CN107976734A - A kind of spectral neutrality filtering apparatus - Google Patents

A kind of spectral neutrality filtering apparatus Download PDF

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Publication number
CN107976734A
CN107976734A CN201711248737.5A CN201711248737A CN107976734A CN 107976734 A CN107976734 A CN 107976734A CN 201711248737 A CN201711248737 A CN 201711248737A CN 107976734 A CN107976734 A CN 107976734A
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China
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filter set
side filter
fixed block
filtering apparatus
angle
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CN201711248737.5A
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CN107976734B (en
Inventor
冯国进
赫英威
林延东
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National Institute of Metrology
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National Institute of Metrology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/205Neutral density filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/006Filter holders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

A kind of spectral neutrality filtering apparatus provided by the invention, including:Left side filter set and right side filter set;The transmission plane of the left side filter set and the angle of horizontal direction are acute angle, and the transmission plane of the right side filter set and the angle of light incident direction horizontal direction are negative angle, and the size of the negative angle is identical with the size of the acute angle;The left side filter set and the right side filter set are stacked gradually by the identical multi-disc high purity quartz optical filter of quantity and formed.Spectral neutrality filtering apparatus provided by the invention can produce specific transmittance to light;And the spectral neutrality filtering apparatus both can be used for the calibration of visible waveband transmittance, it can also be used to which the calibration of ultraviolet band transmittance, expands the calibration range of the spectral neutrality filtering apparatus.

Description

A kind of spectral neutrality filtering apparatus
Technical field
The present invention relates to optical technical field, more particularly, to a kind of spectral neutrality filtering apparatus.
Background technology
Calibration for the spectrometer of existing measurement optical properties of material, especially to being calculated as what is represented with spectrophotometric The calibration of instrument, involves the fields such as health care, foreign trade, and the calibration to pertinent instruments is more stringent.Country specially goes out The platform vertification regulation of this quasi-instrument, for example, JJG 178-2007<Ultraviolet, visible, near infrared spectrometer vertification regulation> In, it is noted that to calibration of such instrument transmission than value, it is necessary to be respectively the light near 10%, 20%, 30% using value The neutral filtering apparatus of spectrum carries out.
At present, the existing transmittance to visible waveband demarcates the spectral neutrality filtering apparatus, it is necessary to using visible waveband To carry out, for example, a kind of optical filter, be spliced by two wedge-shaped optical filters, and the wedge surface of this two wedge-shaped optical filters it is opposite, Film is coated with wedge surface.During calibration, incident light passes sequentially through two surfaces of wedge-shaped optical filter, then incident light reaches the second wedge surface When, incident light is broken down into reflected light and emergent light, and since optical filter is wedge shape, then substantial amounts of reflected light deviates original Optical path direction, avoids and calibration is had an impact.
But since the spectral neutrality filtering apparatus of visible waveband uses glass material, and added not in glass material Absorbent with concentration is made.And these absorbents can not generally pass through ultraviolet light, therefore the transmittance of ultraviolet band is demarcated, Single ultraviolet spectra neutrality filtering apparatus must be used to carry out.Although ultraviolet spectra neutrality filtering apparatus can also pass through visible Light, still, since it is made of coating process, its stability is poor, therefore is impermissible for the transmittance mark for visible waveband It is fixed.
The content of the invention
For above-mentioned technical problem, the present invention provides a kind of spectral neutrality filtering apparatus.
In a first aspect, the present invention provides a kind of spectral neutrality filtering apparatus, including:Left side filter set and right side optical filter Group;The transmission plane of the left side filter set and the angle of horizontal direction are acute angle, the transmission plane of the right side filter set with The angle of horizontal direction is negative angle, and the size of the negative angle is identical with the size of the acute angle;The left side filter set and The right side filter set is stacked gradually by the identical multi-disc high purity quartz optical filter of quantity and formed.
Wherein, the substrate of the high purity quartz optical filter is quartz glass plate, and the thickness of the quartz glass plate is 10um to 50um.
Wherein, the spectral neutrality filtering apparatus, further includes:Fixing bracket, the fixing bracket have around fixation The bottom of the side plate that frame bottom is set, the bottom of the left side filter set and the right side filter set and the fixed branch The bottom contact of frame, and the left side of the lower end of the left side filter set is contacted with the left side of the side plate, the right side The right edge of the lower end of filter set is contacted with the right edge of the side plate.
Wherein, the spectral neutrality filtering apparatus, further includes:The of the fixing bracket top is vertically arranged in successively One fixed block, the second fixed block and the 3rd fixed block;First fixed block and institute are stretched into the upper end of the left side filter set State in the gap between the second fixed block, and the two sides of the upper end of the left side filter set respectively with first fixed block And the second fixed block contact;And second fixed block and the described 3rd is stretched into the upper end of the right side filter set In gap between fixed block, and the two sides of the upper end of the right side filter set respectively with second fixed block and described 3rd fixed block contacts.
Wherein, the spectral neutrality filtering apparatus, further includes:Be horizontally installed on the fixing bracket bottom the 4th is solid Determine block, and the 4th fixed block is horizontally installed on the lower end of the left side filter set and the lower end of the right side filter set Between gap in;And the left side of the 4th fixed block is contacted with the right edge of the left side filter set, the described 4th The right edge of fixed block is contacted with the left side of the right side filter set.
Wherein, the angle of the left side filter set and horizontal direction is 5 ° to 15 °, the right side filter set and level The angle in direction is -5 ° to -15 °.
Wherein, the quantity of the high purity quartz optical filter of the left side filter set and the right side filter set is 8.
Wherein, the quantity of the high purity quartz optical filter of the left side filter set and the right side filter set is 10 Piece.
Wherein, the quantity of the high purity quartz optical filter of the left side filter set and the right side filter set is 15 Piece.
A kind of spectral neutrality filtering apparatus provided by the invention, to be formed by being stacked respectively with multi-disc high purity quartz optical filter Left side filter set and right side filter set so that spectral neutrality filtering apparatus produces specific transmittance to light;And left side High purity quartz optical filter, its transmittance to ultraviolet band, visible waveband and near infrared band are used with right side filter set It is higher and relatively stable so that EO-1 hyperion neutrality filtering apparatus both can be used for the calibration of visible waveband transmittance, it can also be used to The calibration of ultraviolet band transmittance, expands the calibration range of the spectral neutrality filtering apparatus.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are this hairs Some bright embodiments, for those of ordinary skill in the art, without creative efforts, can be with root Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the schematic diagram of spectral neutrality filtering apparatus provided in an embodiment of the present invention;
Fig. 2 be Fig. 1 shown in spectral neutrality filtering apparatus in high purity quartz optical filter transmittance curve;
Fig. 3 is the relation between the transmittance of high purity quartz optical filter and the quantity of high purity quartz optical filter shown in Fig. 1 Curve;
Wherein, 1- incident rays;2- reflection lights;The first fixed blocks of 3-;The second fixed blocks of 4-;The 3rd fixed blocks of 5-;6- 4th fixed block;Filter set on the left of 7-;Filter set on the right side of 8-.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention In attached drawing, the technical solution in the embodiment of the present invention is explicitly described, it is clear that described embodiment be the present invention Part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not having All other embodiments obtained under the premise of creative work are made, belong to the scope of protection of the invention.
Fig. 1 is the schematic diagram of spectral neutrality filtering apparatus provided in an embodiment of the present invention, as shown in Figure 1, the spectral neutrality Filtering apparatus includes:Left side filter set 7 and right side filter set 8;The transmission plane and horizontal direction of the left side filter set 7 Angle be acute angle, the transmission plane of the right side filter set 8 and the angle of horizontal direction are negative angle, and the size of the negative angle It is identical with the size of the acute angle;The left side filter set 7 and the right side filter set 8 are by the identical more bauerites of quantity Optical filter stacks gradually to be formed.
Wherein, quartz plate filter has preferable light transmission in ultraviolet into the whole spectral band of infrared ray, it is seen that Luminous transmittance is more than 93%, and particularly in ultraviolet spectra area, max transmissive ratio is up to more than 80%.
Specifically, can be according to formula when needing to produce specific light transmission ratio to lightWherein, τ is what is needed Transmittance, τ1For the transmittance of the first tablet filter, τ2For the transmittance of the second tablet filter, ρ1For the anti-of the first tablet filter Penetrate ratio, ρ2For the reflectivity of the second tablet filter, the quantity of the high purity quartz optical filter of needs can be calculated;Class when multi-disc is superimposed Push away.Then the quartz plate filter of needs is divided to two groups to stack gradually to form left side filter set 7 and right side filter set 8 i.e. Can.For example, when the transmittance for needing to produce light is 0.7, the quantity that can calculate the quartz plate filter of needs is 4, then 8 each 2 high purity quartz optical filters of left side filter set 7 and right side filter set.
During calibration, for example, incident ray 1 from left side glancing incidence, then incident ray 1 is first radiated at left side filter set 7 Transmission plane on, and the transmission plane due to left side filter set 7 and light incident direction are a certain included angle setting, then reflected light The problem of line 2 is projected to other side, and measurement transmittance values are higher caused by effectively prevent light along backtracking.Due to a left side The transmission plane of side filter set 7 and the angle of light incident direction are acute angle, then incident ray 1 can translate slightly upward, are deviateed Original incoming position.Due to the angle one of the transmission plane and light incident direction of right side filter set 8 and left side filter set 7 Positive one negative equal-sized acute angle, i.e. right side filter set 8 and left side filter set 7 are symmetrical arranged, then light passes through right side After the transmission plane of filter set 8, light can translate oppositely downward, return on initial incident straight.
In embodiments of the present invention, left side filter set and the right side to be formed by being stacked respectively with multi-disc high purity quartz optical filter Side filter set so that spectral neutrality filtering apparatus produces specific transmittance to light;Meanwhile high purity quartz optical filter is to ultraviolet The transmittance of wave band, visible waveband and near infrared band is higher and relatively stablizes so that the spectral neutrality filtering apparatus both can be with Calibration for visible waveband transmittance, it can also be used to which the calibration of ultraviolet band transmittance, expands spectral neutrality optical filtering dress The calibration range put.And right side filter set and left side filter set are obliquely installed, reflected light and transmittance calibration are avoided Influence, improve the accuracy that spectral neutrality filtering apparatus demarcates spectrometer.
On the basis of above-described embodiment, the substrate of the high purity quartz optical filter is quartz glass plate, and the quartz The thickness of sheet glass is 10um to 50um.
Wherein, quartz glass plate is usually water white transparency class, and quartz glass can be divided into melting from big making scope Two major class of quartz glass and synthetic quartz glass.Heat resistance, translucency, electric insulating quality, chemical stability are all excellent in the extreme. The optical property of quartz glass plate has its distinctive feature, it can both pass through extreme ultraviolet region, be all ultraviolet bands most The superior, and can pass through visible light wave range and near infrared band.
Specifically, since quartz glass plate transmittance is extremely stablized, it is respectively provided with ultraviolet light, visible ray and near infrared light High transmittance, i.e., be respectively provided with high transmittance in the light of 250nm-2500nm to wave band;And transmittance is approximately one normal Number 92%;Since quartz glass plate hardly picks up luminous energy, therefore reflectivity is 8%.Using height of the quartz glass plate as substrate The transmittance of pure optical filter is shown in Fig. 2, therefore the substrate by the use of quartz glass plate as high purity quartz optical filter so that quartz plate filter Transmittance can improve the stability and uniformity of quartz plate filter transmittance not with wavelength change.
And the thickness of quartz glass plate is arranged to 10um to 50um, then left side filter set 7 and right side filter set 8 by The quartz glass plate of multi-disc condition of equivalent thickness is stacked and formed, so formed light is produced specific light transmission than filtering apparatus.For example, will The thickness of quartz glass plate is arranged to 50um, 45um, 30um, 10um etc., for example, when the thickness of quartz glass plate is arranged to 30um When, then left side filter set 7 and right side filter set 8 by the identical thickness of quantity be 30um quartz glass plate stack and Into.
In embodiments of the present invention, using substrate of the pure quartz glass piece as quartz plate filter so that in the spectrum Property filtering apparatus transmittance it is high and stablize, and its transmittance improves the stabilization of spectral neutrality filtering apparatus not with wavelength change Property and uniformity, meet the requirement of vertification regulation.
On the basis of the various embodiments described above, the spectral neutrality filtering apparatus, further includes:Fixing bracket, it is described solid Fixed rack has the side plate set around fixing bracket bottom, the bottom of the left side filter set 7 and the right side optical filter The bottom of group 8 is contacted with the support bracket fastened bottom, and the left side of the lower end of the left side filter set 7 and the side plate Left side contact, the right edge of the lower end of the right side filter set 8 contacts with the right edge of the side plate.
Specifically, spectral neutrality filtering apparatus is equipped with fixing bracket, and the bottom of left side filter set 7 and right side are filtered The bottom of piece group 8 is arranged at fixing bracket bottom;And the left side of the lower end of left side filter set 7 and the support bracket fastened side The left side contact of plate, i.e. left side filter set 7 is by being located at the left side of side plate, so that left side filter set 7 can be more steady Solid inclination put;And the right edge of the lower end of right side filter set 8 is contacted with the right edge of the support bracket fastened side plate, i.e. Right side filter set 8 is by being located at the right edge of side plate, so that the inclination that right side filter set 8 can be consolidated relatively is put, so as to carry The stability of the high spectral neutrality filtering apparatus.
On the basis of the various embodiments described above, the spectral neutrality filtering apparatus, further includes:Institute is vertically arranged in successively State first fixed block 3, the second fixed block 4 and the 3rd fixed block 5 on fixing bracket top;The upper end of the left side filter set 7 Stretch into the gap between first fixed block 3 and second fixed block 4, and the upper end of the left side filter set 7 Two sides are contacted with first fixed block 3 and second fixed block 4 respectively;And the upper end of the right side filter set 8 Stretch into the gap between second fixed block 4 and the 3rd fixed block 5, and the upper end of the right side filter set 8 Two sides are contacted with second fixed block 4 and the 3rd fixed block 5 respectively.
Specifically, the first fixed block 3, the second fixed block 4 and the 3rd fixed block 5 are set in support bracket fastened Upper vertical, And the upper end of left side filter set 7 is stretched into the gap between the first fixed block 3 and the second fixed block 4, i.e. the first fixed block 3 and the second gap between fixed block 4, the position of the upper end for the left side filter set 7 being obliquely installed can just be fixed.And When the high purity quartz optical filter quantity of left side filter set 7 when needing to change, also needs to adjust accordingly according to transmittance Gap between first fixed block 3 and the second fixed block 4, is stably fixed to first by the upper end of left side filter set 7 and consolidates Determine between 3 and second fixed block 4 of block.
And stretch into the upper end of right side filter set 8 in the gap between second fixed block 4 and the 3rd fixed block 5, That is, the gap between the second fixed block 4 and the 3rd fixed block 5, just can be by the upper end for the right side filter set 8 being obliquely installed Position fix.And when the high purity quartz optical filter quantity of right side filter set 8 is according to transmittance when needing to change, The gap between the second fixed block 4 and the 3rd fixed block 5 need to be adjusted accordingly, and the upper end of right side filter set 8 is stablized It is fixed between the second fixed block 4 and the 3rd fixed block 5.
In embodiments of the present invention, by the first fixed block, the second fixed block and the 3rd fixed block, by left side filter set Fix, avoided in calibration process with the position of the upper end of right side filter set, left side filter set and right side filter set Optical filter there is a situation where relatively moving, improve the stability of spectral neutrality filtering apparatus, and then improve spectral neutrality The accuracy of filtering apparatus calibration.
On the basis of the various embodiments described above, the spectral neutrality filtering apparatus, further includes:It is horizontally installed on described solid 4th fixed block 6 of fixed rack bottom, and the 4th fixed block 6 be horizontally installed on the lower end of the left side filter set 7 with In gap between the lower end of the right side filter set 8;And the left side of the 4th fixed block 6 and the left side optical filter The right edge contact of group 7, the right edge of the 4th fixed block 6 are contacted with the left side of the right side filter set 8.
Specifically, the 4th fixed block 6 is laterally set in support bracket fastened bottom, and the 4th fixed block 6 is horizontally installed on a left side In gap between the lower end of side filter set 7 and the lower end of right side filter set 8, i.e. pass through the 4th fixed block 6 and fixed branch The mating reaction of the side plate of frame, can just filter the lower end for the left side filter set 7 being obliquely installed and the right side being obliquely installed The lower end of mating plate group 8 is fixed.When left side filter set 7 and the quantity of right side filter set 8, need to change according to transmittance When, it is also desirable to the corresponding length for changing the 4th fixed block 6, so that the left side filter set 7 and right side optical filter that are obliquely installed The lower end of group 8, what can relatively be consolidated is arranged on support bracket fastened bottom.
In embodiments of the present invention, by setting the 4th fixed block in support bracket fastened bottom, by left side filter set Lower end and the lower end of right side filter set be stably fixed on fixing bracket, avoid in calibration process, left side is filtered The optical filter of piece group and right side filter set improves the stability of spectral neutrality filtering apparatus there is a situation where relatively moving, And then improve the accuracy of spectral neutrality filtering apparatus calibration.
In addition, the first fixed block 3, the combination of the second fixed block 4, the 3rd fixed block 5 and the 4th fixed block 6, can be by a left side The relatively stable fixation in the top and bottom of side filter set 7 and right side filter set 8, in calibration process, avoids left side In filter set 7 and right side filter set 8 optical filter there is a situation where relatively moving, further improve spectral neutrality and filter dress The stability put.
On the basis of the various embodiments described above, the angle of the left side filter set 7 and horizontal direction is 5 ° to 15 °, institute It is -5 ° to -15 ° to state right side filter set 8 and the angle of horizontal direction.
Specifically, the angle of left side filter set 7 and horizontal direction is set to 5 ° to 15 °, and by right side filter set 8 Be set to -5 ° to -15 ° with the angle of horizontal direction, for example, by the angle of left side filter set 7 and horizontal direction be arranged to 5 °, 10 °, 15 ° etc., then filter set 8 is corresponding with the angle of horizontal direction is arranged to -5 °, -10 °, -15 ° etc. on right side.So by a left side The angle of inclination of side filter set 7 and right side filter set 8 is limited in an appropriate scope, can be preferably by incidence The reflected light 2 of light 1 reflexes to other angles, effectively prevent reflected light 2 and reflects up to detector repeatedly between optical filter, So that the transmittance of measurement is higher than the situation of theoretical value.
Therefore, the angle of left side filter set 7 and horizontal direction is set as 5 ° to 15 °, right side filter set 8 with it is horizontal The angle in direction is set as -5 ° to -15 °, and spectral neutrality filtering apparatus can be made more accurately to be demarcated to transmittance, improved The accuracy of spectral neutrality filtering apparatus.
On the basis of the various embodiments described above, the high purity quartz of the left side filter set 7 and the right side filter set 8 The quantity of optical filter is 8.The number of the high purity quartz optical filter of the left side filter set 7 and the right side filter set 8 Amount is 10.The quantity of the high purity quartz optical filter of the left side filter set 7 and the right side filter set 8 is 15 Piece.
Specifically, when the transmittance that needs produce light (that is, including ultraviolet band, visible waveband and near infrared band) connects When nearly 30%, according to Fig. 3, it is necessary to high purity quartz optical filter quantity be 16, then at this time by left side filter set 7 and institute The quantity for stating the quartz plate filter of right side filter set 8 is set as 8, and the transmittance of obtained spectral neutrality filtering apparatus is i.e. For 30%.
When the transmittance for needing to produce light (that is, including ultraviolet band, visible waveband and near infrared band) is close to 20% When, according to Fig. 3, it is necessary to high purity quartz optical filter quantity be 20, then at this time by left side filter set 7 and the right side The quantity of the quartz plate filter of filter set 8 is set as 10, and the transmittance of obtained spectral neutrality filtering apparatus is 20%.
When the transmittance for needing to produce light (that is, including ultraviolet band, visible waveband and near infrared band) is close to 10% When, according to Fig. 3, it is necessary to high purity quartz optical filter quantity be 30, then at this time by left side filter set 7 and the right side The quantity of the quartz plate filter of filter set 8 is set as 8, and the transmittance of obtained spectral neutrality filtering apparatus is 10%.
Transmittance is illustrated close to exemplified by 30% spectral neutrality filtering apparatus below, but is not limited to this hair Bright protection domain.16 high purity quartz optical filters are divided into 2 groups (the piece number of optical filter must be even number in principle), wherein 8 composition left side filter sets 7 that are stacked, are placed in support bracket fastened left side, and the upper end of left side filter set 7 is set Between the first fixed block 3 and the second fixed block 4;The lower end of left side filter set 7 is placed in support bracket fastened left hand edge and Between four fixed blocks 6.The other 8 composition right side filter sets 8 that are stacked, and the upper end of right side filter set 8 is placed in Between second fixed block 4 and the 3rd fixed block 5;The lower end of right side filter set 8 is placed in the 4th fixed block 6 and support bracket fastened Between right hand edge.After the completion of placement, the distance of the first fixed block 3 of fine setting, the second fixed block 4 and the 3rd fixed block 5 so that left side Optical filter in filter set 7 and right side filter set 8, untill will not relatively moving.And left side filter set 7 and level The angle in direction is 10 °;Right side filter set 8 and the angle of horizontal direction are -10 °.
Incident ray is from left side glancing incidence, and after left side filter set 7, its reflection light 2 is projected to other side, Effectively prevent light along backtracking cause measurement transmittance values it is higher the problem of.Due to left side filter set 7 and light There are drift angle, incident ray 1 to translate slightly upward for incident direction, deviates original position.Light passes through right side filter set 8 Afterwards, since right side filter set 8 and the symmetry of left side filter set 7, light can translate oppositely downward, initial incidence is returned to On straight line.
Finally it should be noted that:The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations;Although The present invention is described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that:It still may be used To modify to the technical solution described in foregoing embodiments, or equivalent substitution is carried out to which part technical characteristic; And these modification or replace, do not make appropriate technical solution essence depart from various embodiments of the present invention technical solution spirit and Scope.

Claims (9)

  1. A kind of 1. spectral neutrality filtering apparatus, it is characterised in that including:Left side filter set and right side filter set;
    The transmission plane of the left side filter set and the angle of horizontal direction are acute angle, the transmission plane of the right side filter set with The angle of horizontal direction is negative angle, and the size of the negative angle is identical with the size of the acute angle;
    The left side filter set and the right side filter set are stacked gradually by the identical multi-disc high purity quartz optical filter of quantity Formed.
  2. 2. spectral neutrality filtering apparatus according to claim 1, it is characterised in that the substrate of the high purity quartz optical filter For quartz glass plate, and the thickness of the quartz glass plate is 10um to 50um.
  3. 3. spectral neutrality filtering apparatus according to claim 1, it is characterised in that further include:Fixing bracket, the fixation Stent has the side plate set around the edge of fixing bracket bottom,
    The bottom of the left side filter set and the bottom of the right side filter set are contacted with the support bracket fastened bottom, and The left side of the lower end of the left side filter set is contacted with the left side of the side plate, the lower end of the right side filter set Right edge is contacted with the right edge of the side plate.
  4. 4. spectral neutrality filtering apparatus according to claim 3, it is characterised in that further include:Institute is vertically arranged in successively State first fixed block, the second fixed block and the 3rd fixed block on fixing bracket top;
    The upper end of the left side filter set is stretched into the gap between first fixed block and second fixed block, and institute The two sides for stating the upper end of left side filter set are contacted with first fixed block and second fixed block respectively;
    And the gap between second fixed block and the 3rd fixed block is stretched into the upper end of the right side filter set It is interior, and the two sides of the upper end of the right side filter set are contacted with second fixed block and the 3rd fixed block respectively.
  5. 5. spectral neutrality filtering apparatus according to claim 3, it is characterised in that further include:It is horizontally installed on described solid 4th fixed block of fixed rack bottom, and the 4th fixed block be horizontally installed on the lower end of the left side filter set with it is described In gap between the lower end of right side filter set;
    And the left side of the 4th fixed block is contacted with the right edge of the left side filter set, the right side of the 4th fixed block Side is contacted with the left side of the right side filter set.
  6. 6. spectral neutrality filtering apparatus according to claim 1, it is characterised in that the left side filter set and level side To angle be 5 ° to 15 °, the angle of the right side filter set and horizontal direction is -5 ° to -15 °.
  7. 7. spectral neutrality filtering apparatus according to any one of claims 1 to 6, it is characterised in that the left side optical filter The quantity of the high purity quartz optical filter of group and the right side filter set is 8.
  8. 8. spectral neutrality filtering apparatus according to any one of claims 1 to 6, it is characterised in that the left side optical filter The quantity of the high purity quartz optical filter of group and the right side filter set is 10.
  9. 9. spectral neutrality filtering apparatus according to any one of claims 1 to 6, it is characterised in that the left side optical filter The quantity of the high purity quartz optical filter of group and the right side filter set is 15.
CN201711248737.5A 2017-12-01 2017-12-01 spectrum neutral light filtering device Active CN107976734B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142304A (en) * 1986-12-04 1988-06-14 Matsushita Electric Ind Co Ltd Crystal optical filter
JPH06230218A (en) * 1993-01-30 1994-08-19 Nippon Dempa Kogyo Co Ltd Quartz optical filter
CN201285457Y (en) * 2008-11-14 2009-08-05 中国计量科学研究院 An optical filter
CN102384839A (en) * 2010-09-06 2012-03-21 信义超薄玻璃(东莞)有限公司 Device for obtaining optical performance of glass
EP2752696A1 (en) * 2013-01-03 2014-07-09 Tien-Pei Meng Multi-ring optical filter assembly allowing independent adjustment of rotation angle of each filter element thereof
CN206292412U (en) * 2016-12-29 2017-06-30 东莞市蓝盾机电设备科技有限公司 A kind of UV quartz plate filters

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142304A (en) * 1986-12-04 1988-06-14 Matsushita Electric Ind Co Ltd Crystal optical filter
JPH06230218A (en) * 1993-01-30 1994-08-19 Nippon Dempa Kogyo Co Ltd Quartz optical filter
CN201285457Y (en) * 2008-11-14 2009-08-05 中国计量科学研究院 An optical filter
CN102384839A (en) * 2010-09-06 2012-03-21 信义超薄玻璃(东莞)有限公司 Device for obtaining optical performance of glass
EP2752696A1 (en) * 2013-01-03 2014-07-09 Tien-Pei Meng Multi-ring optical filter assembly allowing independent adjustment of rotation angle of each filter element thereof
CN206292412U (en) * 2016-12-29 2017-06-30 东莞市蓝盾机电设备科技有限公司 A kind of UV quartz plate filters

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