CN108008402A - A kind of single photon avalanche diode detector array for laser ranging - Google Patents
A kind of single photon avalanche diode detector array for laser ranging Download PDFInfo
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Abstract
本发明公开了一种用于激光测距的单光子雪崩二极管探测器阵列，包括单点探测面、整形电路、“与”处理电路和“或”处理电路。其中，单点探测面由多个探测单管以n×n(n≥2)的形式排布集成，探测单管包括单光子雪崩二极管和淬灭电路；每个探测单管的输出信号分别由各自的整形电路整形成脉冲方波信号，每两路脉冲方波信号为一组输入“与”处理电路，经过“与”处理电路处理过的所有信号再经过“或”处理电路处理，产生最终的输出信号。本发明的探测器阵列可有效降低由暗计数和杂散光噪声带来的误触发，能在保证探测效率的同时，保证测距准确度，可实现更高灵敏度的激光测距。
The invention discloses a single-photon avalanche diode detector array for laser ranging, which comprises a single-point detection surface, a shaping circuit, an "AND" processing circuit and an "OR" processing circuit. Among them, the single-point detection surface is composed of multiple detection single tubes arranged and integrated in the form of n×n (n≥2), and the detection single tubes include single-photon avalanche diodes and quenching circuits; The respective shaping circuits are shaped into pulsed square wave signals, and every two pulsed square wave signals are input into a group of "AND" processing circuits, and all signals processed by the "AND" processing circuit are then processed by the "OR" processing circuit to produce the final output signal. The detector array of the present invention can effectively reduce false triggers caused by dark counts and stray light noise, can ensure detection efficiency and at the same time ensure distance measurement accuracy, and can realize laser distance measurement with higher sensitivity.
Description
技术领域technical field
本发明涉及一种基于单光子雪崩二极管探测器阵列设计的集成电路领域，特别是涉及一种适用于飞行时间(TOF)激光测距领域的探测器。The invention relates to the field of an integrated circuit designed based on a single-photon avalanche diode detector array, in particular to a detector suitable for the field of time-of-flight (TOF) laser ranging.
背景技术Background technique
近年来，无人驾驶领域或者说辅助驾驶领域处于蓬勃发展时期，而车载激光雷达技术是攻关环节中举足轻重的一环。正是大量的需求，促进了激光雷达的大发展，国内外激光雷达技术以及相关公司大量涌现。In recent years, the field of unmanned driving or the field of assisted driving is in a period of vigorous development, and vehicle lidar technology is an important part of the research process. It is the large demand that promotes the great development of lidar, and a large number of domestic and foreign lidar technology and related companies have emerged.
现有的激光测距技术中，探测器多采用普通雪崩光电二极管(Avalanche PhotonDiode，APD)，但APD探测到光信号后，其输出信号是与感光面接收到的光强强度呈正相关的一个模拟量，为了保证不同光强情况下波形上的一致，后端需要作一系列复杂的电路结构对信号进行处理。同时其增益有限，在有限激光能量范围内探测距离受到较大限制。In the existing laser ranging technology, the detector mostly uses an ordinary avalanche photodiode (Avalanche PhotonDiode, APD). In order to ensure the consistency of the waveform under different light intensities, the back-end needs to do a series of complex circuit structures to process the signal. At the same time, its gain is limited, and the detection distance is greatly limited within the limited laser energy range.
而盖革模式APD，即单光子雪崩二极管(Single Photon Avalanche Diode，SPAD)，其基于内光电响应，具有高增益的特点，单个光子产生的光电子在强电场作用下可以快速(10ps左右)产生一次雪崩响应。故SPAD具备单个光子响应能力，有利于在较低激光能量的条件下进行较远距离的探测。同时，其后端电路结构简单，淬灭后的雪崩信号经整形后波形固定，可减少测量误差。The Geiger mode APD, that is, the Single Photon Avalanche Diode (SPAD), is based on the internal photoelectric response and has the characteristics of high gain. The photoelectron generated by a single photon can be generated quickly (about 10ps) once under the action of a strong electric field. Avalanche response. Therefore, SPAD has the ability to respond to a single photon, which is conducive to longer-distance detection under the condition of lower laser energy. At the same time, the structure of the back-end circuit is simple, and the waveform of the quenched avalanche signal is fixed after being shaped, which can reduce the measurement error.
但是，SPAD真正用于激光测距技术中还存在一定的局限与不足。最难以排除的是噪声问题，噪声信号与有效信号在波形上是不可分辨的。噪声的来源主要是两类：一、器件本身因半导体缺陷特性产生的暗计数；二、环境中的杂散光未能被探测器前端滤色片完全滤除。所以，随机产生的这些噪声可能会被当做有效信号，作为STOP信号误触发时间数字转换电路(TDC，Time-to-Digital Converter)，从而产生严重测量误差。However, there are still some limitations and deficiencies in SPAD's real application in laser ranging technology. The most difficult thing to rule out is the noise problem. The noise signal and the effective signal are indistinguishable on the waveform. There are two main sources of noise: 1. The dark count of the device itself due to semiconductor defect characteristics; 2. The stray light in the environment cannot be completely filtered out by the front-end color filter of the detector. Therefore, these randomly generated noises may be regarded as valid signals, and mistriggered as a STOP signal to a Time-to-Digital Converter (TDC, Time-to-Digital Converter), thereby causing serious measurement errors.
发明内容Contents of the invention
本发明针对SPAD用于激光测距中存在的技术问题，提出了一种基于单光子雪崩二极管探测器的阵列结构。The invention proposes an array structure based on single-photon avalanche diode detectors aiming at the technical problems in the SPAD used in laser ranging.
本发明采用的技术方案为：The technical scheme adopted in the present invention is:
一种用于激光测距的单光子雪崩二极管探测器阵列，包括单点探测面、整形电路、“与”处理电路和“或”处理电路，单点探测面由多个探测单管以n×n的形式排布集成，其中，n≥2，探测单管包括单光子雪崩二极管和淬灭电路；每个探测单管的输出信号分别由各自的整形电路整形成脉冲方波信号，每两路脉冲方波信号为一组输入“与”处理电路，经过“与”处理电路处理过的所有信号再经过“或”处理电路处理，产生最终的输出信号。A single-photon avalanche diode detector array for laser ranging, including a single-point detection surface, a shaping circuit, an "AND" processing circuit and an "OR" processing circuit. The single-point detection surface consists of multiple detection single tubes with n× Arrangement and integration in the form of n, where, n≥2, the detection single tube includes a single photon avalanche diode and a quenching circuit; the output signal of each detection single tube is shaped into a pulsed square wave signal by its own shaping circuit, each two The pulse square wave signal is a group of input "AND" processing circuits, and all signals processed by the "AND" processing circuit are then processed by the "OR" processing circuit to generate the final output signal.
进一步地，所述淬灭电路采用被动淬灭形式或者主动淬灭形式。Further, the quenching circuit adopts a passive quenching form or an active quenching form.
进一步地，任意两路脉冲方波信号均经过“与”处理电路处理。Further, any two channels of pulsed square wave signals are processed by an "AND" processing circuit.
进一步地，所述探测器阵列按照列方向集成为一维线阵激光测距探测器，或者按照行和列的方向集成为二维面阵激光测距探测器。Further, the detector array is integrated into a one-dimensional linear array laser ranging detector according to the column direction, or integrated into a two-dimensional area array laser ranging detector according to the row and column directions.
进一步地，所述最终的输出信号提供给时间数字转换电路，作为时间数字转换电路计时的开始或者结束信号。Further, the final output signal is provided to the time-to-digital conversion circuit as a start or end signal of timing of the time-to-digital conversion circuit.
与现有APD技术相比，本发明使用SPAD技术，在激光测距领域灵敏度更高，能在相同激光能量下探测更远距离，同时探测器后端电路结构以及信号处理相对简单。与现有SPAD技术相比，本发明采用n×n(n≥2)阵列作为单点探测面，能在保证探测效率的同时，有效降低由暗计数和杂散光噪声带来的误触发，从而保证测距准确度。Compared with the existing APD technology, the present invention uses SPAD technology, which has higher sensitivity in the field of laser ranging and can detect longer distances under the same laser energy, while the back-end circuit structure and signal processing of the detector are relatively simple. Compared with the existing SPAD technology, the present invention uses an n×n (n≥2) array as a single-point detection surface, which can effectively reduce false triggers caused by dark counts and stray light noise while ensuring detection efficiency, thereby Guaranteed ranging accuracy.
附图说明Description of drawings
图1是本发明实施例中所提出的SPAD阵列结构与电路示意图。FIG. 1 is a schematic diagram of the structure and circuit of the SPAD array proposed in the embodiment of the present invention.
图2是本发明实施例中所提出的SPAD单点探测模块的时序说明图。Fig. 2 is a diagram illustrating the sequence of the SPAD single-point detection module proposed in the embodiment of the present invention.
图3是本发明实施例中所提出的SPAD单点探测模块组成的线阵探测器结构图。Fig. 3 is a structural diagram of a linear array detector composed of a SPAD single-point detection module proposed in an embodiment of the present invention.
图4是本发明实施例中所提出的SPAD单点探测模块组成的面阵探测器结构图。Fig. 4 is a structure diagram of an area array detector composed of a SPAD single-point detection module proposed in an embodiment of the present invention.
具体实施方式Detailed ways
下面将结合附图和具体实施例对本发明技术方案作进一步详细描述，所描述的具体实施例仅对本发明进行解释说明，不用于限制本发明。The technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, and the described specific embodiments are only for explaining the present invention, and are not intended to limit the present invention.
本发明的一种用于激光测距的SPAD阵列结构，包括由多个SPAD探测单管以n×n(n≥2)的形式排布并集成的单点探测面、后端多个整形电路、一系列“与”处理电路和“或”处理电路。单点探测面中每个SPAD探测单管雪崩发生后由淬灭电路淬灭并产生一个脉冲电压信号，进一步由整形电路整形，形成脉冲方波信号。将多路脉冲方波信号至少分为两组，将每组内两路信号在电路上作“与”处理，并对所有“与”处理后的输出信号作“或”处理作为最终输出信号。A SPAD array structure for laser ranging of the present invention, including a single-point detection surface arranged and integrated by a plurality of SPAD detection single tubes in the form of n×n (n≥2), and multiple shaping circuits at the rear end , a series of "AND" processing circuits and "OR" processing circuits. Each SPAD in the single-point detection surface is quenched by the quenching circuit to generate a pulse voltage signal after the single-tube avalanche is detected, and is further shaped by the shaping circuit to form a pulse square wave signal. Divide the multi-channel pulse square wave signal into at least two groups, perform "AND" processing on the circuit for the two signals in each group, and perform "OR" processing on all output signals after "AND" processing as the final output signal.
以上作“与”处理的好处是：只有两个SPAD探测单管102同时产生的信号才能作为有效信号，而从概率学上来讲，两路随机的噪声信号在同一时间产生的概率很小，所以“与”处理可以有效排除由SPAD单管本身产生的暗计数以及环境中杂散光带来的噪声。之后将所有“与”处理后的信号作“或”处理，因为SPAD探测单管102的真实探测效率小于100％，光强较弱的情况下并不能保证每一路探测单管都能产生响应，“与”处理可能将有效信号误滤除，对所有“与”处理的结果作“或”处理可以增加探测效率。The advantage of the above "AND" processing is: only the signals generated by the two SPAD detection single tubes 102 at the same time can be used as effective signals, and from the perspective of probability, the probability of two random noise signals being generated at the same time is very small, so The "AND" processing can effectively eliminate the dark count generated by the SPAD single tube itself and the noise caused by stray light in the environment. Afterwards, all the "AND" processed signals are "OR" processed, because the real detection efficiency of the SPAD detection single tube 102 is less than 100%, and it is not guaranteed that each detection single tube can respond when the light intensity is weak. "AND" processing may filter out valid signals by mistake, and performing "OR" processing on all "AND" processing results can increase detection efficiency.
图1是本实施例所提出的SPAD阵列结构与电路示意图，图中所示的小方框内是SPAD探测单管102，SPAD探测单管102包括一个单光子雪崩二极管和淬灭电路，本实施例以简单的被动淬灭电路为例，则淬灭电阻框图内就是一个电阻到地。图中单点探测面101由四个SPAD探测单管102组成，且按照2×2的形式密集排布。单点探测面101用于接收主动脉冲激光照射物体后反射回来，并经过光学系统聚焦后形成的光斑。每个SPAD探测单管102的输出端与整形电路103连接，整形电路103输出端与“与”处理电路104连接，“与”处理电路104按照实际“与”处理次数需要可设计2～6个，所有“与”处理电路104输出端与“或”处理电路105连接。Fig. 1 is the SPAD array structure and circuit diagram that this embodiment proposes, and in the small box shown in the figure is the SPAD detection single tube 102, and the SPAD detection single tube 102 comprises a single photon avalanche diode and quenching circuit, and this implementation For example, taking a simple passive quenching circuit as an example, the block diagram of the quenching resistor is a resistor to ground. The single-point detection surface 101 in the figure is composed of four SPAD detection single tubes 102, which are densely arranged in the form of 2×2. The single-point detection surface 101 is used to receive the light spot formed after the active pulse laser irradiates the object and is reflected back and focused by the optical system. The output end of each SPAD detection single tube 102 is connected to the shaping circuit 103, and the output end of the shaping circuit 103 is connected to the "AND" processing circuit 104. The "AND" processing circuit 104 can be designed according to the actual "AND" processing times. 2 to 6 , all output ports of the “AND” processing circuit 104 are connected to the “OR” processing circuit 105 .
本实施例中，单点探测面101后端接四个整形电路103，分别用于接收四个SPAD探测单管102的输出信号，并将输出信号作整形处理，产生规则的脉冲方波。四路脉冲方波由“与”处理电路104处理，具体连接方式为：四路脉冲方波至少分为两组，将每组内两路信号作“与”处理；最极端的情况是任意两路信号均作“与”处理，即同步进行六次“与”处理。本实施例中以2个“与”处理电路104为例，产生的信号经过一次“或”处理电路105处理，产生最终的STOP信号，提供给TDC电路106，作为TDC电路106计时的结束信号。In this embodiment, four shaping circuits 103 are connected behind the single-point detection surface 101, which are respectively used to receive the output signals of the four SPAD detection single tubes 102, and perform shaping processing on the output signals to generate regular pulse square waves. The four-way pulse square wave is processed by the "AND" processing circuit 104. The specific connection method is: the four-way pulse square wave is divided into at least two groups, and the two-way signals in each group are "AND" processed; the most extreme case is that any two The signals of all channels are processed with "AND", that is, six times of "AND" processing are carried out synchronously. In this embodiment, two "AND" processing circuits 104 are taken as an example, and the generated signal is processed by an "OR" processing circuit 105 to generate a final STOP signal, which is provided to the TDC circuit 106 as the end signal of the TDC circuit 106 timing.
本发明所提的阵列结构和方法，也可以用于TDC电路的开始信号。对于TDC电路的START信号可以有两种方式提供：一为与控制脉冲激光器发射激光脉冲的电信号完全同步的电信号，二为将脉冲激光器发射的脉冲激光分束出一路到探测面，多路SPAD探测单管102所产生的信号经过与前述STOP信号完全一样的电路结构和处理过程，由最终“或”处理后的信号作为START信号。The array structure and method proposed by the present invention can also be used for the start signal of the TDC circuit. The START signal of the TDC circuit can be provided in two ways: one is an electrical signal that is completely synchronized with the electrical signal that controls the pulse laser to emit laser pulses, and the other is to split the pulsed laser beam emitted by the pulse laser to the detection surface. The signal generated by the SPAD detection single tube 102 undergoes exactly the same circuit structure and processing as the aforementioned STOP signal, and the final "OR" processed signal is used as the START signal.
图2是本实施例所提出的SPAD单点探测模块的时序说明图。下面，将其作为一种探测实例具体说明本单点探测模块的优点。图中四路信号SPAD1、SPAD2、SPAD3、SPAD4分别是四个SPAD探测单管102所产生的响应时序，前面对齐的实线方波示意START信号，后面三路对齐的实线方波是真实物体反射回来的光产生的有效信号，即STOP信号。上述START与STOP信号之间有一定概率会产生一些因暗计数以及杂散光产生的噪声信号，如图中虚线方波所示。以最简单的情况，即分为两组作“与”处理的情况为例，图中A信号是SPAD1和SPAD2信号作“与”处理的结果，B信号是SPAD3和SPAD4信号作“与”处理的结果。可以看到，A信号中，随机产生的噪声没有同时出现，“与”处理后被滤除，而同时出现的有效信号被保留下来；B信号中，噪声也被滤除了，但因SPAD3这一路未产生有效信号，所以有效信号也未被保留下来。所以需要对A信号和B信号作“或”处理，得到图中所示C信号，C信号是最终给TDC电路的信号，其成功将SPAD探测单管的噪声信号滤除，保留了有效信号。FIG. 2 is an explanatory diagram of the sequence of the SPAD single-point detection module proposed in this embodiment. In the following, it will be used as a detection example to specifically illustrate the advantages of the single-point detection module. The four signals SPAD1, SPAD2, SPAD3, and SPAD4 in the figure are the response timings generated by the four SPAD detection single tubes 102 respectively. The solid line square waves aligned in the front indicate the START signal, and the solid line square waves aligned in the rear three lines are real objects. The effective signal generated by the reflected light is the STOP signal. There is a certain probability that some noise signals caused by dark counts and stray light will be generated between the above START and STOP signals, as shown by the dotted square wave in the figure. Take the simplest case, which is divided into two groups for "AND" processing as an example. In the figure, signal A is the result of "AND" processing of SPAD1 and SPAD2 signals, and signal B is the result of "AND" processing of SPAD3 and SPAD4 signals. the result of. It can be seen that in the A signal, the randomly generated noise does not appear at the same time, and is filtered out after "AND" processing, while the effective signal that appears at the same time is retained; in the B signal, the noise is also filtered out, but due to the SPAD3 A valid signal is not generated, so a valid signal is not retained. Therefore, it is necessary to "OR" the A signal and the B signal to obtain the C signal shown in the figure. The C signal is the final signal to the TDC circuit. It successfully filters out the noise signal of the SPAD detection single tube and retains the effective signal.
本发明图1所示的SPAD阵列结构与电路示意图不仅可以作为单点探测器，而且可以作为单点探测模块，进行阵列化集成。按照列方向进行集成设计，可以得到SPAD线阵探测器，如图3所示，即为本实施例所提出的SPAD单点探测结构组成的线阵探测器结构图。按照行、列方向分别进行集成设计，可以得到SPAD面阵探测器，如图4所示，即为本实施例所提出的的SPAD单点探测结构组成的面阵探测结构图。因为TDC电路版图占用面积较大，考虑到面阵排布中感光面的紧凑性问题，可以采用外部FPGA实现TDC电路的功能。The SPAD array structure and circuit diagram shown in FIG. 1 of the present invention can not only be used as a single-point detector, but also can be used as a single-point detection module for array integration. According to the integrated design in the column direction, a SPAD linear array detector can be obtained, as shown in FIG. 3 , which is a structure diagram of a linear array detector composed of the SPAD single-point detection structure proposed in this embodiment. According to the integrated design in the row and column directions, the SPAD area array detector can be obtained, as shown in FIG. 4 , which is the area array detection structure diagram composed of the SPAD single-point detection structure proposed in this embodiment. Because the TDC circuit layout occupies a large area, considering the compactness of the photosensitive surface in the area array arrangement, an external FPGA can be used to realize the function of the TDC circuit.
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