CN107999457A - Rotary-cleaning equipment, detection device and detection method for rotary-cleaning equipment - Google Patents
Rotary-cleaning equipment, detection device and detection method for rotary-cleaning equipment Download PDFInfo
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- CN107999457A CN107999457A CN201711219905.8A CN201711219905A CN107999457A CN 107999457 A CN107999457 A CN 107999457A CN 201711219905 A CN201711219905 A CN 201711219905A CN 107999457 A CN107999457 A CN 107999457A
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- Prior art keywords
- rotary
- signal
- cleaning equipment
- idle pulley
- detector
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Pulleys (AREA)
Abstract
This disclosure relates to a kind of rotary-cleaning equipment and detection device and detection method for rotary-cleaning equipment.The rotary-cleaning equipment includes：Housing；Idle pulley, is arranged in housing；And detection device, including：Signal source, be configured to detect the detector of the signal from signal source and be configured as the conducting piece for including at least one conducting path, wherein, signal source and detector are arranged at the pre-position relative to rotary-cleaning equipment, at least a portion of conducting piece is arranged in idle pulley, with the rotation of idle pulley, conducting piece at intervals conducts signal to detector from signal source.
Description
Technical field
This disclosure relates to rotary-cleaning equipment, it particularly relates to a kind of rotary-cleaning equipment, and for rotary-cleaning
The detection device and detection method of equipment.
Background technology
In many process industries, it is required for cleaning the surface of product.For example, in the manufacture of semiconductor device
In, after being planarized using chemical mechanical grinding to product (such as wafer), a large amount of impurity are produced on product surface, in
It is to carry out cleaning treatment to become essential.In recent years, it is notable highly integrated with semiconductor device, even if denier
Pollution caused by impurity, performance for device and can also produce considerable influence to the yield of product, and therefore, cleaning is imitated
The requirement of fruit also significantly improves.
Rotary-cleaning equipment can rotate institute's cleaning article while cleaning article, realize the global cleaning effect to product
Fruit.For example, when being cleaned using ultrasonic wave, since supersonic generator is generally positioned at the bottom of equipment, cause ultrasound
The bubble that ripple produces is only capable of contacting with a part for product nearby device bottom, and clean range is typically limited.Pass through rotation
The bubble that product produces ultrasonic wave is fully contacted with the various pieces of product surface, and cleaning can more comprehensively, fully.
The content of the invention
One purpose of the disclosure is to provide a kind of detection technique for rotary-cleaning equipment.
According to the first aspect of the disclosure, there is provided a kind of rotary-cleaning equipment, it is characterised in that including：Housing；Set
Idle pulley in housing；And detection device, detection device include：Signal source, is configured to signal of the detection from signal source
Detector, and be configured as the conducting piece for including at least one conducting path, wherein, signal source and detector are arranged at phase
For the pre-position of rotary-cleaning equipment, at least a portion of conducting piece is arranged in idle pulley, with the rotation of idle pulley, is passed
Guiding element at intervals conducts signal to detector from signal source.
According to the second aspect of the disclosure, there is provided a kind of detection device for rotary-cleaning equipment, it is characterised in that
Including：Signal source；Detector, is configured to signal of the detection from signal source；And conducting piece, it is configured as including at least one
Bar conducting path, wherein, signal source and detector are arranged at the pre-position relative to rotary-cleaning equipment, and conducting piece is extremely
A few part is arranged in the idle pulley of rotary-cleaning equipment, and with the rotation of idle pulley, conducting piece is at intervals by signal from signal
Conduct to detector in source.
According to the third aspect of the disclosure, there is provided a kind of rotary speed for being used to detect the idle pulley in rotary-cleaning equipment
Method, it is characterised in that including：Relative to the pre-position setting signal source of rotary-cleaning equipment and detector；
Conducting piece is set in idle pulley；As idle pulley rotates, conducting piece is set at intervals to conduct signal to detector from signal source.
An advantage in accordance with an embodiment of the present disclosure is in can measure the system cleaned in rotary-cleaning equipment
The rotary speed of product, so as to find that rotation is abnormal in time, to ensure the yield of product.
By referring to the drawings to the detailed description of the exemplary embodiment of the disclosure, the further feature of the disclosure and its
Advantage will be made apparent from.
Brief description of the drawings
The attached drawing of a part for constitution instruction describes embodiment of the disclosure, and is used to solve together with the description
Release the principle of the disclosure.
Referring to the drawings, according to following detailed description, the disclosure can be more clearly understood, wherein：
Figure 1A is the front view for showing the rotary-cleaning equipment according to disclosure one embodiment.
Figure 1B is the side view of the idle pulley in the rotary-cleaning equipment shown in Figure 1A.
Fig. 2A and Fig. 2 B are the forward sight of the idle pulley in the rotary-cleaning equipment shown according to disclosure one embodiment respectively
Sectional view and side view.
Fig. 3 A and Fig. 3 B are the forward sight of the idle pulley in the rotary-cleaning equipment shown according to disclosure one embodiment respectively
Sectional view and side view.
Fig. 4 A are the detection signals on the idle pulley in rotary-cleaning equipment shown according to disclosure one embodiment
Sequence diagram.
Fig. 4 B are the detection signals on the idle pulley in rotary-cleaning equipment shown according to disclosure one embodiment
Sequence diagram.
Fig. 5 is the flow chart for showing the detection method according to disclosure one embodiment.
Note that in embodiments described below, same reference numeral is used in conjunction between different attached drawings sometimes
Come the part for representing same section or there is identical function, and omit its repeat specification.In the present specification, using similar mark
Number and letter represent similar terms, therefore, once be defined in a certain Xiang Yi attached drawing, then in subsequent attached drawing be not required pair
It is further discussed.
In order to make it easy to understand, position, size and scope of each structure shown in attached drawing etc. etc. does not indicate that reality sometimes
Position, size and scope etc..Therefore, disclosed invention is not limited to position, size and scope disclosed in attached drawing etc. etc..
Embodiment
The various exemplary embodiments of the disclosure are described in detail now with reference to attached drawing.It should be noted that：Unless in addition have
Body illustrates that the unlimited system of component and the positioned opposite of step, numerical expression and the numerical value otherwise illustrated in these embodiments is originally
Scope of disclosure.
Present inventors appreciate that traditional rotary-cleaning equipment does not possess the work(of the rotating speed of detection institute cleaning article
Energy.
In general, rotary-cleaning equipment includes the driving wheel positioned at both sides and underlying idle pulley.Wherein, drive
Wheel is responsible for the cleaning article formation of driving institute and is rotated, and idle pulley support and guiding institute cleaning article, and can adjoint institute cleaning article
Rotation and rotate.During rotary-cleaning, institute's cleaning article may be due to such as connecting between motor and driving wheel
The reason for belt slack etc and rotate exception.In the case where rotating exception, the cleaning of product is insufficient, cleaning
Effect is affected.And once the surface impurity of cleaned product is not up to technological requirement, defective workmanship may be caused, and then
Deteriorate the yield of product.
Therefore, there is the demand to the detection technique for rotary-cleaning equipment in this area.
The present invention provides a kind of rotating speed by measuring idle pulley to determine the equipment of the rotary speed of cleaning article and
Method.On the one hand, the signal source that can be used cooperatively and detector, the opposing party are set in the pre-position of rotary-cleaning equipment
Face, the structure of idle pulley is improved to include at least one conducting path, so that conducting path can be with the rotation of idle pulley
And (or being into conducted signal state) is appeared on the conduction path of signal source and detector at intervals, so that inspection
Survey the signal for detecting signal source and sending that device is capable of intermittent.The time interval rotates by a certain angle the time used with idle pulley
It is related.Therefore, detector detects that the time interval of signal may be used to determine the rotary speed of idle pulley.
The present invention can measure the rotary speed of the product cleaned in rotary-cleaning equipment, so as to find rotation in time
Turn abnormal, to ensure the yield of product.
The description only actually at least one exemplary embodiment is illustrative to be never used as to the disclosure below
And its application or any restrictions that use.
It may be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable
In the case of, the technology, method and apparatus should be considered as authorizing part for specification.
In shown here and discussion all examples, any occurrence should be construed as merely exemplary, without
It is as limitation.Therefore, the other examples of exemplary embodiment can have different values.
Figure 1A is the front view for showing the rotary-cleaning equipment according to disclosure one embodiment.Figure 1B is shown in Figure 1A
Rotary-cleaning equipment in idle pulley side view.
For simplicity of illustration, eliminated in attached drawing and be used for the cleaning part for performing cleaning function in rotary-cleaning equipment
Part (such as, ultrasonic transducer) and cleaned product (such as, wafer).
As shown in Figure 1A, rotary-cleaning equipment 100 can include housing 101.Here, for the ease of in observation housing 101
The arrangement in portion, it is assumed that the preceding of housing 101 half side is removed.Housing 101 can be arranged to accommodate cleaning solution, so that rotation
Turning cleaning can carry out in cleaning solution.In certain embodiments, being included in cleaning solution has corrosive component.It is for example, clear
Washing lotion can include one or both of ammonium hydroxide, hydrogen peroxide.In this case, the composition material of housing 101 needs to have resistance to
Corrosivity.The person skilled in the art will easily understand the present invention does not have for parameters such as the contour shape of housing 101, size dimensions
There is special limitation.
Rotary-cleaning equipment 100 can also include driving wheel (not shown) and idle pulley 102.Wherein, driving wheel is used for
Drive institute's cleaning article rotation.In certain embodiments, two driving wheels are arranged at the both sides of product.In addition, 102 quilt of idle pulley
Institute's cleaning article is used to support and guided, and can be rotated with the rotation of institute's cleaning article.In certain embodiments, idle pulley
102 are arranged at the lower section of product.But the person skilled in the art will easily understand driving wheel and idle pulley 102 in the present invention
Concrete arrangement (quantity, position etc.) not limited to this.
In one embodiment, as shown in Figure 1A, idle pulley 102 can show as in a thickness direction be in the part at center
It is concave.The sunk part (alternatively, corresponding both sides projection portion) at this center is conducive to limit institute's cleaning article
And guiding.In addition, as shown in Figure 1A, in one embodiment, between idle pulley 102 can be provided with the sunk part surface at center
Every the groove 105 of distribution.Groove 105 can advantageously increase the friction between idle pulley 102 and institute's cleaning article, so that more effectively
Ground ensures the synchronous rotary between idle pulley 102 and institute's cleaning article.
Similarly, in one embodiment, driving wheel also includes above-mentioned sunk part.In addition, in one embodiment,
Driving wheel can also have the groove 105 for being arranged at the sunk part surface, and to effectively drive, cleaning article is rotated.
In one embodiment, as shown in arrow C in Figure 1A, idle pulley 102 is rendered as revolving clockwise when watching from R sides
Turn.But the direction of rotation the person skilled in the art will easily understand, idle pulley 102 be it is arbitrary, in normal operation, idle pulley
102 direction of rotation is opposite with the direction of rotation of institute's cleaning article.
In one embodiment, idle pulley 102 is arranged on via axis 103 on the side wall of housing 101.Wherein, it is lazy in order to reduce
Wheel 102 and the frictional resistance of the joint place of axis 103, can use the attachment of such as ball etc in joint place
(not shown).
In addition, as shown in Figure 1, rotary-cleaning equipment 100 can also include signal source 110, detector 120 and conducting piece
130.Here it is possible to signal source 110, detector 120 and conducting piece 130 are referred to as detection device.
Signal source 110 is configured as transmitting signal.For convenience of description, hereinafter by using the signal launched as optical signal
In case of illustrate.But the person skilled in the art will easily understand, the type not limited to this for the signal launched, and can
To be the arbitrary signal that can be adapted to carry out transmitting described below, conduction and detection operation.For example, the signal launched can be with
For infrared ray, visible ray, ultraviolet etc..In one embodiment, the signal launched is laser signal.Since laser signal is determined
Tropism is strong, brightness is high, and laser signal, which is used in the present invention, can advantageously mitigate external environmental interference.
Correspondingly, signal source 110 is can to launch the signal source of above-mentioned signal.For example, in one embodiment, signal source
110 can be semiconductor laser, light emitting diode etc..
Detector 120 is configured as the signal received and sensed signal sources 110 are launched.Therefore, detector 120 needs energy
Enough and signal source 110 is used cooperatively.For example, in the case where the signal launched is optical signal, detector 120 can be set
Into photodetector.More specifically, for example, when signal source 110 launch signal be wavelength be 1550nm laser signal when, can
Detector 120 to be arranged to the photodetector suitable for the wave-length coverage.
In one embodiment, as shown in Figure 1A, signal source 110 and detector 120 are arranged at 100 housing 101
Outside, and via transparent window 104 towards the inside of housing 101.Being included in used cleaning solution has corrosive component
In the case of, above arrangement can advantageously avoid erosion of the cleaning solution to signal source 110 and detector 120.Alternatively
Ground, one or two in signal source 110 and detector 120 can also be arranged on the inside of 100 housing 101, and via saturating
Bright shell is separated with cleaning solution.
Above-mentioned transparent window or the material of transparent outer cover are needed with the corrosion resistance for the cleaning solution.In addition, this
Term " transparent " described in invention is construed as the window or shell to be had well for used signal
Transmittance.It is worth noting that, when selected signal source 110 and detector 120 require connect to the power supply for power supply,
The component being connected with power supply must be separated with cleaning solution.Preferably, the component being connected with power supply is located at the outside of housing 101.
Although the signal source 110 and detector 120 in Figure 1A are configured to be symmetrically located at the left and right sides of idle pulley 102,
But the person skilled in the art will easily understand be not particularly limited, only for the position of signal source 110 and detector 120
It is wanted to be suitable for coordinating with conducting piece 130 described below so that signal can be conducted to detection from signal source 110 at intervals
Device 120.For example, in certain embodiments, signal source 110 and detector 120 can also be arranged on the same of idle pulley 102
Side.Alternatively, in certain embodiments, signal source 110 and detector 120 can also be separately positioned on any difference of idle pulley 102
Two orientation at.
Although furthermore it is noted that denote signal source 110 and a peace of detector 120 respectively in figure ia
Holding position, but this just for the sake of illustrating, the position of signal source 110 and detector 120 can be interchangeable, without to the application
The technique effect of technical solution have an impact.
Conducting piece 130 is arranged at intervals conduct signal to detector 120 from signal source 110.Wherein, can
The time interval of conducted signal is related to the rotary speed of idle pulley 102.For this reason, at least a portion of conducting piece 130 is arranged on
In idle pulley 102.In one embodiment, as shown in Figure 1A, conducting piece 130 is integrally set in idle pulley 102.But the present invention
Not limited to this, for example, as will be described in hereinafter, in certain embodiments, only a fraction is arranged on lazy in conducting piece 130
In wheel 102, and other parts are arranged in other components of such as axis 103 etc.
In certain embodiments, conducting piece 130 is configured as forming conducting path using tubular cavity.
To avoid fluid resistance, tubular cavity can be sealing.For example, in one embodiment, in the port of tubular cavity
The sealed window transparent to signal is set.Wherein, it in the tubular cavity of sealing can be vacuum, or the material that filling is appropriate.Example
Such as, in certain embodiments, such as empty gas and water etc transparent material can be filled in tubular cavity.
In certain embodiments, conducting piece 130 is configured as forming conducting path using waveguide.
For example, in certain embodiments, the fiber waveguide of such as optical fiber etc can be used to form conducting piece 130.
In certain embodiments, signal can directly conduct in conducting piece 130.
Alternatively, in certain embodiments, signal can be sent out entirely using the tubular cavity in conducting piece 130 or the wall of waveguide
Penetrate and conduct.In this case, conducting piece 130 can also include being arranged on the male part at the port of conducting piece 130.
In certain embodiments, conducting piece 130 can limit linear pattern conducting path.
For example, in one embodiment, as shown in the dotted line in Figure 1A, linear pattern conducting path is configured to and axis 103
It is parallel.Figure 1B is also from side (direction indicated with arrow R) exemplified with the conducting piece 130 being arranged on idle pulley 102.Wherein, pass
The section of guiding element 130 is illustrated as circle in fig. ib, but this is used for the purpose of illustrating.Those skilled in the art should manage
Solution, the present invention is not particularly limited for the cross section profile of conducting piece 130, as long as it is suitable for conducted signal, for example,
When signal directly conducts in conducting path, which can also be ellipse, rectangle or other irregular figures etc..
As illustrated in figs, in idle pulley 102 during axis 103 is rotating, conducting piece 130 is also with idle pulley 102
Rotate and rotate.Twice by same position (for example, making conducting path enter conducted signal state before and after conducting piece 130
Position) during, idle pulley 102, which correspondingly revolves, to turn around.
In certain embodiments, signal source 110 and detector 120 can be arranged in correspondence with when idle pulley 102 is rotated to certain
On the extension path for continuing extension during one position along linear pattern conducting pathway radially opposite sides.With the above arrangement, revolved in idle pulley 102
When going to the position, signal can enter detector via conducting path from the conduction of signal source 110, i.e. conducting path, which enters, to be passed
Lead signal condition.
Fig. 4 A are detected exemplified with when using the linear pattern conducting path as shown in Figure 1A-Figure 1B by detector 120
Signal sequence diagram.Here, T1, T2, T3 ... represent that detector 120 detects the time interval of signal successively respectively.Accordingly
Ground, rotary speed of the idle pulley 102 in these time intervals can respectively with represent the 1/T1 of the rotating number of turns in the unit interval,
1/T2,1/T3 ... are represented.
Idle pulley 102 it is normal it is (at the uniform velocity) rotating in the case of, T1, T2, T3 ... meet relational expression T1=T2=T3=...=
T, wherein, T represents the swing circle of driving wheel in normal operation.
In the case where the rotation of idle pulley 102 is abnormal, T1, T2, T3 ... no longer meet relational expression T1=T2=T3
=...=T.For example, in one embodiment, measure Ti>T (i is integer), this represents idle pulley 102 in this section of time interval
Rotational deceleration.Especially, if Ti is much larger than T, it can be determined that idle pulley 102 has stopped rotating.For example, in one embodiment
In, if can specify that Ti >=Th, judge that idle pulley 102 stops rotating, wherein, Th is default stalling threshold time.Rotation hair
Raw exception can include above-mentioned deceleration or stopping, but this is only example, and the person skilled in the art will easily understand the present invention
Involved in the rotation exception not limited to this that arrives
It can be abnormal in the rotation for determining idle pulley 102, and then determine that the rotation of institute cleaning article is done when being abnormal
Go out response.For example, in one embodiment, detection device can carry out sending alarm when detecting that rotation is abnormal, stop work
At least one operation in work.
In addition, in certain embodiments, in order to avoid the error that single measurement may introduce, detection device is set to base
Rotating speed is determined in the average value of multiple measurement results.
Although the linear pattern conducting path in Figure 1A-Figure 1B is illustrated as unlimited continuously across idle pulley 102, the present invention
In this.For example, in certain embodiments, linear pattern conducting path can be provided remote from the axis of idle pulley 102, so that only
Piecewise passes through the both sides projection portion of idle pulley 102.Especially, in one embodiment, linear pattern conducting path is configured to
Through the groove 105 of idle pulley 102, and an a part (part and groove for conducting path for conducting path is used as by the use of groove 105
It is overlapping).This design can make full use of the original structure of idle pulley 102, so as to simplify processing.
Although the linear pattern conducting path in Figure 1A-Figure 1B is configured to parallel with axis 103, those skilled in the art will
It is readily appreciated that, is not particularly limited for the orientation of linear pattern conducting path, as long as it is suitable for intermittent described above
Ground " connection " signal source and detector, so as to coordinate signal source and detector to realize tachometric survey.For example, at some
In implementation, linear pattern conducting path can also be arranged perpendicular to axis 103.
In certain embodiments, conducting piece 130 limits a plurality of linear pattern conducting path.
Fig. 2A and Fig. 2 B illustrate respectively according to the idle pulley 102 including a plurality of linear pattern conducting path of one embodiment
Front cross-sectional view and side view.Wherein, Fig. 2A is the sectional view in the section indicated by the dotted line A ' B ' shown in Fig. 2 B.For letter
The purpose of change, is omitted here axis 103.In addition, although idle pulley 102 includes 4 linear pattern conducting paths in Fig. 2A and Fig. 2 B,
But this is just for the sake of illustrating, passed it will be understood by those of skill in the art that idle pulley 102 can include any number of linear pattern
Guiding path.
In one embodiment, as shown in Figure 2 A and 2 B, a plurality of linear pattern conducting path be all oriented to parallel to
Axis 103.In addition, in order to which signal is guided from signal source 110 by each conducting path during idle pulley 102 is rotating
To detector 120, each bar linear pattern conducting path is arranged to equidistant with axis 103.Therefore, in side view, each bar linear pattern
The section of conducting path is respectively positioned on the circumference D centered on the position where axis 103.
In certain embodiments, signal source 110 and detector 120 can be arranged in correspondence with rotating to certain in idle pulley 102
On the extension path for continuing extension during one position along wherein straight line type conducting pathway radially opposite sides.
As shown in Fig. 2A-Fig. 2 B, when idle pulley 102 is during axis 103 is rotating, conducting piece 130 is also with idle pulley 102
Rotate and rotate.It is with the difference of wall scroll conducting path, when idle pulley 102 rotates by a certain angle so that another conduction
When path enters conducted signal state, detector 120 can also receive signal.
Fig. 4 B are detected exemplified with when using a plurality of linear pattern conducting path as shown in figures 2 a-2b by detector 120
The sequence diagram of the signal arrived.Assuming that the rotary speed of idle pulley 102 is constant, then the time point of signal is detected in detector 120
It is more intensive for wall scroll conducting path.Wherein, T11, T12, T13 and T14 are illustrated respectively in 4 during rotation is turned around
Bar conducting path sequentially enters the time interval used in conducted signal state.If θ 1, θ 2, θ 3 and θ 4 are illustrated respectively in rotation and turn around
During 4 conducting paths sequentially enter rotating angle required for conducted signal state, then the rotation in these time intervals
Rotary speed can be represented with representing the θ 1/T11 of rotating angle in the unit interval, θ 2/T12, θ 3/T13 and θ 4/T14 respectively.
In addition, in certain embodiments, detection device can also be obtained in these time intervals based on the result repeatedly measured
Average rotary speed.
Therefore, when introducing a plurality of conducting path, the rotary speed of idle pulley 102 advantageously can more subtly be measured.And
And when one or more of conducting path breaks down, detection device still can be based on remaining other conducting paths
Carry out tachometric survey.Therefore, it is possible to advantageously increase the stability of measuring system.
In one embodiment, a plurality of linear pattern conducting path is configured to be evenly distributed in circle corresponding with circumference D
On cylinder.For example, in one embodiment, θ 1=θ 2=θ 3=θ 4=pi/2s.
Determine whether to rotate abnormal other processing steps and above-mentioned utilization using a plurality of linear pattern conducting path
Corresponding steps in wall scroll conducting path are similar, therefore their description is omitted here.
Although a plurality of linear pattern conducting path in Fig. 2A-Fig. 2 B is configured to parallel with axis 103, people in the art
Member will readily appreciate that, be not particularly limited for the orientation of these conducting paths, as long as its be suitable for it is described above can
Signal source and detector " are connected " successively, so as to coordinate signal source and detector to realize tachometric survey.For example, one
In a little implementations, a plurality of linear pattern conducting path, which can also be set, to be located normal on the same plane of axis 103.
In certain embodiments, conducting piece 130 can limit the broken line type conducting path with break.In addition, conducting piece
130 further include the signal steering component being arranged at break.
Fig. 3 A and Fig. 3 B illustrate respectively the forward sight of the idle pulley 102 including broken line type conducting path according to one embodiment
Sectional view and side view.Wherein, Fig. 3 A are the sectional views in the section indicated by the dotted line A ' B ' shown in Fig. 3 B.For the ease of saying
It is bright, axis 103 is also illustrated in Fig. 3 A.
In one embodiment, as shown in Figure 3A and Figure 3B, broken line type conducting path includes first be arranged in axis 103
Section 301 and the second segment 302 being arranged in idle pulley 102.Wherein, first segment 301 and second segment 302 are by being arranged on idle pulley 102
Center at signal steering component 140 engage.It is noticeable, can have to form conducting path using axis 103
Simplify technique sharply.
The conduction orientation that the signal steering component 140 at break is used to change signal is arranged on, to guide signal conducting
Path relaying, which resumes, leads.In certain embodiments, signal steering component 140 can by relative to signal transduction direction into certain
Angle places ground reflecting element (such as speculum) to realize.For example, in one embodiment, as shown in Figure 3A, signal turns to
Element 140 has certain inclination angle relative to axis 103.In addition, as shown in Figure 3A, signal steering component 140 is configured to pass through
The axis of idle pulley 102.In certain embodiments, signal steering component 140 is configured to the center by idle pulley 102.
As shown in Figure 3A, in one embodiment, one end of the second segment 302 in conducting path is arranged on idle pulley 102
Sunk part surface.Preferably, in one embodiment, one end of second segment 302 is arranged in groove 105.That is, conducting path
Idle pulley 102 is pierced by by groove 105.This design can advantageously avoid conducting path port organization influence idle pulley 102 with
The contact of institute's cleaning article, so as to influence the rotation of institute's cleaning article.
As shown in Figure 3A, in one embodiment, signal steering component 140 can be fixed on axis 103.Therefore, only
When the second segment 302 of broken line type conducting path is rotated to specified position with the rotation of idle pulley 102, signal can be via
Signal steering component 140 is guided to second segment 302 from the first segment 301 of broken line type conducting path.In certain embodiments, signal
Source 110 and detector 120 can be arranged in correspondence with when idle pulley 102 rotates to the position respectively along broken line type conducting path
Two sections of outwardly extending extension paths on.
In figure 3 a, the second segment 302 of broken line type conducting path is vertical relative to first segment 301, but this is only
In order to illustrate.It will be understood by those of skill in the art that the present invention is for the opposite position between second segment 302 and first segment 301
The relation of putting is not particularly limited, as long as signal can be via signal steering component 140 in first segment 301 and second segment 302
Between switch over.For example, the second segment 302 of broken line type conducting path can also engage to form acute angle with first segment 301
Or obtuse angle.
In addition, although two sections in the broken line type conducting path illustrated in Fig. 3 A and Fig. 3 B are separately positioned on axis 103 and lazy
In wheel 102, but this just for the sake of illustrating, the present invention is not limited thereto.For example, broken line type conducting path can be provided entirely in it is lazy
In wheel 102.Moreover, it will be understood by those of skill in the art that in the present invention broken line type conducting path that idle pulley 102 includes number
Amount and the quantity of the break in every broken line type conducting path are also not necessarily limited to 1.
Using broken line type conducting path straight line is utilized with above-mentioned to determine whether to rotate abnormal other processing steps
Corresponding steps in type conducting path are similar, therefore their description is omitted here.
Fig. 5 is exemplified with the rotary speed for being used to detect the idle pulley in rotary-cleaning equipment according to disclosure one embodiment
Method 500 flow chart.
In step 502, relative to the pre-position setting signal source of rotary-cleaning equipment and detector.In step
In 504, conducting piece is set in idle pulley.With the above arrangement, so that in step 506, conducting piece with idle pulley rotate and
Every property signal is conducted to detector from signal source.
Setting on signal source, detector and conducting piece above in conjunction with embodiment retouch in detail
State, therefore its detailed description is omitted here.
It is worth noting that, the division of each step (step 502,504,506) in method 500 is only illustrative
, in order to describe.In practical operation, in any combination, or even single step can be synthesized between each step.It is in addition, each
The execution sequence of a step is from the limitation of description order, and each step can at least partially overlappingly be held in time
OK.
According to the first aspect of the invention, there is provided a kind of rotary-cleaning equipment, it is characterised in that including：Housing；Set
Idle pulley in housing；And detection device, detection device include：Signal source, is configured to signal of the detection from signal source
Detector, and be configured as the conducting piece for including at least one conducting path, wherein, signal source and detector are arranged at phase
For the pre-position of rotary-cleaning equipment, at least a portion of conducting piece is arranged in idle pulley, with the rotation of idle pulley, is passed
Guiding element at intervals conducts signal to detector from signal source.
In one embodiment, detection device determines the rotary speed of idle pulley based on the time interval for detecting signal.
In one embodiment, signal is optical signal.
In one embodiment, conducting piece is configured as including a plurality of conducting path, and wherein a plurality of conducting path is set
It is set to as idle pulley rotates and conducted signal successively.
In one embodiment, conducting piece includes tubular cavity or waveguide.
In one embodiment, signal carries out full transmitting using tubular cavity or the wall of waveguide and conducts.
In one embodiment, in signal source and detector at least one housing for being arranged at rotary-cleaning equipment it is outer
Portion, and via the transparent window sealed towards in housing.
In one embodiment, the groove being spaced apart is provided with the surface of idle pulley, and conducting path passes through groove
So that the groove forms a part for conducting path, or one end of conducting path is set in a groove.
In one embodiment, conducting piece limits linear pattern conducting path.
In one embodiment, conducting piece limits the broken line type conducting path with break, and conducting piece is further included and set
Put the signal steering component at break.
In one embodiment, broken line type conducting path includes：It is arranged in the connecting shaft of the idle pulley of rotary-cleaning equipment
First segment；It is arranged in idle pulley from the vertically extending second segment of connecting shaft；And first segment and second segment are at the center of idle pulley
Place is joined to signal steering component.
According to the second aspect of the disclosure, there is provided a kind of detection device for rotary-cleaning equipment, it is characterised in that
Including：Signal source；Detector, is configured to signal of the detection from signal source；And conducting piece, it is configured as including at least one
Bar conducting path, wherein, signal source and detector are arranged at the pre-position relative to rotary-cleaning equipment, and conducting piece is extremely
A few part is arranged in the idle pulley of rotary-cleaning equipment, and with the rotation of idle pulley, conducting piece is at intervals by signal from signal
Conduct to detector in source.
According to the third aspect of the disclosure, there is provided a kind of rotary speed for being used to detect the idle pulley in rotary-cleaning equipment
Method, it is characterised in that including：Relative to the pre-position setting signal source of rotary-cleaning equipment and detector；
Conducting piece is set in idle pulley；As idle pulley rotates, conducting piece is set at intervals to conduct signal to detector from signal source.
In one embodiment, detection device determines the rotary speed of idle pulley based on the time interval for detecting signal.
In one embodiment, conducting piece is configured as including a plurality of conducting path, and wherein a plurality of conducting path is set
It is set to as idle pulley rotates and conducted signal successively.
In one embodiment, the groove being spaced apart is provided with the surface of idle pulley, and conducting path passes through groove
So that the groove forms a part for conducting path, or one end of conducting path is set in a groove.
Word "front", "rear", " top ", " bottom " in specification and claim, " on ", " under " etc., if deposited
If, it is not necessarily used to describe constant relative position for descriptive purposes.It should be appreciated that the word so used
Language is interchangeable in appropriate circumstances so that embodiment of the disclosure described herein, for example, can with this institute
Those of description show or other are orientated in other different orientations and operate.
As used in this, word " exemplary " means " being used as example, example or explanation ", not as will be by
" model " accurately replicated.It is not necessarily to be interpreted than other implementations in any implementation of this exemplary description
Preferable or favourable.Moreover, the disclosure is from above-mentioned technical field, background technology, the content of the invention or embodiment
Given in the theory that is any stated or being implied that goes out limited.
As used in this, word " substantially " mean comprising by design or manufacture the defects of, device or element appearance
Any small change caused by difference, environment influence and/or other factors.Word " substantially " also allows by ghost effect, makes an uproar
Caused by sound and the other actual Considerations being likely to be present in actual implementation with perfect or preferable situation
Between difference.
Foregoing description can indicate to be " connected " or " coupled " element or node or feature together.As used herein
, unless otherwise expressly noted, " connection " means an element/node/feature with another element/node/feature in electricity
Above, it is directly connected mechanically, in logic or in other ways (or direct communication).Similarly, unless otherwise expressly noted,
" coupling " mean an element/node/feature can with another element/node/feature in a manner of direct or be indirect in machine
On tool, electrically, in logic or in other ways link to allow to interact, even if the two features may be not direct
Connection is also such.That is, " coupling " is intended to encompass element or the direct of further feature links and link indirectly, including profit
With the connection of one or more intermediary elements.
In addition, just to the purpose of reference, can also be described below it is middle use certain term, and thus not anticipate
Figure limits.For example, unless clearly indicated by the context, be otherwise related to the word " first " of structure or element, " second " and it is other this
Class numeral word does not imply order or sequence.
It should also be understood that one word of "comprises/comprising" is as used herein, illustrate that there are pointed feature, entirety, step
Suddenly, operation, unit and/or component, but it is not excluded that in the presence of or the one or more of the other feature of increase, entirety, step, behaviour
Work, unit and/or component and/or combinations thereof.
In the disclosure, therefore term " offer " " it is right to provide certain from broadly by covering obtain object all modes
As " including but not limited to " purchase ", " preparation/manufacture ", " arrangement/setting ", " installation/assembling ", and/or " order " object etc..
It should be appreciated by those skilled in the art that the border between aforesaid operations is merely illustrative.Multiple operations
Single operation can be combined into, single operation can be distributed in additional operation, and operate can at least portion in time
Divide and overlappingly perform.Moreover, alternative embodiment can include multiple examples of specific operation, and in other various embodiments
In can change operation order.But others are changed, variations and alternatives are equally possible.Therefore, the specification and drawings
It should be counted as illustrative and not restrictive.
Although some specific embodiments of the disclosure are described in detail by example, the skill of this area
Art personnel it should be understood that above example merely to illustrate, rather than in order to limit the scope of the present disclosure.It is disclosed herein
Each embodiment can in any combination, without departing from spirit and scope of the present disclosure.It is to be appreciated by one skilled in the art that can be with
A variety of modifications are carried out to embodiment without departing from the scope and spirit of the disclosure.The scope of the present disclosure is limited by appended claims
It is fixed.
Claims (10)
- A kind of 1. rotary-cleaning equipment, it is characterised in that including：Housing；Idle pulley, is arranged in the housing；AndDetection device, the detection device include：Signal source,Detector, is configured to signal of the detection from the signal source, andConducting piece, is configured as including at least one conducting path,Wherein, the signal source and the detector are arranged at the pre-position relative to the rotary-cleaning equipment, described At least a portion of conducting piece is arranged in the idle pulley, and with the rotation of the idle pulley, the conducting piece is at intervals by institute Signal is stated to conduct to the detector from the signal source.
- 2. rotary-cleaning equipment as claimed in claim 1, it is characterised in thatThe detection device determines the rotary speed of the idle pulley based on the time interval for detecting the signal.
- 3. rotary-cleaning equipment as claimed in claim 1, it is characterised in that the signal is optical signal.
- 4. the rotary-cleaning equipment as described in right wants 1, it is characterised in thatThe conducting piece is configured as including a plurality of conducting path, wherein a plurality of conducting path is configured to described lazy The signal is conducted in wheel rotation successively.
- 5. the rotary-cleaning equipment as described in any one in claim 1-4, it is characterised in thatThe outside of at least one housing for being arranged at the rotary-cleaning equipment in the signal source and the detector, and via The transparent window sealed is towards in the housing.
- 6. the rotary-cleaning equipment as described in any one in claim 1-4, it is characterised in thatThe groove being spaced apart is provided with the surface of the idle pulley, andThe conducting path causes the groove to form a part for the conducting path through the groove, orOne end of the conducting path is arranged in the groove.
- 7. the rotary-cleaning equipment as described in any one in claim 1-4, it is characterised in thatThe conducting piece limits linear pattern conducting path.
- 8. the rotary-cleaning equipment as described in any one in claim 1-4, it is characterised in thatThe conducting piece limits the broken line type conducting path with break, and the conducting piece further includes and is arranged on the break The signal steering component at place.
- A kind of 9. detection device for rotary-cleaning equipment, it is characterised in that including：Signal source；Detector, is configured to signal of the detection from the signal source；AndConducting piece, is configured as including at least one conducting path,Wherein, the signal source and the detector are arranged at the pre-position relative to the rotary-cleaning equipment, described At least a portion of conducting piece is arranged in the idle pulley of the rotary-cleaning equipment, with the rotation of the idle pulley, the conduction Part at intervals conducts the signal to the detector from the signal source.
- A kind of 10. method for the rotary speed for being used to detect the idle pulley in rotary-cleaning equipment, it is characterised in that including：Relative to the pre-position setting signal source of the rotary-cleaning equipment and detector；Conducting piece is set in the idler gear；As the idle pulley rotates, the conducting piece is set at intervals to conduct the signal to the detection from the signal source Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711219905.8A CN107999457A (en) | 2017-11-29 | 2017-11-29 | Rotary-cleaning equipment, detection device and detection method for rotary-cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711219905.8A CN107999457A (en) | 2017-11-29 | 2017-11-29 | Rotary-cleaning equipment, detection device and detection method for rotary-cleaning equipment |
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| CN107999457A true CN107999457A (en) | 2018-05-08 |
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ID=62054542
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711219905.8A Pending CN107999457A (en) | 2017-11-29 | 2017-11-29 | Rotary-cleaning equipment, detection device and detection method for rotary-cleaning equipment |
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| CN109107970A (en) * | 2018-11-07 | 2019-01-01 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer cleaner equipment and wafer production line |
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Application publication date: 20180508 |