CN108106639A - 一种柔性传感器及其制备方法 - Google Patents

一种柔性传感器及其制备方法 Download PDF

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CN108106639A
CN108106639A CN201711297014.4A CN201711297014A CN108106639A CN 108106639 A CN108106639 A CN 108106639A CN 201711297014 A CN201711297014 A CN 201711297014A CN 108106639 A CN108106639 A CN 108106639A
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conductive layer
layer
conductive
rubber
tube
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张由婷
胡海峰
张明
曾亭
马伟杰
许占齐
朱顺成
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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Hefei Xinsheng Optoelectronics Technology Co Ltd
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Priority to US15/976,552 priority patent/US10889088B2/en
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Abstract

本发明提供了一种柔性传感器及其制备方法，用以通过柔性可塑的橡皮作为基底层，避免了现有的柔性传感器中基底的制备材料的局限性，提升了柔性传感器的弯曲程度以及拉伸程度。所述该传感器包括：由柔性可塑的橡皮形成的基底层、位于所述基底层上的导电层、位于所述导电层上的导电触点和钝化层以及通过所述导电触点与所述导电层相连的用于传导感应信号的导线。

Description

一种柔性传感器及其制备方法
技术领域
本发明涉及传感器技术领域，尤其涉及一种柔性传感器及其制备方法。
背景技术
近年来，电子产品柔性化已成为主流趋势，如何开发出具备良好柔性和延展性的传感器已成为重要的研究课题。
目前业内制造柔性传感器一般通过聚氨酯海绵或纤维素纸来制造基底层，再通过金属氧化物或金属纳米线等导电材料制造导电层，然而，用聚氨酯海绵或纤维素纸制造的基底层存在着拉伸效果不好的问题，限制了基底层的应用范围。
综上所述，目前业内制造柔性传感器的基底层存在着拉伸效果不好的问题。
发明内容
本发明实施例提供了一种柔性传感器及其制备方法，用以通过柔性可塑的橡皮作为基底层，避免了现有的柔性传感器中基底的制备材料的局限性，提升了柔性传感器的弯曲程度以及拉伸程度。
本发明实施例提供的一种柔性传感器，包括：由柔性可塑的橡皮形成的基底层、位于所述基底层上的导电层、位于所述导电层上的导电触点和钝化层以及通过所述导电触点与所述导电层相连的用于传导感应电流的导线。
较佳地，所述柔性可塑的橡皮包括无聚氯乙烯或橡胶或热塑性橡胶。
较佳地，所述导电层的制备材料包括多壁碳纳米管。
本发明实施例提供的一种柔性传感器的制备方法，该方法包括：
对柔性可塑的橡皮进行拉伸处理，形成基底层；
在所述基底层上沉积导电材料，形成导电层；
在所述导电层上形成导电触点和钝化层；
连接用于传导感应电流的导线和所述导电触点。
较佳地，所述柔性可塑的橡皮为由无聚氯乙烯或橡胶或热塑性橡胶制备的。
较佳地，所述导电材料包括多壁碳纳米管颗粒。
较佳地，在所述基底层上沉积导电材料，形成导电层，包括：
在所述基底层上沉积所述多壁碳纳米管颗粒；
对沉积的所述多壁碳纳米管颗粒进行压延处理，形成第一导电层；
对所述第一导电层进行压制处理，直到所述第一导电层的厚度达到预设厚度阈值，形成第二导电层。
较佳地，所述厚度阈值为根据所述柔性传感器预设的出厂电阻和沉积的所述多壁碳纳米管颗粒的重量确定的。
较佳地，对沉积的所述多壁碳纳米管颗粒进行压延工艺，包括：
利用压辊通过在沉积的所述多壁碳纳米管颗粒上滚动，将所述多壁碳纳米管颗粒压成第一导电层。
较佳地，对所述第一导电层再次压制，直到所述第一导电层的厚度达到预设厚度阈值，形成第二导电层，包括：
利用机械压力机沿着所述第一导电层的厚度方向，对所述第一导电层进行压制，直到所述第一导电层的厚度达到预设厚度阈值，形成第二导电层。
本发明实施例提供了一种柔性传感器及其制备方法，由于目前柔性传感器的基底层的制备材料在拉伸性、延展性方面存在局限性，本发明通过无聚氯乙烯PVC(Polyvinylchloride，无聚氯乙烯)或橡胶或热塑性橡胶TPR(Thermo-Plastic-Rubber material，热塑性橡胶)材料生成柔性可塑的橡皮来制备基底层，由于橡皮的延展性、抗压性以及可弯曲度均较现有材料高，也就避免了现有的柔性传感器中基底的制备材料的局限性，提升了柔性传感器的弯曲程度以及拉伸程度。此外，本发明提供的柔性传感器也可通过多壁碳纳米管材料制备导电层，也就避免了重复的镀膜光刻的工艺步骤，简化流程提升了效率，降低了成本。
附图说明
图1为本发明实施例一中提供的一种柔性传感器的结构示意图；
图2为本发明实施例二中提供的一种柔性传感器的制备方法的流程示意图；
图3a、图3b为本发明实施例二制备导电层的示意图。
具体实施方式
本发明提供了一种柔性传感器及其制备方法，用以通过柔性可塑的橡皮作为基底层，避免了现有的柔性传感器中基底的制备材料的局限性，提升了柔性传感器的弯曲程度以及拉伸程度。
下面将结合本发明实施例中的附图，对本发明中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
实施例一：
参见图1，本发明实施例一提供了一种柔性传感器，包括：由柔性可塑的橡皮形成的基底层110、位于基底层110上的导电层120、位于导电层120上的导电触点130和钝化层140以及通过导电触点130与导电层120相连的用于传导感应电流的导线150。
其中，上述橡皮的制备材料包括PVC(Polyvinyl chloride，无聚氯乙烯)或橡胶或TPR(Thermo-Plastic-Rubber material，热塑性橡胶)。上述导电层的制备材料包括多壁碳纳米管。上述导电触点的制备材料包括银浆。上述钝化层的制备材料包括聚酰亚胺。上述导线的制备材料包括金属铜。
由于橡皮的柔软且延展性、可塑性强的属性，使得根据橡皮形成的基底层也具备延展性强，弯曲程度和拉伸程度强等特性，避免了现有的柔性传感器中基底的局限性。
而且，由于多壁碳纳米管为导电材料，通过多壁碳纳米管替换现有的金属氧化物材料，避免了镀膜、光刻、刻蚀等一系列工艺步骤，简化了流程，降低了成本，提升了效率。
实施例二：
参见图2，本发明实施例二中提供了实施例一中所述的柔性传感器的制作方法，该方法包括：
S210、由柔性可塑的橡皮形成基底层110；
S220、在基底层110上沉积导电材料，形成导电层120；
S230、在导电层120上形成导电触点130和钝化层140；
S240、连接用于传导感应电流的导线150和导电触点130。
其中，步骤S210中的制备柔性可塑的橡皮的材料包括无聚氯乙烯PVC或橡胶或热塑性橡胶TPR。步骤S220中的导电材料包括多壁碳纳米管颗粒。
针对步骤S210，形成基底层具体包括：
利用无聚氯乙烯PVC或橡胶或热塑性橡胶TPR形成薄膜层；
对形成的薄膜层进行反复拉伸和弯曲处理，直到该薄膜层中的气泡和缝隙暴露出来，在这种情况下才能进一步提升与导电层的粘附性；其中，拉伸处理具体包括吹胀横向拉伸和牵引纵向拉伸；
通过等离子水对处理后的薄膜层清洗，为进一步保证薄膜层上的杂质清洗干净，可将清洗后的薄膜层放置在异丙醇进行超声波处理，超声波处理时间可为3分钟；
在一定温度下，对清洗过的薄膜层进行干燥处理，干燥处理时间可为20分钟；
确定干燥处理后的薄膜层为基底层。
针对步骤S220，形成导电层具体包括：
在步骤S210形成的基底层上沉积多壁碳纳米管颗粒；
利用压辊310，在沉积的多壁碳纳米管颗粒320上往返的来回滚动(如图3a)，直到多壁碳纳米管颗粒均匀平整的铺在基底层上，通过首次压制形成第一导电层330(图3b所示)；由于第一导电层的厚度要大于预设厚度阈值，也就是说，第一导电层的厚度与导电层的电阻的出厂初始值有关，且成反比，第一导电层的厚度又与压辊来回滚动的次数有关，因此，压辊来回滚动的次数与导电层的电阻的出厂初始值有关，且成反比；
通过去离子水将多余的多壁碳纳米管颗粒清洗掉，并对第一导电层的表面进行清洗；
利用机械压力机沿着第一导电层厚度的方向，对第一导电层进行压制，直到第一导电层的厚度达到预设的厚度阈值，此时形成的第二导电层即为导电层120。具体地，机械压力机的压力大小与压制时间均与第二导电层的厚度有关，也就是机械压力机的压力大小与压制时间均与预设厚度阈值有关，机械压力机的压力大小与压制时间均与导电层的电阻的出厂初始值有关，且成反比。
由于多壁碳纳米管颗粒的重量是确定的，且柔性传感器的出厂电阻值也是确定的，即导电层的厚度也是确定的，也就是预设的厚度阈值。即上述步骤是为了达到导电层的电阻的出厂初始值。
针对步骤S230，形成导电触点130和钝化层140具体包括：
在导电层上印刷导电银浆，形成导电触点；
用聚酰亚胺对导电层进行钝化，形成钝化层。
针对步骤S240，连接导线150和导电触点130中，导电150为铜导线。
本发明提供的柔性传感器的制作方法，为无溶剂式的，通过按压的方式确保导电层与基底层的粘附性，从而确保在传感器变形后仍能恢复原状。
综上所述，本发明实施例提供了一种柔性传感器及其制备方法，由于目前柔性传感器的基底层的制备材料在拉伸性、延展性方面存在局限性，本发明通过无聚氯乙烯PVC或橡胶或热塑性橡胶TPR材料生成柔性可塑的橡皮来制备基底层，由于橡皮的延展性、抗压性以及可弯曲度均较现有材料高，因此避免了现有的柔性传感器中基底的制备材料的局限性，提升了柔性传感器的弯曲程度以及拉伸程度。此外，本发明提供的柔性传感器的导电层也可通过多壁碳纳米管制备，避免了重复的镀膜光刻的工艺步骤，简化流程提升了效率，降低了成本。
本领域内的技术人员应明白，本发明的实施例可提供为方法、系统、或计算机程序产品。因此，本发明可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且，本发明可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器和光学存储器等)上实施的计算机程序产品的形式。
显然，本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样，倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内，则本发明也意图包含这些改动和变型在内。

Claims (10)

1.一种柔性传感器，其特征在于，该传感器包括：由柔性可塑的橡皮形成的基底层、位于所述基底层上的导电层、位于所述导电层上的导电触点和钝化层以及通过所述导电触点与所述导电层相连的用于传导感应电流的导线。
2.根据权利要求1所述的传感器，其特征在于，所述柔性可塑的橡皮包括无聚氯乙烯或橡胶或热塑性橡胶。
3.根据权利要求2所述的传感器，其特征在于，所述导电层的制备材料包括多壁碳纳米管。
4.一种如权利要求1-3任一项所述的柔性传感器的制备方法，其特征在于，该方法包括：
对柔性可塑的橡皮进行拉伸处理，形成基底层；
在所述基底层上沉积导电材料，形成导电层；
在所述导电层上形成导电触点和钝化层；
连接用于传导感应电流的导线和所述导电触点。
5.根据权利要求4所述的方法，其特征在于，所述柔性可塑的橡皮为由无聚氯乙烯或橡胶或热塑性橡胶制备的。
6.根据权利要求4所述的方法，其特征在于，所述导电材料包括多壁碳纳米管颗粒。
7.根据权利要求6所述的方法，其特征在于，在所述基底层上沉积导电材料，形成导电层，包括：
在所述基底层上沉积所述多壁碳纳米管颗粒；
对沉积的所述多壁碳纳米管颗粒进行压延处理，形成第一导电层；
对所述第一导电层进行压制处理，直到所述第一导电层的厚度达到预设厚度阈值，形成第二导电层。
8.根据权利要求7所述的方法，其特征在于，所述厚度阈值为根据所述柔性传感器预设的出厂电阻和沉积的所述多壁碳纳米管颗粒的重量确定的。
9.根据权利要求7所述的方法，其特征在于，对沉积的所述多壁碳纳米管颗粒进行压延工艺，包括：
利用压辊通过在沉积的所述多壁碳纳米管颗粒上滚动，将所述多壁碳纳米管颗粒压成第一导电层。
10.根据权利要求9所述的方法，其特征在于，对所述第一导电层再次压制，直到所述第一导电层的厚度达到预设厚度阈值，形成第二导电层，包括：
利用机械压力机沿着所述第一导电层的厚度方向，对所述第一导电层进行压制，直到所述第一导电层的厚度达到预设厚度阈值，形成第二导电层。
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