CN108120393A - Three-dimensional shape measurement method adopting multi-light-field modulation - Google Patents
Three-dimensional shape measurement method adopting multi-light-field modulation Download PDFInfo
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- CN108120393A CN108120393A CN201711370231.1A CN201711370231A CN108120393A CN 108120393 A CN108120393 A CN 108120393A CN 201711370231 A CN201711370231 A CN 201711370231A CN 108120393 A CN108120393 A CN 108120393A
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- 238000000691 measurement method Methods 0.000 title description 2
- 238000000034 method Methods 0.000 claims abstract description 33
- 238000005259 measurement Methods 0.000 claims abstract description 22
- 230000003287 optical effect Effects 0.000 claims description 17
- 238000001228 spectrum Methods 0.000 claims description 8
- 230000001427 coherent effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000001093 holography Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000012876 topography Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention discloses a multi-light-field modulated three-dimensional shape measuring method, wherein a diffracted light field of a three-dimensional object to be measured and a reference light field are interfered to form original holographic fringes, two modulated light beams are interfered to form interference fringes, the original holographic fringes and the modulated light interference fringes are collected by a photoelectric detector after being subjected to incoherent superposition, the original holographic fringes are demodulated from a collected fringe image through a demodulation algorithm, the shape of the three-dimensional object to be measured is recovered through a digital holographic reconstruction algorithm, and the measurement of the three-dimensional shape is realized. According to the invention, the high-frequency information of the original holographic fringes is modulated into low-frequency information which can be collected by a detector through the introduction of a modulation light field, and then the original high-frequency information is demodulated through an algorithm, so that the resolution of three-dimensional morphology measurement can be improved under the condition of using a detector with the same resolution.
Description
Technical field
The present invention relates to microscopic three-dimensional topography measurement fields, are specially a kind of measuring three-dimensional morphology side of more light field modulation
Method.
Background technology
With the promotion of application demand, it is desirable that micro-nano device have bigger information capacity, promote micro-nano device by two dimension,
Micron order develops to three-dimensional, nanoscale, also just proposes active demand to nanoscale three-dimensional structure detection technology.In numerous measurements
In method, optical measurement due to it with non-contact, non-demolition, measuring speed is high, system structure is simple, environmental suitability is strong etc.
Advantage, application are very extensive.Typical optical measurement means include laser confocal scanning, ellipsometer, wide spectrum micro-interference
Technology, micro- visual test technology, Digital Holography etc..Wherein Digital Holography can not use additional optical imagery system
It unites, the interference fringe directly formed by recording the diffraction light wave after testee reflects or transmits with reference optical superposition,
Then testee structural information can be obtained by calculating processing.Since this method is directly by the phase of Object light wave and is shaken
Width information measures, and drastically reduces the introducing of extraneous error, improves the accuracy of measurement, can be more anti-
Reflect the structural information of measurand.Simultaneously as need not be imaged to measured object, sample is added in optical path and will not reduced
The interference fringe clarity gathered can adapt to reflection and transmission-type measurement, to the good compatibility of measured object.It is in addition, digital
The light path that holography is interfered using face possesses the advantages of whole audience detection, longitudinal resolution is high.It is measured just because of digital hologram
Technology possesses these distinctive advantages, is used widely in the three-dimensional structure measurement of all kinds of micro-nano devices, becomes three-dimensional micro-
Receive one of research hotspot of fields of measurement.
But state of the art is constrained to, the resolution ratio and size of photodetector are all difficult to reach the tradition note such as film
Recording medium is horizontal, it is impossible to make full use of holographic measurement intrinsic gauging precision, cause the lateral resolution that digital hologram measures limited.
Therefore, how to improve the lateral resolution of digital hologram measurement is one of problem to be solved.
The content of the invention
In the case of being remained unchanged in the resolution ratio of photodetector and size, pass through more light field tune
Method processed improves the lateral resolution of digital hologram three-dimensional measurement.
In order to realize the purpose, a kind of 3 D measuring method of more light field modulation of present invention proposition, described three
The diffractive light field of three-dimensional body to be measured with reference to optical interference with forming original hologram fringe, the modulation of two beams in dimension topography measurement method
By photodetector after beam interference formation interference fringe, original hologram fringe and modulation interference of light striped generation non-coherent addition
Acquisition, demodulates original hologram fringe by demodulating algorithm from the stripe pattern collected, then is rebuild by digital hologram
Algorithm recovers three-dimensional body pattern to be measured, realizes the measurement to three-dimensional appearance；The modulation light field of use is by original hologram fringe
High-frequency information be modulated to can by detector gather low-frequency information, original high-frequency information is then demodulated by algorithm,
Use the resolution ratio that measuring three-dimensional morphology is improved in the case of equal resolution detector.
Wherein, three-dimensional body to be measured includes the object of transparent substance and surface reflection.
Wherein, the diffractive light field of determinand is that collimated laser beam is transmitted or reflected to form through determinand.
Wherein, it is spherical wave or plane wave light field with reference to light field, and it is identical with the diffractive light field wavelength of determinand.
Wherein, two beams modulation light beam wavelength is identical, but different from reference light wavelength.
Wherein, the phase of the interference fringe of two beams modulation beam interference formation, cycle, direction can pass through change two respectively
Optical path difference, relative angle and the rotation angle of beam modulation light beam are adjusted, to generate different modulation optical interference stripeds.
Wherein, the demodulating algorithm calculates the spectrum distribution that photodetector obtains image first, then passes through frequency
Spectrum separation, displacement can demodulate original hologram picture with overlap-add procedure.
Wherein, the digital hologram algorithm for reconstructing can be the common weights such as Fresnel transform method, convolution method and angular spectrum method
Construction method.
Beneficial effects of the present invention are：
The high-frequency information of original hologram fringe is modulated to be gathered by detector low by the present invention using modulation light field
Then frequency information demodulates original high-frequency information by algorithm, three can be improved in the case that using equal resolution detector
Tie up the resolution ratio of topography measurement.
Description of the drawings
Fig. 1 is the 3 D measuring method schematic diagram of more light fields modulation；
Fig. 2 is modulation light field light channel structure figure；
Fig. 3 is hologram fringe modulated process schematic diagram；
Fig. 4 is demodulating algorithm flow diagram；
Reference numeral meaning is in figure：1 is three-dimensional body to be measured, and 2 be reference point source, and 3 modulate light beam for the first beam, 4
Light beam is modulated for the second beam, 5 be photodetector；6 be laser, and 7 be Amici prism, and 8 be speculum.
Specific embodiment
The present invention is described in further details in the following with reference to the drawings and specific embodiments.
As shown in Figure 1, a kind of 3 D measuring method of more light fields modulation, the diffractive light field of three-dimensional body 1 to be measured with
The optical interference of reference point source 2 forms original hologram fringe, and two beams modulation light beam i.e. first modulates light beam 3 and second and modulates light
Beam 4, which is interfered, forms interference fringe, by photodetector 5 after original hologram fringe and modulation interference of light striped generation non-coherent addition
Acquisition, demodulates original hologram fringe by demodulating algorithm from the stripe pattern collected, then is rebuild by digital hologram
Algorithm recovers three-dimensional body pattern to be measured, realizes the measurement to three-dimensional appearance.
The diffractive light field of three-dimensional body is that the laser beam irradiation body surface after beam-expanding collimation reflects to form.Reference light
Field is spherical wave, by focusing objective len to being obtained again by pin hole after laser beam focusing.Illuminate the light source and reference light of object
The light source that field uses is identical, is the laser of wavelength 632.8nm.It modulates the light source that light beam uses and is different from object illumination light, ripple
Long selected as 532nm, in measurement process, phase shift, rotation and mechanical periodicity need to be carried out by modulating the stripe pattern of light field.
As shown in Fig. 2, two modulation light beams, using same light source (532nm), the light beam that laser 6 is sent is after beam-expanding collimation
Divided by Amici prism 7 for two-way, pass through the speculum 8 adjusted in two light paths so that two light paths have certain optical path difference, so as to
5 test surface of photodetector generates interference fringe.In measurement, by adjust speculum 8 change Amici prism 7 after equivalent optical path
Difference can realize modulation light field striped phase shift, and changing inclination angle can be changed with performance period, and rotation is carried out in space can be real
Field orientation rotation is now modulated, so as to meet the measurement demand of complex figure.
The optical field distribution for modulating light field is calculated according to I (x)=2I ' { 1+cos [k △ (x)] }, wherein △ (x)=d+xtan
θ, I ' are modulation light beam single beam field distribution, and k=2 π/λ are wave number, and d is poor for two modulation road equivalent optical paths, and θ is opposite for two light beams
Angle, x are position.I '=0.5 in the present embodiment, d=0, θ=3.8 °, then it is 8 μm to modulate light field fringe period, initial phase
Position is 0.
As shown in figure 3, photodetector directly gather be original hologram fringe high-frequency information and modulation Optical Field Superposition
Image afterwards.Original hologram fringe is to be formed by object diffraction light with referring to the interference of light, carries the topographical information of measured object, but
The technical merit of existing detector is constrained to, high-frequency information cannot be directly obtained by detector.The present invention is using modulation
Light field carries out Modulation and Amplitude Modulation to original hologram fringe, and the high-frequency information of original hologram fringe image is modulated to low-frequency information, energy
It is enough directly to be gathered by detector.In order to meet the measurement demand of different three-dimensional appearances, figure phase, cycle and the side of light field are modulated
To need to be converted.
In the present embodiment, the original hologram fringe cycle is 6 μm, and modulation light field fringe period is 8 μm, then modulated light
Field distribution fringe period is according to calculatingFor 24 μm, original hologram fringe is exaggerated.
As shown in figure 4, it is to the striated pattern progress frequency-domain demodulation process collected, it is necessary first to by three parts information
IGL (f), IGH (f) that zero-frequency misplaces then are moved back to correct position, then the three parts information in correct position are folded by separation
Add, to extend frequency domain information, obtain super-resolution testing result.That implements concretely comprises the following steps：
First, two-beam interference striped is controlled to change Modulation and Amplitude Modulation initial phase, establishes multiple equations, can therefrom demodulate not
The corresponding light distribution of same frequency ingredient.
Then, by the translation feature of Fourier transformation, information displacement is completed in spatial domain.
IGL(f-f0)=F [ILg(x)exp(j2πf0x)]
ILg(x) it is the corresponding spatial information (si)s of IGL (f).To ensure to recover the accuracy of signal, it is necessary to accurately determine translation
Distance and direction.
Finally, the three parts information after separation is overlapped by certain weight, you can realize to pending signal
Demodulation.The definite of weight will influence the light distribution of image, and influence to recover precision.This project will according to hologram image characteristic,
It determines weight distribution, ensures that three-dimensional micro-nano structure recovers precision.
At this point, the image distribution obtained only realizes the frequency expansion on modulation light amplitude direction modulation period.However,
The architectural characteristic of micro-nano structure complexity is considered, it is necessary to ensure that different horizontal directions all have identical measurement resolution.Therefore, also
It needs, by changing modulation light field cycle, direction, to realize the signal frequency modulation of different directions.
It after original hologram picture is demodulated, reapplies existing digital hologram and reappears algorithm, such as fourier transform method, volume
Area method and angular spectrum method etc. carry out three-dimensional structure reconstruction.
The above is only the specific embodiment in the present invention, but protection scope of the present invention is not limited thereto, and is appointed
What be familiar with the people of the technology disclosed herein technical scope in, it will be appreciated that the conversion or replacement expected should all be covered
In the scope of the present invention.
Claims (8)
1. a kind of 3 D measuring method of more light field modulation, it is characterised in that：It is treated in the 3 D measuring method
The diffractive light field of three-dimensional body is surveyed with forming original hologram fringe with reference to optical interference, two beams modulation beam interference forms interference item
Line, original hologram fringe pass through demodulating algorithm with being gathered after modulation interference of light striped generation non-coherent addition by photodetector
Original hologram fringe is demodulated from the stripe pattern collected, then three-dimensional to be measured is recovered by digital hologram algorithm for reconstructing
Object appearance realizes the measurement to three-dimensional appearance；The high-frequency information of original hologram fringe is modulated to energy by the modulation light field of use
Enough low-frequency informations gathered by detector, then demodulate original high-frequency information by algorithm, are detected using equal resolution
The resolution ratio of measuring three-dimensional morphology is improved in the case of device.
2. a kind of 3 D measuring method of more light field modulation according to claim 1, it is characterised in that：Three-dimensional to be measured
Object includes the object of transparent substance and surface reflection.
3. a kind of 3 D measuring method of more light field modulation according to claim 1, it is characterised in that：Determinand
Diffractive light field is that collimated laser beam is transmitted or reflected to form through determinand.
4. a kind of 3 D measuring method of more light field modulation according to claim 1, it is characterised in that：With reference to light field
For spherical wave or plane wave light field, and it is identical with the diffractive light field wavelength of determinand.
5. a kind of 3 D measuring method of more light field modulation according to claim 1, it is characterised in that：Two beams are modulated
Light beam wavelength is identical, but different from reference light wavelength.
6. a kind of 3 D measuring method of more light field modulation according to claim 1, it is characterised in that：Two beams are modulated
The phase for the interference fringe that beam interference is formed, cycle, direction can pass through optical path difference, the phase of change two beams modulation light beam respectively
Angle and rotation angle are adjusted, to generate different modulation optical interference stripeds.
7. a kind of 3 D measuring method of more light field modulation according to claim 1, it is characterised in that：The solution
Algorithm is adjusted to calculate the spectrum distribution that photodetector obtains image first, is then separated, shifted and overlap-add procedure by frequency spectrum
Original hologram picture can be demodulated.
8. a kind of 3 D measuring method of more light field modulation according to claim 1, it is characterised in that：The number
Word holographic reconstruction algorithm can be the common method for reconstructing such as Fresnel transform method, convolution method and angular spectrum method.
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| CN110057743A (en) * | 2019-05-06 | 2019-07-26 | 西安交通大学 | The label-free cell three-dimensional Morphology observation method of blood film based on optic virtual dyeing |
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