CN108040415B - Integrated Modular Probe System for Tungsten Copper Targets - Google Patents

Integrated Modular Probe System for Tungsten Copper Targets Download PDF

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CN108040415B
CN108040415B CN201711393247.4A CN201711393247A CN108040415B CN 108040415 B CN108040415 B CN 108040415B CN 201711393247 A CN201711393247 A CN 201711393247A CN 108040415 B CN108040415 B CN 108040415B
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copper
probe
tungsten
hole
target plate
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许吉禅
王亮
徐国盛
刘建斌
冯威
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Fusion New Energy Anhui Co ltd
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Hefei Institutes of Physical Science of CAS
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
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    • H05H1/0068Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by thermal means
    • H05H1/0075Langmuir probes

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Abstract

本发明公开了一种适用于钨铜靶板的集成模块化探针系统,包括有钨铜靶板和探针组件。钨铜靶板为钨片、无氧纯铜适应层和铬锆铜基座焊接而成,铬锆铜基座内被中间隔座隔分为两个水冷管道,水冷管道与连接铜管、进水铜管和出水铜管焊接连接而成。探针组件包括有探针头、前端陶瓷圈、铜连接件、后端陶瓷圈、弹簧垫圈、顶紧螺钉、接线螺钉和导线,安装于铬锆铜基座内的探针孔中,其中探针头可采用钨铜或纯石墨结构。本发明采用集成模块化结构,充分利用靶板空间,可整体拆装,无焊接固定结构,拆卸维修时对靶板无损坏的风险;探针系统结构简单、紧凑,空间分辨率更高;提高了探针系统测量精度。

Figure 201711393247

The invention discloses an integrated modular probe system suitable for a tungsten-copper target plate, comprising a tungsten-copper target plate and a probe assembly. The tungsten copper target plate is welded by a tungsten sheet, an oxygen-free pure copper adaptation layer and a chromium zirconium copper base. The chromium zirconium copper base is divided into two water-cooled pipes by an intermediate spacer. The water copper pipe and the water outlet copper pipe are welded and connected. The probe assembly includes a probe head, a front-end ceramic ring, a copper connector, a rear-end ceramic ring, a spring washer, a top screw, a wiring screw and a wire, and is installed in the probe hole in the chrome-zirconium-copper base, where the probe is The needles are available in tungsten copper or pure graphite construction. The invention adopts an integrated modular structure, makes full use of the space of the target plate, can be disassembled and assembled as a whole, has no welding fixing structure, and has no risk of damage to the target plate during disassembly and maintenance; the probe system has a simple and compact structure, and has higher spatial resolution; The measurement accuracy of the probe system is improved.

Figure 201711393247

Description

适用于钨铜靶板的集成模块化探针系统Integrated Modular Probe System for Tungsten Copper Targets

技术领域technical field

本发明涉及高温等离子体诊断系统领域,具体是一种适用于钨铜靶板的集成模块化探针系统。The invention relates to the field of high-temperature plasma diagnostic systems, in particular to an integrated modular probe system suitable for a tungsten-copper target plate.

背景技术Background technique

朗缪尔探针诊断系统是等离子体诊断中的一种常规诊断方法,其主要由接触等离子体的探针头和后端测量电路两个主要部件构成。根据朗缪尔探针测量理论,通常可分为单探针、双探针和三探针三种测量方法,单探针和双探针测量的后端电路需要使用扫描电压加在探针头上,而三探针需要加一个合适大小的偏压即可;根据鞘层原理,对与不同的探针头结构,其参数计算的理论方法也不同,常用的包括针状、圆柱状和球状等,其尺寸选择需根据等离子体鞘层的德拜长度、磁场强度和粒子元素等因素而定。此外,由于等离子体与材料之间的会发生溅射、侵蚀等作用,特别是高温等离子体中尤为严重,因此,对于探针的材料选择都需要综合考虑,目前通常采用钨、热解石墨、碳纤维复合材料(CFC)等耐高温抗腐蚀材料。The Langmuir probe diagnostic system is a conventional diagnostic method in plasma diagnostics, which is mainly composed of two main components, a probe head contacting plasma and a back-end measurement circuit. According to the Langmuir probe measurement theory, it can usually be divided into three measurement methods: single probe, double probe and triple probe. The back-end circuit of single probe and double probe measurement needs to use scanning voltage to be applied to the probe head. On the other hand, the three probes need to add a suitable bias voltage; according to the sheath principle, the theoretical method of parameter calculation is also different for different probe head structures. Commonly used ones include needle, cylindrical and spherical The size selection depends on the Debye length of the plasma sheath, the magnetic field strength and the particle element. In addition, due to the sputtering, erosion and other effects between the plasma and the material, especially in the high-temperature plasma, the material selection of the probe needs to be comprehensively considered. At present, tungsten, pyrolytic graphite, High temperature and corrosion resistant materials such as carbon fiber composite materials (CFC).

在高温等离子体中,对朗缪尔探针来说,面临着很大的挑战。由于等离子体温度更高,导致其对探针头材料之间的相互作用更加的强烈,从而导致探针的烧蚀、熔化等。虽然朗缪尔探针对高温等离子体的测量有一定的局限性,但是其仍然是大多数高温等离子体放电装置上不可或缺的诊断工具。探针头在等离子体中,要想延长其使用寿命,提高测量准确度,就需要采用更好的抗烧蚀耐高温材料,拥有有效的散热结构,并且在探针头发生烧蚀损坏时能够简单方便地更换。In high-temperature plasmas, the Langmuir probe faces great challenges. Due to the higher plasma temperature, the interaction between the material of the probe head is stronger, resulting in ablation and melting of the probe. Although the Langmuir probe has some limitations in the measurement of high temperature plasma, it is still an indispensable diagnostic tool in most high temperature plasma discharge devices. In plasma, in order to prolong the service life of the probe head and improve the measurement accuracy, it is necessary to use better anti-ablation and high-temperature resistant materials, have an effective heat dissipation structure, and be able to protect the probe head when it is damaged by ablation. Simple and convenient replacement.

目前,已经研发出很多种类型的高温等离子体放电装置的靶板或第一壁结构,如专利ZL201310403372.4中公开的一种用于聚变装置高热负荷部件的钨铜模块。针对纯铜的高润湿性和高蠕变松弛性,其在钨铜之间设计一层软的无氧纯铜适应层作为缓冲,从而减少了界面间应力,增加了界面结合力。目前,无氧纯铜与钨的连接技术有活性金属铸造、热压和热等静压等方法,无氧纯铜与铬锆铜热沉的连接技术有钎焊、爆炸焊和热等静压等多种连接方法。专利所述的钨铜模块由钨片、无氧纯铜适应层和铬锆铜合金热沉材料通过多种连接方法制备而成,能够承受高热负荷的冲击。此外,还有钨铜串管结构,采用外层全钨,内层依次为纯铜、铬锆铜,通过钎焊等方法制备而成。这两种结构都已经应用于EAST托卡马克装置上,作为偏滤器靶板的第一壁结构(J. Li et al., Phys. Scripta.T159, 014001(2014).),以提高EAST偏滤器耐热负荷能力。At present, many types of target plates or first wall structures of high-temperature plasma discharge devices have been developed, such as a tungsten-copper module for high thermal load components of fusion devices disclosed in Patent ZL201310403372.4. For the high wettability and high creep relaxation of pure copper, a soft oxygen-free pure copper adaptation layer is designed between tungsten and copper as a buffer, thereby reducing the interfacial stress and increasing the interfacial bonding force. At present, the connection technology of oxygen-free pure copper and tungsten includes active metal casting, hot pressing and hot isostatic pressing, etc. The connection technology of oxygen-free pure copper and chromium zirconium copper heat sink includes brazing, explosive welding and hot isostatic pressing and other connection methods. The tungsten-copper module described in the patent is made of tungsten sheet, oxygen-free pure copper adaptation layer and chromium-zirconium-copper alloy heat sink material through various connection methods, which can withstand the impact of high thermal load. In addition, there is also a tungsten-copper string tube structure, which is prepared by brazing and other methods. Both of these structures have been applied to the EAST tokamak device as the first wall structure of the divertor target plate (J. Li et al., Phys. Scripta. T159, 014001 (2014).) to improve the EAST bias. Filter heat load capacity.

专利ZL201410437565.6中提到了一种适用于EAST托卡马克装置全钨偏滤器的靶板探针系统,该系统能够很好的测量EAST钨偏滤器区域等离子体参数,并在EAST近几轮实验过程中得到验证。但该系统仅适用于钨铜串管结构,且其空间分辨率受限于钨铜串管结构和探针后端支撑结构,同时装配工艺复杂,很难保证最终的装配精度。此外,在EAST运行阶段由于高热负荷或者其他工程因素会导致探针系统损坏,若是后端支撑连接部件损坏,则需要对其进行拆卸才能进行维修操作。当发生需要拆卸维修情况时,一方面,若钨铜串管结构没有损坏,依据EAST系统优先级排列,不会对其进行拆卸,靶板探针系统则不会进行维修;另一方面,在拆卸钨铜串管前提下,由于该探针系统是采用焊接方式固定,拆卸时需要进行切割操作,因此存在损坏钨铜串管结构的风险。Patent ZL201410437565.6 mentioned a target plate probe system suitable for all tungsten divertors of EAST tokamak devices. verified in the process. However, this system is only suitable for the tungsten-copper string structure, and its spatial resolution is limited by the tungsten-copper string structure and the back-end support structure of the probe. At the same time, the assembly process is complicated, and it is difficult to ensure the final assembly accuracy. In addition, the probe system may be damaged due to high thermal load or other engineering factors during the EAST operation stage. If the rear support connection parts are damaged, they need to be disassembled for maintenance operations. When the need to disassemble and repair occurs, on the one hand, if the tungsten-copper string pipe structure is not damaged, it will not be disassembled according to the priority of the EAST system, and the target probe system will not be repaired; On the premise of dismantling the tungsten-copper string pipe, since the probe system is fixed by welding, cutting operation is required during disassembly, so there is a risk of damaging the tungsten-copper string pipe structure.

发明内容 本发明的目的是提供一种适用于钨铜靶板的集成模块化探针系统,以实现对靶板表面的等离子体参数进行测量。SUMMARY OF THE INVENTION The purpose of the present invention is to provide an integrated modular probe system suitable for a tungsten copper target, so as to measure plasma parameters on the surface of the target.

为了达到上述目的,本发明所采用的技术方案为:In order to achieve the above object, the technical scheme adopted in the present invention is:

适用于钨铜靶板的集成模块化探针系统,其特征在于:包括钨铜靶板和多个探针组件构成的集成化模块,其中钨铜靶板包括铬锆铜基座,铬锆铜基座中设有空腔,铬锆铜基座顶部敞口,且敞口处从下至上依次盖合连接有无氧纯铜适应层、钨片,铬锆铜基座的空腔被中间隔座隔分为两个水冷管道,两个水冷管道的后端通过连接管连通,其中一个水冷管道前端连接有进水管,另一个水冷管道前端连接有出水管,从钨片顶面中间位置向下竖直设有多个探针孔,多个探针孔沿水冷管道长边方向排列,每个探针孔分别竖直贯通钨片、无氧纯铜适应层、铬锆铜基座的中间隔座,多个探针组件一一对应安装在探针孔中,探针组件上端从探针孔位于钨片顶面的孔口露出或与钨片顶面齐平,探针组件下端连接有导线,导线从探针孔位于铬锆铜基座底面的孔口穿出。An integrated modular probe system suitable for a tungsten-copper target plate is characterized in that it includes an integrated module composed of a tungsten-copper target plate and a plurality of probe assemblies, wherein the tungsten-copper target plate includes a chromium-zirconium-copper base, a chromium-zirconium-copper There is a cavity in the base, the top of the chrome-zirconium-copper base is open, and the opening is covered and connected with oxygen-free pure copper adaptation layer and tungsten sheet from bottom to top, and the cavity of the chrome-zirconium-copper base is separated by the middle. The seat partition is divided into two water-cooling pipes, and the rear ends of the two water-cooling pipes are connected by a connecting pipe. The front end of one water-cooling pipe is connected with a water inlet pipe, and the front end of the other water-cooling pipe is connected with a water outlet pipe, which is downward from the middle of the top surface of the tungsten sheet. There are a plurality of probe holes vertically arranged along the long side of the water-cooled pipeline, and each probe hole vertically penetrates the middle space of the tungsten sheet, the oxygen-free pure copper adaptation layer, and the chromium zirconium copper base. The upper end of the probe assembly is exposed from the orifice of the probe hole on the top surface of the tungsten sheet or is flush with the top surface of the tungsten sheet, and the lower end of the probe assembly is connected with a wire , and the wire is passed through the hole of the probe hole on the bottom surface of the chrome zirconium copper base.

所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述探针孔为上细下粗的阶梯孔,其中小孔位于钨片及无氧纯铜适应层中,大孔位于铬锆铜基座的中间隔座中;The integrated modular probe system suitable for the tungsten-copper target plate is characterized in that: the probe hole is a stepped hole with a thin top and a thick bottom, wherein the small hole is located in the tungsten sheet and the oxygen-free pure copper adaptation layer, The large hole is located in the middle spacer of the chrome zirconium copper base;

所述探针组件包括同轴设置在大孔内上端的前端陶瓷圈、同轴设置在大孔内并位于前端陶瓷圈下方的后端陶瓷圈,前、后端陶瓷圈的圈孔均为阶梯通孔,且前端陶瓷圈贴紧阶梯孔中大孔与小孔交界处;大孔内位于前、后端陶瓷圈之间同轴设有铜连接件,铜连接件为阶梯圆柱形,铜连接件上、下端分别对应装配在前端陶瓷圈、后端陶瓷圈的圈孔中,由前、后端陶瓷圈固定准直铜连接件,且铜连接件与铬锆铜基座绝缘隔离;The probe assembly includes a front-end ceramic ring coaxially arranged in the upper end of the large hole, a rear-end ceramic ring coaxially arranged in the large hole and located below the front-end ceramic ring, and the ring holes of the front and rear ceramic rings are steps. Through holes, and the front ceramic ring is close to the junction of the large hole and the small hole in the stepped hole; the large hole is located between the front and rear ceramic rings coaxially with a copper connector, the copper connector is stepped cylindrical, and the copper connection The upper and lower ends of the parts are respectively assembled in the ring holes of the front ceramic ring and the rear ceramic ring, and the front and rear ceramic rings are used to fix the collimated copper connectors, and the copper connectors are insulated from the chrome zirconium copper base;

铜连接件上、下端端面分别加工有螺纹孔,其中铜连接件上端的螺纹孔同轴螺纹连接有探针头,探针头向上从探针孔位于钨片顶面的孔口穿出,或者探针头上端与钨片顶面齐平;The upper and lower end faces of the copper connecting piece are respectively machined with threaded holes, wherein the threaded holes at the upper end of the copper connecting piece are coaxially threaded with a probe head, and the probe head passes upward from the orifice of the probe hole on the top surface of the tungsten sheet, or The upper end of the probe head is flush with the top surface of the tungsten sheet;

所述探针组件还包括同轴设在大孔内下端的紧定螺钉,阶梯孔中大孔内下端成型有内螺纹,顶紧螺钉螺纹装配在大孔内下端,顶紧螺钉中间同轴设有通孔,大孔内位于顶紧螺钉和后端陶瓷圈之间设有弹簧垫圈,由顶紧螺钉、后端陶瓷圈夹持弹簧垫圈;The probe assembly also includes a set screw coaxially arranged at the inner and lower ends of the large holes, the inner and lower ends of the large holes in the stepped holes are formed with internal threads, the top tightening screws are threadedly assembled on the inner and lower ends of the large holes, and the middle of the top tightening screws is coaxially arranged. There is a through hole, and a spring washer is arranged between the top-tightening screw and the rear-end ceramic ring in the large hole, and the spring washer is clamped by the top-tightening screw and the rear-end ceramic ring;

铜连接件下端螺纹孔同轴螺纹连接有接线螺钉,接线螺钉下端穿过弹簧垫圈并伸入顶紧螺钉的通孔中,且接线螺钉下端加工为管状延伸部,管状延伸部中连接有导线,导线从顶紧螺钉的通孔下端穿出并最终从铬锆铜基座底面穿出。The threaded hole at the lower end of the copper connector is coaxially threaded with a wiring screw, the lower end of the wiring screw passes through the spring washer and extends into the through hole of the jacking screw, and the lower end of the wiring screw is processed into a tubular extension, and the tubular extension is connected with a wire, The wires pass through the lower end of the through hole of the top screw and finally pass through the bottom surface of the chrome zirconium copper base.

所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述顶紧螺钉底面设置有矩形槽口,以便能使用工具拧紧螺钉,牢固固定探针组件,顶紧螺钉拧紧后做冲边防松处理。The integrated modular probe system suitable for tungsten copper target plate is characterized in that: the bottom surface of the top tightening screw is provided with a rectangular notch, so that the screw can be tightened with a tool, the probe assembly can be firmly fixed, and the top tightening screw can be tightened Then do the edge anti-loosening treatment.

所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述导线为耐高温玻璃丝云母编织铜导线。The integrated modular probe system suitable for the tungsten copper target plate is characterized in that: the wire is a high temperature resistant glass filament mica braided copper wire.

所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述连接管、进水管和出水管均为不锈钢材质,通过钎焊方式与铬锆铜基座的水冷管道对应端连接;进水管和出水管分别与外系统水冷管道通过焊接相连,构成一个水冷环路,实现对本发明系统的整体冷却。The integrated modular probe system suitable for the tungsten copper target plate is characterized in that: the connecting pipe, the water inlet pipe and the water outlet pipe are all made of stainless steel and correspond to the water cooling pipes of the chrome zirconium copper base by brazing The water inlet pipe and the water outlet pipe are respectively connected with the water cooling pipes of the external system by welding to form a water cooling loop to realize the overall cooling of the system of the present invention.

所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述探针头可采用石墨材料加工而成,探针头下端为螺纹柱,该端螺合在铜连接件上端螺孔内;探针头上端为球顶部,球顶部突出于钨片顶面,球顶部下方为圆柱,圆柱与螺纹柱之间为两侧削平的圆柱,以便于使用特制夹具夹紧,并拧紧螺纹,其尺寸大于两端圆柱与螺纹柱直径,以与前端陶瓷圈贴紧。The integrated modular probe system suitable for tungsten copper target plate is characterized in that: the probe head can be made of graphite material, the lower end of the probe head is a threaded post, and the end is screwed to the copper connector Inside the upper screw hole; the top of the probe head is the top of the ball, the top of the ball protrudes from the top surface of the tungsten sheet, the bottom of the top of the ball is a cylinder, and between the cylinder and the threaded column is a cylinder with flattened sides, so that it can be clamped with a special clamp, and Tighten the thread, the size of which is larger than the diameter of the cylinder at both ends and the diameter of the thread cylinder, so as to be close to the front end ceramic ring.

所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述探针头也可采用钨铜材料制备而成,其结构与石墨材料制成的探针头结构基本一致,不同之处在于由于钨为金属,具有热熔性,探针头上端的球顶部顶端需为平顶圆柱状,平顶部顶端与钨片顶面齐平,即构成齐平探针形式,以避免球顶突出导致温度过于集中而使钨探针头熔化发生黏连现象;同时由于钨材料无法加工螺纹,故其螺纹端为钨圆柱表面通过热压方式与无氧纯铜圆套管进行焊接连接,然后再加工螺纹。The integrated modular probe system suitable for tungsten-copper target plate is characterized in that: the probe head can also be made of tungsten-copper material, and its structure is basically the same as that of the probe head made of graphite material , the difference is that since tungsten is a metal and has hot-melt properties, the top of the ball top at the upper end of the probe head needs to be flat-topped cylindrical, and the top of the flat top is flush with the top surface of the tungsten sheet, which constitutes a flush probe form. To avoid excessive temperature concentration caused by the protrusion of the dome, the tungsten probe head will melt and cause adhesion. At the same time, because the tungsten material cannot process threads, the threaded end is a tungsten cylindrical surface and is welded with an oxygen-free pure copper round sleeve by hot pressing. connection, and then threading.

本发明的有益效果在于:The beneficial effects of the present invention are:

本发明提出了一种适用于钨铜靶板的集成模块化探针系统,该系统采用集成模块化结构,将探针系统集成到钨铜靶板上,可实现整体拆装,能够充分利用靶板空间,增加探针空间分布。本发明没有采用焊接连接结构,拆卸维修探针组件时对靶板结构无损坏的风险;整个探针系统结构简单、紧凑,空间分辨率高;同时,具有独立水冷结构,能有效维持探针温度,保证探针测量的准确率;同时,可把整个模块拆下来,再装配探针组件,这样能够保证更高的装配精度,从而提高了探针系统测量精度;该探针系统可安装钨探针头,使探针系统能够在更高温度或更长时间等离子体放电环境中持续工作,提高了探针的耐用性,完全能够适用于更高参数的未来核聚变实验装置中。The invention proposes an integrated modularized probe system suitable for a tungsten-copper target plate. The system adopts an integrated modularized structure, and the probe system is integrated on the tungsten-copper target plate, which can realize overall disassembly and assembly, and can make full use of the target. Board space, increase probe space distribution. The present invention does not use a welding connection structure, and there is no risk of damage to the target plate structure when disassembling and repairing the probe assembly; the entire probe system has a simple and compact structure and high spatial resolution; at the same time, it has an independent water-cooling structure, which can effectively maintain the probe temperature , to ensure the accuracy of probe measurement; at the same time, the entire module can be disassembled and the probe assembly can be assembled again, which can ensure higher assembly accuracy, thereby improving the measurement accuracy of the probe system; the probe system can be installed with a tungsten probe The needle head enables the probe system to work continuously in a higher temperature or longer plasma discharge environment, improves the durability of the probe, and is fully applicable to future nuclear fusion experimental devices with higher parameters.

附图说明Description of drawings

图1为集成模块化探针系统正视图。Figure 1 is a front view of the integrated modular probe system.

图2为集成模块化探针系统俯视图。Figure 2 is a top view of the integrated modular probe system.

图3 为集成模块化探针系统轴测图。Figure 3 is an axonometric view of the integrated modular probe system.

图4 钨探针头和石墨探针头结构示意图。Figure 4 Schematic diagram of the structure of the tungsten probe head and the graphite probe head.

具体实施方式Detailed ways

下面结合附图和具体实施例进一步说明本发明。The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

如图1、图2和图3所示,本发明包括有钨铜靶板和探针组件14,装配后构成一个集成化模块,能很方便地进行拆装。钨铜靶板为钨片4、无氧纯铜适应层5和铬锆铜基座6焊接而成,铬锆铜基座内被中间隔座隔分为两个水冷管道15,两个水冷管道15后端之间焊接连接管1,其中一个水冷管道15前端焊接进水管7,另一个水冷管道15前端焊接出水管16。探针组件14包括有探针头3、前端陶瓷圈2、铜连接件13、后端陶瓷圈12、弹簧垫圈8、顶紧螺钉10、接线螺钉11和导线9,安装于两个水冷管道15之间的探针孔中。As shown in FIG. 1 , FIG. 2 and FIG. 3 , the present invention includes a tungsten copper target plate and a probe assembly 14 , which form an integrated module after assembly, which can be easily disassembled. The tungsten copper target plate is welded by a tungsten sheet 4, an oxygen-free pure copper adaptation layer 5 and a chrome zirconium copper base 6. The chrome zirconium copper base is divided into two water-cooling pipes 15 and two water-cooling pipes by an intermediate spacer. The connecting pipe 1 is welded between the rear ends of the 15 water cooling pipes 15 , the front end of one water cooling pipe 15 is welded with the water inlet pipe 7 , and the front end of the other water cooling pipe 15 is welded with the water outlet pipe 16 . The probe assembly 14 includes a probe head 3 , a front-end ceramic ring 2 , a copper connector 13 , a rear-end ceramic ring 12 , a spring washer 8 , a top screw 10 , a connection screw 11 and a wire 9 , and is installed in two water cooling pipes 15 between the probe holes.

钨铜靶板采用已知专利ZL201310403372.4中公开的方法制备,连接管1、进水管7和出水管16为不锈钢材质,通过钎焊方式与铬锆铜基座6的水冷管道连接15;进水管7和出水管16与外系统水冷管道通过焊接相连,构成一个水冷环路,实现对本发明系统的整体冷却;并在钨铜靶板进出水管道之间位置加工阶梯孔,其中大孔位于铬锆铜基座的中间隔座中,并加工螺纹,小孔位于钨片中。The tungsten copper target plate is prepared by the method disclosed in the known patent ZL201310403372.4. The connecting pipe 1, the water inlet pipe 7 and the water outlet pipe 16 are made of stainless steel, and are connected to the water cooling pipe of the chrome zirconium copper base 6 by brazing. 15; The water pipe 7 and the water outlet pipe 16 are connected with the water cooling pipe of the external system by welding to form a water cooling loop to realize the overall cooling of the system of the present invention; and step holes are processed between the water inlet and outlet pipes of the tungsten copper target plate, wherein the large hole is located in the chromium The middle spacer of the zirconium copper base is machined with threads, and the small hole is located in the tungsten sheet.

探针组件14安装于所述钨铜靶板上的阶梯孔中,前端陶瓷圈2和后端陶瓷圈12由氮化硼陶瓷加工而成,两者中间都设置为阶梯通孔,分别与铜连接件13两端外圆直径尺寸对应,起到固定准直作用。The probe assembly 14 is installed in the stepped hole on the tungsten-copper target plate. The front-end ceramic ring 2 and the rear-end ceramic ring 12 are made of boron nitride ceramics. The diameters of the outer circles at both ends of the connecting piece 13 correspond to each other, and play a role of fixing and collimating.

前端陶瓷圈2放置于钨铜靶板上的阶梯孔的大孔内,并贴紧大孔与小孔交界处的端面;铜连接件13为阶梯圆柱形,放置于前端陶瓷圈2和后端陶瓷圈12之间,铜连接件13与铬锆铜基座绝缘隔离,两端加工不同尺寸螺纹孔,分别用于螺纹连接探针头3和接线螺钉11。The front-end ceramic ring 2 is placed in the large hole of the stepped hole on the tungsten-copper target plate, and is close to the end face at the junction of the large hole and the small hole; the copper connector 13 is a stepped cylindrical shape and is placed on the front-end ceramic ring 2 and the rear end Between the ceramic rings 12, the copper connector 13 is insulated from the chrome-zirconium-copper base, and the two ends are machined with threaded holes of different sizes, which are used to screw the probe head 3 and the connection screw 11 respectively.

弹簧垫圈8放置于后端陶瓷圈12与所述顶紧螺钉10之间,起到防松预紧作用;顶紧螺钉10的中间为通孔用于穿过引线9,顶紧螺钉螺纹装配在大孔下端内螺纹段,顶紧螺钉10下端设置有矩形槽口,以便能使用工具拧紧螺钉,牢固固定探针组件14,顶紧螺钉10拧紧后做冲边防松处理。The spring washer 8 is placed between the rear end ceramic ring 12 and the top screw 10 to prevent loosening and pre-tightening; the middle of the top screw 10 is a through hole for passing through the lead 9, and the top screw is threadedly assembled on the In the inner thread section at the lower end of the large hole, the lower end of the jacking screw 10 is provided with a rectangular notch, so that the screw can be tightened with a tool, and the probe assembly 14 can be firmly fixed.

接线螺钉11上端为外螺纹接头,螺合在铜连接件13下端螺纹孔内,接线螺钉11下端为管状延伸部,管状延伸部内夹紧连接导线9,使之成为一个整体,接线螺钉11的管状延伸部上开有槽口;导线9为耐高温玻璃丝云母编织铜导线,从顶紧螺钉10中间通孔穿出;探针头3螺合连接在铜连接件13上端的螺孔内。The upper end of the connection screw 11 is an external threaded joint, which is screwed into the threaded hole at the lower end of the copper connector 13. The lower end of the connection screw 11 is a tubular extension, and the connection wire 9 is clamped in the tubular extension to make it a whole. The extension part is provided with a notch; the wire 9 is a high temperature resistant glass filament mica braided copper wire, which passes through the middle through hole of the top tightening screw 10;

如图4所示,探针头3可采用石墨材料加工而成,探针头3下端为螺纹柱,螺合连接在铜连接件13上端螺孔内,探针头3上端为球顶部,球顶部刚刚突出于钨片4顶面,球顶部下方为圆柱,圆柱与螺纹柱之间为两侧削平的圆柱,以便于使用特制夹具夹紧,并拧紧螺纹,其尺寸大于两端圆柱与螺纹柱直径,以与前端陶瓷圈2贴紧。As shown in Figure 4, the probe head 3 can be made of graphite material. The lower end of the probe head 3 is a threaded post, which is screwed into the screw hole at the upper end of the copper connector 13. The upper end of the probe head 3 is a ball top, and the ball The top just protrudes from the top surface of the tungsten sheet 4, the top of the ball is a cylinder, and between the cylinder and the threaded column is a cylinder with flattened sides, so as to be clamped with a special fixture and tighten the thread, the size of which is larger than that of the cylinder at both ends and the threaded column diameter so as to fit closely with the front-end ceramic ring 2.

如图4所示,探针头3也可采用钨铜材料制备而成,其结构与石墨探针头结构基本一致,不同之处在于:1)由于钨为金属,具有热熔性,,球顶部需为平顶圆柱状,与钨铜靶板的钨片4顶面齐平,即为齐平探针形式,以避免球顶突出导致温度过于集中而使钨探针头熔化发生黏连现象;2)由于钨材料无法加工螺纹,故探针头3下端螺纹端为钨圆柱17表面通过热压等方式与无氧纯铜圆套管18进行焊接连接,然后再加工螺纹。As shown in Figure 4, the probe head 3 can also be made of tungsten copper material, and its structure is basically the same as that of the graphite probe head. The top must be flat-topped cylindrical, flush with the top surface of the tungsten sheet 4 of the tungsten copper target plate, that is, the form of a flush probe, so as to avoid excessive temperature concentration caused by the protrusion of the dome and the melting of the tungsten probe head and the adhesion phenomenon ; 2) Since tungsten material cannot process threads, the threaded end of the lower end of the probe head 3 is a tungsten cylinder 17, which is welded and connected to the oxygen-free pure copper round sleeve 18 by hot pressing, etc., and then the thread is processed.

本实例可在高参数等离子体放电装置上作为靶板部件的一个组件,承受等离子体的冲击,同时,实现对等离子体参数的测量。This example can be used as a component of the target plate component on a high-parameter plasma discharge device to withstand the impact of plasma, and at the same time, realize the measurement of plasma parameters.

本发明未详细阐述的部分属于本领域公知技术。The parts of the present invention that are not described in detail belong to the well-known techniques in the art.

尽管上面对本发明说明性的具体实施方式进行了描述,以便于本技术领的技术人员理解本发明,但应该清楚,本发明不限于具体实施方式的范围,对本技术领域的普通技术人员来讲,只要各种变化在所附的权利要求限定和确定的本发明的精神和范围内,这些变化是显而易见的,一切利用本发明构思的发明创造均在保护之列。Although the illustrative specific embodiments of the present invention have been described above to facilitate the understanding of the present invention by those skilled in the art, it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, As long as various changes are within the spirit and scope of the present invention as defined and determined by the appended claims, these changes are obvious, and all inventions and creations utilizing the inventive concept are included in the protection list.

Claims (6)

1.适用于钨铜靶板的集成模块化探针系统,其特征在于:包括钨铜靶板和多个探针组件构成的集成化模块,其中钨铜靶板包括铬锆铜基座,铬锆铜基座中设有空腔,铬锆铜基座顶部敞口,且敞口处从下至上依次盖合连接有无氧纯铜适应层、钨片,铬锆铜基座的空腔被中间隔座隔分为两个水冷管道,两个水冷管道的后端通过连接管连通,其中一个水冷管道前端连接有进水管,另一个水冷管道前端连接有出水管,从钨片顶面中间位置向下竖直设有多个探针孔,多个探针孔沿水冷管道长边方向排列,每个探针孔分别竖直贯通钨片、无氧纯铜适应层、铬锆铜基座的中间隔座,多个探针组件一一对应安装在探针孔中,探针组件上端从探针孔位于钨片顶面的孔口露出或与钨片顶面齐平,探针组件下端连接有导线,导线从探针孔位于铬锆铜基座底面的孔口穿出;1. An integrated modular probe system suitable for a tungsten-copper target plate, characterized in that: an integrated module comprising a tungsten-copper target plate and a plurality of probe assemblies, wherein the tungsten-copper target plate includes a chromium-zirconium-copper base, a chromium There is a cavity in the zirconium-copper base, the top of the chromium-zirconium-copper base is open, and the opening is covered and connected with an oxygen-free pure copper adaptation layer and a tungsten sheet from bottom to top. The cavity of the chromium-zirconium-copper base is covered with The middle spacer is divided into two water-cooling pipes, and the rear ends of the two water-cooling pipes are connected by a connecting pipe. One of the water-cooling pipes is connected with a water inlet pipe at the front end, and the other water-cooled pipe is connected with a water outlet pipe at the front end. From the middle of the top surface of the tungsten sheet There are a plurality of probe holes vertically downward, and the plurality of probe holes are arranged along the longitudinal direction of the water-cooling pipeline. In the middle spacer, a plurality of probe assemblies are installed in the probe holes in one-to-one correspondence. The upper end of the probe assemblies is exposed from the orifice of the probe hole on the top surface of the tungsten sheet or is flush with the top surface of the tungsten sheet, and the lower end of the probe assemblies is connected There is a wire, and the wire passes through the hole of the probe hole on the bottom surface of the chrome-zirconium-copper base; 所述探 针孔为上细下粗的阶梯孔,其中小孔位于钨片及无氧纯铜适应层中,大孔位于铬锆铜基座 的中间隔座中;The probe hole is a stepped hole with a thin top and a thick bottom, wherein the small hole is located in the tungsten sheet and the oxygen-free pure copper adaptation layer, and the large hole is located in the middle spacer of the chromium zirconium copper base; 所述探针组件包括同轴设置在大孔内上端的前端陶瓷圈、同轴设置在大孔内并位于前端陶瓷圈下方的后端陶瓷圈,前、后端陶瓷圈的圈孔均为阶梯通孔,且前端陶瓷圈贴紧阶梯孔中大孔与小孔交界处;大孔内位于前、后端陶瓷圈之间同轴设有铜连接件,铜连接件为阶梯圆柱形,铜连接件上、下端分别对应装配在前端陶瓷圈、后端陶瓷圈的圈孔中,由前、后端陶瓷圈固定准直铜连接件,且铜连接件与铬锆铜基座绝缘隔离;The probe assembly includes a front-end ceramic ring coaxially arranged in the upper end of the large hole, a rear-end ceramic ring coaxially arranged in the large hole and located below the front-end ceramic ring, and the ring holes of the front and rear ceramic rings are steps. Through holes, and the front ceramic ring is close to the junction of the large hole and the small hole in the stepped hole; the large hole is located between the front and rear ceramic rings coaxially with a copper connector, the copper connector is stepped cylindrical, and the copper connection The upper and lower ends of the parts are respectively assembled in the ring holes of the front ceramic ring and the rear ceramic ring, and the front and rear ceramic rings are used to fix the collimated copper connectors, and the copper connectors are insulated from the chrome zirconium copper base; 铜连接件上、下端端面分别加工有螺纹孔,其中铜连接件上端的螺纹孔同轴螺纹连接有探针头,探针头向上从探针孔位于钨片顶面的孔口穿出,或者探针头上端与钨片顶面齐平;The upper and lower end faces of the copper connecting piece are respectively machined with threaded holes, wherein the threaded holes at the upper end of the copper connecting piece are coaxially threaded with a probe head, and the probe head passes upward from the orifice of the probe hole on the top surface of the tungsten sheet, or The upper end of the probe head is flush with the top surface of the tungsten sheet; 所述探针组件还包括同轴设在大孔内下端的紧定螺钉,阶梯孔中大孔内下端成型有内螺纹,顶紧螺钉螺纹装配在大孔内下端,顶紧螺钉中间同轴设有通孔,大孔内位于顶紧螺钉和后端陶瓷圈之间设有弹簧垫圈,由顶紧螺钉、后端陶瓷圈夹持弹簧垫圈;The probe assembly also includes a set screw coaxially arranged at the inner and lower ends of the large holes, the inner and lower ends of the large holes in the stepped holes are formed with internal threads, the top tightening screws are threadedly assembled on the inner and lower ends of the large holes, and the middle of the top tightening screws is coaxially arranged. There is a through hole, and a spring washer is arranged between the top-tightening screw and the rear-end ceramic ring in the large hole, and the spring washer is clamped by the top-tightening screw and the rear-end ceramic ring; 铜连接件下端螺纹孔同轴螺纹连接有接线螺钉,接线螺钉下端穿过弹簧垫圈并伸入顶紧螺钉的通孔中,且接线螺钉下端加工为管状延伸部,管状延伸部中连接有导线,导线从顶紧螺钉的通孔下端穿出并最终从铬锆铜基座底面穿出。The threaded hole at the lower end of the copper connector is coaxially threaded with a wiring screw, the lower end of the wiring screw passes through the spring washer and extends into the through hole of the jacking screw, and the lower end of the wiring screw is processed into a tubular extension, and the tubular extension is connected with a wire, The wires pass through the lower end of the through hole of the top screw and finally pass through the bottom surface of the chrome zirconium copper base. 2. 根据权利要求1所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述顶 紧螺钉底面设置有矩形槽口,以便能使用工具拧紧螺钉,牢固固定探针组件,顶紧螺钉拧紧 后做冲边防松处理。2. The integrated modular probe system suitable for the tungsten copper target plate according to claim 1, characterized in that: the bottom surface of the top tightening screw is provided with a rectangular notch, so that a tool can be used to tighten the screw to firmly fix the probe components, after tightening the top tightening screws, do the edge punching anti-loosening treatment. 3. 根据权利要求1所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述导 线为耐高温玻璃丝云母编织铜导线。3. The integrated modular probe system that is applicable to tungsten copper target plate according to claim 1, is characterized in that: described wire is high temperature resistant glass filament mica braided copper wire. 4. 根据权利要求1所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述连 接管、进水管和出水管均为不锈钢材质,通过钎焊方式与铬锆铜基座的水冷管道对应端连 接;进水管和出水管分别与外系统水冷管道通过焊接相连,构成一个水冷环路,实现对本发 明系统的整体冷却。4. The integrated modular probe system suitable for tungsten-copper target plate according to claim 1, characterized in that: the connecting pipe, the water inlet pipe and the water outlet pipe are all made of stainless steel. The corresponding ends of the water cooling pipes of the base are connected; the water inlet pipe and the water outlet pipe are respectively connected with the water cooling pipes of the external system by welding to form a water cooling loop to realize the overall cooling of the system of the present invention. 5. 根据权利要求1所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述探针头采用石墨材料加工而成,探针头下端为螺纹柱,该端螺合在铜连接件上端螺孔内;探针头上端为球顶部,球顶部突出于钨片顶面,球顶部下方为圆柱,圆柱与螺纹柱之间为两侧削平的圆柱,以便于使用特制夹具夹紧,并拧紧螺纹,其尺寸大于两端圆柱和螺纹柱直径,以与前端陶瓷圈贴紧。5. The integrated modular probe system suitable for a tungsten copper target plate according to claim 1, characterized in that: the probe head is made of graphite material, and the lower end of the probe head is a threaded post, and the end screw Fitted in the screw hole on the upper end of the copper connector; the top of the probe head is the top of the ball, the top of the ball protrudes from the top surface of the tungsten sheet, the bottom of the top of the ball is a cylinder, and between the cylinder and the threaded column is a cylinder with flattened sides to facilitate the use of special The clamp is clamped, and the thread is tightened, the size of which is larger than the diameter of the cylinder at both ends and the diameter of the thread cylinder, so as to be tightly attached to the front-end ceramic ring. 6. 根据权利要求1所述的适用于钨铜靶板的集成模块化探针系统,其特征在于:所述探针头采用钨铜材料制备而成,探针头下端为螺纹柱,该端螺合在铜连接件上端螺孔内;探针头上端为球顶部,探针头上端的球顶部顶端为平顶圆柱状,平顶部 顶端与钨片顶面齐平,即构成齐平探针形式,以避免球顶突出导致温度过于集中而使钨探 针头熔化发生黏连现象;同时由于钨材料无法加工螺纹,故其螺纹端为钨圆柱表面通过热 压方式与无氧纯铜圆套管进行焊接连接,然后再加工螺纹。6. The integrated modular probe system suitable for a tungsten-copper target plate according to claim 1, wherein the probe head is prepared from tungsten-copper material, and the lower end of the probe head is a threaded post, and the end of the probe head is a threaded post. It is screwed into the screw hole on the upper end of the copper connector; the upper end of the probe head is the top of the ball, the top of the ball at the upper end of the probe head is flat-topped cylindrical, and the top of the flat top is flush with the top surface of the tungsten sheet, which constitutes a flush probe In order to avoid excessive concentration of temperature caused by the protrusion of the dome, the tungsten probe head will melt and cause adhesion. At the same time, since the tungsten material cannot process the thread, the thread end is a tungsten cylindrical surface and an oxygen-free pure copper round sleeve by hot pressing. The pipes are welded and then threaded.
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