CN107921480B - 具有增加的寿命的电容式微机械超声换能器 - Google Patents

具有增加的寿命的电容式微机械超声换能器 Download PDF

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Publication number
CN107921480B
CN107921480B CN201680046971.7A CN201680046971A CN107921480B CN 107921480 B CN107921480 B CN 107921480B CN 201680046971 A CN201680046971 A CN 201680046971A CN 107921480 B CN107921480 B CN 107921480B
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China
Prior art keywords
ultrasound transducer
micromachined ultrasound
micromachined
integrated circuit
transducer array
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CN201680046971.7A
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Chinese (zh)
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CN107921480A (zh
Inventor
B·J·萨沃德
R·E·戴维森
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/76—Medical, dental

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Medical Informatics (AREA)
  • Gynecology & Obstetrics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
CN201680046971.7A 2015-08-11 2016-08-04 具有增加的寿命的电容式微机械超声换能器 Active CN107921480B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562203531P 2015-08-11 2015-08-11
US62/203,531 2015-08-11
EP15183228 2015-09-01
EP15183228.4 2015-09-01
PCT/EP2016/068676 WO2017025438A1 (en) 2015-08-11 2016-08-04 Capacitive micromachined ultrasonic transducers with increased lifetime

Publications (2)

Publication Number Publication Date
CN107921480A CN107921480A (zh) 2018-04-17
CN107921480B true CN107921480B (zh) 2020-08-11

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Country Status (5)

Country Link
US (1) US11097312B2 (https=)
EP (1) EP3334538A1 (https=)
JP (1) JP6767474B2 (https=)
CN (1) CN107921480B (https=)
WO (1) WO2017025438A1 (https=)

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WO2020082256A1 (zh) * 2018-10-24 2020-04-30 深圳市汇顶科技股份有限公司 超声换能器及其制造方法
CN110508474B (zh) * 2019-07-31 2020-10-27 西安交通大学 一种混合驱动mut单元结构及其参数化激励方法
WO2021050853A1 (en) 2019-09-12 2021-03-18 Exo Imaging, Inc. Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture
CN115921260A (zh) * 2021-08-13 2023-04-07 上海新微技术研发中心有限公司 基于直流偏置的压电微机械超声换能器系统及调节方法
JP7553054B2 (ja) * 2021-10-21 2024-09-18 硅系半導体科技有限公司 音響誘導型半導体素子及び音響素子集積回路
CN114950925B (zh) * 2022-06-06 2023-05-23 清华大学 柔性可延展微机电系统超声阵列及医用超声诊断设备
CN121540271B (zh) * 2026-01-16 2026-03-20 中国海洋大学 一种差分式串联水声芯片阵列结构及芯片

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JP6767474B2 (ja) 2020-10-14
WO2017025438A1 (en) 2017-02-16
US11097312B2 (en) 2021-08-24
EP3334538A1 (en) 2018-06-20
CN107921480A (zh) 2018-04-17
JP2018530196A (ja) 2018-10-11
US20180229268A1 (en) 2018-08-16

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