CN108106544A - Measuring system and measurement structure - Google Patents
Measuring system and measurement structure Download PDFInfo
- Publication number
- CN108106544A CN108106544A CN201711448769.XA CN201711448769A CN108106544A CN 108106544 A CN108106544 A CN 108106544A CN 201711448769 A CN201711448769 A CN 201711448769A CN 108106544 A CN108106544 A CN 108106544A
- Authority
- CN
- China
- Prior art keywords
- imaging
- laser
- measuring system
- cylindrical mirror
- stripe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The present invention relates to laser technology fields, provide a kind of measuring system and measurement structure.The measuring system includes cylinder lens device, imaging device and arithmetic processing apparatus, can measure the width of light beam for the spot beam that laser is emitted.During measurement, the line of laser, cylinder lens device and imaging device is a straight line, and arithmetic processing apparatus is connected with imaging device.After the spot beam of laser transmitting is incident to cylinder lens device, spot beam is expanded into stripe-shaped beam by cylinder lens device, and stripe-shaped beam is made to be emitted to imaging device, and the stripe-shaped beam is identical with the width of light beam of spot beam.After imaging device generates imaging signal corresponding with stripe-shaped beam, arithmetic processing apparatus obtains imaging signal from imaging device, and the width of light beam for obtaining stripe-shaped beam is calculated based on imaging signal.The width of light beam can be used for the adjusting for instructing laser beam straightness.The measuring system high certainty of measurement, measurement process is simple and quick, without manpower intervention.
Description
Technical field
The present invention relates to laser technology field, in particular to a kind of measuring system and measurement structure.
Background technology
Laser is due to having the characteristics that brightness height, high directivity, monochromaticjty is good, coherence is strong, in engineering, measurement, medical treatment
Etc. be widely used.In precision instrument manufacture and detection, large-scale metrology, large-scale instrument installation and positioning, army
In the fields such as chemical product manufacture, using laser as the occasion of core light source, such as：Laser thickness gauge, for the product quality of guarantee,
Laser is usually needed to provide horizontal, the vertical datum line of degree of precision.Therefore, in specified effect section, laser beam
The quality that straightness is adjusted plays a crucial role.It is generally believed that the waist spot size of laser beam is smaller, and acting on
When the spot size of laser beam is distributed in symmetrical spindle in section, the straightness of laser beam is best.In the prior art
In, the adjusting method of laser beam straightness is mainly the hot spot ruler by direct visual perception laser beam in effect section
It is very little, it instructs to adjust with this, process is time-consuming and laborious, and accuracy can not also ensure, and it is also possible to damage human eye.
The content of the invention
In view of this, an embodiment of the present invention provides a kind of measuring system and measurement structure, to solve above-mentioned technical problem.
To achieve the above object, the present invention provides following technical solution：
In a first aspect, the embodiment of the present invention provides a kind of measuring system, for measuring the spot beam that laser is emitted
Width of light beam, including：Cylinder lens device, imaging device and arithmetic processing apparatus；
The line of laser, cylinder lens device and imaging device is a straight line, and arithmetic processing apparatus connects with imaging device
It connects；
After spot beam is incident to cylinder lens device, spot beam is expanded into stripe-shaped beam by cylinder lens device, and makes item
Shape beam exit to imaging device, wherein, stripe-shaped beam is identical with the width of light beam of spot beam；
After imaging device generates corresponding with stripe-shaped beam imaging signal, arithmetic processing apparatus from imaging device acquisition into
As signal, and the width of light beam for obtaining stripe-shaped beam is calculated based on imaging signal.
Optionally, cylinder lens device includes：First cylindrical mirror and the second cylindrical mirror；
First cylindrical mirror and the second cylindrical mirror are placed in parallel by predetermined interval, so that the focus of the first cylindrical mirror and second
The focus of cylindrical mirror overlaps；
After spot beam is incident to the first cylindrical mirror, item is expanded as after the first cylindrical mirror and the second cylindrical mirror successively
Shape light beam, stripe-shaped beam are emitted to imaging device from the second cylindrical mirror.
Optionally, cylinder lens device includes：Outer barrel and inner cylinder；
The first end of outer barrel is provided with the second cylindrical mirror, and the first end of inner cylinder is provided with the first cylindrical mirror, the difference of outer barrel
On the outer circumferential surface for the first end for being set in inner cylinder in the second end of first end, spot beam is from be different from first end the of inner cylinder
Two ends are incident to the first cylindrical mirror；
It is slided by the inner peripheral surface for the first end for making outer barrel on the outer circumferential surface of the first end of inner cylinder, it can be by the first column
The distance between face mirror and the second cylindrical mirror are adjusted to predetermined interval.
Optionally, the first end of outer barrel is provided with lock-screw.
Optionally, imaging device includes optical screen, imaging lens and imaging sensor；
After stripe-shaped beam is incident to optical screen, rectangle striation is formed on optical screen, the width of rectangle striation and stripe-shaped beam
It is of same size；The imaged lens focus of transmitted image of rectangle striation is imaged on the image sensor, and imaging sensor can give birth to
Into imaging signal corresponding with imaging results.
Optionally, optical screen includes：Optics subtracts attenuator and sulfuric acid paper membrane, and sulfuric acid paper membrane is fitted in the table of optical attenuator
Face.
Optionally, imaging device further includes：Hood, optical screen, imaging lens and imaging sensor are arranged at shading
In cover.
Optionally, arithmetic processing apparatus includes：Signal processor and terminal device；
Signal processor is connected respectively with imaging sensor and terminal device, and signal processor is obtained from imaging sensor
Imaging signal, and terminal device will be sent to for characterizing at least two position counting values of imaging signal width, wherein, at least
Each position counting value in two position counting values is corresponding with a position on imaging sensor；
Terminal device calculates the width for obtaining rectangle striation based at least two position counting values.
Optionally, measuring system further includes：Slide, laser are slidably engaged with slide, so that laser can be
It is moved freely on the line of cylinder lens device and imaging device.
Second aspect, the embodiment of the present invention provide a kind of measurement structure, including：Above-mentioned measuring system and laser swash
The line of the imaging device of light device, the cylinder lens device of measuring system and measuring system be a straight line, the computing of measuring system
Processing unit is connected with imaging device.
The advantageous effect that the present invention realizes：Measuring system provided in an embodiment of the present invention can measure the point of laser transmitting
The width of light beam of shape light beam, the measuring system include cylinder lens device, imaging device and arithmetic processing apparatus.Wherein laser
The line of device, cylinder lens device and imaging device is a straight line, and arithmetic processing apparatus is connected with imaging device.During measurement first
Laser is opened, laser is made to emit spot beam, after spot beam is incident to cylinder lens device, is expanded by cylinder lens device
Stripe-shaped beam is simultaneously emitted to imaging device, and stripe-shaped beam generates corresponding imaging signal, calculation process in imaging device
Device obtains the imaging signal from imaging device, and the width of light beam for obtaining stripe-shaped beam is calculated based on the imaging signal.Wherein,
The width of light beam of the stripe-shaped beam that spot beam is generated through cylinder lens device, width of light beam and spot beam be it is identical, from
And arithmetic processing apparatus measurement obtains the width of light beam of spot beam.The width of light beam can be used as and instruct laser beam straight line
The Main Basiss adjusted are spent, the user of laser is made to complete adjusting to laser straightness on this basis.It is above-mentioned to measure
Journey is automatically performed, and without manpower intervention, measurement efficiency is higher, and human eye will not be damaged.Meanwhile the measuring system institute
The width of light beam that measurement obtains is capable of the spot size of reflected laser light beam, and hot spot is visually determined compared to passing through in the prior art
The mode of size, accuracy significantly improve, so as to more effectively instruct the adjusting of laser beam straightness.
Above-mentioned purpose, technical solution and advantageous effect to enable the present invention are clearer and more comprehensible, special embodiment below, and
Attached drawing appended by cooperation, is described in detail below.
Description of the drawings
It in order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of scope, for those of ordinary skill in the art, without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 shows the schematic diagram of the adjustment criteria of laser beam straightness；
Fig. 2 shows the structure diagram of measurement structure provided in an embodiment of the present invention；
Fig. 3 shows the structure diagram of cylinder lens device provided in an embodiment of the present invention；
Fig. 4 shows the schematic diagram of the rectangle striation on optical screen provided in an embodiment of the present invention；
Fig. 5 shows the schematic diagram of the image relation of imaging device provided in an embodiment of the present invention；
Fig. 6 shows the schematic diagram of the acquisition process of the position counting value of signal processor provided in an embodiment of the present invention.
In figure：1- measurement structures；10- cylinder lens devices；The first cylindrical mirrors of 100-；The second cylindrical mirrors of 110-；120-
Outer barrel；122- lock-screws；130- inner cylinders；20- imaging devices；200- optical screens；210- imaging lens；220- images pass
Sensor；300- signal processors；310- terminal devices；30- arithmetic processing apparatus；40- slides；50- lasers；500-
Laser bodies；510- laser heads；502- focusing lens；504- clamp rings.
Specific embodiment
In the prior art, the adjusting of laser beam straightness generally uses eye recognition method.In the light path of laser beam
Upper placement optical screen can form hot spot on optical screen, and human eye is observed that the size of hot spot, and based on the size of hot spot to laser
Focusing lens be adjusted so that laser beam meets the adjustment criteria of light beam straightness in specified effect section.Fig. 1
Show the schematic diagram of the adjustment criteria of laser beam straightness.With reference to Fig. 1, OO ' is the effect section of laser, acts on section
It is generally determined according to the practical application scene of laser, in the effect section, the direction of laser beam is from point O to point O '.
Optical screen is placed on the midpoint of OO ' respectively, at point O and at point O ', observes by the naked eye to obtain the size of hot spot on optical screen,
Hot spot is generally circular in cross section or approximate circle, and the width of hot spot can be defined as to the size of hot spot, distinguishes in above three position
The size of hot spot is obtained as CC ', AA ' and BB ', the focusing lens for adjusting laser causes the waist spot size for acting on interval midpoint
CC ' is as small as possible, and makes the spot size AA ' and BB ' of two, effect section endpoint as identical as possible, i.e. the light of laser beam
Spot size is distributed in section is acted in symmetrical spindle, during can consider laser beam from point O to point O ' at this time,
Its spot size does not change, and, the laser beam and collimated light beam are not different at two endpoints in effect section apparently, therefore
Think that the straightness of light beam at this time is best.It should be pointed out that above-mentioned adjusting process is not that disposably just can adjust completion, Ke Nengxu
It is multiple to move repeatedly optical screen, and is constantly observed, more satisfied adjusting result could be obtained.
Inventor has found that at least there are following defects for eye recognition method of the prior art through studying for a long period of time：First, mostly light
The laser of laser transmitting is composed not necessarily in visible light wave range, human eye possibly can not observe the spot size of its formation；Second,
Section laser power is larger, and directly observation hot spot is likely to result in impaired vision to human eye for a long time；3rd, eye recognition method is not
Energetic measurement hot spot absolute dimension, and can only probably judge the relative size of hot spot, accuracy is poor, is only applicable to
Less high application scenarios are required light beam straightness.For example, in Fig. 1, when optical screen is located at the midpoint of OO ', side observation light
The size side of hot spot adjusts laser on screen, seems minimum until adjusting spot size to human eye, it is clear that should " minimum " according to
Rely in the judgement of coordinator itself, human factor is higher；4th, due to the inaccuracy of manual adjustment, cause to laser light
When beam straightness is more demanding, it is necessary to which adjusting repeatedly can just meet the requirements, time-consuming and laborious.In view of this, the embodiment of the present invention carries
For a kind of measuring system and measurement structure, with the spot size of rapidly and accurately measuring laser beam, so as to improve above-mentioned technology
Problem.
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical solution in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
Part of the embodiment of the present invention, instead of all the embodiments.The present invention implementation being usually described and illustrated herein in the accompanying drawings
The component of example can configure to arrange and design with a variety of.
Therefore, below the detailed description of the embodiment of the present invention to providing in the accompanying drawings be not intended to limit it is claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiments of the present invention, this field is common
Technical staff's all other embodiments obtained without creative efforts belong to the model that the present invention protects
It encloses.
It should be noted that：Similar label and letter represents similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
In the description of the present invention, it is necessary to explanation, term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instructions such as " level ", " interior ", " outer " are based on orientation shown in the drawings or position relationship or are somebody's turn to do
Invention product using when the orientation usually put or position relationship, be for only for ease of the description present invention and simplify description, without
It is instruction or implies that signified device or element there must be specific orientation, with specific azimuth configuration and operation, therefore not
It is understood that as limitation of the present invention.In addition, term " first ", " second ", " the 3rd " etc. are only used for distinguishing description, and cannot manage
It solves to indicate or imply relative importance.
In addition, the terms such as term " level ", " vertical ", " pendency " are not offered as requiring component abswolute level or pendency, and
It is that can be slightly tilted.It is not to represent the structure if " level " only refers to that its direction is more horizontal with respect to for " vertical "
It has to fully horizontally, but can be slightly tilted.
In the description of the present invention, it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " connected ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or one
It connects body；Can be mechanical connection or electrical connection；It can be directly connected, it can also be indirect by intermediary
It is connected, can is the connection inside two elements.For the ordinary skill in the art, can manage as the case may be
Solve the concrete meaning of above-mentioned term in the present invention.
Other features and advantages of the present invention will be illustrated in subsequent specification, also, partly be become from specification
It is clear that understood by implementing the embodiment of the present invention.The purpose of the present invention and other advantages can be by being write
Specifically noted structure is realized and obtained in specification, claims and attached drawing.
Fig. 2 shows the structure diagram of measurement structure 1 provided in an embodiment of the present invention.With reference to Fig. 2, the measurement structure 1
Including laser 50 and measuring system provided in an embodiment of the present invention.Wherein, laser 50 include laser bodies 500 and
Laser head 510, laser bodies 500 generate laser, and laser beam is projected from laser head 510.Focusing is provided on laser head 510
Lens 502 and clamp ring 504, focusing lens 502 meet light beam for adjusting laser beam with the spot size formed it into
The standard of straightness, clamp ring 504 are used to after the completion of the adjusting of focusing lens 502 be locked that it to be made not adjust freely again.
Measuring system include cylinder lens device 10, imaging device 20 and arithmetic processing apparatus 30, laser 50, cylinder lens device 10 with
And imaging device 20 is placed point-blank, laser beam is from the straight line by arithmetic processing apparatus 30 and imaging device
20 connections.As an alternative embodiment, the measuring system in the embodiment of the present invention further includes slide 40, laser 50 is put
It puts on slide 40, can be moved freely along the straight line where slide 40, scale (not shown) is provided on slide 40, is convenient for
The position of writing laser 50 when adjusting laser beam straightness.
The groundwork flow of the measuring system is：After laser 50 is fixed on a certain specific position on slide 40,
Laser 50 is opened, it is made to generate laser beam.The section of the laser beam is circular or approximate circle, for convenience of explaining hereinafter
It states, is referred to as spot beam, the section of spot beam is actually light in the case of light beam is irradiated to body surface
Width of light beam is defined as the width of beam cross section by the hot spot that beam is formed in body surface, it is clear that the width of light beam of spot beam
The size that spot beam forms hot spot can be characterized, measures what it was formed so as to which the width of light beam for measuring spot beam is equal to
Spot size, and then can instruct to adjust its straightness in effect section according to the width of light beam of spot beam.It is dotted
Light beam is incident to cylinder lens device 10 after being emitted from the laser head 510 of laser 50, and spot beam is unfolded cylinder lens device 10
For stripe-shaped beam, and stripe-shaped beam is made to be emitted to imaging device 20, wherein, stripe-shaped beam refers to section for a strip rectangle
Light beam, the width of light beam of stripe-shaped beam is identical with the width of light beam of spot beam, therefore the width for measuring spot beam can turn
Turn to the width for measuring the stripe-shaped beam.Stripe-shaped beam is imaged in imaging device 20 and generates corresponding imaging signal,
Arithmetic processing apparatus 30 obtains the imaging signal from imaging device 20, and the light for obtaining stripe-shaped beam is calculated based on imaging signal
Beam width obtains the width of light beam of its spot beam generated in the specific position of slide 40 of laser 50 simultaneously.From
And laser 50 can be moved to different positions on slide 40, according to the width of light beam obtained in position measurement
The adjusting of laser beam straightness is carried out, specific regulative mode is illustrated again hereinafter.
Fig. 3 shows the structure diagram of cylinder lens device 10 provided in an embodiment of the present invention.With reference to Fig. 3, cylindrical mirror dress
Putting 10 includes the first cylindrical mirror 100 and the second cylindrical mirror 110, and the first cylindrical mirror 100 and the second cylindrical mirror 110 are plano-convex
Cylindrical mirror.First cylindrical mirror 100 and 110 first cylindrical mirror 100 of the second cylindrical mirror and the second cylindrical mirror 110 press predetermined interval
It is placed in parallel, so that the focus of the first cylindrical mirror 100 and the focus of the second cylindrical mirror 110 overlap.At this point, spot beam enters
After being incident upon the first cylindrical mirror 100, stripe-shaped beam is expanded as after the first cylindrical mirror 100 and the second cylindrical mirror 110 simultaneously successively
Imaging device 20 is emitted to from the second cylindrical mirror 110.The section of the stripe-shaped beam is a rectangle, the width of the rectangle and dotted light
Beam is of same size, and the height of the rectangle depends on the distance between the first cylindrical mirror 100 and the second cylindrical mirror 110, inventor
It has been investigated that the distance between the first cylindrical mirror 100 and the second cylindrical mirror 110 are appropriately arranged with, and when making the two focus coincidence, institute
The stripe-shaped beam measurement effect of formation is preferable.But in practice, it can not know sometimes and accurately the first cylindrical mirror 100 and second
The focal position of cylindrical mirror 110, as an alternative embodiment, cylindrical mirror system further includes outer barrel 120 and inner cylinder
130.First cylindrical mirror 100 is arranged on the first end of inner cylinder 130, and the second cylindrical mirror 110 is arranged on the first end of outer barrel 120, outside
On the outer circumferential surface of the first end that is set in inner cylinder 130 of the second end different from first end of cylinder 120, spot beam is from inner cylinder 130
The second end different from first end be incident to the first cylindrical mirror 100, opened up by the first cylindrical mirror 100 and the second cylindrical mirror 110
It opens to be emitted to imaging device 20 from the second cylindrical mirror 110 after stripe-shaped beam.The inner peripheral surface of the first end of outer barrel 120 can including
It is slided on the outer circumferential surface of the first end of cylinder 130, so as to adjust the distance between the first cylindrical mirror 100 and the second cylindrical mirror 110, into
As being provided with optical screen 200 in system, stripe-shaped beam is radiated at formation rectangle striation on optical screen 200, adjustable column mirror devices 10
Relative position between outer barrel 120 and inner cylinder 130, the height of rectangle striation correspondingly change, in practice, by rectangle striation tune
Section on the optical screen 200 that can be more completely shown in imaging system can, the first cylindrical mirror 100 and the second cylindrical mirror at this time
110 focus overlaps or approximate coincidence.Lock-screw 122 is additionally provided on outer barrel 120, in the opposite of outer barrel 120 and inner cylinder 130
After position is adjusted, the relative position of outer barrel 120 and inner cylinder 130 can be locked by the lock-screw 122, avoid its hair
It is raw to slide.
With continued reference to Fig. 2, imaging device 20 includes optical screen 200, imaging lens and imaging sensor 220.As this hair
A kind of optional embodiment of bright embodiment, imaging device 20 can also include hood (not shown), optical screen 200, into
As camera lens and imaging sensor 220 are arranged in hood, only hood is exposed on optical screen 200 a surface, is used for
Incident stripe-shaped beam is received, hood can make measurement result more accurate to avoid influence of the natural light for imaging device 20.
Before it has been noted that after stripe-shaped beam is incident to optical screen 200, rectangle striation is formed on optical screen 200, which can regard
For a section of stripe-shaped beam, width and stripe-shaped beam are of same size, and height is by the first cylindrical mirror 100 and second
Spacing distance between cylindrical mirror 110 determines that in fig. 2, the rectangle striation on optical screen 200 is shown with oblique line shape shade.Obviously,
After spot beam is expanded as stripe-shaped beam, the area of section of light beam significantly increases, and the energy of unit area is decreased obviously, human eye
Even if looking at the rectangle striation straight will not generally damage, as long as and in general, ensuring rectangular light in measurement process again
Item can be more completely shown in optical screen 200, need not generally observe with the human eye the rectangle striation again.In addition, the rectangular light
Item is further characterized in that, arbitrary height position in its height direction, and Energy distribution in the width direction is and spot beam
Regularity of energy distribution in the direction of the width it is identical.Fig. 4 shows the rectangular light on optical screen 200 provided in an embodiment of the present invention
The schematic diagram of item.With reference to Fig. 4, if without using cylindrical mirror system, spot beam forms a circular light spot on optical screen 200,
If using cylindrical mirror system, stripe-shaped beam forms the width of a rectangle striation, circular light spot and rectangle striation on optical screen 200
Spend it is identical, and the Energy distribution at any position in rectangle striation short transverse, such as BB ' and CC ' positions with circle
Regularity of energy distribution at the AA ' of hot spot is identical (Energy distribution in finger widths direction), i.e., to measure the width side of spot beam
Upward Energy distribution can be converted into the Energy distribution of measurement rectangle striation meaning height and position in office in the width direction.For point
For shape light beam, optimally, the Energy for Symmetrical distribution of hot spot in the direction of the width, highest at center, to both sides by
Gradually reduce, such as Gaussian Profile.But its energy in the direction of the width of the spot beam that laser 50 in practice generates may
Be not that Striking symmetry is distributed in a manner described, the distribution of spot beam energy be influence 50 performance of laser it is important because
Element can measure, the index as evaluation 50 performance of laser together when measuring the width of spot beam.
Optical screen 200 is using the manufacture of low transmission medium, in a kind of optional embodiment of the embodiment of the present invention, optical screen
200 are bonded by optical attenuator and sulfuric acid paper membrane, and stripe-shaped beam forms rectangle by optical attenuator in sulfuric acid paper membrane
Striation.The diffusing reflection effect and transmission effects of sulfuric acid paper membrane are all preferable, user are facilitated to observe rectangle striation, while rectangle striation is also
Sulfuric acid paper membrane can be penetrated and form transmitted image.With continued reference to Fig. 2, the imaged lens 210 of transmitted image of rectangle striation focus on
It is imaged on imaging sensor 220, imaging sensor 220 passes through opto-electronic conversion, generates imaging signal corresponding with imaging results.
Wherein, imaging sensor 220 can be ccd image sensor, cmos image sensor etc., in fig. 2, imaging sensor 220
For strip, on one piece of imaging plate, rectangle striation is imaged on imaging plate, and imaging is in imaging sensor 220
Right-angled intersection, in fig. 2 the picture of rectangle striation shown with oblique line shape shade.By taking ccd image sensor as an example, general common line
The saturation exposure of array CCD image sensor is less than 0.51xs, if being radiated at the light intensity on ccd image sensor surface
Excessive, saturation will occur for ccd image sensor, and the susceptibility and accuracy for carrying out opto-electronic conversion will all substantially reduce, institute
The imaging signal quality of generation will be deteriorated.In embodiments of the present invention, rectangle striation passes through the attenuation of low transmission optical screen 200,
Its intensity of illumination has substantially reduced, and the energy in rectangle striation unit area is natively far below circular light spot unit plane
Energy in product so the intensity of illumination that actually ccd image sensor is subject in embodiments of the present invention is little, is not up to
Saturation.In addition, mentioning before, for the picture of rectangle striation with imaging sensor 220 in right-angled intersection, i.e. the picture of rectangle striation only has one
Part on imaging sensor 220, but be used as the picture of rectangle striation, shape obviously still rectangle, at an arbitrary position
Width is all identical, and according to analysis before, the Energy distribution of the arbitrary height position of rectangle striation in the direction of the width is equal
Identical with the regularity of energy distribution in the direction of the width of spot beam, imaging len 210 can't change the energy of rectangle striation
Measure the regularity of distribution, so the Energy distribution of the arbitrary height position of the picture of rectangle striation in the direction of the width with spot beam
Regularity of energy distribution in the direction of the width is identical.Therefore, the imaging signal generated on imaging sensor 220 has been able to characterize
Whole features of the imaging results of rectangle striation, need to only measure the feature of imaging signal in arithmetic processing apparatus 30, and will be into
As the feature of signal is correspondingly scaled according to lens image formation rule the width and energy in the direction of the width of rectangle striation
Distribution can.Obviously, another benefit for spot beam being expanded into stripe-shaped beam using cylindrical mirror system is：Image passes
The placement location of sensor 220 need not control too accurate, as long as ensure its picture right-angled intersection with rectangle striation, and
The result of calculation of subsequent arithmetic processing system is not influenced.
Fig. 5 shows the schematic diagram of the image relation of imaging device 20 provided in an embodiment of the present invention.Fig. 5 is imaging device
20 top view, with reference to Fig. 4, X1X2 is optical screen 200, and X3X4 is imaging sensor 220, and point O is the center of imaging lens, point O1
For optical axis and the intersection point of optical screen 200, point O2 is the intersection point of optical axis and imaging sensor 220, and θ 1 presss from both sides for 200 object plane of optical screen and optical axis
Angle, θ 2 are 220 image planes of imaging sensor and optical axis included angle, and O1H is the wide M of object, and O2H ' is image width N, and OF is for object space focal length f, OF '
Image space focal length f ', L0 are that the distance that H points object distance, that is, HO, L0 ' is H ' points image distance, that is, H ' O, OO1 is L, and the distance of OO2 is L ', and β is
Hang down axis magnifying power.Wherein, " object " refers to rectangle striation, and " as " refers to the picture of rectangle striation.For existing in perfect optical system
Image relational expression：
It is exported by formula (1), (2)：
Abbreviation formula (4) simultaneously brings formula (1) into：
F'cos θ 1M+sin θ 2cos θ 1MN+ (f'-L) sin θs 2N=0
When optical system is fixed, parameter L, f ', θ 1, θ 2 is fixed constant, if constant a, b, c is as follows：
A=f'cos θ 1；
B=sin θ 2cos θ 1
C=(f'-L) sin θ 2
It can obtain：
AM+bMN+cN=0 (5)
Formula (5) asks desirable a, b, c by least square method, then rectangle striation width：
Obviously, formula (5), (6), the picture of the width and the rectangle striation on imaging sensor 220 of rectangle striation are passed through
Width it is directly related, and with the picture of launching position of the rectangle striation on optical screen 200 and rectangle striation in imaging sensor
Launching position on 220 is unrelated.On imaging sensor 220, object point and picture point are one-to-one, it is assumed that object point scope exists
X1X2, then picture point scope is in X3X4, then and point X1 and point X3 is just object respectively, as opposite leading zero's, O1X1=s in Fig. 5,
O1H=M, HX1=y can obtain M=y+s；O2X3=t, O2H '=N, H ' X3=x can obtain N=x+t.Bringing formula (6) into can obtain：
Formula (7) is expanded into series to obtain：
Y=a0+a1x+a2x2+a3x3+… (8)
In preferable optical imaging system paraxial rays, formula (8) can using approximate representation as：
Y=a1x2+b1x+c1 (9)
Any one object point H i.e. in rectangle striation compared with X1 position y can by the picture of rectangle striation with object
The corresponding picture point H ' of point H are obtained compared with the position x of X3 to calculate.
With continued reference to Fig. 2, arithmetic processing apparatus 30 includes signal processor 300 and terminal device 310, signal processor
300 are connected respectively with imaging sensor 220 and terminal device 310.Wherein, signal processor 300 is mainly by microcontroller, A/D
Conversion chip, external memory and peripheral interface circuit composition, major function are to generate the work of driving imaging sensor 220
Make clock signal, obtain the imaging signal that imaging sensor 220 generates, and obtain multiple position counting values in imaging signal with
And corresponding voltage value.Wherein, position counting value is used to characterize position of the picture of rectangle striation on imaging sensor 220, electricity
Pressure count value is used to characterize intensity of illumination of the picture of rectangle striation at these positions, as shown in table 1：
Table 1
Wherein, position counting value x is the position x in formula (9).Fig. 6 is shown at signal provided in an embodiment of the present invention
Manage the schematic diagram of the acquisition process of the position counting value of device 300.With reference to Fig. 6, the transverse axis of Fig. 6 is position counting value, and the longitudinal axis is A/D
Transformed voltage value, the dot in Fig. 6 are by the position counting value of each position in table 1 and the progress of corresponding voltage value
Draw as a result, between each dot be connected formed curve can approx be considered as imaging signal.As it can be seen that in signal processor
In 300, imaging signal is carried out quantifying sampling to obtain multiple position counting values and corresponding voltage value.In signal processing
Comparative level is reasonably set in device 300, voltage value in imaging signal is located at part more than comparative level or comparative level
As useful signal, the part below comparative level is as invalid signals (such as noise), you can obtain for characterize into
As at least two position counting values of signal width.For example, in figure 6, comparative level v=90 is taken, before obtaining imaging signal
Along position counting value x1=18150 and back edge position count value x2=18010.Meanwhile to measure the energy of rectangle striation point
Cloth can also obtain horizontal geometric center position counting value
X3=(x1+x2)/2=18080 and horizontal geometric center of gravity position counting value
Wherein, it is exactly laterally the width for the picture for being worth rectangle striation or rectangle striation.Aforementioned four position can be counted
Numerical value is sent to the calculating that terminal device 310 carries out rectangle striation width and Energy distribution situation.According to formula (9), terminal is set
Standby 310 before being calculated, and first has to obtain parameter a1, b1, c1.Its specific calculation is as shown in table 2：
Table 2
Before formal measurement starts, rectangle striation is adjusted, makes the specific position of rectangle striation, such as center difference position
In 0um, 6000um ..., at 30000um, position corresponding with these positions in imaging signal is obtained on signal processor 300
Put count value 27609,23184 ..., 3399, and these position counting values are sent to terminal device 310, in terminal device
It brings formula (9) on 310 into and solves parameter a1, b1, c1.Three groups of data of wherein sequence number 1,2,3 can solve one group of a1, b1, c1,
The use of the condition of the expression formula is 27609≤x ＜ 23184 so as to obtain y=-3E-06x^2-1.1826x+35251,
That is later when calculating y, the value of x is first judged whether within the scope of this, if the determination result is YES, uses the table of above-mentioned y
It is calculated up to formula.And so on, totally six groups of data can obtain the expression formula of four y, the value of corresponding x to sequence number 1-6
Scope is different, and the value range of four expression formulas of y and corresponding x is stored on terminal device 310.When terminal is set
Standby 310 when receiving x1, x2, x3, x4 of the transmission of signal processor 300, you can with using above-mentioned expression formula and value range into
Row calculates, as shown in table 3：
| Position counting value title | Value x | Striation position y (um) |
| Advanced position count value | X1=18150 | Y=1E-06x2-1.2447x+34723=12461 |
| Back edge position count value | X2=18010 | Y=1E-06x2-1.2447x+34723=12630 |
| Horizontal geometric center position counting value | X3=18080 | Y=1E-06x2-1.2447x+34723=12545.7 |
| Horizontal geometric center of gravity position counting value | X4=18082 | Y=1E-06x2-1.2447x+34723=12543.3 |
Table 3
So as to obtain the width of rectangle striation as 12630-12461=169um namely obtain spot beam
Width of light beam.Optical losses position is obtained simultaneously as 12545.7um, and striation position of centre of gravity is 12543.4um.The centre bit of striation
It puts and is not completely superposed with position of centre of gravity, it is seen that the Energy distribution of spot beam has not been on the direction of width of light beam at this time
Holohedral symmetry distribution, it can be according to the quality of this 50 performance of situation analysis laser.Obviously, above-mentioned calculating rectangle striation width
Method is only a kind of example, and the width for not representing rectangle striation is only capable of being calculated using aforesaid way, by above-mentioned formula,
Therefore limiting the scope of the invention is not formed.In embodiments of the present invention, the signal processing of arithmetic processing apparatus 30
Signal processing unit used in He'nan Zhongyuan Optoelectronic Measuring and Control Technology Co., Ltd.'s laser thickness gauge, type may be employed in device 300
Number be JGC-H1B-CLB.The electronic equipments such as SCM system, computer, terminal device 310 may be employed in terminal device 310
After width value, center and the position of centre of gravity of rectangle striation has been calculated, it can be included in real time setting in corresponding display
It is standby, on display, so that the user of laser 50 can know the width of light beam and light beam of present laser light beam in real time
Energy distribution situation.
In measuring system provided in an embodiment of the present invention, laser light is adjusted by moving laser 50 on slide 40
The straightness of beam.Such as straightness of the laser beam in the operation interval of 1m-2m is adjusted, in the standard and Fig. 1 that adjust
The adjustment criteria shown is identical.Laser 50 is respectively moved to away from 200 position 1m of optical screen, at 1.5m and at 2m
(being positioned by the scale on slide 40) is obtained width of light beam reading at this time by terminal device 310, adjusts laser in real time
50 focusing lens 502 is so that the width of light beam reading at 1.5m is as small as possible, and makes the width of light beam reading at 1m and at 2m
As identical as possible, i.e., the width of laser beam is distributed in section is acted in symmetrical spindle, adjusts complete at this time, by laser
The clamp ring 504 of device 50 is locked.It should be pointed out that above-mentioned adjusting process is not that disposably just can adjust completion, it may be necessary to anti-
Laser is moved again more than 50 times, but since terminal device 310 can calculate width of light beam simultaneously its reading of real-time display in real time, so
User will soon judge to adjust as a result, so that the adjusting efficiency of laser beam straightness greatly improves.
In conclusion measuring system provided in an embodiment of the present invention and measurement structure 1 can accurately be surveyed in a manner of quantization
The width for the laser beam that laser 50 generates is measured, measuring speed is fast, and user is contributed to be rapidly completed laser on this basis
The adjusting of light beam straightness.Meanwhile in measurement process, user, can be to avoid causing vision without observing laser beam for a long time
Damage, and the measurement process is automatically performed by measuring system, and the wavelength for the light that laser 50 is emitted does not influence measurement result,
The laser of non-visible wavelength can also measure.In addition, the present invention measuring system that example provides in real time and measurement structure 1, also
It is capable of the Energy distribution situation of measuring laser beam, user is facilitated to judge the property of laser 50 while light beam straightness is adjusted
Energy.
Obviously, the above embodiment of the present invention is just for the sake of clearly illustrating example of the present invention, and it is pair to be not
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
All any modification, equivalent and improvement made within the spirit and principle of invention etc., should be included in the claims in the present invention
Protection domain within.
Claims (10)
1. a kind of measuring system, for measuring the width of light beam for the spot beam that laser is emitted, which is characterized in that including：
Cylinder lens device, imaging device and arithmetic processing apparatus；
The line of the laser, the cylinder lens device and the imaging device be a straight line, the arithmetic processing apparatus
It is connected with the imaging device；
After the spot beam is incident to the cylinder lens device, the spot beam is expanded into strip by the cylinder lens device
Light beam, and the stripe-shaped beam is made to be emitted to the imaging device, wherein, the light beam of the stripe-shaped beam and the spot beam
It is of same size；
After the imaging device generates corresponding with stripe-shaped beam imaging signal, the arithmetic processing apparatus from it is described into
As the device acquisition imaging signal, and the width of light beam for obtaining the stripe-shaped beam is calculated based on the imaging signal.
2. measuring system according to claim 1, which is characterized in that the cylinder lens device includes：First cylindrical mirror with
And second cylindrical mirror；
First cylindrical mirror and second cylindrical mirror are placed in parallel by predetermined interval, so that the coke of first cylindrical mirror
The focus of point and second cylindrical mirror overlaps；
After the spot beam is incident to first cylindrical mirror, successively through first cylindrical mirror and second cylindrical mirror
After be expanded as the stripe-shaped beam, the stripe-shaped beam is emitted to the imaging device from second cylindrical mirror.
3. measuring system according to claim 2, which is characterized in that the cylinder lens device includes：Outer barrel and inner cylinder；
The first end of the outer barrel is provided with second cylindrical mirror, and the first end of the inner cylinder is provided with first cylinder
Mirror, on the outer circumferential surface of the first end for being set in the inner cylinder different from the second end of the first end of the outer barrel, the point
Shape light beam is incident to first cylindrical mirror from the second end different from the first end of the inner cylinder；
It is slided by the inner peripheral surface for the first end for making the outer barrel on the outer circumferential surface of the first end of the inner cylinder, it can be by institute
It states the distance between the first cylindrical mirror and second cylindrical mirror and is adjusted to the predetermined interval.
4. measuring system according to claim 3, which is characterized in that the first end of the outer barrel is provided with lock-screw.
5. according to the measuring system described in any claim in claim 1-4, which is characterized in that the imaging device includes light
Screen, imaging lens and imaging sensor；
After the stripe-shaped beam is incident to the optical screen, rectangle striation, the width of the rectangle striation are formed on the optical screen
With being of same size for the stripe-shaped beam；The transmitted image of the rectangle striation focuses on described image through the imaging len and passes
It is imaged on sensor, described image sensor can generate the imaging signal corresponding with imaging results.
6. measuring system according to claim 5, which is characterized in that the optical screen includes：Optics subtracts attenuator and sulphur
Sour paper membrane, the sulfuric acid paper membrane are fitted in the surface of the optical attenuator.
7. measuring system according to claim 6, which is characterized in that the imaging device further includes：Hood, the light
Screen, the imaging lens and described image sensor are arranged in the hood.
8. measuring system according to claim 5, which is characterized in that the arithmetic processing apparatus includes：Signal processor
And terminal device；
The signal processor is connected respectively with described image sensor and the terminal device, and the signal processor is from institute
It states imaging sensor and obtains the imaging signal, and will be for characterizing at least two position counting values of the imaging signal width
The terminal device is sent to, wherein, each position counting value in at least two position countings value is and described image
A position on sensor corresponds to；
The terminal device calculates the width for obtaining the rectangle striation based on at least two position countings value.
9. measuring system according to claim 5, which is characterized in that the measuring system further includes：Slide, the laser
Device is slidably engaged with the slide, so that the laser can be in the cylinder lens device and the imaging device
It is moved freely on line.
10. a kind of measurement structure, which is characterized in that including：Measuring system as described in any claim in claim 1-9 with
And laser, the line of the imaging device of the laser, the cylinder lens device of the measuring system and the measuring system
For a straight line, the arithmetic processing apparatus of the measuring system is connected with the imaging device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711448769.XA CN108106544B (en) | 2017-12-27 | 2017-12-27 | Measurement system and measurement structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711448769.XA CN108106544B (en) | 2017-12-27 | 2017-12-27 | Measurement system and measurement structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108106544A true CN108106544A (en) | 2018-06-01 |
| CN108106544B CN108106544B (en) | 2020-08-04 |
Family
ID=62214008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711448769.XA Expired - Fee Related CN108106544B (en) | 2017-12-27 | 2017-12-27 | Measurement system and measurement structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108106544B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890397A (en) * | 2018-07-12 | 2018-11-27 | 哈尔滨工程大学 | A kind of long axis system laser borehole positioning apparatus |
| CN111761829A (en) * | 2020-06-24 | 2020-10-13 | 深圳市博泰数码智能技术有限公司 | Width adjusting method applied to palm folding machine |
| CN115406544A (en) * | 2022-11-01 | 2022-11-29 | 四川省药品检验研究院(四川省医疗器械检测中心) | Method, device and system for measuring straightness of positioning line of laser positioning light source |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101126313B1 (en) * | 2011-10-14 | 2012-03-22 | 인타스(주) | Led lighting having deflection construction |
| CN103235300A (en) * | 2013-04-26 | 2013-08-07 | 中国科学院上海光学精密机械研究所 | Astigmatism Fourier transform-based optical synthetic aperture laser imaging radar processor |
| CN105750729A (en) * | 2016-05-03 | 2016-07-13 | 长春理工大学 | Laser processing device with linear array optical lens assembly with micro cylindrical lenses in cylindrical distribution |
| CN106569331A (en) * | 2016-11-17 | 2017-04-19 | 上海无线电设备研究所 | Laser leading beacon optical system |
| CN207741694U (en) * | 2017-12-27 | 2018-08-17 | 河南中原光电测控技术有限公司 | Measuring system and measurement structure |
-
2017
- 2017-12-27 CN CN201711448769.XA patent/CN108106544B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101126313B1 (en) * | 2011-10-14 | 2012-03-22 | 인타스(주) | Led lighting having deflection construction |
| CN103235300A (en) * | 2013-04-26 | 2013-08-07 | 中国科学院上海光学精密机械研究所 | Astigmatism Fourier transform-based optical synthetic aperture laser imaging radar processor |
| CN105750729A (en) * | 2016-05-03 | 2016-07-13 | 长春理工大学 | Laser processing device with linear array optical lens assembly with micro cylindrical lenses in cylindrical distribution |
| CN106569331A (en) * | 2016-11-17 | 2017-04-19 | 上海无线电设备研究所 | Laser leading beacon optical system |
| CN207741694U (en) * | 2017-12-27 | 2018-08-17 | 河南中原光电测控技术有限公司 | Measuring system and measurement structure |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890397A (en) * | 2018-07-12 | 2018-11-27 | 哈尔滨工程大学 | A kind of long axis system laser borehole positioning apparatus |
| CN111761829A (en) * | 2020-06-24 | 2020-10-13 | 深圳市博泰数码智能技术有限公司 | Width adjusting method applied to palm folding machine |
| CN115406544A (en) * | 2022-11-01 | 2022-11-29 | 四川省药品检验研究院(四川省医疗器械检测中心) | Method, device and system for measuring straightness of positioning line of laser positioning light source |
| CN115406544B (en) * | 2022-11-01 | 2023-03-14 | 四川省药品检验研究院(四川省医疗器械检测中心) | Method, device and system for measuring straightness of positioning line of laser positioning light source |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108106544B (en) | 2020-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102721378B (en) | Three-dimensional mirror object shape measurement system based on sinusoidal stripe projection | |
| CN102360079B (en) | Laser range finder and working method thereof | |
| CN106441571B (en) | A kind of light source module and the line scanning multi-optical spectrum imaging system using it | |
| WO2018082184A1 (en) | Distance measurement method and device, camera, and mobile terminal | |
| CN107561089B (en) | Inner hole detection optical system and inner hole detection equipment | |
| CN108106544A (en) | Measuring system and measurement structure | |
| CN105203304B (en) | Magnifying power method surveys the optical bench of focal length | |
| CN105699982B (en) | The high-precision camera chip multipoint ranging apparatus and method of double excitation calibration | |
| CN204831220U (en) | Calcirm -fluoride optical flat two sides depth of parallelism high accuracy testing arrangement | |
| CN111458108A (en) | Device and method for measuring parallelism of transmitting and receiving optical axes | |
| CN109283184A (en) | A kind of beauty defects measurement method based on spectral confocal sensor | |
| CN207741694U (en) | Measuring system and measurement structure | |
| CN106500843A (en) | A kind of imaging spectrometer optimum image plane calibration method and device | |
| CN109855844A (en) | A kind of optical lens centre deviation measuring device and method | |
| CN204679637U (en) | The high precision CCD multipoint ranging apparatus that double excitation is demarcated | |
| CN204578635U (en) | A kind of infrared camera and focal plane registration apparatus thereof | |
| CN206248212U (en) | A kind of light source module and the line scanning multi-optical spectrum imaging system using it | |
| CN206038278U (en) | Concave mirror imaging measurement telephoto lens modulation transfer function's device | |
| CN111060293A (en) | Focal length testing device | |
| CN102207375A (en) | Novel device for measuring diameter of optical fiber | |
| CN207663134U (en) | Camera lens, machine visual lens device and machine vision measuring system | |
| JPH10239029A (en) | Three-dimensional shape measuring device | |
| CN205120046U (en) | System for measure inclination and displacement | |
| CN204405031U (en) | Eliminate stray light double light path optical centering instrument | |
| CN108572160B (en) | Refractometer for measuring refractive index distribution |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200804 Termination date: 20201227 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |