CN107971910A - A kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver - Google Patents
A kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver Download PDFInfo
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- CN107971910A CN107971910A CN201711010275.3A CN201711010275A CN107971910A CN 107971910 A CN107971910 A CN 107971910A CN 201711010275 A CN201711010275 A CN 201711010275A CN 107971910 A CN107971910 A CN 107971910A
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- aluminium alloy
- alloy plate
- dewar
- grinding
- square
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver, this method comprises the following steps：（1）Processing environment is set；（2）Polish for the first time；（3）Second of polishing；（4）Third time polishes；（5）Grind for the first time；（6）Second of grinding.The present invention can solve that conventional Dewar inner wall roughness is poor, vacuum is low during use, is difficult to the temperature index that reaches interior environmental requirement（Below 20K）The problems such as, realize the minute surface requirement of square Dewar inner wall, reduce the heat radiation of Dewar inner wall, beneficial to the realization of the square Dewar technical indicator of low-temperature receiver.
Description
Technical field
The present invention relates to low-temperature receiver technical field, and in particular to one kind is used for the square Dewar aluminium alloy of low-temperature receiver
The mirror processing method of plate.
Background technology
The square Dewar structure of low-temperature receiver is hexahedron, is spliced by six pieces of aluminium alloy plates, seam after the completion of splicing
Locate gluing, vacuumize.The cryogenic device such as cryogenic low noise amplifier, isolator, feed, cryocooler cold head built in square Dewar.To make Du
Environment temperature maintains below 20K in watt, it is desirable to reaches minute surface requirement after Dewar inner wall nickel plating.Therefore Dewar inner wall is before nickel plating
Matrix need to reach minute surface standard i.e. roughness and be less than Ra0.05um, and minute surface inner wall can not only reduce the heat radiation inside Dewar, but also
The deflation rate of material in itself can be reduced, maintains condition of high vacuum degree.In consideration of it, wanting for higher is proposed to the mirror finish of aluminium alloy plate
Ask.
The content of the invention
It is an object of the invention to provide a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver,
This method can solve that conventional Dewar inner wall roughness is poor, vacuum is low during use, is difficult to the temperature that reaches interior environmental requirement
Spend index（Below 20K）The problems such as, realize the minute surface requirement of square Dewar inner wall, reduce the heat radiation of Dewar inner wall, Li Yu is low
The realization of the warm square Dewar technical indicator of receiver.
To achieve the above object, present invention employs following technical scheme：
A kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver, this method comprise the following steps：
（1）Processing environment is set.
（2）Polish for the first time, remove knife mark：Aluminium alloy plate to be processed is placed on grinding plate, first using 600 mesh sand
Milling cutter lines on paper polishing aluminium alloy plate, then lubricated using kerosene, cleaning aluminum alloy plate.
（3）Second of polishing, removes coarse groove：It will be placed on grinding plate by the aluminium alloy plate of polishing for the first time, first adopt
With the coarse groove that is produced in first time polishing process of 1200 mesh sand polishing aluminium alloy plate, then lubricated using kerosene, cleaning aluminum alloy
Plate.
（4）Third time polishes, along microgroove：It will be placed on grinding plate by the aluminium alloy plate of second of polishing, first adopt
Microgroove is polished along the aluminium alloy plate material ridge orientation with 2000 mesh abrasive paper for metallograph, it is consistent to enable aluminum alloy to plate surface microgroove direction,
Again using kerosene lubrication, cleaning aluminum alloy plate.
（5）Grind for the first time, luminous exitance：It will be placed on grinding plate, use by the aluminium alloy plate of third time polishing
First abrasive pastes and non-woven fabrics carry out rough lapping to the aluminium alloy plate surface, and grinding rate is 5 ~ 10m/min, and grinding pressure is
0.1~0.2Mpa；When the surface roughness of aluminium alloy plate reaches Ra0.08, stop rough lapping, it is carried out using absolute ethyl alcohol
Cleaning.
（6）Second of grinding, goes out brightness：It will be placed on grinding plate, use by the aluminium alloy plate of grinding for the first time
Second abrasive pastes and absorbent cotton carry out the surface of the aluminium alloy plate fine lapping, and grinding rate is 10 ~ 15m/min, grinding pressure
For 0.01 ~ 0.1Mpa；When the surface roughness of aluminium alloy plate reaches minute surface requirement Ra0.05, stop fine lapping, use is anhydrous
Ethanol cleans it, and the surface of the aluminium alloy plate after lubrication cleaning is covered in using polychloroethylene film.Use polyvinyl chloride
Film protects specular surface, prevents unexpected scuffing and oxidation.
Further, step（1）Described in processing environment be：There is single operation room, temperature is 10 ~ 30 DEG C, humidity
Without dust and there is ventilation facility for 20%≤H≤60%, in the air of operation room.
Further, roughness≤Ra0.02um of the grinding plate, flatness≤0.005mm.
Further, the specification of the aluminium alloy plate is any one in 2A12,5A06,6061,5A05.
Further, first abrasive pastes use corundum abrasive pastes of the specification for W10.
Further, second abrasive pastes use corundum abrasive pastes of the specification for W5.
Further, the purity of the absolute ethyl alcohol is 99.7%.
Further, when there are unthreaded hole or threaded hole in aluminium alloy plate surface to be processed, used in polishing process three times
After sand paper removes lines, then by hole the grains of sand remove.
From above technical scheme, the present invention can solve that conventional Dewar inner wall roughness is poor, vacuum during use
Spend it is low, be difficult to the temperature index that reaches interior environmental requirement（Below 20K）The problems such as, realize the minute surface requirement of square Dewar inner wall,
Reduce the heat radiation of Dewar inner wall, beneficial to the realization of the square Dewar technical indicator of low-temperature receiver.
Brief description of the drawings
Fig. 1 is the flow process chart of square Dewar aluminium alloy plate minute surface；
Fig. 2 is the outside drawing before square Dewar aluminium alloy plate processing；
Fig. 3 is the outside drawing after square Dewar aluminium alloy plate processing；
Fig. 4 is the inner cavity figure of square Dewar.
Embodiment
The present invention will be further described below in conjunction with the accompanying drawings：
A kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver as shown in Figure 1, this method including with
Lower step：
（1）Processing environment is set.
（2）Polish for the first time：Aluminium alloy plate to be processed is placed on grinding plate, is first polished using 600 mesh sand paper
Milling cutter lines on aluminium alloy plate, then lubricated using kerosene, cleaning aluminum alloy plate.
（3）Second of polishing：It will be placed on by the aluminium alloy plate of polishing for the first time on grinding plate, first using 1200 mesh
Sand polishes the coarse groove that aluminium alloy plate produces in first time polishing process, then is lubricated using kerosene, cleaning aluminum alloy plate.
（4）Third time polishes：It will be placed on by the aluminium alloy plate of second of polishing on grinding plate, first using 2000 mesh
Abrasive paper for metallograph polishes microgroove along the aluminium alloy plate material ridge orientation, and it is consistent to enable aluminum alloy to plate surface microgroove direction, then using coal
Oil lubrication, cleaning aluminum alloy plate.The grains of sand and alumina particles produced in polishing process are larger, and kerosene can play profit in cleaning process
Sliding effect, avoids surface second from scratching.
（5）Grind for the first time：It will be placed on by the aluminium alloy plate of third time polishing on grinding plate, using the first grinding
Cream and non-woven fabrics carry out the aluminium alloy plate surface rough lapping, and grinding rate be 5 ~ 10m/min, and grinding pressure is 0.1 ~
0.2Mpa；When the surface roughness of aluminium alloy plate reaches Ra0.08um, stop rough lapping, it is moistened using absolute ethyl alcohol
Sliding and cleaning.The type selecting of first abrasive pastes is as obtained by engineer testing repeatedly, and non-woven fabrics is relatively soft, is beneficial to protect in process of lapping
Protect surface.
（6）Second of grinding：It will be placed on by the aluminium alloy plate of grinding for the first time on grinding plate, using the second grinding
Cream and absorbent cotton carry out the surface of the aluminium alloy plate fine lapping, and grinding rate be 10 ~ 15m/min, and grinding pressure is 0.01 ~
0.1Mpa；When the surface roughness of aluminium alloy plate reaches minute surface requirement Ra0.05um, stop fine lapping, using absolute ethyl alcohol pair
It is cleaned.The absorbent cotton uses the absorbent cotton of soft texture.After minute surface requirement is reached, aluminium alloy plate is cleared up in time
Surface.In process of lapping twice, the ridge orientation that grinding direction will be with aluminium alloy plate material in itself is consistent, avoids parts list
Face produces new lines.The type selecting of second abrasive pastes be as obtained by engineer testing repeatedly, when aluminium alloy plate surface roughness very
Gao Shi, easily scratches, but to obtain minute surface, it is necessary to be ground to its surface, therefore select the softer absorbent cotton of quality.
Further, step（1）Described in processing environment be：There is single operation room, temperature is 10 ~ 30 DEG C, humidity
Without dust and there is ventilation facility for 20%≤H≤60%, in the air of operation room.
Further, roughness≤Ra0.02um of the grinding plate, flatness≤0.005mm.
Further, the specification of the aluminium alloy plate is any one in 2A12,5A06,6061,5A05.
Further, first abrasive pastes use corundum abrasive pastes of the specification for W10.
Further, second abrasive pastes use corundum abrasive pastes of the specification for W5.
Further, the purity of the absolute ethyl alcohol is 99.7%.
Further, when there are unthreaded hole or threaded hole in aluminium alloy plate surface to be processed, used in polishing process three times
After sand paper removes lines, then by hole the grains of sand remove；The secondary scratch aluminium alloy plate in polishing or grinding can be prevented by so doing
Surface.
Mirror processing method of the present invention includes polishing three times and grinds twice, specifically：Polishing master for the first time
If removing the cutter lines produced in milling process, the usually more difficult removal of cutter lines, therefore coarse sand paper polishing need to be used, gone
It is larger except measuring；After removing knife mark using coarse sandpaper, relatively thick polishing lines can be produced, therefore the purpose of second of polishing is just
It is to remove the coarse groove that polishing produces for the first time.Mixed and disorderly microgroove can be produced after polishing coarse groove, is unfavorable for subsequently grinding minute surface, therefore
Polished using the thinner sand paper of granularity, microgroove orientation and material ridge orientation is reached unanimity, surface pattern is neat.
In polishing process three times, according to repeatedly repeatedly engineer testing as a result, determine used by sand paper type.Grinding for the first time
Purpose is to reach higher roughness, is called " luminous exitance ", the purpose of second grinding be in order to reach minute surface requirement,
Faster grinding rate and less grinding pressure are needed, is called " going out brightness ".Grinding rate and grinding pressure belong to work
Skill parameter category, need to obtain optimal processing parameter, to meet minute surface requirement by engineer testing repeatedly.Due to grinding aluminium alloy plate
Granule foreign can be produced behind surface, to prevent secondary scuffing, need to be cleaned in time, because kerosene cleaning can produce oil film, is unfavorable for
Minute surface is produced, therefore the present invention uses volatile washes of absolute alcohol in process of lapping twice.
Figure it is seen that Dewar aluminium alloy plate inner wall roughness is poor, therefore Dewar plate microcosmic surface product just compares
Greatly, it is just relatively more to be hidden in the gas flow of the aluminium alloy plate inner wall, can constantly discharge the gas during use, influence
The vacuum of Dewar, is unfavorable for the holding of Dewar performance.
From figure 3, it can be seen that oxidizable in view of aluminum alloy plates with mirror surface, the present invention completes mirror ultrafinish, is used after cleaning
Polychloroethylene film protects minute surface.
From fig. 4, it can be seen that by polishing three times with the Dewar aluminium alloy plate inner wall of grinding process twice into minute surface, its is micro-
Sight surface area is small, and the gas discharged in use is few, is conducive to keep the vacuum inside Dewar.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention
Enclose and be defined, on the premise of design spirit of the present invention is not departed from, technical side of the those of ordinary skill in the art to the present invention
The various modifications and improvement that case is made, should all fall into the protection domain that claims of the present invention determines.
Claims (8)
- A kind of 1. mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver, it is characterised in that：This method includes Following steps：（1）Processing environment is set；（2）Polish for the first time：Aluminium alloy plate to be processed is placed on grinding plate, is first closed using 600 mesh sand paper polished aluminums Milling cutter lines in golden plate, then lubricated using kerosene, cleaning aluminum alloy plate；（3）Second of polishing：It will be placed on by the aluminium alloy plate of polishing for the first time on grinding plate, first using 1200 mesh sand paper The coarse groove that aluminium alloy plate produces in first time polishing process is polished, then is lubricated using kerosene, cleaning aluminum alloy plate；（4）Third time polishes：It will be placed on by the aluminium alloy plate of second of polishing on grinding plate, first using 2000 mesh sand paper Microgroove is polished along the aluminium alloy plate material ridge orientation, it is consistent to enable aluminum alloy to plate surface microgroove direction, then is lubricated using kerosene, clearly Wash aluminium alloy plate；（5）Grind for the first time：To be placed on by the aluminium alloy plate of third time polishing on grinding plate, using the first abrasive pastes and Non-woven fabrics carries out rough lapping to the aluminium alloy plate surface, and grinding rate is 5 ~ 10m/min, and grinding pressure is 0.1 ~ 0.2Mpa；When When the surface roughness of aluminium alloy plate reaches Ra0.08, stop rough lapping, it is lubricated and cleaned using absolute ethyl alcohol；（6）Second of grinding：To be placed on by the aluminium alloy plate of grinding for the first time on grinding plate, using the second abrasive pastes and Absorbent cotton carries out the surface of the aluminium alloy plate fine lapping, and grinding rate be 10 ~ 15m/min, and grinding pressure is 0.01 ~ 0.1Mpa；When the surface roughness of aluminium alloy plate reaches minute surface requirement Ra0.05um, stop fine lapping, using absolute ethyl alcohol pair It is lubricated and cleans, and the surface of the aluminium alloy plate after lubrication cleaning is covered in using polychloroethylene film.
- 2. a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver according to claim 1, its It is characterized in that：Step（1）Described in processing environment be：There is single operation room, temperature is 10 ~ 30 DEG C, and humidity is 20%≤H ≤ 60%, without dust and there is ventilation facility in air.
- 3. a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver according to claim 1, its It is characterized in that：Roughness≤Ra0.02um of the grinding plate, flatness≤0.005mm.
- 4. a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver according to claim 1, its It is characterized in that：The specification of the aluminium alloy plate is any one in 2A12,5A06,6061,5A05.
- 5. a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver according to claim 1, its It is characterized in that：First abrasive pastes use corundum abrasive pastes of the specification for W10.
- 6. a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver according to claim 1, its It is characterized in that：Second abrasive pastes use corundum abrasive pastes of the specification for W5.
- 7. a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver according to claim 1, its It is characterized in that：The purity of the absolute ethyl alcohol is 99.7%.
- 8. a kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver according to claim 1, its It is characterized in that：When there are unthreaded hole or threaded hole in aluminium alloy plate surface to be processed, line is gone using sand paper in polishing process three times Lu Hou, then the grains of sand in hole are removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711010275.3A CN107971910A (en) | 2017-10-25 | 2017-10-25 | A kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711010275.3A CN107971910A (en) | 2017-10-25 | 2017-10-25 | A kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver |
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| CN201711010275.3A Pending CN107971910A (en) | 2017-10-25 | 2017-10-25 | A kind of mirror processing method for the square Dewar aluminium alloy plate of low-temperature receiver |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110281084A (en) * | 2019-07-23 | 2019-09-27 | 南通华夏飞机工程技术股份有限公司 | A kind of aircraft appearance paint layer sanding and polishing method |
| CN111745470A (en) * | 2020-06-29 | 2020-10-09 | 沈阳富创精密设备有限公司 | Mirror polishing processing method for steel material |
| CN112475584A (en) * | 2020-10-19 | 2021-03-12 | 伊莱特能源装备股份有限公司 | Plate blank surface treatment method for vacuum seal welding |
| CN113635141A (en) * | 2021-07-12 | 2021-11-12 | 劢析科学仪器(苏州)有限公司 | Method for manufacturing reflector |
| CN115139191A (en) * | 2022-09-05 | 2022-10-04 | 歌尔光学科技有限公司 | Polishing method of optical lens mould core |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1140117A (en) * | 1995-07-12 | 1997-01-15 | 武汉工业大学 | Method for grinding and polishing mirror plate of water wheel generator |
| CN102259287A (en) * | 2010-05-24 | 2011-11-30 | 李俊霈 | Processing method for surface of mirror surface stainless steel object |
| CN102661883A (en) * | 2012-04-23 | 2012-09-12 | 天津立中合金集团有限公司 | Method for quickly preparing metallographic samples for AS7G03/AS8U3 aluminum alloy |
| CN104400567A (en) * | 2014-09-25 | 2015-03-11 | 厦门理工学院 | Super-mirror polishing method of metal plate |
| CN104400607A (en) * | 2014-10-27 | 2015-03-11 | 苏州广型模具有限公司 | Polishing method for precision mold |
| CN106826535A (en) * | 2017-02-06 | 2017-06-13 | 兴科电子科技有限公司 | A kind of aluminium alloy mirror processing method |
| CN107243780A (en) * | 2017-04-27 | 2017-10-13 | 上海佑戈金属科技有限公司 | Prepare the mirror ultrafinish method of high reflectance, low surface roughness aluminium alloy plate |
-
2017
- 2017-10-25 CN CN201711010275.3A patent/CN107971910A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1140117A (en) * | 1995-07-12 | 1997-01-15 | 武汉工业大学 | Method for grinding and polishing mirror plate of water wheel generator |
| CN102259287A (en) * | 2010-05-24 | 2011-11-30 | 李俊霈 | Processing method for surface of mirror surface stainless steel object |
| CN102661883A (en) * | 2012-04-23 | 2012-09-12 | 天津立中合金集团有限公司 | Method for quickly preparing metallographic samples for AS7G03/AS8U3 aluminum alloy |
| CN104400567A (en) * | 2014-09-25 | 2015-03-11 | 厦门理工学院 | Super-mirror polishing method of metal plate |
| CN104400607A (en) * | 2014-10-27 | 2015-03-11 | 苏州广型模具有限公司 | Polishing method for precision mold |
| CN106826535A (en) * | 2017-02-06 | 2017-06-13 | 兴科电子科技有限公司 | A kind of aluminium alloy mirror processing method |
| CN107243780A (en) * | 2017-04-27 | 2017-10-13 | 上海佑戈金属科技有限公司 | Prepare the mirror ultrafinish method of high reflectance, low surface roughness aluminium alloy plate |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110281084A (en) * | 2019-07-23 | 2019-09-27 | 南通华夏飞机工程技术股份有限公司 | A kind of aircraft appearance paint layer sanding and polishing method |
| CN110281084B (en) * | 2019-07-23 | 2021-07-16 | 南通华夏飞机工程技术股份有限公司 | Grinding and polishing method for paint layer on surface of airplane |
| CN111745470A (en) * | 2020-06-29 | 2020-10-09 | 沈阳富创精密设备有限公司 | Mirror polishing processing method for steel material |
| CN112475584A (en) * | 2020-10-19 | 2021-03-12 | 伊莱特能源装备股份有限公司 | Plate blank surface treatment method for vacuum seal welding |
| CN112475584B (en) * | 2020-10-19 | 2022-07-01 | 伊莱特能源装备股份有限公司 | Plate blank surface treatment method for vacuum seal welding |
| CN113635141A (en) * | 2021-07-12 | 2021-11-12 | 劢析科学仪器(苏州)有限公司 | Method for manufacturing reflector |
| CN113635141B (en) * | 2021-07-12 | 2022-11-08 | 劢析科学仪器(苏州)有限公司 | Method for manufacturing reflector |
| CN115139191A (en) * | 2022-09-05 | 2022-10-04 | 歌尔光学科技有限公司 | Polishing method of optical lens mould core |
| CN115139191B (en) * | 2022-09-05 | 2022-11-22 | 歌尔光学科技有限公司 | Polishing method of optical lens mould core |
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