CN107932306B - A kind of novel semiconductor material milling apparatus - Google Patents
A kind of novel semiconductor material milling apparatus Download PDFInfo
- Publication number
- CN107932306B CN107932306B CN201711401990.XA CN201711401990A CN107932306B CN 107932306 B CN107932306 B CN 107932306B CN 201711401990 A CN201711401990 A CN 201711401990A CN 107932306 B CN107932306 B CN 107932306B
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- face
- motor
- rotation chamber
- rotatably assorted
- damping
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
Abstract
The invention discloses a kind of novel semiconductor material milling apparatus, damping mounting rack and grinding body including being fixedly mounted on mobile machine arm subordinate end, telescopic cavity is provided in the damping mounting rack bottom end face, being slidably installed in the telescopic cavity has the grinder body, damping is provided in the damping mounting rack at left and right sides of the telescopic cavity, the first rotation chamber and the second rotation chamber are respectively arranged in lower end surface in the grinder body at left and right sides of wall body, the first rotation chamber and the second rotation chamber extend through the grinding body lower end surface, it is rotatably assorted in the first rotation chamber by rotation axis and eccentric wheel is installed, the rotation axis is rotatably assorted with the grinding body connect and one end power of the separate eccentric wheel is connected with first motor, the first motor outer surface is fixed It is installed in the grinder body in wall body；The present invention effectively increases grinding efficiency.
Description
Technical field
The present invention relates to grinding technique field, specifically a kind of novel semiconductor material milling apparatus.
Background technique
Semiconductor material is a kind of material with semiconduction energy, can be used to make semiconductor devices and Machine Tool Circuit
Electronic material etc., very widely used, semiconductor material needs to carry out at grinding its surface during the manufacturing
Reason, at present to the milling apparatus of semiconductor material, grinding efficiency is low, and grinding head is not easy to replace.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of novel semiconductor material milling apparatus, are able to solve
The problems in above-mentioned present technology.
The present invention is achieved through the following technical solutions: the novel semiconductor material grinding of one kind of the invention is set
It is standby, damping mounting rack and grinding body including being fixedly mounted on mobile machine arm subordinate end, damping mounting rack bottom
Telescopic cavity is provided in end face, being slidably installed in the telescopic cavity has the grinder body, at left and right sides of the telescopic cavity
The damping mounting rack in be provided with damping, be respectively set in the lower end surface in the grinder body at left and right sides of wall body
There are the first rotation chamber and the second rotation chamber, the first rotation chamber and the second rotation chamber extend through the grinding body
Lower end surface is rotatably assorted by rotation axis and is equipped with eccentric wheel in the first rotation chamber, the rotation axis and the grinding
Body, which is rotatably assorted, connection and is connected with first motor, the first motor appearance far from one end power of the eccentric wheel
Face is fixedly installed in the grinder body in wall body, and connection is equipped with a left side on the right side of the first rotation chamber on the downside of the rotation axis
Right rail, being slidably installed in the left and right sliding slot has attaching cylinder, and the attaching cylinder extends downwardly and is pierced by described grind
Grinding machine body lower end surface, left and right extends and is equipped with dovetail groove, the swallow in wall body in the grinder body on the upside of the left and right sliding slot
Being slidably installed in stern notch has dovetails, and the dovetails bottom end face is fixedly connected with the attaching cylinder top end surface,
Press is fitted with the first top pressure spring, attaching cylinder lower right side in the left and right sliding slot on the right side of the attaching cylinder
End face is fixedly installed with hollow sleeve, and the second motor, second electricity are fixedly installed in the second rotation chamber inner left wall
Machine right side power is connected with active runner, and extending end and the second rotation chamber are rotatably assorted company on the right side of the active runner
It connects, the grinding body lower right side end face is fixedly installed with installing cylinder, is rotatably assorted in the installing cylinder lower-left side end face
Driven rotary column is installed, transmission is fitted with feed belt between the driven rotary column and the active runner, described driven
Inner spline groove is provided in rotary column left end face, being slidably installed in the inner spline groove has male splined shaft, the external splines
Axis left end face is fixedly installed with toggle arm, and the toggle arm left end face is fixedly installed with abrasive wheel, the abrasive wheel left side
End face is fixedly installed with attaching bar, and the attaching bar is rotatably assorted with the hollow sleeve inner wall and connect, the toggle arm with
Toggle mechanism is additionally provided between the grinding body, the outside of the first motor is additionally provided with protective device.
Preferably technical solution, the toggle mechanism include the oblique cam that the toggle arm outer surface circumferential direction is arranged in
And it is fixedly mounted on the telescopic supporting rod of the grinding body lower end surface, the telescopic supporting rod bottom end face, which is rotatably assorted, to be set
It is equipped with runner, the runner is loaded in the oblique cam inner wall and is rotatably assorted with the toggle arm and connect.
Preferably technical solution, the damping include in being symmetrical set at left and right sides of the telescopic cavity
Damping chamber in wall, being slidably installed in the damping chamber has slide guide column, pushes up in the damping chamber of slide guide column upper end
Press-fit is equipped with the second top pressure spring, and end face is fixed at left and right sides of the slide guide column inner side end and the grinding body connects
It connects.
Preferably technical solution, the protective device include noise reducing plate and desuperheat piece, and the noise reducing plate is arranged in institute
It states the left end of first motor and right end and is fixedly connected with the first motor, the first motor is arranged in the desuperheat piece
It front-end and back-end and is fixedly connected with the first motor, the outside of second motor is also correspondingly provided with the protection dress
It sets.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, by setting in damping mounting rack bottom end face
It is equipped with telescopic cavity, being slidably installed in telescopic cavity has grinding body, is provided in the damping mounting rack at left and right sides of telescopic cavity
Damping is respectively arranged with the first rotation chamber and the second rotation chamber in the lower end surface in grinder body at left and right sides of wall body,
First rotation chamber and the second rotation chamber extend through grinding body lower end surface, are rotatably assorted in the first rotation chamber by rotation axis
Eccentric wheel is installed, rotation axis is rotatably assorted with grinding body connect and one end power of separate eccentric wheel is connected with first
Motor, first motor outer surface are fixedly installed in connection on the right side of the first rotation chamber in grinder body in wall body, on the downside of rotation axis
Equipped with left and right sliding slot, being slidably installed in the sliding slot of left and right has attaching cylinder, and attaching cylinder extends downwardly and is pierced by grinding body
Lower end surface, left and right extends and is equipped with dovetail groove in wall body in the grinder body on the upside of the sliding slot of left and right, is slidably installed in dovetail groove
There are dovetails, dovetails bottom end face is fixedly connected with attaching cylinder top end surface, is pushed up in the left and right sliding slot on the right side of attaching cylinder
Press-fit is equipped with the first top pressure spring, and attaching cylinder bottom right side end face is fixedly installed with hollow sleeve, the second rotation chamber left side
The second motor is fixedly installed in inner wall, the second motor right side power is connected with active runner, extending end on the right side of active runner
It is rotatably assorted and connect with the second rotation chamber, grinding body lower right side end face is fixedly installed with installing cylinder, installs cylinder lower left side
It being rotatably assorted in end face and driven rotary column is installed, transmission is fitted with feed belt between driven rotary column and active runner, from
Inner spline groove is provided in turn column left end face, being slidably installed in inner spline groove has male splined shaft, on the left of male splined shaft
End face is fixedly installed with toggle arm, and toggle arm left end face is fixedly installed with abrasive wheel, and abrasive wheel left end face is fixedly installed with
Attaching bar, attaching bar are rotatably assorted with hollow sleeve inner wall and connect, and are additionally provided with the machine of stirring between toggle arm and grinding body
Structure effectively increases so that can swing while abrasive wheel carries out rotation grinding to semiconductor material carries out grinding work
Grinding efficiency reduces milling time, and effectively prevents abrasive wheel and half with certain damping effect in grinding
Conductor material power is excessive.
Detailed description of the invention
The present invention is described in detail by following specific embodiments and drawings for ease of explanation,.
Fig. 1 is overall structure diagram inside the novel semiconductor material milling apparatus of one kind of the invention；
Fig. 2 is the structural schematic diagram of protective device of the invention.
Specific embodiment
As Figure 1-Figure 2, the novel semiconductor material milling apparatus of one kind of the invention, including it is fixedly mounted on activity
The damping mounting rack 40 of 30 lower end of mechanical arm hand and grinding body 50 are provided in 40 bottom end face of damping mounting rack and stretch
Contracting chamber 410, being slidably installed in the telescopic cavity 410 has the grinder body 50, the institute of 410 left and right sides of telescopic cavity
It states and is provided with damping in damping mounting rack 40, be respectively set in the lower end surface at left and right sides of grinding 50 inner wall of body
There are the first rotation chamber 537 and the second rotation chamber 543, the first rotation chamber 537 and the second rotation chamber 543 extend through
50 lower end surface of grinding body is rotatably assorted by rotation axis 540 and is equipped with eccentric wheel in the first rotation chamber 537
536, the rotation axis 540 is rotatably assorted with the grinding body 50 connect and one end power of the separate eccentric wheel 536 is matched
Conjunction is connected with first motor 541, and 541 outer surface of first motor is fixedly installed in 50 inner wall of grinding body, institute
It states connection on the right side of the first rotation chamber 537 of 540 downside of rotation axis and is equipped with left and right sliding slot 532, slided in the left and right sliding slot 532
Dynamic to be fitted with attaching cylinder 531, the attaching cylinder 531 extends downwardly and is pierced by 50 lower end surface of grinding body, institute
Left and right in 50 inner wall of grinding body of 532 upside of left and right sliding slot is stated to extend equipped with dovetail groove 534, the dovetail groove 534
In be slidably installed and have dovetails 535,535 bottom end face of dovetails is fixed with 531 top end surface of attaching cylinder
It connects, press is fitted with the first top pressure spring 533 in the left and right sliding slot 532 on 531 right side of attaching cylinder, described
531 bottom right side end face of attaching cylinder is fixedly installed with hollow sleeve 530, fixed peace in the second rotation 543 inner left wall of chamber
Equipped with the second motor 542,542 right side power of the second motor is connected with active runner 510,510 right side of active runner
Extending end is rotatably assorted with the second rotation chamber 543 and connect, and the 50 bottom right side end face of grinding body is fixedly installed with dress
If cylinder 514, it is rotatably assorted in the 514 lower-left side end face of installing cylinder and driven rotary column 515 is installed, the driven rotary column
Transmission is fitted with feed belt 511 between 515 and the active runner 510, sets in driven 515 left end face of rotary column
It is equipped with inner spline groove 520, being slidably installed in the inner spline groove 520 has male splined shaft 521, and the male splined shaft 521 is left
Side end face is fixedly installed with toggle arm 522, and 522 left end face of toggle arm is fixedly installed with abrasive wheel 524, the abrasive wheel
524 left end faces are fixedly installed with attaching bar 525, and the attaching bar 525 and 530 inner wall of hollow sleeve are rotatably assorted company
It connects, toggle mechanism 522, the outside of the first motor 541 is additionally provided between the toggle arm 522 and the grinding body 50
It is additionally provided with protective device.
Valuably, the toggle mechanism includes that the oblique cam 523 of 522 outer surface of the toggle arm circumferential direction is arranged in and consolidates
Dingan County is rotatably assorted mounted in the telescopic supporting rod 512 for grinding 50 lower end surface of body, 512 bottom end face of telescopic supporting rod
Be provided with runner 513, the runner 513 be loaded in 523 inner wall of oblique cam and with 522 company of being rotatably assorted of toggle arm
It connects, so that can swing grinding, increase and grind when the abrasive wheel 524 carries out rotation grinding work to semiconductor material
Grind efficiency.
Valuably, the damping includes being symmetrical set subtracting in 410 left and right sides inner wall of telescopic cavity
Chamber 412 is shaken, being slidably installed in the damping chamber 412 has slide guide column 413, the damping chamber of 413 upper end of slide guide column
Press is fitted with the second top pressure spring 411,413 inner side end of slide guide column and the grinding body 50 or so in 412
Both sides of the face are fixedly connected, so as to, with certain cushion effect, prevent abrasive wheel when abrasive wheel 524 carries out grinding work
524 is excessive with semiconductor material contact force.
Valuably, the protective device includes noise reducing plate 5411 and desuperheat piece 5412, and the noise reducing plate 5411 is arranged in institute
It states the left end of first motor 541 and right end and is fixedly connected with the first motor 541, the desuperheat piece 5412 is arranged described
It the front-end and back-end of first motor 541 and is fixedly connected with the first motor 541, the desuperheat piece 5412 is to absorb and dissipate
The heat sending out first motor 541 described and generating at runtime, the noise reducing plate 5411 are being transported to reduce the first motor 541
Shaking force of the shaking force generated when row to prevent the first motor 541 from generating at runtime is excessive and leads to the grinding
Body 50 is shaken, and the outside of second motor 542 is also correspondingly provided with the protective device.
When needing replacing abrasive wheel 524, drives band movable eccentric wheel 536 to rotate 180 degree by first motor 541, make partially
Upward, i.e., eccentric wheel 536 and the attaching cylinder 531 are detached from the partially long section of heart wheel 536, to pass through the first top pressure spring 533
Pressure on top surface slides attaching cylinder 531 to the left, so that hollow sleeve 530 and the attaching bar 525 be made to be detached from, then, will stretch
Adjusting rod 512 is pulled upwardly until runner 513 and oblique cam 523 are detached from, under dismantling abrasive wheel 524.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, by setting in damping mounting rack bottom end face
It is equipped with telescopic cavity, being slidably installed in telescopic cavity has grinding body, is provided in the damping mounting rack at left and right sides of telescopic cavity
Damping is respectively arranged with the first rotation chamber and the second rotation chamber in the lower end surface in grinder body at left and right sides of wall body,
First rotation chamber and the second rotation chamber extend through grinding body lower end surface, are rotatably assorted in the first rotation chamber by rotation axis
Eccentric wheel is installed, rotation axis is rotatably assorted with grinding body connect and one end power of separate eccentric wheel is connected with first
Motor, first motor outer surface are fixedly installed in connection on the right side of the first rotation chamber in grinder body in wall body, on the downside of rotation axis
Equipped with left and right sliding slot, being slidably installed in the sliding slot of left and right has attaching cylinder, and attaching cylinder extends downwardly and is pierced by grinding body
Lower end surface, left and right extends and is equipped with dovetail groove in wall body in the grinder body on the upside of the sliding slot of left and right, is slidably installed in dovetail groove
There are dovetails, dovetails bottom end face is fixedly connected with attaching cylinder top end surface, is pushed up in the left and right sliding slot on the right side of attaching cylinder
Press-fit is equipped with the first top pressure spring, and attaching cylinder bottom right side end face is fixedly installed with hollow sleeve, the second rotation chamber left side
The second motor is fixedly installed in inner wall, the second motor right side power is connected with active runner, extending end on the right side of active runner
It is rotatably assorted and connect with the second rotation chamber, grinding body lower right side end face is fixedly installed with installing cylinder, installs cylinder lower left side
It being rotatably assorted in end face and driven rotary column is installed, transmission is fitted with feed belt between driven rotary column and active runner, from
Inner spline groove is provided in turn column left end face, being slidably installed in inner spline groove has male splined shaft, on the left of male splined shaft
End face is fixedly installed with toggle arm, and toggle arm left end face is fixedly installed with abrasive wheel, and abrasive wheel left end face is fixedly installed with
Attaching bar, attaching bar are rotatably assorted with hollow sleeve inner wall and connect, and are additionally provided with the machine of stirring between toggle arm and grinding body
Structure effectively increases so that can swing while abrasive wheel carries out rotation grinding to semiconductor material carries out grinding work
Grinding efficiency reduces milling time, and effectively prevents abrasive wheel and half with certain damping effect in grinding
Conductor material power is excessive.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
The change or replacement expected without creative work, should be covered by the protection scope of the present invention.Therefore, of the invention
Protection scope should be determined by the scope of protection defined in the claims.
Claims (4)
1. a kind of novel semiconductor material milling apparatus, the damping mounting rack including being fixedly mounted on mobile machine arm subordinate end
And body is ground, it is provided with telescopic cavity in the damping mounting rack bottom end face, being slidably installed in the telescopic cavity has
The grinding body is provided with damping, the grinding body in the damping mounting rack at left and right sides of the telescopic cavity
The first rotation chamber and the second rotation chamber, the first rotation chamber and institute are respectively arranged in lower end surface at left and right sides of inner wall
It states the second rotation chamber and extends through the grinding body lower end surface, be rotatably assorted peace in the first rotation chamber by rotation axis
Equipped with eccentric wheel, the rotation axis with it is described grinding body be rotatably assorted connect and far from the eccentric wheel one end power cooperation
It is connected with first motor, the first motor outer surface is fixedly installed in the grinder body in wall body, under the rotation axis
Connection is equipped with left and right sliding slot on the right side of the first rotation chamber of side, and being slidably installed in the left and right sliding slot has attaching cylinder,
The attaching cylinder extends downwardly and is pierced by the grinding body lower end surface, in the grinder body on the upside of the left and right sliding slot
Left and right, which extends, in wall body is equipped with dovetail groove, and being slidably installed in the dovetail groove has dovetails, the dovetails bottom end face
It is fixedly connected with the attaching cylinder top end surface, presses and be fitted in the left and right sliding slot on the right side of the attaching cylinder
First top pressure spring, attaching cylinder bottom right side end face are fixedly installed with hollow sleeve, the second rotation chamber inner left wall
It is inside fixedly installed with the second motor, the second motor right side power is connected with active runner, extends on the right side of the active runner
End is rotatably assorted with the second rotation chamber and connect, and the grinding body lower right side end face is fixedly installed with installing cylinder, institute
It states to be rotatably assorted in installing cylinder lower-left side end face and driven rotary column is installed, passed between the driven rotary column and the active runner
It is dynamic to be fitted with feed belt, it is provided with inner spline groove in the driven rotary column left end face, is slided in the inner spline groove
It is fitted with male splined shaft, the male splined shaft left end face is fixedly installed with toggle arm, and the toggle arm left end face is solid
Dingan County is equipped with abrasive wheel, and the abrasive wheel left end face is fixedly installed with attaching bar, in the attaching bar and the hollow sleeve
Wall body is rotatably assorted connection, is additionally provided with toggle mechanism between the toggle arm and the grinding body, the first motor
Outside is additionally provided with protective device.
2. the novel semiconductor material milling apparatus of one kind according to claim 1, it is characterised in that: the toggle mechanism
Including the oblique cam of the toggle arm outer surface circumferential direction is arranged in and is fixedly mounted on the flexible of the grinding body lower end surface
Support rod, the telescopic supporting rod bottom end face, which is rotatably assorted, is provided with runner, and the runner is loaded on the oblique cam inner wall
In and be rotatably assorted and connect with the toggle arm.
3. the novel semiconductor material milling apparatus of one kind according to claim 1, it is characterised in that: the damping
Including the damping chamber being symmetrical set at left and right sides of the telescopic cavity in inner wall, being slidably installed in the damping chamber has
Slide guide column, press is fitted with the second top pressure spring in the damping chamber of slide guide column upper end, on the inside of the slide guide column
End face is fixedly connected with end face at left and right sides of the grinding body.
4. the novel semiconductor material milling apparatus of one kind according to claim 1, it is characterised in that: the protective device
Including noise reducing plate and desuperheat piece, left end and the right end and solid with the first motor of the first motor is arranged in the noise reducing plate
Fixed connection, the desuperheat piece is arranged in the front-end and back-end of the first motor and is fixedly connected with the first motor, described
The outside of second motor is also correspondingly provided with the protective device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711401990.XA CN107932306B (en) | 2017-12-22 | 2017-12-22 | A kind of novel semiconductor material milling apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711401990.XA CN107932306B (en) | 2017-12-22 | 2017-12-22 | A kind of novel semiconductor material milling apparatus |
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| Publication Number | Publication Date |
|---|---|
| CN107932306A CN107932306A (en) | 2018-04-20 |
| CN107932306B true CN107932306B (en) | 2018-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711401990.XA Active CN107932306B (en) | 2017-12-22 | 2017-12-22 | A kind of novel semiconductor material milling apparatus |
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| CN (1) | CN107932306B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107975850A (en) * | 2017-12-31 | 2018-05-01 | 王关根 | A kind of novel oil smoke air exhauster exhaust gas processing device |
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|---|---|---|---|---|
| JPS5020315A (en) * | 1973-06-25 | 1975-03-04 | ||
| CN205888797U (en) * | 2016-08-02 | 2017-01-18 | 浙江晶茂科技股份有限公司 | Solar cell back sheet apparatus for producing grinding machanism |
| CN206047875U (en) * | 2016-09-09 | 2017-03-29 | 厦门芯光润泽科技有限公司 | A kind of moveable economizing type semiconductor grinding device |
| CN206154083U (en) * | 2016-09-09 | 2017-05-10 | 厦门芯光润泽科技有限公司 | Energy -conserving semiconductor grinder of intelligence |
-
2017
- 2017-12-22 CN CN201711401990.XA patent/CN107932306B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5020315A (en) * | 1973-06-25 | 1975-03-04 | ||
| CN205888797U (en) * | 2016-08-02 | 2017-01-18 | 浙江晶茂科技股份有限公司 | Solar cell back sheet apparatus for producing grinding machanism |
| CN206047875U (en) * | 2016-09-09 | 2017-03-29 | 厦门芯光润泽科技有限公司 | A kind of moveable economizing type semiconductor grinding device |
| CN206154083U (en) * | 2016-09-09 | 2017-05-10 | 厦门芯光润泽科技有限公司 | Energy -conserving semiconductor grinder of intelligence |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107932306A (en) | 2018-04-20 |
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Effective date of registration: 20181105 Address after: 221422 Ma Chang village, Tang Dian Town, Xinyi City, Xuzhou, Jiangsu Applicant after: XUZHOU JIXING NEW MATERIAL CO.,LTD. Address before: 442000 No. 4, Che Cheng West Road, Zhang Wan District, Shiyan, Hubei. Applicant before: Zhu Yulin |
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Address after: No. 129, Shanghai South Road, Xinyi Economic Development Zone, Xuzhou, Jiangsu 221422 Patentee after: Xuzhou Aokejixing New Material Co.,Ltd. Address before: 221422 Ma Chang village, Tang Dian Town, Xinyi City, Xuzhou, Jiangsu Patentee before: XUZHOU JIXING NEW MATERIAL CO.,LTD. |
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