CN108010873A - A kind of wafer expands brilliant machine automatically - Google Patents
A kind of wafer expands brilliant machine automatically Download PDFInfo
- Publication number
- CN108010873A CN108010873A CN201711475972.6A CN201711475972A CN108010873A CN 108010873 A CN108010873 A CN 108010873A CN 201711475972 A CN201711475972 A CN 201711475972A CN 108010873 A CN108010873 A CN 108010873A
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- expand
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- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 230000000630 rising effect Effects 0.000 claims description 11
- 241001062009 Indigofera Species 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 abstract description 11
- 238000005538 encapsulation Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000006049 ring expansion reaction Methods 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Storage Of Web-Like Or Filamentary Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention belongs to technical field of semiconductor encapsulation, it is related to a kind of wafer and expands brilliant machine automatically, including pressure ring cylinder, cylinder fixed support, pressure ring Telescopic-cylinder bar, pressure ring disk, blue film fixed frame, expand wafer disks, expand brilliant Telescopic-cylinder bar, expand brilliant cylinder and control box, it is characterized in that, the pressure ring cylinder is fixed in cylinder fixed support, and pressure ring Telescopic-cylinder end is fixed through cylinder fixed support with pressure ring disk, the cylinder fixed support is placed in control box, expansion brilliant cylinder is installed in the control box, the brilliant Telescopic-cylinder bar of expansion is pierced by the upper cover of control box and expands brilliant disk and fixes, blue film fixed frame is fixed with the control box, it is described to expand brilliant disk positioned at blue film fixed frame center；The brilliant machine of expansion of the invention is easy to operate, convenient, the brilliant spacing-controllable of expansion, and the brilliant machine of expansion solves the problems, such as that chip difficulty on auto loading machine takes piece with chip chamber after blue film heating function, expansion crystalline substance away from width automatically.
Description
Technical field
The present invention relates to a kind of wafer to expand brilliant machine automatically, belongs to technical field of semiconductor encapsulation.
Background technology
Society's rapid development, cost of labor is constantly surging, and automation has been the topic that all enterprises pay high attention to, half
In conductor encapsulation technology field, Die Bonder has spread to each manufacturer, the factory of domestic production Die Bonder
Family also comes into being.But because domestic equipment level can not accomplish the Die Bonder of such as external ASM productions speed,
Precision, function are highly integrated etc. to be required, it is often more important that import equipment price is very expensive, and an equipment is also up to a million easily
Investment, for middle small package enterprise, cost is too high, can only buy domestic manufacturer production Die Bonder.Due to
In the large-scale production starting evening of domestic Die Bonder, the designed capacity deficiency of software and hardware, the integrated functionality of equipment is much
Do not reach the requirement of import equipment, can not realize that the automatic of wafer expands brilliant function, but take and first carry out expanding brilliant, Ran Houyong manually
Hair-dryer heats, and finally expands brilliant, this operating method not only inefficiency, operation imprudence with the method drawn high to carry out wafer
Cause chip edge stretch tight side the problems such as, it is often more important that wafer expand it is brilliant after, chip is not at the center of ring expansion, chip and chip
Between spacing width differ, it is past because the distance of ring expansion and crystal round fringes is inconsistent after ring expansion is placed on Die Bonder
Toward the problems such as causing to leak identification chip, hit thimble cap.
Emphasis of the present invention solves the problems, such as above production, and the present invention expands brilliant full automation, and speed is fast and laborsaving, chip
Spacing is adjustable, expand it is brilliant after chip chamber away from consistent, become the important crucial ancillary equipment of automatic die Bonder.
The content of the invention
It is an object of the present invention to overcome the above deficiencies, thus provide it is a kind of it is easy to operate, convenient, expand intergranular away from can
The wafer for being suitable for transistor encapsulation of control expands brilliant machine automatically, and the expansion crystalline substance equipment full automation, speed is fast and laborsaving, chip chamber
Away from adjustable, expand it is brilliant after chip chamber away from consistent, become the important crucial ancillary equipment of automatic die Bonder.
To realize above technical purpose, the technical solution adopted by the present invention is：A kind of wafer expands brilliant machine, including pressure ring automatically
Cylinder, cylinder fixed support, pressure ring Telescopic-cylinder bar, pressure ring disk, blue film fixed frame, expansion wafer disks, the brilliant Telescopic-cylinder bar of expansion, expansion
Brilliant cylinder and control box, it is characterised in that the pressure ring cylinder is fixed in cylinder fixed support, and pressure ring Telescopic-cylinder end is worn
Cross cylinder fixed support to fix with pressure ring disk, the cylinder fixed support is placed in control box, is provided with the control box
Expand brilliant cylinder, the brilliant Telescopic-cylinder bar of expansion is pierced by the upper cover of control box and expands brilliant disk and fixes, and indigo plant is fixed with the control box
Film fixed frame, it is described to expand brilliant disk positioned at blue film fixed frame center.
Further, the front panel of control box is equipped with the brilliant disk declines button of expansion, the brilliant disk rising button of expansion, pressure ring disk and declines
Button, temperature controller, heater switch, power switch, fuse holder, the control box is interior to be equipped with intermediate relay, two five logical lists
Feng Shishuan electric control solenoid valves and solid-state relay in electric control solenoid valve, 3 position-5 way；
The power input of the heater switch and temperature controller connects, and the output terminal of the temperature controller is connected with solid-state relay,
The output terminal of the solid-state relay is electrically connected with expanding the heating tube in brilliant disk；The input terminal of the power switch is connected with insurance
Silk seat, output terminal are electrically connected with heater switch, single electric control solenoid valve, double electric control solenoid valves and intermediate relay respectively；For controlling
Single electric control solenoid valve of the up and down action of pressure ring cylinder processed is electrically connected with pressure ring disk declines button, expands the upper of brilliant cylinder for controlling
Double electric control solenoid valves of lower action are divided into double right coils of electric control solenoid valve and double electric control solenoid valve left coils, double electric control electromagnetics
The right coil of valve is electrically connected with expanding brilliant disk declines button, double electric control solenoid valve left coils by intermediate relay normally-closed contact and
Expand brilliant disk rising button to be electrically connected, the intermediate relay is electrically connected with magnetic potential inductor.
Further, the magnetic potential inductor is on the brilliant cylinder of expansion.
Further, in control box, the height of the cylinder fixed support is higher than the height of blue film fixed frame.
Further, the blue film fixed frame center is hollow disk, exposes the brilliant disk of expansion, side is equipped with rotatable lid
Plate, opposite side are equipped with the bayonet lock for being used for fixing cover board.
Further, described to expand brilliant disk circumferential edges equipped with the brilliant ring of minor diameter expansion, the pressure ring disk circumferential edges are equipped with big
Diameter expands brilliant ring, and the minor diameter, which expands brilliant ring, can be embedded in the inner wall that major diameter expands brilliant ring.
Further, the hollow disk border at the blue film fixed frame center is equipped with circular rubber cushion 0, the circle rubber cushion 0
Diameter be more than the diameter for expanding brilliant disk.
From the above, it can be seen that the technical effects of the invention are that：
1）, whole equipment it is small, as the ancillary equipment of auto loading machine, do not take up space and cost be low；
2）And traditional manual expands crystalline phase ratio, the present invention expands brilliant full automation by the control circuit wafer in control box,
Speed is fast and laborsaving；
3）, position of the present invention by adjusting magnetic potential inductor on brilliant cylinder is expanded, to adjust the position expanded brilliant cylinder and risen,
During so as to reach expansion crystalline substance, chip function adjustable in pitch；
4）, the present invention circular rubber cushion is equipped with blue film fixed frame so that expanding indigo plant film during crystalline substance will not loosen, reached expansion it is brilliant after core
Piece spacing is consistent, expands brilliant uniform effect；
5）, the present invention expansion crystalline substance disk there is heating function, heating tube be housed expanding in brilliant disk, the blue film of aging, which is layered on, to be expanded on crystalline substance disk
Afterwards, soften after being heated, improve the brilliant effect of expansion.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention.
Fig. 2 is blue film fixed frame of the invention and the overlooking the structure diagram for expanding wafer disks.
Fig. 3 is control box inner control circuit schematic diagram of the present invention.
Fig. 4 is the attachment structure schematic diagram of electric control solenoid valve and cylinder of the present invention.
Fig. 5 is that wafer of the present invention expands the structure diagram after crystalline substance.
Description of reference numerals：1- pressure rings cylinder, 2- cylinder fixed supports, 3- pressure ring Telescopic-cylinders bar, 4- pressure rings disk, 5- cores
Piece, 6- bayonet locks, 7- indigo plant films fixed frame, 8- expand wafer disks, 9- cover boards, 10- and expand brilliant Telescopic-cylinder bar, the brilliant cylinder of 11- expansions, 12- controls
Box processed, 13- pressure ring disks declines button, 14- expand brilliant disk rising button, 15- expands brilliant disk declines button, 16- temperature controllers, 17- heating
Switch, 18- power switches, 19- fuse holders, 20- circles rubber cushion, 21- magnetic potentials inductor, 22- double electric control solenoid valve, 23-
The mono- electric control solenoid valve of intermediate relay, 24-, 25- solid-state relays, 26- minor diameters expand brilliant ring and 27- major diameters expand brilliant ring.
Embodiment
With reference to specific drawings and examples, the invention will be further described.
With reference to the accompanying drawings shown in 1 and Fig. 2, a kind of wafer expands brilliant machine, including pressure ring cylinder 1, cylinder fixed support 2, pressure automatically
Ring Telescopic-cylinder bar 3, pressure ring disk 4, blue film fixed frame 7, expand wafer disks 8, expand brilliant Telescopic-cylinder bar 10, expand brilliant cylinder 11 and control
Box 12, it is characterised in that the pressure ring cylinder 1 is fixed in cylinder fixed support 2, and pressure ring Telescopic-cylinder end 3 passes through cylinder
Fixing bracket 2 is fixed with pressure ring disk 4, and the cylinder fixed support 2 is placed in control box 12, in control box 12, the gas
The height of cylinder fixing bracket 2 is higher than the height of blue film fixed frame 7；The brilliant cylinder 11 of expansion, the expansion are installed in the control box 12
The upper cover that brilliant Telescopic-cylinder bar 10 is pierced by control box 12 is fixed with expanding brilliant disk 8, and blue film fixed frame is fixed with the control box 12
7, described to expand brilliant disk 8 positioned at blue 7 center of film fixed frame, 7 center of indigo plant film fixed frame is hollow disk, exposes the brilliant disk of expansion
8, side is equipped with rotatable cover board 9, and opposite side is equipped with the bayonet lock 6 for being used for fixing cover board 9,7 center of indigo plant film fixed frame
Hollow disk border is equipped with circular rubber cushion 20, and the diameter of the circle rubber cushion 20 is more than the diameter for expanding brilliant disk 8, described to expand brilliant disk 8
Circumferential edges are equipped with minor diameter and expand brilliant ring 26, and the major diameter that 4 circumferential edges of pressure ring disk is equipped with expands brilliant ring 27, and the minor diameter expands
The major diameter that brilliant ring 26 can be embedded in expands the inner wall of brilliant ring 27.
The front panel of control box 12 is pressed equipped with the brilliant disk declines button 15 of expansion, the brilliant disk rising button 14 of expansion, the decline of pressure ring disk
Button 13, temperature controller 16, heater switch 17, power switch 18, fuse holder 19, the control box 12 is interior to be equipped with intermediate relay
23rd, single electric control solenoid valve 24, double electric control solenoid valves 22 and solid-state relay 25；
As shown in figure 3, the heater switch 17 is connected with the power input of temperature controller 16, the output terminal of the temperature controller 16 with
Solid-state relay 25 connects, and the output terminal of the solid-state relay 25 is electrically connected with expanding the heating tube in brilliant disk 8；The power supply is opened
The input terminal for closing 18 is connected with fuse holder 19, output terminal respectively with heater switch 17, single electric control solenoid valve 24, double electric control electromagnetics
Valve 22 and intermediate relay 23 are electrically connected；For controlling single electric control solenoid valve 24 of the up and down action of pressure ring cylinder 1 and pressure ring disk
Declines button 13 is electrically connected, for controlling the double electric control solenoid valves 22 for the up and down action for expanding brilliant cylinder 11 to divide for double electric control solenoid valves
Right coil 22a and double electric control solenoid valve left coil 22b, double right coil 22a of electric control solenoid valve is with expanding brilliant disk declines button 15
It is electrically connected, double electric control solenoid valve left coil 22b are by intermediate relay normally-closed contact 23a with expanding brilliant 14 electricity of disk rising button
Connection, the intermediate relay 23 are electrically connected with magnetic potential inductor 21, and the magnetic potential inductor 21 is mounted in the brilliant cylinder 11 of expansion
On.
As shown in figure 4, the list electric control solenoid valve 24 is connected with pressure ring cylinder 1, for controlling pressure ring cylinder to be moved about 1
Make, double electric control solenoid valves 22 are connected with expanding brilliant cylinder 11, for controlling the brilliant cylinder 11 of expansion to move up and down.
The expansion crystalline substance disk 8 of the present invention carries heating function, its mainly by the output control solid-state relay 25 of temperature controller 16,
The output control of solid-state relay 24 expands the power on/off of the heating tube in brilliant disk 8, realizes temperature controlling function；When the blue film of aging is layered on
After expanding on brilliant disk 8, soften after being heated, the brilliant effect of expansion can be improved.
For the present invention when expanding brilliant, 5 spacing of chip can realize adjustable function, and specific implementation step is：Expand brilliant disk when pinning
During rising button 14, double electric control solenoid valve left coil 22b, which are powered, to be closed, and is expanded brilliant cylinder 11 and is risen, and is risen to when expanding brilliant cylinder 11
Behind the position of magnetic potential inductor 21, magnetic potential inductor 21 is induced electrified, its inner contact closure, the coil of intermediate relay
23 are powered, and intermediate relay normally-closed contact 23a is disconnected, and the coil 22b power-off of double electric control solenoid valves, expands brilliant cylinder 11 and stop rising
And keep motionless in this position；Therefore position that can be by adjusting magnetic potential inductor 21 on brilliant cylinder 11 is expanded, expands to adjust
The position that brilliant cylinder 11 rises, so that when reaching expansion crystalline substance, 5 function adjustable in pitch of chip；When pinning pressure ring disk declines button 13
When, single electric control solenoid valve 24, which is powered, to be closed, and pressure ring cylinder 1 declines, and after expanding crystalline substance, unclamps pressure ring disk declines button 13, single automatically controlled electricity
Magnet valve 24 disconnects, and pressure ring cylinder 1 rises；When pinning expansion crystalline substance disk declines button 15, double right coil 22a of electric control solenoid valve, which are powered, to be closed
Close, expand brilliant cylinder 11 and decline.
The present invention operation principle be：18 are turned on the power switch, opens heater switch 17,8 temperature of wafer disks to be expanded rises
To after design temperature（Such as 50 degree）, minor diameter is expanded brilliant ring 26 and is stuck on the brilliant disk 8 of expansion, then the blue film for being loaded with chip 5 is tiled
On brilliant disk 8 and blue film fixed frame 7 is expanded, cover board 9 is depressed, cover board 9 is fixed with bayonet lock 6, blue film is crushed on circular rubber cushion at this time
On 20, indigo plant film will not loosen when ensureing to expand brilliant, be further ensured that 5 spacing of chip is consistent when expansion is brilliant；Major diameter is expanded brilliant ring 26 again
It is placed in pressure ring disk 4, pins the brilliant disk rising button 14 of expansion, the brilliant drive of cylinder 11 of expansion is expanded brilliant disk 8 and slowly risen upwards, makes on blue film
Chip 5 expands, and after expanding brilliant cylinder 11 and rising to the position of adjusted magnetic potential inductor 21, expands brilliant cylinder 11 and stops and keep
In this position, pressure ring declines button 13 is pinned, pressure ring cylinder 1 drives pressure ring disk 4 to decline by pressure ring Telescopic-cylinder bar 3, makes big
Diameter expands brilliant ring 27 and is just stuck on the brilliant ring 26 of minor diameter expansion, then unclamps pressure ring declines button 13, pressure ring disk 4 rises back to original
Position, presses the brilliant disk declines button 15 of expansion, expands brilliant disk 8 and drops to original position, then unclamps bayonet lock 6, open cover board 9, take out what is expanded
Chip 5, as shown in figure 5, being sliced off with blade blue film unnecessary outside brilliant ring is expanded, expands brilliant complete.
Above to the present invention and embodiments thereof be described, this describe it is no restricted, shown in attached drawing also only
It is one of embodiments of the present invention, actual structure is not limited thereto.If those of ordinary skill in the art are opened by it
Show, without departing from the spirit of the invention, not inventively design the structure side similar to the technical solution
Formula and embodiment, are within the scope of protection of the invention.
Claims (7)
1. a kind of wafer expands brilliant machine, including pressure ring cylinder automatically（1）, cylinder fixed support（2）, pressure ring Telescopic-cylinder bar（3）, pressure
The ring disk（4）, blue film fixed frame（7）, expand wafer disks（8）, expand brilliant Telescopic-cylinder bar（10）, expand brilliant cylinder（11）And control box
（12）, it is characterised in that the pressure ring cylinder（1）It is fixed on cylinder fixed support（2）On, and pressure ring Telescopic-cylinder end（3）Wear
Cross cylinder fixed support（2）With pressure ring disk（4）It is fixed, the cylinder fixed support（2）It is placed on control box（12）On, the control
Box processed（12）The brilliant cylinder of expansion is inside installed（11）, it is described to expand brilliant Telescopic-cylinder bar（10）It is pierced by control box（12）Upper cover it is brilliant with expanding
Disk（8）It is fixed, the control box（12）On be fixed with blue film fixed frame（7）, it is described to expand brilliant disk（8）Positioned at blue film fixed frame（7）
Center.
2. a kind of wafer according to claim 1 expands brilliant machine automatically, it is characterised in that：Control box（12）Front panel on set
There is the brilliant disk declines button of expansion（15）, expand brilliant disk rising button（14）, pressure ring disk declines button（13）, temperature controller（16）, heating open
Close（17）, power switch（18）, fuse holder（19）, the control box（12）It is interior to be equipped with intermediate relay（23）, two five it is logical
Single electric control solenoid valve（24）, Feng Shishuan electric control solenoid valves in 3 position-5 way（22）And solid-state relay（25）；
The heater switch（17）With temperature controller（16）Power input connection, the temperature controller（16）Output terminal and solid-state
Relay（25）Connection, the solid-state relay（25）Output terminal with expanding brilliant disk（8）Interior heating tube is electrically connected；The power supply
Switch（18）Input terminal be connected with fuse holder（19）, output terminal respectively with heater switch（17）, single electric control solenoid valve（24）、
Double electric control solenoid valves（22）And intermediate relay（23）It is electrically connected；For controlling pressure ring cylinder（1）Up and down action list it is automatically controlled
Solenoid valve（24）With pressure ring disk declines button（13）It is electrically connected, expands brilliant cylinder for controlling（11）Up and down action double automatically controlled electricity
Magnet valve（22）It is divided into the right coil of double electric control solenoid valves（22a）With double electric control solenoid valve left coils（22b）, double electric control solenoid valves
Right coil（22a）With expanding brilliant disk declines button（15）It is electrically connected, double electric control solenoid valve left coils（22b）Pass through middle relay
Device normally-closed contact（23a）With expanding brilliant disk rising button（14）It is electrically connected, the intermediate relay（23）With magnetic potential inductor
（21）It is electrically connected.
3. a kind of wafer according to claim 2 expands brilliant machine automatically, it is characterised in that：The magnetic potential inductor 21 is mounted in
Expand on brilliant cylinder 11.
4. a kind of wafer according to claim 1 expands brilliant machine automatically, it is characterised in that：In control box（12）On, the gas
Cylinder fixing bracket（2）Height be higher than blue film fixed frame（7）Height.
5. a kind of wafer according to claim 1 expands brilliant machine automatically, it is characterised in that：The indigo plant film fixed frame（7）Center
For hollow disk, expose the brilliant disk of expansion（8）, side is equipped with rotatable cover board（9）, opposite side, which is equipped with, to be used to fix cover board（9）'s
Bayonet lock（6）.
6. a kind of wafer according to claim 1 expands brilliant machine automatically, it is characterised in that：It is described to expand brilliant disk（8）Circumferential edges
Expand brilliant ring equipped with minor diameter（26）, the pressure ring disk（4）The major diameter that circumferential edges is equipped with expands brilliant ring（27）, the minor diameter expands brilliant
Ring（26）Major diameter can be embedded in and expand brilliant ring（27）Inner wall.
7. a kind of wafer according to claim 1 expands brilliant machine automatically, it is characterised in that：The indigo plant film fixed frame（7）Center
Hollow disk border circular rubber cushion is housed（20）, the circle rubber cushion（20）Diameter be more than and expand brilliant disk（8）Diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711475972.6A CN108010873B (en) | 2017-12-29 | 2017-12-29 | Automatic wafer expanding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711475972.6A CN108010873B (en) | 2017-12-29 | 2017-12-29 | Automatic wafer expanding machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108010873A true CN108010873A (en) | 2018-05-08 |
| CN108010873B CN108010873B (en) | 2024-04-19 |
Family
ID=62048878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711475972.6A Active CN108010873B (en) | 2017-12-29 | 2017-12-29 | Automatic wafer expanding machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108010873B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110246781A (en) * | 2019-05-29 | 2019-09-17 | 黄彬庆 | A kind of semiconductor crystal wafer flattening device |
| CN111243992A (en) * | 2020-01-14 | 2020-06-05 | 深圳市华鑫伟天光电有限公司 | RG long LED lamp bead processing equipment and method |
| CN113299594A (en) * | 2021-05-25 | 2021-08-24 | 江西信芯半导体有限公司 | Post-processing method for blue film pasting of TVS chip |
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| JP2006156804A (en) * | 2004-11-30 | 2006-06-15 | Canon Machinery Inc | Wafer ring moving system |
| CN101755188A (en) * | 2007-07-18 | 2010-06-23 | 株式会社尼康 | Measurement method, stage apparatus, and exposure apparatus |
| US20130050691A1 (en) * | 2011-08-25 | 2013-02-28 | Kabushiki Kaishanihon Micronics | Inspection apparatus and inspection method for light emitting device |
| CN206022324U (en) * | 2016-08-30 | 2017-03-15 | 绍兴光彩显示技术有限公司 | A kind of new expansion crystalline substance machine |
| CN207719157U (en) * | 2017-12-29 | 2018-08-10 | 无锡固电半导体股份有限公司 | A kind of wafer expands brilliant machine automatically |
-
2017
- 2017-12-29 CN CN201711475972.6A patent/CN108010873B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006156804A (en) * | 2004-11-30 | 2006-06-15 | Canon Machinery Inc | Wafer ring moving system |
| CN101755188A (en) * | 2007-07-18 | 2010-06-23 | 株式会社尼康 | Measurement method, stage apparatus, and exposure apparatus |
| US20130050691A1 (en) * | 2011-08-25 | 2013-02-28 | Kabushiki Kaishanihon Micronics | Inspection apparatus and inspection method for light emitting device |
| CN206022324U (en) * | 2016-08-30 | 2017-03-15 | 绍兴光彩显示技术有限公司 | A kind of new expansion crystalline substance machine |
| CN207719157U (en) * | 2017-12-29 | 2018-08-10 | 无锡固电半导体股份有限公司 | A kind of wafer expands brilliant machine automatically |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110246781A (en) * | 2019-05-29 | 2019-09-17 | 黄彬庆 | A kind of semiconductor crystal wafer flattening device |
| CN110246781B (en) * | 2019-05-29 | 2021-06-22 | 桂林立德智兴电子科技有限公司 | Semiconductor wafer flattening equipment |
| CN111243992A (en) * | 2020-01-14 | 2020-06-05 | 深圳市华鑫伟天光电有限公司 | RG long LED lamp bead processing equipment and method |
| CN111243992B (en) * | 2020-01-14 | 2020-12-18 | 深圳市华鑫伟天光电有限公司 | RG long LED lamp bead processing equipment and method |
| CN113299594A (en) * | 2021-05-25 | 2021-08-24 | 江西信芯半导体有限公司 | Post-processing method for blue film pasting of TVS chip |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108010873B (en) | 2024-04-19 |
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