and other all parameters (referring to involved height assessment parameters of GB1031-83 and the auxilliary assessment parameters that adds) is provided.
The present invention realizes by following mode.
A kind of method that detects surfaceness, it comprises the bright band image that obtains surfaceness with light cross-section method, and it is clearly appeared in the field of detection, it is characterized in that it is further comprising the steps of:
(1) it is capable the bright band digital imagery in the field of detection to be changed into M() * the N(row) digital image;
(2) digital image that step (1) is obtained carries out rim detection, obtains each point coordinate of boundary curve of a field of detection;
(3) if the sample length of detected boundary curve curtailment measured surface defined, then make field of detection and roughness bright band image produce relatively moving of a field width, make the next part that occurs roughness bright band image in the field of detection, turn back to step (1), carry out downwards successively, up to the sample length of the boundary curve length that detects more than or equal to regulation;
(4) the boundary curve coordinate points in the intercepting sample length, calculating with the pixel is the surfaceness multiparameter value of unit;
(5) according to the actual width and the height value of a definite pixel representative of calibration, roughness value in the step (4) is carried out the unit conversion, obtain the surfaceness multiparameter in the sample length.
A kind of roughness pick-up unit of realizing above-mentioned detection method, it comprises: a pedestal; A column, it is installed on the pedestal; A transverse arm, it is installed on the column, and can slide up and down along column; A coarse adjustment handwheel by screw thread, is connected on the column, is used to control the position of transverse arm on column; Hand is revolved in a locking, is used to lock transverse arm, and it can not be slided along column, and a microscope body links to each other with transverse arm; A trimming hand wheel is used to finely tune the position of microscope body and transverse arm; One group of coversion objective group, it is installed in the bottom of microscope body, and can require to change according to different detections; An illuminating lamp, it is installed in the lighting interface on microscope body top; An intensity control device of lighting lamp, it can be illuminating lamp regulated power supply is provided, the brightness of control illuminating lamp.
In addition, it also comprises:
(1) image sensor, it is installed on the mirror body, is used for the image conversion in the field of detection is become vision signal;
(2) image display apparatus, it can convert the vision signal that receives to corresponding image and show;
(3) image scanners, the relevant signal that it receives image sensor is used for the digital imagery of field of detection is changed into digital image;
(4) coordinate setting tables that have stepper motor, it is placed on the pedestal, and the rotation of stepper motor can drive worktable displacement;
(5) driving device for step-by-step, its rotation for stepper motor provides driving pulse;
(6) devices with control and computing function, it links to each other with image scanner and driving device for step-by-step about signal wire, both can finish control function, can finish computing function again.
Effect of the present invention is:
(1) the bright band image in the light-section microscope mirror body is shown on the external image display apparatus of mirror, be convenient to observe and the adjustment of instrument;
(2) after finishing necessary adjustment, this device can be realized automatic detection;
(3) can detect individually or simultaneously any one involved parameter of roughness standards GB1031-83 (as Ra, Ry, Rz, S, Sm, tp);
(4) can detect other roughness parameter values that roughness standards GB1031-83 does not relate to;
(5) testing result is credible, the repeatable accuracy height;
(6) the present invention has significant role to the remodeling manufacturing of light-section microscope and the transformation of existing light-section microscope.
Fig. 1 is field of detection and a roughness bright band image thereof involved in the present invention
Fig. 2 is a roughness pick-up unit synoptic diagram of the present invention
Fig. 3 is a kind of example structure vertical view of the coordinate setting table of band stepper motor.
Below in conjunction with accompanying drawing most preferred embodiment of the present invention is described in detail.
In the field of detection [1] of Fig. 1, roughness bright band image [2] is laterally to place.It is capable that image in the field of detection [1] is digitized into M() * the N(row) the bi-level digital image, it is each point coordinate of upper edge curve of unit that this bi-level digital image is carried out that rim detection can obtain with the pixel.If record the sample length of boundary curve curtailment measured surface requirement, then can allow roughness bright band image [2] and field of detection [1] produce relatively moving of a visual field width, make and occur hypomere roughness bright band image in the field of detection [1], continue to detect its each point coordinate of upper edge curve as stated above, equal or exceed desired sample length up to detected boundary curve length.The boundary curve coordinate points of intercepting in the sample length carried out data processing, and can obtain with the pixel is the multiple parameter values of rough surface elephant of unit.According to the actual width and the height value of the determined pixel representative of calibration, each parameter value of above-mentioned roughness is carried out the unit conversion, just obtain the surfaceness multiparameter in the sample length.
Fig. 2 has provided the synoptic diagram of detection device for roughness of surface of the present invention.In the present embodiment, device [27] with calculating and control function adopts computing machine, image display apparatus [23] adopts a kind of monitor, image scanner [25] uses a kind of real-time binary picture collection plate, image sensor [24] adopts a kind of electron tubes type industry gamma camera, and the measuring process of this device can be described by Fig. 2.
Before the measurement, can install to each objective lens [11] on the light-section microscope main body [12], utilize corresponding calibration sample piece that each objective lens is calibrated:, to determine the true altitude of a pixel representative with the known surface of difference in height, for example single groove model; With the enough master scale chis of effective length, for example scale value is the master scale chi of 0.01mm, determines the actual width of a pixel representative.The calibration parameter value of the actual width of a pairing pixel representative and height when obtaining like this using each objective lens.During measurement, selection and the objective lens [11] that the measured workpiece surface adapts are installed on the microscope body [12], measured workpiece [10], as a little axle of metal that is obtained by turning, lie in a horizontal plane on the worktable [9].It is necessary manual setting that the first step is operated: adjust microscope body [12] and the relative position of being with stepper motor coordinate setting table [9], make the X of worktable [9] consistent to the bright band direction of moving with on the workpiece [10]; That unclamps locking revolves hand [17], and the x, the y that adjust worktable [9] are to milscale [21], [7] and coarse adjustment handwheel [19], and making needs the roughness bright band image of detection position to appear on the screen of monitor [23], tightens locking again and revolves hand [17]; Regulate trimming hand wheel [16], and the output voltage [13] of intensity control device of lighting lamp [8], make the bright band image upper edge in the field of detection [1] clear and in sharp contrast; Selecting for use the desired sample length value in pairing calibration parameter value of objective lens and measured workpiece surface to give computing machine [27], use during in order to calculating, each step just can finish under the control of computing machine [27] automatically later on again.Second step, computing machine [27] sends the sampling instruction by signal wire [26] to real-time binary picture collection plate [25], then binary picture collection plate [25] can be digitized into the bi-level digital image to the picture information of field of detection automatically and be stored in the memory block of himself in real time, after finishing Deng sampling work, computing machine [27] sends transfer instruction by signal wire [26] to real-time binary picture collection plate [25] once more, and the bi-level digital picture information in this device [25] memory block is imported into the interior memory block of computing machine [27] successively.In the 3rd step, computing machine [27] detects the upper edge of the bi-level digital image in self memory block, detected be that the boundary curve coordinate points of unit is noted successively with the pixel.The 4th step, computing machine [27] is compared detected edge length with the surperficial desired sample length of measured piece [10]: if the former is less than the latter, then computing machine [27] sends steering order by signal wire [30] to driving device for step-by-step [3], make a certain number of driving pulse of device [3] output give stepper motor [5], make stepper motor [5] produce the rotation of certain step number, thereby drive coordinate setting table [9] drag workpiece [10] along x to producing corresponding displacement, cause roughness bright band image [2] level to move past a visual field width, a new roughness bright band image appears in the field of detection [1], afterwards, computing machine [27] returned for second step and repeats each step operation downwards; If the former is more than or equal to the latter, the operation in the 5th step below then carrying out.In the 5th step, the boundary curve coordinate points in the sample length of computing machine [27] intercepting measured workpiece [10] regulation is carried out data necessary and is handled and computing, and obtaining with the pixel is the measured surface roughness multiparameter value of unit.The 6th step, the actual width and the height value of a determined pixel representative when calibrating according to used objective lens [11], what the 5th step was obtained is that the roughness multiparameter value of unit is carried out the unit conversion with the pixel, obtain the surfaceness multiparameter of measured workpiece [10] in a sample length at last, this object information can pass through signal wire [28] printing equipment [29] printout, and also the display screen of available computers [27] shows.
Table 1 has provided the embodiment of the invention and English produces the comparing result that TALYSURF-6 type motor contourgraph detects in a sample length same measured workpiece;
Table 2 has provided embodiments of the invention carry out ten duplicate measurementss to same measured workpiece in a sample length result;
Also effect of the present invention can be described by table 1, table 2.
Table 1
The TALYSURF-6 of the present invention of project unit
Ra um 3.24 3.19
Ry um 17.5 15.8
Rz um 15.6 can not provide
Sm um 306.5 307
S um 206.3 204
Tp (midline) % 39 43
Table 2
Multiplicity unit's Ra value of the present invention
1 um 3.28
2 um 3.24
3 um 3.26
4 um 3.29
5 um 3.24
6 um 3.26
7 um 3.24
8 um 3.21
9 um 3.21
10 um 3.20
Fig. 3 has provided the structure vertical view of a kind of embodiment of band stepper motor coordinate setting table [9].This is to have increased by two support bars [31] in known light-section microscope Working table structure, two nuts [33], a support plate [32], a stepper motor [34] and a Screw [35].Planker [38] is to be fixed on y on worktable, and it can not produce x to moving.Two support bars [31] are connected on the planker [38], a support plate [32] links together with support bar [31], a kind of stepping angle is that 0.9 ° stepper motor [34] is installed on the support plate [32], and center pit and x that the output shaft of stepper motor [42] passes support plate [32] are linked together by Screw [35] to the screw mandrel [40] of screw micrometer.After stepper motor [34] receives driving pulse, its output shaft [42] can drive screw mandrel [40] and rotate, screw mandrel [40] one ends withstand on the top [39] that is connected on the planker [38], thus its can drive the screw [36] that links to each other with screw mandrel drag x to worktable [37] along x to moving.When stepper motor does not have drive current, but the also handle of hand drive screw micrometer [41] is realized x moving to worktable.When following change takes place each technical characterictic that the foregoing description relates to, can not depart from essence of the present invention:
1, in Fig. 1, it is capable that the image in the field of detection [1] is digitized into M() * N(row) the multi-grey level digital image, 8 gray levels numeral image for example, 64 gray levels numeral image, 256 gray levels numeral image or the like; Correspondingly, image scanner [25] can adopt a kind of multi-grey level image acquisition plate among Fig. 2.
2, in Fig. 2, image sensor [24] can be installed in other positions, for example, is installed in by the eyepiece lens barrel on the eyepiece interface of former light-section microscope main body;
3, the image sensor among Fig. 2 [24] can be selected CCD face battle array gamma camera for use.
Claims (2)
1, a kind of detection surfaceness method, it comprises with light cross-section method acquisition surfaceness bright band image, and it is clearly appeared in the field of detection, it is characterized in that it is further comprising the steps of:
(1) the bright band digital imagery in the field of detection is changed into the digital image of M (OK) * N (row);
(2) digital image that step (1) is obtained carries out rim detection, obtains the coordinate of the boundary curve each point of a field of detection;
(3) if detected boundary curve length, the sample length of not enough measured surface defined, then make field of detection and roughness bright band image produce relatively moving of a visual field width, make the next part that occurs roughness bright band image in the field of detection, turn back to step, according to carrying out downwards, up to the sample length of the boundary curve length that detects more than or equal to regulation;
(4) the boundary curve coordinate points in the intercepting sample length, calculating with the pixel is the surfaceness multiparameter value of unit;
(5) according to the actual width and the height value of the determined pixel representative of calibration, the roughness multiparameter value in the step (4) is carried out the unit conversion, obtain the surfaceness multiparameter value in the sample length.
2, a kind of roughness pick-up unit that uses the described method of claim 1, it comprises:
A pedestal, a column, a transverse arm, a coarse adjustment handwheel, hand is revolved in a locking, a light-section microscope main body, a trimming hand wheel, one group of coversion objective group, an illuminating lamp and an intensity control device of lighting lamp is characterized in that it also comprises:
(1) image sensor, it is installed on the light-section microscope main body, is used for the bright band image conversion in the field of detection is become vision signal;
(2) image display apparatus, it can convert the vision signal that receives to corresponding image and show;
(3) image scanners, the relevant signal that it receives image sensor is used for the digital imagery of field of detection is changed into digital image;
(4) coordinate setting tables that have stepper motor, it is placed on the pedestal, and the rotation of stepper motor can drive the displacement of worktable;
(5) driving device for step-by-step, its rotation for stepper motor provides driving pulse;
(6) devices with control and computing function, it links to each other with image scanner and driving device for step-by-step about signal wire, both can finish control function, can finish computing function again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92106604A CN1037125C (en) | 1992-07-10 | 1992-07-10 | Method and apparatus for detecting surface roughness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92106604A CN1037125C (en) | 1992-07-10 | 1992-07-10 | Method and apparatus for detecting surface roughness |
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| CN1081250A true CN1081250A (en) | 1994-01-26 |
| CN1037125C CN1037125C (en) | 1998-01-21 |
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| CN92106604A Expired - Fee Related CN1037125C (en) | 1992-07-10 | 1992-07-10 | Method and apparatus for detecting surface roughness |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798343A (en) * | 2012-08-14 | 2012-11-28 | 胡海明 | Wrinkle detector for turned edge |
| CN102967279A (en) * | 2012-11-22 | 2013-03-13 | 南京理工大学 | Method for accurately determining surface roughness through adopting amorphous alloy |
| CN104019752A (en) * | 2014-05-29 | 2014-09-03 | 京东方科技集团股份有限公司 | Thickness uniformity detection method, apparatus and system of display screen |
| CN104697476A (en) * | 2015-03-19 | 2015-06-10 | 北京时代之峰科技有限公司 | Automatic detection method and device for roughness light-incision profile curve |
| CN104851336A (en) * | 2015-05-27 | 2015-08-19 | 梧州学院 | Portable surface roughness observation teaching apparatus |
| CN108827146A (en) * | 2018-06-14 | 2018-11-16 | 苏州富莱智能科技有限公司 | TWAIN standard micrometering system and measurement method |
| CN109506598A (en) * | 2018-11-19 | 2019-03-22 | 信利光电股份有限公司 | A kind of plate testing flatness method and device |
| CN110779474A (en) * | 2019-10-16 | 2020-02-11 | 徐州市铜山区嘉量计量检测创新中心 | Workpiece abrasion detection multipoint control positioning closed type light beam detection equipment |
| CN111562219A (en) * | 2020-05-22 | 2020-08-21 | 哈尔滨理工大学 | Light cutting microscope for measuring microscopic appearance of surface of steel plate |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100394162C (en) * | 2003-01-23 | 2008-06-11 | 友达光电股份有限公司 | Method for analyzing roughness on surface of film |
| CN100427880C (en) * | 2006-10-16 | 2008-10-22 | 中国科学院上海光学精密机械研究所 | Real-time detection device and method for roughness of optical glass |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4665739A (en) * | 1984-04-10 | 1987-05-19 | Mitutoyo Mfg. Co., Ltd | Surface roughness measuring instrument |
| WO1989003510A1 (en) * | 1987-10-09 | 1989-04-20 | Hitachi, Ltd. | Analyzer |
-
1992
- 1992-07-10 CN CN92106604A patent/CN1037125C/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102798343B (en) * | 2012-08-14 | 2014-12-24 | 胡海明 | Wrinkle detector for turned edge |
| CN102798343A (en) * | 2012-08-14 | 2012-11-28 | 胡海明 | Wrinkle detector for turned edge |
| CN102967279A (en) * | 2012-11-22 | 2013-03-13 | 南京理工大学 | Method for accurately determining surface roughness through adopting amorphous alloy |
| CN104019752B (en) * | 2014-05-29 | 2015-11-25 | 京东方科技集团股份有限公司 | The thickness evenness detection method of display screen, Apparatus and system |
| CN104019752A (en) * | 2014-05-29 | 2014-09-03 | 京东方科技集团股份有限公司 | Thickness uniformity detection method, apparatus and system of display screen |
| WO2015180367A1 (en) * | 2014-05-29 | 2015-12-03 | 京东方科技集团股份有限公司 | Thickness uniformity detection method, apparatus and system for display screen |
| US9812068B2 (en) | 2014-05-29 | 2017-11-07 | Boe Technology Group Co., Ltd. | Method, device and system of detecting uniformity of thickness of a display screen |
| CN104697476A (en) * | 2015-03-19 | 2015-06-10 | 北京时代之峰科技有限公司 | Automatic detection method and device for roughness light-incision profile curve |
| CN104697476B (en) * | 2015-03-19 | 2017-06-06 | 北京时代之峰科技有限公司 | Roughness light cuts the automatic testing method and device of contour curve |
| CN104851336A (en) * | 2015-05-27 | 2015-08-19 | 梧州学院 | Portable surface roughness observation teaching apparatus |
| CN108827146A (en) * | 2018-06-14 | 2018-11-16 | 苏州富莱智能科技有限公司 | TWAIN standard micrometering system and measurement method |
| CN109506598A (en) * | 2018-11-19 | 2019-03-22 | 信利光电股份有限公司 | A kind of plate testing flatness method and device |
| CN110779474A (en) * | 2019-10-16 | 2020-02-11 | 徐州市铜山区嘉量计量检测创新中心 | Workpiece abrasion detection multipoint control positioning closed type light beam detection equipment |
| CN111562219A (en) * | 2020-05-22 | 2020-08-21 | 哈尔滨理工大学 | Light cutting microscope for measuring microscopic appearance of surface of steel plate |
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| Publication number | Publication date |
|---|---|
| CN1037125C (en) | 1998-01-21 |
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