CN107918184A - Non-perpendicular autofocus system and corresponding optical instrument - Google Patents
Non-perpendicular autofocus system and corresponding optical instrument Download PDFInfo
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- CN107918184A CN107918184A CN201610880380.1A CN201610880380A CN107918184A CN 107918184 A CN107918184 A CN 107918184A CN 201610880380 A CN201610880380 A CN 201610880380A CN 107918184 A CN107918184 A CN 107918184A
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
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Abstract
The presently disclosed embodiments is related to a kind of non-perpendicular formula autofocus system and corresponding optical instrument, which includes light source；Incident module, is configured as receiving the light from light source transmitting, and the light received is focused on sample；Module is emitted, is configured as receiving the light from sample reflection, and the light received is focused on the target surface of optical detector；And optical detector, it is configured as that the optical signal converted electrical number of the target surface will be focused on, and handled for calculating, the information of the focal position of the incident module to be calculated and determined out automatically；Wherein, the angle from the incident module to the input path of the sample and from the sample to the emitting light path and the surface normal of the sample of the outgoing module is not equal to zero.The non-perpendicular formula autofocus system of the disclosure advantageously extends the design space of existing optical instrument, and realizes the accurate focusing of transparent sample.
Description
Technical field
Various embodiments of the present invention are related to optical field, relate more specifically to a kind of non-perpendicular autofocus system and phase
The optical instrument answered, wherein optical instrument especially include spectroscopic ellipsometers (Spectroscopic Ellipsometry, SE).
Background technology
As the example of the optical instrument including focusing system, spectroscopic ellipsometers are a kind of for detecting film thickness, light
Learn the constant (optical measuring apparatus of refractive index n, extinction coefficient k) and material microstructure.Due to lossless, non-contact, no
Need vacuum, without reference sample the features such as so that spectroscopic ellipsometers are manufactured in semiconductor chip, optical coating and material analysis
All it is widely used Deng field.
In order to shorten detection time, spectroscopic ellipsometers are all realized with a set of automatic (Auto Focus, AF) system that focuses on
The fast positioning of sample.Autofocus system is a kind of the signals such as power, heat, light, electricity or sound are converted into electric signal to be handled
The system of focal position is calculated and determined out automatically afterwards.Autofocus system for spectroscopic ellipsometers is generally all using reflective
The light that light path system, i.e. light source are sent is after incident module focuses on sample surfaces reflection again by outgoing module finally by light
Detector receives.
At present, in its input path of the autofocus system for spectroscopic ellipsometers and emitting light path all perpendicular to sample table
Face (i.e. input path and emitting light path overlap), and all select the microcobjective of high power large-numerical aperture saturating as focusing on and collimating
Mirror.However, in some cases, samples vertical direction does not have space to be laid out this rectilinear autofocus system, and
The reflected light in second face of sample may influence measurement result when measuring transparent sample, and then can not correctly focus on focus position
Put.Therefore, a kind of new auto-focusing optical system is proposed based on problem above.
The content of the invention
The purpose of the disclosure is to provide a kind of new non-perpendicular formula autofocus system (Non-Vertical Auto
Focus, NVAF) so that can at least overcome or alleviate the technical problem of the space layout in the presence of the prior art, and
Measure the realistic problem that can not be correctly focused on during transparent sample.
According to the first aspect of the disclosure, there is provided a kind of non-perpendicular formula autofocus system, it includes light source；Incident mould
Block, is configured as receiving the light from light source transmitting, and the light received is focused on sample；Be emitted module, by with
The light received from sample reflection is set to, and the light received is focused on the target surface of optical detector；And optical detection
Device, is configured as focusing on the optical signal converted electrical number of the target surface, and is handled for calculating, is calculated and true with automatic
Make the information of the focal position of the incident module；Wherein, from the incident module to the input path of sample and from sample
The angle of emitting light path and the surface normal of the sample to outgoing module is not equal to zero.
By using the information of the focal position of above-mentioned incident module or the sample of the focal position relative to incident module
Product positional information, the autofocus system of the disclosure can adjust the focal position of incident module to sample surfaces or drive sample
Product surface to the focal position, so as to fulfill automatic focusing function, and due to the input path from incident module to sample and
It is not equal to zero from sample to the angle of the emitting light path of outgoing module and the surface normal of sample, then the non-perpendicular formula is gathered automatically
The space layout of burnt system makes moderate progress relative to the space layout of the prior art, and can realize the accurate focusing of transparent sample.
When using fiber guides formula light source, the light source gone out by fiber optic conduction can be collimated into through small holes and collimation lens
Directional light, then focuses on sample surfaces by condenser lens；Light after sample surfaces reflect is accurate by collimation lens again
After straight 4 quadrant detector target surface is focused on through condenser lens；And when using parallel light emergence formula light source (such as laser),
Extender lens and collimation lens can be used to focus the light into sample surfaces, then image in position sensor via imaging len
Target surface on, the adjustment of light path can be better achieved in this light path design, and is easy to mechanical erection fixed laser, realize succinct
Compact apparatus structure.
It should be noted that include collimation lens, condenser lens, extender lens, imaging len etc. involved by this paper
Lens can be the single lens or lens group for realizing identical function.Unless otherwise stated, the collimation mentioned in the disclosure
Lens and condenser lens respectively cover both single lens and lens group including multiple lens.
According to the second aspect of the disclosure, above-mentioned non-perpendicular formula autofocus system can be applied to optical instrument, especially
It is in spectroscopic ellipsometers.Optical instrument (such as spectroscopic ellipsometers) phase including the non-perpendicular formula autofocus system of the disclosure
Can have more wide in range design space and layout for existing focusing system.
Brief description of the drawings
In the accompanying drawings, similar/identical reference numeral is typically opening through different views and refers to similar/identical part.It is attached
Figure is not necessarily to scale, but usually emphasizes the diagram to the principle of the present invention.In the accompanying drawings：
Fig. 1 schematically shows the light path principle of the non-perpendicular formula autofocus system according to the presently disclosed embodiments
Figure；
Fig. 2 schematically shows the layout of the first embodiment of the non-perpendicular formula autofocus system according to the disclosure
Figure；
Fig. 3 A schematically show four-quadrant when being in focal position according to the sample of first embodiment of the present disclosure and visit
Survey the light distribution on device；
Four-quadrant is visited when Fig. 3 B schematically show the sample off-focal position according to first embodiment of the present disclosure
Survey the light distribution on device；
Fig. 4 schematically shows the layout of the second embodiment of the non-perpendicular formula autofocus system according to the disclosure
Figure；
Fig. 5 A schematically show position sensing when being in focal position according to the sample of second embodiment of the present disclosure
Facula position on device；And
Position sensing when Fig. 5 B schematically show the sample off-focal position according to second embodiment of the present disclosure
Facula position on device.
Specific embodiment
Each embodiment of the disclosure is described in detail below with reference to attached drawing.One or more examples of embodiment
As shown by attached drawing.Embodiment is provided by the elaboration of the disclosure, and is not intended as the limitation to the disclosure.For example,
It may be used to generate in another embodiment as the feature shown or described by the part of one embodiment another
Further embodiment.The disclosure is intended to include belonging to these and other modifications and variations of disclosure scope and spirit.
In addition, in the disclosure, term " first ", " second " are only used for description purpose, and it is not intended that instruction or dark
Show relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, " first ", the feature of " second " are defined
It can express or implicitly include at least one this feature.In the description of the disclosure, " multiple " are meant that at least two,
Such as two, three etc., unless otherwise specifically defined.For attached drawing, the term of directionality, such as " on ", " under ",
"left", "right", "front", "rear" etc., is used with reference to the orientation of described attached drawing.Due to the group of embodiment of the disclosure
Part can be implemented in many ways, these directional terminologies are to be for the purpose of illustration, rather than the purpose of limitation.Therefore,
Following specific embodiment is not used as the meaning of limitation, and the scope of the present disclosure is limited by appended claims
It is fixed.
Fig. 1 schematically shows the light path principle of the non-perpendicular formula autofocus system according to the presently disclosed embodiments
Figure.The non-perpendicular formula autofocus system of the disclosure can be particularly applied in the optical instrument of such as spectroscopic ellipsometers, from
And provide improved design space or layout to optical instrument.
As shown in Figure 1, non-perpendicular formula autofocus system mainly includes light source 10, incident module 20,30 and of outgoing module
40 4 parts of optical detector.
Light source 10, can be broad spectrum light source or such as single-wavelength light depending on design requirement and actual conditions
The narrow spectroscopic light source in source.If classified according to the emission mode of light source, light source 10 can also be fiber guides formula light source or put down
Row outgoing formula light source.Wherein, fiber guides formula light source, i.e. light source are exported by optical fiber；In non-perpendicular formula autofocus system application
In the case of the optical instrument of such as spectroscopic ellipsometers, which can be derived from the light that spectroscopic ellipsometers carry
Source (such as xenon source) is simultaneously exported by optical fiber；And exiting parallel formula light source may, for example, be laser.
Incident module 20, is configured as receiving the light launched from light source 10, and the light received is focused on sample S
On.For example, incident module 20 light that light source 10 is emitted can be collimated into directional light then refocusing in sample surfaces or tested
Face.Incident module role is that the light that light source is sent is passed through collimation and/or focuses on the tested surface of sample.Incident module
Design it is different according to the actual conditions of light source.If light source is fiber guides formula light source, such as from xenon source or
Person is coupled with the laser of optical fiber, then incident module can be made of aperture, collimation lens and condenser lens；If light source is all
Such as the exiting parallel formula light source of laser, then incident module can include extender lens and condenser lens.
Module 30 is emitted, is configured as receiving the light from sample S reflections, and light is focused on or be imaged onto by the light received
On the target surface of detector 40.For example, the light after sample surfaces or tested surface reflection can finally be focused on light by outgoing module 30
On the target surface of detector 40.It is emitted module because of the difference of optical detector operating mode and difference.Optical detector mainly has two
Kind, one kind is 4 quadrant detector (Quadrant Photodiode, QP), and another kind is position sensor (Position
Sensitive Device, PSD).4 quadrant detector is selected to require not being very high to the optical aberration control for being emitted module, but
Its working range is smaller.And although position sensor working range is bigger, it controls the optical aberration for being emitted module
It is more demanding.That detector is specifically selected, measurement selection need to be carried out according to actual conditions.If selecting 4 quadrant detector,
The spot size for then requiring to be irradiated to by outgoing module on detector is the half (grade) of diameter detector；If selection
Position sensor, then the spot size that requirement is irradiated on detector is as small as possible, and this requires control is emitted the various light of module
Aberration is learned, makes it minimum.
The optical parameter of included optical element can become depending on actual conditions in incident module and outgoing module
Change.For example, in the situation of fiber guides formula light source, in certain embodiments, the core diameter of optical fiber can be more than 100um (such as
300um), numerical aperture NA can be more than 0.18 (such as 0.23), and can include the fibre-optical splice of such as SMA905；Aperture
Diameter can between 50um-200um (such as 100um), and cannot be more than optical fiber core diameter.In certain embodiments, enter
The collimation lens for penetrating module can be infinity flat field microcobjective, and such as parfocal distance is that 4 times of infinity flat fields of 45mm are shown
Micro mirror；The condenser lens of incident module can be single element lens or lens group, such as focal length 25mm, the lens of numerical aperture 0.12
Or lens group, the lens group are, for example, the apochromatic lens group of visible light wave range.In certain embodiments, it is emitted the standard of module
Straight lens can be single element lens or lens group, such as focal length 25mm, the lens of numerical aperture 0.12 or lens group, the lens group
The e.g. apochromatic lens group of visible light wave range.In addition, in certain embodiments, being emitted the condenser lens of module can be
The cemented doublet being made of two kinds of glass materials of BK7 and F5.
Optical detector 40, is configured as that the optical signal converted electrical number of target surface will be focused on, and is handled for calculating, with
The information of the automatic focal position that incident module 20 is calculated and determined out, or the focal position relative to the incident module
Sample position information.Optical detector 40 can be adapted for any detector for detecting above-mentioned focal position, include but not limited to four
Quadrant detector and position sensor.When optical detector is 4 quadrant detector, its photosensitive region can be circle, such as directly
Footpath is the circle of 5mm.
In addition, from incident module to the input path of sample and from sample to outgoing module emitting light path in principle according to
The relation that incidence angle is equal to the angle of emergence is arranged.In this case, input path and emitting light path and sample surfaces normal
Angle be typically larger than 45 degree, such as can be designed to be 67 °, but in other embodiments, other angles are also
Feasible.
Further, the autofocus system of the disclosure can also include driving unit (not shown), which can
Sample tested surface is driven to focal position according to the focal position that optical detector determines.
Fig. 2 schematically shows the layout of the first embodiment of the non-perpendicular formula autofocus system according to the disclosure
Figure.As an example, the first embodiment corresponds to the situation that light source 10 is configured as fiber guides formula light source.
Exported as shown in Fig. 2, light source 10 can be configured as via optical fiber 101, light source 10 is for example connect by optical fiber at this time
Head (such as SMA905, is not shown) is connected to wide spectrum or the narrow spectroscopic light source that optical instrument carries.Via derived from optical fiber 101
Light is collimated into directional light via aperture 201 and collimation lens 202 and is normally incident in condenser lens 203, is focused on by condenser lens 203
Light beam oblique incidence in horizontal positioned sample S surfaces, the light after being reflected through sample S surfaces is incident (for example vertical incidence)
In collimation lens 301, collimation lens 301 collimate the light into directional light then incident (for example vertical incidence) in condenser lens 302,
Condenser lens 302 is by parallel light focusing on the target surface of the optical detector 401 of such as 4 quadrant detector.
In order to show the principle of 4 quadrant detector, Fig. 3 A and Fig. 3 B schematically show the first reality according to the disclosure
Apply the light distribution on 4 quadrant detector when the sample of example is in focal position and off-focal position.
If sample is in focal position, the schematic institutes of light distribution such as Fig. 3 A on 401 target surface of 4 quadrant detector
Show, the light intensity value being irradiated on I, II quadrant and III, IV quadrant is equal i.e.：A+B=C+D, wherein A, B, C, D represent to shine respectively
It is mapped to the light intensity value of I, II, III, IV quadrant on 4 quadrant detector 401.If sample off-focal position, four-quadrant is visited
The no longer equal i.e. A+B ≠ C+D of light intensity value on I, II quadrant and III, IV quadrant on device 401 is surveyed, as schematically illustrated in fig. 3b.
4 quadrant detector 401 can be using normalized (A+B-C-D)/(A+B+C+D) value as signal, to indicate that it is burnt that sample deviates
The positional information of point, and then determine the present position of sample, sample then can be driven by driving unit to focal position.
It should be noted that the species and number of element included in non-perpendicular formula autofocus system illustrated in fig. 2 are only
Only it is schematic, those skilled in the art can be under the principle of the disclosure to the component kind and number in the first embodiment
Suitably deformed.For example, it can further increase any appropriate beam shaping element etc. in the light path of Fig. 2；In another example
Collimation lens 201, condenser lens 203, collimation lens 301, condenser lens 302 can be real by the lens group including multiple lens
It is existing.
As further example, Fig. 4 is schematically shown according to the non-perpendicular formula autofocus system of the disclosure
The layout of second embodiment, wherein second embodiment correspond to the situation that light source is exiting parallel formula light source.
As shown in figure 4, the laser 102 as exiting parallel formula light source sends directional light, the directional light is by expanding
Incidence (for example vertical incidence) is in condenser lens 203 after mirror 204, and the light beam oblique incidence focused on by condenser lens 203 is in level
The sample S surfaces of placement, the imaged lens 303 of light after being reflected through sample S surfaces image in the light of such as position sensor
On the target surface of detector 402.
For the principle of display location detector, Fig. 5 A and Fig. 5 B schematically show second according to the disclosure
The facula position when sample of embodiment is in focal position and off-focal position on position sensor.
If sample is in focal position, the light spot position on 402 target surface of position sensor is in target surface center position,
As shown in Figure 5A.If sample off-focal position, the light spot position on 402 target surface of position sensor is also offseting from target surface just
Middle position, as shown in Figure 5 B.In this way, the distance of sample off-focal can be converted into luminous point on 402 target surface of position sensor
Deviate the distance of center position.Thus, it can determine whether the location of sample, and sample finally moved into focus position by driving unit
Put.
Similarly, component kind and number included in the non-perpendicular formula autofocus system shown in Fig. 4 are also only shown
Meaning property, those skilled in the art can carry out the component kind in the second embodiment and number under the principle of the disclosure
Appropriate deformation.For example, it can further increase any appropriate beam shaping element in the light path of Fig. 4；In another example expand
Mirror 204, condenser lens 205 and imaging len 303 also can be the lens group for including multiple lens respectively.Therefore, unless separately saying
Bright, all lens in the disclosure can be made of single lens or lens group.
The above-mentioned non-perpendicular autofocus system of the disclosure can be included among the optical instrument of many, many
Optical instrument includes but not limited to the above-mentioned spectroscopic ellipsometers referred to.The light source of wherein non-perpendicular autofocus system can pass through
Optic splice is connected to optical instrument and carries or exterior light source, and the automatic of sample surfaces is focused on so as to fulfill optical instrument
Control；Simultaneously because make use of non-perpendicular formula autofocus system, the design space of the optical instrument internal is extended, so that
The space layout of optical instrument can preferably be optimized, and vernier focusing can also be realized to transparent sample.
Although attached drawing and it is described above in the present invention is illustrated and described in detail, these are illustrated and described should be by
It is considered illustrative or exemplary rather than restricted；The invention is not restricted to the disclosed embodiments.Art technology
Personnel are appreciated that and put into practice in claimed invention is put into practice, by studying accompanying drawing, open and appended claims
Other variations of the disclosed embodiments.
In the present specification, reference term " one embodiment ", " some embodiments ", " example ", " specific example " or
The description of " some examples " etc. means that combining the embodiment or example particular features, structures, materials, or characteristics described includes
In at least one embodiment of the present invention or example.In the present specification, schematic expression of the above terms necessarily pin
To be identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can any one or
Combined in an appropriate manner in multiple embodiments or example.In addition, without conflicting with each other, those skilled in the art
Can be by the different embodiments or example described in this specification and different embodiment or exemplary feature is combined and group
Close.
In the claims, word " comprising " is not precluded from other elements, and indefinite article "a" or "an" is not arranged
Except multiple.Discrete component or other units can meet the function of the multiple projects illustrated in the claims.Only in mutually not phase
Embodiment together or the only fact for being recited in mutually different dependent some features, are not meant to that these cannot be used to advantage
The combination of feature.In the case where not departing from spirit and scope, the protection domain of the application is covered in each implementation
Example or any possible combination of each feature being recited in mutually different dependent.
Any reference marker in the claims is understood not to limit the scope of the invention.
Claims (10)
- A kind of 1. non-perpendicular formula autofocus system, it is characterised in that including：Light source (10)；Incident module (20), is configured as receiving the light from light source transmitting, and the light received is focused on sample (S) On；Module (30) is emitted, is configured as receiving the light from sample reflection, and the light received is focused on optical detection On the target surface of device (40)；AndThe optical detector (40), is configured as that the optical signal converted electrical number of the target surface will be focused on, and for calculating Processing, the information of the focal position of the incident module to be calculated and determined out automatically；Wherein, from the incident module to the input path of the sample and from the sample to the emergent light of the outgoing module Road and the angle of the surface normal of the sample are not equal to zero.
- 2. non-perpendicular formula autofocus system according to claim 1, wherein when the light source is fiber guides formula light source (101) when, the incidence module includes aperture (201), collimation lens (202) and condenser lens (203).
- 3. non-perpendicular formula autofocus system according to claim 1, wherein when the light source is exiting parallel formula light source When, the incidence module includes extender lens (204) and condenser lens (205).
- 4. non-perpendicular formula autofocus system according to claim 2, wherein the hole diameter is not more than the core of optical fiber Footpath.
- 5. non-perpendicular formula autofocus system according to claim 1, wherein when the light source is fiber guides formula light source When, the outgoing module includes collimation lens (301) and condenser lens (302).
- 6. non-perpendicular formula autofocus system according to claim 1, wherein when the light source is exiting parallel formula light source When, the outgoing module includes imaging len (303).
- 7. the non-perpendicular formula autofocus system according to any one of claim 1,2,4 or 5, the optical detector is four Quadrant detector.
- 8. the non-perpendicular formula autofocus system according to any one of claim 1,3 or 6, the optical detector is position Detector.
- 9. a kind of optical instrument, it includes the non-perpendicular formula autofocus system according to any one of claim 1-8.
- 10. a kind of spectroscopic ellipsometers, its non-perpendicular formula included according to any one of claim 1-8 focuses on automatically is System.
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| CN202211612465.3A CN116047707A (en) | 2016-10-09 | 2016-10-09 | Non-vertical autofocus system and corresponding optical instrument |
| CN201610880380.1A CN107918184A (en) | 2016-10-09 | 2016-10-09 | Non-perpendicular autofocus system and corresponding optical instrument |
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| CN109434275A (en) * | 2018-09-27 | 2019-03-08 | 广东工业大学 | A kind of transparent material surface laser processing auxilary focusing method |
| CN115388765A (en) * | 2022-08-10 | 2022-11-25 | 睿励科学仪器（上海）有限公司 | Automatic focusing device for ellipsometry system |
| CN115388766A (en) * | 2022-08-10 | 2022-11-25 | 睿励科学仪器（上海）有限公司 | Automatic focusing method for ellipsometry system |
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| CN115388765A (en) * | 2022-08-10 | 2022-11-25 | 睿励科学仪器（上海）有限公司 | Automatic focusing device for ellipsometry system |
| CN115388766A (en) * | 2022-08-10 | 2022-11-25 | 睿励科学仪器（上海）有限公司 | Automatic focusing method for ellipsometry system |
| CN115388765B (en) * | 2022-08-10 | 2023-10-24 | 睿励科学仪器（上海）有限公司 | Automatic focusing device for ellipsometry system |
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