CN108036809A - A kind of high-precision curve is driven measuring system - Google Patents
A kind of high-precision curve is driven measuring system Download PDFInfo
- Publication number
- CN108036809A CN108036809A CN201810111603.7A CN201810111603A CN108036809A CN 108036809 A CN108036809 A CN 108036809A CN 201810111603 A CN201810111603 A CN 201810111603A CN 108036809 A CN108036809 A CN 108036809A
- Authority
- CN
- China
- Prior art keywords
- guide rail
- trolley
- vacuum
- electric cylinders
- drive link
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 59
- 238000007789 sealing Methods 0.000 claims abstract description 50
- 230000033001 locomotion Effects 0.000 claims abstract description 45
- 230000005540 biological transmission Effects 0.000 claims abstract description 25
- 238000005259 measurement Methods 0.000 claims abstract description 18
- 230000008093 supporting effect Effects 0.000 claims abstract description 14
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 6
- 238000012545 processing Methods 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 6
- 238000004321 preservation Methods 0.000 claims description 5
- 238000012423 maintenance Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
- G01M13/02—Gearings; Transmission mechanisms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H13/00—Magnetic resonance accelerators; Cyclotrons
- H05H13/005—Cyclotrons
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
- H05H2007/008—Arrangements for beam delivery or irradiation for measuring beam parameters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measuring Fluid Pressure (AREA)
- Manipulator (AREA)
Abstract
The present invention discloses a kind of high-precision curve transmission measuring system, including gear unit, vacuum sealing unit, motion control unit and measuring unit.The gear unit includes guide rail, sliding block, trolley, drive link, electric cylinders, supporting mechanism；Some section trolleies are placed with guide rail, the front end of first segment trolley is provided with sensor；The vacuum sealing unit includes gate valve, vacuum chamber, vacuum sealing mechanism；Drive link and guide rail run through vacuum sealing unit, connect trolley and electric cylinders；The motion control unit includes servomotor, gear reducer, motor driving, grating scale and real-time controller, limit switch；Controller drives servomotor by motor, drives electric cylinders movement, grating scale participant position feedback through gear reducer, limit switch is protected；The measuring unit includes sensor and corresponding signal acquisition process equipment.The present invention uses curve transmission in vacuum environment, realizes high-precision motion and the measurement of evacuated interior or other restricted clearances.
Description
Technical field
The invention belongs to mechanical transmissioning technology and field of precision measurement, is related to a kind of high-precision curve transmission measurement system
System.
Background technology
Existing movement means use linear transmission more, when environmental structure is complicated, space is restricted, straight-line transmitting
The movement limited coverage area of dynamic device, it is impossible to realize accurate, complete movement and measurement.When running into vacuum environment, by beating
Vacuum environment is opened to replace different types of sensor and telecontrol equipment, it is necessary to vacuum breaker repeatedly and vacuum, work
Inefficiency, adds the costs such as time, human and material resources.In order to improve the above problem of existing linear transmission, it is necessary to
The transmission measuring system that a kind of range of movement is wide, precision is high, vacuum breaker does not realize replacement operation.
The content of the invention
It is an object of the invention to provide a kind of high-precision curve to be driven measuring system, to solve vacuum environment or other
The problems such as on-rectilinear movement, high-acruracy survey, high-precision motion in restricted clearance control and vacuum breaker does not realize replacement operation.
The purpose of the present invention can be achieved through the following technical solutions：
A kind of high-precision curve is driven measuring system, including gear unit, vacuum sealing unit, motion control unit and
Measuring unit；Wherein, the gear unit includes guide rail, trolley, drive link, electric cylinders；Some trolleies are placed with guide rail；Pass
Lever one end is connected with the final section trolley in some trolleies, and the other end is connected with electric cylinders；The vacuum sealing unit bag
Gate valve, vacuum chamber, vacuum sealing mechanism are included, the line slideway and drive link of guide rail run through whole vacuum sealing unit；It is described
Motion control unit include servomotor, gear reducer, motor driving, grating scale, real-time controller and limit switch；Electric cylinders
Driven by servomotor；The measuring unit includes sensor；The front end installation of first segment trolley in some trolleies
There is sensor.
The guide rail is spliced by different curved sections, straightway；Be provided with T-slot on guide rail, sliding block be it is round table-like, its
Slided in the T-slot of guide rail；The bottom for often saving trolley connects two sliding blocks by clamp spring, and junction is rotatable；It is adjacent
It is connected through the hinge between trolley, between trolley and drive link；Guide rail, sliding block, trolley, hinge, drive link, electric cylinders coordinate, real
Existing trolley drives sensor to do precise motion along fixation locus；Guide rail is installed in guide supporting.
Described gate valve one end is connected with measurand, and the other end is connected with vacuum chamber, and vacuum chamber is again and vacuum sealing
Mechanism connects；One surface cover of vacuum chamber can be opened, easy to sensor and the Operation and Maintenance of trolley；When gate valve is closed, protection
The influence that the vacuum environment of measurand acts from outside；The vacuum sealing mechanism is the welding vacuum ripple freely to stretch
Pipe；Gate valve, vacuum chamber and vacuum sealing mechanism both ends are equipped with vacuum sealing flange, between gate valve and measurand, insert
All consolidated between plate valve and vacuum chamber, between vacuum chamber and vacuum sealing mechanism by flanged joint, the opposite side of vacuum sealing machine
Determine blank flange, the installation vacuum feedthrough of perforate thereon.
The gear unit and vacuum sealing unit is provided by support mechanism supports and adjusts suitable height；
Support mechanism includes rack and height adjustment mechanism；The rack is installed above vacuum chamber, vacuum sealing mechanism, electric cylinders；
The height adjustment mechanism includes supporting rack, support plate and adjusting screw rod, and support plate is affixed with rack, and adjusting screw rod is fixedly connected
Supporting rack and support plate.
The line slideway and drive link of the guide rail run through whole vacuum sealing unit；Adjusted in vacuum chamber equipped with guide rail
Mechanism, including rotate handwheel, rack and pinion mechanism, adjust guide rail, the output shaft for rotating handwheel is mutually nibbled with rack and pinion mechanism
Close, rack and pinion mechanism is connected with adjusting guide rail, and Slider platform and the line slideway for adjusting guide rail are affixed；During work, twisting turns
Start wheel drive gear rackwork, and then drive and adjust guide rail movement, line slideway is moved back and forth with adjusting guide rail, is realized
Docking with the curved portion of guide rail and separate；Close before gate valve, electric cylinders driving drive link and trolley drive sensor complete
Retreat to entirely in vacuum chamber, twisting, which rotates handwheel, makes line slideway be separated with the curved portion of guide rail, you can close gate valve.
The electric cylinders drive drive link to promote trolley to be slided in guide rail, its velocity interval run is 0-150mm/s；
After being measured, electric cylinders drive drive link back to move, and sensor and trolley are with back moving；When sensor retreats to vacuum chamber
Within, the line slideway part of guide rail is adjusted by 50mm by the guide rail adjusting mechanism of vacuum chamber backward, the song with guide rail
Line is partially separated, and is then shut off gate valve, opens the cover board on vacuum chamber.
The servomotor front end connection gear reducer, and be attached by belt pulley and electric cylinders, driving electric cylinders movement；
The reading head of the grating scale follows gear unit to move together, for measuring the actual motion displacement of gear unit, reading
The signal wire connection motor driving of head, realizes that signal is fed back；The real-time controller is driven by motor and controlled as slave computer
The movement of servomotor processed；The limit switch includes photoelectric position limit and mechanical limit switch, is respectively connected to motor-driven
DI mouthfuls and STO mouthfuls.
The signal of the sensor by cable through drive link inner space, outside the flange of drawing vacuum sealing mechanism
Side, accesses corresponding signal acquisition process equipment；Measured signal is then fed into real-time controller and is post-processed.
Electric cylinders promote drive link to stretch into inside accelerator, and drive link promotes trolley to be slided on guide rail；Real-time controller connects
Motor driving is connect, controls servomotor, drives electric cylinders to move by gear reducer, second feedback of the grating scale as servomotor,
Photoelectric position limit and mechanical limit switch protection system motion are no more than stroke；The front end of first segment trolley is provided with beam current measurement spy
Head, after the current signal of acquisition of popping one's head in draws vacuum, is read by pico-ampere table；The electricity that pico-ampere table is measured by the output of RS232 serial ports
Signal is flowed, the signal of more pico-ampere tables is aggregated on real-time controller by serial server；The electric current that pico-ampere table will be surveyed
Signal is converted into analog voltage signal, and analog voltage signal access is inserted into the collection of simulant signal in CompactRIO cabinets
Card, realizes the collection, processing and preservation of signal.
Electric cylinders promote drive link to stretch into inside tested device, and drive link promotes trolley to be slided on guide rail again, and first segment is small
The front end of car is provided with small-sized leak detector, the afterbody installation visible sensor of electric cylinders, cable from small-sized leak detector through
Visible sensor is drawn out to by trolley, drive link, the deflation rate of material under vacuum environment is judged according to sensor data acquired.
Beneficial effects of the present invention：The present invention uses curve transmission device in vacuum environment, it is possible to increase transmission device
Movement radius, by the way that drive link is connected with electric cylinders and trolley respectively, and combines gate valve, vacuum chamber and vacuum sealing machine
Structure, can be such that trolley is accurate to up to the position that need to be reached, and have the characteristics that accuracy is high and increases range of movement, while do not destroying
Can have that simple in structure, easy to use, reliability is high, work efficiency is high with changing different detection devices in the case of vacuum environment
And cost it is low the characteristics of, provide reliable service for the related commissioning of evacuated interior and later maintenance；Measured using pico-ampere table
The current signal that sensor obtains, has the advantages that precision is high, real-time is good；Using the servo control system of semiclosed loop,
Have the advantages that positioning accuracy is high, stability is good；The curve transmission measuring system is evacuated interior or the height of other restricted clearances
Precision measure provides reliable service.
Brief description of the drawings
In order to facilitate the understanding of those skilled in the art, the present invention is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is the partial schematic diagram of curve transmission measuring system of the present invention；
Fig. 2 is the partial enlarged view of Fig. 1 in the present invention；
Fig. 3 is the structure diagram of curve transmission measuring system of the present invention；
Fig. 4 is the structure diagram of vacuum chamber in the present invention；
Fig. 5 is the structure diagram of vacuum sealing mechanism in the present invention；
Fig. 6 is the motion control unit of the present invention, measuring unit schematic layout pattern；
Fig. 7 is curve transmission measuring system schematic layout pattern of the present invention；
In attached drawing, parts list represented by the reference numerals is as follows：1- guide rails, 2- sliding blocks, 3- trolleies, 4- guide supportings, 5-
Hinge, 6- drive links, 7- gate valves, 8- vacuum chambers, 9- vacuum sealings mechanism, 10- electric cylinders, 11- racks, 12- highly adjust machine
Structure, 121- supporting racks, 122- support plates, 123- adjusting screw rods, 13- rotate handwheel, 14- rack and pinion mechanisms, and 15- is adjusted and led
Rail, 16- line slideways, 17- sensors.
Embodiment
Technical scheme is clearly and completely described below in conjunction with embodiment, it is clear that described reality
It is only part of the embodiment of the present invention to apply example, instead of all the embodiments.Based on the embodiments of the present invention, this area is general
All other embodiment that logical technical staff is obtained without creative efforts, belongs to what the present invention protected
Scope.
Please refer to Fig.1 shown in -7, the present invention is driven measuring system for a kind of high-precision curve, is realized by curve transmission true
The high-precision motion of empty internal or other restricted clearances and measurement, including gear unit, vacuum sealing unit, motion control unit
And measuring unit；
Wherein, the gear unit includes guide rail 1, sliding block 2, trolley 3, drive link 6, electric cylinders 10, support mechanism；
Guide rail 1 is spliced by different curved sections (curvilinear guide), straightway (line slideway), to coordinate specific movement
Track and space limitation；T-slot is provided with guide rail 1；Sliding block 2 is round table-like, it is installed in the T-slot of guide rail 1 and slides；Often
The bottom for saving trolley 3 connects two sliding blocks 2 by clamp spring, and junction is rotatable；Between adjacent trolley 3, trolley 3 and drive link 6
Between connected by hinge 5；The tail end of drive link 6 and high-precision electric cylinders 10 are affixed.Guide rail 1, sliding block 2, trolley 3, hinge 5,
Drive link 6, electric cylinders 10 coordinate, it can be achieved that trolley 3 drives sensor 17 to do precise motion along fixation locus.
Guide supporting 4 is fixed on inside measurand, for the support of guide rail 1, including adjusting bracket, stay bolt and bottom plate,
Stay bolt lower end connecting bottom board, upper end with adjusting bracket are fixed through adjusting bracket and by two nuts of adaptation；Guide rail 1 and guide rail
Fixed between the adjusting bracket of support 4 by screw；Guide supporting 4 uses drum structure, strengthens support strength, while reduce entirety
Device produces disturbance during the motion.
The line slideway 16 and drive link 6 of guide rail 1 run through whole vacuum sealing unit, which includes plate
Valve 7, vacuum chamber 8, vacuum sealing mechanism 9.6 one end of drive link is connected with the final section of some trolleies 3, the other end and electric cylinders 10
It is affixed.Drive link 6 during the motion, is sealed by vacuum chamber 8, vacuum sealing mechanism 9, is provided with inside vacuum chamber 8
Guide rail adjusting mechanism, the guide rail adjusting mechanism include rotating handwheel 13, rack and pinion mechanism 14, adjust guide rail 15；Rotate handwheel
13 output shaft is intermeshed with rack and pinion mechanism 14, and rack and pinion mechanism 14 is connected with adjusting guide rail 15, adjusts guide rail 15
Slider platform and line slideway 16 it is affixed；During work, twisting rotates 13 drive gear rackwork 14 of handwheel, and then drives and adjust
Section guide rail 15 move, line slideway 16 with adjust guide rail 15 move back and forth, realize with the curved portion of guide rail 1 dock and divide
From；Close before gate valve 7, electric cylinders 10 drive drive link 6 and trolley 3 to drive sensor 17 to retreat to completely in vacuum chamber, then turn round
Turn wheel of starting 13 separates line slideway 16 and the curved portion of guide rail 1, you can closing gate valve 7.
Gear unit and vacuum sealing unit are provided by support mechanism supports and adjusts suitable height.Supporting table
Mechanism includes rack 11 and height adjustment mechanism 12；The rack 11 is installed above vacuum chamber 8, vacuum sealing mechanism 9, electric cylinders
10；The height adjustment mechanism 12 includes supporting rack 121, support plate 122 and adjusting screw rod 123, and support plate 122 is solid with rack 11
Connect, adjusting screw rod 123 is fixedly connected with supporting rack 121 and support plate 122.When needing to adjust height, by height adjustment mechanism 12
In clamp nut unclamp, then rotate adjusting screw rod 123 adjust height, reach predetermined altitude after tighten clamp nut, complete
Highly adjust.Adjusted by the height of height adjustment mechanism 12, it is ensured that whole tracks are located at same level.
The front end of first segment trolley 3 is provided with sensor 17；Electric cylinders 10 drive drive link 6 to promote trolley 3 sliding in guide rail 1
OK, the velocity interval of its operation is 0-150mm/s so that the movement of trolley 3 and drive link 6, caused mechanical disturbance drop to most
It is low.
After being measured, electric cylinders 10 drive drive link 6 back to move, and sensor 17 and trolley 3 are with back moving.Work as biography
Sensor 17 is retreated within vacuum chamber 8, by the guide rail adjusting mechanism inside vacuum chamber 8 that 16 part of line slideway of guide rail 1 is past
After adjust 50mm, separated with the curved portion of guide rail 1, be then shut off gate valve 7, open the cover board on vacuum chamber 8, can be not
Destroy on the basis of measurand vacuum environment, realize the replacement or other operations of sensor.
The vacuum sealing unit ensures the vacuum sealing of the system, and the true of measurand can be protected by closing gate valve 7
Altitude.The vacuum sealing mechanism 9 is the welding vacuum corrugated pipe freely to stretch.Gate valve 7, vacuum chamber 8 and vacuum sealing
9 both ends of mechanism are equipped with vacuum sealing flange, between gate valve 7 and measurand, between gate valve 7 and vacuum chamber 8, vacuum chamber
Blank flange, thereon perforate are all fixed by flanged joint, the opposite side of vacuum sealing mechanism 9 between 8 and vacuum sealing mechanism 9
Vacuum feedthrough is installed, is drawn so as to the signal of sensor 17, while ensure that whole device is in vacuum environment.
The motion control unit include servomotor, gear reducer, motor driving, grating scale, real-time controller and
Limit switch.The transmission parts of electric cylinders 10 and its front end are driven by servomotor, servomotor front end connection gear reducer, and are passed through
Belt pulley is attached with electric cylinders.Motor drives to be attached between servomotor by power line and feedback line, servo electricity
The encoder of machine is as velocity feedback source, using absolute grating scale as the second feedback, i.e. displacement feedback sources.The grating
The reading head of ruler follows gear unit to move together, measures the actual motion displacement of gear unit, the signal wire connection of reading head
Motor drives, and realizes that signal is fed back；The real-time controller passes through the fortune of drive and control of electric machine servomotor as slave computer
It is dynamic；The limit switch includes photoelectric position limit and mechanical limit switch, is respectively connected to motor-driven DI mouthfuls and STO mouthfuls, uses
Exceed its movement travel in preventing gear unit.
The measuring unit includes sensor 17 and corresponding signal acquisition process equipment.The signal of sensor 17 passes through
Cable on the outside of the flange for drawing vacuum sealing mechanism 9, accesses corresponding signal acquisition process equipment through 6 inner space of drive link.
Measured signal is then fed into real-time controller and is post-processed.
Real-time controller can realize control and signal acquisition, the collection and processing of analog signal, and the motor of pico-ampere table
Motion control, and realize that data acquisition is synchronous with motion control.
Corresponding signal acquisition process equipment includes pico-ampere table, serial server, collection of simulant signal card.
Pico-ampere table is used for the current signal that measurement sensor obtains, and is surveyed per current signal all the way using a pico-ampere table
Amount.Pico-ampere table can export the current signal of measurement by serial ports；Also current signal to be measured can be converted into voltage signal, and led to
Cross the output of analog voltage delivery outlet.
Using signal cable of the RS232 cables as pico-ampere table, the serial ports of pico-ampere table is converted to by serial server
Network interface, to be connected on CompactRIO real-time controllers.
The serial server is used to the serial ports of multiple pico-ampere tables being converted to network interface, can be used using serial server
ICP/IP protocol communication substitutes serial communication, so as to greatly improve traffic rate.
The CompactRIO real-time controllers realize the initialization of pico-ampere table, parameter setting, current signal obtain, number
According to the function of processing and preservation.
The collection of simulant signal card is used for gathering the analog voltage signal of pico-ampere table output, by collection of simulant signal card
It is inserted into CompactRIO cabinets, further realizes the processing and preservation of signal.
Moved back and forth using servomotor driving gear unit, pass through power line between motor driving and servomotor
It is attached with feedback line, the encoder of servomotor is as velocity feedback source, using absolute grating scale as the second feedback,
That is displacement feedback sources.Ensure servomotor not over gear unit using two sets of limit switches of photoelectric position limit and mechanical position limitation
Stroke, to ensure the security of operation.
Specifically, connected between pico-ampere table and sensor by Shielded Twisted Pair, a pico-ampere table connected per signal all the way,
Using serial server connection pico-ampere table and CompactRIO real-time controllers, using the analog voltage of cable connection pico-ampere table
Delivery outlet and collection of simulant signal card, then capture card is inserted into CompactRIO cabinets；Servomotor drives it with motor
Between be attached by power line and feedback line, together with the reading head of grating scale is screwed with the slide unit of electric cylinders, reading
Head is connected to motor-driven second feedback interface by signal wire, and photoelectric position limit and mechanical limit switch are coupled with motor drive
On dynamic, motor is driven through cable and is connected with CompactRIO real-time controllers.
Sensor is connected with the front end of trolley, for obtaining current signal to be measured.Using pico-ampere table measurement sensor
The current signal of acquisition.Pico-ampere table on the one hand can be by signal wire outputting measurement value, and measured value is by serial server at this time,
It is then fed into CompactRIO real-time controllers and is post-processed；On the other hand, pico-ampere table turns the current signal of input
Turn to voltage signal, be then acquired using collection of simulant signal card, be re-fed into CompactRIO real-time controllers into
Row post processing.
CompactRIO real-time controllers can realize control and signal acquisition, the collection of analog signal and place of pico-ampere table
Reason, and the motion control of motor, and realize that data acquisition is synchronous with motion control.
Embodiment one：
It is high vacuum environment, the measurement track of probe and activity in accelerator during cyclotron beam current measurement
There is considerable restraint in space.Curvilinear guide 1 is set up in accelerator, measurement radius can cover center as requested to draw-out area
The section of whole radial extension, guide rail 1 and trolley 3 ensures that accelerator can be drawn by the duct of 48mm × 48mm.Accelerator and
Gate valve 7 passes through flanged joint.Electric cylinders 10 promote drive link 6 to stretch into inside accelerator, and drive link 6 promotes trolley 3 on guide rail 1
Slide.The connection motor driving of CompactRIO real-time controllers, controls servomotor, drives electric cylinders to move by gear reducer, light
Second feedback of the grid ruler as servomotor, photoelectric position limit and mechanical limit switch protection system motion are no more than stroke.First
The front end of section trolley 3 is provided with Beam monitor, i.e. sensor 17, after the current signal extraction vacuum for acquisition of popping one's head in, passes through
Pico-ampere table is read.Pico-ampere table can be exported the current signal of measurement by RS232 serial ports, by serial server by more pico-ampere tables
Signal is aggregated on CompactRIO real-time controllers, and can implement the operation such as the initialization of pico-ampere table, parameter setting；Pico-ampere table
The current signal surveyed can be also converted into analog voltage signal, analog voltage signal access is inserted into CompactRIO cabinets
Collection of simulant signal card, realize the collection, processing and preservation of signal.
Specifically, connected between pico-ampere table and probe by Shielded Twisted Pair, probe connects one per current signal all the way
A pico-ampere table, pico-ampere table on the one hand can be by rs 232 serial interface signal line outputting measurement values, and measured value is by serial server at this time, so
After be sent in CompactRIO real-time controllers and post-processed；On the other hand, pico-ampere table converts the current signal of input
For voltage signal, using the analog voltage delivery outlet and collection of simulant signal card of cable connection pico-ampere table, then card insertion will be gathered
Enter into the card slot of CompactRIO real-time controllers, most gathering the result of analog signal at last, to be sent to CompactRIO real-time
Post-processed in controller；It is attached between servomotor and motor driving by power line and feedback line, servomotor
Encoder as velocity feedback source, using absolute grating scale as the second feedback, i.e. displacement feedback sources.The reading of grating scale
Together with head is screwed with the slide unit of electric cylinders, reading head is connected to motor-driven second feedback interface by signal wire,
Photoelectric position limit and mechanical limit switch are coupled with motor-driven DI mouthfuls and STO mouthfuls, motor driver by cable with
CompactRIO real-time controllers are connected.Generally speaking, CompactRIO real-time controllers can realize control and the letter of pico-ampere table
Number obtain, the collection and processing of analog signal, and the motion control of motor, and realize the same of data acquisition and motion control
Step.
Embodiment two：
Carry out deflation rate diagnosis to surveyed component under specific vacuum environment, the measurement method used for：Electric cylinders 10 promote
Drive link 6 is stretched into inside tested device, and drive link 6 promotes trolley 3 to be slided on guide rail 1 again, the front end installation of first segment trolley 3
There are small-sized leak detector, i.e. sensor 17, the overlay area of guide rail 1 is determined according to measurement position and distributed needs.The tail of electric cylinders 10
Visible sensor is installed in portion, and cable is drawn out to visible sensor from small-sized leak detector via trolley 3, drive link 6,
Whether the deflation rate for judging material under vacuum environment according to sensor data acquired meets the requirements.
The present invention uses curve transmission device in vacuum environment, can flexibly tackle various measurement position demands, pass through song
The splicing design of line guide rail, drive link is connected with electric cylinders and trolley respectively, trolley can be made to be accurate to up to required position, tied at the same time
Close gate valve, vacuum chamber and vacuum sealing mechanism, it can be achieved that in the case where not destroying vacuum environment the work(such as replaceable sensor
Energy.Whole system is simple in structure, easy to use, and reliability is high, and work efficiency is high, and cost is relatively low, can be the phase of evacuated interior
Close debugging and later maintenance is provided and accurately and reliably serviced.
Present invention disclosed above preferred embodiment is only intended to help and illustrates the present invention.Preferred embodiment is not detailed
All details are described, are not limited the invention to the specific embodiments described.Obviously, according to the content of this specification,
It can make many modifications and variations.This specification is chosen and specifically describes these embodiments, is in order to preferably explain the present invention
Principle and practical application so that skilled artisan can be best understood by and utilize the present invention.The present invention is only
Limited by claims and its four corner and equivalent.
Claims (10)
1. a kind of high-precision curve is driven measuring system, it is characterised in that including gear unit, vacuum sealing unit, movement control
Unit processed and measuring unit；
Wherein, the gear unit includes guide rail (1), trolley (3), drive link (6), electric cylinders (10)；Guide rail is placed with (1)
Some trolleies (3)；Drive link (6) one end is connected with the final section trolley in some trolleies (3), and the other end connects with electric cylinders (10)
Connect；
The vacuum sealing unit includes gate valve (7), vacuum chamber (8), vacuum sealing mechanism (9), and the straight line of guide rail (1) is led
Rail (16) and drive link (6) run through whole vacuum sealing unit；
The motion control unit includes servomotor, gear reducer, motor driving, grating scale, real-time controller and spacing
Switch；Electric cylinders (10) are driven by servomotor；
The measuring unit includes sensor (17)；The front end of first segment trolley in some trolleies is provided with sensor
(17)。
A kind of 2. high-precision curve transmission measuring system according to claim 1, it is characterised in that the guide rail (1)
It is spliced by different curved sections, straightway；T-slot is provided with guide rail (1), sliding block (2) is round table-like, it is installed on guide rail
(1) slided in T-slot；The bottom for often saving trolley (3) connects two sliding blocks (2) by clamp spring, and junction is rotatable；It is adjacent small
Connected between car (3), between trolley (3) and drive link (6) by hinge (5)；Guide rail (1), sliding block (2), trolley (3), hinge
(5), drive link (6), electric cylinders (10) coordinate, and realize that trolley (3) drives sensor (17) to do precise motion along fixation locus；Guide rail
(1) it is installed in guide supporting (4).
A kind of 3. high-precision curve transmission measuring system according to claim 1, it is characterised in that the gate valve
(7) one end is connected with measurand, and the other end is connected with vacuum chamber (8), and vacuum chamber (8) is connected with vacuum sealing mechanism (9) again；
One surface cover of vacuum chamber (8) can be opened, easy to sensor (17) and the Operation and Maintenance of trolley (3)；When gate valve (7) is closed,
The influence that the vacuum environment of protection measurand acts from outside；The vacuum sealing mechanism (9) is the welding freely stretched
Vacuum corrugated pipe；Gate valve (7), vacuum chamber (8) and vacuum sealing mechanism (9) both ends are equipped with vacuum sealing flange, gate valve
(7) it is all logical between measurand, between gate valve (7) and vacuum chamber (8), between vacuum chamber (8) and vacuum sealing mechanism (9)
Flanged joint is crossed, the opposite side of vacuum sealing mechanism (9) fixes blank flange, the installation vacuum feedthrough of perforate thereon.
A kind of 4. high-precision curve transmission measuring system according to claim 1, it is characterised in that the gear unit
There is provided with vacuum sealing unit by support mechanism and support and adjust suitable height；Support mechanism includes rack (11)
With height adjustment mechanism (12)；The rack (11) is installed above vacuum chamber (8), vacuum sealing mechanism (9), electric cylinders (10)；
The height adjustment mechanism (12) includes supporting rack (121), support plate (122) and adjusting screw rod (123), support plate (122) with
Rack (11) is affixed, and adjusting screw rod (123) is fixedly connected with supporting rack (121) and support plate (122).
A kind of 5. high-precision curve transmission measuring system according to claim 1, it is characterised in that the guide rail (1)
Line slideway (16) and drive link (6) run through whole vacuum sealing unit；Guide rail adjusting mechanism is housed in vacuum chamber (8), is wrapped
Include and rotate handwheel (13), rack and pinion mechanism (14), adjust guide rail (15), rotate the output shaft and rack-and-pinion machine of handwheel (13)
Structure (14) be intermeshed, rack and pinion mechanism (14) with adjust guide rail (15) be connected, adjust guide rail (15) Slider platform and directly
Line guide rail (16) is affixed；During work, twisting rotates handwheel (13) drive gear rackwork (14), and then drives and adjust guide rail
(15) move, line slideway (16) with adjust guide rail (15) move back and forth, realize with the curved portion of guide rail (1) dock and
Separation；Close before gate valve (7), electric cylinders (10) driving drive link (6) and trolley (3) drive sensor (17) to retreat to completely very
In cavity, twisting, which rotates handwheel (13), separates line slideway (16) and the curved portion of guide rail (1), you can closes gate valve
(7)。
A kind of 6. high-precision curve transmission measuring system according to claim 1, it is characterised in that the electric cylinders (10)
Drive link (6) is driven to promote trolley (3) to be slided in guide rail (1), its velocity interval run is 0-150mm/s；It is measured
Afterwards, electric cylinders (10) drive drive link (6) back to move, and sensor (17) and trolley (3) are with back moving；When sensor (17)
Retreat within vacuum chamber (8), by the internal guide rail adjusting mechanism of vacuum chamber (8) by line slideway (16) part of guide rail (1)
50mm is adjusted backward, is separated with the curved portion of guide rail (1), is then shut off gate valve (7), opens the cover board on vacuum chamber (8).
A kind of 7. high-precision curve transmission measuring system according to claim 1, it is characterised in that the servomotor
Front end connects gear reducer, and is attached by belt pulley and electric cylinders (10), driving electric cylinders movement；The reading of the grating scale
Head follows gear unit to move together, for measuring the actual motion displacement of gear unit, the signal wire connection motor of reading head
Driving, realizes that signal is fed back；The real-time controller passes through the movement of drive and control of electric machine servomotor as slave computer；
The limit switch includes photoelectric position limit and mechanical limit switch, is respectively connected to motor-driven D I mouthfuls and STO mouthfuls.
A kind of 8. high-precision curve transmission measuring system according to claim 1, it is characterised in that the sensor
(17) signal is by cable through drive link (6) inner space, and on the outside of the flange for drawing vacuum sealing mechanism (9), access is corresponding
Signal acquisition process equipment；Measured signal is then fed into real-time controller and is post-processed.
9. a kind of high-precision curve transmission measuring system according to claim 1, it is characterised in that electric cylinders promote drive link
Stretch into inside accelerator, drive link promotes trolley to be slided on guide rail；Real-time controller connection motor driving, control servo electricity
Machine, drives electric cylinders to move by gear reducer, second feedback of the grating scale as servomotor, photoelectric position limit and mechanical limit switch
Protection system motion is no more than stroke；The front end of first segment trolley is provided with Beam monitor, the current signal for acquisition of popping one's head in
After drawing vacuum, read by pico-ampere table；Pico-ampere table passes through serial server by the current signal of RS232 serial ports output measurement
The signal of more pico-ampere tables is aggregated on real-time controller；The current signal surveyed is converted into analog voltage letter by pico-ampere table
Number, analog voltage signal access is inserted into the collection of simulant signal card in CompactRIO cabinets, realizes collection, the processing of signal
With preservation.
10. a kind of high-precision curve transmission measuring system according to claim 1, it is characterised in that electric cylinders promote transmission
Bar is stretched into inside tested device, and drive link promotes trolley to be slided on guide rail again, and the front end of first segment trolley is provided with small-sized inspection
Instrument is leaked, the afterbody installation visible sensor of electric cylinders, cable is drawn out to from small-sized leak detector via trolley, drive link can
Depending on changing sensor, the deflation rate of material under vacuum environment is judged according to sensor data acquired.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810111603.7A CN108036809B (en) | 2018-02-05 | 2018-02-05 | High-precision curve transmission measurement system |
| PCT/CN2018/076124 WO2019148537A1 (en) | 2018-02-05 | 2018-02-10 | High-precision curve transmission measuring system |
| JP2018566275A JP6697659B1 (en) | 2018-02-05 | 2018-02-10 | High-precision curve transmission measuring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810111603.7A CN108036809B (en) | 2018-02-05 | 2018-02-05 | High-precision curve transmission measurement system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108036809A true CN108036809A (en) | 2018-05-15 |
| CN108036809B CN108036809B (en) | 2024-08-20 |
Family
ID=62097292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810111603.7A Active CN108036809B (en) | 2018-02-05 | 2018-02-05 | High-precision curve transmission measurement system |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6697659B1 (en) |
| CN (1) | CN108036809B (en) |
| WO (1) | WO2019148537A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108762318A (en) * | 2018-08-16 | 2018-11-06 | 合肥中科离子医学技术装备有限公司 | A kind of Multi-axis high-precision closed loop feedback kinetic control system |
| CN109607074A (en) * | 2018-11-29 | 2019-04-12 | 中国船舶工业系统工程研究院 | A kind of slide block device of compatible straight line and warp rail |
| CN111399029A (en) * | 2020-03-30 | 2020-07-10 | 合肥中科离子医学技术装备有限公司 | Continuous calibration method for curve motion |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113155449B (en) * | 2021-05-17 | 2022-06-07 | 长沙理工大学 | Non-contact sliding pair dynamics experiment platform |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003109800A (en) * | 2001-10-01 | 2003-04-11 | Mitsubishi Electric Corp | Electron accelerator |
| CN103486140A (en) * | 2013-09-18 | 2014-01-01 | 浙江工业大学 | High-precision transmission device under thermal vacuum environment |
| CN204297559U (en) * | 2014-10-21 | 2015-04-29 | 北京航天长征飞行器研究所 | A kind of vacuum and low temperature arc lower high accuracy running gear |
| CN205003280U (en) * | 2015-08-25 | 2016-01-27 | 北京环境特性研究所 | RCS measures and uses sharp positioning system |
| CN106131390A (en) * | 2016-08-31 | 2016-11-16 | 南京理工大学 | A kind of straight bend dolly and positioner thereof |
| EP3136071A1 (en) * | 2015-08-25 | 2017-03-01 | The Swatch Group Research and Development Ltd. | Device and method for calibrating a device for measuring altitude |
| CN106823160A (en) * | 2017-01-19 | 2017-06-13 | 合肥中科离子医学技术装备有限公司 | Mechanism is blocked for the line in cyclotron proton heavy ion medical treatment device |
| CN107101830A (en) * | 2017-04-30 | 2017-08-29 | 南京理工大学 | A kind of electrical servo straight line loads test system |
| CN207798118U (en) * | 2018-02-05 | 2018-08-31 | 合肥中科离子医学技术装备有限公司 | A kind of high-precision curve transmission measuring system |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0176278B1 (en) * | 1995-11-08 | 1999-05-15 | 김인기 | The position acquisiting apparatus for passenger rapid transit system |
| WO2006042522A1 (en) * | 2004-10-19 | 2006-04-27 | Gerhard Haidinger | Rail camera system |
| PT2602583E (en) * | 2011-12-05 | 2015-07-02 | Université de Liège | Low coherence interferometric system for phase stepping shearography combined with 3d profilometry |
| CN206181531U (en) * | 2016-08-30 | 2017-05-17 | 中广核达胜加速器技术有限公司 | Accelerator convenient to overhaul |
| CN206347090U (en) * | 2016-11-17 | 2017-07-21 | 费勉仪器科技（上海）有限公司 | A kind of vacuum pipe system of magnetic driving mechanism and the application transmission mechanism |
| CN107676448B (en) * | 2017-11-03 | 2018-08-28 | 合肥中科离子医学技术装备有限公司 | One kind being used for vacuum environment bend transmission device |
| CN207349385U (en) * | 2017-11-03 | 2018-05-11 | 合肥中科离子医学技术装备有限公司 | One kind is used for vacuum environment bend transmission device |
-
2018
- 2018-02-05 CN CN201810111603.7A patent/CN108036809B/en active Active
- 2018-02-10 WO PCT/CN2018/076124 patent/WO2019148537A1/en active Application Filing
- 2018-02-10 JP JP2018566275A patent/JP6697659B1/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003109800A (en) * | 2001-10-01 | 2003-04-11 | Mitsubishi Electric Corp | Electron accelerator |
| CN103486140A (en) * | 2013-09-18 | 2014-01-01 | 浙江工业大学 | High-precision transmission device under thermal vacuum environment |
| CN204297559U (en) * | 2014-10-21 | 2015-04-29 | 北京航天长征飞行器研究所 | A kind of vacuum and low temperature arc lower high accuracy running gear |
| CN205003280U (en) * | 2015-08-25 | 2016-01-27 | 北京环境特性研究所 | RCS measures and uses sharp positioning system |
| EP3136071A1 (en) * | 2015-08-25 | 2017-03-01 | The Swatch Group Research and Development Ltd. | Device and method for calibrating a device for measuring altitude |
| CN106131390A (en) * | 2016-08-31 | 2016-11-16 | 南京理工大学 | A kind of straight bend dolly and positioner thereof |
| CN106823160A (en) * | 2017-01-19 | 2017-06-13 | 合肥中科离子医学技术装备有限公司 | Mechanism is blocked for the line in cyclotron proton heavy ion medical treatment device |
| CN107101830A (en) * | 2017-04-30 | 2017-08-29 | 南京理工大学 | A kind of electrical servo straight line loads test system |
| CN207798118U (en) * | 2018-02-05 | 2018-08-31 | 合肥中科离子医学技术装备有限公司 | A kind of high-precision curve transmission measuring system |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108762318A (en) * | 2018-08-16 | 2018-11-06 | 合肥中科离子医学技术装备有限公司 | A kind of Multi-axis high-precision closed loop feedback kinetic control system |
| CN109607074A (en) * | 2018-11-29 | 2019-04-12 | 中国船舶工业系统工程研究院 | A kind of slide block device of compatible straight line and warp rail |
| CN109607074B (en) * | 2018-11-29 | 2020-12-25 | 中国船舶工业系统工程研究院 | Slider device compatible with linear and curved tracks |
| CN111399029A (en) * | 2020-03-30 | 2020-07-10 | 合肥中科离子医学技术装备有限公司 | Continuous calibration method for curve motion |
| CN111399029B (en) * | 2020-03-30 | 2022-03-01 | 合肥中科离子医学技术装备有限公司 | Continuous calibration method for curve motion |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019148537A1 (en) | 2019-08-08 |
| JP6697659B1 (en) | 2020-05-27 |
| JP2020517907A (en) | 2020-06-18 |
| CN108036809B (en) | 2024-08-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108036809A (en) | A kind of high-precision curve is driven measuring system | |
| CN107101830B (en) | A kind of electrical servo straight line load test system | |
| EP3379237B1 (en) | Sample manipulator for rotating tensile or compressive stress and corresponding method | |
| CN101487688B (en) | Method and apparatus for measuring and compensating transmission error of electric cylinder | |
| CN105606182B (en) | Full-automatic unmanned tandem calibration device for water meters on duty | |
| CN103499927B (en) | A kind of DC servo motor position control system | |
| CN103901308B (en) | The intelligent testboard of electric operator of a kind of electro-hydraulic brake and test method thereof | |
| CN104122543B (en) | A kind of hydrophone automatic lifting revolving scanning device | |
| CN207798118U (en) | A kind of high-precision curve transmission measuring system | |
| WO2015149984A1 (en) | Assembly and method for testing point machines | |
| CN111319028A (en) | Rope traction parallel robot with variable structure and kinematics multi-solution solving method thereof | |
| DE2440085A1 (en) | Contactless measurement of contact wire position - is for electric railways and measures the height and lateral position | |
| CN107894221A (en) | Gap sensor dynamic testboard and static test equipment | |
| CN106767604B (en) | Dummy car running fix control device and method | |
| DE19636418A1 (en) | Pneumatic actuator with regulator function | |
| CN207349385U (en) | One kind is used for vacuum environment bend transmission device | |
| CN105193508B (en) | A kind of experimental bench available for micro- apparatus three-dimensional force demarcation of performing the operation | |
| CN109632292A (en) | A kind of gear-box torque test equipment | |
| CN210108315U (en) | Non-contact detection device for underground pipeline size measurement | |
| CN107676448B (en) | One kind being used for vacuum environment bend transmission device | |
| CN109706593B (en) | Ribbon loom and warp tension automatic control system thereof | |
| DE1780642C3 (en) | Device on vehicles used for measuring, registering and / or correcting the position, in particular the lateral position, of railroad tracks | |
| CN107628290A (en) | A kind of Lubricating oil filling machine | |
| CN1413746A (en) | Forming detection method of multi-blade collimator and multi-blade collimator | |
| CN107219042B (en) | Check valve air-tightness automatic test equipment and test method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |