CN107942234A - Testboard and its fixing device - Google Patents
Testboard and its fixing device Download PDFInfo
- Publication number
- CN107942234A CN107942234A CN201711384899.1A CN201711384899A CN107942234A CN 107942234 A CN107942234 A CN 107942234A CN 201711384899 A CN201711384899 A CN 201711384899A CN 107942234 A CN107942234 A CN 107942234A
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- CN
- China
- Prior art keywords
- vacuum
- mobile device
- testboard
- bearing
- mobile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The present invention proposes a kind of testboard and its fixing device, and the testboard includes being used to place the bearing device in piece platform, and the fixing device includes：Mobile device；Vacuum absorption device, in the mobile device；Attachment device, mechanically connects with the vacuum absorption device, bearing device respectively；Vacuum tube, mechanically connected with the vacuum absorption device, for when vacuum tube is connected with peripheral hardware vacuum source, the vacuum absorption device is made to hold the mobile device, with the fixation bearing device, and disconnected in vacuum tube and peripheral hardware vacuum source and during with atmosphere, make the vacuum absorption device be separated with the mobile device, do not go to limit the bearing device and move.
Description
Technical field
The present invention relates to testboard technical field, more particularly to a kind of testboard and its fixing device.
Background technology
Traditional testboard, chip is placed on and is tested on piece platform, is particularly tested for a long time to check chip
Semiconductor device parameter when, probably due to testboard is not horizontal or earth shock, cause testing needle to prick inclined, or scratch chip list
Face.
The content of the invention
Based on this, it is necessary to provide a kind of fixing device of testboard.
A kind of fixing device of testboard, the testboard include being used to place the bearing device in piece platform, the fixation
Device includes：
Mobile device；
Vacuum absorption device, in the mobile device；
Attachment device, mechanically connects with the vacuum absorption device, bearing device respectively；
Vacuum tube, mechanically connects with the vacuum absorption device, for when vacuum tube is connected with peripheral hardware vacuum source, making institute
State vacuum absorption device and hold the mobile device, with the fixation bearing device, and break in vacuum tube and peripheral hardware vacuum source
Open and during with atmosphere, make the vacuum absorption device be separated with the mobile device, do not go to limit the bearing device
It is mobile.
The fixing device of above-mentioned testboard, the bearing device of testboard are fixed by attachment device and vacuum absorption device,
When vacuum absorption device holds mobile device, bearing device is fixed, so as to fix in piece platform, works as vacuum absorption device
When being separated with mobile device, the movement of bearing device will not be limited.Particularly test for a long time is utilized in the chip on piece platform
The fixing device fixes bearing device, can reduce that testboard is not horizontal or earth shock, causes testing needle to prick inclined, or scratch
The generation of chip surface.
In one embodiment, the fixing device further includes：
Vacuum tube control device, is connected with the vacuum tube, for controlling the vacuum tube and peripheral hardware vacuum source to disconnect or
Connection.
In one embodiment, the vacuum tube control device includes：Solenoid valve and switch；
The solenoid valve is mechanically connected with the vacuum tube, is electrically connected with the switch, and solenoid valve is controlled by the switch,
So as to control the disconnection of the vacuum tube and the peripheral hardware vacuum source that are mechanically connected with solenoid valve or connect.
In one embodiment, the fixing device further includes connecting wire；The solenoid valve by the connecting wire with
The switch is electrically connected.
In one embodiment, the switch is mechanically connected with the attachment device, the vacuum absorption device respectively；It is described
Attachment device is fixed together by the switch with the vacuum absorption device.
In one embodiment, the vacuum absorption device is vacuum cup.
In one embodiment, the attachment device is elongated metal plate or strip wood based panel.
In one embodiment, the mobile device length in the horizontal direction and the vacuum absorption device are in the horizontal direction
The difference of length be more than predetermined threshold value.
In one embodiment, the vacuum absorption device is parallel to be arranged in the mobile device, the vacuum absorption device
Opposite parallel spacing is less than default spacing threshold with the mobile device.
Also propose a kind of testboard, including：
In piece platform；
Bearing device, arranged on described in below piece platform, mechanically connects with described in piece platform；
First mobile device, below the bearing device, mechanically connects with the bearing device；
First carriage, in first mobile device, for making first mobile device described first
Moved in the horizontal direction on carriage, so as to drive the bearing device and described be moved in piece platform along the horizontal direction
It is dynamic；
Second mobile device, mechanically connects below first mobile device, and with first carriage,
So that first carriage is fixed in second mobile device；
Second carriage, in second mobile device, for making second mobile device vertically
It is mobile, so as to drive the first carriage to be moved along the vertical direction, so as to drive the first mobile device along the vertical side
To movement, so as to drive the bearing device and described be moved in piece platform along the vertical direction；And
As above the fixing device of the testboard described in any embodiment.
Above-mentioned testboard, including fixing device, the bearing device of testboard are consolidated by attachment device and vacuum absorption device
Fixed, when vacuum absorption device holds mobile device, bearing device is fixed, so as to fix in piece platform, works as vacuum suction
When device is separated with mobile device, the movement of bearing device will not be limited.Particularly test for a long time is in the chip on piece platform,
Bearing device is fixed using the fixing device, can reduce that testboard is not horizontal or earth shock, causes testing needle to prick inclined, or
Scratch the generation of chip surface；And it can be realized in piece platform by mobile first mobile device or the second mobile device
It is mobile, it is not necessary to directly contact be in piece platform, reduction chip contamination the occurrence of.
Brief description of the drawings
Fig. 1 is the structure diagram of the fixing device of the testboard in one embodiment；
Fig. 2 is the structure diagram of the fixing device of the testboard in another embodiment；
The structure diagram of testboard in Fig. 3 one embodiment；
Fig. 4 is the overlooking the structure diagram of the testboard in one embodiment.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The fixing device of testboard in one embodiment, referring to Fig. 1, it is in piece platform that the testboard, which includes being used to place,
Bearing device, the fixing device includes：Mobile device 10, vacuum absorption device 20, attachment device 30 and vacuum tube 40；
Vacuum absorption device 20 is arranged in the mobile device 10, and attachment device 30 is filled with the vacuum absorption device 20, support respectively
Mechanical connection is put, vacuum tube 40 is mechanically connected with the vacuum absorption device 20, for connecting in vacuum tube 40 and peripheral hardware vacuum source
When logical, the vacuum absorption device 20 is made to hold the mobile device 10, with the fixation bearing device, and in vacuum tube 40
During with the disconnection of peripheral hardware vacuum source and with atmosphere, the vacuum absorption device 20 is made to be separated with the mobile device 10, no
Go to limit the bearing device movement.Vacuum absorption device 20 can be vacuum cup.Attachment device 30 can be strip gold
Belong to plate or strip wood based panel.In order to which attachment device 30 and bearing device are securely joined together, blind rivet can be used to connect
Or the mode of rivet interlacement.
The mobile device 10 can in the horizontal direction or vertical direction movement, because if bearing device is perpendicular
To after moving up, the vacuum absorption device that bearing device is connected by attachment device can also move up Nogata therewith, then true in order to allow
Suction adsorption device holds mobile device so as to fix bearing device, and mobile device also needs to move up.
In one embodiment, 10 length in the horizontal direction of mobile device is with the vacuum absorption device 20 in level
The difference of the length in direction is more than predetermined threshold value.If for example, as shown in Figure 1, the bearing device is transverse direction (figure in the horizontal direction
Left and right directions in 1) it is mobile, then the length in 10 transverse direction of mobile device and the length in 20 transverse direction of vacuum absorption device
The difference of degree is more than predetermined threshold value, and though such bearing device move how far, vacuum absorption device 20 is all without being moved to mobile dress
Outside putting, avoid the need for moving mobile device in the horizontal, be conducive to 20 quick adsorption of vacuum absorption device and live mobile device 10.
In one embodiment, the vacuum absorption device 20 is parallel to be arranged in the mobile device 10, the vacuum suction
The opposite parallel spacing of device 20 and the mobile device 10 is less than default spacing threshold, can make vacuum absorption device 20 and air
After connection, smoothly slid in mobile device 10.
In one embodiment, the fixing device of the testboard further includes vacuum tube control device, connects with the vacuum tube
Connect, for controlling the vacuum tube to disconnect or connect with peripheral hardware vacuum source.
In one of the embodiments, referring to Fig. 2, the vacuum tube control device includes：Solenoid valve (does not show in Fig. 2
Go out) and switch 50；The solenoid valve is mechanically connected with the vacuum tube, and solenoid valve is electrically connected with the switch, is opened by described
Control solenoid valve is closed, so as to control the disconnection of the vacuum tube and the peripheral hardware vacuum source that are mechanically connected with solenoid valve or connect.
In other embodiment,
Further, referring to Fig. 2, the vacuum tube control device further includes connecting wire 60；The solenoid valve passes through
The connecting wire 60 is electrically connected with the switch 50.
In one embodiment, referring to Fig. 2, switch 50 respectively with the attachment device 30, the vacuum absorption device
20 mechanically connect；The attachment device 30 is fixed together by the switch 50 with the vacuum absorption device 20, is realized solid
Determine the integration of device, be easy to use.In other embodiments, it will connect and fill using mechanical connection manner customary in the art
30 are put to be fixed together with vacuum absorption device 20.
The fixing device of above-mentioned testboard, the bearing device of testboard are solid by attachment device 30 and vacuum absorption device 20
Fixed, when vacuum absorption device 20 holds mobile device 10, bearing device is fixed, so as to fix in piece platform, works as vacuum
When adsorbent equipment 20 is separated with mobile device 10, the movement of bearing device will not be limited.Particularly test is in piece platform for a long time
On chip, fix bearing device using the fixing device, can reduce that testboard is not horizontal or earth shock, cause to test
Pin pricks generation that is inclined, or scratching chip surface.
Also propose a kind of testboard.
In one embodiment, referring to Fig. 3, the testboard includes the fixed dress of the testboard in as above any embodiment
Put, further include：In piece platform 70, bearing device 80, the first mobile device 90, the first carriage 100, the second mobile device 110,
Second carriage 120；It is in below piece platform, for being in piece platform described in support that bearing device, which is arranged on described,；First mobile device 90
Arranged on the lower section of bearing device 80, and mechanically connected with the bearing device 80, bearing device 80 is fixed on the first shifting
On dynamic device 110；First carriage 100 is arranged in first mobile device 90, for making first mobile device 90
Moved in the horizontal direction on first carriage 100, thus drive the bearing device 80 and it is described be in piece platform 70
Moved along the horizontal direction, horizontal direction can be laterally (left and right directions in Fig. 3) or longitudinal direction (front and back in Fig. 3
To)；Second mobile device 110 is arranged on the lower section of the first mobile device 90, and with the machinery of the first carriage 100 even
(connection relation is not shown in Fig. 3) is connect, so that first carriage 100 is fixed in second mobile device 110；The
Two carriages 120 are arranged in second mobile device 110, for making second mobile device 110 vertically move
It is dynamic, so as to drive the first carriage 100 to be moved along the vertical direction, so as to drive the first mobile device 90 along described vertical
Direction is moved, so as to drive the bearing device and described be moved in piece platform along the vertical direction.Bearing device can be
Cylinder, upper surface are horizontal planes, can also be cylinders in piece platform, upper and lower surface is horizontal plane, in order to chip to be measured
It is steady to place.Fig. 4 is the overlooking the structure diagram in addition to fixing device in testboard.
First mobile device 90 can be mobile tablet, and the first carriage 100 can be slide, the first carriage 100
Quantity can be two, or other quantity.Second mobile device 110 can be mobile tablet, and the second carriage 120 can be to slide
Rail, the quantity of the second carriage 120 can be two, or other quantity.
Above-mentioned testboard, possesses fixing device, and the bearing device of testboard passes through attachment device 30 and vacuum absorption device
20 fix, and when vacuum absorption device 20 holds mobile device 10, bearing device is fixed, so that fix in piece platform, when
When vacuum absorption device 20 is separated with mobile device 10, the movement of bearing device will not be limited.Particularly test is in for a long time
Chip on piece platform, bearing device is fixed using the fixing device, can reduce that testboard is not horizontal or earth shock, is caused
Testing needle pricks generation that is inclined, or scratching chip surface.
It has been recognised by the inventors that traditional mode will be placed on slide in piece platform, then manually movement is in piece platform, is in being held by
Piece platform bottom is moved, and hand easily encounters the lubricating oil at slide, causes the contamination of chip, cause product qualification rate to decline.This reality
The testboard of example is applied, the shifting in piece platform 70 can be realized by mobile first mobile device 90 or the second mobile device 110
It is dynamic, it is not necessary to directly contact be in piece platform, reduction chip contamination the occurrence of.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
The each technical characteristic all possible combinations applied in example are all described, as long as but lance is not present in the combination of these technical characteristics
Shield, all should be the scope that this specification is recorded.
Embodiment described above only expresses several embodiments of the present invention, its description is more specific and detailed, but not
Therefore the limitation to the scope of the claims of the present invention can be interpreted as.It should be pointed out that come for those of ordinary skill in the art
Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of fixing device of testboard, the testboard includes being used to place the bearing device in piece platform, it is characterised in that
The fixing device includes：
Mobile device；
Vacuum absorption device, in the mobile device；
Attachment device, mechanically connects with the vacuum absorption device, bearing device respectively；
Vacuum tube, mechanically connects with the vacuum absorption device, described true for when vacuum tube is connected with peripheral hardware vacuum source, making
Vacuum is formed between suction adsorption device and the mobile device, so that the vacuum absorption device holds the mobile device, from
And the fixed bearing device, and disconnect in vacuum tube and peripheral hardware vacuum source and during with atmosphere, make the vacuum inhale
Adsorption device is separated with the mobile device, so as to not go to limit the bearing device movement.
2. the fixing device of testboard according to claim 1, it is characterised in that further include：
Vacuum tube control device, is connected with the vacuum tube, for controlling the vacuum tube to disconnect or connect with peripheral hardware vacuum source.
3. the fixing device of testboard according to claim 2, it is characterised in that the vacuum tube control device includes：
Solenoid valve and switch；
The solenoid valve is mechanically connected with the vacuum tube, is electrically connected with the switch, and solenoid valve is controlled by the switch, so that
The disconnection of control and the vacuum tube and the peripheral hardware vacuum source of solenoid valve mechanical connection connects.
4. the fixing device of testboard according to claim 3, it is characterised in that further include connecting wire；The electromagnetism
Valve is electrically connected by the connecting wire with the switch.
5. the fixing device of testboard according to claim 3, it is characterised in that the switch is filled with the connection respectively
Put, the vacuum absorption device mechanically connects；The attachment device is fixed on by the switch with the vacuum absorption device
Together.
6. according to the fixing device of claim 1-5 any one of them testboards, it is characterised in that the vacuum absorption device
For vacuum cup.
7. according to the fixing device of claim 1-5 any one of them testboards, it is characterised in that the attachment device is length
Strip metal plate or strip wood based panel.
8. according to the fixing device of claim 1-5 any one of them testboards, it is characterised in that the mobile device is in water
Square to length and the difference of vacuum absorption device length in the horizontal direction be more than predetermined threshold value.
9. according to the fixing device of claim 1-5 any one of them testboards, it is characterised in that the vacuum absorption device
It is parallel to be arranged in the mobile device, the opposite parallel spacing of the vacuum absorption device and the mobile device is less than preset between
Away from threshold value.
A kind of 10. testboard, it is characterised in that including：
In piece platform；
Bearing device, is in piece platform for support；
First mobile device, below the bearing device, mechanically connects with the bearing device；
First carriage, in first mobile device, for making first mobile device be slided described first
Moved in the horizontal direction on device, so as to drive the bearing device and described be moved in piece platform along the horizontal direction；
Second mobile device, mechanically connects below first mobile device, and with first carriage, so that
First carriage is fixed in second mobile device；
Second carriage, in second mobile device, for making second mobile device vertically move,
So as to driving first carriage to be moved along the vertical direction, so as to drive first mobile device along described vertical
Direction is moved, so as to drive the bearing device and described be moved in piece platform along the vertical direction；And
Such as the fixing device of claim 1-9 any one of them testboards.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711384899.1A CN107942234A (en) | 2017-12-20 | 2017-12-20 | Testboard and its fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711384899.1A CN107942234A (en) | 2017-12-20 | 2017-12-20 | Testboard and its fixing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107942234A true CN107942234A (en) | 2018-04-20 |
Family
ID=61941992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711384899.1A Pending CN107942234A (en) | 2017-12-20 | 2017-12-20 | Testboard and its fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107942234A (en) |
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|---|---|---|---|---|
| JPH0849137A (en) * | 1994-08-02 | 1996-02-20 | Toyota Autom Loom Works Ltd | Vibration-insulating frame of loom |
| JPH10105241A (en) * | 1996-10-01 | 1998-04-24 | Ushio Inc | Stage device |
| KR20060056648A (en) * | 2004-11-22 | 2006-05-25 | 삼성전자주식회사 | Inspecting apparatus and method for semiconductor wafer |
| CN202975075U (en) * | 2012-12-17 | 2013-06-05 | 深圳深爱半导体股份有限公司 | Test probe station and test system for transistor characteristics |
| CN103176299A (en) * | 2013-03-08 | 2013-06-26 | 深圳市华星光电技术有限公司 | Detector and liquid crystal alignment machine |
| CN203888346U (en) * | 2014-06-18 | 2014-10-22 | 珠海市华晶微电子有限公司 | Vacuum adsorption device |
| CN105097633A (en) * | 2015-06-24 | 2015-11-25 | 合肥京东方光电科技有限公司 | Carrying mechanism for offline vacuum adsorption substrate and substrate transferring method |
| CN205300818U (en) * | 2015-12-31 | 2016-06-08 | 陕西理工学院 | Macroarray resistance strain gauges adsorbs fixing device |
| KR101729224B1 (en) * | 2016-08-05 | 2017-04-20 | 세종기술 주식회사 | Rotating Stage equipped with Vacuum Pad having Cushion Function |
| CN207832957U (en) * | 2017-12-20 | 2018-09-07 | 深圳深爱半导体股份有限公司 | Testboard and its fixing device |
-
2017
- 2017-12-20 CN CN201711384899.1A patent/CN107942234A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0849137A (en) * | 1994-08-02 | 1996-02-20 | Toyota Autom Loom Works Ltd | Vibration-insulating frame of loom |
| JPH10105241A (en) * | 1996-10-01 | 1998-04-24 | Ushio Inc | Stage device |
| KR20060056648A (en) * | 2004-11-22 | 2006-05-25 | 삼성전자주식회사 | Inspecting apparatus and method for semiconductor wafer |
| CN202975075U (en) * | 2012-12-17 | 2013-06-05 | 深圳深爱半导体股份有限公司 | Test probe station and test system for transistor characteristics |
| CN103176299A (en) * | 2013-03-08 | 2013-06-26 | 深圳市华星光电技术有限公司 | Detector and liquid crystal alignment machine |
| CN203888346U (en) * | 2014-06-18 | 2014-10-22 | 珠海市华晶微电子有限公司 | Vacuum adsorption device |
| CN105097633A (en) * | 2015-06-24 | 2015-11-25 | 合肥京东方光电科技有限公司 | Carrying mechanism for offline vacuum adsorption substrate and substrate transferring method |
| CN205300818U (en) * | 2015-12-31 | 2016-06-08 | 陕西理工学院 | Macroarray resistance strain gauges adsorbs fixing device |
| KR101729224B1 (en) * | 2016-08-05 | 2017-04-20 | 세종기술 주식회사 | Rotating Stage equipped with Vacuum Pad having Cushion Function |
| CN207832957U (en) * | 2017-12-20 | 2018-09-07 | 深圳深爱半导体股份有限公司 | Testboard and its fixing device |
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