CN107994014A - Image sensor - Google Patents

Image sensor Download PDF

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Publication number
CN107994014A
CN107994014A CN201610934361.2A CN201610934361A CN107994014A CN 107994014 A CN107994014 A CN 107994014A CN 201610934361 A CN201610934361 A CN 201610934361A CN 107994014 A CN107994014 A CN 107994014A
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Prior art keywords
filter layer
infrared light
layer
image sensor
infrared
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Granted
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CN201610934361.2A
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Chinese (zh)
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CN107994014B (en
Inventor
谢於叡
陈柏男
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Himax Technologies Ltd
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Himax Technologies Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/167Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/18Eye characteristics, e.g. of the iris
    • G06V40/19Sensors therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H01L31/02164Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Health & Medical Sciences (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Electromagnetism (AREA)
  • Ophthalmology & Optometry (AREA)
  • General Health & Medical Sciences (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

A kind of Image Sensor, includes visible light receiver and infrared light receiver.It can be seen that light receiver is to receive visible ray, infrared light receiver is receiving infrared light.Infrared light receiver includes:Infrared light emitting diodes, at least one white filter layer and at least an infrared light penetrates filter layer.At least one white filter layer penetrates filter layer with an at least infrared light and is all arranged on infrared light emitting diodes.Infrared light is through at least one white filter layer and at least an infrared light penetrates filter layer and received by infrared light emitting diodes.

Description

Image Sensor
Technical field
The present invention relates to a kind of Image Sensor, and more particularly to a kind of image sensing with infrared light sensing function Device.
Background technology
With the development of control of access system and security system, the biological identification of personal identification is confirmed using characteristics of human body (biometric) technology is gradually prevailing.Iris-recognition technology with high-reliability is the biological identification of one of which popularization Technology.When iris-recognition technology is applied to electronic device, such as smart mobile phone, smart mobile phone be required to receive respectively visible ray with The Image Sensor of infrared light realizes iris discriminating function.Traditional Image Sensor is distinguished with two different parts Receive visible ray and infrared light.
The content of the invention
The present invention proposes a kind of Image Sensor, includes visible light receiver and infrared light receiver.It can be seen that light receiver To receive visible ray, infrared light receiver is receiving infrared light.Infrared light receiver includes:Infrared light emitting diodes, At least one white filter layer and at least an infrared light penetrates filter layer.At least one white filter layer is penetrated with an at least infrared light Filter layer is all arranged on infrared light emitting diodes.Its mid-infrared light is infrared through at least one white filter layer and at least one Light penetrates filter layer and is received by infrared light emitting diodes.
Brief description of the drawings
From the detailed description done below in conjunction with attached drawing, can have to the aspect of the disclosure and more preferably understand.It is noted that According to the standard practice of industry, each feature is not drawn to illustrate.In fact, in order to make discussion apparent, the ruler of each feature It is very little all arbitrarily to increase or decrease.
Fig. 1 is the profile for the Image Sensor for illustrating first embodiment according to the present invention.
Fig. 2 is the profile for illustrating Image Sensor according to the second embodiment of the present invention.
Fig. 3 is the profile for illustrating Image Sensor according to the third embodiment of the invention.
Fig. 4 is the profile for illustrating Image Sensor according to the fourth embodiment of the invention.
Fig. 5 is the profile for illustrating Image Sensor according to the fifth embodiment of the invention.
Fig. 6 is the profile for illustrating Image Sensor according to the sixth embodiment of the invention.
Fig. 7 is the profile for illustrating Image Sensor according to the seventh embodiment of the invention.
Fig. 8 is the profile for the Image Sensor for illustrating the 8th embodiment according to the present invention.
Description of reference numerals:
100、200、300、400、500、600、700、800:Image Sensor
110、210、510、610:It can be seen that light receiver
112:Visible ray sensed layer
114、514:Chromatic filter layer
114a:Red filter unit
114b:Blue filter unit
114c:Green filter unit
116、516:Infrared cut of light filter layer
120、220、320、420、520、620、720、820:Infrared light receiver
122:Infrared light sensed layer
124、324、325、424、524、624、724、725、825:White filter layer
126、226、326、327、526、726、727:Infrared light penetrates filter layer
ML:Microlens layer
PL1、PL2、PL3、PL4:Flatness layer
SP:Wall
WA:Wafer layer
Embodiment
Present disclose provides many different embodiments or example, to the different characteristic of implementation the displosure.For simplification The specific example of the disclosure, some elements and layout can be in following explanation.Certainly, these are only example rather than to limit The disclosure.If being formed in for example, refer to fisrt feature in follow-up explanation above second feature, this may include fisrt feature with Second feature is the embodiment directly contacted;This can also include also forming other features between fisrt feature and second feature Embodiment, this causes fisrt feature not contacted directly with second feature.In addition, the disclosure may repeat in various examples Graphical sysmbol and/or word.This repeats to be for concise and clearly purpose, but do not determine the various implementations discussed itself Relation between example and/or setting.
Furthermore spatially opposite term, for example, it is beneath, following, relatively low, above, higher etc., it is to be solved for easily Release the relation in the example shown between an element or feature and another element or feature.These spatially opposite term except Cover the direction painted in the example shown, also contemplated device direction different in use or operation.These devices can also be revolved Turn (such as be rotated by 90 ° or rotate to other directions), and spatially opposite description used herein can also equally have phase Corresponding explanation.
Fig. 1 is the profile for the Image Sensor 100 for illustrating first embodiment according to the present invention.As shown in Figure 1, image Sensor 100 includes visible light receiver 110 and infrared light receiver 120.It can be seen that light receiver 110 is to receive visible ray, Infrared light receiver 120 is receiving infrared light.
As shown in Figure 1, visible light receiver 110 includes visible ray sensed layer 112, chromatic filter layer 114 and infrared light Light cutoff filter layer 116.Chromatic filter layer 114 is all arranged at visible ray sensed layer with infrared cut of light (IR Cut) filter layer 116 To provide colourama to visible ray sensed layer 112 on 112.Visible ray sensed layer 112 correspondingly produces to receive visible ray Main image signal.In the present embodiment, it is seen that light sensing layer 112 includes an at least light emitting diode to sense colourama.Shine Diode can be Complementary MOS (complementary metal oxide semiconductor, CMOS) two poles Pipe.However, the embodiment of the present invention not limited to this.
Chromatic filter layer 114 is providing colourama.In the present embodiment, chromatic filter layer 114 includes red filter list First 114a, blue filter unit 114b and green filter unit 114c, but the embodiment of the present invention not limited to this.Infrared light is cut Only filter layer 116 is blocking infrared light.In other words, when colourama passes through infrared cut of light filter layer 116, infrared light is cut Only filter layer 116 can block the transmission of infrared light.In the present embodiment, infrared cut of light filter layer 116 blocks wavelength to be more than 850 The light of nanometer, but the embodiment of the present invention not limited to this.Furthermore in the present embodiment, infrared cut of light layer 116 is arranged at colour Between filter layer 114 and visible ray sensed layer 112, but the embodiment of the present invention not limited to this.
As shown in Figure 1, infrared light receiver 120 includes infrared light sensed layer 122, white filter layer 124 and infrared light Penetrate (IR Pass) filter layer 126.White filter layer 124 penetrates filter layer 126 with infrared light and is arranged at infrared light sensed layer To provide infrared light to infrared light sensed layer 122 on 122.Infrared light sensed layer 122 correspondingly produces to receive infrared light Assisted image signal.In the present embodiment, infrared light sensed layer 122 includes an at least light emitting diode to sense infrared light.Hair Optical diode can be Complementary MOS diode.However, the embodiment of the present invention not limited to this.
Infrared light penetrates filter layer 126 to block visible ray.In other words, when light penetrates filter layer through infrared light When 126, infrared light penetrate filter layer 126 can blocking visible light transmission.In the present embodiment, infrared light penetrates filter layer 126 The light for blocking wavelength to be less than 850 nanometers, but the embodiment of the present invention not limited to this.White filter layer 124 is wearing infrared light Cross.In the present embodiment, white filter layer 124 is white photoresist, but the embodiment of the present invention not limited to this.Furthermore in this reality To apply in example, white filter layer 124 is arranged at infrared light and penetrates between filter layer 126 and infrared light sensed layer 122, but the present invention Embodiment not limited to this.
As shown in Figure 1, visible light receiver 110 and infrared light receiver 120 also comprising wafer layer WA, flatness layer PL1, Interlayer SP and microlens layer ML.Wafer layer WA is providing substrate so that infrared cut of light filter layer 116 and white filter layer 124 are formed thereon.In the present embodiment, wafer layer WA is glass wafer, but the embodiment of the present invention not limited to this.
Flatness layer PL1 is formed at infrared cut of light filter layer 116 with making coloured silk on white filter layer 124 to provide flat surfaces Color filtering optical layer 114 penetrates filter layer 126 with infrared light and is arranged on.Flatness layer PL1 also provides good interface to assist colour Filter layer 114 penetrates filter layer 126 with infrared light and is attached on flatness layer PL1.It should be noted that in the present embodiment, it is infrared The thickness of light light cutoff filter layer 116 and the thickness of white filter layer 124 are substantially equal.
Wall SP be located at chromatic filter layer 114 and infrared light penetrate on filter layer 126 with provide flat surfaces make it is micro- Mirror layer ML is arranged on.It should be noted that in the present embodiment, thickness and the infrared light of chromatic filter layer 114 penetrate optical filtering The thickness of layer 126 is substantially equal.Microlens layer ML is assembling infrared light and visible ray.Specifically, Image Sensor is worked as 100 to sense object (such as iris) when, by microlens layer ML come Focused objects.Furthermore can be by varying microlens layer ML Thickness adjust the focusing of Image Sensor 100.
It should be noted that the material of microlens layer ML can be epoxy resin, optical cement, acrylic material (polymethylmethacrylates, PMMAs), plasticized polyurethane glue material (polyurethanes, PUs), silica gel material (polydimethylsiloxane, PDMS) or the light transmissive material of other thermmohardenings or photo-hardening, but the embodiment of the present invention is not It is limited to this.
Compared to traditional Image Sensor, Image Sensor 100 is because white filter layer 124 is arranged at infrared light-receiving In portion 120, reduce the integral thickness that infrared light penetrates filter layer 126, therefore the infrared light that Image Sensor 100 receives has Less loss of light intensity.So there is the infrared light received by Image Sensor 100 preferable luminous intensity to be used with meeting The demand of person.
It should be noted that infrared light penetrates filter layer 126 and the configuration of white filter layer 124 is not limited to the first implementation Example.In some embodiments of the invention, infrared light penetrates the setting location swap of filter layer 126 and white filter layer 124.
Fig. 2 is the profile for illustrating Image Sensor 200 according to the second embodiment of the present invention.As shown in Fig. 2, image Sensor 200 includes visible light receiver 210 and infrared light receiver 220, wherein visible light receiver 210 includes flatness layer PL2, and infrared light receiver 220 penetrates filter layer 226 comprising infrared light.It should be noted that flatness layer PL2 is similar to flatness layer PL1, and infrared light penetrates filter layer 226 and penetrates filter layer 126 similar to infrared light.The structure of Image Sensor 200 is similar to The structure of Image Sensor 100, difference are that flatness layer PL2 is only located in visible light receiver 210.It should be noted that In the present embodiment, the summation of the thickness of chromatic filter layer 114 and the thickness of flatness layer PL2 is substantially equal to infrared light and penetrates The thickness of filter layer 226.Similar to Image Sensor 100, the infrared light received by Image Sensor 200 has preferable light Intensity is to meet the demand of user.
It should be noted that infrared light penetrates filter layer 226 and the configuration of white filter layer 124 is not limited to the second implementation Example.In some embodiments of the invention, infrared light penetrates the setting location swap of filter layer 226 and white filter layer 124.
Fig. 3 is the profile for illustrating Image Sensor 300 according to the third embodiment of the invention.As shown in figure 3, image Sensor 300 includes visible light receiver 110 and infrared light receiver 320, its mid-infrared light receiving division 220 includes alternating with each other The infrared light that ground stacks penetrates filter layer 326,327 and white filter layer 324,325.It should be noted that infrared light penetrates optical filtering Layer 326,327 penetrates filter layer 126 similar to infrared light, and white filter layer 324,325 is similar to white filter layer 124.Shadow As the structure of sensor 300 is similar to the structure of Image Sensor 100, difference is that infrared light penetrates 126 quilt of filter layer Infrared light penetrates filter layer 326 and is substituted with white filter layer 324, and white filter layer 124 penetrates filter layer 327 by infrared light Substituted with white filter layer 325.It should be noted that in the present embodiment, the thickness of chromatic filter layer 114 is substantially equal to Infrared light penetrates the summation of the thickness and the thickness of white filter layer 324 of filter layer 326, and in the present embodiment, infrared light is cut Only the thickness of filter layer 116 is substantially equal to the thickness and the thickness of white filter layer 325 that infrared light penetrates filter layer 327 Summation.Similar to Image Sensor 100, there is the infrared light received by Image Sensor 300 preferable luminous intensity to meet The demand of user.
It should be noted that infrared light penetrates filter layer 326,327 and the configuration of white filter layer 324,325 is not limited to 3rd embodiment.In some embodiments of the invention, infrared light penetrates the setting position of filter layer 326 and white filter layer 324 Put exchange.In some other embodiments of the present invention, infrared light penetrates the setting position of filter layer 327 and white filter layer 325 Put exchange.
Fig. 4 is the profile for illustrating Image Sensor 400 according to the fourth embodiment of the invention.As shown in figure 4, image Sensor 400 includes visible light receiver 210 and infrared light receiver 420, its mid-infrared light receiving division 420 includes white and filters Layer 424.It should be noted that white filter layer 424 is similar to white filter layer 124.The structure of Image Sensor 400 is similar to shadow As the structure of sensor 300, difference is that flatness layer PL2 is only located in visible light receiver 210.It should be noted that In the present embodiment, the summation of the thickness of chromatic filter layer 114 and the thickness of flatness layer PL2 is substantially equal to infrared light and penetrates filter The summation of the thickness of photosphere 326 and the thickness of white filter layer 424.Similar to Image Sensor 300, the institute of Image Sensor 400 There is the infrared light received preferable luminous intensity to meet the demand of user.
It should be noted that infrared light penetrates filter layer 326,327 and the configuration of white filter layer 424,325 is not limited to Fourth embodiment.In some embodiments of the invention, infrared light penetrates the setting position of filter layer 326 and white filter layer 424 Put exchange.In some other embodiments of the present invention, infrared light penetrates the setting position of filter layer 327 and white filter layer 325 Put exchange.
Fig. 5 is the profile for illustrating Image Sensor 500 according to the fifth embodiment of the invention.As shown in figure 5, image Sensor 500 includes visible light receiver 510 and infrared light receiver 520, wherein visible light receiver 510 includes flatness layer PL3, chromatic filter layer 514 and infrared cut of light filter layer 516, and infrared light receiver 520 includes flatness layer PL3, white Filter layer 524 and infrared light penetrate filter layer 526.It should be noted that flatness layer PL3 is similar to flatness layer PL1, colorized optical filtering Layer 514 is similar to chromatic filter layer 114, and infrared cut of light filter layer 516 is similar to infrared cut of light filter layer 116, white filter Photosphere 524 is similar to white filter layer 124, and infrared light penetrates filter layer 526 and penetrates filter layer 126 similar to infrared light.Shadow As the structure of sensor 500 is similar to the structure of Image Sensor 100, difference is chromatic filter layer 514 positioned at infrared Between light light cutoff filter layer 516 and flatness layer PL3.It should be noted that in the present embodiment, the thickness of chromatic filter layer 514 with The thickness of white filter layer 524 is substantially equal, and the thickness of infrared cut of light filter layer 516 penetrates filter layer with infrared light 526 thickness is substantially equal.Similar to Image Sensor 100, the infrared light received by Image Sensor 500 has preferable Luminous intensity to meet the demand of user.
It should be noted that infrared light penetrates filter layer 526 and the configuration of white filter layer 524 is not limited to the 5th implementation Example.In some embodiments of the invention, infrared light penetrates the setting location swap of filter layer 526 and white filter layer 524.
Fig. 6 is the profile for illustrating Image Sensor 600 according to the sixth embodiment of the invention.As shown in fig. 6, image Sensor 600 includes visible light receiver 610 and infrared light receiver 620, wherein visible light receiver 610 includes flatness layer PL4, and infrared light receiver 620 includes white filter layer 624.It should be noted that flatness layer PL4 is similar to flatness layer PL1, in vain Color filtering optical layer 624 is similar to white filter layer 124.The structure of Image Sensor 600 is similar to the structure of Image Sensor 500, Difference is that flatness layer PL4 is only located in visible light receiver 610.It should be noted that in the present embodiment, colorized optical filtering The summation of the thickness of layer 514 and the thickness of flatness layer PL4 is substantially equal to the thickness of white filter layer 624.Similar to image There is preferable luminous intensity to meet the demand of user for sensor 500, the infrared light received by Image Sensor 600.
It should be noted that infrared light penetrates filter layer 526 and the configuration of white filter layer 624 is not limited to the 6th implementation Example.In some embodiments of the invention, infrared light penetrates the setting location swap of filter layer 526 and white filter layer 624.
Fig. 7 is the profile for illustrating Image Sensor 700 according to the seventh embodiment of the invention.As shown in fig. 7, image Sensor 700 includes visible light receiver 510 and infrared light receiver 720, its mid-infrared light receiving division 720 includes alternating with each other The infrared light that ground stacks penetrates filter layer 726,727 and white filter layer 724,725.It should be noted that infrared light penetrates optical filtering Layer 726,727 penetrates filter layer 126 similar to infrared light, and white filter layer 724,725 is similar to white filter layer 124.Shadow As the structure of sensor 700 is similar to the structure of Image Sensor 500, difference is that infrared light penetrates 526 quilt of filter layer Infrared light penetrates filter layer 726 and is substituted with white filter layer 724, and white filter layer 524 penetrates filter layer 727 by infrared light Substituted with white filter layer 725.It should be noted that in the present embodiment, the thickness of chromatic filter layer 514 is substantially equal to Infrared light penetrates the summation of the thickness of filter layer 727 and the thickness of white filter layer 725, and infrared cut of light filter layer 516 Thickness is substantially equal to the summation that infrared light penetrates the thickness and the thickness of white filter layer 724 of filter layer 726.Similar to shadow As sensor 500, there is the infrared light received by Image Sensor 700 preferable luminous intensity to meet the demand of user.
It should be noted that infrared light penetrates filter layer 726,727 and the configuration of white filter layer 724,725 is not limited to 3rd embodiment.In some embodiments of the invention, infrared light penetrates the setting position of filter layer 726 and white filter layer 724 Put exchange.In some other embodiments of the present invention, infrared light penetrates the setting position of filter layer 727 and white filter layer 725 Put exchange.
Fig. 8 is the profile for the Image Sensor 800 for illustrating the 8th embodiment according to the present invention.As shown in figure 8, image Sensor 800 includes visible light receiver 610 and infrared light receiver 820, its mid-infrared light receiving division 820 includes white and filters Layer 825.It should be noted that white filter layer 825 is similar to white filter layer 124.The structure of Image Sensor 800 is similar to shadow As the structure of sensor 700, difference is that flatness layer PL4 is only located in visible light receiver 610.It should be noted that In the present embodiment, the summation of the thickness of chromatic filter layer 514 and the thickness of flatness layer PL4 is substantially equal to infrared light and penetrates filter The summation of the thickness of photosphere 727 and the thickness of white filter layer 825.Similar to Image Sensor 700, the institute of Image Sensor 800 There is the infrared light received preferable luminous intensity to meet the demand of user.
It should be noted that infrared light penetrates filter layer 726,727 and the configuration of white filter layer 724,825 is not limited to 8th embodiment.In some embodiments of the invention, infrared light penetrates the setting position of filter layer 726 and white filter layer 724 Put exchange.In some other embodiments of the present invention, infrared light penetrates the setting position of filter layer 727 and white filter layer 825 Put exchange.
In some embodiments of the invention, the quantity of white filter layer penetrates the quantity of filter layer with infrared light and is all more than 1, and white filter layer and infrared light penetrate filter layer and stack alternating with each otherly in infrared light sensed layer, but the implementation of the present invention Example not limited to this.
It can be seen from the above, the present invention Image Sensor structure can effectively improve it is red received by Image Sensor The luminous intensity of outer light thereby reduces and optical signalling (such as image letter is analyzed subsequently in other instruments to meet the demand of user Number) when degree of difficulty.
Foregoing has outlined the feature of several embodiments, therefore those skilled in the art can know more about the aspect of the disclosure. It will be understood by a person skilled in the art that arriving, it can design or change other processing procedures and knot as basis the disclosure easily Structure, thereby realizes the target identical with these embodiments described herein and/or reaches the advantages of identical.People in the art Member also it should be understood that, these equivalent construction are without departing from the spirit and scope of the disclosure, and they can not depart from this Various changes, replacement and variation are made on the premise of open spirit and scope.

Claims (17)

1. a kind of Image Sensor, comprising:
One visible light receiver, to receive a visible ray;And
One infrared light receiver, to receive an infrared light, wherein the infrared light receiver includes:
One infrared light emitting diodes;
At least one white filter layer, is arranged on the infrared light emitting diodes;And
At least an infrared light penetrates filter layer, is arranged on the infrared light emitting diodes;
Wherein the infrared light through at least one white filter layer and an at least infrared light penetrate filter layer and by the infrared light Light emitting diode is received.
2. Image Sensor as claimed in claim 1, the wherein visible light receiver include:
One visible light emitting diode;
One chromatic filter layer, is arranged on the visible light emitting diode;And
One infrared cut of light filter layer, is arranged on the visible light emitting diode;
Wherein the visible ray is through the chromatic filter layer and the infrared cut of light filter layer and by the visible light emitting diode Received.
3. Image Sensor as claimed in claim 2, can with this positioned at the infrared light emitting diodes also comprising a wafer layer See on light-emitting diode, a Part I of the wherein wafer layer is located in the visible light receiver, and the one of the wafer layer Part II is located in the infrared light receiver.
4. Image Sensor as claimed in claim 3, wherein the infrared cut of light filter layer are located at the chromatic filter layer with being somebody's turn to do Between visible light emitting diode, and the Part I of the wafer layer is located at the infrared cut of light filter layer and is sent out with the visible ray Between optical diode.
5. Image Sensor as claimed in claim 3, the wherein chromatic filter layer are located at the infrared cut of light filter layer with being somebody's turn to do Between visible light emitting diode, and the Part I of the wafer layer is located at the chromatic filter layer and the visible ray light-emitting diodes Between pipe.
6. Image Sensor as claimed in claim 3, the wherein at least one white filter layer are located at this, at least an infrared light is worn Between filter photosphere and the infrared light emitting diodes, and the Part II of the wafer layer is located at least one white filter layer Between the infrared light emitting diodes.
It is located at this 7. Image Sensor as claimed in claim 3, wherein an at least infrared light penetrate filter layer at least one is white Between color filtering optical layer and the infrared light emitting diodes, and the Part II of the wafer layer is located at this at least an infrared light penetrates Between filter layer and the infrared light emitting diodes.
8. Image Sensor as claimed in claim 2, the wherein chromatic filter layer include a red filter unit, a green filter Light unit and a blue filter unit.
9. Image Sensor as claimed in claim 2, also comprising a flatness layer, to provide a flat surfaces, the wherein coloured silk Color filtering optical layer is arranged on the flat surfaces.
Connect 10. Image Sensor as claimed in claim 9, the wherein flatness layer are located at the visible light receiver with the infrared light In receipts portion.
11. Image Sensor as claimed in claim 9, the wherein flatness layer are located in the visible light receiver.
12. Image Sensor as claimed in claim 1, infrared with this to assemble the visible ray also comprising a microlens layer Light.
13. Image Sensor as claimed in claim 12, the wherein microlens layer are located at the superiors of the Image Sensor.
It is infrared with this that 14. Image Sensor as claimed in claim 12, the wherein microlens layer are located at the visible light receiver In light receiver.
15. Image Sensor as claimed in claim 12, also comprising a wall, to provide a flat surfaces, wherein should Microlens layer is arranged on the flat surfaces.
16. Image Sensor as claimed in claim 15, the wherein wall are located at the visible light receiver and the infrared light In receiving division.
17. Image Sensor as claimed in claim 1, the quantity of the wherein at least one white filter layer is more than 1, and this is at least The quantity that one infrared light penetrates filter layer is more than 1, and those white filter layers penetrate filter layer alternately heap with those infrared lights Repeatedly on the infrared light emitting diodes.
CN201610934361.2A 2016-10-25 2016-10-25 Image sensor Active CN107994014B (en)

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CN107994014B CN107994014B (en) 2020-06-30

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Publication number Priority date Publication date Assignee Title
EP0809298A1 (en) * 1993-01-01 1997-11-26 Canon Kabushiki Kaisha Solid-state image pickup device
US20080087800A1 (en) * 2006-10-04 2008-04-17 Sony Corporation Solid-state image capturing device, image capturing device, and manufacturing method of solid-state image capturing device
CN102683363B (en) * 2011-03-16 2015-03-25 株式会社东芝 Solid-state imaging device and camera module
CN105390512A (en) * 2014-08-22 2016-03-09 爱思开海力士有限公司 Image sensor and electronic device having the same
CN105990378A (en) * 2014-10-06 2016-10-05 采钰科技股份有限公司 Image sensors and methods of forming the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0809298A1 (en) * 1993-01-01 1997-11-26 Canon Kabushiki Kaisha Solid-state image pickup device
US20080087800A1 (en) * 2006-10-04 2008-04-17 Sony Corporation Solid-state image capturing device, image capturing device, and manufacturing method of solid-state image capturing device
CN102683363B (en) * 2011-03-16 2015-03-25 株式会社东芝 Solid-state imaging device and camera module
CN105390512A (en) * 2014-08-22 2016-03-09 爱思开海力士有限公司 Image sensor and electronic device having the same
CN105990378A (en) * 2014-10-06 2016-10-05 采钰科技股份有限公司 Image sensors and methods of forming the same

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