CN108085646A - A kind of large tank inner wall plated film vacuum cathode arc coating machine - Google Patents
A kind of large tank inner wall plated film vacuum cathode arc coating machine Download PDFInfo
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- CN108085646A CN108085646A CN201711039152.2A CN201711039152A CN108085646A CN 108085646 A CN108085646 A CN 108085646A CN 201711039152 A CN201711039152 A CN 201711039152A CN 108085646 A CN108085646 A CN 108085646A
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- arc
- target
- arc target
- lifting platform
- electric arc
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of large tank inner wall plated film vacuum cathode arc coating machine, it forms interim plating room using the large tank as Vacuum Deposition chamber outer wall, electric arc source component is mounted on and is erected on the indoor support of plating, then using a closed case as arc target mounting base, the electric arc target of electric arc source component is fixed thereon, and electric arc target lead end is sealed in the seal case, then the antivacuum lead channels being in communication with the outside are formed in Vacuum Deposition room by the bellows connected with the closed case again, by the water of electric arc source component, electricity, gas circuit is drawn out to outside stove by the passage and is connected with corresponding portion.Connection and sealing problem when the water, electricity, gas circuit that coating machine of the present invention can easily solve its Vacuum Deposition indoor electric arc target is drawn.
Description
Technical field
The present invention relates to a kind of vacuum cathode arc coating machine for large tank inner wall plated film, the large tanks
Referring to the one end open other end has the arc capping cover of evagination, the tank body of 1.5 meters -3.3 meters of diameter, 2.5 meters -3.8 meters of x high.
Technical background
Common vacuum cathode arc coating machine is resistance to for plating the tool and mould protective film of hard, wear-resistant or the plating resistance to scratching of hard
The daily necessities decorating film of corrosion, most typical coating are titanium nitrides, it has higher hardness, have preferable wear-resisting resistance in golden yellow
Corrosion energy is commonly used for the decorating film of tool and mould protective film and various articles for use.Large-scale coating machine will count plating stainless steel plaque
The coating machine of (such as long 3.2 meters of 1.2 meters of x wide), vertical plating 2-4 meters of the x high in diameter 2-5 meters of room for another example plate long stainless tube (as directly
40 millimeters x6 meters of footpath) coating machine, horizontal plating 2 meters of room diameter, 7 meters of x long, this type coating machine is all 30--50 electric arc target
Position, be placed in plating chamber outer wall on, into stove workpiece transmitting target plating material plasma, outer surface of workpiece deposit film forming or
Outer surface of workpiece plating material (such as Ti) and reaction gas (such as N) synthesis compound film (TiN).These type Technical comparings are ripe,
But it is required that on the inner wall of large tank, with the filming equipment of vacuum cathode arc plating TiN film, at home and abroad there is no reports.
The content of the invention
In terms of comprehensive, in order to satisfactorily resolve large tank inner wall vacuum coating problem, Novel coater should have as follows
Feature：(1) during plated film, the inner cavity of plated large tank needs to vacuumize；(2) due to needing the plated film in inner tank wall, plating
During film, arc source will be mounted on the in vivo support of large tank, and connecting the water, electricity, gas of arc source will introduce in tank body
Chamber；(3) set-up mode of arc source will can also complete the elevation angle plated film of large tank arc capping cover；(4) tank body internal diameter has more
Kind of size, when arc source plated film, will adapt to these change in size；(5) tank body height is there are many size, and when arc source plated film also will
Adapt to the variation of this height.These requirements, existing coating machine can not all be realized.
The arc source of existing coating machine is all integrally fixed on Vacuum Deposition chamber outer wall, and this Novel coater requirement electric arc
Source is mounted on the indoor support of Vacuum Deposition, and Vacuum Deposition room will be introduced by connecting the water, electricity, gas pipeline of arc source.Because of electric arc
Source will complete the circumferential plated film of inner tank wall, different inner diameters, the plated film of different height tank body and realization elevation angle plated film, institute
With, necessarily be a movement parts.Matter of utmost importance of the present invention solves the water, electricity, gas of arc source in this coating machine Vacuum Deposition room
Connection and sealing problem when circuit is drawn.
The goal of the invention of the present invention, which is to provide one kind, to be solved, the indoor electric arc target of Vacuum Deposition, water,
When electricity, gas circuit are drawn, connection and sealing problem, large tank inner wall plated film vacuum cathode arc coating machine.
The goal of the invention of the present invention is achieved through the following technical solutions：A kind of large tank inner wall plated film vacuum cathode
Arc coating deposition machine, including rack, chassis, electric arc source component and support；
The chassis is supported by the rack and is horizontally disposed with, and the chassis is used for close with the openend of the large tank
Envelope docking, forms the interim plating room using the large tank as Vacuum Deposition chamber outer wall, and the support is erected at the chassis
Center, the electric arc source component are mounted on the support, and front end is electric arc target, and target surface is towards in the large tank
Wall, the electric arc source component include arc target assembly and arc target bearing assembly, and the arc target assembly passes through the arc target bearing assembly
On the support, the arc target assembly includes more than one described electric arc target, further includes an arc target mounting base, institute
Arc target mounting base is stated as a closed case, the electric arc target is sealingly mounted on the end face of the closed case, the closed box
Body is communicated with a bellows, and passes through the bellows and reached through the chassis outside stove, so as in the plating interior formation one of vacuum
The antivacuum passage that item is in communication with the outside, the water, electricity, gas circuit of the electric arc source component is from described in closed case warp
Passage draws outside stove to be connected with corresponding portion.
The present invention forms interim plating room using workpiece large tank to be plated as Vacuum Deposition chamber outer wall, and electric arc source component is mounted on
It plates on indoor support, above-mentioned requirement (1) to large tank coating machine, (2) can be met.And the present invention is this in vacuum
The indoor open to atmosphere antivacuum passage of one company of setting of plating, it is ingenious and simply solve as far as possible then using the pathway lead
In above-mentioned requirements (2) in vacuum area the water, electricity, gas circuit of electric arc source component connection and sealing problem.
The support is swivel mount component, its rotatory sealing is mounted on the chassis, and the coating machine further includes
Driving mechanism and transmission mechanism, the driving mechanism is connected by the transmission mechanism with the swivel mount component, described in driving
Swivel mount component rotates and the electric arc source component thereon is driven to rotate, and the another driving mechanism passes through the biography
Motivation structure drives the electric arc source component to make elevating movement, and rises towards the large tank in the electric arc source component
During top, the electric arc source component front end is driven to be steeved as high-low plate around fulcrum rotation, the arc with the large tank
Shape capping cover is opposite.Driving mechanism drives the rotation of swivel mount component that electric arc source component is driven to rotate by transmission mechanism
Movement, the rotary motion of electric arc source component, it can be achieved that electric arc target to the circumference plated film of inner tank wall, driving mechanism passes through transmission
Mechanism drives electric arc source component oscilaltion campaign, it can be achieved that plated film to inner tank wall different height, electric arc source component plated film
When lifting and rotary motion, make coating uniform, and can reduce arc source arrangement density, while also form follow-up function expand
The basis of exhibition such as enables the invention to plating different height, the tank body of different-diameter.And the high-low plate fortune that electric arc source component front end is steeved
The plated film, it can be achieved that tank body arc capping cover is moved, so that coating machine of the present invention is met the requirements (3).The swivel mount component
It is upper to be attached to copper drag chain, the bellows etc. on the drag chain, when the arc source component movement, the bellows
It is moved with the drag chain, drag chain play the guiding role to the movement of the bellows.
The arc target bearing assembly is scalable with closer or far from inner tank wall, during so as to adjust the arc target assembly plated film
Target-substrate distance, to adapt to the plated film of different-diameter tank body, so that coating machine of the present invention is met the requirements (4).
The arc target bearing assembly includes arc target holder, target Weight plate, two arc target supporting rack anchor ears, arc target supporting rack and two
Branch arc target cover stretcher bar, the arc target holder both sides are respectively equipped with an arc target holder casing, and two arc target covers stretch supporting
Bar is arranged side by side, and front end is connected the arc target mounting base, after rear end is first each passed through an arc target supporting rack anchor ear, then divides
It is not inserted in the arc target holder casing of the arc target holder one side, the arc target supporting rack anchor ear passes through the arc target supporting rack
It is fixed on the arc target holder, the arc target holder casing is equipped with to position the tightening knot of the arc target cover stretcher bar
Structure, the target Weight plate are mounted on the tail end of the arc target holder, position-adjustable, with balance arc target holder other end target arc group
The weight of part makes the holding of electric arc source component horizontal；The arc target holder is hinged on by horizontal hinge shaft on the lifting platform.
There are one the arc target assemblies, electric arc target dislocation arrangement in two separate ranks in the arc target mounting base.Only set
An arc target assembly is put, electric arc target concentrated setting, beneficial to the introducing for arranging its pipeline, and the dislocation of two row electric arc targets is arranged, then is more had
It is uniform beneficial to plated film.Also, the driving mechanism drives the electric arc source component on the swivel mount component to make 360 degree
Rotating campaign, that is, i.e. reversion resets after being rotated by 360 °, to ensure that the pipeline for importing plating room is not wound.The present invention by using
Photoelectric sensing device assembly monitors the movement of the swivel mount component, to realize to described 360 degree of positive and negative transhipments of electric arc source component
Dynamic control.
As preferred embodiment, the structure of the swivel mount component is：The swivel mount component include swivel mount,
Lifting platform, turntable, rotation axis and limiter, the swivel mount are a vertical support, it is fixed on described turn by the turntable
On moving axis, the rotation axis is then mounted on to rotatory sealing chassis center and is pierced by；
The lifting platform installs the electric arc source component for activity, is mounted on the swivel mount, can be along the rotation
Pivoted frame raising and lowering, the limiter is mounted at the top of the swivel mount, when the lifting platform makees ascending motion, close to institute
When stating at the top of swivel mount, the limiter is contacted with the tail end of electric arc source component on the lifting platform, pushes the arc source group
The tail end of part continues to rise with the lifting platform, and the limiter makes the front end of the electric arc source component as high-low plate
It steeves around fulcrum rotation, it is opposite with the arc capping cover of the large tank；
The driving mechanism includes the first driving mechanism and the second driving mechanism, and the transmission mechanism includes the first transmission
Mechanism, the second transmission mechanism, lifting platform transmission shaft and the 3rd transmission mechanism；
First driving mechanism by first transmission mechanism, be pierced by the chassis the rotation axis it is outer
End is connected, the first driving mechanism by the way that the rotation axis is driven to rotate that the swivel mount is driven to rotate, the swivel mount with
It is formed between the turntable there are one the non-vacuum chambers with its peripheral Vacuum Deposition room isolation, second driving mechanism is installed
In the chamber, it is mounted in the cavity wall of the non-vacuum chambers and is pierced by the lifting platform transmission shaft rotatory sealing, it is described
Second driving mechanism is connected by second transmission mechanism with the lifting platform transmission shaft, drives the lifting platform transmission shaft
Rotation, the lifting platform transmission shaft cross over non-real dead zone to vacuum area, the power of second driving mechanism are transferred to vacuum
Then area is connected by the 3rd transmission mechanism with the lifting platform, the lifting is driven by the 3rd transmission mechanism
Platform makees elevating movement along the swivel mount.The above embodiment has following features：It realizes non-real dead zone to very using shaft
The power of dead zone transfers, and the dynamic sealing technology of shaft is ripe, and it is convenient to realize；And in the embodiment, rotary motion and lifting are transported
It is dynamic, it is controlled respectively by two sets of independent driving mechanisms, speed governing is convenient.The rotation axis is a tubular hollow shaft, described antivacuum
Chamber is fixed together based on rotation axis, turntable and swivel mount by being connected outside the hollow rotation axis and stove, three it
Between without relative motion, so introducing the pipeline in stove, preferentially introduced by the inner cavity of the hollow rotation axis.
In order in the case where not adjusting the parameters such as swivel mount component height, adapt to the tank body plated film of different height, meet
It is required that (5), coating machine of the present invention is further included for compensating height, tank body height is enable to be adapted to the swivel mount component attached
Addition is blue, and the additional flange one side is used to dock with chassis sealing, and another side is provided with sealing ring, for it is corresponding
The openend sealing docking of the tank body of diameter.
Compared with the prior art, the present invention has the advantages that：
1) present invention is dexterously by the use of large tank workpiece as the outer wall of vacuum film coating chamber, by the way that tank body is buckled in plating
On the vaccum seal ring on film machine chassis, interim vacuum film coating chamber is built, the cost for saving structure large vacuum coating room is opened
Branch；The electric arc target of arc target assembly of the present invention is sealingly mounted in the arc target mounting base of closed case formula, and closed case passes through ripple
Outside pipe connection stove, in the antivacuum connection path that the indoor formation one of the plating of vacuum is in communication with the outside, the cable of electric arc target, control
Circuit processed, compressed air hose, water pipe are exported by the connection path and are connected with corresponding portion outside stove, are dexterously solved and are passed through
The electric wire being kept in motion, water pipe, the sealing problem of tracheae in vacuum environment；
2) present invention is supported on it swivel mount group being erected on stove axis using electric arc source component built in vacuum drying oven
On part, realize the circumference plated film of inner tank wall using the rotation of swivel mount component, realized using its elevating movement to inner tank wall
The plated film of different height recycles high-low plate principle, by ingehious design, electric arc source component is allowed to move to close to large tank
When at the top of body, front end is steeved, opposite with the arc capping cover of large tank, realizes the elevation angle plated film to tank body arc capping cover,
The present invention can be not only realized to tank inner surface without dead angle plated film, but also can ensure the uniform of coating, reduce arc source arrangement
Density；
3) target-substrate distance of the present invention is adjustable, and the present invention is made to be suitable for the plated film of the tank body of sizes internal diameter；The present invention is separately set
For compensating the additional flange of height, make, in the case where not adjusting the parameters such as swivel mount component height, just can simply adapt to tank
The variation of body height；The present invention only sets an arc target assembly, and electric arc target is installed concentratedly, and wiring is simple；360 degree of arc target assembly
Positive and negative rotation is ensureing that coating is uniform, circuit winding problem relative simplicity；
4) cooperation of swivel mount component of the present invention and driving mechanism and transmission mechanism can easily realize power from non-real
Dead zone to vacuum area transmission, so as to drive the electric arc source component in vacuum area, rotate in the horizontal plane and
Make elevating movement on vertical direction, and the rotary motion and elevating movement are controlled respectively by two sets of independent driving mechanisms, from
And realize that speed governing is convenient；The invention described above can easily realize that power, to the statement of the transmission of vacuum area, is based on from non-real dead zone
Following basis：First driving mechanism of the invention and the second driving mechanism power are logical from non-real dead zone to the transmission of vacuum area
Shaft realization is crossed, and the dynamic sealing of shaft has been very ripe technology, it is easily operated.
Description of the drawings
Fig. 1 is the structure diagram of large tank inner wall plated film vacuum cathode arc coating machine of the present invention；
Fig. 2 is enlarged drawing, displaying rack connection insulation system at I in Fig. 1；
Fig. 3 is enlarged drawing at II in Fig. 1, shows the structure of outer motor transmission part；
Fig. 4 is II-I place's enlarged drawing in Fig. 3, shows the structure of outer gearing；
Fig. 5 a are the side view of II-II place's turntable supporting roller component in Fig. 3；
Fig. 5 b are the top view of II-II place's turntable supporting roller component in Fig. 3；
Fig. 6 is II-III place's enlarged drawing in Fig. 3, and displaying turntable leans on the structure of position pinch roller；
Fig. 7 a are the front view of swivel mount；
Fig. 7 b are the side view of swivel mount；
Fig. 8 is the enlarged drawing at III in Fig. 7 a, displaying support target bearing position；
Fig. 9 is the enlarged drawing at IV in Fig. 7 b, shows the lifting transmission device of lifting platform；
Figure 10 is the bottom view of IV-I place's lifting platform regulating wheel in Fig. 9；
Figure 11 is the structure diagram of the leading block of IV-II place's lifting platform in Fig. 9；
Figure 12 is the enlarged drawing at V in Fig. 7 a, shows the structure of limiter；
Figure 13 is the enlarged drawing at VI in Fig. 7 a, the structure of displaying lifting platform transmission auxiliary chain wheel；
Figure 14 a are the structure diagram of electric arc source component at VII in Fig. 7 b；
Figure 14 b are the top view of electric arc source component in Figure 14 a；
Figure 15 is the enlarged drawing at VII-I place in Figure 14 a, shows arc target group rotating mechanism；
Figure 16 a are the enlarged drawing at VIII in Fig. 7 a, show the structure of lifting platform transmission device；
Figure 16 b are the side view of Figure 16 a；
Figure 17 is the enlarged drawing at VIII-I place in Figure 16 a, shows the structure of lifting platform shaft portion；
Figure 18 is the enlarged drawing at VIII-II place in Figure 16 a, shows the structure of lifting platform limiting device；
Figure 19 is the structure diagram of VIII-III place's lifting platform drive chain contact roller in Figure 16 b
Figure 20 is the structure diagram of the other embodiment of swivel mount component.
Specific embodiment
Fig. 1 is the positive elevational view of coating machine, shows film coater main body structure.Rack 1 supports the main body of coating machine, stove
Body platform 2 belongs to the chassis of vacuum drying oven, and workpiece to be plated is chemical tanks 2-4, it is a kind of cylinder of the arc capping cover with evagination
Shape large tank, it is tipped upside down on furnace body platform 2, and the position that furnace body platform 2 corresponds to chemical tanks 2-4 opening edges edge is equipped with vacuum
Seal groove and O-ring seals, chemical tanks 2-4 become the furnace wall of furnace body, and the coating of ion plating is just plated on chemical tanks 2-4 inner walls.
In order to adapt to the chemical tanks 2-4 plated films of different-diameter, furnace body platform 2 is equipped with the seal groove and O-ring seals of different-diameter；
In order to adapt to the chemical tanks 2-4 plated films of different height, the band sealing of different height can be padded on 2 corresponding position of furnace body platform
The additional flange 2-5 of circle, to compensate the difference in height of different chemical tanks 2-4.
Fig. 2 is the partial enlarged view at I in Fig. 1, shows the insulation processing mode that rack 1 connects.Furnace body platform 2 connects
Bearing support weldering is connected on rack connecting welding plate 3, and framework connecting plate 1-1 is connected with rack 1, and rack connecting welding plate 3 and
Isolated between framework connecting plate 1-1 by rack insulation board 4, foregoing three is connected with hex bolts 7.7 sets of hex bolts
Equipped with rack insulator 5 and rack insulator cap 6, to ensure connection insulation.
Fig. 3 is the partial enlarged view at II in Fig. 1, shows outer motor transmission part.It includes two parts, and one is drive
Dynamic motor and speed reducer part (corresponding first driving mechanism), secondly being outside gear mechanism (corresponding first transmission mechanism).Driving
Motor includes motor with speed reducer part, motor is fixed and regulating device, driving belt and drive, speed reducer and speed reducer
Fixed mechanism, speed reducer output drive gear etc..Driving motor includes with speed reducer part：Band footing is without flange motor 11, V
Type band 12, driving pulley 13, speed reducer 20.Motor 11 is rotated drives driving pulley 13 to rotate by V-type band 12, so as to
Driving speed reducer 20 operates.Speed reducer axle sleeve 14 is stretched out on the top of speed reducer 20, is cased with drive pinion 15 thereon, their groups
Into the output terminal of speed reducer 20.Motor 11 is fixed on by hex bolts 10 on motor fixing plate 9 and motor adjustable plate 8, and electric
Machine adjustable plate 8 is connected in rack and strengthens on seamless pipe 1-3.Speed reducer 20 is connected in speed reducer by the insulation of hex bolts 21 and consolidates
On fixed board 24, hex bolts 21 is cased with speed reducer insulator 22, is separated with and subtracts between speed reducer base and speed reducer fixed plate 24
Fast machine felt pad 23, speed reducer fixed plate 24 are fixed on rack reinforcement side and lead on 1-2, the drive pinion of 20 top of speed reducer
15 are engaged with the transmission gear wheel 40 of 27 lower end of rotation axis, as shown in figure 4, so as to which rotation axis 27 be driven to rotate, rotation axis 27
Upper end is connected turntable 26, and swivel mount 70 is fixedly supported upon on turntable 26 (referring to Fig. 7 a), a left side for top extension in rotation axis 27
Side skirt is equipped with the bellows 16 of connection target cover non-real dead zone, connect the cable of electric arc target, pilot, air-pressure duct,
Cooling water pipe pierces into 16 inner cavity of bellows and is sent into the non-real dead zone of target cover, and the upper top cover of 27 upper extension of rotation axis is wiring
Flange 17, the right side skirt of 27 upper extension of rotation axis is by interior 19 link changing-over blind plate of hexagonal round head screw, 18 (this figure
Show it is installation condition at equipment).Under normal operating conditions, the right side skirt of 27 upper extension of rotation axis should connect bellows
(not marking), the bellows are connected in the swivel mount air transmission cabin shown in Figure 16, allow connection air in the cabin, and the cabin
The equipment dynamics such as interior servomotor conducting wire and signal control line import (not marking) from the ripple tube cavity.Rotation axis 27
Outer wall by dynamic sealing and static seal insulation supporter on furnace body bottom plate 2-2,2-1 be furnace body vacuum coaming plate, 2-3 is furnace body
Bottom plate reinforcing rib, furnace body bottom plate 2-2 are tightly connected by the interior exterior feature of the furnace body platform 2 above furnace body vacuum coaming plate 2-1 and its,
Form complete vacuum furnace hearth plate.
Fig. 4 is the partial enlarged view at II-I place in Fig. 3, is outer gearing.It shows rotation axis 27 and surrounding component
Relation.Rotation axis 27 is a tubular hollow shaft, and outer wall is fixed on by dynamic and static sealing on furnace body bottom plate 2-2, i.e. rotation axis
27 epimeres are in vacuum drying oven, and 27 hollow cavity of rotation axis connection air.Concrete structure is as follows：By hex bolts, 25 turn
Disk 26 is fastened on the upper top of rotation axis 27, and the bottom surface of turntable 26 is placed on thrust ball bearing with flat seat 30, and thrust ball axis
It holds 30 to be placed in plane axis bearing 33, and plane axis bearing 33 is placed on plane bearing insulating flange 34, and 33 and 34 by hexagonal
Bolt 31 passes through plane axis bearing insulator 32, is fixed on furnace body bottom plate 2-2.Thrust ball bearing with flat seat 30, which carries, to be turned
Disk 26 realizes plane rolling smooth rotation.27 stage casing of rotation axis is set with drive bearing block 36, between the upper end and rotation axis 27
Deep groove ball bearing 45 is set with, drive bearing block 36 has convex buttstrap to hold entire deep groove ball bearing 45, and rotation axis 27 has outside
Convex shoulder presses against 45 inner bearing ring, and separately transmission trim ring 29 is fixed on drive bearing block 36 with hex bolts 28, makes zanjon
Ball bearing 45 positions completely.Outside framework oil seal 47 is set between the stage casing of drive bearing block 36 and rotation axis 27, realizes that vacuum moving is close
It seals, suit is driven spacer ring 46, deep groove ball bearing 45, transmission trim ring 29 to 47 lower section of outside framework oil seal successively, and with hex bolts, 28 pass
Dynamic pressure circle 29 is fixed on drive bearing block 36, transmission 39 /V deep groove ball bearing 45 of washer is separately mixed again, above-mentioned each component
Positioning.With hex bolts 38 furnace body is fastened on drive bearing block 36, by being driven insulating flange 35 through transmission insulator 37
On bottom plate 2-2.27 lower face of rotation axis is connected with hex bolts 25 and is driven gear wheel 40.Sensor 43 passes through transmission sensors
Fixed plate 44 is fixed on drive bearing block 36, is stationary.Reflecting plate 42 is close to be driven reflecting plate fixed plate 41 again admittedly
It is connected on transmission gear wheel 40, reflecting plate 42 is rotated with transmission gear wheel 40, and per revolution sends sensor 43
Signal reflex once, prompts the action of the coating machine next step progress.
Fig. 5 a, 5b are the side view of II-II place's turntable supporting roller component and top perspective view in Fig. 3.It is with uniformly distributed 8 balls
The wheel rim of bearing carries 26 lower plane of turntable by outer circle, ensureing 26 smooth rotation of turntable.Turntable supporting roller component includes support roller
Seat, supporting-roller shaft, zanjon bearing, support roller insulating part and dust guard and fastener composition.Its concrete structure is as follows：Supporting roller base 48
Be in the middle part of two long sides of one piece of rectangle flat underside, symmetrically two pieces of support plates of vertical welding are formed, the top perforate of its upright, supported plate,
From one end, perforate penetrates supporting-roller shaft 54, in supporting-roller shaft 54 be set with two deep groove ball bearings 56, left and right respectively with three support rollers every
Circle 55 separates, and supporting-roller shaft 54 penetrates other end support plate perforate, shaft end head 57 /V of circlip for shaft, supporting roller base bottom again
Plate passes through support roller dust cap 50, support roller insulator 51 with hex bolts 49, then passes through support roller dust cover 52, supporting roller base insulation board
53 fix with furnace body bottom plate 2-2.
Fig. 6 is the partial enlarged view at II-III place in Fig. 3, and position pinch roller is leaned on for turntable.It is located at the upper plane of turntable 26
Outer circumferential edge is along upper, including multiple uniformly distributed by position pinch roller, for the upper plane /V of turntable 26, it is not allowed to beat and put down upwards
Steady rotation, turntable lean on position pinch roller assembly to include leaning on position wheel fixed seat, take turns spacer ring, deep groove ball bearing etc. by position wheel shaft, by position, and two
67 sets of deep groove ball bearing is through by position wheel shaft 69, being separated, being leaned on by position wheel spacer ring 1 between two deep groove ball bearings 67
The nearly deep groove ball bearing 67 by position wheel fixed seat 63 separates /V with by position wheel spacer ring 2 66, with hex bolts 65 by leaning on position
Wheel washer 64 by position wheel shaft 69 be secured transverse to by position wheel fixed seat 63 its upright, supported plate on.Two deep groove ball bearings 67
It is pressed in plane on turntable 26 and plays /V stabilization.It is L-type weldment by position wheel fixed seat 63, a bottom plate is pressed in takes turns by position
Dust cover 59 and by position wheel insulation board 58 on, with hex bolts 62 pass through by position wheel dust cap 61 and by position take turns insulator 60,
It is fastened on by position wheel fixed seat 63 on furnace body bottom plate 2-2.
Fig. 7 a, 7b are the view of the positive facade of swivel mount and side elevation.Swivel mount 70 is fastened on turntable 26 by hex bolts 75
Center, rotate and rotate in company with turntable 26, swivel mount 70 is several meters of high vertical supports, and lifting platform 73 is movably arranged on rotation
On pivoted frame 70, it can be rotated along vertical support raising and lowering, and in company with swivel mount 70.It is configured on swivel mount 70：Support target axis
Hold position III, lifting transmission device IV, limiter V, lifting platform transmission accessory whorl VI, electric arc source component VII and lifting platform transmission device
VIII etc..The functional unit of wherein most critical is exactly electric arc source component, and ion film plating is realized by electric arc target transmitting plasma, and
It is cooperation electric arc source component to plated chemical tanks 2-4 inner wall plated film change in location that other assemblies, which are all, realize electric arc target lifting,
Rotation, the elevation angle and electric arc target opposed inner walls carry out plated film apart from telescopic adjustment etc. and set.Lifting platform 73 is to pass through double strand chain
Lifting is realized in the pulling of item 72, and 74 be chain head, it is fixed on lifting platform 73.With copper drag chain 71 on swivel mount 70, connect
It is attached to it to connect the bellows of electric arc source component etc., when lifting platform 73 moves, these bellowss move just with copper drag chain 71
There is guiding.
Figure 14 a, 14b be VII in Fig. 7 b at electric arc source component relevant view enlarged drawing, it include arc target assembly and arc target
Bearing assembly.Arc target assembly includes several electric arc targets, further includes an arc target mounting base, and arc target mounting base is a closed case, by
Arc target cover and arc target flange are formed.Arc target assembly is located on the right of Figure 14 a, and there is arc target flange 119 in the right front ends face of arc target cover 115,
It is one piece of electric arc target installing plate, is sealingly secured to hex bolts 118 on 115 right front ends face of arc target cover, is divided to or so two thereon
The target position of row short transverse dislocation, three electric arc target 119-1 of each row installation.There is the bellows that sealing weldering connects in 115 lower section of arc target cover
(not shown), 115 inner cavity of arc target cover connect air by bellows, the power supply of electric arc target 119-1, water supply, supply conducting wire and
Flexible duct is imported along ripple tube cavity.Arc target bearing assembly is supported by arc target cover stent, arc target stent Weight plate, arc target
The compositions such as frame, arc target supporting rack anchor ear, target group runner assembly.Back side or so is close to two arc target covers and stretches branch after arc target cover 115
Bar 115-1 is held, it is support through arc target supporting rack anchor ear 117 by the arc target supporting rack 116 being connected with above-mentioned anchor ear, arc target
The other end of cover stretcher bar 115-1 is inserted in the arc target holder casing 112-1 of arc target holder 112, when adjusting distance of stretch out and draw back
Afterwards, then with hex bolts 114 through above-mentioned 115-1 and 112-1, it is not allowed to rotate and shift, then is tightened with hex bolts 113
Positioning, the tail end of arc target holder 112 equipped with target Weight plate 111, its adjustable position to balance the weight of other end target arc component,
Make the holding of electric arc source component horizontal.There is figure further to show how arc target holder 112 is connected on lifting platform 73 below.
Figure 15 is the partial enlarged view at VII-I place in Figure 14 a, shows the rotational coupling mechanism of electric arc source component.Arc target cover
The arc target cover telescopic rod 115-1 at 115 back sides both sides is inserted in the arc target holder casing 112-1 of arc target holder 112, arc target holder casing
Link block 112-2 is welded with below 112-1, arc target holder anchor ear 1 is fastened on above-mentioned link block with hex bolts 121
On 112-2, then with interior six point cylindrical head bolt 122 arc target holder anchor ear 2 123 is fastened on arc target holder anchor ear 1, it is above-mentioned
Chuck target group rotation axis 79 between two anchor ears.
Fig. 8 be III in Fig. 7 a at enlarged drawing, show arc target holder on target group rotation axis and its bearing arrangement.Arc target holder
112 are connected on the two groups of arc target holder anchor ears 1 in left and right and arc target holder anchor ear 2 123, pass through upper and lower two arcs target holder anchor ear
120 and 123 are fixed in target group rotation axis 79.79 left and right ends of rotation axis by symmetrical bearing and bearing block support, are realized
It rotates.The structure of its bearing and bearing block；Lifting platform 73 erects two pieces of support plate 73-1 in left and right corresponding position, with hexagonal spiral shell
Bolt 76 is fixed on target rotation axis bearing 77 on the corresponding hole positions of its upright, supported plate 73-1,79 both ends of target group rotation axis difference
Set is penetrated on two deep groove ball bearing 77-1 in left and right ends target rotation axis bearing 77, between two deep groove ball bearing 77-1
It is equipped with target rolling bearing spacer ring 80, deep groove ball bearing 77-1 78 /Vs of circlip for hole of shaft end.
Fig. 9 is the partial enlarged view at IV in Fig. 7 b, shows the lifting transmission device of lifting platform.Lifting platform 73 is double by 16A
The chain first 74 of row chain item 72, which locks, to be fixed together, and is engaged 16A double strand chains 72 by drive sprocket 142, pulls 73 liters of lifting platform
Drop.
Figure 10 is that the lifting platform at IV-I place in Fig. 9 adjusts the bottom view of wheel assembly, and lifting platform, which adjusts wheel assembly, includes lifting
Platform regulating wheel, two deep groove ball bearings, lifting platform adjust wheel shaft, axis fixing plate etc., and lifting platform adjusts the upper and lower end of sprocket wheel 91
Respectively one deep groove ball bearing 90 of suit, deep groove ball bearing 90 are sleeved on lifting platform and adjust on the leading portion thin footpath part of wheel shaft 89 in face,
There is 92 /V of circlip for shaft in shaft end, and it is thick that the deep groove ball bearing 90 in lower face is against lifting platform adjusting 89 hypomere of wheel shaft
On the ring shoulder in footpath, lifting platform is adjusted in the hole of 89 lower end of wheel shaft insertion axis fixing plate 89-1, and is welded and be connected.With hexagonal spiral shell
Axis fixing plate 89-1 is secured transverse on the riser of lifting platform 73 by bolt 93, and lifting platform is allowed to adjust sprocket wheel 91 and 16A double strand chains
72 occlusions are appropriate to compress 72, makes chain tension moderate, lifting platform 73 is made to lift more steady.
Figure 11 is the partial enlarged view at IV-II place in Fig. 9, is the leading block of lifting platform 73.The component mainly includes rising
Platform pulley, deep groove ball bearing, lifting platform pulley spindle, lifting platform pulley base and lifting platform pulley sleeve etc. drop.Lifting platform pulley spindle
85 framves are on two riser through holes of lifting platform pulley base 81,83 center suit deep groove ball bearing 84 of lifting platform pulley spindle, the zanjon
The fixed dress lifting platform pulley 83 in 84 outer ring of ball bearing, and with 88 /V of circlip for hole.The inner ring and liter of deep groove ball bearing 84
Positioned between drop platform pulley base 81 with lifting platform pulley sleeve 87,85 end of lifting platform pulley spindle by 86 /V of circlip for shaft,
Lifting platform pulley base 81 is welded with flat underside, it is fixed on the flat underside of lifting platform with hexagon socket cap head screw 82.It adopts
With two sets of leading block components, pulley is allowed to bear against two that erect i shaped steel on swivel mount 70 in orthogonal
On the side wall in direction, i.e. two groups of leading block components are installed into right angle orientation each other, and one group allows pulley against the center of I-steel
On wall surface, another group allows pulley on the side wall vertical with center wall surface, held stationary when lifting platform 73 can so moved
It does not swing.
Figure 12 is the partial enlarged view of limiter at V in Fig. 7 a, for electric arc source component to be made to face upward head movement.The device is
A frame mounted on 70 top of swivel mount, frame lower end is equipped with deep groove ball bearing and vicarious set, when lifting platform 73 rises to
During this position, tail end and the said frame bottom end bearing component activity of the arc target holder 112 being movably arranged on lifting platform 73 connect
It touches, lifting platform 73 is pulled when continuing to rise, and the afterbody of arc target holder 112 cannot be risen again by said frame limitation, but lifting platform
73 also rise after mystery, then the target group rotation axis 79 on arc target holder 112 also continues to rise, because the afterbody of arc target holder 112 is obstructed, only
It can rotate to adapt to by 79 opposite end bearing of target group rotation axis, be so equivalent to 115 part of arc target cover and leave original level
It lifts to vertical angle, it can be achieved that towards tank body top cover portion plated film position.Limiter, which includes rotating, adjusts fixed seat 99, it is frame
Rack and panel construction, the upper end welding, which is connected to rotate, adjusts fixed seat connecting plate 99-1, it is a horizontal Beam, with hex bolts 100
It and swivel mount top plate 79-1 are fixed together.The two armed lever lower end of left and right for rotating adjusting fixed seat 99 is respectively arranged with rotation tune
Nodal axisn bearing assembly, it rotates the rotation adjustment axis 97 of 99 armed lever end of adjusting fixed seat by being set on and is sleeved on the axis both ends
Deep groove ball bearing 95 form, fixed rotate in the periphery of the outer ring of deep groove ball bearing 95 adjusts bearing holder (housing, cover) 94, deep groove ball bearing 95
There is 98 /V of circlip for hole on the outside of outer ring, there is 101 /V of circlip for shaft in shaft end, in the inside of deep groove ball bearing 95
Circle and rotation have rotation to adjust 96 /V of axle sleeve between adjusting fixed seat 99.
Figure 13 is the partial enlarged view at VI in Fig. 7 a, and auxiliary chain wheel is driven for lifting platform, it is mating with drive sprocket 142,
Form the chain wheel driving mechanism of 16A double strand chains 72.Lifting platform transmission chain wheel assembly mainly includes：Lifting platform revolute pair chain
Wheel shaft, lifting platform transmission sprocket wheel axle bed, lifting platform transmission auxiliary chain wheel, deep groove ball bearing and its limit component etc..With interior hexagonal
110 or so two lifting platform transmission chain pulley seats 103 of fillister head screw are projecting to be fastened on swivel mount top plate 70-1, lifting platform
107 both ends of transmission wheel shaft are set on the deep groove ball bearing 105 in the axis hole of two lifting platform transmission chain pulley seats 103 of left and right,
The middle part of lifting platform transmission wheel shaft 107 is set with lifting platform transmission auxiliary chain wheel 102, is connected with key between them, left and right lifting platform
Two deep groove ball bearings 105 are set in transmission chain pulley seat 103, with 104 phase of lifting platform transmission accessory whorl spacer ring between them
Every, one end inner ring /V of the circlip for shaft 108 to deep groove ball bearing 105 of lifting platform transmission wheel shaft 107, zanjon
109 /V of circlip for hole of the outer ring of ball bearing 105.Between deep groove ball bearing 105 and lifting platform transmission auxiliary chain wheel 102
There is lifting platform transmission sprocket sleeve 106 to position.
Figure 16 a, 16b are the partial enlarged view and side view cutaway drawing at VIII in Fig. 7 a, show lifting platform transmission device.It should
Transmission device is placed in swivel mount air transmission cabin, and connecting rotation axis 27 in the bottom by bellows (not marking) pushes up
The skirt in portion connects air by the hollow inner cavity of rotation axis 27.Power line and signal wire etc. are imported from the ripple tube cavity
(not shown).The transmission device mainly includes the transmission on servomotor and its fixing component, speed reducer, motor and speed reducer
Wheel and they between with transmission belt, lifting platform transmission shaft component, speed reducer output chain gear and driving chain, mounted in lifting platform pass
Auxiliary chain wheel, compression wheel assembly, lifting platform limit switch assembly on moving axis etc..Figure 16 shows that servomotor and speed reducer are all located
In in the air transmission cabin of swivel mount, 128 be servomotor, and 129 be servo motor seat, and pedestal is pressed in servo motor seat insulation
On plate 134.By being installed with the hex bolts 132 of servo motor seat insulator 133, servomotor 128 is fixed on air transmission
On bay floor 70-2, hex bolts 132 is screwed in servomotor and adjusts on fixed block 135, and is laterally against servo motor seat 129
On, servomotor front and back position is adjusted.When servomotor 128 rotates, servomotor synchronous pulley 130 drives synchronous belt 131
Movement, it drags speed reducer synchronous pulley 124 and rotates, that is, speed reducer 126 is driven to operate, speed reducer 126 is also secured at rotation
Frame air is passed on bay floor 70-2.The output shaft fixed connection speed reducer sprocket wheel 125 of speed reducer 126, it is double that it drags speed reducer 16A
Chain 127 drives the speed reducer auxiliary chain wheel 152 being connected on lifting platform transmission shaft 139 to rotate, and double strand chain 127 is removed around upper
Outside the speed reducer sprocket wheel 125 and speed reducer auxiliary chain wheel 152 stated, also sprocket wheel 156 is compressed around speed reducer chain, above-mentioned three
Sprocket wheel layout triangular in shape compresses sprocket wheel and is used for adjusting the tensile force that speed reducer 126 exports double strand chain 127.
Figure 17 is the partial enlarged view at VIII-I place in Figure 16 a, it shows the structure of lifting platform transmission shaft component.It is main
Including：Lifting platform transmission shaft, speed reducer auxiliary chain wheel, band plummer block housing bearing, lifting platform transmission shafts bearing assembly and lifting platform transmission
Sprocket wheel etc..139 middle part of lifting platform transmission shaft is set with speed reducer auxiliary chain wheel 152, and speed reducer auxiliary chain wheel 152 is fixed with flat key
It is fixed on lifting platform transmission shaft 139, and with two interior hexagonal flush end holding screws 151.On lifting platform transmission shaft 139 from
152 or so a distance of speed reducer auxiliary chain wheel is set with two band plummer block housing bearings 148, with hex bolts 149 that band is vertical
Formula seat bearing 148 is fastened on lifting platform drive bearing block 1, and lifting platform drive bearing block 1 is connected in air biography
On dynamic cabin roof 70-2.Air transmission cabin two is passed through by sealed bearing assembly by left and right ends portion on lifting platform transmission shaft 139
Side wall 70-2, is stretched into vacuum drying oven.Bearing block fixed block 70-3 is welded on the inside of the vacuum drying oven of wing bulkhead, using hex bolts
137 2 136 vacuum sealings of lifting platform drive bearing block (being not drawn into sealing ring) are fixed on bearing block fixed block 70-3.
In lifting platform drive socket 2 136, deep groove ball bearing 145, outside framework oil seal 147, lifting platform drive bearing are sequentially installed from seat bottom
Dottle pin 146, deep groove ball bearing 145 on the end face of bearing block 2 136, compress lifting platform with hexagon socket head cap screw 143 and pass
Moving axis pressure cap 144 positions bearing and realizes 139 dynamic sealing of lifting platform transmission shaft, 139 two axial ends portion of lifting platform transmission shaft
It is connected lifting platform drive sprocket 142 with key, lifting platform transmission shaft gland 141 is fixed on axis in axial end hex bolts 140
On end face, and it is close to the lateral surface of drive sprocket 142, medial surface and the lifting platform drive bearing block two of drive sprocket 142
Between 136 outside deep ball bearing inner race, in be cased on transmission shaft 139 lifting platform drive bearing top cover 138 realize /V.
Figure 18 is the partial enlarged view at VIII-II place in Figure 16 a, it is the descending spacing switching device of lifting platform 73.It leads
Including：/V striker and /V thimble, /V striker fixed seat, the dynamic sealing device of /V thimble, thimble resetting apparatus and
Travel switch etc..Its concrete structure：The upper surface of /V striker fixed seat 162 is welded in admittedly on the lower face of lifting platform 73, /V
M16 nuts 163 are welded in the lower face of striker fixed seat 162 admittedly, and the upper part of /V striker 164 is that one section of screw rod, screw rod are screwed into
M16 nuts enter in /V striker fixed seat 162, are screwed into depth and are adjusted, and the lower part of /V striker 164 is one section of solid weldering
A sleeve in epimere screw rod lower end, which is welded with admittedly hits tactile round block, the direction pair downward of /V striker 164
It answers but and disjunct /V thimble 165./V welded flange 167 is welded in admittedly on the outside of air transmission cabin roof 70-2, and interior six
Position limiting sealed flange seat 166 is connected angle cheese head screw 174 and vacuum sealing is in the upper surface of /V welded flange 167, and interior six
Angle cheese head screw 169 is connected in limit spring sleeve 171 on the lower face of /V welded flange 167, in /V thimble 165
There is annular shoulder in portion, and annular shoulder top is upward through outside framework oil seal 168 and positioning copper sheathing in position limiting sealed flange seat 166
175, set through the limit spring 170 in limit spring sleeve 171, then extends downwardly limit spring sleeve 171 downwards for lower part
Outside, 165 middle part annular shoulder pressure of /V thimble is sitting in top in limit spring 170, can enter in limit spring sleeve 171, limit
Position 165 lower end of thimble is stretched out, and corresponds to the touching wheel of travel switch 172.It positions copper sheathing 175 and realizes that 165 movement of /V thimble is fixed
Position realizes the dynamic sealing of /V thimble 165 with outside framework oil seal 168, is realized with limit spring 170 and releases 165 downlink of /V thimble
It touches and hits the reset after travel switch 172 acts, stroke switch mounting base 173 is connected in lifting platform air transmission cabin roof 70-2
Inside, travel switch 172 are fixed on stroke switch mounting base 173.When lifting platform 73 rises together with /V firing pin assembly one
It rises and rises, when its decline reaches restraining position, /V striker 164 touches /V thimble 165, and 165 downlink of /V thimble is touched
Travel switch 172 touches wheel, then travel switch 172 disconnects 128 corresponding control circuit of servomotor, cuts off 128 downlink of motor
Power supply, motor 128 stall, and lifting platform 73 stops declining.When motor 128 restarts uplink power supply, motor 128 drives lifting platform
73 rise, while firing pin assembly is driven to leave ejector pin component, and the limit spring 170 that /V thimble 165 is compressed is released, pushes away
Dynamic 165 annular shoulder uplink of /V thimble allows /V thimble 165 to reply original state.
Figure 19 is the concrete structure diagram of VIII-III place's lifting platform drive chain contact roller in Figure 16 b, it shows speed reducer
The structure of the contact roller of 16A double strand chains.The driving mechanism of lifting platform transmission shaft 139 is by 126 output shaft of speed reducer
Speed reducer sprocket wheel 125, the speed reducer auxiliary chain wheel 152 on lifting platform transmission shaft 139 is dragged by 16A double strand chains 127, is come
It drives what lifting platform transmission shaft 139 rotated, for reliable transmission, is turned round in 16A double strand chains 127 in way, a set of compression of addition
Wheel apparatus, it mainly includes：Wheel seat is compressed, compress wheel shaft and bearing and compresses sprocket wheel.Lifting platform compress wheel seat 154 be
Weldering connects the structure of two blocks of its upright, supported plates on seat bottom, and the bottom plate for lifting platform being compressed using hex bolts 155 wheel seat 154 is connected
On lifting platform contact roller fixed block 153, which is welded in admittedly on lifting platform air transmission cabin roof 70-2, lifting platform
It compresses wheel shaft 159 to be supported on two its upright, supported plates of lifting platform compression wheel seat 154, and left and right is sleeved on embedded in the support plate
On interior deep groove ball bearing 157, a shaft end 161 /V of circlip for shaft of wheel shaft 159 is compressed in lifting platform.Lifting platform
The middle part for compressing wheel shaft 159 is set with lifting platform and compresses sprocket wheel 156, is connected with flat key and uses interior hexagonal flush end holding screw 160
It is fixed.Lifting platform is compressed between 156 left and right sides of sprocket wheel and the inner ring of deep groove ball bearing 157, has lifting platform to compress axle sleeve
158 /Vs.Lifting platform compresses sprocket wheel 156 against double strand chain 127, and chain 127 is tensioned.
The operational process of coating machine of the present invention
1) operating of equipment moving system checks before plated film：
All kinematic systems are checked before vacuumizing, it is necessary to normal operation：(1) the outer motor transmission system of stove is started, by electricity
Machine drives reduction box, the gear wheel on rotary countershaft stretched out by the output shaft gear occlusion of reduction box out of stove, band turn
Disk transmission shaft rotates, so as to which stove inner rotary table be driven to rotate.The Xuan Zhuan Jia Sui being erected on turntable turn with turntable around stove axis together
It is dynamic, it first rotates forward clockwise, goes at photoelectric position limit device and sense reverse signal, is i.e. reversion, then be inverted to photoelectric position limit counterclockwise
Be changed to rotate forward again at device, Zhou Erfu this.Check nearby upper and lower maintains turntable to put down to disk peripheral to whether /V guide wheel plays
Steady rotary action, live wire, tracheae, the bellows of cooling water pipe have without exception in inspection；(2) lifting platform transmission device is started：
Starting servomotor driving reduction box operating, reduction gearbox output shaft passes through sprocket wheel -- link chain mechanism dragging lifting platform transmission shaft turns
It moves, then duplex chain wheel -- the link chain mechanism of two axial ends in vacuum drying oven is penetrated by the transmission shaft, lifting platform is driven to link together with living
Arc target assembly thereon together, in the case where two groups of guide wheels of orthogonal directions are oriented to, along the upright guide rail of swivel mount on make it is steady
Elevating movement is adjusted when rising to target rotation at the height of position, and the arc target holder afterbody of arc target assembly touches swivel mount upper end
When target rotation adjusts position position-limited wheel (bearing), limiting arc target holder afterbody cannot rise again, and actually lifting platform may proceed to
It rises, then the shaft of lifting platform is driven to rotate, the arc target holder other end, i.e. arc target cover end are pushed up direction and steeved upward；Then, allow
Lifting platform declines, and the shaft reversion of lifting platform, arc target holder gradually recovers to be in a horizontal position together with arc target cover end from elevation angle position, then after
Slowly drop at minimum limit switch and stop declining.The movement Yi of target arc component Sui lifting platforms in the rotation of Sui swivel mounts, Yi
Lifting, movement should flow Chang.(3) according to inner tank wall diameter to be coated, by the supporting rod for the arc target cover that stretches, electric arc target is adjusted
Face reaches suitable target-substrate distance to the distance of tank skin.(4) check that striking pin and the striking contact action of electric arc target surface are suitable
Reliably.More than preparation is confirmed normally, into shove charge operation.
2) chemical tanks shove charge to be plated：Giant chemical tank to be plated is lifted on vacuum furnace hearth plate first, it is that band arc seals
The cylinder on top, its opening edge along tipping upside down on furnace body platform, the position that furnace body platform corresponds to chemical tanks opening edge edge is equipped with
Vacuum-sealing groove and O-ring seals, chemical tanks become the furnace wall of furnace body, and the coating of ion plating is just plated on chemical top tank structure.For
The chemical tanks plated film of different-diameter is adapted to, furnace body gas platform is equipped with the seal groove and sealing ring of different-diameter；In order to adapt to
The chemical tanks plated film of different height can pad the additional flange with sealing ring of different height on furnace body platform corresponding position,
To compensate the difference in height of different chemical tanks.
3) plated film operation；Chemical bond body becomes the furnace wall of Vacuum Deposition room, and the inner wall of chemical tanks receives plated film, starts vacuum
System (marks at end), takes out vacuum in stove, is evacuated to background vacuum 5x10-3Pa, is then charged with Ar gas, and furnace pressure reaches x10-2Pa is opened
Positive/negative turn of turn disk, while start elevating table device arc target assembly and rotate back and forth one side adjustable speed on one side and lift for 360 degree, first
Step carries out arc ions Bombardment and cleaning to inner tank wall, applies 500-700V of back bias voltage, starts the 2-3 in 6 Ti electric arc targets
Only, 60-80A of target current, rotating speed often rotate a circle 2--3 points kinds, move up and down speed 2 target position height of movement in 2--3 minutes.
After arc target assembly rises to tank deck elevation angle position, the another 2-3 target starting the arc is replaced, rotates and declines at the same rate, until most lower limit
Position stops.Second step beats titanium bottom, back bias voltage 200-250V, Ar steam stove pressure x10-2Pa, six full starting the arc of Ti electric arc targets, target electricity
60-80A is flowed, is run by foregoing rotary speed and translational speed, lifting one stops afterwards back and forth.3rd step plating TiN film：It feeds
Nitrogen, 1-0.6Pa of furnace pressure bias 50-80V, 6 Ti electric arc target standard-sized sheets, 60-80A of target current, by foregoing rotary speed
It is run with translational speed, requires to determine electric arc target assembly lifting number of rounds depending on thickness of coating.4th walks out of stove：Complete TiN film
After program, the frame that stops rotating rotates and lifting of lifting table, and air is filled with into stove, then hangs out the chemical tanks for having plated TiN film,
It checks film quality, completes plated film operation.
As the supplement to the present invention：Swivel mount component is used under the action of driving mechanism and transmission mechanism, drives rotation
Electric arc source component on turret block lifts and rotary motion, and is risen towards in electric arc source component at the top of large tank
When, electric arc source component front end is driven to be steeved as high-low plate around fulcrum rotation, is bound with the arc of large tank to be plated
Lid is opposite.The tail faced upward head movement, the electric arc source component of activity installation is mainly pressed down against by limiter of electric arc source component
End makes electric arc source component front end steeve realization, the rotation and elevating movement of electric arc source component, except above-mentioned implementation in the present invention
Outside mode, it can also realize in the following way：As shown in figure 20, rotation axis a1 is rotatably installed on the a2 of chassis, and turntable a5 is fixed
On rotation axis a1, two screw rods a3 is centrosymmetric to be rotatably installed on turntable a5, and a4 is to be sleeved on screw rod a3 and screw rod spiral shell
The nut of line adaptation, a6 is gear, is fixed on screw rod a3 lower ends, and a7 is the annular bull gear being fixed on the a2 of chassis, with
Gear a6 is engaged.Between electric arc source component is mounted on two nut a4, driving a1 rotations, a5 follows rotation, and drives screw rod a3
Around the central axis of rotation axis a1, screw rod a3 gears a6 with gear wheel a7 by engaging, so as to driving screw rod a3 rotations,
This rotary motion, is converted into the up and down motion of nut a4 by the screw structure being made of screw rod a3 and nut a4, so as to drive
Across the electric arc source component rotary lifting movement between two nut a4.
The present invention also has other embodiment, such as sets interim plating room, rotation or fixed support, electric arc source component
When designing in the early stage, tank wall and the plated film of arched top are just taken into account, for the arc source of arched top plated film, is designed directly to
The elevation angle.Though the coating machine can also realize inner tank wall without dead angle plated film, application range relative narrower.To sum up, root
According to the above, according to the ordinary technical knowledge and customary means of this field, the above-mentioned basic fundamental thought of the present invention is not being departed from
Under the premise of, the present invention can also make equivalent modifications, replacement or the change of other diversified forms, all fall within the protection of the present invention
Among scope.
Claims (9)
1. a kind of large tank inner wall plated film vacuum cathode arc coating machine, which is characterized in that including rack, chassis, electric arc
Source component and support；
The chassis is supported by the rack and is horizontally disposed with, and the chassis is used for and the sealing pair of the openend of the large tank
It connecing, forms the interim plating room using the large tank as Vacuum Deposition chamber outer wall, the support is erected at the chassis center,
The electric arc source component is mounted on the support, and front end is electric arc target, and target surface is described towards the large tank inner wall
Electric arc source component includes arc target assembly and arc target bearing assembly, and the arc target assembly is mounted on institute by the arc target bearing assembly
It states on support, the arc target assembly includes more than one described electric arc target, further includes an arc target mounting base, the arc target installation
Seat is a closed case, and the electric arc target is sealingly mounted on the end face of the closed case, and the closed case is communicated with one
Bellows, and pass through the bellows and reached through the chassis outside stove, so that the plating interior formation one in vacuum connects with extraneous
Logical antivacuum passage, the water, electricity, gas circuit of the electric arc source component are drawn from the closed case through the passage outside stove
To be connected with corresponding portion.
2. coating machine according to claim 1, which is characterized in that the support be swivel mount component, its rotatory sealing
Be mounted on the chassis on, the coating machine further includes driving mechanism and transmission mechanism, and the driving mechanism passes through the biography
Motivation structure is connected with the swivel mount component, and the swivel mount component is driven to rotate and the electric arc source component thereon is driven to make
Rotary motion, the another driving mechanism drive the electric arc source component to make elevating movement by the transmission mechanism, and described
When electric arc source component is risen towards at the top of the large tank, drive the electric arc source component front end as high-low plate around one
Fulcrum rotation is steeved, opposite with the arc capping cover of the large tank.
3. coating machine according to claim 2, which is characterized in that described with copper drag chain on the swivel mount component
Bellows is attached on the drag chain, and when the arc source component movement, the bellows is moved with the drag chain, and drag chain is to institute
The movement for stating bellows play the guiding role.
4. coating machine according to claim 3, which is characterized in that the arc target bearing assembly it is scalable with closer or far from
Inner tank wall, target-substrate distance during so as to adjust the arc target assembly plated film.
5. coating machine according to claim 4, which is characterized in that the arc target bearing assembly includes arc target holder, target counterweight
Plate, two arc target supporting rack anchor ears, arc target supporting rack and two arc target cover stretcher bars, the arc target holder both sides are respectively equipped with one
Arc target holder casing, two arc target cover stretcher bars are arranged side by side, and front end is connected the arc target mounting base, and rear end is first distinguished
Through after an arc target supporting rack anchor ear, then it is inserted in respectively in the arc target holder casing of the arc target holder one side, the arc
Target supporting rack anchor ear is fixed on by the arc target supporting rack on the arc target holder, and the arc target holder casing is equipped with to position
The tightening structure of the arc target cover stretcher bar, the target Weight plate are mounted on the tail end of the arc target holder, and position is adjustable
Section with the weight of balance arc target holder other end target arc component, makes the holding of electric arc source component horizontal；The arc target holder passes through level
Hinge shaft is hinged on the swivel mount component.
6. coating machine according to claim 4, which is characterized in that there are one the arc target assemblies, and the electric arc target exists
Dislocation arrangement in two separate ranks in the arc target mounting base；Also, the driving mechanism drives the electricity on the swivel mount component
Arc source component makees 360 degree of rotating campaign, that is, i.e. reversion resets after being rotated by 360 °, to ensure that the pipeline for importing plating room does not twine
Around.
7. coating machine according to claim 2, which is characterized in that the structure of the swivel mount component is：The swivel mount
Component includes swivel mount, lifting platform, turntable, rotation axis and limiter, and the swivel mount is a vertical support, it passes through described turn
Disk is fixed in the rotation axis, and the rotation axis is then mounted on to rotatory sealing chassis center and is pierced by；
The lifting platform installs the electric arc source component for activity, is mounted on the swivel mount, can be along the swivel mount
Raising and lowering, the limiter is mounted at the top of the swivel mount, when the lifting platform makees ascending motion, close to the rotation
During top of the trellis, the limiter is contacted with the tail end of electric arc source component on the lifting platform, pushes the tail of the electric arc source component
End, continues to rise with the lifting platform, and the limiter makes the front end of the electric arc source component as high-low plate around one
Point rotation is steeved, opposite with the arc capping cover of the large tank；
The driving mechanism includes the first driving mechanism and the second driving mechanism, and the transmission mechanism includes the first driver
Structure, the second transmission mechanism, lifting platform transmission shaft and the 3rd transmission mechanism；
First driving mechanism passes through first transmission mechanism, the outer end phase of the rotation axis with being pierced by the chassis
Even, the first driving mechanism is by driving the rotation axis to rotate that the swivel mount is driven to rotate, the swivel mount with it is described
It is formed between turntable there are one the non-vacuum chambers with its peripheral Vacuum Deposition room isolation, second driving mechanism is mounted on the chamber
It in room, is mounted in the cavity wall of the non-vacuum chambers and is pierced by the lifting platform transmission shaft rotatory sealing, described second drives
Motivation structure is connected by second transmission mechanism with the lifting platform transmission shaft, the lifting platform transmission shaft is driven to rotate, institute
Lifting platform transmission shaft is stated across non-real dead zone to vacuum area, the power of second driving mechanism is transferred to vacuum area, then
It is connected by the 3rd transmission mechanism with the lifting platform, the lifting platform is driven described in by the 3rd transmission mechanism
Swivel mount makees elevating movement.
8. coating machine according to claim 7, which is characterized in that the rotation axis is a tubular hollow shaft, described non-real
Plenum chamber, with being connected outside stove, introduces the pipeline in stove, by the hollow rotation axis by the hollow rotation axis
Chamber introduces.
9. coating machine according to claim 7, which is characterized in that the coating machine is further included for compensating height, makes tank
The additional flange that body height can be adapted to the swivel mount component, the additional flange one side are used for and chassis sealing pair
It connects, another side is provided with sealing ring, is docked for the openend sealing of the tank body with respective diameters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711039152.2A CN108085646B (en) | 2017-10-31 | 2017-10-31 | Vacuum cathode arc coating machine for coating inner wall of large tank body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711039152.2A CN108085646B (en) | 2017-10-31 | 2017-10-31 | Vacuum cathode arc coating machine for coating inner wall of large tank body |
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| CN108085646B CN108085646B (en) | 2023-06-23 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117604457A (en) * | 2023-11-30 | 2024-02-27 | 青岛优百宇真空设备股份有限公司 | A draw oily pole vacuum coating equipment for oil exploitation |
| CN117646195A (en) * | 2024-01-30 | 2024-03-05 | 湖南德智新材料有限公司 | Supporting mechanism, supporting device and film preparation equipment |
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| WO2014192551A1 (en) * | 2013-05-27 | 2014-12-04 | 株式会社神戸製鋼所 | Film forming device and film forming method using same |
| CN105624620A (en) * | 2016-03-21 | 2016-06-01 | 上海福宜真空设备有限公司 | Small round planar target with air channel and simplified structure |
| CN208008882U (en) * | 2017-10-31 | 2018-10-26 | 东莞市汇成真空科技有限公司 | A kind of large tank inner wall plated film vacuum cathode arc coating machine |
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| JPH02179869A (en) * | 1988-12-28 | 1990-07-12 | Nec Corp | Sputtering device |
| DE4223091C1 (en) * | 1992-07-14 | 1993-07-01 | Vtd-Vakuumtechnik Dresden Gmbh, O-8017 Dresden, De | Water cooled holder for inserted exchangeable target - comprises housing, cooling plate and axially freely movable metal bellows, vacuum arc discharge vapour deposition appts. |
| WO2014192551A1 (en) * | 2013-05-27 | 2014-12-04 | 株式会社神戸製鋼所 | Film forming device and film forming method using same |
| CN105624620A (en) * | 2016-03-21 | 2016-06-01 | 上海福宜真空设备有限公司 | Small round planar target with air channel and simplified structure |
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| CN117604457A (en) * | 2023-11-30 | 2024-02-27 | 青岛优百宇真空设备股份有限公司 | A draw oily pole vacuum coating equipment for oil exploitation |
| CN117646195A (en) * | 2024-01-30 | 2024-03-05 | 湖南德智新材料有限公司 | Supporting mechanism, supporting device and film preparation equipment |
| CN117646195B (en) * | 2024-01-30 | 2024-04-26 | 湖南德智新材料有限公司 | Supporting mechanism, supporting device and film preparation equipment |
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| CN108085646B (en) | 2023-06-23 |
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Address after: No.2, Yanwu Longyuan Road, Dalingshan Town, Dongguan City, Guangdong Province, 523838 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: 523820 Fourth Industrial Zone, Yanwu Village, Dalingshan Town, Dongguan City, Guangdong Province Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY CO.,LTD. |