CN107917614A - A kind of microwave pressure sintering furnace - Google Patents
A kind of microwave pressure sintering furnace Download PDFInfo
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- CN107917614A CN107917614A CN201711419320.0A CN201711419320A CN107917614A CN 107917614 A CN107917614 A CN 107917614A CN 201711419320 A CN201711419320 A CN 201711419320A CN 107917614 A CN107917614 A CN 107917614A
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- microwave
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- furnace body
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- sintering furnace
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/14—Arrangements of heating devices
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- Engineering & Computer Science (AREA)
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- General Engineering & Computer Science (AREA)
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Abstract
The invention discloses a kind of microwave pressure sintering furnace, including furnace body, bell, attemperator and energy feedback device with the opening sealed connection of furnace body, energy feedback device to include magnetron and microwave excitation feed-in pressure-bearing device;The microwave excitation feed-in pressure-bearing device includes being arranged on the pipe on furnace body, the loudspeaker positioned at furnace interior, the cone pressure part in loudspeaker and the wave transparent fixing piece of limitation cone pressure part movement;The antenna of the magnetron is located in pipe, and antenna forms coaxial resonant cavity with pipe.The microwave of the present invention is after the excitation of coaxial resonant cavity and loudspeaker, enter through cone pressure part in furnace body, realize microwave energy-feeding, round tube inside diameter can be contracted to 5 30mm, the inner wall of cone pressure part and loudspeaker patch merga pass fixing piece is fixed, effectively prevent pressure leakage, improve the stressing conditions of furnace body and cone pressure part, greatly reduce the pressure-bearing pressure design of sintering furnace and energy feedback device and the difficulty of processing.
Description
Technical field
The invention belongs to chemical consersion unit, is specifically related to a kind of microwave pressure sintering furnace.
Background technology
Microwave chemical is since last century late nineteen eighties are worldwide used as frontier science emerging, in chemistry etc.
Grown rapidly in industry-by-industry.The practicality that scientific research at present, production all have microwave chemical reaction apparatus higher needs
Ask, how to allow the efficient, microwave chemical reaction apparatus of energy-saving and environmental protection to meet the different production requirement of industry-by-industry, in reaction pressure
Power, operating power, temperature control etc. all propose traditional microwave chemical reaction apparatus new challenge.
Document:Frequency conversion high-temperature steam micro-wave oven key technology research, it is indicated that, in general microwave reaction device, same
To find the preferable waveguide mouth of a coupling ratio inside one resonator is also relatively difficult thing, and matching one meets performance
It is required that waveguide mouth work almost account for more than the 80% of whole product experimental work amount.And microwave high-temperature reaction kettle not only needs
In view of microwave excitation problem, it is also necessary to consider high pressure pressure-bearing problem, design difficulty bigger.It is only simple to consider one side, without
Consider that the designing scheme of another aspect does not all meet actual demand.
The feed-in method and feed-in structure of microwave device are to realize the key and difficult point of air pressure, and by feed-in mode and feed-in
The limitation of structure, feed-in structure are difficult to ensure that the compressive property of feed-in part, and air-flow is be easy to cause from micro- by excessive pressure
Wave apparatus leaks so that internal pressure kept declines, heat losses rate is high, while the liquid stream leaked easily impacts microwave source, leads
The disabler of microwave source, equipment damage are caused, and there are great security risk.
At present, the feed-in bearing structure of microwave device mainly has:
One, using waveguide-blind plate feed-in pressure-bearing mode of conventional microwave device.
Two, using round bottom test tube type wave transparent element pressure-bearing mode feed-in.
Patent CN200610046206, using rectangular waveguide flange, quartz plate seal and pressure bearing, common is BJ26 microwave squares
Shape waveguide flange, rectangular opening size are 43.2*86.4mm;Such a microwave feed-in mode, in the rectangle opening of furnace body, seriously affects
The furnace body pressure design of autoclave;Due to microwave in the solution, it is particularly in aqueous solution, its penetration depth is limited, aqueous solution
In general penetration depth be no more than 3-8cm, reaction kettle needs up-sizing to produce, and in sintering process, is particularly large scale material
Microwave sintering when, due to microwave, penetration depth is limited in the material, such as the stronger carborundum of absorbing property or silicon nitride material
Material sintering, its penetration depth is no more than 5-10cm, therefore, either from increasing microwave heating power, or from homogeneous heating angle
Degree or microwave feed-in depth angle consider, be required to multiple microwave devices and uniformly match uses, because use rectangular waveguide energy regenerative when,
Multiple rectangle openings are opened up, on the pressure part of pressure vessel, what is generally selected is high-boron-silicon glass and quartz glass, in national standard
GB/T23259 and NB/T47017-2011 are explicitly pointed out, and pressure-bearing glass diameter is with allowing being inversely proportional for institute's pressure-bearing, rectangle right angle
Position stress concentration, opening size is big, greatly increase reaction kettle autoclave body and microwave feed-in window pressure-bearing pressure design and
Difficulty of processing.
Presented in patent CN201410471234 and CN201410471231 using round bottom test tube type wave transparent element pressure-bearing mode
Enter, connected on reacting furnace-e/or using large scale waveguide perforate, equally when multiple microwave devices are applied in combination, also due to by
The bore size of pressure vessel and corresponding the number of openings limit, and have seriously affected being evenly arranged for microwave device, while also increase
The autoclave body of autoclave and the pressure-bearing pressure design and difficulty of processing of microwave feed-in window;Meanwhile microwave magnetron antenna
Length is generally between 25-50mm, in large-sized high-pressure bottle, the universal 10mm of thickness of 2 mounting flange faces and kettle wall
More than, the exposed length of the standard magnetron antenna of industrial common 2450MHz and 915MHz and rectangular cavities are difficult to
With combination of stimulation microwave.
In the prior art, limited by microwave energy-feeding bearing structure, greatly increase reaction unit pressure design and
Difficulty of processing and the use scope for limiting microwave high pressure sintering equipment.
In microwave sintering, there are weak, the multiple energy feedback devices of need since the electromagnetic field of sintering zone has by force in different zones
Uniform matched design, homogenizes the electromagnetic field of sintering zone, simultaneously because sintering temperature is higher, it is necessary to which big heating power, also needs
Multiple energy feedback devices are set in equipment, to increase the heating power of equipment.Particularly after large-scale production, heating often needs
Dozens or even hundreds of energy feedback device is wanted to use at the same time, this proposes new choose to microwave energy-feeding window and its pressure-bearing design
War.It is existing to realize that technology is difficult to meet the needs of amplification production.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of microwave pressure sintering furnace, bearing capacity is good, and uniformly installation is more
A efficient microwave energy feed system, uniformity of temperature profile, sintering effect are good.
The present invention includes furnace body, bell, attemperator and energy feedback device with the opening sealed connection of furnace body, microwave
Energy feed system includes magnetron and microwave excitation feed-in pressure-bearing device;
The microwave excitation feed-in pressure-bearing device includes being arranged on the pipe on furnace body, the loudspeaker positioned at furnace interior, position
In the cone pressure part in loudspeaker and the wave transparent fixing piece of limitation cone pressure part movement;
The antenna of the magnetron is located in pipe, and antenna forms coaxial resonant cavity, coaxial resonant cavity and loudspeaker with pipe
Form microwave excitation device.
The round tube inside diameter is 5-30mm.The length of pipe is the 1/4-1/2 of transmission microwave wavelength.Reducing furnace body wall thickness
While spending, ensure that multiple microwave devices are uniformly distributed and microwave efficiently encourages energy regenerative, realize the being heated evenly property of material.
Loudspeaker bore a height of 10~100mm, and bore be 45~180mm, preferably bore high 20~50mm, and bore is 60~
140mm。
The cone pressure part material is polytetrafluoroethylene (PTFE), quartz glass, high purity aluminium oxide, high-boron-silicon glass, PEEK
At least one of plastics.Material selection electromagnetic wave transparent material, while there is pressure-resistant performance.
Gasket is set between the cone pressure part and loudspeaker inner wall, between cone pressure part and wave transparent fixing piece
Gasket is set.Gasket material is at least one of polytetrafluoroethylene (PTFE), fluorubber, nitrile rubber.
The wave transparent fixing piece is hollow metal flange, or the tablet that wave transparent material is made.Fixing piece is hollow gold
When belonging to flange, the gasket for being used for stress buffering is equipped between flange and cone pressure part.
The energy feedback device is uniformly arranged multiple on furnace body.
The bell is tight by bolt handle with furnace body, and gasket seal is equipped between bell and furnace body.
The feed inlet is arranged on bell, and discharge port is arranged on bottom of furnace body, and feed inlet is respectively provided with valve with discharge port,
Feed inlet sets one or more.
The turntable connected present invention additionally comprises motor and with motor transmission shaft, the attemperator are placed on turntable
On, material is placed with inside attemperator.
Raised or groove is provided with the turntable, is provided with attemperator corresponding with above-mentioned raised or groove
Groove or protrusion.When protrusion is provided with turntable, the setting of attemperator lower part is fluted, conversely, then opposite.
Pressure measuring unit, temperature measuring equipment, releasing pressure automatically solenoid valve and safety valve are provided with the bell;
The controller for controlling temperature and pressure in the furnace body is additionally provided with outside the furnace body;
The furnace body is connected with pressue device.
The beneficial effects of the invention are as follows:The antenna of magnetron is located in pipe, and antenna forms coaxial resonant cavity with pipe, together
Axis resonator presses the formation microwave excitation device of certain dimension scale and loudspeaker combination, and microwave is encouraged through microwave excitation device
Afterwards, enter through cone pressure part in furnace body, realize the efficient energy regenerative of microwave, the microwave feed-in mouth on furnace body is pipe, pipe
Internal diameter can be contracted to 5-30mm, and the inner wall patch merga pass wave transparent fixing piece of cone pressure part and loudspeaker is fixed, and is effectively prevented
Gas is leaked from microwave feed-in mouth, in the case where ensureing microwave effectively excitation, is greatly reduced the bore size of furnace body, is improved
Hole shape, improves the stressing conditions of furnace body, microwave feed-in mouth and cone pressure part, can make microwave pressure sintering furnace
The use scope for the pressure of higher, extending microwave pressure sintering furnace is improved with pressure, is uniformly arranged on furnace body multiple micro-
Ripple energy feed system, is realizing while being evenly heated of microwave pressure sintering furnace, greatly reduces microwave pressure sintering furnace and micro-
The pressure-bearing pressure design of ripple energy feed system and the difficulty of processing.Microwave load point is moved in sintering furnace at the same time, microwave can penetrate
To the more center of reaction system, the influence that reaction effect weakens caused by the depth of microwave penetration is reduced, same anti-
Answer in system, larger sized sintering furnace can be set.
Brief description of the drawings
Fig. 1 is the structure diagram of energy feedback device of the present invention.
Fig. 2 is the structure diagram of the present invention.
In figure, 1 furnace body, 2 magnetrons, 3 pipes, 4 wave transparent fixing pieces, 5 cone pressure parts, 6 gaskets, 7 antennas, 8
Coaxial resonant cavity, 9 energy feedback devices, 10 bolts, 11 bells, 12 safety valves, 13 pressure measuring units, 14 motors, 15 temperature measuring equipments,
16 turntables, 17 attemperators, 18 materials, 19 air inlets, 20 loudspeaker, 21 exhaust outlets.
Embodiment
As depicted in figs. 1 and 2, the present invention includes furnace body 1, bell 11, attemperator with the opening sealed connection of furnace body 1
17 and energy feedback device 9, energy feedback device 9 include magnetron 2 and microwave excitation feed-in pressure-bearing device;
The microwave excitation feed-in pressure-bearing device includes being arranged on the pipe 3 on furnace body 1, the loudspeaker inside furnace body 1
20th, the wave transparent fixing piece 4 of 5 movement of the cone pressure part 5 in circular cone 20 and limitation cone pressure part;
The antenna 7 of the magnetron 2 is located in pipe 3, and antenna 7 forms coaxial resonant cavity 8, coaxial resonant cavity 8 with pipe 3
Microwave excitation device is formed with loudspeaker 20.
Furnace body 1 and bell 11 are made of Special high-strength metallic plate, to ensure its voltage endurance capability.Cone pressure part
5 by pressure seal in furnace body 1, prevent the gas in furnace body 1 from being leaked from pipe 3.If being not provided with cone pressure part 5, let out
The gas of dew can damage energy feedback device 9, and sintering furnace can not ensure pressure needed for reaction, and there are security risk.
Magnetron 2 is fixed by screw and fixed plate with furnace body 1, and is compressed with pipe 3, and the antenna 7 of magnetron 2 loads circle
Pipe 3, forms coaxial resonant cavity 8, and the microwave excitation device that coaxial resonant cavity 8 is formed with loudspeaker 20 effectively swashs microwave
Encourage.Pipe 3 and loudspeaker 20 are made of high duty metal.
This microwave pressure sintering furnace, the pipe 3 of the entrance of antenna 7 of magnetron 2, antenna 7 form coaxial resonant cavity with pipe 3
8, after microwave combines effective excitation of the microwave excitation device formed by coaxial resonant cavity 8 with loudspeaker 20, held through cone
Casting die 5, realizes the controllable efficient energy regenerative in microwave transmission direction;The feed-in mouth of furnace body is optimized for pipe, pressure part is optimized for justifying
Cone pressure part 5, and be bonded with the inner wall of loudspeaker 20, it is fixed on by wave transparent fixing piece 4 in loudspeaker, cone pressure part 5 will
Pressure seal improves the sealing intensity of whole energy feedback device 9 in furnace body 1, effectively prevents gas in furnace body from microwave
Feed-in mouth leaks, and in the case where ensureing that microwave effectively encourages and conduction orientation is controllable, greatly improves furnace body 1 and cone
The stressing conditions of pressure part 5, while cone pressure part 5 is not exposed to outside, it is not easy to damage.
If without cone pressure part 5, the application will be unable to pressure required during safeguard work.If not with it is coaxial humorous
Shake loudspeaker 20 of the chamber by certain size matching combination, but uses rectangle or round bottom test tube type wave transparent element, and the application is by nothing
Method forms microwave excitation device, so that microwave excitation and control microwave transmission direction cannot be realized effectively.
3 internal diameter of pipe is 5-50mm, is preferably 5-30mm, more preferably 10-20mm.Number of patent application is
200610046206.3 waveguide pipe 9 is the rectangular section of 90 × 45mm, need to be equipped with the pressure-bearing glass of a diameter of 120mm.At the same time
Due to rectangle opening, square position stress is easily concentrated.The aperture for the through hole 5 that number of patent application is 201410471231.0 is
20mm-30mm, all sectional dimension far above the application.The area of section of pipe 3 is smaller, and bearing capacity is stronger.Although this Shen
The size of pipe please is smaller, but the loudspeaker 20 being provided in furnace body are matched by certain size with coaxial resonator 8 and are combined into
Microwave excitation cavity, can effectively microwave and control microwave transmission direction, while microwave load point is moved in furnace body, microwave can be worn
Thoroughly to the more center of reaction system.Realize evenly being heated for reaction system, and strengthen promotion of the microwave on reaction to influence.
Industry heating is often 12.24cm with microwave 2.45GHz frequency wavelengths, and the length of pipe 3 is 1/4 to the 1/2 of wavelength,
Preferably 3.06-6.12cm.The loudspeaker 20 bore a height of 10~100mm, and bore is 45~180mm, preferably bore it is high by 20~
50mm, bore are 60~140mm.Pressing force container design codes, the technology that number of patent application is 200610046206.3 are implemented
During, the sintering furnace body of its φ 350mm, the 90*45mm rectangle openings being difficult to realize on Same Latitude more than at 2 and at 2.Together
When φ 120mm pressure-bearing glass, what sintering furnace allowed to use is no more than 2.5mpa.During number of patent application is 201410471231.0,
Such as high-tension apparatus, the thickness of its pressure part mounting flange face and furnace wall is required in more than 10mm, microwave magnetron antenna length
Generally between 25-50mm, in this structure, exposed antenna length is difficult to form effective microwave with its pressure-resistant waveguide inner wall
Resonator;Meanwhile during the microwave transmission of its rear end, it need to equally use BJ26 (rectangular waveguide, 86.3 × 43.2mm of size) or BY22
Waveguide more than (circular waveguide, size φ 97.9mm) or its size.By taking the sintering furnace body of φ 350mm as an example, such a structure
The 90*45mm rectangle openings being difficult to realize on Same Latitude more than at 2 and at 2.And in this application, as using 10~20mm
Round hole microwave feed-in, can realize 4 and more than 4 microwaves easily in the case where not influencing furnace body stressing conditions, on Same Latitude
Feed-in perforate.Small size perforate at the same time, processing are easier.Built in bearing plate, its fixing piece 4 is special with respect to this two without stress
Profit, fixing piece processing is easier, and material therefor is less, and quality is lighter.
5 material of cone pressure part is polytetrafluoroethylene (PTFE), quartz glass, high purity aluminium oxide, high-boron-silicon glass, PEEK
At least one of plastics.
Different 5 materials of cone pressure part can be selected, so as to ensure cone pressure part 5 according to different needs
Bearing capacity.5 material of cone pressure part can use a type of material, or carry out phase using polytype material
Mutually overlapping.
When using quartz glass, high purity aluminium oxide, high-boron-silicon glass when material as cone 5 material of pressure part,
Between 20 inner wall of cone pressure part 5 and loudspeaker, stress buffering has been set to make between cone pressure part 5 and wave transparent fixing piece 4
Gasket.6 material of gasket is at least one of polytetrafluoroethylene (PTFE), fluorubber, nitrile rubber.
The wave transparent fixing piece 4 is hollow metal flange, or the tablet that wave transparent material is made.
20 edge of loudspeaker is equipped with link flange face, is fixed on cone pressure part 5 by being linked with hollow metal flange
In loudspeaker 20, gasket 6 plays sealing and stress cushioning effect, hollow metal flange, while fixed cone pressure part 5
Microwave can effectively be passed through.
The energy feedback device 9 is uniformly arranged multiple on furnace body.
Microwave is as a kind of energy Wave heating, its penetration depth is always to restrict the main problem of its amplification production, generally
Sintered material, the Effective depth penetration of microwave is 5-10cm, according to material wave-sucking performance and the situation for the treatment of capacity, is often needed
Multiple energy feedback devices 9 are uniformly arranged on furnace body to realize the uniform energy regenerative of microwave pressure sintering furnace.Because micro- using this
Ripple energy feed system 9, furnace body 1 are welded and fixed with pipe 3, and the internal diameter of pipe small can arrive 5-30mm, greatly improve furnace body 1 and micro-
The bearing capacity of ripple energy feed system 9, sets multiple energy feedback devices 9 on furnace body 1, will not increase microwave pressure burning
The pressure design of freezing of a furnace and the difficulty of processing, while equipment allows to use to the pressure environment of higher.At the same time by microwave feed-in
Point is moved in furnace body, and microwave can be penetrated to the more center of reaction system, is reduced and is reacted caused by the depth of microwave penetration
The influence of effect reduction, in same reaction system, can set larger sized furnace body.
The bell 11 is tight by 10, bolt with furnace body 1, and gasket seal is equipped between bell and furnace body.Connecting portion
Compressive property is good, and good airproof performance, effectively prevents microwave leakage, ensures that the air-tightness of furnace body and the leakage of microwave are permitted in national standard
Perhaps in the range of.
Pressure measuring unit 13, temperature measuring equipment 15, safety valve 12 are provided with the bell 11.Use is additionally provided with outside the furnace body 1
In the controller for controlling temperature and pressure in the furnace body 1.
Be additionally provided with air inlet 19 and exhaust outlet 21 on the furnace body 1, for deflating to punching in furnace body 1, keep high pressure or
Vacuum environment.
Pressure measuring unit 13 is used to detect and control the pressure during work of microwave pressure sintering furnace, since pressure sensor can be by
Microwave interference, therefore setting wave suppression device is needed in pressure detecting position, this wave suppression device can be single hole or gather circular small
The metallic plate in hole, it is ensured that the accuracy of pressure detecting, pressure measuring unit 13 are connected with controller.Pressure measuring unit 13 will detect control letter
Controller number is sent to, controller adjusts the pressure in furnace body by adjusting discharge port 18, the valve 17 of feed inlet 16.
Temperature measuring equipment 15 is used to detect and control the temperature during work of microwave pressure sintering furnace, and temperature measuring equipment 15 can use electricity
Even thermometric or infrared measurement of temperature, temperature measuring equipment 15 are connected with controller, and temperature measuring equipment 15 is sent to controller by control signal is detected, and are controlled
The feed-in microwave power size of the magnetron 2 of device control energy feedback device 9 processed, realizes temperature control, can use multi-point combination
Formula observing and controlling temperature, to ensure the uniformity of thermal field.
The turntable 16 for further including motor 14 and axis connection is driven with motor 14 of the present invention, the attemperator 17 are put
Put on turntable 16, material is placed with inside attemperator 17.Preferably, it is provided with the turntable 16 raised or recessed
Groove, groove corresponding with above-mentioned raised or groove or protrusion are provided with attemperator 17.Turntable 16 rotates material 18, can be with
Allow the radiation for receiving microwave of material 18 evenly.
Material 18 is added in attemperator 17, open bell 11, be put into attemperator 17, after, by bell 11 with
Furnace body 1 is tightly connected;Pass through the pressure needed for controller setting reaction, temperature and time;By pressue device by microwave pressure
Sintering furnace is forced into required pressure, opens motor 14, starts energy feedback device 9, microwave is by energy feedback device 9 to anti-
Thing is answered to be heated, temperature measuring equipment 15 detects the temperature of reactant, and detection information is fed back to controller, and controller adjustment is micro-
The size of wave power;Treat that temperature and pressure reaches setting value, after the time for keeping setting, controller closes energy feedback device 9
And motor 14, heating, rotation stop.
In order to ensure safety, safety valve 12 is set on bell 11, when the pressure in microwave pressure sintering furnace exceedes design
Pressure is that safety valve 12 can automatically spring open.
Using identical microwave frequency, identical size etc., but the microwave pressure sintering furnace that pressure-bearing device is different, pass through contrast
The performances such as pressure-resistant and heating, it is as follows to obtain detection table.
The performance test table of 1 φ 350mm microwave pressure sintering furnaces of table
From table 1 it follows that for the identical microwave device of diameter, bearing structure using the present invention can be notable
Reduction pressure-bearing part thickness, improve maximum allowble pressure, and Same Latitude (is same for the sintering furnace of setting
The microwave feedthrough set on highly) it is more, the being heated evenly property of reactive material can be improved.
Claims (10)
- A kind of 1. microwave pressure sintering furnace, it is characterised in that the bell including furnace body (1), with the opening sealed connection of furnace body (1) (11), attemperator (17) and energy feedback device (9), energy feedback device (9) include magnetron (2) and microwave excitation feed-in Pressure-bearing device;The microwave excitation feed-in pressure-bearing device includes pipe (3), the loudspeaker positioned at furnace body (1) inside being arranged on furnace body (1) (20), the cone pressure part (5) in loudspeaker (20) and the mobile wave transparent fixing piece of limitation cone pressure part (5) (4);The antenna (7) of the magnetron (2) is located in pipe (3), and antenna (7) forms coaxial resonant cavity (8) with pipe (3).
- 2. microwave pressure sintering furnace according to claim 1, it is characterised in that pipe (3) internal diameter is 5-30mm, circle The length for managing (3) is the 1/4-1/2 of transmission microwave wavelength.
- 3. microwave pressure sintering furnace according to claim 1, it is characterised in that loudspeaker (20) cone a height of 10~ 100mm, bore are 45~180mm.
- 4. according to the microwave pressure sintering furnace described in claim 1,2 or 3, it is characterised in that cone pressure part (5) material Matter is at least one of polytetrafluoroethylene (PTFE), quartz glass, high purity aluminium oxide, high-boron-silicon glass, PEEK plastics.
- 5. microwave pressure sintering furnace according to claim 4, it is characterised in that cone pressure part (5) and loudspeaker (20) Gasket (6) is set between inner wall, gasket (6) is set between cone pressure part (5) and wave transparent fixing piece (4).
- 6. microwave pressure sintering furnace according to claim 5, it is characterised in that the wave transparent fixing piece (4) is hollow Metal flange, or the tablet that wave transparent material is made.
- 7. microwave pressure sintering furnace according to claim 6, it is characterised in that the energy feedback device (9) is in furnace body (1) it is uniformly arranged on multiple.
- 8. according to the microwave pressure sintering furnace described in claim 1,2 or 3, it is characterised in that further include motor (14) and and Motor (14) is driven the turntable (16) of axis connection, and the attemperator (17) is placed on turntable (16), attemperator (17) it is internal to be placed with material.
- 9. microwave pressure sintering furnace according to claim 8, it is characterised in that be provided with protrusion on the turntable (16) Or groove, groove corresponding with above-mentioned raised or groove or protrusion are provided with attemperator (17).
- 10. microwave pressure sintering furnace according to claim 9, it is characterised in thatPressure measuring unit (13), temperature measuring equipment (15), releasing pressure automatically solenoid valve and safety valve (12) are provided with the bell (11);The controller for controlling the furnace body (1) interior temperature and pressure is additionally provided with outside the furnace body (1);The furnace body (1) is connected with pressue device.
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