CN108534970A - High-precision line slideway auxiliary Static stiffness comprehensive measurement device and method - Google Patents

Abstract

The invention discloses a measuring device and method capable of measuring the vertical, pitch, inclination and yaw static stiffness of a linear guide rail pair with high efficiency and high precision. On the fixed seat, the displacement sensor group used to measure the deformation of the guide rail pair is installed on the sliding block; the pressure sensor is connected to the pressing block; the loading device drives the pressing block down, and applies line loads F ₁ and F to the sliding block through the cylinder respectively. ₂ ; The measurement method of the present invention decomposes the loads _F1 and _F2 into equivalent loads in four directions, and the deformation measured by the displacement sensor group is also converted into equivalent deformations in four directions. The present invention greatly improves the accuracy and reliability of the measurement results while ensuring high-efficiency measurement of the static stiffness of the rolling linear guide rail pair, and is of great significance to the evaluation of the comprehensive static stiffness of the guide rail pair.

Description

Device and method for comprehensive measurement of static stiffness of high-precision linear guide rail pair

technical field

The invention belongs to the field of rolling linear guide rail pair testing, in particular to a high-precision linear guide rail pair static stiffness comprehensive measuring device and method.

Background technique

With the vigorous development of modern manufacturing technology, the manufacturing industry has put forward higher requirements for CNC machine tools that play an important role, especially in three aspects: positioning accuracy, guiding accuracy, and machining accuracy. Rolling linear guides are widely used in CNC machine tools due to their advantages such as small frictional resistance, good motion characteristics, long life, good carrying capacity, and good economy. However, for a long time, foreign products have firmly occupied the domestic market of medium and high-end rolling linear guides, and the root cause of this situation is the lack of key basic technology research and the lack of advanced testing instruments and product performance testing equipment in the domestic rolling functional parts industry. .

Chinese Invention Patent Publication No. CN105973550A, titled as a comprehensive measuring device and method for five kinds of static stiffness of a linear guide rail pair, the patent introduces a device and method for simultaneously measuring five kinds of static stiffness of a guide rail pair through only one set of test tooling. The loading method of the method belongs to point loading, the distribution of loading force is uneven, and the interference and coupling relationship between the deformation in each direction is not considered. The experimental results are quite different from the theoretical results, and the experimental results need to be further improved. Chinese Invention Patent Publication No. CN103017992A, named as linear guide rail pair static stiffness measurement device and method, the test device requires multiple sets of fixture components, when measuring the linear guide rail pair static stiffness, it is necessary to frequently replace the fixture and change the clamping method, the experiment is cumbersome and the efficiency is low . Chinese Invention Patent Publication No. CN104075886A, named as the method and device for testing the static stiffness of the joint of the modular linear guide rail pair, this method needs to constantly change the direction of the loading device, resulting in a more complicated structural design of the loading test bench, longer test time and low efficiency .

All in all, with regard to the measurement of the static stiffness of the rolling linear guide pair, the devices and methods designed by some scholars currently have certain deficiencies. There is no set of measuring devices and methods with high reliability, high efficiency and simple operation, which seriously hinders the rolling linear guide. The evaluation efficiency of static stiffness of guide rail pair and the development of high rigidity design.

Contents of the invention

The technical problem solved by the present invention is to provide a high-precision linear guide rail pair static stiffness comprehensive measurement device and method to solve the problems of low efficiency of static stiffness measurement and evaluation of linear guide rail pairs and inaccurate measurement results.

The technical solution that realizes the object of the present invention is:

A comprehensive measurement device for the static stiffness of a high-precision linear guide rail pair, including a table top, a fixed seat fixed on the upper end of the table top, a reference plate, a pressure block, a pressurizing device, a cylinder, a sliding block, and a displacement sensor group fixed thereon ;

The upper end surface of the fixed seat is a slope for fixing the guide rail; and the sliding direction of the guide rail is perpendicular to the hypotenuse of the longitudinal section of the fixed seat; the reference plate is vertically fixed on the inclined surface of the upper end of the fixed seat; connected; the slider and the guide rail constitute a linear guide rail pair; the upper end surface of the slider is an inclined plane, and the inclined plane is flush with the horizontal plane; the displacement sensor group includes four first displacement sensor groups and two second displacement sensor groups; The test direction of the four first displacement sensor groups is perpendicular to the upper end surface of the fixed seat, and is in contact with the upper end surface of the fixed seat, and is used to measure the vertical deformation, inclination angle deformation and pitch angle deformation of the guide rail pair; the four first displacements The sensor group rails are symmetrically arranged on the left and right sides of the guide rail; the two second displacement sensors are perpendicular to the reference plate and are in contact with the reference plate, and are used to measure the deflection angle deformation of the guide rail pair; the two first displacement sensors on the same side The test point connection line of the displacement sensor group and the test point connection line of the two second displacement sensor groups are all parallel to the sliding direction of the guide rail; the sliding block is provided with a first V-shaped groove and a second V-shaped groove perpendicular to each other The length direction of the first V-shaped groove is parallel to the sliding direction of the guide rail, and the line connecting the centerline of the first V-shaped groove and the centerline of the guide rail is perpendicular to the upper end surface of the slider; the cylinder is arranged on the first V-shaped groove or In the second V-shaped groove; the pressurizing device is arranged on the upper end of the sliding block to pressurize the sliding block. The pressurizing device realizes line contact with the cylinder and obtains the pressure of the pressurizing process in real time.

A method for comprehensively measuring the static stiffness of a high-precision linear guide rail pair, comprising the following steps:

Step 1. Test the vertical static stiffness and inclined static stiffness of the guide rail pair:

Step 1.1. Put the cylinder on the first V-shaped groove, move the slider so that the side end of the slider fits the inner side of the first guide plate, so that the center of the slider is located at the pressure center;

Step 1.2, first load and then unload the cylinder, and collect the data on the force sensor and displacement sensor group in real time until the unloading is zero;

Step 1.3, take the geometric center of the guide rail as the coordinate origin, and establish a reference coordinate system. The X-axis is perpendicular to the reference plane of the reference plate, the Y-axis is along the longitudinal direction of the guide rail, and the Z-axis is perpendicular to the upper surface of the slider. The loading force _F1 collected by the force sensor is decomposed into the axial force F parallel to the Z-axis in the XZ plane. _1Z and the axial force F _1X parallel to the X axis, since the distance between the longitudinal centerline of the first V-shaped groove on the sliding block and the longitudinal centerline of the guide rail pair is T, a tilting moment M _B is formed, and the axial force F _1Z is the vertical loading force acting on the sliding block, as shown in formula (1); the deformation of the guide rail pair measured by the four first displacement sensor groups is decomposed into vertical and inclination according to formula (2) and formula (3). The amount of deformation in the direction;

Vertical deformation amount:

Tilt deformation angle:

Among them, the four first displacement sensor groups are arranged in the order of a, b, c, and d rectangles, in which a, b are located higher than c, d; △S ₁ , △S ₂ , △S ₃ , △S ₄ ΔS ₅ and ΔS ₆ are the deformation measured by the two second displacement sensors respectively; D is the position a and d Or the center distance between the first displacement sensor groups at positions b and c; θ is the angle between the upper surface of the fixed seat and the horizontal plane;

Step 2. Test the static stiffness of the guide rail pair pitch and yaw:

Step 2.1. Put the cylinder on the second V-shaped groove, move the slider so that the side end of the slider fits the inner side of the second guide plate, and ensure that the center of the cylinder is at the pressure center;

Step 2.2, first load and then unload the cylinder, and collect the data on the force sensor, the first displacement sensor group and the second displacement sensor in real time during the process, until the unloading is zero;

Step 2.3: Decompose the loading force F ₂ collected by the force sensor into the axial force F 2Z parallel to the Z axis and the axial force F _2X parallel to the X _axis in the longitudinal symmetry plane of the second V-shaped groove. The vertical distance from the geometric center point on the upper surface of the block to the longitudinal centerline of the second V-shaped groove is H, thus forming the pitching moment M _A and the yaw moment M _C , as shown in formula (4); the first displacement sensor group and the second The deformation of the guide rail pair measured by the two displacement sensors is decomposed into the deformation in the pitch and yaw directions according to formula (5) and formula (6);

Pitch deformation angle:

Yaw deformation angle:

Wherein, L is the center-to-center distance between two second displacement sensors; K is the center-to-center distance between the first displacement sensor group of a, b position or c, d position;

Step 4. Take the load as the abscissa and the deformation as the ordinate, respectively draw the decomposed equivalent load and the deformation data in the corresponding direction in the coordinate diagram, and obtain the vertical, inclination, pitch and yaw of the guide rail pair respectively For the static stiffness curve, the reciprocal of the slope of each curve is the value of each static stiffness of the guide rail pair.

Compared with the prior art, the present invention has significant advantages:

(1) The test device of the present invention is provided with a first V-shaped groove and a second V-shaped groove at the upper end of the sliding block, and each load is equivalently decomposed to a direction in which each deformation does not interfere with each other, and the structural design and method are realized. The vertical, tilt, pitch, and yaw static stiffness measurements are completely independent, which avoids the coupling and interference between the deformations in each direction when a set of tooling measures multiple static stiffnesses of the guide rail pair, and improves the rolling linear guide rail pair. Reliability of static stiffness measurements.

(2) By adding positioning references on the fixed seat, sliding block and pressure plate, it is possible to prevent the guide rail pair from slipping during the experiment, to ensure that the center of the measurement point of the displacement sensor group coincides with the center of the slider, and that the force center of the pressure plate and the stressed cylinder The coincidence of centers solves the problem of the influence of positioning factors on the experimental results.

(3) By symmetrically arranging four first displacement sensors perpendicular to the upper end surface of the fixed seat, and symmetrically arranging two second sensors perpendicular to the reference plate, the measurement of deformation can be used to homogenize the error and improve the measurement of deformation result.

(4) The line loading method is adopted to make the load distribution uniform, avoid the phenomenon of unbalanced load caused by point loading, and reduce the influence of the uneven distribution of loading force on the experimental results.

(5) While improving the measurement accuracy and accuracy of the vertical, inclination, pitch, and yaw static stiffness of the rolling linear guide pair, it also ensures the efficiency of the experiment. The four static stiffnesses of the vertical, inclination, pitch, and yaw can pass this test device And the test method is measured at one time.

The present invention will be described in further detail below in conjunction with the accompanying drawings.

Description of drawings

FIG. 1 is a schematic front view of the testing device of the present invention.

Fig. 2 is a perspective view of the testing device of the present invention.

Figure 3 is a schematic diagram of the connection between the sliding block and the fixing seat.

Figure 4(a-c) are schematic diagrams of the front view, left view and top view of the slider, respectively.

Fig. 5 is a schematic diagram of the structure of the V-shaped groove on the sliding block.

Fig. 6 is a schematic diagram of the cross-sectional shape of the V-shaped groove.

Fig. 7 is a schematic diagram of the positioning of the first guide plate when the cylinder is on the first V-shaped groove.

Fig. 8 is a schematic diagram of the positioning of the second guide plate when the cylinder is on the second V-shaped groove.

Fig. 9 is a schematic flow chart of the testing method of the present invention.

Fig. 10 is a schematic diagram of the load acting on the cylinder on the first V-shaped groove.

Fig. 11 is an equivalent exploded schematic diagram of the load acting on the cylinder on the first V-shaped groove.

Fig. 12 is a schematic diagram of the load acting on the cylinder on the second V-shaped groove.

Fig. 13 is an equivalent exploded schematic diagram of the load acting on the cylinder on the first V-shaped groove.

Detailed ways

In order to illustrate the technical scheme and technical purpose of the present invention, the present invention will be further introduced below in conjunction with the accompanying drawings and specific embodiments.

In combination with Fig. 1-Fig. 8, a high-precision linear guide rail auxiliary static stiffness comprehensive measuring device of the present invention includes a table top 1, a fixing seat 2 fixed on the upper end of the table top, a reference plate 3, a pressurizing device, and a displacement sensor fixture 9 , sliding block 8 and displacement sensor group 10, cylinder 13 fixed on sliding block 8;

The upper end surface of the fixed seat 2 is a slope for fixing the guide rail 12; and the sliding direction of the guide rail 12 is perpendicular to the hypotenuse 21 of the longitudinal section of the fixed seat 2; the reference plate 3 is vertically fixed on the inclined surface of the upper end of the fixed seat 2; The lower end of the sliding block 8 is fixedly connected with the sliding block 11; the sliding block 11 and the guide rail 12 form a linear guide rail pair; the upper end surface of the sliding block 8 is a slope, and the slope is flush with the horizontal plane; the displacement sensor group 10 includes four first Displacement sensor group 101, two second displacement sensor groups 102; The test direction of the four first displacement sensor groups 101 is perpendicular to the upper end surface of the fixed seat 2, and is in contact with the upper end surface of the fixed seat 2, and is used to measure the verticality of the guide rail pair. Deformation, inclination angle deformation and pitch angle deformation; four first displacement sensor groups 101 are symmetrically arranged on the upper and lower sides of the guide rail 12; two second displacement sensors 102 are perpendicular to the reference plate 3, and are aligned with the reference plate 3 contacts, used to measure the yaw angle deformation of the guide rail pair; the test point connection line of the two first displacement sensor groups 101 and the test point connection line of the two second displacement sensor groups 102 on the same side are all parallel to the guide rail 12 The sliding direction; the sliding block 8 is provided with a first V-shaped groove 81 and a second V-shaped groove 82 perpendicular to each other; the length direction of the first V-shaped groove 81 is parallel to the sliding direction of the guide rail 12, and the first V The connecting line between the centerline of the groove 81 and the centerline of the guide rail 12 is perpendicular to the upper end surface of the slider 13; the cylinder 13 is arranged in the first V-shaped groove 81 or the second V-shaped groove 82; The upper end of the sliding block 8 pressurizes the sliding block 8, and the pressurizing device realizes line contact with the cylinder 13, and obtains the pressure of the pressurizing process in real time.

As an embodiment, the pressurizing device includes a briquetting block 4, a pressure sensor 7, a connecting piece 6, and a loading device 5; the pressure sensor 7 is fixed on the lower end of the loading device 5 through the connecting piece 6, and the briquetting block 4 and The lower end of the pressure sensor 7 is connected; the loading device 5 pressurizes the cylinder 13 on the sliding block 8 through the pressing block 4 .

Further, the loading device 5 is an electric cylinder, a hydraulic cylinder or a ball screw driven by a servo motor.

In other embodiments, the pressurizing device is a numerically controlled machine tool.

Preferably, the angle between the upper end surface of the fixing seat 2 and the horizontal plane is 30°-45°, which ensures that after the load is decomposed, the magnitude of each sub-load is uniform.

Further, the slope at the upper end of the fixing seat 2 is a stepped surface, including a first slope 22 and a second slope 23; the plane of the first slope 22 is parallel to the plane of the second slope 23, and the first slope 22 is located at the upper end of the second slope 23 , and the first slope 22 sinks relative to the second slope 23, and a first boss is formed between the two slopes; the guide rail 12 is fixed on the first slope 22, and the side of the guide rail 12 is in contact with the first boss, the The reference plate 3 is fixed on the second slope 23 . The first boss supports and positions the guide rail 12 to prevent the guide rail pair from slipping when the loading force is large.

Further, the sliding block 8 is a stepped surface, including a first plane 83 and a second plane 84; the first plane 83 is located at the upper end of the second plane 84, and the second plane 84 is parallel to the first inclined plane 22; The second plane 84 sinks relative to the first plane, and a second boss is formed between the two planes; the slider 11 is fixed at the lower end of the second plane 84 and contacts the second boss, and the second boss is opposite to the slider. It acts as support and positioning, and avoids sliding of the sliding block 8 when the loading force is large.

Further, a guide mechanism is provided between the pressurizing device and the fixed seat 2; so that during the pressurization process, the pressurization direction is directly aligned with the center of the cylinder 13, ensuring the repeatability of the test results.

In some embodiments, the guide mechanism is a guide post and a guide sleeve, and the guide post and guide sleeve are arranged between the pressurizing device and the fixing seat 2 .

In some other embodiments, the guide mechanism is a guide plate arranged at the lower end of the pressing block 4, including a first guide plate 41 and a second guide plate 42; the first guide plate 41 and the second guide plate 42 follow the guide rail 12 The sliding direction is set on both sides of the lower end of the pressing block 4; when the cylinder 13 is located on the first V-shaped groove 81, the sliding block 11 is moved so that the side end of the sliding block 8 fits the inner side of the first guide plate 41, so that the sliding block 11 The center is located at the pressure center to ensure that the slider 11 will not be biased when applied to the pressure, resulting in inaccurate test results; when the cylinder 13 is located on the second V-shaped groove 82, move the slider 11 so that the side end of the slider 8 is in line with the second guide The inner side of the plate 42 is bonded so that the center of the cylinder 13 is located at the pressure center, preventing the briquetting block 4 from tilting relative to the cylinder 13, resulting in inaccurate test results.

The high-precision linear guide pair static stiffness comprehensive measuring device of the present invention, when testing, first put the cylinder 13 into the first V-shaped groove 81 on the sliding block 8, and apply a line load to the sliding block 8 through the cylinder 13 F ₁ , decompose F ₁ into two equivalent loads, vertical and inclined, convert the deformation of the guide rail pair measured by the displacement sensor group 101 into the deformation components in the vertical and inclined directions, and obtain the loading force in both directions - deformation curve, that is, the vertical static stiffness curve and the inclined static stiffness curve; then put the cylinder 13 into the second V-shaped groove 82 on the slider 8, and apply a line load F ₂ to the slider 8 through the cylinder 13, and the _F2 is decomposed into two equivalent loads of pitch and yaw, the deformation of the guide rail pair measured by the displacement sensor group 102 is converted into the deformation components in the two directions of pitch and yaw, and the loading force-deformation curve in the two directions is obtained, That is, the pitch static stiffness curve and the yaw static stiffness curve.

In conjunction with Fig. 9, based on the measuring device of the present invention, the present invention also proposes a comprehensive measurement method for the static stiffness of a high-precision linear guide pair, which includes the following steps:

Step 1. Calibrate the pressure sensor 7 and the displacement sensor group 10, and perform zero-return initialization processing, determine the maximum loading load according to the rated dynamic load of the linear guide pair under test, and perform preloading to eliminate the error caused by the installation clearance of each component ; To improve the test accuracy.

Preferably, the preloaded load is 1-5% of the maximum loaded load.

Step 2. Test the vertical static stiffness and inclined static stiffness of the guide rail pair:

Step 2.1, put the cylinder 13 on the first V-shaped groove 81, move the slider 11 so that the side end of the slider 8 fits the inner side of the first guide plate 41, so that the center of the slider 11 is located at the pressure center;

Step 2.2. Load the cylinder 13 to 20-60% of the rated dynamic load of the guide rail pair, and then start unloading. During the process, collect data on the force sensor 7 and displacement sensor group 101 in real time until the unloading is zero.

Step 2.3, take the geometric center of the guide rail as the coordinate origin, and establish a reference coordinate system. The X-axis is perpendicular to the reference plane of the reference plate, the Y-axis is along the longitudinal direction of the guide rail, and the Z-axis is perpendicular to the upper surface of the slider. The loading force _F2 collected by the force sensor is decomposed into the axial force F parallel to the Z-axis in the XZ plane _1Z and the axial force F _1X parallel to the X axis, since the distance between the longitudinal centerline of the first V-shaped groove on the sliding block and the longitudinal centerline of the guide rail pair is T, a tilting moment M _B is formed, and the axial force F _1Z is the vertical loading force acting on the sliding block, as shown in formula (1); the deformation of the guide rail pair measured by the four first displacement sensor groups 101 is decomposed into vertical and The amount of deformation in the inclined direction; as shown in Figure 10-11;

Vertical deformation amount:

Tilt deformation angle:

Among them, the four first displacement sensor groups 101 are arranged in the order of a, b, c, and d rectangles, as shown in Figure 4 (ac), where a, b are located higher than c, d; ΔS ₁ , ΔS ₂ , ΔS ₃ , ΔS ₄ are the deformations measured by the first displacement sensor group 101 located at four positions a, b, c, and d respectively, and ΔS ₅ and ΔS ₆ are the deformations measured by the two second displacement sensors 102 respectively. The obtained deformation; D is the center distance between the first displacement sensor group at positions a, d or b, c; θ is the angle between the upper surface of the fixed seat and the horizontal plane.

Step 3. Test the static stiffness of the guide rail pair pitch and yaw:

Step 3.1, put the cylinder 13 on the second V-shaped groove 82, move the slider 11 so that the side end of the slider 8 fits the inner side of the second guide plate 42, and ensure that the center of the cylinder 13 is located at the pressure center;

Step 3.2, load the cylinder, after loading to 20-60% of the rated dynamic load of the guide rail pair, start unloading, and collect the data on the force sensor 7, the first displacement sensor group 101 and the second displacement sensor 102 in real time during the process, until Unloaded to zero.

Step 3.3: Decompose the loading force F ₂ collected by the force sensor into the axial force F 2Z parallel to the Z axis and the axial force F _2X parallel to the X _axis in the longitudinal symmetry plane of the second V-shaped groove. The vertical distance from the geometric center point on the upper surface of the block to the longitudinal centerline of the second V-shaped groove is H, thus forming a pitching moment M _A and a yaw moment M _C , as shown in formula (4); the first displacement sensor group 101 and The deformation of the guide rail pair measured by the second displacement sensor 102 is decomposed into the deformation in the pitch and yaw directions according to formula (5) and formula (6); as shown in Figure 12-13;

Pitch deformation angle:

Yaw deformation angle:

Wherein, L is the center-to-center distance between the two second displacement sensors 10; K is the center-to-center distance between the first displacement sensor groups at a, b positions or c, d positions.

Step 4. Take the load as the abscissa and the deformation as the ordinate, respectively draw the decomposed equivalent load and the deformation data in the corresponding direction in the coordinate diagram, and obtain the vertical, inclination, pitch and yaw of the guide rail pair respectively For the static stiffness curve, the reciprocal of the slope of each curve is the value of each static stiffness of the guide rail pair.

Claims (10)

1. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device, which is characterized in that it is characterized by comprising deck plates (1), the fixed seat (2) of deck plate (1) upper end, datum plate (3), pressue device, sliding shoe (8), displacement sensor folder are fixed on Have (9), displacement sensor group (10), cylinder (13)；

Fixed seat (2) upper surface is inclined-plane, to fixed guide rail (12)；And guide rail (12) glide direction and fixed seat (2) Vertical section bevel edge (21) it is vertical；The datum plate (3) is vertically fixed on fixed seat (2) upper end inclined-plane；The sliding shoe (8) Lower end is connected with sliding block (11)；Sliding block (11) constitutes line slideway auxiliary with guide rail (12)；Sliding shoe (8) upper surface is oblique Face, and inclined-plane is flushed with horizontal plane；Institute's displacement sensors group (10) include four the first displacement sensor groups (101), two Second displacement sensor group (102)；Described four the first displacement sensor group (101) measurement directions are in fixed seat (2) End face, and contacted with fixed seat (2) upper surface, vertical deformation amount, inclination angle deflection and pitching for measuring guideway Angular deformation amount, four the first displacement sensor groups (101) are arranged symmetrically in the left and right sides of guide rail (12) two-by-two；Two seconds Displacement sensor (102) is contacted perpendicular to datum plate 3, and with datum plate (3), the deflection angle deflection for measuring guideway；Together The test point line of two the first displacement sensor groups (101) of side, two second displacement sensor groups (102) test point Glide direction of the line each parallel to guide rail (12)；The sliding shoe (8) is equipped with orthogonal first V-shaped groove (81) and the Two V-shaped grooves (82)；First V-shaped groove (81) length direction is parallel to guide rail (12) glide direction, and in the first V-shaped groove (81) The line of heart line and guide rail (12) center line is perpendicular to sliding block (13) upper surface；The cylinder (13) is arranged in the first V-shaped groove (81) or in the second V-shaped groove (82)；The pressue device is arranged in sliding shoe (8) upper end, pressurizes, adds to sliding shoe (8) Pressure device realizes that line contacts with cylinder (13), and obtains the pressure of pressure process in real time.

2. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 1, which is characterized in that institute It includes briquetting (4), pressure sensor (7), connector (6), loading device (5) to state pressue device；The pressure sensor (7) is logical It crosses connector (6) and is fixed on loading device (5) lower end, the briquetting (4) is connected with pressure sensor (7) lower end；Loading device (5) it is pressurizeed to the cylinder (13) on sliding shoe (8) by briquetting (4).

3. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 1, which is characterized in that institute It is the ball screw that electric cylinder, hydraulic cylinder or servomotor drive to state loading device (5).

4. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 1, which is characterized in that institute The angle for stating fixed seat (2) upper surface and horizontal plane is 30 ° -45 °.

5. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 1, which is characterized in that institute It is step surface, including the first inclined-plane (22), the second inclined-plane (23) to state fixed seat (2) upper end inclined-plane；First inclined-plane (22) is flat Face is parallel to the second inclined-plane (23) plane, and the first inclined-plane (22) are located at the second inclined-plane (23) upper end, and the first inclined-plane (22) are opposite Second inclined-plane (23) sinks, and first boss is formed between two inclined-planes；The guide rail (12) is fixed on the first inclined-plane (22), and Guide rail (12) side is contacted with first boss, and the datum plate (3) is fixed on the second inclined-plane (23).

6. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 1, which is characterized in that institute It is step surface, including the first plane (83), the second plane (84) to state sliding shoe (8)；It is flat that first plane (83) is located at second Face (84) upper end, and the second plane (84) is parallel to the first inclined-plane (22)；Second plane (84) is sunk with respect to the first plane, Second boss is formed between two planes；The sliding block (11) is fixed on the second plane (84) lower end, and is contacted with second boss, Second boss is supported and positions to sliding block.

7. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 1, which is characterized in that institute It states and is additionally provided with guiding mechanism between pressue device and fixed seat (2).

8. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 7, which is characterized in that institute It is guide plate of the setting in briquetting (4) lower end, including the first guide plate (41) and the second guide plate (42) to state guiding mechanism；It is described First guide plate (41) and the second guide plate (42) are arranged along guide rail (12) glide direction in briquetting (4) lower end both sides；Work as cylinder When body (13) is located on the first V-shaped groove (81), mobile sliding block (11) makes sliding shoe (8) side be pasted on the inside of the first guide plate (41) It closes so that sliding shoe (8) center is located at Center of Pressure.When cylinder (13) is located on the second V-shaped groove (82), mobile sliding block (11) make to be bonded on the inside of sliding shoe (8) side and the second guide plate (42) so that cylinder (13) center is located at Center of Pressure.

9. a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device according to claim 7, which is characterized in that institute It is guide post, guide sleeve to state guiding mechanism, and guide post, which is led, to be set between pressue device and fixed seat (2).

10. based on the measurement for requiring a kind of high-precision line slideway auxiliary Static stiffness comprehensive measurement device described in 1-9 any one Method, which is characterized in that include the following steps：

Step 1, the vertical Static stiffness of test guideway and inclination Static stiffness：

Cylinder is put on the first V-shaped groove by step 1.1, and mobile sliding block makes to be bonded on the inside of sliding shoe side and the first guide plate, So that sliding shoe center is located at Center of Pressure；

Step 1.2 first loads cylinder then unloading, acquires force snesor and the data in displacement sensor group in real time, directly It is zero to unloading；

Step 1.3, using guideway geometric center as coordinate origin, establish reference frame；Benchmark of the X-axis perpendicular to datum plate Face, Y-axis is along guide rail longitudinal direction, and Z axis is perpendicular to sliding block upper surface, by the collected loading force F of force snesor₁It is decomposed in XZ planes To be parallel to the axial force F of Z axis_1ZWith the axial force F for being parallel to X-axis_1X, due on sliding shoe the first V-groove longitudinal centre line with The distance between guideway longitudinal centre line is T, thus forms heeling moment M_B, and axial force F_1ZTo act on sliding shoe Vertical loading power, as shown in formula (1)；The guideway deflection that four the first displacement sensor group measurements are obtained by formula (2), Formula (3) be decomposed into vertically with the deflection on inclined direction；

Vertical deformation amount：

Inclination and distortion angle：

Wherein, four the first displacement sensor groups arrangement is arranged in order by a, b, c, d rectangle sequence, wherein the position a, b higher than c, d；△S₁、△S₂、△S₃、△S₄Respectively it is located at the deflection that first displacement sensor of tetra- positions a, b, c, d measures, △ S₅、△S₆The deflection that respectively two second displacement sensors measure；D is the first displacement sensing of the position a, d or the position b, c Centre-to-centre spacing between device group；Angles of the θ between fixed seat upper surface and horizontal plane；

Step 2, test guideway pitching and beat Static stiffness：

Cylinder is put on the second V-shaped groove by step 2.1, and mobile sliding block makes to be bonded on the inside of sliding shoe side and the second guide plate, Ensure that center is located at Center of Pressure；

Step 2.2 first loads cylinder and unloads again, in the process acquisition force snesor and the first displacement sensor group and the in real time Data on two displacement sensors, until unloading is zero；

Step 2.3, by the collected loading force F of force snesor₂It is decomposed into the longitudinally asymmetric face of the second V-shaped groove and is parallel to Z axis Axial force F_2ZWith the axial force F for being parallel to X-axis_2X, due in sliding shoe upper surface geometric center point to the second V-groove longitudinal direction The vertical range of heart line is H, thus forms pitching moment M_AWith yaw moment M_C, as shown in formula (4)；By the first displacement sensing The guideway deflection that device group and second displacement sensor measurement obtain is decomposed by formula (5), formula (6) in pitching and beat direction Deflection；

Pitching deformation angle：

Beat deformation angle：

Wherein, L is the centre-to-centre spacing between two second displacement sensors；K is the first displacement sensing of the position a, b or the position c, d Centre-to-centre spacing between device group；

Step 3, using load as abscissa, deflection is ordinate, respectively by after above-mentioned decomposition equivalent load and counterparty To deformation data be plotted in coordinate diagram, respectively obtain the vertical of guideway, inclination, pitching, beat Static stiffness curve, respectively The inverse of the slope of curve is each Static stiffness value of guideway.