CN108007398A - A kind of inner groove seamed edge Circular Run-out Tolerance scanning measurement system and method - Google Patents
A kind of inner groove seamed edge Circular Run-out Tolerance scanning measurement system and method Download PDFInfo
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- CN108007398A CN108007398A CN201711185502.6A CN201711185502A CN108007398A CN 108007398 A CN108007398 A CN 108007398A CN 201711185502 A CN201711185502 A CN 201711185502A CN 108007398 A CN108007398 A CN 108007398A
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
A kind of inner groove seamed edge Circular Run-out Tolerance scanning measurement system and method, the present invention relates to inner groove seamed edge Circular Run-out Tolerance measuring system and method.The problem of can not quantitatively determining inner groove seamed edge Circular Run-out Tolerance the purpose of the present invention is to solve existing method.A kind of inner groove seamed edge Circular Run-out Tolerance scanning measurement system includes：Air feed equipment, manual ball valve, air filter, pressure reducing valve, pneumatic setter, first pressure sensor, solenoid valve, pneumatic operated valve, preposition throttle nozzle, second pressure sensor, measurement special fixture；Method is：One：Obtain the single-point narrow slit aperture z of inner groove seamed edge ith measurement pointi；2nd, according to the single-point narrow slit aperture z of inner groove seamed edge ith measurement pointiSolve inner groove seamed edge Circular Run-out Tolerance：The present invention is used for the manufacturing field of electrohydraulic servo valve.
Description
Technical Field
The invention relates to a system and a method for measuring circular run-out of an edge surface of an inner ring groove.
Background
In the manufacturing process of the electro-hydraulic servo valve, the milling of the superposed quantity of the valve core and the valve sleeve is a key process in the manufacturing process of the servo valve. The overlay (also called "lap", "cover" or "cover") of the spool pair of a servo valve for aerospace applications is very critical, typically 2-4 μm with a tolerance of ± 1 μm. The process of the overlap amount matching grinding is actually repeated to measure the overlap amount and grind the valve core until the design requirement is met. The seamed edge of the valve sleeve of the high-flow servo valve is in an inner ring groove form, and the seamed edge processing quality has great influence on the superposition amount of the servo valve. The end face circle run-out of the edge is an important processing quality parameter which influences the performance of the servo valve. At present, a dial indicator or other displacement measuring instruments are generally adopted for measuring the end face circular run-out, and the maximum run-out at any diameter position coaxial with a baseline is measured. The method is not suitable for measuring the circular run-out of the edge face of the inner ring groove. Based on the technical requirements of valve port edges such as 'no blunting', 'sharp edge maintenance', 'no burr' and the like, compared with the requirements of mixing and no quantification, no better method exists for measuring the circular run-out of the end face of the inner ring groove edge in the current production, generally, only a high-power magnifier or microscope is used for observing the condition of a lower edge, whether the burr and the collapsed edge are serious is qualitatively judged, and the run-out quantity of the edge cannot be quantitatively determined. Some domestic manufacturers are even behind, whether burrs are removed completely or not is determined by hand feeling experience by means of scraping the nails to the edges. In order to ensure the quality and performance requirements of the servo valve, a new method and a new technology suitable for detecting the end face circular runout of the edge of the inner ring groove are urgently needed to be researched.
Disclosure of Invention
The invention aims to solve the problem that the circular runout of the edge face of an inner ring groove cannot be quantitatively determined by the conventional method, and provides a scanning and measuring system and a method for the circular runout of the edge face of the inner ring groove.
A scanning and measuring system for circular run-out of an edge surface of an inner ring groove comprises: the device comprises an air supply device, a manual ball valve, an air filter, a pressure reducing valve, a pneumatic valuator, a first pressure sensor, an electromagnetic valve, a pneumatic valve, a front throttling nozzle, a second pressure sensor and a special measuring clamp;
the output airflow end of the air supply equipment is connected with the airflow input end of the manual ball valve, the airflow output end of the manual ball valve is connected with the airflow input end of the air filter, the airflow output end of the air filter is connected with the airflow input end of the pressure reducing valve, and the airflow output end of the pressure reducing valve is respectively connected with the airflow input end of the pneumatic valuator and the air inlet end of the electromagnetic valve; the air outlet end of the electromagnetic valve is connected with the air inlet end of a control air path of the pneumatic valve;
the airflow output end of the pneumatic valuator is connected with the air inlet end of the measuring air path of the pneumatic valve; a first pressure sensor is arranged between the airflow output end of the pneumatic valuator and the air inlet end of the measuring air path of the pneumatic valve;
the air outlet end of the measuring air passage of the pneumatic valve is connected with the air flow input end of the front throttling nozzle;
the airflow output end of the front throttling nozzle is connected with the airflow input end of the special measuring clamp; a second pressure sensor is arranged between the airflow output end of the front throttling nozzle and the airflow input end of the special measuring clamp;
and the airflow of the special measuring clamp is output to the atmosphere.
The method for scanning and measuring the circular runout of the edge end face of the inner ring groove comprises the following specific processes:
the method comprises the following steps: the gas supply pressure of the measuring system is S through the sectional area 1 The round hole-shaped front throttling nozzle enters the second air chamber from the first air chamber, and the backpressure value of the first air chamber is P g II back pressure value in air chamber is P c (ii) a Back pressure value of P c Has an air passage cross-sectional area S 2 The throttling square hole formed by the narrow-slit measuring head and the edge to be measured enters the atmosphere, and the atmospheric pressure value is marked as P 0 (ii) a Let the volume flow of gas between I and II air chambers be Q 1 And the volume flow rate of gas between the air chamber and the atmosphere is Q 2 Root of Chinese characterAccording to Q 1 And Q 2 Obtaining the single-point narrow slit opening z of the ith measuring point of the inner ring groove edge i ；
Step two, according to the single-point narrow slit aperture z of the ith measuring point of the inner ring groove edge i Solving the circular runout of the edge end face of the inner ring groove:
rotating the edge of the inner ring groove to be measured for a circle, and measuring the opening degree of the edge single-point narrow slit of n measuring points on the edge of the inner ring groove by the method in the step one, wherein the opening degree is z i Then, the end face circular run-out L of the inner annular groove edge is expressed as: l = z max -z min ；
z max Is a single point narrow slit opening degree z i Maximum value of (1), z min Is a single point narrow slit opening degree z i The minimum value of n is more than or equal to 4.
The invention has the beneficial effects that:
the invention adopts a system and a method for scanning and measuring circular runout of the edge end surface of an inner ring groove, and the gas supply pressure of the measuring system passes through the cross section area S 1 The round hole-shaped front throttling nozzle enters the second air chamber from the first air chamber, and the backpressure value of the first air chamber is P g II back pressure value in air chamber is P c (ii) a Back pressure value of P c Has an air passage cross-sectional area S 2 The throttling square hole formed by the narrow-slit measuring head and the edge to be measured enters the atmosphere, and the atmospheric pressure value is marked as P 0 (ii) a Let the volume flow between the air chamber I and the air chamber II be Q 1 And the volume flow between the air chamber and the atmosphere is Q 2 According to Q 1 And Q 2 Obtaining the single-point narrow slit opening z of the ith measuring point of the inner ring groove edge i (ii) a Single point narrow slit aperture z according to ith measuring point of inner ring groove edge i And solving the circular runout of the edge end face of the inner ring groove. The method solves the problem that the circular runout of the edge face of the inner ring groove cannot be quantitatively determined by the conventional method. The invention adopts a pneumatic measurement method to realize the measurement of the circular runout of the edge surface of the inner ring groove, the measurement resolution can reach 0.1 mu m, and the precision can reach 0.5 mu m.
Drawings
FIG. 1 is a gas path diagram of the apparatus of the present invention;
FIG. 2 is a view of a fixture of the apparatus of the present invention;
FIG. 3 is a schematic view of a narrow slot probe according to the present invention;
FIG. 4 is a schematic illustration of a slot of the present invention;
FIG. 5 is a schematic diagram of the measurement of the present invention;
FIG. 6 is a schematic diagram of the edge end face circle run-out of the present invention;
fig. 7 is a schematic diagram of a pneumatic slit scanning measurement.
Detailed Description
The first specific implementation way is as follows: referring to fig. 1, the present embodiment is described, and an inner ring groove edge end face circle run-out scanning measurement system of the present embodiment includes: the device comprises an air supply device 1, a manual ball valve 2, an air filter 3, a pressure reducing valve 4, a pneumatic valuator 5, a first pressure sensor 6, an electromagnetic valve 7, a pneumatic valve 8, a front throttling nozzle 9, a second pressure sensor 10 and a special measuring clamp 11;
an output airflow end of the air supply device 1 is connected with an airflow input end of the manual ball valve 2, an airflow output end of the manual ball valve 2 is connected with an airflow input end of the air filter 3, an airflow output end of the air filter 3 is connected with an airflow input end of the pressure reducing valve 4, and an airflow output end of the pressure reducing valve 4 is respectively connected with an airflow input end of the pneumatic valuator 5 and an air inlet end of the electromagnetic valve 7; the air outlet end of the electromagnetic valve 7 is connected with the air inlet end of the control air path of the pneumatic valve 8;
the airflow output end of the pneumatic valuator 5 is connected with the air inlet end of the measuring air passage of the pneumatic valve 8; a first pressure sensor 6 is arranged between the airflow output end of the pneumatic valuator 5 and the air inlet end of the measuring air passage of the pneumatic valve 8;
the air outlet end of the measurement air passage of the pneumatic valve 8 is connected with the air flow input end of the preposed throttling nozzle 9;
the air flow output end of the preposed throttling nozzle 9 is connected with the air flow input end of the special measuring clamp 11; a second pressure sensor 10 is arranged between the airflow output end of the front throttling nozzle 9 and the airflow input end of the special measuring clamp 11;
the gas flow of the scanning measurement dedicated jig 11 is output to the atmosphere.
The second embodiment is as follows: the present embodiment is described with reference to fig. 2, and the present embodiment is different from the first embodiment in that: the special measuring clamp 11 comprises an electric rotary table 12, a driving rotary shaft 13, a rotary shaft shell 14, a belt 15, a tested piece 16, a measuring head 17, an air path integrated block 19 and an O-shaped sealing ring 20;
the upper surface of the driving rotating shaft 13 is a slender cylinder, and the end surface of the lower step is a short thick cylinder;
the measuring head 17 is a long and thin cylinder on the upper surface, and a short and thick cylinder on the lower step end surface;
the electric rotary table 12 is fixed on the gas circuit integrated block 19 through screws;
the driving rotating shaft 13 is fixed on the electric turntable 12 through a screw and is driven to rotate by the electric turntable;
the rotating shaft shell 14 is arranged on the driving rotating shaft 13 in an interference manner; the diameter of the inner hole of the rotating shaft shell 14 is slightly smaller than the diameter of the outer circle of the driving rotating shaft 13; the rotating shaft shell 14 is sleeved outside the cylinder of the driving rotating shaft 13;
the electric turntable 12 drives the driving rotating shaft 13 and the rotating shaft shell 14 to rotate;
the measuring head 17 is fixed on the gas circuit integrated block 19 through a screw;
the measuring head 17 and the electric rotary table 12 are positioned on the same side of the gas circuit integrated block 19 and are arranged in parallel;
the tested piece 16 and the measuring head 17 are in clearance fit (0-0.034 mm); the tested piece 16 is tightly contacted with the measuring head 17 by the tension provided by the belt 14; the diameter of an inner hole of the tested piece 16 is slightly larger than the diameter of an outer circle of the measuring head 17; the tested piece 16 is sleeved outside the cylinder of the measuring head 17;
the belt 15 is respectively sleeved in the middle positions (the middle of the cylindrical surfaces) of the outer cylindrical surfaces of the rotating shaft shell 14 and the tested piece 16 after being tensioned;
the rotating shaft shell 14 drives the belt 15 to rotate; the belt 15 drives the tested piece 16 to rotate, and the measuring head 17 scans the tested piece 16 to realize the scanning function;
an O-shaped sealing ring 20 is arranged between the measuring head 17 and the gas circuit integrated block 19;
the pneumatic valve 8 is fixed on the air path manifold block 19 through a screw, the air outlet end of the measurement air path of the pneumatic valve 8 is aligned with the air inlet end of the front throttling nozzle 9, and the pneumatic valve 8, the measuring head 17 and the electric rotary table 12 are arranged in the reverse direction.
The narrow slit window of the measuring head 17 is aligned with the measured edge of the measured piece 16 to form a square throttle, as shown in fig. 3.
The preposed throttling nozzle 9 is fixed in an air hole of the air path manifold block 19 by interference fit (-0.003 to-0.023 mm);
other steps and parameters are the same as those in the first embodiment.
The third concrete implementation mode: the present embodiment differs from the first or second embodiment in that: the first pressure sensor 6, the pneumatic valve 8 and the second pressure sensor 10 are fixed on the gas circuit integrated block 19 through screws; the preposed throttling nozzle 9 is fixed on the gas circuit integrated block 19 in an interference manner;
the airflow output end of the pneumatic valuator 5 is connected with the air inlet end of the measuring air passage of the pneumatic valve 8; a first pressure sensor 6 is arranged between the airflow output end of the pneumatic valuator 5 and the air inlet end of the measuring air passage of the pneumatic valve 8;
the air outlet end of the measurement air passage of the pneumatic valve 8 is connected with the air flow input end of the preposed throttling nozzle 9;
the air flow output end of the front throttling nozzle 9 is connected with the air flow input end of the special measuring clamp 11; a second pressure sensor 10 is arranged between the airflow output end of the front throttling nozzle 9 and the airflow input end of the special measuring clamp 11; the gas flow of the scanning measurement dedicated jig 11 is output to the atmosphere.
The front throttling nozzle 9 is S in the measuring scheme 1 The electromagnetic valve 7 is electrified, the pneumatic valve 8 controls the air inlet of the air path, the pneumatic valve is opened, and the measuring air path is ventilated; and 7, switching off the power supply, controlling the air path not to enter by the pneumatic valve 8, closing the pneumatic valve, and preventing the measurement air path from being ventilated.
The fourth concrete implementation mode is as follows: the difference between this embodiment mode and one of the first to third embodiment modes is: a spherical washer group 18 is arranged between the tested piece 16 and the measuring head 17.
The special measuring clamp 11 further comprises a spherical washer group 18;
the top end of the spherical washer set 18 contacts the bottom end of the tested piece 16 to provide a floating support for the tested piece 16, so as to prevent the tested piece 16 from moving up and down.
The bottom end of the spherical washer group 18 is in transition fit with the step end face of the measuring head 17 (the bottom end of the spherical washer group 18 is in contact with the step end face of the measuring head 17);
other steps and parameters are the same as those in one of the first to third embodiments.
The fifth concrete implementation mode: the difference between this embodiment and one of the first to fourth embodiments is: the diameter of the outer circle of the rotating shaft shell 14 is the same as that of the tested piece 16, and the tested piece 1 is driven to rotate.
Other steps and parameters are the same as in one of the first to fourth embodiments.
The sixth specific implementation mode is as follows: the method for measuring the circular run-out of the edge end face of the inner ring groove comprises the following specific processes:
in order to calculate the circular run-out of the edge end face of the inner ring groove, a plurality of single-point run-out of the whole periphery of the edge needs to be measured. The invention adopts a pneumatic narrow slit method to measure the single-point jump of the edge, as shown in figure 4, the width of the narrow slit is b, and the single-point jump is measured by the opening z of the narrow slit i And (4) showing. The flow Q of the square-hole-shaped orifice formed by the narrow-slit measuring head and the edge or the backpressure Pc of the air chamber in the measuring head reacts with the square-hole overflow area S formed by the narrow slit and the measured edge, the width b of the narrow slit is a fixed value, and therefore the single-point narrow slit opening z of the edge can be obtained i Realizing the opening z of the narrow slit with multiple points on the whole circumference of the edge by rotating the workpiece 1 ，z 2 ，…，z n And (5) scanning and detecting.
Edge single pointThe principle of the gas path for measuring the opening of the narrow slit is shown in FIG. 5, S 2 The cross-sectional area of the square-hole orifice formed by the narrow slit and the edge, S 1 Cross-sectional area, P, of a circular-hole-shaped pre-throttling nozzle g For measuring the pressure of the system supply air, P c The back pressure of the measuring head inner air chamber formed by the front throttle nozzle and the square hole-shaped throttle hole is P 0 Is at atmospheric pressure. The pressure of the supplied air is P g Compressed air of cross-sectional area S 1 The round hole-shaped front throttling nozzle enters an air chamber II (the pressure in the air chamber II is P) c ) Then enters the atmosphere through a square orifice formed by the narrow slit and the edge. Pressure P through the chamber II c The sectional area of the reaction square hole is further calculated to obtain the opening z of the single-point narrow slit of the edge i 。
The method comprises the following steps: the gas supply pressure of the measuring system is S through the sectional area 1 The round hole-shaped front throttling nozzle enters the second air chamber from the first air chamber, and the backpressure value of the first air chamber is P g II back pressure value in air chamber is P c (ii) a Back pressure value of P c Has an air passage cross-sectional area S 2 The throttling square hole formed by the narrow-slit measuring head and the edge to be measured enters the atmosphere, and the atmospheric pressure value is marked as P 0 (ii) a Let the volume flow of gas between I and II air chambers be Q 1 And the volume flow rate of gas between the air chamber and the atmosphere is Q 2 According to Q 1 And Q 2 Obtaining the single-point narrow slit opening z of the ith measuring point of the inner ring groove edge i ；
Step two, according to the single-point narrow slit aperture z of the ith measuring point of the inner ring groove edge i Solving the circular runout of the edge end face of the inner ring groove:
as shown in fig. 6, the solid line is the scanning result, and the two dashed lines are the planes perpendicular to the reference axis where the maximum and minimum runout amounts are located, respectively; the chain line is a reference axis;
rotating the edge of the inner ring groove to be measured for a circle, and measuring the opening degree of the edge single-point narrow slit of n measuring points on the edge of the inner ring groove by the method in the step one, wherein the opening degree values are z i And then the end face circle run-out L of the inner ring groove edge is expressed as: l = z max -z min ；
z max Is a single narrow slitOpening z i Maximum value of (1), z min Is a single point narrow slit opening degree z i The minimum value of n is more than or equal to 4.
The seventh embodiment: the sixth embodiment is different from the sixth embodiment in that: the volume flow between the air chamber I and the air chamber II in the step I is Q 1 The method specifically comprises the following steps:
wherein:
S 1 ＝πd 2 /4 (2)
wherein Q 1i Is the volume flow between the ith measuring point of the air chamber I and the air chamber II, g is the gravity acceleration, P gi Air supply pressure of i th measurement point of air chamber, P ci The air supply pressure, gamma, of the ith measurement point of the air chamber II g Is a pressure P gi Lower air gravity, c 1 D is the diameter of the round hole-shaped front throttling nozzle.
The invention adopts a low-pressure pneumatic measuring system, and the working pressure is lower, so that the measuring gas can be regarded as incompressible fluid. Because the gas is always in subsonic state (gas flow velocity) in the measurement process<, 340 m/s), negligible compressibility of air, gamma g 、γ c 、c 1 、c 2 Considered as a constant.
Other steps and parameters are the same as those in the sixth embodiment.
The specific implementation mode is eight: the sixth or seventh embodiment is different from the sixth or seventh embodiment in that: the volume flow between the air chamber II and the atmosphere in the step I is Q 2 The method comprises the following specific steps:
wherein:
S 2i ＝bz i (4)
wherein b is the width of the narrow slit of the measuring head, gamma c Is a pressure P ci Lower air gravity, c 2 Gas flow coefficient for a square-hole orifice formed by a narrow slit and an inner annular groove edge, z i Opening degree of single-point narrow slit of ith measuring point of inner ring groove edge, S 2i Cross-sectional area of the ith measurement point, Q 2i The volume flow between the air chamber II and the ith measuring point of the atmosphere.
Other steps and parameters are the same as those of the sixth or seventh embodiment.
The specific implementation method nine: this embodiment is different from the sixth to eighth embodiment in that: according to Q in the first step 1 And Q 2 Obtaining the single-point narrow slit opening z of the ith measuring point of the inner ring groove edge i The specific process comprises the following steps:
according to the law of conservation of mass, the gas flow has a cross-sectional area S 1 The round hole-shaped front throttling nozzle and the cross section area of the front throttling nozzle is S 2 The volume flow of the throttling square hole formed by the narrow-slit measuring head and the measured edge is equal, so Q 1 ＝Q 2 Namely:
setting:
finishing to obtain:
in the formula, C is a compound represented by the formula,d, b are constants, obtained by calibration of standards of known dimensions, P g And P c And acquiring through a pressure sensor.
Other steps and parameters are the same as those in one of the sixth to eighth embodiments.
The working principle of the system of the invention is as follows:
compressed air is supplied as a measuring medium by the air supply device 1; the manual ball valve 2 is used for controlling the on-off of compressed air; the air filter is used for filtering the compressed air; the pressure reducing valve 4 is used for adjusting the air supply pressure to the pneumatic valuator and the pneumatic valve 8; the pneumatic valuator 5 is used for adjusting the measuring pressure to 90kPa; the first pressure sensor 6 is used for measuring a pressure value P g Measuring (2); the electromagnetic valve 7 is used for controlling the pneumatic valve 8 to control the on-off of the gas path; the pneumatic valve 8 is used for controlling the on-off of the measuring gas circuit, and the pneumatic valve can avoid the gas volume change caused by the self heating of the valve body; an air chamber I is arranged between the output end of the pneumatic valuator 5 and the input end of the front throttling nozzle 9; an air chamber II is arranged between the output end of the preposed throttling nozzle 9 and the input end of the special scanning and measuring clamp 11; the second pressure sensor 10 is used for measuring the pressure P of the air chamber II c 。
The first pressure sensor 6, the pneumatic valve 8 and the second pressure sensor 10 are fixed on the gas circuit integrated block 19 through screws; the preposed throttling nozzle 9 is fixed on the gas circuit integrated block 19 through interference fit;
the airflow output end of the pneumatic valuator 5 is connected with the air inlet end of the measuring air passage of the pneumatic valve 8; a first pressure sensor 6 is arranged between the airflow output end of the pneumatic valuator 5 and the air inlet end of the measuring air path of the pneumatic valve 8;
the air outlet end of the measurement air passage of the pneumatic valve 8 is connected with the air flow input end of the preposed throttling nozzle 9;
the air flow output end of the preposed throttling nozzle 9 is connected with the air flow input end of the special measuring clamp 11; a second pressure sensor 10 is arranged between the airflow output end of the front throttling nozzle 9 and the airflow input end of the special measuring clamp 11; the gas flow of the scanning measurement dedicated jig 11 is output to the atmosphere.
The front throttle nozzle 9 is S in the measuring scheme 1 The electromagnetic valve 7 is electrified, the pneumatic valve 8 controls the air inlet of the air path, the pneumatic valve is opened, and the air in the measuring air path is ventilated; 7, cutting off the power supply, 8, controlling the air path not to enter air, closing the pneumatic valve and measuring the air path not to be ventilated.
FIG. 7 shows the principle of pneumatic narrow slit scanning measurement, the single point narrow slit opening z i The area formed with the narrow slit wide band b is S i The square hole-shaped throttling port. By back pressure P of the air chamber ci The size of the opening zi of the single-point narrow slit is reflected.
Claims (9)
1. The utility model provides an inner ring groove edge terminal surface circle scanning measurement system that beats which characterized in that: the system comprises: the device comprises an air supply device (1), a manual ball valve (2), an air filter (3), a pressure reducing valve (4), a pneumatic valuator (5), a first pressure sensor (6), an electromagnetic valve (7), a pneumatic valve (8), a front throttling nozzle (9), a second pressure sensor (10) and a special measuring clamp (11);
the output airflow end of the air supply device (1) is connected with the airflow input end of the manual ball valve (2), the airflow output end of the manual ball valve (2) is connected with the airflow input end of the air filter (3), the airflow output end of the air filter (3) is connected with the airflow input end of the pressure reducing valve (4), and the airflow output end of the pressure reducing valve (4) is respectively connected with the airflow input end of the pneumatic valuator (5) and the air inlet end of the electromagnetic valve (7); the air outlet end of the electromagnetic valve (7) is connected with the air inlet end of the control air circuit of the pneumatic valve (8);
the air flow output end of the pneumatic valuator (5) is connected with the air inlet end of the measuring air path of the pneumatic valve (8); a first pressure sensor (6) is arranged between the airflow output end of the pneumatic valuator (5) and the air inlet end of the measuring air path of the pneumatic valve (8);
the air outlet end of a measuring air passage of the pneumatic valve (8) is connected with the air flow input end of the preposed throttling nozzle (9);
the air flow output end of the front throttling nozzle (9) is connected with the air flow input end of the special measuring clamp (11); a second pressure sensor (10) is arranged between the airflow output end of the preposed throttling nozzle (9) and the airflow input end of the special measuring clamp (11);
and the airflow of the special scanning and measuring clamp (11) is output to the atmosphere.
2. The inner ring groove edge end face circle run-out scanning and measuring system of claim 1, characterized in that: the special measuring clamp (11) comprises an electric rotary table (12), an active rotary shaft (13), a rotary shaft shell (14), a belt (15), a tested piece (16), a measuring head (17), an air passage integrated block (19) and an O-shaped sealing ring (20);
the electric turntable (12) is fixed on the gas circuit integrated block (19) through a screw;
the driving rotating shaft (13) is fixed on the electric turntable (12) through a screw and is driven to rotate by the electric turntable;
the rotating shaft shell (14) is arranged on the driving rotating shaft (13) in an interference manner; the electric turntable (12) drives the driving rotating shaft (13) and the rotating shaft shell (14) to rotate;
the measuring head (17) is fixed on the gas circuit integrated block (19) through a screw;
the measuring head (17) and the electric rotary table (12) are positioned at the same side of the gas circuit integrated block (19) and are arranged in parallel;
the tested piece (16) is in clearance fit with the measuring head (17); the belt (15) is respectively sleeved in the middle positions of the outer cylindrical surfaces of the rotating shaft shell (14) and the tested piece (16) after being tensioned;
the rotating shaft shell (14) drives the belt (15) to rotate; the belt (15) drives the tested piece (16) to rotate, and the measuring head (17) scans the tested piece (16) to realize the scanning function;
an O-shaped sealing ring (20) is arranged between the measuring head (17) and the gas circuit integrated block (19).
3. The inner annular groove edge end face circle run-out scanning and measuring system is characterized in that: the first pressure sensor (6), the pneumatic valve (8) and the second pressure sensor (10) are fixed on the gas circuit manifold block (19) through screws; the preposed throttling nozzle (9) is fixed on the air path manifold block (19) in an interference manner.
4. The inner ring groove edge end face circle run-out scanning and measuring system of claim 3, characterized in that: a spherical washer group (18) is arranged between the tested piece (16) and the measuring head (17), and the spherical washer group (18) provides floating support for the tested piece (16) and prevents the tested piece (16) from moving up and down.
5. The inner annular groove edge end face circle run-out scanning and measuring system is characterized in that: the diameter of the outer circle of the rotating shaft shell (14) is the same as that of the tested piece (16), and the tested piece (1) is driven to rotate.
6. The inner ring groove edge end face circle run-out scanning measurement method based on the system of claim 1 is characterized in that: the method for scanning and measuring the circular runout of the edge end face of the inner ring groove comprises the following specific processes:
the method comprises the following steps: the gas supply pressure of the measuring system is S through the sectional area 1 The round hole-shaped front throttling nozzle (9) enters the air chamber II from the air chamber I; back pressure value of P c Has an air passage cross-sectional area S 2 The throttling square hole formed by the narrow slit window and the edge to be measured enters the atmosphere, and the atmospheric pressure value is recorded as P 0 (ii) a Let the volume flow of gas between I and II air chambers be Q 1 And the volume flow rate of gas between the air chamber and the atmosphere is Q 2 According to Q 1 And Q 2 Obtaining the single-point narrow slit opening z of the ith measuring point of the inner ring groove edge i ；
Step two, according to the single-point narrow slit aperture z of the ith measuring point of the inner ring groove edge i Solving the circular runout of the edge end face of the inner ring groove:
rotating the edge of the inner ring groove to be measured for a circle, and measuring the opening degree of the edge single-point narrow slit of n measuring points on the edge of the inner ring groove by the method in the step one, wherein the opening degree values are z i And then the end face circle run-out L of the inner ring groove edge is expressed as: l = z max -z min ；
z max Is a single point narrow slit opening degree z i Maximum value of (1), z min Is a single point narrow slit opening degree z i The minimum value of n is more than or equal to 4.
7. The method for scanning and measuring the circular runout of the edge face of the inner ring groove according to claim 6, is characterized in that: the volume flow between the air chamber I and the air chamber II in the step I is Q 1 The method comprises the following specific steps:
wherein:
S 1 ＝πd 2 /4 (2)
wherein Q 1i Is the volume flow between the ith measuring point of the I air chamber and the II air chamber, g is the gravity acceleration, P gi Air supply pressure of i th measurement point of air chamber, P ci The air supply pressure, gamma, of the ith measurement point of the air chamber II g Is a pressure P gi Lower air gravity, c 1 D is the diameter of the round hole-shaped prepositive throttling nozzle, and is the gas flow coefficient passing through the round prepositive throttling nozzle.
8. The inner ring groove edge end face circle run-out pneumatic narrow slit scanning measurement method according to claim 7, characterized in that: the volume flow between the air chamber II and the atmosphere in the step I is Q 2 The method comprises the following specific steps:
wherein:
S 2i ＝bz i (4)
where b is the width of the narrow gap of the probe, γ c Is a pressure P ci Lower air gravity, c 2 Gas flow coefficient for a square-hole orifice formed by a narrow slit and an inner annular groove edge, z i Opening degree of single-point narrow slit of ith measuring point of inner ring groove edge, S 2i Cross-sectional area of the ith measurement point, Q 2i The volume flow between the air chamber II and the ith measuring point of the atmosphere.
9. The inner ring groove edge end face circle run-out pneumatic narrow slit scanning measurement method according to claim 8, characterized in that: according to Q in the first step 1 And Q 2 Obtain the edge of the inner ring grooveSingle point narrow slit opening z of ith measuring point i The specific process comprises the following steps:
according to the law of conservation of mass, the gas flow has a cross-sectional area S 1 The circular hole-shaped front throttling nozzle has a cross section of S 2 The volume flow of the throttling square hole formed by the narrow-slit measuring head and the measured edge is equal, so Q 1 ＝Q 2 Namely:
setting:
finishing to obtain:
wherein C, d and b are constants.
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| CN107976160A (en) * | 2017-11-23 | 2018-05-01 | 哈尔滨工业大学 | A kind of inner groove seamed edge angle of bank measurement system and method |
| RU2791844C1 (en) * | 2021-10-01 | 2023-03-13 | Общество с ограниченной ответственностью Управляющая компания "Алтайский завод прецизионных изделий" | Device for control of conical holes |
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| RU2791844C1 (en) * | 2021-10-01 | 2023-03-13 | Общество с ограниченной ответственностью Управляющая компания "Алтайский завод прецизионных изделий" | Device for control of conical holes |
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