CN107976375A - Micro- rotation levelling device that a kind of multiple spot is held out against - Google Patents
Micro- rotation levelling device that a kind of multiple spot is held out against Download PDFInfo
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- CN107976375A CN107976375A CN201711133078.0A CN201711133078A CN107976375A CN 107976375 A CN107976375 A CN 107976375A CN 201711133078 A CN201711133078 A CN 201711133078A CN 107976375 A CN107976375 A CN 107976375A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0076—Hardness, compressibility or resistance to crushing
- G01N2203/0078—Hardness, compressibility or resistance to crushing using indentation
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Abstract
The invention discloses micro- rotation levelling device that a kind of multiple spot is held out against, belong to nano impress mechanical test technical field.The present invention realizes that minute yardstick rotation occurs in the chuck of nano-hardness tester for sample, not only obtain the plane perpendicular to pressing direction, and cause the larger sample of arbitrary surfaces waviness can also vertical pressing direction by the region of micrometric scale, solve the error that the pre- pressing direction out of plumb of tested plane is brought, more to carry out permanent depth cut by Nanoindentation.The present invention is realized by mechanical leveling method, of low cost, small, and be combined with the chuck of nano-hardness tester, save space just with popularization.
Description
Technical field
Micro- rotation levelling device that a kind of multiple spot of the present invention is held out against belongs to a kind of and is used for what micro nanometer mechanics were tested
Clamping device, especially by nano-indentation experiment when, which holds out against sample, makes its test surfaces that small rotating clamping device occur,
Belong to nano impress mechanical test technical field.
Background technology
In nano-indentation experiment, loading-depth curve is obtained by pressure head pressing in sample, this curve embodies material
The information enriched in process of press in.The elasticity modulus and hardness of these information extraction material properties, such as material can be passed through.
The contact area of remaining impression is obtained when conventional hardness is tested by being observed after experiment, to calculate material property, and nano impress
Method be by contact depth conversion into contact area, then one is how accurately to measure this contact the problem of important
Area.The pressure head used for typical Nanoindentation, such as Berkovich pressure heads, spherical indenter and columned pressure head, this
The characteristics of a little pressure heads is that the shape of pressure head is all geometry self similarity.When the vertical specimen surface of tested sample, instrument passes through pressure
Change in depth during entering can directly convert the change of contact area.
In fact, conventional nano indentation test pressing direction is to ignore with error caused by specimen surface out of plumb
's.Although all nano-hardness testers are furnished with grain-clamping table, it acts as fixed tested sample, reduces the shadow that structural compliance is brought
Ring.This kind of grain-clamping table using when need the column sample after grinding and polishing being put into, then hold out against lateral jackscrew, for by machinery plus
This kind of grain-clamping table fixed effect of typical cylindrical sample that work obtains is fine, and tested cylinder sample upper surface is vertical with pressing direction,
Deviation is minimum, the requirement of composite Nano impression test.For the test specimen conventionally used for nano-indentation experiment, it is often necessary to pass through machinery
Polish to obtain column sample.Manually or automatically rub proofness caused by quality of finish and measured material heterogeneity is non-homogeneous
Property, all determine that the test specimen conventionally used for nano-indentation experiment has certain deviation compared with standard specimen, not as being machined
The sample standard arrived.For this non-type cylindric sample, load the unilateral laterally and tightly propped folder that nano-hardness tester provides
After holding platform, the angle of test plane can not be adjusted.This to need to focus on repeatedly when testing plane reconnaissance, influences work effect
Rate.Most of all, when test plane out of plumb pressing direction can bring error.The blessing platform that Conventional nano impression is equipped with is to this
Class error is helpless.For heterogeneous material, since different phase rub proofnesses are different in material, even if in the ideal case,
Grinding and polishing by high quality is also that can not obtain the plane of completely vertical pressing direction.
Simplification of the nano impress method as complexity abrasion, it can be estimated that the binding ability of film and base material, test interface knot
Close intensity and friction coefficient.It can be used for mechanical property of the fibre reinforced composites under various temperature conditionss and cut-in characteristic
Between relation, analysis viscoplasticity to be included in resistance influence.With developing rapidly for Compound Material Engineering, people are increasingly closed
Its surface of the heart and inside it is microcosmic so that receive see mechanical property.Nano impress can be tested as a kind of experimental method in situ
For judging interface phase morphology, during yet with the linearly increasing load mode of maneuvering load and the constant load mode of load, pressure head
Tested sample depth non-constant value is included in, out of phase load is streaked and is unable to quantitative comparison, so being included in by feedback control constant
The method of depth, carrys out quantitative study load change, and then the zone of influence of substrate effect and border effect, i.e. interface are judged by it
Phase, then carry out indentation test, it is possible to obtain out of phase test result.The blindness of indentation test is avoided, improves reality
The confidence level of result is tested, the composite material each component performance that no border effect influences can be obtained.Realizing this key problem in technology is
How tested region is adjusted so that the vertical pressing direction of typical tested region.Bone-calcified bone sample is canonical biometric composite wood
Material, since its water content is big and the material property of composite construction, surface angle is extremely complex.In an experiment around sample
Moisture retention liquid small change is had due to its ion concentration of volatilizing, this makes its ion exchange between sample be to carry out always
, this ion exchange can cause the sample different tissues phase water content after grinding and polishing to change so that measured surface can occur
Regionality is uncertain to be increased or reduces, and also allows for tested sample and often occurs different planes in zonule.Such as
Fruit needs to carry out the impression or cut perpendicular to specimen surface in these planes, and one can adjust small region plane inclination angle
Method be essential.
It is as follows that conventional leveling technology is used for nano-indentation experiment main problem：
1st, specimen shape changes after conventional damascene process grinding and polishing, can not both ensure that tested sample has higher stiffness,
It is plastically deformed after holding out against, can not quickly obtains the plane of high quality.
2nd, in conventional nano impression test, usually ignore the influence that specimen surface inclination angle is brought, directly pass through compression distance
Convert geometry self similarity pressure head contact area so that the elasticity modulus of measurement is less than normal.
What the 3rd, conventional single point contacted holds out against mode, can not hold out against the non-type cylindrical sample of shape so that sample exists
Larger rotation occurs in the chuck of nano-hardness tester, the surface angle of generation significantly increases measurement error.
4th, conventional nano mark test method can not ensure the vertical pressing direction of tested representative region, sample and pressure in high precision
The relative altitude of head can change, and can not realize permanent depth cut.
5th, it can not be realized the leveling of typical minute yardstick region conventionally by the rotation of simple and mechanical control, it is vertically pressed into
Direction.
6th, after conventional top clamping method contacts sample without considering jackscrew, continue to hold out against caused minor rotation, can not realize micro-
Zonule leveling.
7th, conventional leveling platform, expensive and volume is larger, is unsuitable for being placed in nano-hardness tester small space and carrying out
Leveling.
The content of the invention
Micro- rotation levelling device that a kind of multiple spot of the present invention is held out against is compressed that sample cup for liquid occurs and its small by jackscrew
Malformation, realizes that minute yardstick rotation occurs in the chuck of nano-hardness tester for sample, not only obtains perpendicular to pressing direction
Plane, and cause the larger sample of arbitrary surfaces waviness by the region of micrometric scale can also vertical pressing direction, solve
The error that tested plane pre- pressing direction out of plumb is brought, more so that carrying out perseverance depth cut by Nanoindentation becomes
May.The present invention is realized by mechanical leveling method, of low cost, small, and is combined with the chuck of nano-hardness tester, is saved
Save space just with popularization.
The key of the present invention is embedded in the sample cup for liquid of rust free, wear resistance in by tested sample, so that tested sample after grinding and polishing
Upper surface, with height, both ensure that tested sample had higher stiffness, do not occurred during holding out against afterwards big with sample cup for liquid top edge
Deformation, can also quickly obtain the plane of high quality；After A, B is adjusted with height, when finely tuning C, D, due to AB directions and CD directions
Vertically, A, B will not genetic method phase the mutual changing of the relative positions, and C, D can be using three, AB directions jackscrews as axis, in vertical A, B midpoint plane
On do micro- rotation, until C, D are with high, that is, A, B, C, D are the same as high.
The technical solution adopted in the present invention is：Micro- rotation levelling device that a kind of multiple spot is held out against, stage body (1) are leveling platform
Agent structure, first accommodating hole (2) are provided with the central upper portion of stage body (1)；Observation window is provided with the center of cover board (10)
(11)；The four corners of stage body (1) are provided with connecting hole (3,4,5,6), the four corners of cover board (10) be provided with connecting hole (12,13,14,
15), the connecting hole (3,4,5,6) of stage body (1) is bolted with the connecting hole (12,13,14,15) of cover board (10).First
Accommodating hole (2) bottom is provided with first through hole (7), and (10) four side point midway of cover board is provided with the second through hole (16), third through-hole
(17), fourth hole (18), fifth hole (19), are evenly equipped with screw thread in through hole, screw thread is engaged with jackscrew.Sample cup for liquid (8) is put
Put in accommodating hole (2), sample cup for liquid (8) and first accommodating hole (2) are contour, and the overall diameter of sample cup for liquid (8) is less than the first accommodating hole
(2) interior diameter, the central upper portion of sample cup for liquid (8) are provided with second accommodating hole (9).
The material of sample cup for liquid (8) is abrasion-proof stainless steel.
The overall diameter of sample cup for liquid (8) is less than the first accommodating 1 to 2 millimeter of hole interior diameter.
1 to 2 millimeter of cover sheet thickness.
The method that micro- rotation levelling device that a kind of multiple spot is held out against is tested, comprises the following steps that：First will be tested
Sample is embedded in second accommodating hole (9), by grinding, polishing so that tested sample upper surface same sample cup for liquid (8) top edge is same
One plane.Sample cup for liquid (8) is fitted into first accommodating hole (2), connecting hole (3-6) and lid on stage body (1) is bolted
Connecting hole (12-15) on plate (10), jackscrew in through hole (7) is held out against with screwdriver, then holds out against jackscrew in through hole (16-19).Will
Stage body (1) is put into the chuck of nano-hardness tester, passes through micro- sem observation minute yardstick square region to be measured.Focus on respectively to be measured
Zone level left and right sides central point A and B, when A is higher than B, the jackscrew of fourth hole (18) is held out against until A and B are same with screwdriver
It is high；When B is higher than A, the jackscrew of fifth hole (19) is held out against until A and B is the same as high with screwdriver.Focus on respectively above and below region to be measured
Side central point C and D, when observing that C is higher than D, jackscrew is held out against in the second through hole (16) until C and D is the same as high with screwdriver；Work as sight
When observing C and being less than D, jackscrew is held out against in third through-hole (17) until C and D is the same as high with screwdriver.
Minute yardstick square a length of 100 microns to 500 microns of regional edge to be measured.
The present invention can solve the problems, such as to bring when conventional method tests calcified bone mechanical property, conventional damascene process grinding and polishing
Specimen shape changes afterwards, can not both ensure that tested sample has higher stiffness, is plastically deformed after holding out against, can not be fast
Speed obtains the plane of high quality；
In conventional nano impression test, usually ignore the influence that specimen surface inclination angle is brought, directly changed by compression distance
Calculate geometry self similarity pressure head contact area so that the elasticity modulus of measurement is less than normal；
Conventional single point contact holds out against mode, can not hold out against the non-type cylindrical sample of shape so that sample is being received
Larger rotation occurs in the chuck of rice impression instrument, the surface angle of generation significantly increases measurement error；Conventional nano impression
Test method can not ensure the tested vertical pressing direction of representative region in high precision, and the relative altitude of sample and pressure head can become
Change, can not realize permanent depth cut；It can not be realized the leveling of typical minute yardstick region conventionally by the rotation of simple and mechanical control,
Make its vertical pressing direction；Conventional leveling platform, expensive and volume is larger, is unsuitable for being placed in nano-hardness tester small space
And carry out leveling.
The present invention occurs to deflect it is possible to prevente effectively from clamping off-standard size sample using the objective table of nano-hardness tester,
The uniform sample test surfaces perpendicular to pressing direction can be not only obtained, the non-homogeneous examination perpendicular to pressing direction can also be obtained
Sample minute yardstick test surfaces.The error caused by test surfaces and pressing direction out of plumb is reduced, is that permanent depth nano impress is matched somebody with somebody
Cover clamping device.The present invention is realized by mechanical leveling method, of low cost, small, and with the chuck phase of nano-hardness tester
Coordinate, save space just with popularization.
Brief description of the drawings
The structure diagram for micro- rotation levelling device that a kind of multiple spots of Fig. 1 are held out against.
The structure diagram of Fig. 2 sample cup for liquid.
The structure diagram of Fig. 3 cover boards.
The structure diagram of Fig. 4 jackscrews.
The structure diagram of Fig. 5 bolts.
Fig. 6 representative region leveling schematic diagrames.
In figure：1st, stage body, the 2, first accommodating hole, the 3, first connecting hole, the 4, second connecting hole, the 5, the 3rd connecting hole, 6, the
Four connecting holes, 7, first through hole, 8, cup body, the 9, second accommodating hole, 10, cover board, 11, observation window, the 12, the 5th connecting hole, 13, the
Six connecting holes, the 14, the 7th connecting hole, the 15, the 8th connecting hole, the 16, second through hole, 17, third through-hole, 18, fourth hole, 19,
Fifth hole.
Embodiment
The method that micro- rotation levelling device that a kind of multiple spot of the present invention is held out against is tested, comprises the following steps that：First will
Tested sample is embedded in second accommodating hole (9), by grinding, polishing so that tested sample upper surface same sample cup for liquid (8) top
Edge is in same plane.Sample cup for liquid (8) is fitted into first accommodating hole (2), the connecting hole (3- on stage body (1) is bolted
6) with the connecting hole (12-15) on cover board (10), jackscrew in through hole (7) is held out against with screwdriver, then holds out against top in through hole (16-19)
Silk.Stage body (1) is put into the chuck of nano-hardness tester, passes through micro- sem observation minute yardstick square region to be measured.Gather respectively
Burnt zone level left and right sides central point A and B to be measured, when A is higher than B, the jackscrew of fourth hole (18) is held out against until A with screwdriver
With B with high；When B is higher than A, the jackscrew of fifth hole (19) is held out against until A and B is the same as high with screwdriver.Area to be measured is focused on respectively
Domain upper and lower sides central point C and D, when observing that C is higher than D, jackscrew is held out against in the second through hole (16) until C and D are same with screwdriver
It is high；When observing that C is less than D, jackscrew is held out against in third through-hole (17) until C and D is the same as high with screwdriver.
1 leveling Ni of example3Al representative regions, reduce error caused by tested area's out of plumb pressing direction
The Ni that will have been welded first3Al materials are embedded in sample cup for liquid, ensure tested typical case Ni3Al regions upward, and are higher than
1 millimeter of sample cup for liquid edge.By grinding, polishing so that tested sample upper surface is with sample cup for liquid top edge in same plane.Will examination
Sample cup enters accommodating hole, and the connecting hole on the connecting hole and cover board on stage body is bolted, and through hole (7) is held out against with screwdriver
Middle jackscrew, then hold out against jackscrew in through hole (16-19).Stage body is put into the chuck of nano-hardness tester, passes through micro- sem observation 100
Micron × 100 microns of regions to be measured.Region left and right sides central point A and B to be measured are focused on respectively, when A is higher than B, with screwdriver top
Tight through hole jackscrew is same high until A and B, and when A is less than B, through hole jackscrew is held out against until A and B is the same as high with screwdriver.Focus on and treat respectively
Region upper and lower sides central point C and D are surveyed, when observing that C be higher than D, jackscrew is held out against in through hole until C and D is the same as height with screwdriver；When
It was observed that when C is less than D, jackscrew is held out against in through hole until C and D is the same as high with screwdriver.Regional center position to be measured is positioned, is measured
Ni3Al modular ratio documents are high by 10%, illustrate since measured material out of plumb pressing direction is really so that measure elasticity modulus
It is less than normal.
2 leveling articular cartilage representative region of example, complies with permanent depth cut requirement
Articular cartilage is embedded in accommodating hole first, ensures the recombination region court for including bone-calcified bone-articular cartilage
On, and it is higher than 2 millimeters of sample cup for liquid edge.By grinding, polishing so that test surfaces are with sample cup for liquid top edge in same plane.Will
Sample cup for liquid loads accommodating hole, and the connecting hole on the connecting hole and cover board on stage body is bolted, through hole is held out against with screwdriver
(7) jackscrew in, then hold out against jackscrew in through hole (16-19).Stage body is put into the chuck of nano-hardness tester, passes through micro- sem observation
200 microns × 200 microns regions to be measured.Region left and right sides central point A and B to be measured are focused on respectively, when A is higher than B, use screwdriver
Through hole jackscrew is held out against until the same height of AB, when A is less than B, through hole jackscrew is held out against until AB is the same as high with screwdriver.Focus on respectively to be measured
Region upper and lower sides central point C and D, when observing that C is higher than D, jackscrew is held out against in through hole until CD is the same as high with screwdriver；Work as observation
When being less than D to C, jackscrew is held out against in through hole until CD is the same as high with screwdriver.It is series of parallel to position left margin progress in region to be measured
Permanent depth cut, observation measures result stabilization, and no jump point and breakpoint, illustrates that the invention is suitable for Nanoindentation perseverance depth stroke
Leveling before trace.
Claims (6)
- A kind of 1. micro- rotation levelling device that multiple spot is held out against, it is characterised in that：Stage body (1) be leveling platform agent structure, stage body (1) first accommodating hole (2) are provided with central upper portion；Observation window (11) is provided with the center of cover board (10)；The corner of stage body (1) Place is provided with connecting hole (3,4,5,6), and the four corners of cover board (10) are provided with connecting hole (12,13,14,15), the connecting hole of stage body (1) (3,4,5,6) and the connecting hole (12,13,14,15) of cover board (10) are bolted；First accommodating hole (2) bottom is provided with the One through hole (7), (10) four side point midway of cover board are provided with the second through hole (16), third through-hole (17), fourth hole (18), the 5th Through hole (19), is evenly equipped with screw thread in through hole, screw thread is engaged with jackscrew；Sample cup for liquid (8) is placed in accommodating hole (2), sample cup for liquid (8) contour with first accommodating hole (2), the overall diameter of sample cup for liquid (8) is less than the interior diameter of first accommodating hole (2), sample cup for liquid (8) Central upper portion is provided with second accommodating hole (9).
- 2. micro- rotation levelling device that a kind of multiple spot according to claim 1 is held out against, it is characterised in that：Sample cup for liquid (8) Material is abrasion-proof stainless steel.
- 3. micro- rotation levelling device that a kind of multiple spot according to claim 1 is held out against, it is characterised in that：Sample cup for liquid (8) Overall diameter is less than the first accommodating 1 to 2 millimeter of hole interior diameter.
- 4. micro- rotation levelling device that a kind of multiple spot according to claim 1 is held out against, it is characterised in that：Cover sheet thickness 1 to 2 Millimeter.
- 5. micro- rotation levelling device that a kind of multiple spot according to claim 1 is held out against, it is characterised in that：The experiment of the device Method comprises the following steps that, tested sample is embedded in second accommodating hole (9) first, by grinding, polishing so that tested Sample upper surface same sample cup for liquid (8) top edge is in same plane；Sample cup for liquid (8) is fitted into first accommodating hole (2), is connected by bolt The connecting hole (3-6) on stage body (1) and the connecting hole (12-15) on cover board (10) are connect, top in through hole (7) is held out against with screwdriver Silk, then hold out against jackscrew in through hole (16-19)；Stage body (1) is put into the chuck of nano-hardness tester, passes through the micro- ruler of micro- sem observation Degree square region to be measured；Zone level left and right sides central point A and B to be measured are focused on respectively, when A is higher than B, are held out against with screwdriver The jackscrew of fourth hole (18) is until A and B is the same as high；When B is higher than A, the jackscrew of fifth hole (19) is held out against until A with screwdriver With B with high；Region upper and lower sides central point C and D to be measured are focused on respectively, and when observing that C is higher than D, it is logical to hold out against second with screwdriver Jackscrew is until C and D is the same as high in hole (16)；When observing that C is less than D, jackscrew is held out against in third through-hole (17) until C with screwdriver With D with high.
- 6. micro- rotation levelling device that a kind of multiple spot according to claim 5 is held out against, it is characterised in that：Minute yardstick square A length of 100 microns to 500 microns of regional edge to be measured.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711133078.0A CN107976375A (en) | 2017-11-15 | 2017-11-15 | Micro- rotation levelling device that a kind of multiple spot is held out against |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711133078.0A CN107976375A (en) | 2017-11-15 | 2017-11-15 | Micro- rotation levelling device that a kind of multiple spot is held out against |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110455657A (en) * | 2019-08-28 | 2019-11-15 | 北京工业大学 | A kind of hydrogel nano impress region fine regulating device |
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Application publication date: 20180501 |